KR200273209Y1 - Bellows valve for controlling decompression of a lpcvd apparatus - Google Patents

Abstract

The present invention relates to a bellows valve for adjusting the pressure of the LPCVD apparatus, the actuator 100 for driving or discharging air from the outside, and coupled to the lower side of the actuator 100 and up and down inside the drive of the actuator 100 The bellows 200 which is guided by the guide shaft 210 installed to be slidable and expands or contracts up and down, the actuator 100 is coupled to the upper side, and the bellows 200 is mounted on the inside, and the bellows 200 is expanded or In the bellows valve having a main body 300 for opening and closing the flow of gas passing through the inside by contraction, it is installed on the guide shaft 210 of the bellows 200, the bellows 200 and It includes a heater 400 for heating them by directly supplying heat into the main body 300, the bellows and the direct supply of heat to the inside of the main body to heat As a result, the discharged gas is prevented from generating powder in the bellows outer surface of bellows and the installation space of bellows due to the temperature drop.This allows the bellows to operate stably to open and close the gas flow accurately. This has the effect of increasing the cleaning cycle and the usage cycle.

Description

BELLOWS VALVE FOR CONTROLLING DECOMPRESSION OF A LPCVD APPARATUS}

The present invention relates to a bellows valve for pressure reduction control of an LPCVD apparatus, and more particularly, a bellows outer surface of the bellows and a mounting space of the bellows due to a drop in temperature due to a temperature drop. The present invention relates to a bellows valve for controlling a pressure reduction of an LPCVD apparatus that suppresses generation of powder on the back.

In the process for manufacturing a semiconductor device, a process of forming a film of a required material by reacting a molecular gas on the surface of a semiconductor wafer is referred to as chemical vapor deposition (hereinafter referred to as "CVD") process. APCVD (Atmospheric Pressure CVD) and LPCVD (Low Pressure CVD) are divided according to the pressure of the process tube in progress. In particular, the LPCVD process is provided with a vacuum supply system because the process tube must be kept in a vacuum state.

Referring to the accompanying drawings, a vacuum supply system for vacuuming the inside of a process tube in an LPCVD apparatus performing a conventional LPCVD process will be described below.

1 is a block diagram showing a vacuum supply system of a conventional LPCVD apparatus. As shown, a vacuum line 30 connected to the vacuum pump 20 is connected to one side of the process tube 10 in which the boat 11 loaded with a certain number of wafers inward is connected, and the vacuum line 30 ), A gate valve 31, a vacuum pressure sensor 32, and a gas trap 33 are respectively provided.

In addition, first and second auxiliary vacuum lines 40 and 50 which bypass the gate valve 31 are connected to the vacuum line 30, respectively.

The first auxiliary vacuum line 40 is provided with a first bellows valve 60 and a first needle valve 70 for adjusting the amount of gas passing through the first bellows valve 60, respectively. Second auxiliary vacuum line 50 is provided with a second needle valve (80) for adjusting the amount of gas passing through the second bellows valve 80 and the second bellows valve 80, respectively, the first needle valve 70 is It is adjusted to allow a minute amount to pass through than the second needle valve 90.

Such a vacuum supply system operates the vacuum pump 20 in order to prevent the process tube 10 from being damaged due to a sudden change in pressure when the process tube 10 is vacuumed. When exhausting through the 30, the first bellows valve 60 is opened while the gate valve 31 and the second bellows valve 80 are closed to finely exhaust the gas inside the process tube 10, and the process tube ( When the depressurization in 10) reaches a constant value, the first bellows valve 60 is closed and the second bellows valve 80 is opened to exhaust a small amount of gas in the process tube 10.

When the pressure reduction in the process tube 10 occurs to some extent due to the opening of the second bellows valve 80, the second bellows valve 80 is closed and the gate valve 31 is opened to generate a large amount of gas in the process tube 10. To exhaust.

The pressure in the process tube 10 is sensed through the vacuum pressure sensor 32, the powder contained in the residual gas discharged through the vacuum line 30 is removed by the gas trap (33).

Meanwhile, the first and second bellows valves 60 and 80 will be described with reference to the accompanying drawings. FIG. 2 is a partial cross-sectional view illustrating a pressure reducing bellows valve of the conventional LPCVD apparatus. Since the first and second bellows valves 60 and 80 have the same structure, the first bellows valve 60 will be described as an example. As shown, the bellows valve 60 is coupled to the actuator 61 which receives or discharges air from the outside and is driven by the actuator 61 and expands or contracts up and down by driving the actuator 61. The bellows 62 and the main body 63 is coupled to the actuator 61 in a state in which the bellows 62 is mounted on the inside, and the body 63 opens and closes the flow of gas passing through the inside by expansion or contraction of the bellows 62. do.

Actuator 61 is the bellows 62 is coupled to the lower side, and expands or contracts the bellows 62 up and down by the pressure of the air injected or discharged from one side of the air chamber (not shown) formed inside, at the bottom The upper end of the main body 63 is screwed through a sealing member 61a such as a metal seal.

The bellows 62 is provided with a guide shaft 62a to be slidable up and down inward, and for this purpose, the upper side of the guide shaft 62a is coupled to be slidable up and down at the bottom of the actuator 61.

In addition, the bellows 62 is provided with a packing member 62b at the bottom, and the packing member 62b is coupled to the bottom of the guide shaft 62a. Therefore, when the bellows 62 expands or contracts up and down, the packing member 62b has a constant movement path by the guide shaft 62a.

The main body 63 has a lower end of the actuator 61 is screwed, and forms a mounting space 63a in which the bellows 62 is mounted to be expanded or contracted up and down.

In addition, the main body 63 is connected to the lower side of the mounting space 63a from one side, and forms an inflow path 63b which is opened and closed by the packing member 62b of the bellows 62 and from the other side of the mounting space 63a. A discharge path 63c connected to the side part is formed.

The bellows valve for pressure reduction control of the conventional LPCVD apparatus uses the LPCVD apparatus to allow the gas discharged after the formation of the nitride film forming process and the TEOS (Tetraethyl orthosilicate) process to reduce the temperature of the bellows corrugated outer surface and the bellows mounting space. There was a problem in generating powder (powder) on the back.

Of course, the bellows valve is heated, but is not heated to the inside of the bellows valve, in particular to the bellows because it is heated by heat applied from the outside.

Therefore, due to the powder generated on the outer surface of the bellows and the mounting space, a large force is applied to the actuator during opening and closing so that the bellows cannot be operated or even the bellows are broken. The release of the vacuum and poor pumping of the vacuum pump resulted in serious damage to the wafer.

The present invention is to solve the above-mentioned problems, the purpose of the present invention is to install the bellows and the bellows outer surface of the bellows due to the lowering of the gas heating temperature discharged by supplying heat directly to the inside of the bellows and the main body It is to provide the bellows valve for pressure reduction control of LPCVD apparatus to suppress the generation of powder in the space, and to make the bellows operate stably to open and close the gas flow accurately and to increase the cleaning cycle and the use cycle. have.

The present invention for realizing the above object is guided by an actuator that receives or discharges air from the outside and guided by a guide shaft coupled to the lower side of the actuator and slidable up and down inside the actuator when the actuator is driven. A bellows valve having a bellows that expands or contracts, an actuator is coupled to an upper side, a bellows mounted inside, and a flow of gas passing through the inside by opening or contracting the bellows is opened and closed. It is installed, it is characterized in that it comprises a heater for heating them by directly supplying heat to the bellows and the body by receiving power from the outside.

The heater is characterized in that the heating wire wound on the outer circumferential surface of the guide shaft a predetermined number of times.

In addition, the heater is characterized by consisting of a tube coupled to the outer peripheral surface of the guide shaft, and a heating wire wound a predetermined number of times inside the tube.

1 is a block diagram showing a vacuum supply system of a conventional LPCVD apparatus,

Figure 2 is a partial cross-sectional view showing a pressure reducing bellows valve of the conventional LPCVD apparatus,

3 is a partial cross-sectional view showing a bellows valve for adjusting the pressure of the LPCVD apparatus according to the first embodiment of the present invention,

Figure 4 is a cross-sectional view showing the bellows of the bellows valve for pressure reduction control of the LPCVD apparatus according to the second embodiment of the present invention.

<Description of Symbols for Main Parts of Drawings>

100; Actuator 200; Bellows

210; Guide shaft 220; Packing member

300; Main body 310; Mounting space

320; Inlet 330; Exhaust path

400,500; Heaters 410,520; thermic rays

410,530; Power connector 420,540; Power line

510; tube

Hereinafter, with reference to the accompanying drawings, the most preferred embodiment of the present invention will be described in more detail so that those skilled in the art can easily practice.

3 is a partial cross-sectional view showing a bellows valve for reducing the pressure of the LPCVD apparatus according to the first embodiment of the present invention. As shown, the actuator 100 for receiving or discharging air from the outside and the guide shaft 210 is coupled to the lower side of the actuator 100 and installed to be slidable up and down inside the actuator 100 when driven. Guided by the bellows 200 is expanded or contracted up and down, the actuator 100 is coupled to the upper side and the bellows 200 is mounted on the inside of the gas passing through the inside by the expansion or contraction of the bellows 200 The heater 300 is installed on the guide shaft 210 of the main body 300 and the bellows 200 to open and close the flow, and receives power from the outside to heat the bellows 200 and the main body 300 by directly supplying heat to them. 400).

The actuator 100 has a bellows 200 coupled to the lower side thereof, and expands or contracts the bellows 200 up and down by the pressure of air injected or discharged from one side of an air chamber (not shown) formed therein, and at the bottom thereof. It is screwed with the upper end of the main body 300 via a sealing member 110, such as a metal seal (metal seal).

The bellows 200 is installed such that the guide shaft 210 is slidable up and down on the inside, and for this purpose, the guide shaft 210 is coupled to the upper side of the bellows 200 so as to be slidable up and down at the bottom of the actuator 100.

In addition, the bellows 200 is provided with a packing member 220 at the lower end, the packing member 220 is coupled to the lower end of the guide shaft 210 is guided by the guide shaft 210 when moving up and down a constant movement path Have it.

The main body 300 is the lower end of the actuator 100 is screwed to the upper end, the mounting space 310 is formed inside the bellows 200 is mounted to the mounting space 310 to expand or contract up and down.

In addition, the main body 300 is connected to the lower side of the mounting space 310 from one side, and forms an inflow path 320 which is opened and closed by the packing member 220 of the bellows 200 and from the other side of the mounting space 310. The discharge path 330 is connected to the side.

Screw grooves 340 and 350 are formed at both outer circumferential surfaces of the main body 300 on which the inflow path 320 and the discharge path 330 are formed, and the auxiliary vacuum lines 40 and 50 in the screw grooves 340 and 350 are shown in FIG. 1. The gas lines such as

The heater 400 receives the power from the outside and heats them by directly supplying heat to the bellows 200 and the main body 300. In this embodiment, the heater 400 is fixed to the guide shaft 210 of the bellows 200 a predetermined number of times. The heating wire 400 is wound, the heating wire 400 is electrically connected to the power connector 410 is installed to protrude to the bottom of the actuator 100, the power connector 410 of the external power supply (not shown) As the power line 420 is connected, power is applied to directly supply heat to the bellows 200 and the main body 300, thereby rapidly heating them.

On the other hand, the power connector 410 is coupled to the lower end of the actuator 100 to maintain the airtight inside the actuator 100 when installed at the lower end of the actuator (100).

Hot wire 400 is preferably installed at a predetermined interval from the top when installed on the guide shaft 210. Therefore, when the guide shaft 210 slides upward, the heating wire 400 may be prevented from colliding with the lower end of the actuator 100.

Another embodiment of the heater 400 will be described with reference to the accompanying drawings.

Figure 4 is a cross-sectional view showing the bellows of the bellows valve for pressure reduction control of the LPCVD apparatus according to the second embodiment of the present invention. As shown, the heater 500 is composed of a tube 510 coupled to the outer circumferential surface of the guide shaft 210 and a heating wire 520 wound around the tube 510 a predetermined number of times. Therefore, even when the guide shaft 210 moves up and down, the tube 510 is coupled to the guide shaft 210 so that the heating wire 520 is stably fixed to the guide shaft 210.

The tube 510 forms an insertion hole in the center portion so that the guide shaft 210 is inserted to be coupled to the guide shaft 210, and forms a screw groove in the inner circumferential surface of the insertion hole and the outer circumferential surface of the guide shaft 210. ) Is screwed to the outer circumferential surface of the guide shaft 210.

The hot wire 520 is electrically connected to the power connector 530 which is coupled in a state where the inside of the actuator 100 is hermetically sealed to the bottom outer surface of the actuator 100 as in the first embodiment, and external power source to the power connector 530. The power line 540 of the supply unit (not shown) is connected to directly supply heat to the bellows 200 and the main body 300.

On the other hand, the tube 510 is preferably installed at a predetermined interval from the top when installed on the guide shaft 210. Therefore, when the guide shaft 210 slides upward, the tube 510 may be prevented from colliding with the lower end of the actuator 100.

As described above, the bellows valve for controlling the pressure of the LPCVD apparatus of the present invention heats the inside of the bellows 200 and the main body 300 by the heaters 400 and 500 that are supplied with power from an external power supply unit. Since the temperature change is small, the generation of powder (powder) to the corrugated outer surface of the bellows 200 and the mounting space 310 of the main body 300 is suppressed, and thereby the bellows 200 is stretched and contracted, thereby packing member 220. ) Stably opens and closes the inflow path 320 of the main body 300.

In addition, by suppressing the generation of powder in the bellows 200 and the main body 300 to increase the cleaning cycle and the use cycle of the bellows valve.

As described above, the decompression bellows valve of the LPCVD apparatus according to the present invention has a bellows and a corrugated outer surface of the bellows and a mounting space of the bellows due to a decrease in temperature by supplying heat directly to the inside of the bellows and the main body. It suppresses the generation of powder, which makes the bellows operate stably so that the gas flow can be opened and closed accurately, and the cleaning cycle and the use cycle are increased.

What has been described above is just one embodiment for implementing a pressure reducing bellows valve of the LPCVD apparatus according to the present invention, the present invention is not limited to the above embodiments, it is claimed in the utility model registration claims below As will be apparent to those skilled in the art to which the present invention pertains without departing from the gist of the present invention, there is a technical spirit of the present invention to the extent that various modifications can be made.

Claims (3)

An actuator which receives or discharges air from the outside, and a bellows coupled to a lower side of the actuator and guided by a guide shaft installed so as to slide up and down inside when the actuator is driven, and expanding or contracting up and down, and the actuator In the bellows valve having a main body coupled to the upper side and the bellows is mounted on the inside and the flow of gas passing through the inside by the expansion or contraction of the bellows is opened and closed, And a heater installed on the guide shaft of the bellows, the heater being heated by directly supplying heat to the bellows and the main body by receiving power from the outside. The bellows valve of claim 1, wherein the heater is a hot wire wound around the outer surface of the guide shaft a predetermined number of times. The bellows valve of claim 1, wherein the heater comprises a tube coupled to an outer circumferential surface of the guide shaft and a heating wire wound around the tube a predetermined number of times.