KR200290227Y1 - Vibration nozzle for washer - Google Patents

Abstract

According to the vibration nozzle for a washing apparatus of the present invention, while applying the washing water to the washing water storage chamber from the outside through the washing water introducing member, mega ultrasonic waves generated from the megasonic are applied to the ceramic vibrator to apply the ultrasonic waves to the washing water. It is configured to vibrate and discharge the high pressure washing water by mega ultrasonic waves through the discharge port of the washing water discharge hole formed in the tapered shape while applying.

Therefore, the present invention not only can directly clean the glass fine particles generated during the cutting of the glass plate for LCD (liquid crystal display device) by applying mega ultrasonic waves to the water stream, but also save the washing water. In addition, the rate of flushing of the washing water can be increased.

Description

Vibration nozzle for cleaning equipment {VIBRATION NOZZLE FOR WASHER}

The present invention relates to a vibrating nozzle for a cleaning device, and in particular, it is possible to easily clean glass particles generated when cutting a glass plate for a wafer or an LCD (hereinafter referred to as a liquid crystal display device) by applying a high frequency to water streams. At the same time, the present invention relates to a vibrating nozzle for a washing apparatus which can save washing water.

Conventionally, in the semiconductor manufacturing process, ultrasonic waves are applied to cleaning water to clean wafers and glass plates for liquid crystal display devices, and the wafers and glass plates for liquid crystal display devices are cleaned by vibration of the cleaning water.

Such a conventional ultrasonic cleaner has a patent application (application number; 10-1999-0031975) dated August 4, 1999 and published on March 5, 2001 (Korean Patent Publication No. 2001-0016822) The vibrating apparatus for ultrasonic cleaner disclosed in the above was attached to the bottom surface of the washing tank, ultrasonic waves were applied, and the washing water stored in the washing tank was vibrated to wash the wafer or the glass plate for the liquid crystal display device.

The ultrasonic cleaner vibrator disclosed in the Korean Laid-Open Patent Publication has a cylindrical waterproof cap 21 and a first oscillator horn accommodated inside the waterproof cap 21 as shown in FIGS. 1 and 2. (24), first and second piezoelectric elements (25, 26), second vibrator horns (27), vibrators (28) coupled to ends of the second vibrator horns (27), and vibrators (28) Link portion 36 is coupled to the end of the). Through holes 30 are formed in the centers of the first and second vibrator horns 24 and 27, the first and second piezoelectric elements 25 and 26, and the vibrator 28, and the through holes The shaft 33 is inserted through the 30. Spiral portions 34 and 35 are formed at both ends of the shaft 33, and the spiral portion 34 is coupled to the spiral portion formed in the through hole 30 of the vibrating portion 28, and the other spiral portion 35 is formed. Is coupled to the spiral portion formed in the through hole of the first vibrator horn 24, so that the first and second vibrator horns 24 and 27 and the piezoelectric elements 25 and 26 are coupled to the vibrator 28. I can keep it. The shaft 33 is also formed in a hollow shape, and wiring of another unit vibration device can pass through the hollow portion 33a of the shaft 33.

The combination of the first and second vibrator horns 24, 27 and the first and second piezoelectric elements 25, 26 is accommodated in the cylindrical space of the waterproof cap 21, with a portion of the end of the vibrator 28 also being It is housed inside the waterproof cap 21. The spiral portion 22 may be formed inside the upper end of the waterproof cap 21, and the spiral portion 22 may be coupled to the outer spiral portion 41 formed on the outer surface of the vibration unit 28.

The waterproof cap 21 serves to seal the first and second vibrator horns 24 and 27 and the first and second piezoelectric elements 25 and 26 from the cleaning liquid. Terminals 31 and 32 are formed on the first piezoelectric element 25 and the second piezoelectric element 26, and wirings 38 and 39 are connected to the first and second piezoelectric elements 25, respectively. 39 is extended between the inner surface of the waterproof cap 21 and the outer surface of the assembly to be drawn out to the outside through the wire lead portion 40 formed on the bottom of the waterproof cap 21 to the output end of the oscillation portion 45 Each is connected. The wire lead-out unit 40 is also sealed so that the cleaning liquid cannot flow into the waterproof cap 21 through the wire lead-out unit 40. On the other hand, the spiral portion 29 formed on one side of the vibrating portion 28 is coupled to the spiral portion formed inside the bottom of the link portion 36. The through hole corresponding to the through hole 30 is also formed in the link portion 36.

When an electrical signal is applied through the wiring 38 in the conventional vibration device configured as described above, the first and second piezoelectric elements 25 and 26 made of ceramic material are ultrasonic vibration energy generated while repeating contraction and expansion. Is enlarged by the first and second oscillator horns 24 and 27. The first and second oscillator horns 24 and 27 are made of aluminum material with good acoustic impedance. The piezoelectric effect of the first and second piezoelectric elements 25 and 26 transmits ultrasonic energy to the vibrator 28, and cavitation occurs by the ultrasonic energy to maximize the cleaning effect. The link portion 37 is a portion for allowing a plurality of vibration devices to be connected and used continuously. The spiral portion 37 of the link portion 37 is an outer spiral portion formed in the waterproof cap 21 of another unit vibration device. 23).

By the way, in the case where a plurality of vibrating apparatuses for ultrasonic cleaners configured as described above are provided on the bottom of the cleaner, and ultrasonic waves are applied to clean the wafer or the glass plate for the liquid crystal display device, the cleaning water is continuously supplied into the cleaning tank. Since the ultrasonic water output from the oscillation unit 45 is applied to the washing water by the ultrasonic cleaning device vibrating device while discharging the washing water inside, the cleaning speed cannot be shortened. However, there have been various problems such as the inability to clean easily and cleanly, and the saving of washing water.

Accordingly, the present invention has been made in view of the above-described various problems, and an object of the present invention is to readily eject glass fine particles generated at the time of cutting a glass plate for LCD (liquid crystal display device) by applying high frequency to water flow and easily. To provide a vibrating nozzle for a cleaning device that can be cleaned.

Another object of the present invention is to provide a vibrating nozzle for a cleaning device that can save the washing water when cleaning the glass fine particles generated during cutting of the wafer or glass plate for liquid crystal display by applying a high frequency to the water flow.

Still another object of the present invention is to provide a vibrating nozzle for a cleaning device capable of increasing the jet rate of the washing water.

In order to achieve the above object, the present invention provides a housing made of a cylindrical insulating material having a circular flange protruding from the center of the inner circumferential surface, and a screw portion formed on the upper outer circumferential surface to be joined to the first thread formed on the inner circumferential surface of the lower circular flange of the housing. And a taper-shaped washing water discharge member having a washing water discharge hole formed at the center thereof, and a through hole formed in the housing between the lower portion of the circular flange of the housing and the cleaning water discharge member to introduce the washing water into the washing water storage chamber from the outside. A washing water introducing member having a through hole formed at the center thereof, a ceramic oscillator disposed on an upper portion of the circular flange of the housing and applying ultrasonic waves to the washing water stored in the washing water storage chamber, and a circular flange upper inner circumferential surface of the housing. Screw on the outer circumferential surface to be joined to the second threaded portion formed in the And a first cylindrical member made of stainless steel each having a pair of through holes through which lead wire screws are threaded through, respectively, to be electrically connected to an electrode terminal formed on the ceramic vibrator, and formed on an inner circumferential surface of the first cylindrical body. Cylindrical insulator having a threaded portion formed on the outer circumferential surface to be screwed to the threaded portion, and a threaded portion formed on the outer circumferential surface to be screwed to the threaded portion formed on the inner circumferential surface of the insulator. The + lead wire screw is disposed on the second cylindrical body made of stainless steel having a through hole in the center along the longitudinal direction so that the + electrode electrically connected to the terminal is inserted in the lower portion, and the upper portion of the first cylindrical body and the insulator. And through-holes near the center and both ends so that the + lead wire and -lead wire are respectively fixed by the lead wire screw. A first cover having a threaded portion formed on the lower outer circumferential surface of the rod-shaped insulating plate and a through hole formed at the center thereof so that the + lead wire and the-lead wire pass therethrough, and to be joined to a second screw portion formed on the inner circumferential surface of the housing; Through holes are formed in the center so that the + lead wires and-lead wires pass through, and coupling members are joined to the through holes formed in the center of the first cover, and the + lead wires and-lead wires penetrate through the center. The ball is formed, characterized in that consisting of a second cover that is screwed on top of the coupling member.

1 is a longitudinal sectional view schematically showing a vibrator for a conventional cleaner;

2 is an exploded perspective view of FIG. 1;

3 is a longitudinal sectional view of a vibration nozzle for a cleaning apparatus according to an embodiment of the present invention;

4 is an exploded perspective view of FIG. 2;

5 is a longitudinal cross-sectional view of a ceramic vibrator applied to a vibration nozzle for a cleaning apparatus according to an embodiment of the present invention.

<Explanation of symbols for the main parts of the drawings>

91: + lead wire screw 92:-lead wire screw

94: + lead wire 95:-lead wire

98: packing member 110: housing

111: round flange 112: first threaded portion

113: washing water storage chamber 114: second screw portion

120: washing water discharge member 120a: washing water discharge hole

120b: Washing water outlet 121: Screw part

130: washing water introduction member 130a: through hole

140: ceramic vibrator 141: circular disk

142: + electrode terminal 143:-electrode terminal

150: first cylinder 151: screw

151a, 152a: Through hole 153: Screw part

160: second cylinder 161: screw

162: + electrode 164: through hole

170: insulating plate 171,172: through hole

180: first cover 181: through hole

182: screw portion 190: coupling member

191: through-hole 200: second cover

201: Through hole 210: Insulator

210a: threaded portion 211: threaded portion

Hereinafter, a vibration nozzle for a cleaning apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

3 is a longitudinal cross-sectional view of a vibration nozzle for a cleaning device according to an embodiment of the present invention, Figure 4 is an exploded perspective view of Figure 2, Figure 5 is applied to the vibration nozzle for a cleaning device according to an embodiment of the present invention It is a longitudinal cross-sectional view of a ceramic vibrator.

3 to 5, the housing 110 of the vibration nozzle for the cleaning device according to an embodiment of the present invention is made of a cylindrical insulating material, the central portion of the inner peripheral surface of the housing 110, a circular flange ( 111 is protruded toward the center, and first and second threaded portions 112 and 114 are formed on the inner circumferential surfaces of the housing 110 at the lower and upper portions of the circular flange 111, The screw portion 121 of the tapered wash water discharge member 120 having a washing water discharge hole 120a formed at the center thereof is screwed into the first screw portion 112.

In the through-hole 110a formed in the housing 110 between the lower portion of the circular flange 111 of the housing 110 and the washing water discharge member 120, washing water may be introduced into the washing water storage chamber 113 from the outside. The washing water introduction member 130 is formed with the through hole 130a formed at the center thereof.

In addition, the ceramic vibrator 140 of the vibrating nozzle for the cleaning device according to an embodiment of the present invention is disposed on the upper portion of the circular flange 111 formed in the housing 110 so that the ultrasonic wave of the mega health band of the washing water storage chamber 113 Is installed to be applied to the washing water stored in the second cylindrical portion 114 formed on the upper inner circumferential surface of the circular flange 111 of the housing 110. The threaded portion 150a formed on the outer circumferential surface is screwed together to form a first cylindrical body 150 in the housing 110, and the threaded portion 153 and the cylindrical insulator 210 formed on the inner circumferential surface of the first cylindrical body 150. The threaded portion 211 formed on the outer circumferential surface of the bottom) is screwed together to form a cylindrical insulator 210 in the first cylindrical body 150, and a negative electrode formed on the vibrator 140 in the first cylindrical body 150. Lead wire screw 92 for electrical connection to terminal 143 A pair of through holes 151a and 152a, each of which is through screwed together, is formed.

Then, the threaded portion 210a formed on the inner circumferential surface of the insulator 210 and the threaded portion 161 formed on the outer circumferential surface of the second cylindrical body 160 made of stainless steel (conductive material) are screwed together to form a second cylinder in the insulator 210. Sieve 160 is installed.

In the center of the second cylindrical body 160, the + lead wire screw 91 penetrates and joins, and the + electrode 162 electrically connected to the + electrode terminal 142 formed on the ceramic vibrator 140 has a lower portion. The through hole 164 is formed along the longitudinal direction to be fitted into the upper surface of the first cylindrical body 150, the insulator 210 and the second cylindrical body 160 in the upper portion of the through hole 171, 172 near the center and both ends. The rod-shaped insulating plates 170 each of which are formed by the &lt; RTI ID = 0.0 &gt;) are fixed and disposed by the + lead wire screw 91 and the -lead wire screw 92. The insulating plate 170 is provided with the + lead wire screw 91. And the + lead wire 94 and the -lead wire 95 are electrically connected and fixed by the lead wire screw 92, respectively, and the + lead wire screw 91 is formed through the center of the insulating plate 170. Through the through hole 164 formed in the center of the hole 171 and the second cylindrical body 160 is joined to the ceramic The + lead terminal 142 is electrically connected to the + electrode terminal 142 formed at the upper center of the ruler 140, and the -lead wire screw 92 is formed through the through holes 172 and the first adjacent to both ends of the insulating plate 170, respectively. The through-holes 151a and 152a respectively formed in the cylindrical body 150 are combined and electrically connected to the negative electrode terminal 143 formed at the upper edge of the ceramic vibrator 140.

The upper part of the second screw part 114 formed on the inner circumferential surface of the housing 110 is coupled to the screw part 182 formed on the lower outer circumferential surface of the first cover 180 to cover the upper opening of the housing 110 with the first cover 180. Covered by). A through hole 181 is formed in the center of the first cover 180 such that the + lead wire 94 and the -lead wire 95 pass therethrough.

A coupling member 190 is screwed into the through hole 181 formed at the center of the first cover 180, and a through hole 181 of the first cover 180 is formed at the center of the coupling member 190. The through hole 191 is formed so that the + lead wire 94 and -lead wire 95 pass through the through hole, and the second cover 200 is screwed into the thread formed on the coupling member 190. In the center of the second cover 200, the through-hole 201 through the + lead wire 94 and -lead wire 95 passing through the through hole 191 of the coupling member 190 passes through. ) Is formed.

Preferably, the washing water discharge hole 120a of the washing water discharge member 120 is reduced in diameter toward the washing water outlet 120b so that the washing water is discharged at a high pressure when the washing water is discharged.

The ceramic vibrator 140 is a circular disk 141 made of ceramic, a positive electrode terminal 142 deposited on the upper surface of the circular disk 141 and a circular shape away from the + electrode terminal 142 by a predetermined length Consists of the electrode terminal 143 of the conductive material deposited on the side and bottom surface of the circular disk 141.

In the drawing, reference numeral 98 is disposed between the housing 110 and the washing water discharge member 130 and is disposed in the lower inner circumferential surface of the housing 110 and the washing water discharge hole 130a of the washing water discharge member 130. The packing member is a packing member for preventing the washing water from leaking in the washing water storage chamber 113, and 212 is a recess formed in the upper surface of the insulator 210, and the recess 212 is the first cylindrical body 210. It is used to rotate by inserting the tool when the insulator 210 is screwed together.

Next, the operation and effects of the vibration nozzle for the cleaning apparatus according to the embodiment of the present invention configured as described above will be described.

First, the tapered shape washing water discharge member 120 is screwed to the first threaded portion 112 formed on the inner circumferential surface of the housing 110, and the lower portion of the circular flange 111 of the housing 110 and the washing water discharged. The washing water introducing member 130 is screwed into the through hole formed in the housing 110 between the members 120.

The positive terminal electrode 142 side of the ceramic vibrator 140 faces upward through the upper opening of the housing 110, and is disposed on the circular flange 111 of the housing 110. A threaded portion 150a formed on the outer circumferential surface of the first cylindrical body 150 is joined to the second threaded portion 114 formed on the upper inner circumferential surface of the circular flange 111 of 110, thereby forming the first cylindrical body 150 in the housing ( It is excreted in the inner circumferential surface of 110).

Next, the threaded portion 153 formed on the inner circumferential surface of the first cylindrical body 150 is screwed together to the threaded portion 211 formed on the outer circumferential surface of the insulator 210, thereby forming the insulator 210 in the first cylindrical body 150. Is inserted into the inner circumferential surface of the insulator 210, the screw portion 210a formed on the inner circumferential surface of the insulator 210 and the screw 161 formed on the outer circumferential surface of the second cylindrical body 160 are screwed together to form the second circumferential surface on the inner circumferential surface of the insulator 210. When the cylindrical body 160 is inserted into the housing, the + electrode 162 provided at the lower portion of the through-hole 164 formed along the longitudinal direction in the center of the second cylindrical body 160 has the + of the ceramic vibrator 140. The terminal electrode 142 is electrically connected to the terminal electrode 142.

The first electrode 162 disposed below the through hole 164 of the second cylindrical body 160 is electrically connected to the + terminal electrode 142 of the ceramic vibrator 140. Match the through-holes 172 formed near both ends of the insulating plate 170 with the through-holes 151a and 152a formed in the cylindrical body 150, and then replace the -lead wire 95 with the sheath removed- When the -lead wire screw 92 is screwed into the through holes 151a and 152a formed in the first cylindrical body 150 in the state of being electrically connected to 92, the -lead wire 95 becomes the first cylindrical body. The lead wire 94 is electrically connected to the negative electrode terminal 142 of the ceramic vibrator 140 through the 150 and the through hole 171 formed in the center of the insulating plate 170. When the connected + lead wire screw 91 is screwed together, the ceramic is interposed between the second cylindrical body 160 made of stainless steel and the + electrode 162. An electrically conductive state to the + electrode terminal 142 of the follower 140 is.

Next, the + lead wire 94 and the-lead wire 95 penetrates into the through hole 181 formed in the center portion of the first cover 180, and the second screw portion 114 formed on the inner circumferential surface of the housing 110. The screw member 182 formed on the lower outer circumferential surface of the first cover 180 is screwed into the upper part of the upper part of the first cover 180 to fix the position. ) Is fixed by screwing together, and the second cover 200 is screwed onto the upper portion of the coupling member 190.

In this case, the + lead wire 94 and the-lead wire 95 is a megasonic (mega frequency) (not shown) installed outside through the through holes (191,201) formed in the center of the coupling member 190 and the second cover 200 Of course, it is connected to the ultrasonic wave oscillation device for oscillating and outputting ultrasonic waves.

In this coupled state, while introducing the washing water from the outside through the washing water introducing member 130 to the washing water storage chamber 113, the ultrasonic wave oscillated and output from the megasonic (not shown) + lead wire 94 And when applied through the + electrode terminal 142 and the-electrode terminal 143 of the ceramic vibrator 140 through the lead wire 95, the ceramic vibrator 140 is subjected to mega ultrasonic wave and vibrates the washing water storage chamber Generated at the cutting of the wafer or glass plate for liquid crystal display device through the washing water discharge hole 120a formed in the center of the washing water discharge member 120 while being applied to the washing water introduced to the 113 and vibrating the washing water. The water flow is vibrated directly on the glass fine particles to be vibrated, so that the glass fine particles can be easily cleaned in a short time. Therefore, since the washing water is ejected directly to the cut portion of the wafer or glass plate for the liquid crystal display device, the cleaning particles are cleaned at the time of cutting the wafer or the glass plate for the liquid crystal display device, so that the washing water can be saved and the washing can be performed. The rate of ejection of water can be increased.

As described above, according to the vibration nozzle for a washing apparatus of the present invention, while applying the washing water to the washing water storage chamber from the outside through the washing water introducing member, the ultrasonic ultrasonic wave oscillated and outputted from the megasonic is applied to the ceramic vibrator. It is configured to vibrate and discharge high-pressure washing water by mega ultrasonic waves through the discharge port of the washing water discharge hole formed in the tapered shape while applying mega ultrasonic waves to the liquid stream. Not only can the glass fine particles generated at the time of cutting the glass plate be easily washed in a quick time, but also the washing water can be saved, and the spraying speed of the washing water can be increased.

Claims (3)

Upper outer circumferential surface to be joined to the housing 110 made of a cylindrical insulating material formed with a circular flange 111 protruding in the center of the inner circumferential surface, and the first screw portion 112 formed on the lower inner circumferential surface of the circular flange 111 of the housing 110 A taper-shaped washing water discharge member 120 having a screw portion 121 formed thereon and a washing water discharge hole 120a formed at the center thereof, a lower portion of the circular flange 111 of the housing 110, and a washing water discharge member. A washing water introduction member 130 formed in the center of the through-hole 130a so as to be combined with the through-holes formed in the housing 110 between the 120 to introduce the washing water into the washing water storage chamber 113 from the outside; The ceramic vibrator 140 disposed on the circular flange 111 of the 110 and applying the ultrasonic waves of the mega health band to the washing water stored in the washing water storage chamber 113, and the circular flange of the housing 110. 111) formed on the upper inner circumferential surface 2, a pair of screws 150a are formed on the outer circumferential surface to be screwed into the thread 114, and the lead wire screws 92 are respectively threaded through to be electrically connected to the electrode terminal 143 formed on the ceramic vibrator 140. Cylindrical with a threaded portion 211 formed on the outer circumferential surface of the first cylindrical body made of stainless steel having the through holes 151a and 152a formed therein, and the threaded portion 153 formed on the inner circumferential surface of the first cylindrical body 150. The threaded portion 161 is formed on the outer circumferential surface to be screwed into the insulator 210 on the upper surface and the threaded portion 210a formed on the inner circumferential surface of the insulator 210, and the + lead wire screw 91 is penetrated and screwed in the center thereof. The second cylindrical body 160 made of stainless steel having a through hole 164 formed in the center thereof in the longitudinal direction such that the + electrode 162 electrically connected to the + electrode terminal 142 formed on the vibrator 140 is inserted in the lower portion thereof. And, on the upper portion of the first cylindrical body 150 and the insulator 210 Bars having through holes 171 and 172 formed near the center and both ends thereof so that the + lead wire 94 and the-lead wire 95 are respectively fixed by the + lead wire screw 91 and the-lead wire screw 92. A through hole 181 is formed at the center of the insulating plate 170 and the + lead wire 94 and the-lead wire 95 so as to pass therethrough, and at the same time, a second screw part formed on the inner circumferential surface of the housing 110. Through hole 191 is formed in the center so that the first cover 180, the threaded portion 182 is formed on the lower outer circumferential surface and the + lead wire 94 and-lead wire 95 to pass through the 114, Coupling member 190 that is joined to the through hole 181 formed in the center of the first cover 180, and the through hole 201 in the center so that the + lead wire 94 and-lead wire 95 passes through 2 is formed, the second cover 200 which is screwed to the upper portion of the coupling member 190 is characterized in that the jeans for cleaning apparatus Nozzle. The washing water discharge hole (120a) of the washing water discharge member 120 is reduced in diameter toward the washing water discharge port (120b) so that the washing water is discharged at a high pressure when the washing water discharged. Vibration nozzle for cleaning device. The ceramic vibrator 140 of claim 1, wherein the ceramic vibrator 140 comprises a circular disk 141 made of ceramic, a + electrode terminal 142 deposited on an upper surface of the circular disk 141, and the + electrode terminal 142. A vibration nozzle for a cleaning device, characterized in that it is formed in a circular shape away from a predetermined length, and is composed of a -electrode terminal 143 of a conductive material deposited on the side and bottom surfaces of the circular disk 141.