KR200198469Y1 - Apparatus for detecting unsual pressure pf freezer in semiconductor wafer exposure device - Google Patents

Abstract

The present invention relates to a pressure abnormality detection device of a refrigerator for semiconductor wafer exposure equipment, wherein a compressor, a condenser, and a cooling coil are connected to a refrigerant pipe, respectively, to control a temperature of an exposure chamber. And a lower limit pressure switch and an upper limit pressure switch are connected to one end of each of the refrigerant pipe connecting the condenser and the refrigerant pipe connecting the condenser and the cooling coil to operate when the pressure of the refrigerant flowing through the refrigerant pipe is outside the set value. On one side of the pressure switch and the upper limit pressure switch, an alarm is generated to generate an alarm by the operation of the lower limit pressure switch or the upper limit pressure switch. When an abnormality occurs in the pressure of the refrigerant flowing through the freezer, an alarm is generated to prompt the operator to take an action. To take down the exposure equipment Prevented by it is possible to improve the productivity of the product, and also can contribute to the stabilization of the process to always maintain a constant temperature of air supplied into the exposure chamber.

Description

Pressure abnormality detection device of refrigerator for semiconductor wafer exposure equipment

The present invention relates to a refrigerator for adjusting the temperature of a semiconductor wafer exposure equipment, and more particularly, to a pressure abnormality detection device of a refrigerator for a semiconductor wafer exposure equipment for detecting a pressure abnormality of the freezer in advance to prevent the down of the exposure equipment. .

In general, an exposure apparatus is provided with a reticle stage for mounting a pattern mask at a lower distance to the lower side of the illumination system, a wafer stage on which the wafer is seated under the reticle stage, and a pattern between the reticle stage and the wafer stage. A device for implanting a pattern formed in a pattern mask onto a wafer by providing a reduction lens for shrinking and implanting a pattern of a mask onto a wafer and irradiating a beam irradiated from the illumination system through the pattern mask and the reduction lens onto the wafer.

Each of the components of the exposure apparatus is installed in the exposure chamber 10 to control the temperature and pressure, etc., one side of the exposure chamber 10 to uniform the temperature inside the exposure chamber 10 during the process The refrigerator is installed to keep it.

As shown in FIG. 1, the compressor 21 converts a gaseous refrigerant of low temperature and low pressure into a gaseous refrigerant of high temperature and high pressure and a gaseous refrigerant of high temperature and high pressure and a liquid refrigerant of room temperature and high pressure. The cooling condenser 22 and the cooling coil 23 for absorbing heat from the outside heat exchange with each other is connected to the refrigerant pipe (L1) (L2) (L3) to form a cycle, the cooling coil (23) On one side of the heater 24 is installed to finally adjust the temperature of the air supplied from the cooling coil 23 to the exposure chamber 10.

A first branch pipe L1 'is connected to one end of the first refrigerant pipe L1 connecting the cooling coil 23 and the compressor 21, and the first branch pipe L1' is connected to the first branch pipe L1 '. A low pressure gauge G1 for measuring the pressure of the refrigerant flowing through the first refrigerant pipe L1 is installed, and at one end of the third refrigerant pipe L3 connecting the condenser 22 and the cooling coil 23 is formed. Two branch pipes (L3 ') are connected, and the second branch pipe (L3') is provided with a high pressure gauge (G2) for measuring the pressure of the refrigerant flowing through the third refrigerant pipe (L3).

Reference numeral L2 is a second refrigerant pipe connecting the compressor 21 and the condenser 22.

Therefore, the air flowing from the heater 24 and the cooling coil 23 is circulated to the cooling coil 23 through the compressor 21 and the condenser 22 along the refrigerant pipes L1, L2, and L3. By controlling the temperature thereof, the temperature is introduced into the exposure chamber 10.

At this time, the temperature flowing into the exposure chamber 10 is accurately controlled by the heater 24 installed on one side of the cooling coil 23.

For example, when the temperature of the air set to be supplied to the exposure chamber 10 is 23 ° C., the temperature of the air is adjusted to an appropriate level by the cooling coil 23 of the refrigerator 20, wherein the cooling coil 23 When the temperature of the air controlled by) is lower than the set temperature at 22 ° C., the heater 24 is operated to raise the temperature of the air to flow into the exposure chamber 10.

However, when the process proceeds as described above, in the case where the refrigerant flowing through the refrigerant tubes L1, L2, and L3 leaks, the pressure of the refrigerant flowing through the refrigerant tubes L1, L2, and L3 is unstable. The temperature of the exposure chamber 10 becomes unstable, thereby causing a process failure. Conventionally, a pressure gauge G1 for checking the pressure of the refrigerant flowing through the refrigerant pipes L1, L2, and L3. (G2) is installed, but there was an inconvenience that the operator must check the pressure gauge (G1) (G2) from time to time.

The present invention is devised to solve the above-described problems, and by improving the productivity of the product by detecting the pressure abnormality of the refrigerant flowing in the freezer in advance to prevent the down of the exposure equipment, and also according to the pressure abnormality of the freezer SUMMARY OF THE INVENTION An object of the present invention is to provide a pressure abnormality detecting device of a refrigerator for a semiconductor wafer exposure equipment for preventing exposure failure due to a temperature change of air introduced into an exposure chamber.

1 is a schematic view showing the structure of a refrigerator for semiconductor wafer exposure equipment according to the prior art.

Figure 2 is a schematic view showing the structure of a refrigerator for semiconductor wafer exposure equipment according to the present invention.

3 is a circuit diagram showing an alarm operation path according to the present invention.

Explanation of symbols on the main parts of the drawings

10; Exposure chamber 20; Freezer

21; Compressor 22; Condenser

23; Cooling coil 24; heater

31,32; Pressure switch 35; alarm

In order to achieve the object of the present invention as described above, in the refrigerator for semiconductor wafer exposure equipment for controlling the temperature of the exposure chamber by connecting the compressor, the condenser and the cooling coil, respectively, the refrigerant connecting the compressor and the condenser The lower limit pressure switch and the upper limit pressure switch are connected to one end of the refrigerant pipe connecting the pipe and the condenser and the cooling coil to operate when the pressure of the refrigerant flowing through the refrigerant pipe is outside the set value. One side of is provided with a pressure abnormality detection device of the refrigerator for semiconductor wafer exposure equipment, characterized in that an alarm for generating an alarm by the operation of the lower limit pressure switch or the upper limit pressure switch.

Hereinafter, an embodiment of a pressure abnormality detection device of a refrigerator for a semiconductor wafer exposure apparatus according to the present invention will be described with reference to the accompanying drawings.

As shown in FIG. 2, the refrigerator for an exposure apparatus according to the present invention is installed at one side of the exposure chamber 10 to uniformly adjust the temperature of air introduced into the exposure chamber 10.

The refrigerator 20 includes a cooling coil 23 installed at one side of the exposure chamber 10, a compressor 21 connected to the cooling coil 23 and a first refrigerant pipe L1, and the compressor 21. And a condenser 22 connected to the second refrigerant pipe L2, and the condenser 22 is connected to the cooling coil 23 by a third refrigerant pipe L3, and one side of the cooling coil 23. The heater 24 is finally installed to finally control the temperature of the air flowing into the exposure chamber 10.

One end of each of the first refrigerant pipe L1 and the third refrigerant pipe L3 is connected to the first branch pipe L1 ′ and the second branch pipe L3 ′, respectively. L1 ') and the second branch pipe L3' at the ends of the low pressure gauge G1 and the high pressure gauge G2 to measure the pressure of the refrigerant flowing through the first refrigerant pipe L1 and the third refrigerant pipe L3, respectively. ) Is installed.

Meanwhile, a third branch pipe L1 "is connected to and installed at one end of the first branch pipe L1 ', and the refrigerant measured from the low pressure gauge G1 at the end of the third branch pipe L1". The lower limit pressure switch 31 is installed to operate when there is an abnormality in the pressure.

In addition, a fourth branch pipe L3 "is connected to one end of the second branch pipe L3 ', and a refrigerant measured from the high pressure gauge G2 is connected to an end of the fourth branch pipe L3". Install an upper limit pressure switch 32 to operate when there is an abnormality in the pressure.

And one side of the lower limit pressure switch 31 and the upper limit pressure switch 32 is provided with an alarm 35 to generate an alarm by the operation of each of the pressure switches 31, 32.

Referring to the operation of the pressure abnormality detection device of the refrigerator for semiconductor wafer exposure equipment according to the present invention configured as described above are as follows.

When the coolant flows along the coolant tubes L1, L2, and L3 at normal pressure, as shown in FIG. 3, both the lower limit pressure switch 31 and the upper limit pressure switch 32 are closed. In this state, the current is conducted to the relay 33 so that the relay a contact 33a is open, and the relay b contact 33b is closed so that the current flows to the operation indicator 34 to indicate a normal operation state. .

However, when there is an abnormality in the pressure of the refrigerant gas flowing along the refrigerant pipes L1, L2, and L3, that is, the pressure of the refrigerant gas flowing through the first refrigerant pipe L1 is lower than the set value or the third refrigerant pipe When the pressure of the refrigerant gas flowing in L3 is higher than the set value, the lower limit pressure switch 31 or the upper limit pressure switch 32 is opened so that no current flows in the relay 33, so that the relay b contact 33b is open. The operation indicator 34 is turned off, and the relay a contact 33a is closed so that an electric current flows toward the alarm 35 so that an alarm is generated.

In this case, when the alarm occurs, the operator fills the refrigerant inside the refrigerant pipes L1, L2, and L3, or takes an immediate action such as detecting a leaking part of the refrigerant to lower the exposure chamber 10. You can prevent it.

As described above, the pressure abnormality detection device of the refrigerator for semiconductor wafer exposure equipment according to the present invention, when an abnormality occurs in the pressure of the refrigerant flowing through the freezer, an alarm is generated so that an operator can quickly take action. It is possible to prevent the down of the equipment to improve the productivity of the product, and also contribute to the stabilization of the process by the constant temperature air supplied into the exposure chamber.

Claims (1)

In the refrigerator for semiconductor wafer exposure equipment for controlling the temperature of the exposure chamber by the compressor, the condenser and the cooling coil are connected to the refrigerant pipe, respectively, the refrigerant pipe connecting the compressor and the condenser and the refrigerant pipe connecting the condenser and the cooling coil The lower limit pressure switch and the upper limit pressure switch are connected to each other so that the lower limit pressure switch and the upper limit pressure switch are operated to operate when the pressure of the refrigerant flowing through the refrigerant pipe at one end is out of the set value. Pressure abnormality detection device of the refrigerator for semiconductor wafer exposure equipment, characterized by providing an alarm for generating an alarm by.