KR20010095050A - Dielectric ceramic composition, ceramic capacitor using the composition and process of producing same - Google Patents
Dielectric ceramic composition, ceramic capacitor using the composition and process of producing same Download PDFInfo
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Abstract
Description
본 발명은 유전체 자기조성물과 이를 이용한 자기커패시터 및 그 제조방법에 관한 것으로, 특히, 고주파수 대역에서 유전체손실이 적으면서도 안정한 특성을 갖고, 더욱이 저온에서의 소성을 실현하여 전극재료로 동(Cu), 텅스텐(W) 등의 비(卑)금속, 또는 카본, 그라파이트 등의 탄소계 물질을 이용하는 것이 가능하고, 그 결과 제조 코스트의 대폭적인 저하, 제품의 코스트다운을 가능하게 하는 유전체 자기조성물과 이것을 이용한 자기커패시터 및 그 제조방법에 관한 것이다.The present invention relates to a dielectric magnetic composition, a magnetic capacitor using the same, and a method of manufacturing the same. Particularly, the present invention relates to a dielectric material having low dielectric loss in a high frequency band and stable properties, and furthermore, to achieve low temperature firing and to produce copper (Cu), Non-metals such as tungsten (W), or carbon-based materials such as carbon and graphite can be used, and as a result, a dielectric magnetic composition that enables a significant reduction in manufacturing cost and a cost reduction of a product, A magnetic capacitor and a method of manufacturing the same.
종래, 소형이면서도 대용량의 커패시터로서, 세라믹스의 유전특성을 이용한 세라믹 커패시터가 알려져 있다. 이 세라믹 커패시터는 루틸(rutile)형의 TiO2, 페로브스카이트형의 MgTiO3, CaTiO3, SrTiO3등의 유전체재료 한가지 또는 이들을 조합하여 소망의 특성을 갖는 커패시터로 만든다.Background Art Conventionally, ceramic capacitors using dielectric characteristics of ceramics are known as small and large capacity capacitors. The ceramic capacitor is made of a capacitor having a dielectric material, one or a desired combination of properties thereof, such as rutile (rutile) Type of TiO 2, the perovskite-type of MgTiO 3, CaTiO 3, SrTiO 3 .
세라믹 커패시터는 단층형과 적층형으로 분류된다.Ceramic capacitors are classified into single layer type and stacked type.
단층세라믹 커패시터는 상술한 재료 분말을 가압성형하여 예를 들어 펠릿(원판상), 로드(원통상), 칩(각형상) 등의 성형체로 하고, 이 성형체를 대기중 1200∼1400℃의 온도에서 소성하여 소결체로 하고, 이 소결체의 양표면에 전극을 형성하여 얻을 수 있다.The single-layer ceramic capacitor is press-molded the above-described material powder to form a molded body such as pellets (plates), rods (cylindrical), chips (squares), and the like, and the molded body is formed at a temperature of 1200 to 1400 ° C in air. It can be obtained by firing to form a sintered body and forming electrodes on both surfaces of the sintered body.
또한 적층 세라믹 커패시터는 상술한 재료 분말과 유기바인더 및 유기용제를 혼련하여 슬러리로 하고, 이 슬러리를 닥터브레이드(doctor blade)법에 의해 시트상에 성형하고 탈지하여 그린시트(green sheet)로 하고, 이 그린시트상에 Pt나 Pd등의 귀금속으로 이루어지는 전극을 인쇄한 후, 이들 그린시트를 두께방향으로 적층하고 가압하여 적층체로 하고, 이 적층체를 대기중 1200∼1400℃의 온도에서 소성하여 얻을 수 있다.In addition, the multilayer ceramic capacitor is kneaded with the above-described material powder, an organic binder and an organic solvent to form a slurry. The slurry is formed on a sheet by a doctor blade method and degreased to form a green sheet. After printing an electrode made of a noble metal such as Pt or Pd on the green sheet, these green sheets are laminated in the thickness direction and pressurized to form a laminate, and the laminate is obtained by firing at a temperature of 1200 to 1400 캜 in the air. Can be.
그런데, 상술한 종래의 세라믹 커패시터에 있어서는 전기적 특성이 우수한 치밀한 소결체를 얻기 위해서는 1200∼1400℃라는 높은 온도에서의 소성이 필요하다.By the way, in the above-mentioned conventional ceramic capacitor, baking at the high temperature of 1200-1400 degreeC is needed in order to obtain the compact sintered compact which is excellent in electrical characteristics.
특히, 적층 세라믹 커패시터에서는 전극재료로 비금속을 이용하는 경우 이 비금속이 소성시에 산화하여 세라믹층의 사이에 고저항층을 형성해버려 높은 온도에서도 안정한 Pt나 Pd등의 귀금속재료를 이용할 필요가 있어 저코스트화가 어려운 문제점이 있었다.In particular, in the multilayer ceramic capacitor, when the base metal is used as the electrode material, the base metal is oxidized at the time of firing to form a high resistance layer between the ceramic layers. Therefore, it is necessary to use a precious metal material such as Pt or Pd that is stable even at high temperatures. There was a difficult problem.
또한, 마이크로파 등의 고주파수 영역에 적용하는 경우, 유전체 손실이 적은 것이 바람직하고, 온도특성, 품질계수(Q) 등의 전기적 특성에 대하여도 보다 고특성이면서 고신뢰성의 것이 요구되고 있다. 그러나, 현재의 유전체재료에서는 이들의 요구를 만족하지 못하고 있다.In addition, when applied to a high frequency region such as microwaves, it is desirable to have a low dielectric loss, and higher characteristics and higher reliability are required for electrical characteristics such as temperature characteristics and quality factor (Q). However, current dielectric materials do not satisfy these requirements.
본 발명은 상기의 사정을 감안한 것으로, 고주파수 대역에서 유전체손실이 적으면서 안정한 특성을 갖고, 더욱이 저온에서의 소성을 실현하여 비금속이나 탄소계 물질을 전극재료로 이용하는 것이 가능하고, 그 결과, 제조코스트의 대폭적인저하, 즉 제품의 코스트 다운을 도모할 수 있는 유전체 자기조성물과 이것을 이용한 자기커패시터 및 그 제조방법을 제공하는 것을 목적으로 한다.In view of the above circumstances, the present invention has a stable characteristic with low dielectric loss in the high frequency band, and furthermore, it is possible to realize firing at a low temperature and to use a nonmetal or a carbon-based material as an electrode material. It is an object of the present invention to provide a dielectric magnetic composition, a magnetic capacitor using the same, and a method of manufacturing the same, which can significantly reduce the cost of the product.
도 1은 본 발명의 제1의 실시형태인 단층 세라믹 커패시터를 나타내는 단면도이다.BRIEF DESCRIPTION OF THE DRAWINGS It is sectional drawing which shows the single-layer ceramic capacitor which is 1st Embodiment of this invention.
도 2는 본 발명의 제2의 실시형태인 적층 세라믹 커패시터를 나타내는 단면도이다.It is sectional drawing which shows the multilayer ceramic capacitor which is 2nd Embodiment of this invention.
*도면의 주요부분에 대한 부호의 설명** Description of the symbols for the main parts of the drawings *
1..... 벌크상의 유전체 2..... 단자전극Bulk dielectric 2 ..... Terminal electrode
3..... 리드선 4..... 에폭시 수지3 ..... lead wire 4 ..... epoxy resin
11..... 유전체층 12..... 내부전극11 ..... Dielectric layer 12 ..... Internal electrode
13, 14..... 단자전극13, 14 ..... Terminal electrode
상기 과제를 해결하기 위하여, 본 발명은 다음과 같은 유전체 자기조성물과 이를 이용한 자기커패시터 및 그 제조방법을 제공하였다.In order to solve the above problems, the present invention provides a dielectric magnetic composition, a magnetic capacitor using the same, and a method of manufacturing the same.
즉, 본 발명에 따른 유전체 자기조성물은, SrxBa1-x(ZryTi1-y)O3(단, 0.8≤x≤1, 0.9≤y≤1)으로 이루어지는 주조성물에, MnO2을 0.05∼15중량%, Bi2O3, PbO, Sb2O3에서 선택된 1종 또는 2종이상을 0.001∼5중량%, 글라스 조성물을 0.5-15중량% 첨가하여 이루어지는 것을 특징으로 한다.That is, the dielectric magnetic composition according to the present invention is MnO 2 in a casting formed of Sr x Ba 1-x (Zr y Ti 1-y ) O 3 (where 0.8 ≦ x ≦ 1 and 0.9 ≦ y ≦ 1). 0.05 to 15% by weight, one or two or more selected from Bi 2 O 3 , PbO, Sb 2 O 3 It is characterized by consisting of 0.001 to 5% by weight, 0.5-15% by weight of the glass composition.
이 유전체 자기조성물은, SrxBa1-x(ZryTi1-y)O3(단, 0.8≤x≤1, 0.9≤y≤1)으로 이루어지는 주조성물에, MnO2을 0.05∼15중량%, Bi2O3, PbO, Sb2O3에서 선택된 1종 또는 2종이상을 0.001∼5중량%, 글라스 조성물을 0.5-15중량% 첨가함으로써, 높은 비유전율, 양호한 온도특성, 높은 품질계수가 실현가능하다. 그 결과, 마이크로파 등의 고주파수 영역에서 특성이 안정하고, 고주파수 영역에서 신뢰성이 향상된다.This dielectric magnetic composition is composed of Sr x Ba 1-x (Zr y Ti 1-y ) O 3 (where 0.8 ≦ x ≦ 1 and 0.9 ≦ y ≦ 1), with 0.05 to 15 weights of MnO 2 . High relative dielectric constant, good temperature characteristic and high quality factor by adding 0.001 to 5% by weight of one or two or more selected from%, Bi 2 O 3 , PbO, Sb 2 O 3 and 0.5-15% by weight of the glass composition Is feasible. As a result, the characteristics are stable in the high frequency region such as microwaves, and the reliability is improved in the high frequency region.
여기서, Sr의 몰비를 0.8이상(80mol%이상)으로 한 것은, 0.8미만(80mol%미만)에서는 925∼1080℃의 저온에서 소성한 경우, 소결성이 저하되어 양호한 소결체가 얻어질 수 없기 때문이다.Here, the molar ratio of Sr is 0.8 or more (80 mol% or more) because when it is baked at less than 0.8 (less than 80 mol%) at a low temperature of 925 to 1080 ° C, the sinterability is lowered and a good sintered body cannot be obtained.
또한, Ti의 몰비를 0.1이하(10mol%이하)로 한 것은, 0.1(10mol%)을 초과하면 품질계수(Q)가 저하하는 것과 함께 온도특성이 음으로 커지기 때문이다.The molar ratio of Ti is 0.1 or less (10 mol% or less) because when the temperature exceeds 0.1 (10 mol%), the quality factor Q decreases and the temperature characteristic becomes negative.
MnO2는 저온소성을 가능하게 하기 때문에 소결조제제로서 첨가하는 것으로, 그 첨가량은 0.05∼15중량%가 바람직하다. 그 이유는 첨가량이 0.05중량%미만에서는 첨가효과가 없고, 따라서 저온소성에서 치밀한 소결체를 얻을 수 없으며 또한, 15중량%을 초과하면 품질계수(Q)가 저하되기 때문이다.MnO 2 is added as a sintering agent because it enables the first low-temperature co-fired, the addition amount is preferably 0.05~15% by weight. The reason for this is that when the added amount is less than 0.05% by weight, there is no addition effect, and therefore, a compact sintered body cannot be obtained at low temperature firing, and when it exceeds 15% by weight, the quality factor Q is lowered.
Bi2O3, PbO, Sb2O3에서 선택된 1종 또는 2종이상의 저융점 금속산화물은, 온도특성을 개선하기 위해 첨가하는 것으로, 그 첨가량은 0.001∼5중량%가 바람직하다. 그 이유는 첨가량이 0.001중량%미만에서는 온도특성의 개선효과가 얻어지지 않으며 또한, 5중량%을 초과하면 품질계수(Q)가 저하하기 때문이다.One or two or more low-melting metal oxides selected from Bi 2 O 3 , PbO, and Sb 2 O 3 are added to improve the temperature characteristics, and the amount thereof is preferably 0.001 to 5% by weight. The reason is that when the added amount is less than 0.001% by weight, the effect of improving the temperature characteristic is not obtained, and when the amount exceeds 5% by weight, the quality factor Q is lowered.
글라스 조성물은, 925∼1080℃의 저온소성을 가능하게 하기 때문에 소결조제로서 첨가하는 것으로, 그 첨가량은 0.5∼15중량%가 바람직하다. 그 이유는 첨가량이 0.5중량% 미만에서는 소결조제제로서의 효과가 없어 저온소성을 할 수 없으며, 그 결과 비유전율, 온도특성, 품질계수가 저하하기 때문이며, 또한, 15중량%을 초과하면 품질계수(Q)가 저하하기 때문이다.Since the glass composition enables low-temperature baking of 925-1080 degreeC, it is added as a sintering adjuvant, The addition amount is 0.5 to 15 weight% is preferable. The reason is that if the added amount is less than 0.5% by weight, it is not effective as a sintering aid, and therefore, it cannot be baked at low temperature. As a result, the relative dielectric constant, temperature characteristics, and quality coefficient are lowered. This is because Q) decreases.
글라스조성물로서는 첨가하여도 특성에 악영향을 미치지 않고, 주 조성물인 SrxBa1-x(ZryTi1-y)O3(단, 0.8≤x≤1, 0.9≤y≤1)와 젖음성이 양호하고, 더욱이 925∼1080℃의 온도에서 연화 및/또는 용융하는 글라스가 바람직하다. 구체적으로는, ZnO-SiO2계 글라스, Li2O-Al2O3-SiO2계 글라스 등이 바람직하다.The glass composition does not adversely affect properties even if added, and the wettability of Sr x Ba 1-x (Zr y Ti 1-y ) O 3 (where 0.8 ≦ x ≦ 1 and 0.9 ≦ y ≦ 1 ), which is a main composition, It is preferable that the glass soften and / or melt at a temperature of 925 to 1080 ° C. Specifically, ZnO-SiO 2 -based glass, Li 2 O-Al 2 O 3 -SiO 2 -based glass, and the like are preferable.
또한, 본 발명에 따른 유전체 자기조성물은, 상기한 유전체 자기조성물에서, 상기 주조성물에 SiO2을 0.01-5중량%, Al2O3을 0.01∼5중량% 첨가하여 이루어지는 것을 특징으로 한다.The dielectric magnetic composition according to the present invention is characterized in that the dielectric ceramic composition is prepared by adding 0.01-5% by weight of SiO 2 and 0.01-5% by weight of Al 2 O 3 to the cast product.
SiO2는 온도특성을 개선하기 위해 첨가하는 것으로, 그 첨가량은 0.01∼5중량%가 바람직하다. 그 이유는, 첨가량이 0.01중량% 미만에서는 온도특성의 개선효과가 얻어지지 않으며, 또한, 5중량%을 초과하면 품질계수(Q)가 저하하기 때문이다.SiO 2 is added to improve the temperature characteristic, and the amount thereof is preferably 0.01 to 5% by weight. The reason for this is that when the added amount is less than 0.01% by weight, the effect of improving the temperature characteristics is not obtained, and when the amount is more than 5% by weight, the quality factor Q decreases.
Al2O3는 품질계수(Q)을 개선하기 위해 첨가하는 것으로, 그 첨가량은 0.01-5중량%가 바람직하다. 첨가량이 0.01중량%미만에서는 품질계수(Q)의 개선효과가 얻어지지 않으며, 또한 5중량%을 초과하면 온도특성이 저하하기 때문이다.Al 2 O 3 is added to improve the quality factor (Q), and the amount thereof is preferably 0.01-5% by weight. This is because when the amount added is less than 0.01% by weight, the effect of improving the quality factor Q is not obtained, and when the amount is more than 5% by weight, the temperature characteristic is lowered.
또한, 본 발명에 따른 유전체 자기조성물은, 상기한 유전체 자기조성물에서, 상기 주조성물에 희토류 산화물을 0.001-2중량%첨가하여 이루어지는 것을 특징으로 한다.In addition, the dielectric ceramic composition according to the present invention is characterized in that the dielectric ceramic composition is obtained by adding 0.001-2% by weight of rare earth oxide to the cast product.
희토류 산화물은, 온도특성의 개선을 위해 첨가하는 것으로, 그 첨가량은 0.001∼2중량%가 바람직하다. 그 이유는 첨가량이 0.001중량% 미만에서는 온도특성의 개선효과가 얻어지지 않으며, 또한, 2중량%을 초과하면 품질계수(Q)가 저하하기 때문이다.The rare earth oxide is added to improve the temperature characteristics, and the amount thereof is preferably 0.001 to 2% by weight. The reason for this is that when the added amount is less than 0.001% by weight, the effect of improving the temperature characteristics is not obtained, and when the amount exceeds 2% by weight, the quality factor Q is lowered.
희토류 산화물로서는, 주조성물인 SrxBa1-x(ZryTi1-y)O3(단, 0.8≤x≤1, 0.9≤y≤1)과 젖음성이 양호하고, 더욱이 입계층에 존재하여 소결성을 높이는 것이 바람직하다. 구체적으로는, La2O3, CeO2, Pr6O11, Nd2O3, Sm2O3, Dy2O3, Ho2O3, Er2O3, Tm2O3, Yb2O3에서 선택된 1종 또는 2종 이상을 조합하는 것이 바람직하다.As rare earth oxides, Sr x Ba 1-x (Zr y Ti 1-y ) O 3 (0.8 ≤ x ≤ 1 , 0.9 ≤ y ≤ 1), which is a cast product, have good wettability and are present in the grain boundary layer. It is preferable to improve sinterability. Specifically, La 2 O 3 , CeO 2 , Pr 6 O 11 , Nd 2 O 3 , Sm 2 O 3 , Dy 2 O 3 , Ho 2 O 3 , Er 2 O 3 , Tm 2 O 3 , Yb 2 O It is preferable to combine one or two or more selected from three .
본 발명에 따른 자기커패시터는 상기한 유전체 자기조성물로 이루어지는 소자의 양면에 전극을 형성하여 이루어지는 것을 특징으로 한다.The magnetic capacitor according to the present invention is characterized in that the electrode is formed on both sides of the element made of the above-described dielectric magnetic composition.
또한, 본 발명에 따른 자기커패시터는, 상기한 유전체 자기조성물로 이루어지는 시트상의 유전체와, 전극를 교대로 적층하여 이루어지는 것을 특징으로 한다.The magnetic capacitor according to the present invention is characterized by alternately stacking a sheet-like dielectric composed of the above dielectric magnetic composition and an electrode.
또한, 본 발명에 따른 자기커패시터는 상기한 커패시터에서, 상기 전극이 비금속 또는 탄소계물질로 되는 것을 특징으로 한다.In addition, the magnetic capacitor according to the present invention is characterized in that in the above capacitor, the electrode is made of a non-metal or carbon-based material.
이 자기커패시터는, 상기한 유전체 자기조성물을 이용함으로써 고주파수 대역에서 유전체손실이 적으면서도 안정한 특성으로 된다. 이에 따라, 특히 고주파수 대역에서 신뢰성이 향상된다.This magnetic capacitor has a stable characteristic with low dielectric loss in the high frequency band by using the above dielectric magnetic composition. This improves the reliability, especially in the high frequency band.
또한, 상기 유전체 자기조성물을 이용함으로써 925∼1080℃의 저온에서 소성하는 것이 가능하다. 그 결과, 내부전극으로 저렴한 비금속 또는 탄소계 물질을 이용하여 제조코스트를 저감할 수 있다.In addition, by using the above dielectric ceramic composition, it is possible to bake at a low temperature of 925 to 1080 占 폚. As a result, manufacturing cost can be reduced by using an inexpensive nonmetal or carbon-based material as the internal electrode.
상기 비금속으로서는, 도체로서의 특성을 갖으면서도 신뢰성의 높은 금속, 예를 들어, 동(Cu), 니켈(Ni), 텅스텐(W), 몰리브덴(Mo) 등의 금속에서 선택된 1종 또는 2종이상을 함유하는 금속이 바람직하다.As the base metal, one or two or more selected from metals having high characteristics as conductors and high reliability, such as copper (Cu), nickel (Ni), tungsten (W), and molybdenum (Mo), may be used. Metal containing is preferable.
또한, 탄소계 물질로서는 카본(무정형탄소), 그라파이트(석묵, 흑연), 또는 이들의 혼합물이 바람직하다.As the carbonaceous substance, carbon (amorphous carbon), graphite (quartz, graphite), or a mixture thereof is preferable.
본 발명에 따른 유전체 자기조성물의 제조방법은, SrxBa1-x(ZryTi1-y)O3(단, 0.8≤x≤1, 0.9≤y≤1)으로 이루어지는 주조성물에, MnO2을 0.05∼15중량%, Bi2O3,PbO, Sb2O3에서 선택된 1종 또는 2종이상을 0.001∼5중량%, 글라스 조성물을 0.5-15중량% 첨가한 분체를, 성형하여 벌크상 또는 시트상의 성형체로 하고, 이 성형체를 925∼1080℃의 온도에서 소성하는 것을 특징으로 한다.According to the present invention, there is provided a method for producing a dielectric magnetic composition comprising MnO in a casting formed of Sr x Ba 1-x (Zr y Ti 1-y ) O 3 (where 0.8 ≦ x ≦ 1 and 0.9 ≦ y ≦ 1). 2 to 0.05 to 15% by weight, one or two or more selected from Bi 2 O 3 , PbO, Sb 2 O 3 or 0.001 to 5% by weight of the powder composition, 0.5-15% by weight of the glass composition is molded and bulked It is set as a shaped object of sheet shape or a sheet, and this molded object is baked at the temperature of 925-1080 degreeC, It is characterized by the above-mentioned.
이 유전체자기조성물의 제조방법은, SrxBa1-x(ZryTi1-y)O3(단, 0.8≤x≤1, 0.9≤y≤1)으로 이루어지는 주조성물에, MnO2을 0.05∼15중량%, Bi2O3, PbO, Sb2O3에서 선택된 1종 또는 2종이상을 0.001∼5중량%, 글라스 조성물을 0.5-15중량% 첨가한 분체를, 성형하여 벌크상 또는 시트상의 성형체로 하고, 이 성형체를 925∼1080℃의 온도에서 소성함으로써 소결조제인 MnO2및 글라스 조성물이 ∼1080℃의 저온소성과정에서 입계층의 젖음성을 향상시켜, 성형체중의 분말입자끼리를 결합시키는 것과 함께, 분말입자의 공극을 감소시키면서 소결을 진행시킨다. 이에 따라 925∼1080℃의 저온에서 소성한 경우에서도 치밀한 고강도의 소결체를 얻을 수 있다.In the method of manufacturing the dielectric magnetic composition, MnO 2 is 0.05 in a casting formed of Sr x Ba 1-x (Zr y Ti 1-y ) O 3 (where 0.8 ≦ x ≦ 1 and 0.9 ≦ y ≦ 1). 15-15% by weight, one or two or more selected from Bi 2 O 3 , PbO, Sb 2 O 3 , 0.001 to 5% by weight, and a glass composition added 0.5-15% by weight of the powder is molded into a bulk or sheet The molded article was formed into a phase, and the molded article was fired at a temperature of 925 to 1080 ° C. to improve the wettability of the grain boundary layer during the low temperature firing process of sintering aid of MnO 2 and the glass composition to bond powder particles in the molded body. In addition to sintering, the sintering is performed while reducing the voids of the powder particles. As a result, even when fired at a low temperature of 925 to 1080 ° C., a compact high strength sintered compact can be obtained.
또한, 본 발명에 따른 유전체자기조성물의 제조방법은, 상기한 유전체 자기조성물의 제조방법에서, 상기 시트상의 성형체에서 하나의 주된 면에 전극을 형성하고, 그 다음 성형체를 복수개 두께방향으로 적층하고 가압하여 적층체로 하고, 이 적층체를 상기 온도에서 소성하는 것을 특징으로 한다.Further, in the method of manufacturing the dielectric magnetic composition according to the present invention, in the method of manufacturing the dielectric magnetic composition, an electrode is formed on one main surface of the sheet-shaped molded body, and then the molded bodies are laminated in a plurality of thickness directions and pressed. To obtain a laminate, and the laminate is calcined at the above temperature.
이 유전체자기조성물의 제조방법에서는, 시트상의 성형체에서 하나의 주된 면에 전극을 형성하고, 이어서 이 성형체를 복수개 두께방향으로 적층하고 가압하여 적층체로 하고 이어서 이 적층체를 상기 온도에서 소성하는 것에 의해 내부전극재료에 Pt나 Pd의 귀금속과 비교하여 저렴한 Cu, Ni등의 비금속, 또는 무정형탄소, 그라파이트 등의 탄소계 물질을 이용할 수 있다. 이에 따라 특성을 저하시키지 않고 저코스트화를 도모할 수 있다.In the method for producing a dielectric self-composition, an electrode is formed on one main surface of a sheet-like molded article, and then the molded articles are laminated in a plurality of thickness directions, pressurized to form a laminate, and then the laminate is fired at the above temperature. As the internal electrode material, inexpensive non-metals such as Cu and Ni, or carbon-based materials such as amorphous carbon and graphite can be used as compared with precious metals of Pt and Pd. As a result, the cost can be reduced without lowering the characteristics.
본 발명의 유전체 자기조성물과 이를 이용한 자기커패시터 및 그 제조방법의 각실시형태에 대해서 도면을 기초로 설명한다.Embodiments of the dielectric magnetic composition of the present invention, a magnetic capacitor using the same, and a method of manufacturing the same will be described with reference to the drawings.
[제1의 실시형태][First Embodiment]
도 1은 본 발명의 제1의 실시형태인 세라믹 커패시터(자기커패시터)를 나타내는 단면도로서, 도면에서 부호1은 벌크상의 유전체, 2는 유전체(1)의 양면에 형성된 단자전극, 3은 단자전극(2)에 접속된 리드선, 4는 유전체(1) 및 단자전극(2)을 밀봉하는 에폭시수지이다.1 is a cross-sectional view showing a ceramic capacitor (magnetic capacitor) according to a first embodiment of the present invention, in which, reference numeral 1 denotes a bulk dielectric, 2 a terminal electrode formed on both sides of the dielectric 1, and 3 a terminal electrode ( The lead wire 4 connected to 2) is an epoxy resin for sealing the dielectric 1 and the terminal electrode 2.
유전체(1)은, SrxBa1-x(ZryTi1-y)O3(단, 0.8≤x≤1, 0.9≤y≤1)(이하, 단지 SBZT라 한다)로 이루어지는 주조성물에, MnO2을 0.05∼15중량%, Bi2O3, PbO, Sb2O3에서 선택된 1종 또는 2종이상을 0.001∼5중량%, 글라스 프릿트(glass frit, 글라스 조성물)을 0.5-15중량% 첨가한 재료조성으로 이루어지는 유전체 세라믹이다.The dielectric material 1 is formed of a casting formed of Sr x Ba 1-x (Zr y Ti 1-y ) O 3 (where 0.8 ≦ x ≦ 1 and 0.9 ≦ y ≦ 1) (hereinafter only referred to as SBZT). , 0.05-15% by weight of MnO 2 , 0.001-5% by weight of one or two or more selected from Bi 2 O 3 , PbO, Sb 2 O 3 , and 0.5-15 of glass frit (glass composition). A dielectric ceramic composed of a material composition added by weight%.
이 유전체(1)의 재료조성을, 상기 주조성물에 SiO2을 0.01-5중량%, Al2O3을 0.01∼5중량% 첨가한 재료조성, 또는 상기 주조성물에 희토류 산화물을 0.001∼2중량% 첨가한 재료조성, 또는 상기 주조성물에 SiO2을 0.01-5중량%, Al2O3을 0.01∼5중량%, 희토류 산화물을 0.001∼2중량%첨가한 재료조성중 어느것 하나로 해도 좋다.The material composition of the dielectric 1 is a material composition in which 0.01-5% by weight of SiO 2 and 0.01-5% by weight of Al 2 O 3 are added to the cast product, or 0.001-2% by weight of rare earth oxide in the cast product. The added material composition or the cast composition may be any one of 0.01-5% by weight SiO 2 , 0.01-5% by weight Al 2 O 3, and 0.001-2% by weight rare earth oxide.
단자전극(2)로서는, 도체로서의 특성을 갖으면서 신뢰성이 높은 전극재료 예를 들어 Ag 또는 Ag 합금으로 구성된다. Ag합금으로서는 예를 들어 90Ag-10Pd등이 적합하다.The terminal electrode 2 is composed of an electrode material having high characteristics as a conductor and having high reliability, for example, Ag or Ag alloy. As the Ag alloy, for example, 90Ag-10Pd is suitable.
이 Ag 또는 Ag합금 대신, 예를 들어 Cu, Ni, W 또는 Mo, 또는 이들중 2종이상을 함유한 합금 또는 카본, 그라파이트, 이들의 혼합물을 이용해도 좋다.Instead of Ag or Ag alloy, for example, Cu, Ni, W or Mo, or an alloy containing two or more thereof, or carbon, graphite, or a mixture thereof may be used.
이 세라믹 커패시터에서는 비유전율(ε), 품질계수(Q), 온도특성(Tc) 모두 고주파영역에서도 안정하다.In this ceramic capacitor, the relative dielectric constant (ε), quality factor (Q), and temperature characteristic (Tc) are all stable in the high frequency region.
다음, 이 세라믹 커패시터의 제조방법에 대해서 설명한다.Next, the manufacturing method of this ceramic capacitor is demonstrated.
먼저, 분말상의 SBZT, MnO2, Bi2O3, PbO, Sb2O3에서 선택된 1종 또는 2종이상, 글라스 프릿트, SiO2, Al2O3, 희토류 산화물을 각각 소정량 평량하였다.First, one or two or more selected from powdery SBZT, MnO 2 , Bi 2 O 3 , PbO, and Sb 2 O 3 , glass frit, SiO 2 , Al 2 O 3 , and a rare earth oxide were respectively weighed in a predetermined amount.
여기서는, 분말상의 Sr0.95Ba0.05(Zr0.95Ti0.05)O3, MnO2, PbO, 글라스 프릿트(ZnO-SiO2계 글라스 또는 Li2O-Al2O3-SiO2계 글라스), SiO2, Al2O3, La2O3을 표 1에 나타낸 재료조성과 같이 평량하였다.Here, Sr 0.95 Ba 0.05 (Zr 0.95 Ti 0.05 ) O 3 , MnO 2 , PbO, glass frit (ZnO-SiO 2 -based glass or Li 2 O-Al 2 O 3 -SiO 2 -based glass), SiO 2 , Al 2 O 3 and La 2 O 3 were basis weights as shown in Table 1.
그 다음으로, 이들의 분체를 소정량의 물(또는 에탄올, 아세톤 등의 유기용매) 등의 분산매와 함께 볼밀에 넣고, 소정기간, 예를 들면 24시간 혼합·분쇄하고, 그 후 탈수(또는 탈에탄올, 탈 아세톤 등의 탈유기용매)·건조를 행하였다. 본 발명의 재료조성이외의 조성의 시료도 만들어 비교예로서 하였다(표 1중에서는 「※)로 표시하고 있다)Next, these powders are put into a ball mill together with a predetermined amount of a dispersion medium such as water (or an organic solvent such as ethanol or acetone), mixed and ground for a predetermined period of time, for example, for 24 hours, and then dehydrated (or dewatered). And an organic solvent such as ethanol and deacetone) and dried. Samples of compositions other than the material composition of the present invention were also made and used as comparative examples (in Table 1, indicated by "※)).
그 다음으로 얻어진 건조분말을 550∼750℃의 온도에서 0.5∼5.0시간, 하소한 다음, 라이카이기(또는 자동유발)을 이용하여 1∼24시간분쇄하고, 소정의 입도의 하소분으로 하였다.Subsequently, the obtained dried powder was calcined at a temperature of 550 to 750 ° C for 0.5 to 5.0 hours, and then pulverized for 1 to 24 hours using Leicaigi (or automatic induction) to obtain a calcined powder having a predetermined particle size.
다음으로, 이 하소분에 소정량의 유기바인더를 가한 후, 라이카이(大臼)기 등을 이용하여 균일하게 혼합·조립하고, 소정의 입도의 조립분(단립)으로 하였다. 유기바인더는 PVA(polyvinyl alchol) 수용액을 이용하였다. 유기바인더로는, 에틸셀룰로스 수용액, 아크릴수지용액(아크릴바인더) 등을 이용해도 좋다.Next, a predetermined amount of organic binder was added to the calcined powder, and then uniformly mixed and assembled using a Leica group or the like to obtain a granulated powder (single granule) having a predetermined particle size. The organic binder was PVA (polyvinyl alchol) aqueous solution. As the organic binder, an ethyl cellulose aqueous solution, an acrylic resin solution (acrylic binder), or the like may be used.
다음으로 성형기를 이용하여, 이 조립분을 직경 20mm, 두께 2mm의 펠릿으로 성형하고, 그후 대기중 925∼1080℃의 온도에서 0.5∼10.0시간 소성하고, 본 실시형태의 원판상의 유전체(1)를 얻었다. 본 발명의 재료조성의 시료를 본 발명의 소성온도범위 이외의 온도에서 소성하여 비교예로 하였다(표 1에서는 비교예를 「※」나타내고 있다).Next, using a molding machine, the granulated powder is molded into pellets having a diameter of 20 mm and a thickness of 2 mm, and then calcined for 0.5 to 10.0 hours at a temperature of 925 to 1080 ° C. in the air, and the disk-shaped dielectric 1 of the present embodiment is formed. Got it. The sample of the material composition of this invention was baked at the temperature other than the baking temperature range of this invention, and it was set as the comparative example (in Table 1, a comparative example is shown with "*").
표 2는 각 시료에서 전기적 특성을 나타낸 것이다. 역시 표 2에서 비교예를 「※」로 나타내고 있다.Table 2 shows the electrical properties in each sample. In addition, the comparative example is shown by "※" in Table 2.
여기에서, 비유전율(ε)은 25℃에서 1MHz, 1Vrms의 조건하에서 측정을 하였다.Here, the relative dielectric constant? Was measured under the conditions of 1 MHz and 1 V rms at 25 ° C.
품질계수(Q)는, 1MHz, 25℃의 조건하에서 측정하였다. 온도특성(Tc)는 25℃의 정전용량C1 및 125℃에서의 정전용량C2을 각각 측정하고, 이들의 측정치를 다음식에 대입하여 온도특성(Tc)을 산출하였다.The quality factor (Q) was measured under the conditions of 1 MHz and 25 ° C. The temperature characteristic T c measured the capacitance C 1 at 25 ° C. and the capacitance C 2 at 125 ° C., respectively, and substituted these measurements with the following equation to calculate the temperature characteristic T c.
Tc(ppmm/℃)Tc (ppmm / ℃)
=((C2-C1)×106)/(C1×(125-25))= ((C2-C1) × 10 6 ) / (C1 × (125-25))
비저항(R(Ω·cm))은 25℃에서 1000V의 직류전압을 인가할 때의 1분후의 전류치를 측정하고, 이들 전압치 및 전류치에서 비저항을 산출하였다.The specific resistance (R (Ωcm)) measured the current value 1 minute after applying a DC voltage of 1000V at 25 ° C, and calculated the specific resistance from these voltage values and the current value.
이들 표 2에서 밝혀진 바와 같이, 본 실시형태의 시료에 의하면, 비유전율(ε), 품질계수(Q), 온도특성(Tc) 모두, 고주파영역에서도 안정한 것을 알 수 있다As shown in these Table 2, according to the sample of this embodiment, it turns out that both the dielectric constant (epsilon), the quality coefficient (Q), and the temperature characteristic (Tc) are stable also in a high frequency range.
한편, 비교예의 시료에서는 본 실시형태의 시료와 비교하여, 비유전율(ε), 온도특성(Tc), 품질계수(Q)중 어느 하나가 저하한 것을 알 수 있다.On the other hand, in the sample of the comparative example, compared with the sample of this embodiment, it turns out that any one of the dielectric constant (epsilon), the temperature characteristic (Tc), and the quality coefficient (Q) fell.
더욱이, 금속현미경을 이용하여, 본 실시형태의 시료의 표면상태를 관찰한 바, 입계에 공극 등이 인지되지 않고 치밀한 소결체로 되는 것이 확인되었다.Moreover, when the surface state of the sample of this embodiment was observed using the metal microscope, it turned out that a space | gap etc. are not recognized at a grain boundary, and it became a compact sintered compact.
이상 설명과 같이, 본 실시형태의 세라믹 커패시터에 의하면, 유전체(1)를 SBZT로 이루어지는 주조성물에, MnO2을 0.05∼15중량%, Bi2O3, PbO, Sb2O3에서 선택된 1종 또는 2종이상을 0.001∼5중량%, 글라스 프릿트를 0.5-15중량% 첨가하고, 필요에 따라 상기 주조성물에 SiO2을 0.01-5중량%, Al2O3을 0.01∼5중량%, 희토류 산화물을 0.001-2중량% 첨가한 재료조성으로 했기 때문에 높은 비유전율, 양호한 온도특성, 높은 품질계수를 실현할 수 있다. 따라서, 마이크로파 등의 고주파수 대역에서 특성을 안정화시킬 수 있고, 고주파수대역에서 신뢰성을 향상시킬 수 있다.As described above, according to the ceramic capacitor of the present embodiment, the dielectric material 1 is made of SBZT, and is selected from 0.05 to 15% by weight of MnO 2 and selected from Bi 2 O 3 , PbO, and Sb 2 O 3 . Or 0.001 to 5% by weight of two or more, 0.5-15% by weight of glass frit, 0.01-5% by weight of SiO 2 , 0.01-5% by weight of Al 2 O 3 , to the cast product, if necessary, Since a material composition containing 0.001-2% by weight of rare earth oxide is used, high relative dielectric constant, good temperature characteristics, and high quality coefficient can be realized. Therefore, the characteristic can be stabilized in a high frequency band such as a microwave, and the reliability can be improved in the high frequency band.
본 실시형태의 세라믹 커패시터의 제조방법에 의하면, SBZT로 이루어지는 주조성물에, MnO2을 0.05∼15중량%, Bi2O3, PbO, Sb2O3에서 선택된 1종 또는 2종이상을 0.001∼5중량%, 글라스 조성물을 0.5-15중량% 첨가하고, 필요에 따라 상기 주조성물에 SiO2을 0.01-5중량%, Al2O3을 0.01∼5중량%, 희토류 산화물을 0.001-2중량% 첨가한 분체를 성형하여 벌크상의 성형체로 하고, 이 성형체를 925∼1080℃의 온도에서 소성하기 때문에, 치밀하면서 고강도의 소결체를 저온소성에 의해 만들 수 있다.According to the production process of the ceramic capacitor of this embodiment, the primary composition comprising the SBZT, the 0.05~15% by weight of MnO 2, Bi 2 O 3, PbO, Sb 2 O 3 alone or in combination of two or more selected from the 0.001~ 5% by weight, adding 0.5-15 wt% of the glass composition, and 0.01-5% by weight of SiO 2 in the main composition, as needed, from 0.01 to 5% by weight of Al 2 O 3, 0.001-2% by weight of the rare earth oxide Since the added powder is shape | molded and it is made into a bulk molded object, and this molded object is baked at the temperature of 925-1080 degreeC, a compact and high strength sintered compact can be made by low temperature baking.
[제2의 실시형태]Second Embodiment
도 2는 본 발명의 제2의 실시형태인 적층 세라믹 커패시터를 나타낸 도면으로, 도면에서 부호11은 시트상의 유전체층, 12는 박두께의 내부전극, 13, 14는 단자전극이다.Fig. 2 is a diagram showing a multilayer ceramic capacitor according to a second embodiment of the present invention, wherein reference numeral 11 is a sheet-like dielectric layer, 12 is a thin internal electrode, and 13 and 14 are terminal electrodes.
이 적층 세라믹 커패시터에서는 유전체층(11)을 8층, 내부전극(12)을 7층, 교대로 적층하고 있다.In this multilayer ceramic capacitor, eight dielectric layers 11 and seven internal electrodes 12 are alternately stacked.
유전체층(11)은 SBZT로 이루어지는 주조성물에, MnO2을 0.05∼15중량%,Bi2O3, PbO, Sb2O3에서 선택된 1종 또는 2종이상을 0.001∼5중량%, 글라스 프릿트(글라스 조성물)을 0.5∼15중량% 첨가한 재료조성으로 이루어진 시트상의 유전체 세라믹 커패시터이다.The dielectric layer 11 is a cast product made of SBZT, and 0.05 to 15% by weight of MnO 2 , 0.001 to 5% by weight of one or two or more selected from Bi 2 O 3 , PbO, and Sb 2 O 3 , and glass frit. A sheet-like dielectric ceramic capacitor composed of a material composition to which 0.5 to 15% by weight of (glass composition) is added.
이 유전체층(11)의 재료조성을, 상기 주조성물에 SiO2을 0.01-5중량%, Al2O3을 0.01∼5중량% 첨가한 재료조성 또는 상기 주조성물에 희토류 산화물을 0.001∼2중량% 첨가한 재료조성, 또는 상기 주조성물에 SiO2을 0.01-5중량%, Al2O3을 0.01∼5중량%, 희토류 산화물을 0.001∼2중량% 첨가한 재료조성중 어느 것 하나로 해도 좋다.The material composition of the dielectric layer 11 is a material composition in which 0.01-5% by weight of SiO 2 and 0.01-5% by weight of Al 2 O 3 are added to the cast product, or 0.001-2% by weight of rare earth oxide is added to the cast product. One of the material compositions or the material composition containing 0.01-5% by weight of SiO 2 , 0.01-5% by weight of Al 2 O 3, and 0.001-2% by weight of rare earth oxides may be used.
내부전극(12) 및 단자전극(13)(14)는, 도체로서의 특성을 갖으면서 신뢰성이 높은 전극재료 예를 들어, Cu, Ni, W 또는 Mo 또는, 이들중 어느 2종이상을 함유한 합금, 또는 카본, 그라파이트, 이들의 혼합물이 적합하다.The internal electrodes 12 and the terminal electrodes 13 and 14 have characteristics as conductors and have a highly reliable electrode material such as Cu, Ni, W or Mo, or an alloy containing any two or more thereof. Or carbon, graphite, or mixtures thereof.
이 적층 세라믹 커패시터에서는 비유전율(ε), 품질계수(Q), 온도특성(Tc) 모두고주파영역에서도 안정하다.In this multilayer ceramic capacitor, the relative dielectric constant?, The quality factor Q, and the temperature characteristic Tc are all stable in the high frequency range.
다음으로, 이 적층 세라믹 커패시터의 제조방법에 대해서 설명한다.Next, the manufacturing method of this multilayer ceramic capacitor is demonstrated.
먼저, 본 실시형태의 재료조성으로 되도록 분말상의 SBZT, MnO2, Bi2O3, PbO,Sb2O3에서 선택된 1종 또는 2종이상, 글라스 조성물, 필요에 따라 SiO2, Al2O3, 희토류 산화물을 각각 소정량 평량하고, 이들의 분말을 소정량의 물(또는 에탄올, 아세톤 등의 유기용매) 등의 분산매와 함께 볼밀에 넣고, 소정시간 예를 들어 24시간 혼합·분쇄하고, 그 후 탈수(또는 탈에탄올, 탈아세톤 등의 탈유기용매)·건조를 행하였다.First, one or two or more selected from powdery SBZT, MnO 2 , Bi 2 O 3 , PbO, Sb 2 O 3 to form a material composition of the present embodiment, a glass composition, SiO 2 , Al 2 O 3 , if necessary And a predetermined amount of rare earth oxide, respectively, these powders are put into a ball mill with a predetermined amount of a dispersion medium such as water (or an organic solvent such as ethanol or acetone), mixed and pulverized for a predetermined time, for example, for 24 hours. Then, dehydration (or deorganization solvent such as deethanol and deacetone) and drying were performed.
다음으로, 이 건조분을 소정량의 유기바인더 및 유기용제를 가한 후, 라이카이기, 혼련기 등을 이용하여 혼련하고, 소정의 점도를 갖는 슬러리로 만들었다. 여기서, 유기바인더로서는 PVA(polyvinyl alcohol) 수용액을 이용하였다. 유기바인더는 에틸셀룰로스 수용액, 아크릴수지용액(아크릴바인더) 등을 이용해도 좋다.Next, after adding the organic binder and the organic solvent of predetermined amount to this dry powder, it knead | mixed using the Leicaigi, a kneading machine, etc., and made it the slurry which has a predetermined viscosity. Here, PVA (polyvinyl alcohol) aqueous solution was used as an organic binder. The organic binder may be an ethyl cellulose aqueous solution, an acrylic resin solution (acrylic binder), or the like.
다음으로 닥터브레이드법에 의해 이 슬러리를 시트상으로 성형하고 탈지하여 그린시트로 하고, 이 그린시트상에 Cu, Ni, W 또는 MO, 또는 이들중 어느 2종이상을 함유한 합금, 또는 카본, 그라파이트, 카본과 그라파이트의 혼합물을 도전재료로 한 도전 페이스트(paste)를 소정의 패턴으로 인쇄한 내부전극층으로 만들었다.Next, the slurry is molded into a sheet by a doctor blade method and degreased to form a green sheet, and an alloy or carbon containing Cu, Ni, W or MO, or any two or more thereof on the green sheet, A conductive paste made of a mixture of graphite, carbon and graphite as a conductive material was made into an internal electrode layer printed in a predetermined pattern.
이 도전 페이스트로는 Cu분말에 유기바인더, 분산제, 유기용제, 필요에 따라 환원제 등을 소정량 가한 후에 혼련하고, 소정의 점도로 한 Cu 페이스트 이외에 Ni 페이스트, W 페이스트, Mo 페이스트, 카본분과 그라파이트분의 혼합 분체를 이용한카본 페이스트 등이 적절히 이용할 수 있다.As the conductive paste, a predetermined amount of an organic binder, a dispersant, an organic solvent, a reducing agent or the like is added to the Cu powder, and then kneaded. Carbon paste etc. using the mixed powder of can be used suitably.
다음으로, 이들의 그린시트를 두께방향으로 적층하여 그 두께방향으로 가압하여 적층체로 만든다.Next, these green sheets are laminated in the thickness direction and pressed in the thickness direction to form a laminate.
다음으로, 이 적층체를 N2가스 등의 불활성가스분위기에서 또는 N2-H2환원성 가스분위기에서, 925∼1080℃온도로 소성하고, 그 후 양측면에 단자전극(13)(14)를 성형하였다.Next, the laminate is fired in an inert gas atmosphere such as N 2 gas or in an N 2 -H 2 reducing gas atmosphere at a temperature of 925 to 1080 ° C., and then terminal electrodes 13 and 14 are formed on both sides. It was.
이상과 같이, 유전체층(11)과 내부전극(12)를 교대로 적층한 적층 세라믹 커패시터를 만들 수 있다.As described above, a multilayer ceramic capacitor in which the dielectric layers 11 and the internal electrodes 12 are alternately stacked may be manufactured.
이상 설명한 바와 같이, 본 실시형태의 적층 세라믹 커패시터에 의하면, 유전체층(11)를 SBZT로 이루어진 주조성물에, MnO2을 0.05∼15중량%, Bi2O3, PbO, Sb2O3에서 선택된 1종 또는 2종이상을 0.001∼5중량%, 글라스 조성물을 0.5-15중량% 첨가하고, 필요에 따라 상기 주조성물에 SiO2을 0.01-5중량%, Al2O3을 0.01∼5중량%, 희토류 산화물을 0.001∼2중량% 첨가한 재료조성으로 했기 때문에 높은 비유전율, 양호한 온도특성, 높은 품질계수를 실현하는 것이 가능하고, 그 결과, 마이크로파 등의 고주파수영역에서 특성을 안정화시킬 수 있고, 고주파수 영역에서 신뢰성을 향상시킬 수 있다.As described above, according to the multilayer ceramic capacitor according to the present embodiment, the dielectric layer 11 is formed of SBZT in a cast product containing 0.05 to 15% by weight of MnO 2 , 1 selected from Bi 2 O 3 , PbO, and Sb 2 O 3 . 0.001 to 5% by weight of species or two or more, 0.5-15% by weight of glass composition, 0.01-5% by weight of SiO 2 , 0.01-5% by weight of Al 2 O 3 to the cast product, if necessary, Since a material composition containing 0.001 to 2% by weight of rare earth oxide is used, it is possible to realize a high dielectric constant, good temperature characteristics and high quality coefficients. As a result, characteristics can be stabilized in a high frequency region such as microwaves. It is possible to improve the reliability in the area.
본 실시형태의 적층 세라믹 커패시터의 제조방법에 의하면, SBZT로 이루어지는 주조성물에 MnO2을 0.05∼15중량%, Bi2O3, PbO, Sb2O3에서 선택된 1종 또는 2종이상을 0.001∼5중량%, 글라스 조성물을 0.5-15중량% 첨가하고, 필요에 따라 주조성물에 SiO2을 0.01-5중량%, Al2O3을 0.01∼5중량%, 희토류 산화물을 0.001-2중량% 첨가한 그린시크상에 내부전극층을 형성하고 이 그린시트를 두께방향으로 적층하여 적층체로 만들고, 이 적층체를 불활성가스 분위기에서, 또는 환원성 가스분위기에서, 925-1080℃온도로 소성하기 때문에 내부전극(12)의 재료에 Pt나 Pd 등의 귀금속과 비교하여 저렴한 비금속이나 탄소계 물질을 이용하는 것이 가능하다. 따라서, 특성을 저하시키지 않고 저코스트화를 도모할 수 있다.According to the manufacturing method of the multilayer ceramic capacitor of the present embodiment, 0.001 to 1 or 2 or more selected from 0.05 to 15% by weight of MnO 2 , Bi 2 O 3 , PbO, and Sb 2 O 3 , in a cast product made of SBZT. 5% by weight, the glass composition is added 0.5-15% by weight, 0.01-5 the SiO 2 in the main composition as needed, by weight%, 0.01 to 5% by weight of Al 2 O 3, a rare earth oxide 0.001-2% by weight of added An internal electrode layer is formed on one green sheet and the green sheet is laminated in the thickness direction to form a laminate, and the laminate is baked at an inert gas atmosphere or in a reducing gas atmosphere at a temperature of 925-1080 ° C. It is possible to use inexpensive base metals or carbonaceous materials as the material of 12) compared with precious metals such as Pt and Pd. Therefore, the cost reduction can be achieved without degrading a characteristic.
이상 본 발명의 유전체 자기조성물과 이를 이용한 자기커패시터 및 그 제조방법의 각 실시형태에 대해서 도면을 기초로 설명하지만 구체적인 구성은 상술한 각 실시형태에 한정되는 것이 아니고, 본 발명의 요지를 벗어나지 않는 범위에서 설계의 변경 등이 가능하다.As mentioned above, although each embodiment of the dielectric magnetic composition of the present invention, the magnetic capacitor using the same, and the manufacturing method thereof is explained based on the drawings, the specific configuration is not limited to the above-described embodiments, and the scope does not depart from the gist of the present invention. Design changes are possible.
예를 들어 제2의 실시형태인 적층 세라믹 커패시터에서는 유전체층(11)를 8층, 내부전극(12)을 7층, 교대로 적층한 구성으로 하지만 유전체층(11) 및 내부전극(12) 각각의 크기나 층수는 필요로 하는 용량이나 특성에 의해 적절히 변경가능하다.For example, in the multilayer ceramic capacitor according to the second embodiment, eight dielectric layers 11 and seven internal electrodes 12 are alternately stacked, but the size of each of the dielectric layers 11 and 12 is increased. The number of floors can be appropriately changed depending on the required capacity and characteristics.
이상 설명한 형태에서 본 발명의 유전체 자기조성물에 의하면, SrxBa1-x(ZryTi1-y)O3(단, 0.8≤x≤1, 0.9≤y≤1)으로 이루어진 주조성물에, MnO2을 0.05∼15중량%, Bi2O3, PbO, Sb2O3에서 선택된 1종 또는 2종이상을 0.001∼5중량%, 글라스 조성물을 0.5-15중량% 첨가 했기 때문에, 높은 비유전율, 양호한 온도특성, 높은 품질계수를 실현하는 것이 가능하고, 그 결과, 마이크로파 등의 고주파수영역에서 특성을 안정시킬 수 있고 고주파수영역에서 신뢰성을 향상시킬 수 있다.According to the dielectric self-composition of the present invention in the form described above, in the casting formed of Sr x Ba 1-x (Zr y Ti 1-y ) O 3 (where 0.8 ≦ x ≦ 1 , 0.9 ≦ y ≦ 1), High relative dielectric constant because 0.05-15 wt% of MnO 2 , 0.001-5 wt% of one or more selected from Bi 2 O 3 , PbO, Sb 2 O 3 , and 0.5-15 wt% of the glass composition were added. It is possible to realize good temperature characteristics and high quality coefficients. As a result, the characteristics can be stabilized in the high frequency region such as microwaves and the reliability can be improved in the high frequency region.
본 발명의 자기커패시터에 의하면, 본 발명의 유전체 자기조성물로 이루어지는 소자의 양면에 전극을 형성했기 때문에, 고주파수대역에서 유전체손실을 적게 할 수 있다. 그 결과, 마이크로파 등의 고주파수대역에서 특성을 안정화시킬 수 있고 고주파수 대역에서 신뢰성을 향상시킬 수 있다.According to the magnetic capacitor of the present invention, since electrodes are formed on both surfaces of the element made of the dielectric magnetic composition of the present invention, the dielectric loss can be reduced in the high frequency band. As a result, the characteristic can be stabilized in a high frequency band such as a microwave and the reliability can be improved in the high frequency band.
또한, 전극으로 저렴한 비금속 또는 탄소계 물질을 이용하면 특성을 저하시키지 않고 제조코스트를 저감할 수 있다.In addition, using an inexpensive nonmetal or carbon-based material as the electrode can reduce the manufacturing cost without deteriorating the characteristics.
본 발명의 다른 자기커패시터에 의하면, 본 발명의 유전체 자기조성물로 이루어지는 시트상의 유전체와, 전극를 교대로 적층했기 때문에, 고주파수 대역에서 유전체손실을 적게할 수 있다. 그 결과, 마이크로파 등의 고주파수 대역에서 특성을 안정화시키는 것이 가능하고, 고주파수대역에서 신뢰성을 향상시키지 않고 제조코스트를 저감할 수 있다.According to another magnetic capacitor of the present invention, since the sheet-like dielectric made of the dielectric magnetic composition of the present invention and the electrodes are alternately stacked, the dielectric loss can be reduced in the high frequency band. As a result, the characteristic can be stabilized in a high frequency band such as microwaves, and the manufacturing cost can be reduced without improving reliability in the high frequency band.
또한, 925∼1080℃의 온도에서 소성할 수 있으므로 내부전극에 저렴한 비금속 또는 탄소계 물질을 이용하는 것이 가능하고, 특성을 저하시키지 않고 제조코스트를 저감할 수 있다.In addition, since it can be fired at a temperature of 925 to 1080 ° C, it is possible to use an inexpensive nonmetal or carbon-based material for the internal electrode, and the manufacturing cost can be reduced without degrading the characteristics.
본 발명의 유전체자기조성물의 제조방법에 의하면, SrxBa1-x(ZryTi1-y)O3(단, 0.8≤x≤1, 0.9≤y≤1)으로 이루어지는 주조성물에, MnO2을 0.05∼15중량%, Bi2O3, PbO, Sb2O3에서 선택된 1종 또는 2종이상을 0.001∼5중량%, 글라스 조성물을 0.5-15중량% 첨가한 분체를 성형한 벌크상 또는 시트상의 성형체로 하고, 이 성형체를 925∼1080℃의 온도에서 소성하기 때문에 치밀하면서 고강도의 소결체를 저온에서 저코스트로 얻을 수 있다.According to the method for producing a dielectric magnetic composition of the present invention, MnO is used in a casting formed of Sr x Ba 1-x (Zr y Ti 1-y ) O 3 (where 0.8 ≦ x ≦ 1 and 0.9 ≦ y ≦ 1). 2 to 0.05 to 15% by weight, one or two or more selected from Bi 2 O 3 , PbO, Sb 2 O 3 , 0.001 to 5% by weight, the bulk of the powder to form a powder comprising 0.5-15% by weight of the glass composition Alternatively, the molded article is formed into a sheet, and the molded article is fired at a temperature of 925 to 1080 ° C., so that a compact and high-strength sintered compact can be obtained at low temperature at low temperatures.
본 발명의 다른 유전체 자기조성물의 제조방법에 의하면, 시트상의 성형체의 하나의 주된 면에 전극을 형성하고, 이 성형체를 복수개 두께 방향으로 적층하고 가압하여 적층체로한 다음, 이 적층체를 상기 온도에서 소성하기 때문에 내부전극재료에 Pt나 Pd 등의 귀금속과 비교하여 저렴한 Cu, Ni등의 비금속, 또는 무정형 탄소, 그라파이트 등의 탄소계 물질을 이용할 수 있고, 치밀하고 고강도의 적층체를 저온에서 저코스트로 얻을 수 있다.According to another method for producing a dielectric ceramic composition of the present invention, an electrode is formed on one main surface of a sheet-shaped molded article, the molded articles are laminated in a plurality of thickness directions and pressed to form a laminate, and the laminate is then heated at the above temperature. Because of the sintering, inexpensive non-metals such as Cu and Ni, or carbon-based materials such as amorphous carbon and graphite can be used for the internal electrode material, compared to precious metals such as Pt and Pd. Can be obtained.
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