KR20020059313A - Apparatus for optical interconnecting by using optical connection rods - Google Patents
Apparatus for optical interconnecting by using optical connection rods Download PDFInfo
- Publication number
- KR20020059313A KR20020059313A KR1020020033931A KR20020033931A KR20020059313A KR 20020059313 A KR20020059313 A KR 20020059313A KR 1020020033931 A KR1020020033931 A KR 1020020033931A KR 20020033931 A KR20020033931 A KR 20020033931A KR 20020059313 A KR20020059313 A KR 20020059313A
- Authority
- KR
- South Korea
- Prior art keywords
- optical
- array
- connecting rod
- optical waveguide
- surface emitting
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 152
- 238000000034 method Methods 0.000 claims abstract description 18
- 239000004065 semiconductor Substances 0.000 claims abstract description 18
- 239000010409 thin film Substances 0.000 claims description 7
- 239000006117 anti-reflective coating Substances 0.000 claims description 5
- 238000005253 cladding Methods 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 4
- 238000004806 packaging method and process Methods 0.000 claims description 4
- 239000004593 Epoxy Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000012792 core layer Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000013307 optical fiber Substances 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 238000002310 reflectometry Methods 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 239000013308 plastic optical fiber Substances 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 8
- 229910000679 solder Inorganic materials 0.000 abstract description 7
- 230000008054 signal transmission Effects 0.000 abstract description 3
- 238000003491 array Methods 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000009429 electrical wiring Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 150000003071 polychlorinated biphenyls Chemical class 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B2/00—Friction-grip releasable fastenings
- F16B2/20—Clips, i.e. with gripping action effected solely by the inherent resistance to deformation of the material of the fastening
- F16B2/22—Clips, i.e. with gripping action effected solely by the inherent resistance to deformation of the material of the fastening of resilient material, e.g. rubbery material
- F16B2/24—Clips, i.e. with gripping action effected solely by the inherent resistance to deformation of the material of the fastening of resilient material, e.g. rubbery material of metal
- F16B2/248—Clips, i.e. with gripping action effected solely by the inherent resistance to deformation of the material of the fastening of resilient material, e.g. rubbery material of metal of wire
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B7/00—Connections of rods or tubes, e.g. of non-circular section, mutually, including resilient connections
- F16B7/04—Clamping or clipping connections
- F16B7/0406—Clamping or clipping connections for rods or tubes being coaxial
- F16B7/0426—Clamping or clipping connections for rods or tubes being coaxial for rods or for tubes without using the innerside thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L3/00—Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets
- F16L3/08—Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets substantially surrounding the pipe, cable or protective tubing
- F16L3/12—Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets substantially surrounding the pipe, cable or protective tubing comprising a member substantially surrounding the pipe, cable or protective tubing
- F16L3/13—Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets substantially surrounding the pipe, cable or protective tubing comprising a member substantially surrounding the pipe, cable or protective tubing and engaging it by snap action
Abstract
Description
본 발명은 광연결봉을 이용한 광연결 장치에 관한 것으로, 특히 다수의 반도체 칩이 실장되어 있는 보드에 있어서, 광도파로가 매몰된 광기판에 광연결봉을 이용하여 광신호를 전송할 수 있도록 하는 광연결 패키징 장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical connecting device using an optical connecting rod. In particular, in a board on which a plurality of semiconductor chips are mounted, an optical connecting packaging for transmitting an optical signal using an optical connecting rod to an optical substrate in which an optical waveguide is buried. Relates to a device.
통상적으로, 광연결 패키징 장치는 다수의 반도체 칩을 실장하면서 전기적 배선을 통해 각종 신호를 제공하는 시스템으로, 배선의 밀도가 높고 상대적으로 거리가 긴 배선을 필요로 하는 차세대 고속 병렬 컴퓨터에 상술한 시스템을 적용하기에는 다소 어려움이 있다.In general, an optical connection packaging apparatus is a system that mounts a plurality of semiconductor chips and provides various signals through electrical wiring, and the system described above in next-generation high-speed parallel computers requiring high wiring density and relatively long wiring. There is some difficulty in applying this.
즉, 배선의 길이가 길어지면 전송선 효과가 전기배선의 성능을 좌우함에 따라 전송선 효과는 표피효과를 통해 전기 신호를 감쇠시킬 뿐만 아니라 배선이 적절하게 종단되지 않으면 신호의 다중 반사를 일으키게 된다.In other words, as the length of the wire increases, the transmission line effect influences the performance of the electrical wiring, and the transmission line effect not only attenuates the electrical signal through the skin effect, but also causes multiple reflection of the signal if the wiring is not properly terminated.
또한, 보드간의 전기적 연결선에 있어서, 데이터 전송속도가 시스템 전체의 데이터 처리 속도를 제한하는 병목구간이 되고 있어 전기적 배선의 단점을 해결하기 위해 광연결(optical interconnection)을 적용한다.In addition, in the electrical connection line between the board, the data transfer rate becomes a bottleneck limiting the data processing speed of the entire system, and optical interconnection is applied to solve the shortcomings of the electrical wiring.
여기서, 광연결은 대역폭이 넓고 크로스토크(crosstalk) 및 신호간 간섭에 둔감하므로 광연결을 이용하면 칩간에 고속의 신호 전송이 가능하고 배선 밀도를 증가시킬 수 있으며, 시스템의 전력 소모, 크로스토크, 전자기적 간섭을 줄일 수있으며, 수 미터에서 수백 미터 거리의 시스템간 데이터 전송과, 수십 센티미터 거리의 시스템 내 보드간 연결과, 보드상에서 수 센티미터에서 수십 센티미터 거리간 데이터 링크 등에 광범위하게 응용되고 있다.Here, the optical connection has a wide bandwidth and is insensitive to crosstalk and inter-signal interference. Therefore, the optical connection enables high-speed signal transmission between chips and increases wiring density. The power consumption of the system, crosstalk, Electromagnetic interference can be reduced, and it is widely used for inter-system data transmission of several meters to hundreds of meters, inter-board connections in systems of tens of centimeters, and data links of several centimeters to tens of centimeters on board.
이와 같이, 광연결을 위해서는 각 송수신부의 끝단이 광섬유 리본 또는 광도파로 어레이와 접속되어야 한다. 즉, 광연결의 광범위한 응용을 위해서는 전기적 회로기판(Printed Circuit Board : PCB) 기술에 적용할 수 있는 구조로 발전되어야 할 필요가 있으며, 이를 감안하여 광도파로를 PCB속에 매몰시킨 보드를 이용하여 광연결하는 개발이 필요한 것이다.As such, for the optical connection, an end portion of each transceiver is connected to an optical fiber ribbon or an optical waveguide array. In other words, in order to apply a wide range of optical connections, it is necessary to develop a structure that can be applied to a printed circuit board (PCB) technology. In view of this, optical connections are made using a board in which an optical waveguide is buried in a PCB. Development is needed.
광도파로가 매몰된 PCB의 제조기술과 더불어 광연결 패키징 기술은 10채널 이상의 레이저 다이오드 어레이 기술, 패키징내 광신호 전달용으로 리소그래피나 리가(LIGA) 공정 등을 이용한 고분자 광도파로 제조기술, 광송수신 소자와 광선로간의 신호연결을 위해 실리콘 광학벤치, 렌즈, 마이크로 미러 등과 같이 대 다수에서 진행되고 있는 실정이다.In addition to the manufacturing technology of PCBs with optical waveguides embedded, optical connection packaging technology includes more than 10-channel laser diode array technology, polymer optical waveguide manufacturing technology using lithography or liga process for optical signal transmission in packaging, and optical transmission and reception device. In many cases, such as silicon optical bench, lens, micro-mirror for the signal connection between the optical path and the optical path.
상술한 종래 단위 기술을 이용한 광연결 구조에서 광송수신 소자에서 출사 또는 입사되는 광이 PCB내에 내장되어 있는 광도파로에 광연결되기 위해 마이크로 렌즈 등을 사용한 기술이 이용되고 있는 실정이지만, 단위 기술을 종합적으로 이용한 보드를 제작하더라도 광학용 PCB내에 매몰되는 광도파로에 대한 공정의 어려움과 광송수신 소자에서 PCB내에 매몰된 광도파로와의 광연결 및 광정렬의 어려움이 있다.In the optical connection structure using the conventional unit technology described above, a technique using a microlens or the like is used to optically connect light emitted or emitted from an optical transmission / reception element to an optical waveguide embedded in a PCB. Even if a board is used as a substrate, there are difficulties in the process of the optical waveguide embedded in the optical PCB and optical connection and alignment of the optical waveguide embedded in the PCB in the optical transmission and reception device.
또한, 광송수신부에서 출사 또는 입사되는 광을 PCB내에 매몰된 광도파로에수직으로 광연결하기 위해서는 광도파로의 양 끝부분을 45도로 식각 또는 절단해야 하는 공정상의 어려움이 있으며, 광연결의 고효율을 위한 반사를 효율적으로 할 수 있는 광학 핀을 사용하는 경우, 광송신부에서 출사되는 광의 퍼짐에 따른 광손실이 증가하게 된다.In addition, in order to optically connect the light emitted from or received from the optical transmitter and receiver to the optical waveguide buried in the PCB, there is a process difficulty in etching or cutting both ends of the optical waveguide at 45 degrees. In the case of using an optical pin capable of efficiently reflecting light, the optical loss due to the spread of the light emitted from the optical transmitter is increased.
특히, 광송신부의 표면방출 레이저/발광 다이오드의 경우처럼 출사되는 광의 퍼짐에 따라 크로스토크(crosstalk) 및 신호적 간섭에 의한 광연결의 부정확성과 손실이 발생하였다. 이러한 단점을 보완하기 위해 광집속을 위한 마이크로 렌즈를 광송수신부와 광도파로 사이에 형성해야 하는 공정과 제조상의 어려움으로 인해 복잡한 광연결 구조를 형성해야 한다는 단점이 있다.In particular, as the surface emitting laser / light emitting diode of the light transmitting unit spreads the emitted light, inaccuracy and loss of the optical connection due to crosstalk and signal interference occurs. In order to compensate for these disadvantages, a complicated optical connection structure has to be formed due to a process and manufacturing difficulties in which a microlens for condensing light is formed between an optical transmitter and an optical waveguide.
또한, 광결합 효율을 높이기 위해 측면방출 레이저와 광도파로의 높이를 정확히 일치시켜야 하기 때문에 광정렬(optical align)이 용이하지 않으며, 마이크로 렌즈, 표면방출 레이저/발광 다이오드, 포토 다이오드, 45도면을 가지는 광도파로와의 광정렬이 불가능하다는 문제점이 있었다.In addition, optical alignment is not easy because the height of the side emitting laser and the optical waveguide must be exactly matched to increase the optical coupling efficiency, and the microlens, the surface emitting laser / light emitting diode, the photodiode, and the 45-degree There was a problem that optical alignment with an optical waveguide was impossible.
따라서, 본 발명은 상술한 문제점을 해결하기 위해 안출한 것으로서, 그 목적은 광도파로가 매몰된 광기판에 광연결봉을 직접 삽입하여 반도체 칩간의 신호를 고속으로 전송할 수 있도록 하며, 단위 광기판 및 광소자 제조 기술을 바탕으로 제조된 개별 광부품을 이용할 수 있다는 장점이 있으며, 또한 플립 칩 본딩 방식을 이용하여 광정렬의 정밀성이 큰 반도체 칩간 광연결 구조를 제공할 수 있도록 하는 광연결봉을 이용한 광연결 장치를 제공함에 있다.Accordingly, an object of the present invention is to solve the above-described problems, and an object thereof is to directly insert an optical connecting rod into an optical substrate in which an optical waveguide is buried so that signals between semiconductor chips can be transmitted at high speed, and a unit optical substrate and an optical There is an advantage in that individual optical parts manufactured based on device manufacturing technology can be used, and optical connection using optical connecting rods can provide an optical connection structure between semiconductor chips with high precision of optical alignment using flip chip bonding. In providing a device.
상술한 목적을 달성하기 위한 본 발명에서 광연결봉을 이용한 광연결 장치는 제1 회로 기판 상에 실장되며, 전기적 신호에 따라 구동되는 제1 반도체 칩; 제1 반도체 칩에 의해 구동되는 레이저 구동회로에 의해 고속으로 변조되는 표면방출 레이저(Vertical-cavity surface-emitting laser, VCSEL) 또는 표면발광 다이오드(LED)와 같은 표면방출 광원 어레이; 제2,3 회로 기판의 관통 구멍에 각각 삽입되어 있으며, 표면방출 광원 어레이에서 출사된 변조광을 경사진 반사면(54) 예로서 45경사진 것과 같은 반사면에서 반사시켜 광도파로 어레이에 입사시키며, 광도파로 어레이를 통해 입사되는 광을 경사진 반사면(54-1)에서 반사시켜 광검출기 창문으로 빛을 보내주는 광연결봉 어레이; 광연결봉 어레이를 통해 입사된 광을 각각 독립적으로 수광하는 광검출기 어레이; 광검출기 어레이에서 수광된 광신호를 전기적 신호로 변환하여 제2 반도체 칩에 제공하는 광수신기 칩을 포함하는 것을 특징으로 한다.In the present invention for achieving the above object, an optical connecting device using an optical connecting rod is mounted on a first circuit board, the first semiconductor chip is driven in accordance with an electrical signal; A surface emitting light source array such as a vertical-cavity surface-emitting laser (VCSEL) or surface emitting diode (LED) that is modulated at high speed by a laser drive circuit driven by a first semiconductor chip; 45. As an example of the reflective surface 54 in which the modulated light emitted from the surface-emitting light source array is inserted into the through hole of the second and third circuit boards, respectively, is inclined. An optical connecting rod array reflecting light from an inclined reflecting surface to the optical waveguide array and reflecting light incident through the optical waveguide array from the inclined reflecting surface 54-1 to send light to the photodetector window; A photodetector array configured to independently receive light incident through the optical connecting rod array; And an optical receiver chip for converting the optical signal received from the photodetector array into an electrical signal and providing the second signal to the second semiconductor chip.
도 1은 본 발명에 따른 광연결봉을 이용한 광연결 장치의 수직방향 단면도이고,1 is a vertical cross-sectional view of an optical connecting device using an optical connecting rod according to the present invention,
도 2는 본 발명에 따른 광연결봉을 이용한 광연결 장치의 수평방향 단면도이며,2 is a horizontal cross-sectional view of an optical connecting device using an optical connecting rod according to the present invention,
도 3은 본 발명에 따른 회로 기판의 관통 구멍 형성도를 도시한 도면이며,3 is a view showing a through-hole formation of a circuit board according to the present invention,
도 4는 본 발명에 따른 광연결봉 어레이의 형태도를 도시한 도면이다.4 is a diagram illustrating a shape of an optical connecting rod array according to the present invention.
<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>
10,20,30 : 제1,2,3 회로 기판 3,8 : 제1,2 반도체 칩10,20,30: 1st, 2nd, 3rd circuit board 3,8: 1st, 2nd semiconductor chip
4 : 레이저 구동 칩 5 : 표면방출 광원 어레이4 laser driving chip 5 surface emitting light source array
6 : 광검출기 어레이 7 : 광수신기 칩6 photodetector array 7 photoreceiver chip
12 : 광도파로 어레이 13 : 광도파로의 클래딩12: Optical Waveguide Array 13: Cladding of Optical Waveguide
50,50-1,51,51-1 : 관통 구멍 52,52-1,53,53-1 : 광연결봉 어레이50,50-1,51,51-1: through hole 52,52-1,53,53-1: optical connecting rod array
54,54-1 : 반사면 70 : 에폭시54,54-1: Reflective surface 70: Epoxy
55,56 : 무반사 코팅 57 : 반사코팅55,56 Anti-reflective coating 57: Reflective coating
58 : 집속 렌즈 59 : 코아층58: focusing lens 59: core layer
60 : 클래딩60: cladding
이하, 첨부된 도면을 참조하여 본 발명에 따른 일 실시예를 상세하게 설명하기로 한다.Hereinafter, with reference to the accompanying drawings will be described in detail an embodiment according to the present invention.
도 1은 본 발명에 따른 광연결봉을 이용한 광연결 장치의 수직방향 단면도이고, 도 2는 광연결 장치의 수평방향 단면도이며, 도 3은 도 1 및 도 2에 도시된 관통 구멍(50, 50-1, 51, 51-1)의 형성도를 도시한 도면으로서, 제1 회로 기판(10)과 제2,3 회로 기판(20, 30)간에 솔더 범프(S1)와 같이 플립 칩 솔더 본딩 기술을 통해 부착 공정을 수행한 후, 제1 회로 기판(10) 상에 솔더 범프(S1)와 같이 플립 칩솔더 본딩 기술을 통해 제1,2 반도체 칩(3, 8)과 레이저 구동 칩(4)과 표면방출 광원 어레이(5)와 광검출기 어레이(6)와 광수신기 칩(7)들이 각각 부착되도록 구비하며, 제2,3 회로 기판(20, 30)에 관통 구멍(50, 50-1, 51, 51-1)이 뚫려 있고, 이 관통 구멍(50, 50-1, 51, 51-1)을 통해 한 면에 경사진 반사면(54, 54-1)을 갖는 광연결봉 어레이(52, 52-1, 53, 53-1)가 삽입되어 표면방출 광원 어레이(5)에서 제공되는 광 신호를 광검출기 어레이(6)에 입사될 수 있도록 구성된다.1 is a vertical cross-sectional view of an optical connecting device using an optical connecting rod according to the present invention, Figure 2 is a horizontal cross-sectional view of the optical connecting device, Figure 3 is a through hole (50, 50-) shown in Figures 1 and 2 1, 51, and 51-1 are diagrams showing the formation of flip chip solder bonding techniques between the first circuit board 10 and the second and third circuit boards 20 and 30, like solder bumps S1. After the adhesion process is performed, the first and second semiconductor chips 3 and 8 and the laser driving chip 4 may be formed on the first circuit board 10 through a flip chip solder bonding technique, such as solder bumps S1. The surface emitting light source array 5, the photodetector array 6, and the photoreceiver chip 7 are attached to each other, and the through holes 50, 50-1, and 51 are formed in the second and third circuit boards 20 and 30, respectively. , 51-1, having optical holes, 52, 52 having reflective surfaces 54, 54-1 inclined to one surface through the through holes 50, 50-1, 51, and 51-1. -1, 53, 53-1 are inserted into the surface emitting light source array 5 Is configured to be able to enter the photodetector array 6.
상술한 구성을 바탕으로, 본 발명에 따른 광연결봉을 이용한 광연결 장치의 동작 원리 및 그 작동 방법에 대하여 보다 상세하게 설명한다.Based on the above-described configuration, the operation principle of the optical connecting device using the optical connecting rod according to the present invention and its operation method will be described in more detail.
먼저, 제1 회로 기판(10) 상에 실장된 제1 반도체 칩(3)의 전기적 신호에 따라 구동되는 레이저 구동회로에 의해 표면방출 광원 어레이(5)를 이루는 표면방출 광원소자가 각각 독립적으로 구동하여 고속으로 변조되는 표면방출 광원으로부터 소정 파장의 변조광을 출사하여 광연결봉 어레이(52, 52-1)에 각각 제공한다.First, the surface emitting light source elements constituting the surface emitting light source array 5 are independently driven by a laser driving circuit driven according to an electrical signal of the first semiconductor chip 3 mounted on the first circuit board 10. By emitting modulated light of a predetermined wavelength from the surface emitting light source is modulated at a high speed to provide to the optical connecting rod array (52, 52-1).
그러면, 표면방출 광원 어레이(5)에서 출사된 광은 광연결봉 어레이(52, 52-1)를 통해 전송되고, 이 광연결봉 어레이(52, 52-1)의 경사진 반사면(54)에서 반사되어 광도파로 어레이(12)에 입사된다.Then, the light emitted from the surface emitting light source array 5 is transmitted through the light connecting rod arrays 52 and 52-1, and reflected by the inclined reflecting surface 54 of the light connecting rod arrays 52 and 52-1. And enters the optical waveguide array 12.
다시, 광도파로 어레이(12)를 통해 입사된 광은 광연결봉 어레이(53)의 경사진 반사면(54-1)에서 반사되어 광연결봉 어레이(53)를 통해 광검출기 어레이(6)에 입사된다.Again, light incident through the optical waveguide array 12 is reflected at the inclined reflecting surface 54-1 of the optical rod array 53 and is incident on the photodetector array 6 through the optical rod array 53. .
광검출기 어레이(6)는 광연결봉 어레이(53)를 통해 입사된 광을 각각 독립적으로 수광하며, 이어서 광수신기 칩(7)에서 수광된 광신호를 전기적 신호로 변환하여 제2 반도체 칩(8)에 제공한다.The photodetector array 6 independently receives the light incident through the optical connecting rod array 53, and then converts the optical signal received by the photoreceiver chip 7 into an electrical signal to convert the second semiconductor chip 8 into an electrical signal. To provide.
여기서, 표면방출 광원 어레이(5)는 일반적인 표면방출 광원 어레이를 이용하며, 광검출기 어레이(6)는 포토다이오드를 이용한다.Here, the surface emitting light source array 5 uses a general surface emitting light source array, and the photodetector array 6 uses a photodiode.
또한, 표면방출 광원 어레이(5)는 회로기판(20, 30) 방향으로 광을 출사하는 구조(top-emitting structure)를 가지며, 광검출기 어레이(6)는 회로기판(20, 30) 방향에서 광이 입사되는 구조(top-illuminated structure)를 갖으며, 광수신기 칩(7)과 광검출기 어레이(6)는 하나의 칩으로 구성될 수도 있으며, 제1,2 반도체 칩(3, 8)은 마이크로프로세스(MPU) 및 메모리 등과 같은 반도체 칩일 수 있다.Further, the surface emitting light source array 5 has a top-emitting structure that emits light in the direction of the circuit boards 20 and 30, and the photodetector array 6 has light in the direction of the circuit boards 20 and 30. It has a top-illuminated structure, the photoreceiver chip 7 and the photodetector array 6 may be composed of one chip, the first and second semiconductor chips (3, 8) are micro A semiconductor chip such as a process (MPU) and a memory.
그리고, 광연결봉 어레이(52, 52-1, 53, 53-1)는 광전달에 있어서 광손실이 적고, 열적, 화학적 안정성이 우수한 광섬유, 광플라스틱, 유리등과 같은 재료로 이루어지며, 제2,3 회로 기판(20, 30)에 형성된 관통 구멍(50, 50-1, 51, 51-1)에 삽입되어 광도파로 어레이(12)에 연결된다.The optical connecting rod arrays 52, 52-1, 53, and 53-1 are made of a material such as optical fiber, optical plastic, glass, etc., which have low light loss and excellent thermal and chemical stability in light transmission. And inserted into the through holes 50, 50-1, 51, and 51-1 formed in the three circuit boards 20 and 30 and connected to the optical waveguide array 12.
여기서, 관통 구멍(50, 50-1, 51, 51-1)은 원기둥 및 사각형의 형태를 가질 수 있으며, 광도파로 어레이(12)는 광연결봉 어레이(52, 52-1, 53, 53-1)의 대향면에 형성되어 대향면쪽은 빛을 광도파로속으로 보낼 수 있도록 경사지게 절단된 반사면(54, 54-1)을 갖으며, 이 반사면(54, 54-1)에는 반사효율을 증대시키기 위해 금(Au), 은(Ag) 알루미늄(Al) 등의 금속 박막같은 고반사율 박막으로 코팅되어 있다.Here, the through holes 50, 50-1, 51, and 51-1 may have cylindrical and rectangular shapes, and the optical waveguide array 12 may include optical connection rod arrays 52, 52-1, 53, and 53-1. ) Is formed on the opposite surface of the surface) and the opposite surface has reflective surfaces 54 and 54-1 which are inclinedly cut so as to send light into the optical waveguide, and the reflective surfaces 54 and 54-1 increase reflection efficiency. In order to achieve this, the film is coated with a high reflectance thin film such as a metal thin film of gold (Au), silver (Ag), aluminum (Al), or the like.
또한, 도 4를 참조하면, 본 발명에 따른 광연결봉 어레이의 형태도를 도시한 도면이며, 도 4a의 원기둥 형태와 도 4b의 사각형 형태를 갖는 것으로, 표면방출광원 어레이(5)에서 출사되는 광을 광도파로 어레이(12)에 출사할 때, 광손실을 줄이기 위해 광연결봉 어레이(52, 52-1, 53, 53-1) 밑면에 집속 렌즈(58)와 무반사 코팅(55)을 형성하고, 광연결봉 어레이(52, 53) 윗면에 무반사 코팅(56)을 형성하며, 광연결봉 어레이(52, 52-1, 53, 53-1) 옆면에 금속박막 같은 고반사율의 박막을 이용하여 반사코팅(57)을 형성하며, 광연결봉 어레이(52, 52-1, 53, 53-1)를 클래딩(60)으로 둘러싸여 있는 굴절률이 높은 광도파로용의 코아층(59)을 만들어 광연결의 효율을 증가시킨다.In addition, referring to Figure 4, it is a view showing the shape of the optical connecting rod array according to the present invention, having a cylindrical shape of Figure 4a and a square shape of Figure 4b, the light emitted from the surface emitting light source array (5) To the optical waveguide array 12 to form a focusing lens 58 and an anti-reflective coating 55 on the bottom of the optical connecting rod array 52, 52-1, 53, 53-1 to reduce light loss, The antireflective coating 56 is formed on the tops of the optical connecting rod arrays 52 and 53, and the reflective coating is performed on the side of the optical connecting rod arrays 52, 52-1, 53 and 53-1 by using a thin film of high reflectivity such as a metal thin film. 57) to increase the efficiency of the optical connection by forming a core layer 59 for a high refractive index optical waveguide in which the optical connecting rod arrays 52, 52-1, 53, 53-1 are surrounded by the cladding 60. Let's do it.
한편, 광연결봉 어레이(52, 52-1, 53, 53-1)와 광도파로 어레이(12) 간의 간격에 의한 굴절률 변화를 상쇄시키고, 광연결봉 어레이(52, 52-1, 53, 53-1)의 접착력을 향상시키기 위해 굴절률 매칭 오일 또는 굴절률 매칭 폴리머를 통해 굴절률 매칭 에폭시(70)를 삽입한다.Meanwhile, the change in refractive index due to the gap between the optical rod arrays 52, 52-1, 53, 53-1 and the optical waveguide array 12 is canceled, and the optical rod arrays 52, 52-1, 53, 53-1 are offset. Refractive index matching epoxy 70 is inserted through the refractive index matching oil or refractive index matching polymer to improve the adhesion of the < RTI ID = 0.0 >
그리고, 도 1에 도시된 광도파로 어레이(12)는 레이저 발진 파장에서 광도파 손실이 적고, 열적, 화학적 안정성이 우수한 폴리이미드(polyimide)계 고분자, 비정질 Si3N4, SiO2-TiO2유리등과 같은 재료로 만들어지는 다모드(multimode) 광도파로이며, 광도파로의 클래딩(13)은 광도파로 어레이(12)에 광을 구속시킴과 동시에 광도파로 어레이(12)를 보호하며, 광도파 어레이(12)보다 굴절률이 작은 물질로 이루어져 있다.In addition, the optical waveguide array 12 shown in FIG. 1 is a polyimide-based polymer, amorphous Si 3 N 4 , SiO 2 -TiO 2 glass having low optical waveguide loss and excellent thermal and chemical stability at a laser oscillation wavelength. It is a multimode optical waveguide made of a material such as, and the like, the cladding 13 of the optical waveguide confines the light to the optical waveguide array 12 and simultaneously protects the optical waveguide array 12, It is made of a material having a smaller refractive index than (12).
이상에서 설명한 바와 같이, 본 발명은 광도파로가 매몰된 광기판에 한쪽끝에 경사진 반사면을 갖는 광연결봉을 직접 삽입함으로서 광원-광도파로간, 광도파로-광검출기 간의 광 경로 정렬의 정밀도를 높일 수 있고, 광도파로 끝에 반사면을 만들 필요가 없어 제작이 용한 효과가 있다. 아울러 플립 칩 본딩 기술을 이용해 회로 기판과 광기판을 접합하므로 두 기판 사이에 매우 정밀한 정렬도를 얻을 수 있으며, 회로 기판의 특성을 개별적으로 평가할 수 있어 최종적으로 만들어지는 광연결 모듈의 광에 대한 수율을 높일 수 있어 성능을 최적화 할 수 있는 효과가 있다.As described above, the present invention improves the accuracy of optical path alignment between the light source-waveguide and the optical waveguide-photodetector by directly inserting an optical connecting rod having an inclined reflecting surface at one end into an optical substrate in which the optical waveguide is buried. There is no need to make a reflective surface at the end of the optical waveguide, there is a usable effect. In addition, the circuit board and the optical substrate are bonded using flip chip bonding technology to obtain a very precise alignment between the two substrates, and the characteristics of the circuit board can be individually evaluated to yield the light yield of the optical connection module finally made. It is possible to increase the efficiency, thereby optimizing the performance.
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2002-0033931A KR100439760B1 (en) | 2002-06-18 | 2002-06-18 | Apparatus for optical interconnecting by using optical connection rods |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2002-0033931A KR100439760B1 (en) | 2002-06-18 | 2002-06-18 | Apparatus for optical interconnecting by using optical connection rods |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020059313A true KR20020059313A (en) | 2002-07-12 |
KR100439760B1 KR100439760B1 (en) | 2004-07-12 |
Family
ID=27726885
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR10-2002-0033931A KR100439760B1 (en) | 2002-06-18 | 2002-06-18 | Apparatus for optical interconnecting by using optical connection rods |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100439760B1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100452136B1 (en) * | 2002-12-10 | 2004-10-12 | 학교법인 한국정보통신학원 | Architecture of optical interconnection using optical connection rods in waveguide-embedded multi-layer circuit board |
KR100679253B1 (en) * | 2004-09-10 | 2007-02-06 | 한국정보통신대학교 산학협력단 | Architectures of optical connection blocks and optical transceiver modules for passive alignment onto optical PCBs |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06337319A (en) * | 1993-05-28 | 1994-12-06 | Nippon Sheet Glass Co Ltd | Optical connector and its production |
US5761350A (en) * | 1997-01-22 | 1998-06-02 | Koh; Seungug | Method and apparatus for providing a seamless electrical/optical multi-layer micro-opto-electro-mechanical system assembly |
JPH1184183A (en) * | 1997-09-12 | 1999-03-26 | Nippon Telegr & Teleph Corp <Ntt> | Optical module |
JP2000081524A (en) * | 1998-09-07 | 2000-03-21 | Sony Corp | Light transmitter-receiver system |
-
2002
- 2002-06-18 KR KR10-2002-0033931A patent/KR100439760B1/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100452136B1 (en) * | 2002-12-10 | 2004-10-12 | 학교법인 한국정보통신학원 | Architecture of optical interconnection using optical connection rods in waveguide-embedded multi-layer circuit board |
KR100679253B1 (en) * | 2004-09-10 | 2007-02-06 | 한국정보통신대학교 산학협력단 | Architectures of optical connection blocks and optical transceiver modules for passive alignment onto optical PCBs |
Also Published As
Publication number | Publication date |
---|---|
KR100439760B1 (en) | 2004-07-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI634357B (en) | Photoelectric conversion module | |
CN106646772B (en) | Structure of photoelectric conversion module | |
JP2020521186A (en) | Optical interconnection device and method of manufacturing optical interconnection device | |
TW442678B (en) | Connector-type optical transceiver using SOI optical waveguide | |
EP2426537A2 (en) | Optical coupler module having optical waveguide structure | |
JP2006506657A (en) | Integrated platform for active optical alignment of semiconductor devices with optical fibers | |
Ishii et al. | SMT-compatible large-tolerance" OptoBump" interface for interchip optical interconnections | |
AU6964594A (en) | Parallel optical interconnect | |
CN105891973A (en) | Two-dimensional array optical coupling module | |
US20070133928A1 (en) | Canted-fiber duplex optical assembly | |
US6786651B2 (en) | Optical interconnect structure, system and transceiver including the structure, and method of forming the same | |
KR100476685B1 (en) | Optical Interconnection Module Assembly and Packaging Method thereof | |
KR100734906B1 (en) | Optical interconnect using flexible optical printed circuit board | |
Karppinen et al. | Parallel optical interconnect between ceramic BGA packages on FR4 board using embedded waveguides and passive optical alignments | |
KR100452136B1 (en) | Architecture of optical interconnection using optical connection rods in waveguide-embedded multi-layer circuit board | |
KR101012757B1 (en) | A photoelectric conversion module formed in a printed circuit board and a lsi package comprising the same | |
KR100439760B1 (en) | Apparatus for optical interconnecting by using optical connection rods | |
KR20070023420A (en) | Optical transceiver module using silicon optical bench | |
JP2006003818A (en) | Semiconductor integrated circuit chip and its manufacturing method | |
KR100478379B1 (en) | Architecture of chip-to-chip optical interconnection using waveguides and microlenses | |
Guidotti et al. | Edge viewing photodetectors for strictly in-plane lightwave circuit integration and flexible optical interconnects | |
US9423581B2 (en) | Parallel optical system with integrated monitoring photodetectors | |
KR100523992B1 (en) | Architectures of multi-chip-module having optical interconnections | |
KR100398045B1 (en) | Module for transmitting and receiving an optic signal | |
KR100351561B1 (en) | Vertical cavity surface emitting laser and optical transmitter using the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20100601 Year of fee payment: 7 |
|
LAPS | Lapse due to unpaid annual fee |