KR20010086946A - The method and apparatus of separting by using quantum and electric field - Google Patents

Abstract

PURPOSE: An apparatus and method for separating an ultra-fine particle using quantum hole and an electric filed is provided to separate an ultra-fine particle with a specific size from other ultra-fine particles, check the density of a desired ultra-fine particle, or output the uniform number of the ultra-fine particle. CONSTITUTION: An ultra thin film conductive layer(20) is formed in a lower portion of a quantum hole layer(17) in which a quantum hole(16) is formed, and a source(18) and a drain(19) are installed in a left and right side of the ultra thin film conductive layer(20). The quantum hole(16) is formed to be suitable for a size of an ultra-fine particle to be measured, and the ultra-fine particle to be measured is set as a reference ultra-fine particle for using a quantum hole ultra-fine particle density detecting sensor.

Description

Separation device and method for separating fine particles using quantum holes and electric fields {THE METHOD AND APPARATUS OF SEPARTING BY USING QUANTUM AND ELECTRIC FIELD}

It is an object of the present invention to develop a device that enables separation according to the size of ultrafine particles in nanomicron units, and to selectively screen only ultrafine particles having a specific size, and also to move a special material using an electric field. It is also an object of the present invention to measure their concentration and to be able to take out a certain number of necessary ultrafine particles.

The present invention is an invention for a device that can handle ultra-fine particles, such as effectively selecting or moving the ultra-small ultra-fine particles such as gene separation and genetic manipulation. Conventionally, in order to deal with such small particles, there has been a method of separating ultrafine particles one by one using a robot through a microscope.

The present invention aims to separate the ultrafine particles of a specific size from other ultrafine particles, to check the concentration of the desired ultrafine particles or to extract a certain number thereof.

1 is an embodiment of the ultra-fine particle separator using the electric field and the quantum hole of the present invention

2 is a state diagram in which various kinds of ultra fine particles are poured into the separator of FIG.

3 is a state diagram in which a positive current flows through the reference electrode and the small diameter electrode of the separator of FIG.

4 is a state diagram in which a cathode current flows to the reference filter and the small-diameter filter in the separator of FIG.

5 is a state diagram in which the reference particulates are completely separated from the separating device of FIG.

6 is an explanatory diagram of a device for extracting a predetermined number of reference particulates

7 illustrates an embodiment of a quantum hole sense using an electric field and a quantum hole.

8 is an example of detecting the quantum hole particle concentration detection using the electric field and the quantum hole

9 is a graph showing the electrical characteristics of the quantum hole concentration detection sense of FIG.

<< Description of main parts of drawing >>

1: Reference filter current 2: Reference electrode current 3: Small filter current

4: small diameter electrode current 5: large diameter space 6: reference space

7: small diameter space 8: reference filter 9: small diameter filter

10: reference electrode 11: small diameter electrode 12: quantum hole

13: Particulate selection device 14: Current 15: Quantum Hall sense

16: Quantum Hall 17: Quantum Hall Floor 18: Source

19: Drain 20: Ultra-thin conductive layer

The present invention relates to a method and apparatus for moving ultrafine particles using an electric field, filtering them using a predetermined size of quantum holes to select only ultrafine particles of a special size, and separating only ultrafine particles of a desired size. In addition, the present invention is to enable the measurement of the desired concentration of ultrafine particles using a sense using a quantum hole, and to be able to take out a specific number of ultrafine particles from a plurality of ultrafine particles. Quantum holes in the present invention means that a number of holes having a size of nanomicron units are formed. In order to form such a quantum hole in the present invention, it is formed by a concentrated ion beam (FIBUSED ION BEAM, abbreviated as FIB). The diameter of the ion beam is focused from several nm (= 0.1 μm) to several hundred nm (= 0.1 μm) in size to form a quantum hole on the substrate of the thin film. When forming the quantum hole using FOCUSED ION BEAM, the sputtered ion beam, which is focused and accelerated by the acceleration voltage, is scanned in the ultrafine thin film by the magnetic field. It will be formed. Doing this under high vacuum allows for the creation of millions of quantum holes in a short time. Depending on the material of the ultrafine thin film, an area of 1 mm x 1 mm can form about 4 million quantum holes with a depth of 100 nm in just a few minutes. In this case, the depth of the quantum hole to be formed can be controlled by adjusting the acceleration voltage for accelerating the ion beam, and the distance between the quantum hole and the quantum hole can be adjusted by adjusting the magnification, and the size of the quantum hole can be controlled by adjusting the degree of focusing. Do. As such, it is possible to manufacture a quantum hole having a desired size, depth, and spacing by adjusting the acceleration voltage, magnification, and focusing degree, and enabling the formation of countless quantum holes in a short time using the FOCUSED ION BEAM. It is a technique to form. In the present invention, such a quantum hole is formed to penetrate through a thin film and used as a filter for filtering ultra fine particles. Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 is an explanatory view of the ultra-fine particle separating device of the present invention. A reference filter 8 formed by a specific size quantum hole is formed in a large cylinder. The reference filter 8 refers to a filter in which a quantum hole is formed which is slightly larger than the size of a specific ultrafine particle to be separated, and forms a reference space 6 by an extremely thin thin film formed by penetrating many quantum holes. Through the filter, only the ultra-fine particles smaller than the size of the quantum hole constituting the reference filter can enter the reference space. Here, the size of the diameter of the ultrafine particles of the size to be separated will be defined as the reference size. In the reference space 6 formed by the reference filter, a small diameter filter 9 having a through hole finer than the size of a quantum hole forming a reference filter is formed again. A small diameter space 7 that can enter is formed. Outside the reference filter, a large diameter space 5 in which ultra-fine particles larger than the reference size are present is formed. In addition, the small diameter electrode 11 is formed in the small diameter space 7, and the reference electrode 10 is formed in the reference space 6. It is also possible to supply electricity to the reference filter 8, the current supplied to the reference filter is referred to as the reference filter current (1) and the current supplied to the reference electrode is referred to as the reference electrode current (2) and the current supplied to the small diameter filter. Denotes the small-diameter filter current 3 and the current supplied to the small-diameter electrode is referred to as the small-diameter electrode current 4.

2 is an explanatory diagram for explaining a state in which the solution containing the ultrafine particles is poured into the ultrafine particle separator of the present invention. The state shown in FIG. 2 is a state in which the mixed ultrafine particles are poured into the large diameter space 5 of the present invention. The ultrafine particles larger than the reference size are defined as large particles, the microparticles of the reference size are defined as the reference fine particles, and the ultrafine particles of the size smaller than the standard fine particles are defined as small particles. It is important to carry out the treatment work in advance so as to have positive and negative ions. In some cases, it is only necessary to allow the electrical ionization to be performed only to the reference fine particles to be separated. In the present invention, it is necessary to induce the movement of the electrical characteristics to the desired reference fine particles using the electrode of electricity. In other words, it is to move the reference fine particles using the electric field. In the present invention, it is assumed that the negative particles are present in the reference fine particles to separate the reference fine particles through the electric field and using the quantum holes. That is, it is possible to classify into ultrafine particles such as anionic reference particles, large particles, small cations of cations, and small particles of anions. The state of FIG. 2 means only a state in which ultra-fine particles are poured into a large diameter space without applying an electric field yet.

3 shows the anode current flowing through the reference electrode current and the anode current flowing through the small diameter electrode current. At this time, among the ultrafine particles in the large diameter space 5, the standard fine particles of the anion and the small fine particles of the anion are led through the reference filter 8 by the electric field, and the small fine particles of the negative ion are attracted to the electric field and pass through the small diameter filter 9. It is possible to enter the small diameter space (7). At this time, the negative electrons from the fine particles are attracted to the electric field to enter the reference space 6, but are blocked by the reference filter 8, and thus prevent the quantum hole of the reference filter. As such, since a certain amount of time passes through the quantum hole through-holes of the reference filter, the particles are blocked by the large particles of negative ions.

4 illustrates that the cathode of the cathode is passed through the reference filter current 1 while the cathode of the cathode filter current 3 passes through. As such, when the cathode is electrically connected to the reference filter 8 and the small-diameter filter 9, all the ultrafine particles having large anion-size blocks the quantum holes of the reference filter and the small-diameter filter are separated and fall off. The quantum holes of the filter are opened again. In addition, due to the change of these electrodes, ultrafine particles having polarity in the large diameter space are generally moved, and thus, the stirring effect can be obtained.

Repeatedly performing the same actions as in FIGS. 3 and 4, the ultrafine particles in the large diameter space are constantly moved by the electrical characteristics of their branches, and the ultrafine particles that can enter the filter are eventually self As soon as you enter the space that fits the size of the place. After all, the electrode is repeatedly walked alternately where the ultrafine particles are mixed according to the present invention, which means that the microparticles can be separated into spaces suitable for their size and electrical characteristics through the continuous movement of the ultrafine particles by the electric field.

FIG. 5 is an explanatory diagram showing a state after repeating the electrode changes of FIG. 2 and FIG. When the ultra-fine particles are separated as desired, the current state is a state in which the positive electrode flows through the reference electrode current 2 and the small diameter electrode current 4. In the reference space (6), the reference fine particles having anions are gathered around the reference electrode, and the small particles of the anions are concentrated around the small diameter electrode in the small diameter space. The cations cannot pass through the reference filter of any size, and only the fine particles can pass through the reference filter. In other words, as shown in FIG. 5, the fine particles are precisely separated by electrical and size characteristics.

FIG. 6 is an explanatory diagram for a method and an apparatus for drawing out the required number of fine particles. Quantum having a predetermined number and a constant size is caused by flowing a current 14 having a polarity opposite to that of the reference fine particles through the fine particle selection device 13 in which the quantum holes 12 are formed as many as necessary. By placing the reference fine particles in each quantum hole of the particle selection device composed of holes, and withdrawing them out, only the desired ultrafine particles can be positioned in the desired positions as many times as desired. Since the size of the ultrafine particles is only the size of nanomicron, it is not possible to select by hand, and it is almost impossible to place them in the desired position as many as desired, but it is difficult to separate the ultrafine particles by the number and speed limited by the recent robots. It was possible, but not as efficiently as possible in the present invention.

7, 8, and 9 are explanatory diagrams of a sense capable of detecting the concentration of ultrafine particles.

FIG. 7 is a schematic diagram of the quantum hole sense 15. An ultra-thin ultra-conductive layer 20 is formed below the quantum hole layer 17 in which a certain number of quantum holes 16 are formed, and the left side of the ultra-thin conductive layer is formed. The source 18 and the drain 19 are provided at the right of the quantum hole fine particle concentration detection sense. The quantum hole fine particle concentration detection sense of the present invention may be used by forming a quantum hole according to the size of the ultrafine particles to be measured and setting the ultrafine particles to be measured as reference particles.

8 is a cross-sectional view showing a cross section of the quantum hole fine particle concentration detection sense of FIG. The standard fine particles suitable for the electrical characteristics in the quantum holes are attracted by the electric field and are located in the quantum holes. At this time, the quantum hole fine particle concentration detection sense of the present invention is accurately detected by detecting the electrical characteristics flowing in the ultra-thin conductive layer flowing from the source to the drain. It is possible to measure the concentration of reference particulates located in.

9 is an explanatory view for explaining the electrical measurement of the quantum hole fine particle concentration detection sense of FIG. In other words, by measuring the electrical properties according to the number of reference particles located in the quantum hole indicates that the concentration can be measured accurately.

The present invention enables gene manipulation or smooth adjustment of extremely fine microparticles. That is, by using the quantum hole filter and electrical properties, the present invention can easily and efficiently separate the reference fine particles of a desired size in a state where the ultrafine particles are mixed in various ways. Being able to put out water allows you to place as many places as you want. It is also included in the scope of the present invention to make a sense that can accurately measure the concentration of the desired reference fine particles using the nature of the electric field and the quantum hole.

Claims (14)

Ultra-fine particle separator using quantum hole and electric field consisting of a quantum hole filter formed through the quantum hole and a current supply electrode located in the quantum hole filter to form an electric field The ultra-fine particle separator using quantum holes and electric fields according to claim 1, wherein the quantum holes have a size of 10 nm or more and 100 nm or less. A reference filter formed of a quantum hole slightly larger than a reference particle of a specific size, a reference space formed by the reference filter, a small diameter filter formed of a smaller quantum hole than the reference particle in the reference space, and the small diameter filter. Quantum holes, characterized in that consisting of a small diameter space formed by, and a large diameter space formed to the outer space of the reference filter, a small diameter electrode is formed in the small diameter space and the reference electrode is formed in the reference space; Ultrafine particle separator using electric field The ultra-fine particle separator using quantum holes and electric fields according to claim 3, wherein a current supply device capable of supplying a reference filter current to the reference filter and a current supply device capable of supplying a narrow filter current to the small diameter filter are formed. Ultrafine particle separator using quantum holes and electric fields, characterized in that a current supply device for supplying a current having the opposite electrical properties of the reference fine particles is formed in the particle selection device having a certain number of quantum holes larger than the size of the reference fine particles Ultra fine particle detection sense using quantum holes and electric fields, characterized in that an ultra thin conductive layer is formed on the lower part of the quantum hole layer in which a certain number of quantum holes are formed, and a source and a drain are installed on the left and right sides of the ultra thin conductive layer. Ultrafine particle separation method using a quantum hole and an electric field consisting of a quantum filter penetrated through the quantum hole and a current supply electrode located in the quantum filter to form an electric field In the ultra-fine particle separation method using a quantum hole and an electric field consisting of a quantum filter formed to penetrate through the quantum hole and a current supply electrode located in the quantum filter to form an electric field, the quantum hole is formed by a myriad of fine particles by FOCUSED ION BEAM. Ultrafine particle separation method using a quantum hole and an electric field characterized in that the hole is formed 10. The method of claim 8, wherein the spacing of the quantum holes is adjusted by adjusting the magnification of the FOCUSED ION BEAM. 10. The method of claim 8, wherein the depth of the quantum holes is adjusted by adjusting the acceleration voltage of the FOCUSED ION BEAM. 10. The method of claim 8, wherein the size of the quantum holes is adjusted by adjusting the focusing degree of the focus ion beam. A reference filter formed of a quantum hole slightly larger than a reference particle of a specific size, a reference space formed by the reference filter, a small diameter filter formed of a smaller quantum hole than the reference particle in the reference space, and the small diameter filter. It consists of a small diameter space formed by the, and a large diameter space that is formed to the outer space of the reference filter, a small diameter electrode is formed in the small diameter space and constitutes a reference electrode in the reference space, the reference electrode and the small diameter electrode Ultrafine particle separation method using a quantum hole and an electric field characterized in that the fine particles are separated by connecting the reference fine particles and the electrode having the opposite electrode characteristics 13. The method of claim 12, wherein a current supply device capable of supplying a reference filter current to the reference filter and a current supply device capable of supplying the narrow filter current to the small diameter filter are formed. A method for separating ultrafine particles using a quantum hole and an electric field, wherein a current supply device for supplying a current having opposite electrical properties of the reference fine particles is formed in a particle selection device in which a certain number of quantum holes larger than the size of the reference fine particles are formed.