KR200297183Y1 - Cooling pump - Google Patents

Abstract

The present invention relates to a cooling pump, the cooling pump 100 for pumping cooling water in a cooling system, comprising: a motor (110) for providing a rotational force; A first impeller 120 fixedly coupled to the rotating shaft 111 of the motor 110 and generating a centrifugal force by rotating together with the rotating shaft 111 to increase the pressure of the cooling water; By rotating together with the cooling water rotated by the first impeller 120, a plurality of through-holes 131 are formed along the outer circumferential surface of the first impeller 120 so as to smoothly maintain the flow of the cooling water and increase the pressure of the cooling water. ) And a second impeller (130) rotatably coupled to the rotating shaft (111) of the motor (110); The first and second impellers 120 and 130 are formed in the impeller rotation space 141 is fixed to the body 112 of the motor 110, the supply port 142 to the cooling water to be pumped and the first and It includes an impeller housing 140, each of which is formed with a discharge port 143 for discharging the coolant is increased pressure by the second impeller (120,130), the cooling water supplied to the cooling pump to maintain a smooth flow of the vortex It increases the pressure of the coolant and increases the efficiency of the cooling pump, and stops the operation of the cooling pump during idling due to the lack of coolant and prevents damage to the cooling pump through the occurrence of an alarm. Has an effect.

Description

Cooling Pump {COOLING PUMP}

The present invention relates to a cooling pump, and more particularly, to supply a cooling pump to prevent the formation of vortices by maintaining a smooth flow of the increased pressure of the cooling water to increase the pressure of the cooling water, idling due to lack of cooling water It relates to a cooling pump that stops the operation of the cooling pump and generates an alarm.

In general, a cooling system is provided in the semiconductor device manufacturing equipment to cool heat generated in a process for manufacturing a semiconductor device, and the cooling system is provided with a cooling pump for pumping cooling water.

Referring to the accompanying drawings, a cooling pump used in a cooling system provided in a conventional device for manufacturing a semiconductor device is as follows.

1 is a partial cross-sectional view showing a conventional cooling pump, Figure 2 is a front view showing an impeller of a conventional cooling pump. As shown, the conventional cooling pump 10 includes a motor 11, an impeller 12 coupled to the rotating shaft 11a of the motor 11, and an impeller rotating space in which the impeller 12 is located. Forming and including an impeller housing 13 is supplied with the cooling water discharged.

Impeller 12 is formed in a disk shape, and rotates together with the rotating shaft (11a) of the motor 11 to generate a centrifugal force to increase the pressure of the cooling water, and to generate the cooling water and friction during rotation from the center to the edge on the front A plurality of friction protrusions 12a having a triangular cross-sectional shape and extending at a predetermined interval are formed along the circumference of the central portion.

The impeller housing 13 forms an impeller rotating space 13a in which the impeller 12 is located, and an outlet for discharging the coolant whose pressure rises by the impeller 12 and the supply port 13b to which the coolant to be pumped is supplied. 13c are formed, respectively.

The cooling water supply pipe 14 and the cooling water discharge pipe 15 are respectively connected to the supply port 13b and the discharge port 13c.

In the conventional cooling pump 10 having such a structure, the cooling water that does not discharge when the cooling water having a centrifugal force is discharged to the discharge port 13c by the rotation of the impeller 12 forms a vortex to form a high speed rotation of the impeller 12. It acted as a resistance has had a problem of lowering the efficiency of the cooling pump (10).

In addition, when the cooling pump 10 is idling due to lack of cooling water, the motor 11 and the impeller 12 may be damaged, causing a failure.

The present invention is to solve the above-mentioned conventional problems, an object of the present invention is to provide a cooling pump to increase the pressure of the cooling water while preventing the formation of the vortex to maintain a smooth flow of the cooling water to increase the pressure The present invention provides a cooling pump that increases the efficiency of the cooling pump, stops the operation of the cooling pump when idle due to lack of cooling water, and prevents the cooling pump from being damaged by generating an alarm.

The present invention for realizing the above object, the cooling pump for pumping the cooling water in the cooling system, the motor for providing a rotational force; A first impeller fixedly coupled to the rotating shaft of the motor and generating a centrifugal force by rotating together with the rotating shaft to increase the pressure of the cooling water; By rotating together with the cooling water rotated by the first impeller, a plurality of through-holes are formed along the outer circumferential surface of the side surface so as to smoothly maintain the flow of the cooling water and increase the pressure of the cooling water, surround the first impeller, and rotate on the rotating shaft of the motor. A second impeller possibly coupled; The impeller rotating space in which the first and second impellers are positioned is fixed to the body of the motor, and a supply port for supplying coolant to be pumped and a discharge port for discharging the coolant whose pressure is increased by the first and second impellers are formed, respectively. Characterized in that it comprises an impeller housing.

1 is a partial cross-sectional view showing a conventional cooling pump,

2 is a front view showing an impeller of a conventional cooling pump,

3 is a partial cross-sectional view showing a cooling pump according to the present invention,

4 is a perspective view showing a secondary impeller of a cooling pump according to the present invention,

5 is a control block diagram of a cooling pump according to the present invention.

<Description of Symbols for Main Parts of Drawings>

110; Motor 111; Axis of rotation

112; Body 120; First impeller

121; Friction protrusion 130; 2nd impeller

131; Through hole 132; Opening

140; Impeller housing 141; Impeller Rotating Space

142; Supply port 143; outlet

150; Iron core 160; Magnetic field sensor

170; Control unit 180; Alarm generator

190; bearing

Hereinafter, with reference to the accompanying drawings, the most preferred embodiment of the present invention will be described in more detail so that those skilled in the art can easily practice.

3 is a partial cross-sectional view showing a cooling pump according to the present invention, Figure 4 is a perspective view showing a secondary impeller of the cooling pump according to the present invention, Figure 5 is a control block diagram of the cooling pump according to the present invention. As shown, the cooling pump according to the present invention is a motor 110 for providing a rotational force, the first impeller 120 and the first impeller 120 is fixedly coupled to the rotating shaft 111 of the motor 110, A second impeller 130 which is wrapped and rotatably coupled to the rotation shaft 111 of the motor 110, and an impeller housing 140 where the first and second impellers 120 and 130 are positioned inside and the coolant is supplied and discharged. Receiving a detection signal generated from the magnetic field sensor 160, the magnetic field sensor 160 for detecting the magnetic field generated when the iron core 150 is rotated, one side of the second impeller 130, the magnetic field And a controller 170 (shown in FIG. 5) for controlling the motor 110 and an alarm generator 180 (shown in FIG. 5) controlled by the controller 170 and generating an alarm.

The motor 110 has a first impeller 120 is fixedly coupled to the rotary shaft 111, the second impeller 130 is rotatably coupled.

The first impeller 120 is formed in a disk shape, and rotates together with the rotating shaft 111 of the motor 110 to generate a centrifugal force to increase the pressure of the cooling water, and to generate the cooling water and frictional force during rotation from the central portion on the front surface. A plurality of friction protrusions 121 extending along the edge and having a triangular cross-sectional shape are formed at regular intervals along the circumference of the central portion.

As shown in FIG. 4, the second impeller 130 has a plurality of through-holes 131 formed at a side thereof to allow the coolant to pass along the outer circumferential surface thereof, and an opening 132 is formed at the front thereof to allow the coolant to flow therethrough. The rotating shaft 111 of the motor 110 is rotatably coupled to the central portion. Accordingly, by rotating together with the cooling water rotated by the first impeller 120, the flow of the cooling water is maintained smoothly and the centrifugal force generated by the rotation is increased to increase the pressure of the cooling water.

On the other hand, the bearing 190 is preferably installed on the coupling portion of the rotating shaft 111 and the second impeller 130 of the motor 110. Therefore, the second impeller 130 rotates smoothly from the rotation shaft 111 of the motor 110 together with the cooling water rotated by the first impeller 120.

The impeller housing 140 forms an impeller rotating space 141 in which the first and second impellers 120 and 130 are positioned, and is fixed to the body 112 of the motor 110 and supplies a supply port for cooling water to be pumped ( The outlet 143 through which the coolant with the increased pressure is discharged by the 142 and the first and second impellers 120 and 130, respectively.

The cooling water supply pipe 14 and the cooling water discharge pipe 15 are respectively connected to the supply port 142 and the discharge port 143.

The iron core 150 is installed in one side of the second impeller 130, that is, in an outer circumferential surface adjacent to the rear surface of the second impeller 130 to rotate together with the second impeller 130 to form a magnetic field.

The magnetic field sensor 160 is installed in the impeller housing 140 to be adjacent to the trajectory on which the iron core 150 rotates, and detects a magnetic field generated by the iron core rotating together with the second impeller 130 to control the detection signal. Output to (170).

The controller 170 receives the detection signal output from the magnetic field sensor 160 and controls the motor 110 and the alarm generator 180. That is, the controller 170 determines whether the second impeller 130 is stopped from the detection signal output from the magnetic field sensor 160, and stops the motor 110 when the second impeller 130 is stopped. The control signal is output to 180 to cause the alarm generator 180 to generate an alarm.

The alarm generator 180 notifies the outside of the idle of the cooling pump 100 due to the stop of the second impeller 130 by lighting an alarm light or generating an alarm sound according to a control signal of the controller 170.

The operation of the cooling pump having such a structure is performed as follows.

When the coolant is supplied into the impeller housing 140 through the supply port 142, the friction protrusion 121 of the first impeller 120 rotating by the driving of the motor 110 causes friction with the coolant so that the pressure of the coolant is increased. It is raised by centrifugal force.

At this time, the cooling water rotated by the first impeller 120 rotates the second impeller 130 from the rotation shaft 111 of the motor 110, at this time, the second impeller 130 by the bearing 190 Is smoothly rotated from the rotation shaft 111 of the motor 110.

The second impeller 130 is positioned between the first impeller 120 and the impeller housing 140 to rotate to maintain the flow of the cooling water smoothly to form a vortex of the cooling water not discharged through the outlet 143 Prevents the pressure of the coolant from rising second.

Cooling water whose pressure is increased by the first and second impellers 120 and 130 is discharged through the outlet 143 of the impeller housing 140 to circulate the cooling system.

On the other hand, when the supply of cooling water to the supply port 142 of the impeller housing 140 is stopped, unlike the first impeller 120, the second impeller 130 that is rotated by the rotation of the cooling water is stopped.

When the second impeller 130 is stopped, the magnetic field generated by the rotation of the iron core 150 also disappears, and the control unit 170 receiving the detection signal from the magnetic field sensor 160 that senses this recognizes the motor 110. In addition to stopping the alarm to generate an alarm through the alarm generating unit 180.

According to the preferred embodiment of the present invention as described above, the cooling water supplied to the cooling pump to increase the pressure of the cooling water to increase the pressure of the cooling water to prevent the formation of vortex to maintain a smooth flow to increase the efficiency of the cooling pump In addition, it stops the operation of the cooling pump when idling due to lack of cooling water and prevents the cooling pump from being damaged by the occurrence of an alarm.

As described above, the cooling pump according to the present invention is supplied to the cooling pump to prevent the formation of the vortex by maintaining a smooth flow of the increased pressure of the cooling water and increase the pressure of the cooling water to increase the efficiency of the cooling pump In addition, it stops the operation of the cooling pump during idling due to lack of cooling water, and has an effect of preventing the cooling pump from being damaged by generating an alarm.

What has been described above is just one embodiment for implementing the cooling pump according to the present invention, the present invention is not limited to the above embodiment, the subject matter of the present invention as claimed in the utility model registration claims below Without departing from the technical spirit of the present invention to the extent that any person of ordinary skill in the art to which the invention belongs can be variously modified.

Claims (4)

In a cooling pump for pumping coolant in a cooling system, A motor providing a rotational force; A first impeller fixedly coupled to the rotating shaft of the motor and generating a centrifugal force by rotating together with the rotating shaft to increase the pressure of the cooling water; By rotating together with the cooling water rotated by the first impeller, a plurality of through-holes are formed along the outer circumferential surface of the side of the motor to smoothly maintain the flow of the cooling water and increase the pressure of the cooling water, and surround the first impeller, A second impeller rotatably coupled to the rotating shaft; An impeller rotating space in which the first and second impellers are formed is fixed to the body of the motor, and a supply port for supplying coolant to be pumped and a discharge port for discharging the coolant whose pressure rises by the first and second impellers. Impeller housings each formed; Cooling pump comprising a. The cooling pump of claim 1, wherein a bearing is installed at a coupling portion of the rotation shaft of the motor and the second impeller. The iron core of claim 1, further comprising: an iron core installed at one side of the second impeller; A magnetic field sensor for detecting a magnetic field generated by the iron core rotating together with the second impeller and outputting a detection signal; A control unit which receives a detection signal output from the magnetic field sensor and controls the motor; Cooling pump, characterized in that it further comprises. 4. The cooling pump of claim 3, further comprising an alarm generator configured to receive a control signal generated when the second impeller is stopped through a detection signal received from the magnetic field sensor and generate an alarm. 5.