KR20030026516A - Technology improvement of chemical gas sensor - Google Patents
Technology improvement of chemical gas sensor Download PDFInfo
- Publication number
- KR20030026516A KR20030026516A KR1020010059533A KR20010059533A KR20030026516A KR 20030026516 A KR20030026516 A KR 20030026516A KR 1020010059533 A KR1020010059533 A KR 1020010059533A KR 20010059533 A KR20010059533 A KR 20010059533A KR 20030026516 A KR20030026516 A KR 20030026516A
- Authority
- KR
- South Korea
- Prior art keywords
- nio
- carried out
- gas sensor
- temperature
- dopants
- Prior art date
Links
- 238000005516 engineering process Methods 0.000 title description 11
- 239000000126 substance Substances 0.000 title description 3
- 238000000034 method Methods 0.000 claims abstract description 9
- 238000010438 heat treatment Methods 0.000 claims abstract description 6
- 239000000203 mixture Substances 0.000 claims description 3
- 239000000843 powder Substances 0.000 abstract description 11
- 238000009826 distribution Methods 0.000 abstract description 9
- BBMCTIGTTCKYKF-UHFFFAOYSA-N 1-heptanol Chemical compound CCCCCCCO BBMCTIGTTCKYKF-UHFFFAOYSA-N 0.000 abstract description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract description 4
- 239000002019 doping agent Substances 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000000498 ball milling Methods 0.000 abstract description 2
- 238000007650 screen-printing Methods 0.000 abstract description 2
- 238000005245 sintering Methods 0.000 abstract description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 238000001035 drying Methods 0.000 abstract 1
- 239000004570 mortar (masonry) Substances 0.000 abstract 1
- 238000005070 sampling Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 239000002245 particle Substances 0.000 description 17
- 230000035945 sensitivity Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000005842 biochemical reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000006911 enzymatic reaction Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011540 sensing material Substances 0.000 description 1
- 230000035943 smell Effects 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- 235000019640 taste Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G41/00—Compounds of tungsten
- C01G41/02—Oxides; Hydroxides
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G53/00—Compounds of nickel
- C01G53/04—Oxides; Hydroxides
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/0037—NOx
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Combustion & Propulsion (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
▶ 발명이 속하는 기술분야▶ Technical Field
센서 기술은 검지량에 따라 광, 전기, 자기, 열, 초음파, 역학 등을 정밀 측정 감지하기 위한 물리량 검지 센서 기술과, 습도, 가스, 이온, 냄새, 맛 등을 검출하기 위한 화학량 검지센서, 그리고 생· 화학 그리고 효소 반응을 검지 하기 위한 바이오센서 기술로 분리 할 수 있고 이를 구현하기 위한 다양한 기술이 요구되고 있다.The sensor technology includes physical quantity detection sensor technology for precisely detecting light, electricity, magnetic, heat, ultrasonic waves, and dynamics according to the detected amount, and chemical quantity detection sensor for detecting humidity, gas, ions, smells, and tastes, and Biosensor technology for detecting biochemical and enzymatic reactions can be separated and various technologies are required to implement this.
본 기술은 화학량 중 가스를 검출하기 위한 기체센서 기술이고, 특히 NOx 가스를 정밀 검출하는 산화물 센서 제조 기술에 관한 것이다. WO3는 NOx 가스를 감지하기 위한 감지 물질로써 알려져 있어 WO3를 모물질로 하고 dopants로써 NiO를 첨가함으로써 입자크기와 분포를 제어하여 센서의 특성을 개선하는 기술이다.The present technology relates to a gas sensor technology for detecting a gas in a stoichiometry, and more particularly to an oxide sensor manufacturing technology for precisely detecting NOx gas. WO 3 is known as a sensing material for detecting NOx gas. It is a technology that improves the characteristics of the sensor by controlling particle size and distribution by adding WO 3 as a parent material and adding NiO as dopants.
▶ 그 분야의 종래기술▶ Prior art in that field
① 종래의 일예① Conventional example
수용액을 이용한 분말 합성법에 의한 미세분말 제조법이 보고됨Report on the preparation of fine powder by powder synthesis using aqueous solution
② 종래의 다른예② Other conventional example
WO3분말에 TiO2, SiO2, Bi2O3, BaCO3등을 첨가하여 전도성 변화에 따른 센서특성 개선이 시도되고 있음.TiO 2 , SiO 2 , Bi 2 O 3 , BaCO 3, etc. are added to WO 3 powder to improve the sensor characteristics according to the conductivity change.
▶ 기존에 나와있는 기술의 문제점▶ Problems of existing technology
① 수용액의 분말 합성법은 미세 분말을 얻을수 있으나 공정이 복잡하고 수율이 떨어짐.① Powder synthesis of aqueous solution can obtain fine powder, but the process is complicated and yield is low.
② WO3에 기존 첨가제를(TiO2, SiO2, Bi2O3, BaCO3) 넣어 제조한 센서의 감지특성 개선이 크지 않고 안정성과 재현성이 떨어짐.② The detection characteristics of the sensor prepared by adding the existing additives (TiO 2 , SiO 2 , Bi 2 O 3 , BaCO 3 ) to WO 3 are not significant and the stability and reproducibility are poor.
기존 기술은 산화물 분말은 열처리 할 때 그 입자 크기가 수 ㎛크기로 입자가 성장하고 입도분포도 불균일해서 화학센서의 표면반응에 의한 감지시 비표면적 감소로 감도저하가 문제시 되고있다.In the conventional technology, when the oxide powder is heat-treated, its particle size grows to several μm and its particle size distribution is uneven. Therefore, the sensitivity decrease due to the reduction of specific surface area when sensing by surface reaction of chemical sensor.
이런 문제점을 해결하기 위하여 NiO를 첨가함으로써 WO3의 고온 열처리시에 입자 성장을 억제하고 입도분포를 개선하여 고감도의 NOx가스센서를 구현하는 기술임.In order to solve this problem, NiO is added to suppress particle growth during the high temperature heat treatment of WO 3 and to improve the particle size distribution to realize a high sensitivity NO x gas sensor.
도 1은 WO3에 NiO 0.1mol% 첨가 후 900℃/2h 열처리한 분말의 입자형상, 입자크기, 입도분포를 보여주고 있다.FIG. 1 shows the particle shape, particle size, and particle size distribution of a powder heat-treated at 900 ° C./2 h after adding 0.1 mol% of NiO to WO 3 .
도 2는 첨가제를 넣지 않은 WO3를 900℃/2h 열처리한 분말의 입자형상, 입자크기, 입도분포를 보여주고 있다.Figure 2 shows the particle shape, particle size, particle size distribution of the powder obtained by heat treatment of WO 3 without the additive 900 ℃ / 2h.
도 3은 WO3에 NiO 첨가 유무에 따른 센서감도 특성 및 평균 입자 크기를 비교 표시 하였다.FIG. 3 shows the comparison of sensor sensitivity and average particle size with or without NiO added to WO 3 .
1) 출발원료1) Starting material
- WO3의 모물질에 NiO를 Dopants 로써 첨가하였다.NiO was added as Dopants to the parent material of WO 3 .
2) 실험방법2) Experiment Method
- WO3의 모물질에 NiO mol%를 달리하여 혼합하였다..Mix different amounts of NiO mol% to the parent material of WO 3 .
- 지르코니아 볼을 사용하여 12시간 ball-milling을 실시하였다.-12 hours ball-milling was performed using zirconia balls.
- 120℃ oven에서 건조를 실시함.-Dry in 120 ℃ oven.
- 건조된 분말을 Al2O3유발을 이용하여 미립화 하였다.The dried powder was atomized using Al 2 O 3 induction.
- 직경 1.2㎝ 두께 1㎜의 벌크시편을 제조하였다.A bulk specimen having a diameter of 1.2 cm and a thickness of 1 mm was prepared.
- 전기로에서 900℃, 2시간 소결하였다.Sintering was performed at 900 ° C. for 2 hours in an electric furnace.
- 1-heptanol을 이용하여 paste를 제조-Manufacture paste using 1-heptanol
- Screen printing 방법으로 후막제조-Thick film manufacturing by screen printing method
- 주사전자현미경으로 입자크기 및 입도분포 관찰-Observation of particle size and particle size distribution by scanning electron microscope
- 계측기를 사용하여 전도도 변화를 측정.-Measure the change in conductivity using the instrument.
3) 실험결과3) Experiment result
- NiO를 0.1, 1, 10 mol% 첨가 시 900℃/2h 열처리 후 입자성장을 억제해서 ㎛크기의 입자와, 균일한 입도분포를 갖는 분말을 얻었다.When 0.1, 1, and 10 mol% of NiO was added, the grain growth was suppressed after heat treatment at 900 ° C./2 h to obtain particles having a size of μm and a powder having a uniform particle size distribution.
- NiO 1mol% 첨가로 NOx가스에 대한 향상된 감도를 보여주었다.Addition of 1 mol% of NiO showed improved sensitivity to NO x gas.
- NiO 10mol% 첨가시 NiWO4의 제2상이 생성되었다.The addition of 10 mol% of NiO produced a second phase of NiWO 4 .
- NiO를 0.1, 1, 10mol% 첨가 시 900℃ 열처리 후 입자성장을 억제 할 수 있었으며 입도분포가 우수한 미세구조를 갖도록 제조했다.-When 0.1, 1, 10mol% of NiO was added, it was possible to inhibit grain growth after 900 ℃ heat treatment and to have a fine structure with good particle size distribution.
- NiO 첨가로 NOx가스에 대한 우수한 감도 특성을 얻을 수 있었다. - WO3에 NiO를 고용한계 이상 첨가시 NiWO4의 상이 생성되었다.-NiO addition resulted in excellent sensitivity for NO x gas. Addition of NiO above the solid solution limit to WO 3 produced a phase of NiWO 4 .
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2001-0059533A KR100449427B1 (en) | 2001-09-26 | 2001-09-26 | Method for fabricating of gas sensing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2001-0059533A KR100449427B1 (en) | 2001-09-26 | 2001-09-26 | Method for fabricating of gas sensing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20030026516A true KR20030026516A (en) | 2003-04-03 |
| KR100449427B1 KR100449427B1 (en) | 2004-09-21 |
Family
ID=29562246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR10-2001-0059533A KR100449427B1 (en) | 2001-09-26 | 2001-09-26 | Method for fabricating of gas sensing device |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR100449427B1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102248737A (en) * | 2011-04-14 | 2011-11-23 | 天津大学 | Cr2O3 or NiO porous film material using WO3 as base material and method for manufacturing air-sensitive sensor |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100981166B1 (en) * | 2007-11-23 | 2010-09-10 | 고려대학교 산학협력단 | Fast responding oxide semiconductor-type gas sensor and fabrication method thereof |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59192950A (en) * | 1983-04-15 | 1984-11-01 | Hitachi Ltd | Detecting element for carbon monoxide |
| KR100246719B1 (en) * | 1997-02-04 | 2000-04-01 | 박호군 | Nox gas sensor using wo3 sensing layer and its manufacturing method |
| KR100223818B1 (en) * | 1997-04-07 | 1999-10-15 | 구자홍 | Nitrogen dioxide gas sensor and its manufacturing method |
| US6113859A (en) * | 1998-02-04 | 2000-09-05 | Korea Institute Of Science And Technology | Bar-type NOx gas sensor having WO3 sensing film |
-
2001
- 2001-09-26 KR KR10-2001-0059533A patent/KR100449427B1/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102248737A (en) * | 2011-04-14 | 2011-11-23 | 天津大学 | Cr2O3 or NiO porous film material using WO3 as base material and method for manufacturing air-sensitive sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100449427B1 (en) | 2004-09-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Nakayama et al. | Oxide ionic conductivity of apatite type Nd9· 33 (SiO4) 6O2 single crystal | |
| Ying et al. | Sol–gel processed TiO2–K2O–LiZnVO4 ceramic thin films as innovative humidity sensors | |
| Dong et al. | Heterogeneous iridium oxide/gold nanocluster for non-enzymatic glucose sensing and pH probing | |
| CN101811888B (en) | Method for preparing composite air-sensitive membrane of carbon nano tube embedded with oxide quantum dots | |
| Qiu et al. | Investigation of CO2 sensor based on NASICON synthesized by a new sol–gel process | |
| Zhang et al. | A mixed-potential type NH3 sensors based on spinel Zn2SnO4 sensing electrode | |
| Chen et al. | Calcination temperature dependence of synthesis process and hydrogen sensing properties of In-doped CaZrO3 | |
| Ravikumar et al. | Gas sensing nature and characterization of Zr doped TiO2 films prepared by automated nebulizer spray pyrolysis technique | |
| KR20030026516A (en) | Technology improvement of chemical gas sensor | |
| Zhang et al. | Lanthanum strontium manganite powders synthesized by gel‐casting for solid oxide fuel cell cathode materials | |
| Zhou et al. | Synthesis, processing and characterization of nasicon solid electrolytes for CO2 sensing applications | |
| Liu et al. | Synthesis of La0. 85Sr0. 15Ga0. 85Mg0. 15O2. 85 materials for SOFC applications by acrylamide polymerization | |
| JP2000053479A (en) | Production of ceramic diffusion inhibiting layer and use of the layer | |
| Chen et al. | Structure, sintering behavior and dielectric properties of silica-coated BaTiO3 | |
| KR900005614B1 (en) | Manufacturing method of exchaust gas sensor | |
| CN107884464A (en) | A kind of preparation method of more molybdophosphate azacyclo- salt super molecular compound modified electrodes | |
| CN113004039B (en) | Tungsten bronze type high-temperature thermistor material and preparation method thereof | |
| Liu et al. | Highly sensitive mixed-potential type ethanol sensors based on stabilized zirconia and ZnNb 2 O 6 sensing electrode | |
| Bag et al. | High performance sol–gel synthesized Ce 0.9 Sr 0.1 (Zr 0.53 Ti 0.47) O 4 sensing membrane for a solid-state pH sensor | |
| Shan et al. | Improving the stability of an amperometric ammonia sensor based on BaZr0. 8Y0. 2O3-δ electrolyte with a volatile B2O3 sintering additive | |
| JPS60200161A (en) | Zirconia porcelain and its preparation | |
| CN105044187A (en) | Sensor for detecting nitrogen oxide content in car exhaust | |
| JPS63200055A (en) | Oxygen sensor element and its manufacture | |
| CN111559911B (en) | High-sensitivity negative temperature coefficient thermistor material and preparation method thereof | |
| Li et al. | Effect of the sintering temperature on electrical properties of the Na0. 54Bi0. 46TiO2. 96 compound |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant | ||
| FPAY | Annual fee payment |
Payment date: 20090710 Year of fee payment: 6 |
|
| LAPS | Lapse due to unpaid annual fee |