KR20020010322A - Display device using micro electro-mechanical system - Google Patents

Abstract

PURPOSE: A transmitted displaying device by MEMS(Micro Electromechanical System) is provided to supply color by arranging a color filter layer in a MEMS structure and to improve pure degree of the color. CONSTITUTION: A transmitted displaying device with MEMS comprises a back light(41) formed on a rear side of a first glass base plate(42a); first, second and third color filter layers(43a,43b,43c) mounted on the first glass base plate with a specific interval; an overcoat(44) formed on the first, second and third color filter layers; a fixed electrode(45) mounted on the overcoat layer; and a movable electrode(47) attached to the fixed electrode. The fixed electrode is formed on the overcoat by having a stripe shape. The movable electrode is fixed on the overcoat and is moved by an electric signal from the overcoat. The fist, second and third color layers is red, green and blue. Thereby, the transmitted displaying device with the MEMS supplies the color by arranging the color filter layers in the MEMS structure to improve pure degree of the color.

Description

Transmissive display device using MEMS {DISPLAY DEVICE USING MICRO ELECTRO-MECHANICAL SYSTEM}

The present invention relates to a display device, and more particularly to a transmissive display device using MEMS that can implement a color.

As a next-generation display device, various flat panel displays (FPDs) are being actively researched. Among them, generalized display devices include liquid crystal displays (LCDs) using electro-optical characteristics of liquid crystals, and gases. And a plasma display panel (PDP) using discharge.

Among them, the liquid crystal display device (hereinafter, abbreviated as "LCD") has a narrow viewing angle and a slow response time, and requires a thin film transistor (TFT) and an electrode using a semiconductor manufacturing process. Plasma display panel (PDP) has the advantage that the manufacturing process is simple and advantageous to large area, but the power consumption is high, and the discharge and luminous efficiency is low and expensive.

The development of a new display device that can solve the problems of the flat panel display device is progressing, and recently, the pixel (Pixel) using a micro electromechanical system (hereinafter, abbreviated as "MEMS"), an ultra-fine processing technology. A display device capable of displaying an image by forming a fine light modulator at each) has been proposed.

Hereinafter, a transmissive display device using MEMS according to the related art will be described with reference to the accompanying drawings.

1 is a plan view of a display device using a fine light modulator according to the prior art.

As shown in FIG. 1, a plurality of fixed electrodes 13 formed side by side at a predetermined interval on the substrate 11 and at a corresponding portion between the fixed electrode 13 and the fixed electrode 13. It is composed of a plurality of movable electrodes 15 formed in the same direction as the direction of the fixed electrode 13, both ends in the longitudinal direction of the movable electrode 15 are both in the longitudinal direction of the fixed electrode 13 It has a structure extending beyond the end. In addition, both ends in the unidirectional direction of the movable electrode 15 have a structure overlapping both ends in the unidirectional direction of the fixed electrode 13.

Thus, in a state where no voltage is applied between the fixed electrode 13 and the movable electrode 15, the movable electrode 15 floats, and the light projected from the backlight of the lower part of the substrate 11 is transmitted to the display surface, and the voltage In this applied state, the movable electrode 15 is in contact with the fixed electrode 13 so that light of the backlight cannot be transmitted toward the display surface.

This will be described in detail with reference to the cross-sectional views shown in FIGS. 2A and 2B.

2A and 2B are cross-sectional views taken along the line AA ′ of FIG. 1, and the fixed electrodes 13 are formed on the substrate 11 side by side at predetermined intervals, and each of the fixed electrodes 13 is formed in response to a voltage signal. It consists of movable electrodes 15 overlapping both sides of the 13 parts. Herein, the fixed electrodes 13 are formed in a stripe shape on the substrate 11, and the movable electrodes 15 are fixed to the substrate 11 at both ends along the long direction thereof, and a central portion thereof is formed of the substrate ( 11) it is floated a predetermined interval and moved up and down by an electrical signal.

2A is a cross-sectional view showing an arrangement of electrodes in a non-display state. A predetermined level of voltage is applied to the fixed electrodes 13 and the movable electrodes 15. Thus, an attraction force due to electrostatic force acts between the fixed electrodes 13 and the movable electrodes 15 such that the movable electrodes 15 come into contact with the adjacent fixed electrode 13. At this time, the fixed electrodes 13 and the movable electrodes 15 block the light incident from the backlight 19 provided on the rear surface of the substrate 11 so that the display surface is displayed in black.

In contrast, in the display state, that is, as shown in FIG. 2B, no voltage is applied to the fixed electrodes 13 and the movable electrodes 15. Therefore, since the movable electrodes 15 are restored to their original state by their elastic restoring force, the movable electrodes 15 are lifted up from the substrate 11 and the fixed electrode 13. In this case, an optical path is formed between the fixed electrodes 13 and the movable electrodes 15, and light incident from the backlight 19 through the optical path is transmitted to the display surface and displayed as white. For reference, reference numeral “17” in FIGS. 2A to 2B indicates an elastic material layer.

2C is a cross-sectional view taken along the line BB ′ of FIG. 1, and it can be seen that the movable electrodes 15 are formed on the substrate 11 at regular intervals.

The conventional transmissive display device using MEMS has the following problems.

Although it is possible to display an image by forming a fine light modulator for each pixel, a configuration in which a color filter layer is appropriately arranged to display colors has not been proposed, and thus there is a limitation in providing a display device with good color and improved color purity by providing colors and improving color purity. .

The present invention has been made to solve the above problems, and in particular, to provide a transmissive display device using MEMS that can implement color and improve color purity by appropriately disposing a color filter layer in the MEMS structure. have.

1 is a plan view of a transmissive display device using MEMS according to the related art.

2A and 2B are cross-sectional views taken along a line A-A 'of FIG. 1 to illustrate the arrangement of electrodes in a non-display state.

FIG. 2B is a cross-sectional view taken along line AA ′ of FIG. 1, showing a layout of electrodes in a display state.

FIG. 2C is a cross-sectional view taken along the line BB ′ of FIG. 1.

3 is a structural cross-sectional view of a transmissive display device using MEMS according to the first embodiment of the present invention.

4 is a structural cross-sectional view of a transmissive display device using MEMS according to a second embodiment of the present invention.

5 is a structural cross-sectional view of a transmissive display device using MEMS according to a third embodiment of the present invention.

6 is a structural cross-sectional view of a transmissive display device using MEMS according to a fourth embodiment of the present invention.

Explanation of symbols for the main parts of the drawings

41: backlight 42a: first glass substrate

42b: second glass substrate

43a, 43b, 43c: first, second and third color filter layers

44: overcoat layer 45: fixed electrode

46: elastic material layer 47: movable electrode

48: transparent electrode

A transmissive display device using MEMS according to the present invention for achieving the above object is first, second, and third color filter layers which are separated from each other by a predetermined distance on a substrate and disposed one by one for each pixel. 2, a plurality of movable parts arranged to partially overlap with the edge of the fixed electrode in an overcoat layer formed on the substrate including a third color filter layer, a plurality of fixed electrodes on the overcode layer, and an upper portion corresponding to the fixed electrodes. MEMS provided with an electrode, characterized in that it comprises a backlight formed on the back of the substrate.

A transmissive display device using the MEMS according to the present invention will be described with reference to the accompanying drawings.

3 is a structural cross-sectional view of a transmissive display device using MEMS according to a first embodiment of the present invention, and FIG. 4 is a structural cross-sectional view of a transmissive display device using MEMS according to a second embodiment of the present invention.

5 is a structural cross-sectional view of a transmissive display device using MEMS according to a third embodiment of the present invention, and FIG. 6 is a structural cross-sectional view of a transmissive display device using MEMS according to a fourth embodiment of the present invention.

First, in the transmissive display device using MEMS according to the first embodiment of the present invention, the first, second, and third color filter layers 43a, which are separated from each other by a predetermined interval on the first glass substrate 42a, as shown in FIG. 43b, 43c). In this case, the first, second, and third color filter layers 43a, 43b, and 43c are red (R), green (G), and blue (B) layers, respectively.

In this case, the entire dotted line forms one pixel, and R, G, and B are repeatedly formed one per pixel, and three pixels (three color filter layers) form one dot.

In addition, the overcoat layer 44 is formed on the first, second, and third color filter layers 43a, 43b, 43c to serve as a protective film for the color filter layer, and to stably perform the subsequent process. It is.

There are fixed electrodes 45 formed side by side at a predetermined interval on the overcoat layer 44, and movable electrodes 47 overlapping both sides of each of the fixed electrodes 45 in response to a voltage signal. Here, the fixed electrodes 45 are formed in a stripe shape on the overcoat layer 44, and both ends of the movable electrodes 47 are fixed to the overcoat layer 44 along the long direction thereof, and the center portion thereof is fixed to the overcoat layer 44. It floated a predetermined distance from the overcoat layer 44, and was comprised to move up and down by an electrical signal.

A backlight 41 is formed on the rear surface of the first glass substrate 41.

The configuration according to the first embodiment of the present invention described above shows a display state in which a voltage is applied to the fixed electrode 45 and the movable electrodes 47. FIG. 3 shows a case where the electrode is not applied. .

Next, in the transmissive display device using MEMS according to the second embodiment of the present invention, first and second glass substrates 42a are arranged side by side at a predetermined interval as shown in FIG. 4.

There are fixed electrodes 45 formed side by side at a predetermined interval on the first glass substrate 42a, and movable electrodes 47 overlapping both sides of each of the fixed electrodes 45 in response to a voltage signal.

Here, the fixed electrodes 45 are formed in a stripe shape on the first glass substrate 42a, and both ends of the movable electrodes 47 are fixed to the first glass substrate 42a in the longitudinal direction thereof. The center portion was floated a predetermined distance from the first glass substrate 42a and was configured to move up and down by an electrical signal.

The first, second and third color filter layers 43a, 43b and 43c separated from each other by a predetermined interval are formed on the second glass substrate 42b. In this case, the first, second, and third color filter layers 43a, 43b, and 43c are red (R), green (G), and blue (B) layers, respectively.

In addition, the entire dotted line forms one pixel, and one color filter layer is formed per pixel, R, G, and B are repeatedly formed, and three pixels form one dot. .

In addition, the overcoat layer 44 is formed on the first, second, and third color filter layers 43a, 43b, 43c to serve as a protective film for the color filter layer, and to stably perform the subsequent process. It is.

In the second embodiment of the present invention, the color filter layer is formed on the second glass substrate 42b including the optical medium, and the overcoat layer may not be formed.

A backlight 41 is formed on the rear surface of the first glass substrate 41.

The configuration diagram display state according to the second embodiment of the present invention described above is applied to the fixed electrode 45 and the movable electrodes 47, and FIG. 4 is a view when no voltage is applied.

In the transmissive display device using MEMS according to the third embodiment of the present invention, as shown in FIG. 5, first and second glass substrates 42a are arranged side by side at regular intervals.

The first, second and third color filter layers 43a, 43b and 43c are separated from each other by a predetermined distance on the first glass substrate 42a. In this case, the first, second, and third color filter layers 43a, 43b, and 43c are red (R), green (G), and blue (B) layers, respectively.

In the above, the entire dotted line forms one pixel, and the pixels are formed by repeating R, G, and B, and three pixels form one dot.

In addition, the overcoat layer 44 is formed on the first, second, and third color filter layers 43a, 43b, 43c to serve as a protective film for the color filter layer, and to stably perform the subsequent process. It is.

There are fixed electrodes 45 formed side by side at a predetermined interval on the overcoat layer 44, and movable electrodes 47 overlapping both sides of each of the fixed electrodes 45 in response to a voltage signal. Here, the fixed electrodes 45 are formed in a stripe shape on the overcoat layer 44, and both ends of the movable electrodes 47 are fixed to the overcoat layer 44 along the long direction thereof, and the center portion thereof is fixed to the overcoat layer 44. It floats a predetermined interval from the overcoat layer 44, and is moved up and down by an electrical signal.

In order to apply the switch voltage, a transparent electrode 48 made of an ITO film is formed on the second glass substrate 42b.

A backlight 41 is formed on the rear surface of the first glass substrate 42a.

The configuration according to the third embodiment of the present invention described above uses the electrostatic force between the transparent electrode 48 and the movable electrode 47 by using the transparent electrode 48. FIG. 5 shows a display state. This shows when no voltage is applied to the electrode.

In the third embodiment of the present invention, each color filter layer may be formed on the second glass substrate 42b as in the second embodiment.

Next, in the transmissive display device using MEMS according to the fourth embodiment of the present invention, as shown in FIG. 6, a fixed electrode is formed on the first glass substrate 42a, and a micro-bridge is formed on the second glass substrate 42b. (Ribbon) is formed to use the electrostatic attraction between the micro-bridge and the fixed electrode.

The first, second and third color filter layers 43a, 43b and 43c are separated from each other by a predetermined distance on the first glass substrate 42a. At this time, the first, second, and third color filter layers 43a, 43b, and 43c are red (R), green (G), and blue (B) layers in order.

In the above, the entire dotted line forms one pixel, and the pixels are formed by repeating R, G, and B, and three pixels form one dot.

In addition, the overcoat layer 44 is formed on the first, second, and third color filter layers 43a, 43b, 43c to serve as a protective film for the color filter layer, and to stably perform the subsequent process. It is.

In addition, the fixed electrodes 45 are formed on the overcoat layer 44 side by side at predetermined intervals, and the fixed electrodes formed on the overcoat layer 44 in response to a voltage signal on the second glass substrate 42b. The movable electrodes 47 are formed to overlap both sides of the 45.

Here, the fixed electrodes 45 are formed in a stripe shape on the overcoat layer 44, and the movable electrodes 47 are formed on the upper side of the second glass substrate 42b.

The switch is positioned between the movable electrodes 47 of the second glass substrate 42b and the fixed electrodes 45 of the first glass substrate 42a to use the electrostatic attraction according to this switching operation. The state is shown when the voltage is not applied to the movable electrode 47.

A backlight 41 is formed on the rear surface of the first glass substrate 42a.

In the fourth embodiment of the present invention, the color filter layer can be formed on the second glass substrate 42b as in the second embodiment.

For reference, reference numeral 46 of FIGS. 3 to 6 designates an elastic material.

As described above, the transmissive display device using MEMS according to the present invention has the following effects.

By properly disposing a color filter layer in the MEMS structure, a transmissive display device capable of realizing color and improving color purity can be obtained.

Claims (17)

First, second, and third color filter layers separated from each other by a predetermined distance on the substrate and disposed one by one for each pixel; An overcoat layer formed on the substrate including the first, second, and third color filter layers, MEMS having a plurality of fixed electrodes on the overcode layer and a plurality of movable electrodes disposed in the upper portion corresponding to the fixed electrode to partially overlap the edge of the fixed electrode, Transmissive display device using a MEMS comprising a backlight formed on the back of the substrate. The transmissive display device of claim 1, wherein the first to third color filter layers are combined to form a dot. The transmissive display device of claim 1, wherein the first, second, and third color filter layers are repeatedly arranged in sequence. The transmissive display device of claim 1, wherein a switch is provided between the movable electrode and the fixed electrode in the transmissive display device. The first and second substrates are arranged side by side separated from each other at a predetermined interval, MEMS having a plurality of fixed electrodes on the first substrate and a plurality of movable electrodes disposed in the upper portion corresponding to the fixed electrode to partially overlap the edge of the fixed electrode, First, second, and third color filter layers which are separated from each other on the second substrate between the first and second substrates and are arranged one by one for each pixel; An overcoat layer formed on the second substrate including the first, second and third color filter layers, Transmissive display device using a MEMS comprising a backlight formed on the back of the first substrate. The transmissive display device of claim 5, wherein the first to third color filter layers are formed to form a dot. The transmissive display device of claim 5, wherein the first, second, and third color filter layers are repeatedly arranged in sequence. 7. The transmissive display device of claim 5, wherein a switch is provided between the movable electrode and the fixed electrode in the transmissive display device. The transmissive display device of claim 5, wherein the overcoat layer on the second substrate may not be formed. The method of claim 5, wherein the first, second, third color filter layer and the overcoat layer is formed between the first substrate and the fixed electrode, Transmissive display device using a MEMS characterized in that it further comprises a transparent electrode on the second substrate. The transmissive display device of claim 10, wherein the first to third color filter layers are collected to form a dot. The transmissive display device of claim 10, wherein the first, second, and third color filter layers are repeatedly arranged in sequence. The transmissive display device of claim 5 or 10, wherein a switch is provided between the movable electrode and the transparent electrode in the transmissive display device. The method of claim 5, wherein the first, second, third color filter layer and the overcoat layer is formed between the first substrate and the fixed electrode, The movable electrode is a transmissive display device using a MEMS, characterized in that it is disposed so as to partially overlap the edge of the fixed electrode in a portion corresponding to the fixed electrode on the second substrate side. 15. The transmissive display device of claim 14, wherein the first to third color filter layers are formed to form a dot. 15. The transmissive display device of claim 14, wherein the first, second, and third color filter layers are repeatedly arranged in sequence. 15. The transmissive display device of claim 14, wherein a switch is provided between the movable electrode and the fixed electrode in the transmissive display device.