KR20030008642A - Alarm system of dc power generator and control method of the same - Google Patents

Abstract

PURPOSE: An alarm system for controlling erroneously generated voltage of power supply voltage generator and control method thereof is provided to alarm an erroneous status or block a power supply voltage, by detecting an unstable power supply voltage of a power supply voltage generator. CONSTITUTION: A voltage dividing part(110) divides and outputs an input voltage supplied from a DC power supply voltage generator. A voltage compensation part(120) amplifies divided voltages from the voltage dividing part(110). A current amplifier part(130) amplifies and outputs a current component of a voltage-compensated output signal. A control part(140) detects a level of a voltage-compensated and current-amplified signal and compares a detected voltage level with a reference voltage. The control part(140) outputs alarm information to an alarm device(150) or to an interlock switch(160) based on a comparison result. The alarm device(150) is controlled by the control part(140) to output alarm information. The interlock switch(160) is controlled by the control part(140), and blocks a power supply voltage supplied to an external electric apparatus.

Description

ALARM SYSTEM OF DC POWER GENERATOR AND CONTROL METHOD OF THE SAME

The present invention relates to an alarm system, and more particularly, to an alarm system for detecting an error of a DC power generator of a semiconductor manufacturing apparatus and outputting alarm information and a control method thereof.

A semiconductor manufacturing apparatus, for example, a DC power generator for supplying power such as an etching apparatus, damages a semiconductor manufacturing apparatus or an internal part thereof connected to the DC power generator by a drop phenomenon of a supply voltage. Since the semiconductor manufacturing apparatus is expensive equipment, this increases the downtime of the equipment due to the increase in repair cost and delay in supplying replacement parts.

In addition, when the voltage drop phenomenon and the equipment down phenomenon occur, the semiconductor devices (eg, capacitors, etc.) provided on the PCB substrate are damaged due to damage of the internal parts, thereby increasing the repair cost.

In addition, even when an error occurs in the DC power generator, the error state cannot be grasped and used until the internal part of the semiconductor manufacturing apparatus connected by the power supply voltage supplied from the DC power generator is damaged. As a result, damage to the semiconductor manufacturing apparatus and chain breakage of expensive internal parts are subsequently followed while checking the internal error after the down occurrence of the semiconductor manufacturing apparatus. This causes a rise in manufacturing costs.

DISCLOSURE OF THE INVENTION An object of the present invention is to solve the above-described problem, and to provide an alarm system and a control method thereof for detecting an unstable power supply voltage of a power supply voltage generator to alert an error state or to cut off the power supply.

1 is a block diagram showing a schematic configuration of an alarm system according to the present invention;

2 is a detailed circuit diagram of the alarm system shown in FIG. And

3 is a flowchart showing the operation procedure of the alarm system according to the present invention.

Explanation of symbols on the main parts of the drawings

100: alarm system 110: voltage divider

120: voltage compensation unit 122: first OP amplifier

130: current amplifier 132: second OP amplifier

140: control unit, microcontroller 150: alarm device

152: LCD device 154: Photo Kepler

156: Lamp 158: Buzzer

160: interlock switch

An object of the present invention for achieving the above object is, in the alarm system for use with electronic devices connected to the DC power generator, for dividing and outputting the power supply voltage of various voltage levels supplied from the DC power generator A voltage divider for voltage-compensating and outputting the divided power supply voltage, a current amplifier for amplifying and outputting a current component of the power supply voltage output from the voltage compensator, and an analog signal output from the current amplifier. And converts the digital signal into a digital signal, detects a power supply voltage of the converted digital signal, compares the detected power supply voltage with a preset reference voltage, and if the power supply voltage supplied from the DC power generator is in an error state. A control unit controlling to output a signal and outputting the error information Including an alarm system.

Preferably, the apparatus further includes a switching device that cuts a power supply voltage supplied from the DC power generator to the electronic device under the control of the controller. The alarm device is provided with any one of a liquid crystal display (LCD) device, a lamp, and a buzzer.

According to another aspect of the present invention, there is provided a control method of an alarm system for use with electronic devices connected to a DC power generator, the method comprising: detecting a level of a power supply voltage supplied from the DC power generator; And comparing the detected voltage level with a preset reference voltage, and determining whether the detected voltage level is less than or exceeding the reference voltage as a result of the comparison and as a result of the determination, the detected voltage is greater than the reference voltage. If less than or exceeded, alarm information for the power supply voltage level is output.

And outputting the alarm information, counting the number of alarms for outputting the alarm information, and if the counted alarm number exceeds a preset designated number, cuts off the power voltage supplied from the DC power generator to the electronic device. Let's do it.

Therefore, according to the present invention, the alarm system detects the level of the power supply voltage supplied from the DC power generator, and detects an error state through this to provide alarm information according to the error state or to control the power of the associated electronic device to be cut off. .

DETAILED DESCRIPTION Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram showing a schematic configuration of an alarm system according to the present invention.

Referring to the drawings, the alarm system 100 includes a voltage divider 110, a voltage compensator 120, a current amplifier 130, a controller 140, an alarm device 150, and an interlock switch 160. do.

The voltage divider 110 divides and outputs input voltages of various voltage levels supplied from a DC power generator (not shown).

The voltage compensator 120 amplifies the divided voltages and outputs a voltage compensation process.

The current amplifier 130 amplifies and outputs a current component of the voltage-compensated output signal.

The controller 140 receives the voltage compensation and current amplified signal, detects a level of an input voltage, and determines whether the voltage is stable by comparing with a preset reference voltage. In response to the determination result, the alarm device 150 or the interlock switch 160 is controlled to output alarm information or cut off power.

The alarm device 150 outputs alarm information under the control of the controller 140.

The interlock switch 160 is controlled by the controller 140 and supplied to an external electronic device (not shown, for example, a semiconductor manufacturing apparatus, etc.) operated by receiving a power voltage from the DC power generator. Cut off the power supply voltage.

Specifically, an embodiment of the present invention will be described in detail with reference to FIGS. 2 and 3.

2 is a circuit diagram showing the detailed configuration of the alarm system shown in FIG.

Referring to the drawings, the alarm system 100 includes a voltage divider 110 including a plurality of resistors R1 to R8, a plurality of capacitors C1 to C4, and a first OP amplifier 122. Compensation unit 120, the current amplifier 130 composed of a plurality of capacitors (C5 ~ C8) and the second OP amplifier 132 and the control unit 140 for controlling the overall operation of the alarm system 100 Include. The alarm system 100 includes an alarm device 150 and an interlock switch 160 connected to the control unit 140.

The voltage divider 110 divides input voltages of various voltage levels supplied from a DC voltage generator by the resistors R1 to R8.

The voltage compensator 120 performs voltage compensation on the divided voltage levels by the first OP amplifier 122 and outputs them.

The current amplifier 130 receives the voltage signal compensated from the voltage compensator 120 to amplify and output the current through the second OP amplifier 132.

Since the input voltage is input below or above the reference voltage, the current component is fluctuated, and the voltage decreases or rises in proportion to the unstable current, so that voltage compensation and current amplification are performed to constantly output the input voltage to adjust to a stable voltage. .

The controller 140 includes a microcontroller 140 including a plurality of input / output ports AD0 to AD3, I / O0 to I / O5, and PB. The controller 140 receives the current amplified analog signal and converts the analog signal into a digital signal. Then, the voltage level of the input voltage is determined from the converted digital signal. Then, whether the determined voltage level is different from the preset reference voltage is output, and alarm information is output or powered off according to the comparison result. In addition, the microcontroller 140 has a memory (not shown), for example, a ROM, a RAM, and the like, and includes a control program and a specific reference voltage, an alarm frequency, and an alarm shown in FIG. 3. Stores setting information such as a reference count.

As shown in the drawing, the alarm device 150 includes an LCD device 152, a lamp 156, a buzzer 158, and the like, and may include any one of them. When the level of the power supply voltage from the microcontroller 140 is in an abnormal state, alarm information (for example, a guide message, an alarm sound, error value display information, color) using the alarm devices 152, 156, and 158 is used. Display). In addition, the photocoupler 154 provided at one end of the lamp 156 is an optical sensor, and sets a display color corresponding to the values set in each of the plurality of diodes D2 to D5, and outputs them to distinguish error values. Is amplified and provided to the lamp 156.

The interlock switch 160 is externally connected to the DC power generator when the power supply voltage detected from the microcontroller 140 is less than or above a reference voltage damaging a system and an internal part (not shown). Turn off the power of the electronic device.

3 is a flowchart illustrating an operation procedure of an alarm system corresponding to a detected voltage according to an embodiment of the present invention. This procedure is a program stored in a memory (not shown) provided in the microcontroller 140, and the microcontroller 140 processes.

Referring to the drawing, in step S200, an analog signal is received from the current amplifier 130, and a corresponding voltage is converted into a digital signal to detect an input voltage. In step S210, the level of the detected voltage is determined and compared with a reference voltage corresponding to the voltage determined in step S220. As a result of the comparison, it is determined whether the voltage detected in step S230 is a voltage less than or above the reference voltage. As a result of the determination, if the detected voltage is less than or exceeded the reference voltage, the procedure proceeds to step S240 and outputs alarm information through the alarm device 150. If the detected voltage is the voltage allowed by the reference voltage, the flow proceeds to step S200.

In step S250, it is determined whether the number of times of the alarm has exceeded the set number of times. As a result of the determination, if the specified number of times is exceeded, the procedure proceeds to step S260 to control the interlock switch 160 to cut off the power supply. If the number of times is not exceeded, the process proceeds to step S200 to detect the input voltage and repeats the steps S200 to S250.

Specifically, an operation procedure according to an embodiment of the present invention will be described using the following program list.

<Program list>

CONST SINGLE DATA = (0.006097, 0.029268, 0.29268, 0.058536)

DIM VINPUT AS INTEGER

DIM I AS BYTE, J AS BYTE, VAR AS BYTE, K AS BYTE, L AS BYTE

DIM VS (5) AS SINGLE, A AS SINGLE, M AS SINGLE

DIM V5 AS SINGLE, V12 AS SINGLE, V24 AS SINGLE, V48 AS SINGLE

LCDINIT

10 VAR = 0

VINPUT = 0

FOR I = 0 TO 4

J = 0

K = 0

VINPUT = ADIN (J)

M = CSNG (VINPUT) * DATA (K)

VS (VAR) = M

VAR = VAR + 1

J = J + 1

K = K + 1

NEXT

V5 = VS (0)

V12 = VS (1)

V24 = VS (2)

V48 = VS (3)

OUT 12,0

OUT 9,0

IF V5> 4.95 AND V5 <5.05 THEN

LOCATE 0,0

PRINT "SYSTEM FINE!"

OUT 8,1

ELSEIF (V5> 4.9 AND V5 <4.95) OR (V5> 5.05 AND V5 <5.1) THEN

LOCATE 0,0

PRINT "SYSTEM CHECK LEVEL 1"

OUT 8,0

OUT 9,1

DELEY 50

OUT 9,0

OUT 12,1

DELEY 50

OUT 12,0

ELSEIF (V5> 4.85 AND V5 <4.9) OR (V5> 5.1 AND V5 <5.15) THEN

LOCATE 0,0

PRINT "SYSTEM CHECK LEVEL 2"

OUT 8,0

OUT 9,1

DELEY 40

OUT 9,0

OUT 12,1

DELEY 40

OUT 12,0

ELSEIF (V5> 4.8 AND V5 <4.85) OR (V5> 5.15 AND V5 <5.2) THEN

LOCATE 0,0

PRINT "SYSTEM CHECK LEVEL 3-WARNING"

OUT 8,0

OUT 9,1

DELEY 30

OUT 9,0

OUT 12,1

DELEY 30

OUT 12,0

ELSEIF (V5> 4.75 AND V5 <4.8) OR (V5> 5.2 AND V5 <5.25) THEN

LOCATE 0,0

PRINT "SYSTEM CHECK LEVEL 4-WARNING"

OUT 13,1

OUT 8,0

DELEY 20

OUT 9,0

OUT 12,1

DELEY 20

OUT 12,0

ELSEIF (V5> 4.75 AND V5 <5.25) THEN

LOCATE 0,0

PRINT "SYSTEM CHECK LEVEL 5-POWER OFF"

OUT 8,0

OUT 9,1

OUT 12,1

OUT 12,1

END IF

GOTO 10

The program list is a program written in BASIC, and is processed by the microcontroller 140, and the program is stored in a memory (not shown) of the microcontroller 140.

Referring to the program list, the first to fifth lines define constants, variables, and arrays. In other words, CONST SINGLE defines a real constant array, VINPUT defines a 16-bit unsigned integer type using the DIM instruction that defines variables and arrays, and I, J, VAR, K, and L are each byte types. It defines 8-bit unsigned integer type. VS (5) defines a real array, and A, M, V5, V12, V24, and V48 define 32-bit signed real variables.

Subsequently, the LCDINIT command of the sixth line clears the screen of the LCD device by a command to initialize the LCD device.

The seventh to eighteenth lines are cyclic loops for the variable I, which are circulated when the value of I is 1-4. At this time, the ADIN (J) function reads the AD conversion value through the analog input / output command. That is, the analog value being input to the port number corresponding to the J value is converted into a 10-bit digital value and returned. For example, when the analog value is 0 V, the digital value is converted to 0, and when the analog value is 5 V, the digital value is converted to a digital value of 1023. In addition, the CSNG (VINPUT) instruction converts an integer variable to a real type. Since VINPUT is an integer type, it is converted to a real type.

Lines 19 to 24 define V1 as the first value, V12 as the second, V24 as the third and V48 as the fourth value in the VS array. And the OUT 12, 0 command indicates setting the twelfth port to the low level. For example, an instruction of OUT 12, 1 indicates setting the twelfth port to a high level.

Lines 25 to 75 are IF to THEN to END IF and ELSEIF statements, and these statements are omitted. Here, the level of the detected voltage is classified into a fifth step, and when the detected voltage is not a proper voltage, that is, when the detected voltage is less than or above the reference voltage in the first to fourth steps, the alarm information is sent to the LCD device. Display and control to cut off the power in the fifth step. The LOCATE 0,0 command specifies the X and Y axis coordinates of the LCD device, and sets the display position. The PRINT command displays trailing characters on the LCD device. The DELEY 50 command delays the displayed alarm information by a specified time, that is, 50 ms time.

As described above, the program list has described the operation procedure for the case where the input voltage is 5 V, and it will be understood that the operation of the various input voltages is naturally possible through the embodiments of the present invention.

As described above, the present invention detects the level of the power supply voltage supplied from the DC power generator, and detects an error state through this to provide alarm information according to the error state or to control to cut off the power of the associated electronic device. By providing the system, it is possible to protect the associated electronic devices and to prevent the system down of the electronic devices through the alarm information.

In addition, by identifying the error state through the alarm information, it is possible to minimize the internal damage of the electronic device, thereby reducing the repair cost of the electronic device.

Claims (5)

In an alarm system for use with electronic devices connected to a DC power generator: A voltage divider for dividing and outputting power voltages having various voltage levels supplied from the DC power generator; A voltage compensator for voltage compensating and outputting the divided power voltage; A current amplifier for amplifying and outputting a current component of a power supply voltage output from the voltage compensator; The analog signal output from the current amplifier is converted into a digital signal, the power supply voltage of the converted digital signal is detected, and the power supplied from the DC power generator by comparing the detected power supply voltage with a preset reference voltage. A controller which controls to output the error information when the voltage is in an error state; And an alarm device for outputting the error information. The method of claim 1, And a switching device for cutting off a power voltage supplied from the DC power generator to the electronic device under the control of the controller. The method of claim 1, The alarm device is an alarm system, characterized in that any one of a liquid crystal display (LCD) device, a lamp, a buzzer. A method of controlling an alarm system for use with electronic devices connected to a DC power generator: Detecting a level of a power supply voltage supplied from the DC power generator; Comparing the detected voltage level with a preset reference voltage and determining whether the detected voltage level is less than or above the reference voltage as a result of the comparison; And outputting alarm information on the power supply voltage level when the detected voltage is less than or above the reference voltage. The method of claim 4, wherein And counting the number of alarms for outputting the alarm information, and if the counted alarm number exceeds a preset number of times, cutting off a power voltage supplied from the DC power generator to the electronic device. To control the alarm system.