KR20020084515A - Sub-wordline driver - Google Patents

Abstract

PURPOSE: A sub word line driver is provided, which can fit pitch by reducing a width of a gate by connecting only one sun word line withdrawn from each word line between branch lines of the word line. CONSTITUTION: According to a semiconductor memory device, the first and the second diffusion region(31,32) are arranged in parallel with a sub word line, and an isolation area isolates the above two diffusion regions. The first sub word line active signal line(47) is contacted to the first diffusion region, and is formed on the first diffusion region, and is formed to cross with an arrangement direction of the diffusion regions. The second sub word line active signal line(48) is contacted with a top of the second diffusion region. The first word line is formed on the tops of the first and the second diffusion region at the same time. The first sub word line(39) is contacted with the first diffusion region between the first branch line and the second branch line of the first word line, and is withdrawn out of the first diffusion region. The second sub word line(40) is contacted with the second diffusion region between the first and the second branch line, and is adjacent to the first sub word line.

Description

Sub-wordline driver

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to semiconductor memory devices, and more particularly to a sub-wordline driver required for driving a word line of a cell.

As the degree of integration of semiconductor memories has been improved, efforts have been made to reduce the size of unit devices forming semiconductor devices such as DRAM (DRAM). And the width of device isolation regions have been reduced.

However, when the thickness of the gate oxide film is reduced, the voltage applied in proportion to the scaling factor needs to be reduced.

However, semiconductor memory devices such as word line decoders must have sufficiently large withstand voltages due to the relatively high applied voltage.

Due to the above reasons, there is a limit in reducing the gate length and the size of the device isolation region.

On the other hand, as the cell area becomes smaller, it is also necessary to reduce the pitch of the word lines.

1 is a plan view illustrating a structure of a subword line driver according to the related art.

Referring to FIG. 1, the diffusion regions 1 and 2 are arranged in one direction at predetermined intervals, and have a 'U' shape in a direction crossing the diffusion regions 1 and 2 on the diffusion regions 1 and 2. The word lines 3 to 6 are arranged, and adjacent to the word lines 3 to 6 in the same direction, but the sub word lines 7 to 14 in the diffusion regions 1 and 2 between the word lines 3 to 6. Is connected and is formed on the diffusion regions 1 and 2 in a direction intersecting with the diffusion regions 1 and 2, and has a subword line active signal line having lead lines contacted to the diffusion regions 1 and 2; (15, 16) are formed, the subword line active signal line 15 is arranged on the output side from the diffusion region 1 toward the cell array (not shown), and the subword line active signal line ( 16 is arranged on the input side to the diffusion region 16 in a word line decoder (not shown).

Here, the word line 3 forms a contact 17 at a drain junction that receives a pre-decoded word line signal from a lead line 15a arranged adjacent to one side in the first diffusion region 1. The subword line 7 is formed in the 'U'-shaped opening in the word line and is connected to the diffusion region 1 (18).

Accordingly, the drain contact 17 and the word line 3 and the subword line 7 in the diffusion region 1 form one driver 19.

In addition, an isolation region 20 is formed between the diffusion region 1 and the diffusion region 2 for separation between elements.

FIG. 2 is a cross-sectional view taken along the line AA ′ of FIG. 1.

A conventional word line driver having the above configuration will be described in detail with reference to FIGS. 1 and 2.

Here, reference numeral '21' denotes one unit, and the unit 21 receives input of one decoded word lines 3 to 6, so that two subword line active signal lines 15 and 16 are received. And two subword lines 7 and 8 again.

Meanwhile, even-numbered subword lines 7, 9, 11 and 13 connected to the diffusion region 1 are decoded by the subword line active signal line 15, and the subword line active signal line 16 is decoded. The odd subword lines 8, 10, 12, 14 connected to the diffusion region 2 are decoded.

Therefore, elements driving even subword lines 7, 9, 11, and 13 exist in the diffusion region 1, and odd subword lines 8, 10, 12, in the diffusion region 2 exist. There are elements driving 14).

Here, the width occupied by the driver 17 used by one decoder is called a decoder pitch.

However, the conventional subwordline driver as described above has the following problems.

That is, when the spacing between cells becomes narrow, it is difficult to match the spacing between each subword line and the cell unless the size of the contact connecting the diffusion region and the subword line active signal line and the subword line is reduced. As the memory capacity increases, this problem gets worse.

The present invention is to solve the above problems, it is divided into each diffusion region, so that only one subword line drawn from each word line is connected between the branch line of the word line, so that the width of the gate can be reduced It is an object of the present invention to provide a subword line driver capable of adjusting the pitch.

1 is a plan view showing a layout of a subword line driver according to the prior art;

FIG. 2 is a cross-sectional view of the plan view of FIG. 1 taken along the line AA ′; FIG.

3 is a plan view illustrating a layout of a subwordline driver according to an embodiment of the present invention;

4 is a cross-sectional view taken along the line B-B 'of FIG. 3;

5 is a plan view illustrating a layout of a subwordline driver according to another exemplary embodiment of the present invention;

* Description of the main parts of the drawing

31, 32: diffusion region

37, 38: wordline

39, 40: subword line

47, 48: subword line active signal line

49, 49 ', 49a, 49a': drain junction

50a, 50b: source junction

To achieve the above object, the present invention provides a subword line driver, comprising: first and second diffusion regions arranged side by side in a sub word line direction at predetermined intervals; An isolation region separating the two diffusion regions; A first subword line active signal line in contact with the first diffusion region and formed on the first diffusion region and intersecting with the arrangement direction of the first and second diffusion regions; A second subword line active signal line in contact with an upper portion of the second diffusion region in the same form as the first subword line active signal line; A first word line formed such that one end extended in the cell array direction and the other end branched from the one end and bent in the second direction in the same direction are overlapped on the first and second diffusion regions at the same time; A second end having the other end drawn out from the one contacted with the first diffusion region between the first branch line and the second branch line of the first word line to one side on the outer region of the first diffusion region in the cell array direction; 1 subword line; And another end adjacent to the first subword line, the same as the first subword line, from the one end contacting the second diffusion region between the first branch line and the second branch line of the first word line. And a second subword line.

In addition, the present invention, in order to achieve the above object, the subword line driver, the first to fourth diffusion region arranged side by side in the sub word line direction with a predetermined distance from each other; An isolation region separating the first to fourth diffusion regions; A first subword line active signal line in contact with the first and third diffusion regions, respectively, the planar shape having a 'c' shape and formed on the first and third diffusion regions; Contact with the second and fourth diffusion regions, respectively, and are formed on the second and fourth diffusion regions, and have a planar shape in an inverse 'C' shape to cross a horizontal side in a vertical direction with the first subword line active signal line. An overlapping second subword line active signal line; A first word line having one end extended in the cell array direction and the other end branched from the one end and bent in the second direction in the same direction and overlapping the first diffusion region and the second diffusion region at the same time ; A second word line adjacent to the first word line and formed in the same shape as the first word line; A third word having one end extended in the direction of the word line decoder and the other end branched from the one end and being bent in two steps in the same direction and overlapping the third diffusion region and the fourth diffusion region at the same time line; A fourth word line adjacent to the third word line and formed in the same shape as the third word line; A second end having the other end drawn out from one end of the first diffusion line between the first branch line and the second branch line of the first word line to one side on the outside of the first diffusion region in the cell array direction; 1 subword line; A second end that is drawn in the same manner as the first subword line from one end of the second diffusion region contacted between the first branch line and the second branch line of the first word line and is adjacent to the first subword line One second subwordline; Third and fourth subword lines respectively drawn from the contacts of the third and fourth diffusion regions between the two branch lines of the third word line to be adjacent to the first and second subword lines in the same direction; A fifth sub having the other end drawn out from one end of the first diffusion line between the first branch line and the second branch line of the second word line to the other side on the outside of the first diffusion region in the cell array direction; Wordline; A second end drawn in the same manner as the fifth subword line from one end contacting the second diffusion region between the first branch line and the second branch line of the second word line and adjacent to the fifth subword line; One sixth subword line; And seventh and eighth subword lines formed to be adjacent to the fifth and sixth subword lines in the same direction from the contacts with the third and fourth diffusion regions between the two branch lines of the fourth word line. Is done.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings so that those skilled in the art may easily implement the technical idea of the present invention. .

3 is a plan view illustrating a layout of a subword line driver according to an exemplary embodiment of the present invention, and FIG. 4 is a cross-sectional view taken along the line BB ′ of FIG. 3.

Referring to FIG. 3, in the word line driver of the present invention, the diffusion regions 31 and 32 are arranged side by side in the subword line direction at predetermined intervals, and the two diffusion regions 31 and 32 are separated by an element isolation region. It is isolated. A first subword line activation signal line 47 is formed to input a pre-decoded signal in the diffusion region 31 to provide a word line activation signal for activating a word line. 47 has a diffusion region 31 and a plurality of contacts 49.49 ', and is formed on the diffusion region 31 and intersects with the arrangement direction of the diffusion regions 31 and 32. The word line active signal line 48 is formed to form a plurality of contacts 49a and 49a 'over the diffusion region 32 in the same form as the subword line active signal line 47. The word line decoder (not shown) And a word line 37 for inputting a signal from the first line 37c, which is branched from the one end 37c extending in the cell array (not shown) direction and the second end in the same direction. The other ends of the bent branch lines 37a and 37b are upper portions of the diffusion regions 31 and 32. Are formed so as to overlap at the same time, the cell array (not shown) is oriented from one end 50a of the diffusion region 31 between the branch line 37a and the branch line 37b of the word line 37. Sub word line 39 having the other end drawn out to one side X on the outside of diffusion area 31 and diffusion area 32 between branch line 37a and branch line 37b of word line 37. A subword line 40 is formed from the one end 50b making contact with the subword line 39 and has the other end adjacent to the subword line 39.

5 is a plan view illustrating a layout of a subwordline driver according to another exemplary embodiment of the present invention.

Referring to FIG. 5, in the subword line driver of the present invention, the diffusion regions 31 to 34 are arranged side by side in the subword line direction with a predetermined distance from each other, and each diffusion region 31 to 34 is disposed in the device isolation region. It is isolated by each. A subword line activation signal line 47 is formed to input a predecoded signal in the diffusion regions 31 and 33 to provide a word line activation signal for activating the word line. Contacts 49, 49 ', 49 ", 49b, 49b' and 49b", respectively, and have a planar shape formed on the diffusion regions 31 and 33 in the shape of 'c', and the subword line active signal line ( 48 are contacted to the diffusion regions 32 and 34, respectively, 49a, 49a ', 49a ", 49c and 49c' 49c", and are formed on the diffusion regions 32 and 34, so that the planar shape is inverse ' The horizontal sides cross each other in a vertical direction with the subword line active signal line 47 in the form of a letter c '.

A word line 37 for inputting a signal from a word line decoder (not shown) is formed, which is branched from one end 37c extending in the cell array (not shown) direction and one end 37c. The other ends of the branch lines 37a and 37b, which are bent in two steps in the same direction, overlap the diffusion region 31 and the diffusion region 32 at the same time, and the word line 38 is adjacent to the word line 37. Is formed in the same shape,

One end 35c extended in the direction of the word line decoder (not shown) and the other end of the branch lines 35a and 35b branched from one end 35c but bent in two steps in the same direction are the diffusion region 33 and the diffusion region. (34) A word line 35 is formed so as to overlap at the same time, and the word line 36 is adjacent to the word line 35 but is formed in the same shape as the word line 35.

Further, an area outside the diffusion area 31 in the direction of a cell array (not shown) from the one end 50a contacted with the diffusion area 31 between the branch line 37a and the branch line 37b of the word line 37. A sub word line 39 having the other end drawn out on one side X of the image, and one end 50b contacted to the diffusion region 32 between the branch line 37a and the branch line 37b of the word line 37. A subword line 40 is drawn from the same as the subword line 39 and has the other end adjacent to the subword line 39, and is formed between two branch points 35a and 35b of the word line 35. The subword lines 41 and 42 are drawn out from the contacts 51a and 51b with the diffusion regions 33 and 34 in the same direction as the subword lines 39 and 40, respectively. Region outside the diffusion region 31 in the direction of a cell array (not shown) from one end 52a making contact with the diffusion region 31 between the branch line 38a and the branch line 38b of One end making contact with the diffusion region 32 between the branch line 38a and the branch line 38b of the sub word line 43 having the other end drawn out to the other side X 'on the top of the word line 38. A subword line 44 which is drawn in the same manner as the subword line 43 and has the other end adjacent to the subword line 43, and the diffusion region 33 between the two branch points 36a and 36b of the word line. The subword lines 45 and 46 are formed to be adjacent to the subword lines 43 and 44 from the contacts 53a and 53b of FIG.

The subwordline driver of the present invention having the above configuration will be described in detail with reference to Figs.

As shown in FIG. 5, there are four diffusion regions 31 to 34 in total, and for example, unit devices for driving odd and even numbers are formed therein.

The subword line active signal line 47 passes through the diffusion region 31 and the diffusion region 33 to activate the even subword lines 39, 41, 43, and 45, and the diffusion region 32 and the diffusion region ( 34, activates odd subword lines 40, 42, 44, 46.

That is, the even subword lines 39 and 43 are output in the diffusion region 31, and the odd subword lines 40 and 44 are output in the diffusion region 32.

Similarly, even subword lines 41 and 45 are output in the diffusion region 33 and odd subword lines 42 and 46 are output in the diffusion region 34.

In this case, the word lines 35 and 36 are gate inputs of the unit elements included in the diffusion regions 33 and 34, and the word lines 37 and 38 are diffusion regions as shown in FIGS. 4A and 37B of FIG. 4. As the gate input of the unit devices included in (31, 32), the subword line active signal line 47 forms contacts with the drain junctions of the unit devices (49, 49 ') as shown in FIG.

Further, of the subword lines 39 to 46, the subword lines 39 to 42 have a diffusion region between the branch lines 35a and 37a of the word lines 35 and 37 and the branch lines 35b and 37b. And the other end drawn out from one end (50a, 50b, 51a, 51b) contacted at 31 to 34 to one side (X) on the diffusion region 31 to 34 in the cell array (not shown) direction. The sub word lines 43 to 46 have one end 52a contacted to the diffusion regions 31 to 34 between the branch lines 36a and 38a of the word lines 36 and 38 and the branch lines 36b and 38b. 52b, 53a, 53b, and the other end drawn out to the other side X 'on the diffusion region 31-34 outer region which is a cell array (not shown) direction.

Here, the contacts 49 to 49c ″ of the diffusion regions 31 to 34 and the subword line active signal lines 47 and 48 are contacted at the drain junctions, and the subword lines 39 to 46 and the diffusion region 31 are connected. The contacts 50a to 53b of the contact 34 to 34 are contacted at the source junction.

In addition, the word lines 37 and 38 form a pair and have a structure in which the pair of word lines 35 and 36 face each other in plan view by the device isolation region between the diffusion region 32 and the diffusion region 33. Achieve. However, for the routing of each word line 35 to 38, the structure is staggered through a predetermined interval in the direction perpendicular to the plane.

The subword lines 39, 40, 41, and 42 pass on one side X of the region outside the diffusion regions 31 to 34, and the subword lines 43, 44, 45 and 46 pass through the diffusion regions 31 to 34. Since it passes over the other side X 'of the outer region, the space due to the isolation of the diffusion regions 31 to 34, for example, the isolation regions X and X', is sufficiently utilized.

Accordingly, by sequentially distributing the odd-word subword line drivers in the four separate diffusion regions 31 to 34, the pitch with the cells can be easily matched.

Although the technical idea of the present invention has been described in detail according to the above preferred embodiment, it should be noted that the above-described embodiment is for the purpose of description and not of limitation. In addition, those skilled in the art will understand that various embodiments are possible within the scope of the technical idea of the present invention.

According to the present invention as described above, by distributing holes and pairs of subword line drivers in four separate diffusion regions in order, the pitch of the cells can be easily matched, thereby improving chip integration.

Claims (9)

In a semiconductor memory device, First and second diffusion regions having a predetermined interval and arranged side by side in the subword line direction; An isolation region separating the two diffusion regions; A first subword line active signal line in contact with the first diffusion region and formed on the first diffusion region and intersecting with the arrangement direction of the first and second diffusion regions; A second subword line active signal line in contact with an upper portion of the second diffusion region in the same form as the first subword line active signal line; A first word line formed such that one end extended in the cell array direction and the other end branched from the one end and bent in the second direction in the same direction are overlapped on the first and second diffusion regions at the same time; A second end having the other end drawn out from the one contacted with the first diffusion region between the first branch line and the second branch line of the first word line to one side on the outer region of the first diffusion region in the cell array direction; 1 subword line; And A second end that is drawn in the same manner as the first subword line from one end of the second diffusion region contacted between the first branch line and the second branch line of the first word line and is adjacent to the first subword line One second subwordline Subword line driver comprising a. The method of claim 1, Each of the first and second diffusion regions includes unit devices for driving subword lines of even or odd addresses, and when the first diffusion region is an even number, the second diffusion region is an odd number and the first diffusion region. And if the region is odd, the second diffusion region is even. The method of claim 1, And the diffusion region and the subword line active signal line are contacted at a drain junction. The method of claim 1, And the subword line and the diffusion region are contacted at a source junction. In a semiconductor memory device, First to fourth diffusion regions having a predetermined spacing therebetween and arranged side by side in the subword line direction; An isolation region separating the first to fourth diffusion regions; A first subword line active signal line in contact with the first and third diffusion regions, respectively, the planar shape having a 'c' shape and formed on the first and third diffusion regions; Contact with the second and fourth diffusion regions, respectively, and are formed on the second and fourth diffusion regions, and have a planar shape in an inverse 'C' shape to cross a horizontal side in a vertical direction with the first subword line active signal line. An overlapping second subword line active signal line; A first word line having one end extended in the cell array direction and the other end branched from the one end and bent in the second direction in the same direction and overlapping the first diffusion region and the second diffusion region at the same time ; A second word line adjacent to the first word line and formed in the same shape as the first word line; A third word having one end extended in the direction of the word line decoder and the other end branched from the one end and being bent in two steps in the same direction and overlapping the third diffusion region and the fourth diffusion region at the same time line; A fourth word line adjacent to the third word line and formed in the same shape as the third word line; A second end having the other end drawn out from one end of the first diffusion line between the first branch line and the second branch line of the first word line to one side on the outside of the first diffusion region in the cell array direction; 1 subword line; A second end that is drawn in the same manner as the first subword line from one end of the second diffusion region contacted between the first branch line and the second branch line of the first word line and is adjacent to the first subword line One second subwordline; Third and fourth subword lines respectively drawn from the contacts of the third and fourth diffusion regions between the two branch lines of the third word line to be adjacent to the first and second subword lines in the same direction; A fifth sub having the other end drawn out from one end of the first diffusion line between the first branch line and the second branch line of the second word line to the other side on the outside of the first diffusion region in the cell array direction; Wordline; A second end drawn in the same manner as the fifth subword line from one end contacting the second diffusion region between the first branch line and the second branch line of the second word line and adjacent to the fifth subword line; One sixth subword line; And A seventh and eighth subword line formed to be adjacent to the fifth and sixth subword lines in the same direction from a contact with the third and fourth diffusion regions between two branch lines of the fourth word line; Subword line driver comprising a. The method of claim 5, Each of the first to fourth diffusion regions includes unit devices for driving subword lines of even or odd addresses, and the second and fourth diffusion regions are odd when the first and third diffusion regions are even. And the second and fourth diffusion regions are even when the first and third diffusion regions are odd. The method of claim 5, And each of the subword lines and each of the diffusion regions is contacted at a source junction. The method of claim 5, And each of the subword line active signal lines and each of the diffusion regions is contacted at a source junction. The method of claim 5, The first and second word lines form a pair, and have a structure in which the first and second word lines face each other in plan view by the device isolation region between the second diffusion region and the third diffusion region. And a structure intersected through a predetermined interval in a direction perpendicular to the plane for routing the respective word lines.