KR20020056711A - Method for manufacturing lcd - Google Patents
Method for manufacturing lcd Download PDFInfo
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- KR20020056711A KR20020056711A KR1020000086116A KR20000086116A KR20020056711A KR 20020056711 A KR20020056711 A KR 20020056711A KR 1020000086116 A KR1020000086116 A KR 1020000086116A KR 20000086116 A KR20000086116 A KR 20000086116A KR 20020056711 A KR20020056711 A KR 20020056711A
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- color filter
- black matrix
- liquid crystal
- alignment layer
- forming
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
Abstract
Description
본 발명은 액정표시소자의 제조방법에 관한 것으로, 보다 구체적으로는, 액정표시 소자의 칼라필터 기판 형성방법에 관한 것이다.The present invention relates to a method for manufacturing a liquid crystal display device, and more particularly, to a method for forming a color filter substrate of a liquid crystal display device.
현재 일반적인 LCD(Liquid Crystal Display) 패널 제작 공정중에 상하 유리기판의 간격을 유지하기 위하여 플라스틱이나 실리카 계통으로 제작된 스페이서(spacer)라는 수 ㎛이 자재를 두 유리기판의 사이에 산포한다. 그러나, 두 유리기판에 스페이서를 산포함으로써 발생하는 산포불량에 따른 패널상의 셀 갭(cell gap)의 불균형, 스페이서 주변의 빛샘 현상에 따른 휘도 저하, 스페이서 긁힘에 의한 배향막 표면 손상에 따른 액정배향의 불균일 및 진동에 의한 스페이서의 유동 등의 문제점등이 발생한다.In order to maintain the gap between the upper and lower glass substrates during a general liquid crystal display (LCD) panel manufacturing process, several micrometers of spacers made of plastic or silica are scattered between two glass substrates. However, unevenness of cell gaps on the panel due to scattering defects caused by scattering of spacers on two glass substrates, deterioration of luminance due to light leakage around the spacers, and unevenness of liquid crystal alignment due to surface damage of the alignment layer caused by spacer scratches. And problems such as flow of the spacer due to vibration.
이러한 단점을 극복하기 위하여 최근에 칼라필터 제조업체에서는 칼라필터 제작공정의 맨 마지막에 포토 레지스트 공정을 추가하여 지주 스페이서를 형성함으로써 위의 문제점을 극복하려 하고 있고, 몇 LCD 패널 업체에서는 실질적으로 지주 스페이서 칼라필터를 사용한 패널 제작을 개발, 완료한 곳도 있다.In order to overcome this drawback, color filter manufacturers have recently attempted to overcome the above problems by adding a photoresist process at the end of the color filter manufacturing process to form a post spacer, and some LCD panel companies have substantially implemented the post spacer color. Some have developed and completed panel production using filters.
도 1a 내지 도 1d는 현재까지의 알려진 일반적인 지주 스페이서 칼라필터 제조공정을 도시한 것이다.Figures 1a to 1d show a typical post spacer color filter manufacturing process known to date.
먼저, 도 1a에 도시된 바와같이, 컬러필터 기판(10)은 색상을 구현하는 컬러필터 패턴(R.G.B)과 상기 컬러필터 패턴 셀 사이의 구분과 광차단 역할을 하는 블랙 메트릭스(12, Black Matrix), 그리고 액정 셀에 전압인가를 위한 공통 전극(14), 예컨대, ITO(Indium Thin Oxide)막으로 구성되어 있다.First, as illustrated in FIG. 1A, the color filter substrate 10 may include a black matrix 12 that serves to distinguish between the color filter pattern RGB that implements color and the color filter pattern cell and to block light. And a common electrode 14 for applying voltage to the liquid crystal cell, for example, an indium thin oxide (ITO) film.
상기 블랙 메트릭스는 일반적으로 컬러필터 패턴인 RGB 패턴 사이에 위치하며 픽셀전극이 형성되지 않은 부분과 픽셀전극 주변부에 형성되는 리버스 틸트 도메인(Reverse Tilted Domain)을 차폐시키는 목적으로 설치한다.The black matrix is generally disposed between RGB patterns, which are color filter patterns, and is installed to shield reverse tilted domains formed at portions where pixel electrodes are not formed and around pixel electrodes.
그 다음, 도 1b에 도시된 바와같이, 상기 공통전극(14) 상부에 포토 레지스트막(16)을 증착한다. 이어서 상기 블랙 메트릭스 상부에만 상기 포토 레지스트막(16)이 형성되도록 노광공정을 수행한다. 이 때, 상기 포토 레지스트막(16)은 얇은 폭의 지주 스페이서를 형성하기 위하여 해상도가 우수한 UV(ultra violet)광원을 이용하여 노광공정을 수행한다.Next, as shown in FIG. 1B, a photoresist film 16 is deposited on the common electrode 14. Subsequently, an exposure process is performed such that the photoresist film 16 is formed only on the black matrix. In this case, the photoresist film 16 performs an exposure process by using an ultra violet (UV) light source having excellent resolution to form a thin strut spacer.
그 다음, 도 1c에 도시된 바와같이, 상기 포토 레지스트막(16)을 현상하여 셀 갭을 유지하는 역할을 수행하는 지주 스페이서(18)를 형성한다.Next, as shown in FIG. 1C, the photoresist film 16 is developed to form a strut spacer 18 which serves to maintain a cell gap.
이후, 도면에는 도시하지 않았지만, 후속 공정 예컨대, 배향막 도포 및 러빙공정을 수행하여 컬러필터를 형성한다.Thereafter, although not shown in the drawings, a color filter is formed by performing a subsequent process, for example, an alignment film coating and a rubbing process.
그러나, 종래 기술에 따른 액정표시소자의 제조방법은 다음과 같은 문제점이 있다.However, the manufacturing method of the liquid crystal display device according to the prior art has the following problems.
상기 지주 스페이서(18)를 형성한 다음, 후속 공정인 배향막을 도포하고 러빙공정을 수행할 때, 상기 지주 스페이서에 의한 불량이 많이 발생한다. 즉, 러빙 공정 진행시 상기 지주 스페이서(18)의 단차에 의한 러빙 스크래치 및 불 균일 영역이 발생하게 된다.When the post spacer 18 is formed and then the alignment layer, which is a subsequent process, is applied and a rubbing process is performed, a lot of defects caused by the post spacer are generated. That is, during the rubbing process, rubbing scratches and uneven areas are generated due to the step of the post spacer 18.
또한, 러빙 공정시 러빙 롤러에 의한 지주 스페이서의 깨짐 현상이나 떨어져 나감 현상이 발생하게 된다.In addition, in the rubbing process, cracking or falling off of the strut spacer by the rubbing roller may occur.
따라서, 상기 문제점을 해결하기 위해 안출된 본 발명의 목적은, 배향막 도포 및 러빙 공정을 수행한 후 지주 스페이서를 형성하여 지주 스페이서에 의한 불량을 억제할 수 있는 액정표시소자의 제조방법을 제공하는 것이다.Accordingly, an object of the present invention devised to solve the above problems is to provide a method of manufacturing a liquid crystal display device capable of suppressing defects caused by a strut spacer by forming a strut spacer after performing an alignment film coating and rubbing process. .
도 1a 내지 도 1c는 종래 기술에 따른 액정표시소자의 제조방법을 설명하기 위한 제조공정도.1A to 1C are manufacturing process diagrams for explaining a method for manufacturing a liquid crystal display device according to the prior art.
도 2a 내지 도 2d는 본 발명에 따른 액정표시소자의 제조방법을 설명하기 위한 제조공정도.2a to 2d are manufacturing process diagrams for explaining the manufacturing method of the liquid crystal display device according to the present invention.
* 도면의 주요 부분에 대한 부호 설명 *Explanation of symbols on the main parts of the drawings
20 : 컬러필터 기판20: color filter substrate
22 : 블랙 메트릭스22: black matrix
30 : 컬러필터 패턴30: color filter pattern
31 : 공통전극31: common electrode
40 : 배향막40: alignment film
50 : 포토 레지스트막50: photoresist film
100 : 지주 스페이서100: holding spacer
상기 목적을 달성하기 위한 본 발명은, 컬러필터 패턴과, 상기 컬러필터 패턴 셀 사이의 구분과 광차단 역할을 하는 블랙 메트릭스와, 액정 셀에 전압인가를 위한 공통 전극으로 구성된 컬러필터 기판에 있어서, 상기 공통 전극 상부에 배향막을 형성하는 단계; 상기 배향막상에 러빙 공정을 수행하는 단계; 및 상기 러빙 공정이 수행된 결과물의 블랙 메트릭스 상부에 셀 갭 유지 역할을 하는 지주 스페이서를 형성하는 단계를 포함하여 구성하는 것을 특징으로 한다.According to an aspect of the present invention, there is provided a color filter substrate including a color filter pattern, a black matrix serving as a division and light blocking between the color filter pattern cells, and a common electrode for voltage application to the liquid crystal cell. Forming an alignment layer on the common electrode; Performing a rubbing process on the alignment layer; And forming a strut spacer that serves to maintain a cell gap on the black matrix of the result of the rubbing process.
또한, 본 발명에 따르면, 컬러필터 패턴과, 상기 컬러필터 패턴 셀 사이의 구분과 광차단 역할을 하는 블랙 메트릭스로 구성된 컬러필터 기판에 있어서, 상기 컬러필터 기판상에 오버코트(over coat)막을 형성하는 단계; 상기 오버코트막 상부에 배향막을 형성하는 단계; 상기 배향막상에 러빙 공정을 수행하는 단계; 및 상기 러빙 공정이 수행된 후의 블랙 메트릭스 상에 있는 배향막 상부에 셀 갭 유지 역할을 하는 지주 스페이서를 형성하는 단계를 포함하여 구성하는 것을 특징으로 한다.In addition, according to the present invention, in the color filter substrate consisting of a color filter pattern, and the black matrix that serves to distinguish between the color filter pattern cell and light blocking, an overcoat film is formed on the color filter substrate. step; Forming an alignment layer on the overcoat layer; Performing a rubbing process on the alignment layer; And forming a strut spacer serving as a cell gap retention on the alignment layer on the black matrix after the rubbing process is performed.
이하, 본 발명의 바람직한 실시예를 첨부한 도면에 의거하여 상세히 설명한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 2a 내지 도 2d는 본 발명의 일실시예에 따른 액정표시소자의 제조방법을 설명하기 위한 제조공정도이다.2A to 2D are manufacturing process diagrams for describing a method of manufacturing a liquid crystal display device according to an exemplary embodiment of the present invention.
먼저, 도 2a에 도시된 바와같이, 컬러필터 기판(20)상에 컬러필터 패턴의 셀사이의 구분과 광차단 역할을 하는 블랙 메트릭스(22, Black Matrix)를 형성한다.First, as shown in FIG. 2A, a black matrix 22 is formed on the color filter substrate 20, which serves to distinguish between cells of the color filter pattern and to block light.
상기 블랙 메트릭스(22)는 통상적으로 후속 형성되는 컬러필터의 R.G.B패턴 사이에 위치하며 하부 기판에 형성되는 픽셀 전극이 형성되지 않은 부분과 픽셀 전극 주변부엥 형성되는 리버스 틸트 도메인(reverse tilted domain)을 차폐시키는 목적으로 설치된다. 이 때, 상기 블랙 메트릭스(22)의 재질로는 크롬 등의 금속 박막이나 카본(carbon) 계통의 유기 재료가 사용된다.The black matrix 22 is typically located between the RGB patterns of the subsequent color filters and shields a portion where no pixel electrode is formed on the lower substrate and a reverse tilted domain formed around the pixel electrode. Installed for the purpose of In this case, the material of the black matrix 22 is a metal thin film such as chromium or a carbon-based organic material.
그 다음, 상기 블랙 메트릭스(22) 양측면에 안료 분산법에 의한 컬러필터 패턴(30 : R.G.B)을 형성한다. 상기 컬러필터 패턴(30)은 포토 공정 기술을 이용하여 형성하며, 이 때, 상기 포토 레지스트막을 컬러 레지스트막을 이용한다. 통상적으로 컬러필터 패턴(30)은 동일 마스크를 사용하여 쉬프트시켜 형성한다.Next, color filter patterns 30 (R.G.B) are formed on both sides of the black matrix 22 by the pigment dispersion method. The color filter pattern 30 is formed using a photo process technology, and at this time, the photoresist film is used as a color resist film. Typically, the color filter pattern 30 is formed by shifting using the same mask.
그 다음, 상기 단계까지의 결과물 상에 하부의 TFT 기판에 형성되는 픽셀 전극과 함께 액정 셀을 동작시키기 위한 공통 전극(31)을 형성한다. 이 때, 상기 공통전극은 투과성과 도전성이 좋으며 화학적, 열적 안정성이 우수한 투명 전극 재료인 ITO(Indium Thin Oxide)를 스퍼터링에 의하여 증착한다.Then, the common electrode 31 for operating the liquid crystal cell is formed on the resultant up to this step together with the pixel electrode formed on the lower TFT substrate. At this time, the common electrode is deposited by sputtering ITO (Indium Thin Oxide), which is a transparent electrode material having good permeability and conductivity and excellent chemical and thermal stability.
그 다음, 도 2b에 도시한 바와같이, 상기 공통전극(30) 상부에 배향막(40)을 도포한다. 상기 배향막(40)은 폴리이미드(polyimide)로 구성된 얇은 유기 막으로 액정을 배향하기 위하여 형성된다. 그 다음 상기 배향막(40)상에 액정분자들을 정렬하기 위해 러빙공정을 수행한다.Next, as shown in FIG. 2B, an alignment layer 40 is coated on the common electrode 30. The alignment layer 40 is formed to align the liquid crystal with a thin organic film made of polyimide. Then, a rubbing process is performed to align the liquid crystal molecules on the alignment layer 40.
그 다음, 도 2c에 도시한 바와같이, 상기 러빙 공정이 수행된 배향막(40a) 상부에 포토 레지스트막(50)을 증착한다. 이어서 상기 블랙 메트릭스 상부에만 상기 포토 레지스트막(50)이 형성되도록 포토 마스크를 이용하여 노광공정을 수행한다. 이 때, 상기 포토 레지스트막(50)은 얇은 폭의 지주 스페이서를 형성하기 위하여 해상도가 우수한 UV(ultra violet)광원을 이용하여 노광공정을 수행한다.Next, as shown in FIG. 2C, a photoresist film 50 is deposited on the alignment film 40a on which the rubbing process is performed. Subsequently, an exposure process is performed using a photo mask so that the photoresist film 50 is formed only on the black matrix. At this time, the photoresist film 50 performs an exposure process by using an ultra violet (UV) light source having excellent resolution to form a thin strut spacer.
그 다음, 도 2d에 도시된 바와같이, 상기 포토 레지스트막(50)을 현상하여 셀 갭을 유지하는 역할을 수행하는 지주 스페이서(100)를 형성한다.Next, as shown in FIG. 2D, the photoresist film 50 is developed to form the strut spacer 100, which serves to maintain the cell gap.
상술한 실시예에서는 컬러필터 패턴(20)과, 상기 컬러필터 패턴 셀 사이의 구분과 광차단 역할을 하는 블랙 메트릭스(22)와, 액정 셀에 전압인가를 위한 공통 전극(31)으로 구성된 컬러필터 기판, 즉 TN 모드를 실시예로 설명하였지만, 상기 공통전극 대신 오버코트(Overcoat)막을 형성함으로써 IPS 모드 또는 FFS 모드에서의 컬러필터상에 지주 스페이서(100)을 형성할 수 있다.In the above-described embodiment, the color filter includes a color filter pattern 20, a black matrix 22 that serves to distinguish between the color filter pattern cells and light blocking, and a common electrode 31 for applying voltage to the liquid crystal cell. Although the substrate, that is, the TN mode has been described as an embodiment, the post spacer 100 may be formed on the color filter in the IPS mode or the FFS mode by forming an overcoat layer instead of the common electrode.
상기한 바와같은 본 발명에 따른 액정표시소자의 제조방법은 다음과 같은 효과가 있다.The manufacturing method of the liquid crystal display device according to the present invention as described above has the following effects.
상기 지주 스페이서 공정 전, 배향막 도포와 러빙 공정을 먼지 수행함으로써 종래의 배향막 코팅 불량 발생, 지주 스페이서의 떨어져 나감 현상, 러빙 공정 진행시 발생하는 러빈 스크래치 및 불균일 영역 발생을 방지할 수 있다.By performing the alignment layer coating and rubbing process before the post spacer process, it is possible to prevent the occurrence of a conventional alignment layer coating defect, the peeling off of the post spacer, the occurrence of rubble scratches and uneven areas generated during the rubbing process.
이에, 수율의 향상 및 패널의 대형화로 감으로써 발생하는 패널의 일정한 갭 유지의 어려움을 극복할 수 있을 것으로 기대된다. 아울러, 대형 사이즈의 컬러필터의 단가가 고가인 것을 감안하면 공정상의 불량률을 감소시켜 경제적으로 많은 이익일 있을 것으로 기대된다.Therefore, it is expected that the difficulty of maintaining a constant gap of the panel generated by improving the yield and increasing the size of the panel is expected to be overcome. In addition, considering that the unit price of the large size color filter is expensive, it is expected to reduce the defect rate in the process and be economically profitable.
한편, 본 발명의 요지를 벗어나지 않는 범위내에서 다양하게 변경하여 실시할 수 있다,On the other hand, it can be carried out in a variety of changes within the scope not departing from the gist of the present invention,
Claims (7)
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