KR20010070547A - Apparatus for removing volatile organic compounds by high voltage and high frequency plasma. - Google Patents
Apparatus for removing volatile organic compounds by high voltage and high frequency plasma. Download PDFInfo
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Abstract
Description
본 발명은 산화성 반도체 촉매전극에 의하여 제조된, 휘발성 유기화합물을 분해 제거하는 고전압과 고주파 프라즈마 장치에 관한 것으로써 산업활동에 의해 발생하는 휘발성 유기화합물의 제거에 전기화학분해 방법을 적용함으로써 에너지의 절약과 비용의 절감, 효율증대 및 경량, 단순화와 대용량, 고농도의 신속한 처리가 가능하면서도 2차 오염물질의 발생이 없는 장치를 제공하기 위한 것이다.The present invention relates to a high voltage and high frequency plasma apparatus for decomposing and removing volatile organic compounds prepared by an oxidative semiconductor catalyst electrode, and saves energy by applying an electrochemical decomposition method to the removal of volatile organic compounds generated by industrial activities. It is to provide a device that can reduce the cost, increase the efficiency and light weight, simplify and large capacity, high concentration and rapid treatment, but do not generate secondary pollutants.
오염발생원으로부터 배출되는 휘발성 유기화합물 제거방법으로 흡착, 소각,냉각응축, 생물학적 처리 같은 방법이 있다. 여기서 흡착법은 활성탄 같은 흡착제를 이용하여 흡착, 회수 혹은 제거하는 방법으로서 하한폭발한계 25% 이상 농도를 가진 휘발성 유기화합물을 제거할 수 있으며, 설치비가 저렴하나 케톤, 알데하이드, 에스테르류, 스티렌류와 같은 물질은 활성탄 표면에서 중합을 일으켜 활성탄의 미세공을 막아 흡착기능을 저하시키는 경향이 있으며, 흡착을 통하여 발생된 폐기물의 처리 등이 문제점으로 대두되고 있다. 또한 기존의 휘발성 유기화합물 처리방법에 비해 처리용량이 적기 때문에 유량이 큰 프로세스에는 부적합하다. 소각법에는 직접연소법과 촉매연소법이 있으며 많은 양의 휘발성 유기물을 처리할 수 있는 장점을 가지고 있으나 부하 변동이 심하거나 농도가 낮고 유량이 적을 경우에는 비경제적이며, 시스템이 비교적 대형이어서 설치면적이 많이 들게 되어 설비 확장이 어렵다는 단점이 있고, 연소에 따른 질소산화물, 탄산가스, 매연 등과 같은 2차 대기오염물질이 발생될 수 있다. 그리고 연소에 소요되는 연료비 등의 유지관리비가 많이 소요된다. 생물학적 처리방법은 호기성 미생물을 주로 사용하는데 유지관리비가 적게 드는 장점은 있으나 미생물의 활동에 필요한 유기화합물의 부하변동이 심하거나 일정한 온도 범위, PH라든지 미생물과 담체와의 적합성을 유지하기가 어려운 점이 있다.Removal of volatile organic compounds from pollutant sources include adsorption, incineration, cooling and condensation. The adsorption method is a method of adsorption, recovery or removal using an adsorbent such as activated carbon, which can remove volatile organic compounds having a lower explosion limit of 25% or more, and the installation cost is low, but ketones, aldehydes, esters, styrenes, etc. Substances tend to degrade the adsorption function by causing polymerization on the surface of activated carbon to block micropores of activated carbon, and treatment of wastes generated through adsorption is a problem. In addition, the process capacity is lower than the conventional volatile organic compound treatment method, which is not suitable for a high flow rate process. Incineration has direct combustion method and catalytic combustion method, and it has the advantage of dealing with a large amount of volatile organics, but it is uneconomical in case of heavy load fluctuation, low concentration and low flow rate. As a result, it is difficult to expand equipment, and secondary air pollutants such as nitrogen oxides, carbon dioxide, and soot may be generated due to combustion. And a lot of maintenance costs, such as fuel costs required for combustion. The biological treatment method mainly uses aerobic microorganisms, but the maintenance cost is low. However, the load of organic compounds required for the activity of the microorganisms is severe, or it is difficult to maintain compatibility with the microorganisms and the carrier for a certain temperature range or PH. .
본 발명은 이와 같은 제 결점을 감안 해결하기 위하여 안출된 것으로서, 산화성 반도체 촉매와 이에 고전압 교류와 직류 및 고주파수 교류를 에너지원으로, 사용하여 전극반응에 의하여 휘발성 유기 화합물을 전기분해 시킴으로써 밀폐된 반응 탱크내에서 대용량, 고농도를 신속하게 처리가능하고, 구조의 경량, 단순화 및 에너지 절약형으로 제작 가능하게 함에 그 목적을 두고 있다.SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned drawbacks, and is an enclosed reaction tank in which an oxidative semiconductor catalyst and a high voltage alternating current, direct current and high frequency alternating current are used as energy sources to electrolyze volatile organic compounds by electrode reaction. Its purpose is to be able to process large capacity and high concentration quickly, and to make the structure light, simple and energy-saving.
《과제를 해결하기 위한 수단》Means to Solve the Problem
본 발명의 기본 구조는 고전압 프라즈마부와 고주파 프라즈마부로 이루어져 있으며, 고전압 프라즈마부는 pulse 12㎸와 교류 30㎸의 전원이 공급되어지며, 고주파 프라즈마부 직류 +20㎸ / +10㎸ / -20㎸와 주파수 200㎑, 450V의 교류전원이 공급되어진다.The basic structure of the present invention is composed of a high voltage plasma unit and a high frequency plasma unit, the high voltage plasma unit is supplied with a power of pulse 12 ㎸ and AC 30 ,, high frequency plasma unit DC +20 ㎸ / +10 ㎸ / -20 ㎸ and frequency An AC power supply of 200 kV and 450 V is supplied.
이에 따라 전기화학분해 측면에서 살펴보면 유입되는 휘발성 유기화합물의 전자결합이 고전압 프라즈마부에서 전기적으로 여기된 불안정한 상태로 고주파 프라즈마부로 진입하게 된다.Accordingly, in terms of electrochemical decomposition, the electromagnetic coupling of the incoming volatile organic compounds enters the high frequency plasma part in an unstable state that is electrically excited from the high voltage plasma part.
이와 같은 작용을 나타내게 되면If you exhibit this effect
CxHyOz + 고전압 → CxHyOz* CxHyOz + high voltage → CxHyOz *
H2O + 고전압 → H2O* H 2 O + high voltage → H 2 O *
O2+ 고전압 → O2 * O 2 + high voltage → O 2 *
(* 전기적으로 여기된 상태를 나타냄)(* Indicates an electrically excited state)
따라서 CxHyOz*→ CO2+ H2OThus CxHyOz * → CO 2 + H 2 O
로 반응이 신속히 이루어지도록 전류 2배 효과(current doubling effect) 작용을 하게 된다.As a result, the current doubling effect acts to speed up the reaction.
또한 반도체 공학적 측면에서 살펴보면 고전압 프라즈마부에서 pulse 12㎸ 및 교류 30㎸, 고주파 프라즈마부의 +10㎸, +20㎸ 고전압이 인가되는 전극은 산화성 반도체 촉매전극으로 되어 있으며 -20㎸ 부전압이 인가되는 전극은 이산화티타늄 반도체 촉매 전극으로 되어 있고, 200㎑, 450V 교류전원이 인가되는 고주파 프라즈마부는 산화성 반도체 촉매 전극으로 이루어져 있다. 즉 반도체 공학적인 해석에 의하여 p-n-p Type으로 구성되어져 순방향인 +/-/+ 전압이 인가될 경우 양전하의 가속 작용이 일어나 휘발성 유기화합물의 산화분해반응이 증대되도록 하여 준다.In addition, in terms of semiconductor engineering, the electrodes with high voltage plasma 12 volts and alternating current 30 ㎸, high frequency plasma portions with +10 ㎸ and +20 ㎸ high voltage are composed of oxidative semiconductor catalyst electrodes and -20 ㎸ negative voltage. Is a titanium dioxide semiconductor catalyst electrode, and a high frequency plasma portion to which a 200 kW, 450 V AC power is applied is made of an oxidative semiconductor catalyst electrode. That is, it is composed of p-n-p type by semiconductor engineering analysis, so that when positive + /-/ + voltage is applied, it accelerates positive charges and increases oxidative decomposition reaction of volatile organic compounds.
또한 촉매작용 측면에서 살펴보면 산화성 반도체 촉매는 티타늄 알콕사이드(Titanium alkoxide)로부터 제조된 아나타제형 이산화티타늄이 촉매의 반응중심물질로써 고주파 프라즈마부에서 200㎑, 450V의 교류전장이 인가되면 표면전계현상에 의하여 교류전압의 파형에 따라 전자가 가속되어 전자-정공의 분리 작용이 일어나게 된다. 다시 말하면 교류전원의 정전압에 의하여 산화성 반도체 표면에서 정공에 의한 산화작용이 일어나고 부전압에 의하여 전자에 의한 환원작용이 일어나게 된다.In terms of catalysis, the oxidative semiconductor catalyst is an anatase type titanium dioxide prepared from titanium alkoxide, which is the reaction center of the catalyst. Electrons are accelerated according to the waveform of the electron-hole separation. In other words, the oxidation of the holes occurs on the surface of the oxidative semiconductor by the constant voltage of the AC power source, and the reduction of electrons occurs by the negative voltage.
이와 같은 촉매 반응을 반응식으로 나타내면If this catalytic reaction is represented by the reaction formula
a) 정전압일 때의 주반응a) Main reaction at constant voltage
H2O*+ h+→ 2H++½O2 H 2 O * + h + → 2H + + ½O 2
H2O*+ h+→ H++ ·OH(OH 라디칼)H 2 O * + h + → H + + OH (OH radical)
·OH + h+→ HOOH + h + → HO
2HO → (0) + H2O2HO → (0) + H 2 O
h+→ h+trap(표면에 포착된 정공으로 직접 산화작용)h + → h + trap (oxidizes directly to the holes trapped on the surface)
a) 부전압일 때의 부반응a) side reactions at negative voltage
2H++ e-→ H2 2H + + e - → H 2
표면흡착 O2 *+ e-→ ·O2 - Surface adsorption O 2 * + e - → · O 2 -
· O2 -+ H+→ HO2·(peroxo 라디칼) · O 2 - + H + → HO 2 · (peroxo radical)
이상과 같은 촉매반응이 일어나게 된다.The above catalytic reaction occurs.
따라서 CxHyOz*→ CO2+ H2OThus CxHyOz * → CO 2 + H 2 O
↑↑
촉매작용 ( ·OH+h+trap)Catalysis (OH + h + trap)
로 반응이 신속히 이루어지다.The reaction is done quickly.
그리고 전자장 측면에서 살펴보면 +20kV / +10kV / -20kV는 직류전원으로써 정지된 균일한 장(phase)이 되며, 고주파 프라즈마부의 200kHz, 450V는 시간에 따라 전계와 자계가 변화하는 즉 전자의 속도가 변화하는 교류전원 다시말하면 움직이는 장으로 형성되어 있다. 이와 같은 정지된 장과 움직이는 장 사이에서는 상대적인 전자장이 형성되며, 교류전원의 양극사이는 시간에 따라 변화하는 전하인 변위전류가 흐르게 된다.In terms of the electromagnetic field, + 20kV / + 10kV / -20kV becomes a uniform phase stopped by a DC power supply, and the 200kHz and 450V of the high frequency plasma part change the electric field and magnetic field with time, that is, the speed of the electron changes. AC power, that is, it is formed as a moving field. A relative electromagnetic field is formed between the stationary field and the moving field, and a displacement current, a charge that changes with time, flows between the anodes of the AC power source.
이와 같은 변위전류는 에너지의 소비가 매우 적기때문에 본 발명의 가장 큰 특징으로서 가동에 소요되는 전기에너지의 소모가 적은 에너지 절약형 장치가 될 수 있다.Since the displacement current is very low in energy consumption, the biggest feature of the present invention can be an energy-saving device with low consumption of electrical energy required for operation.
《실시 예》<< Example >>
<산화성 반도체 촉매 전극제조><Oxidative semiconductor catalyst electrode production>
티타늄 알콕사이드를 5wt% 황산수용액/알콕사이드 몰비를 50으로 하여 두 용액을 혼합한 후 2∼3시간 교반하여 가수분해 반응을 일으킨다. 이에서 얻어진 올소티탄산(orthotitanic acid)100g을 기준으로 하여 4wt% 수산화리듐 수용액 20∼30g과 메타놀 1.5∼3.0g과 1wt% 염화백금산 5∼15g을 혼합하여 고압수은 등 조사하에서 1∼5시간 교반한다. 그후 산화비스무스 5∼10g을 혼합하여 1∼5시간 교반한 후 10% 암모니아수에 20wt%로 용해시킨 요드화 은 또는 요드화칼륨을 5∼40g을 투입하고 오산화바나듐, 삼산화 텅크스텐, 삼산화 모리브덴을 각각 1∼5g, 이산화망간을 5∼25g, 산화구리를 10∼40g, 산화코발트를 1∼2g 투입하여 2∼8시간 최종교반한다.Titanium alkoxide is mixed with two solutions with a 5 wt% aqueous sulfuric acid solution / alkoxide molar ratio of 50, followed by stirring for 2-3 hours to cause a hydrolysis reaction. Based on 100 g of the obtained orthotitanic acid, 20 to 30 g of a 4 wt% lithium hydroxide aqueous solution, 1.5 to 3.0 g of methanol, and 5 to 15 g of 1 wt% chloroplatinic acid are mixed and stirred for 1 to 5 hours under high pressure mercury. . Then, 5 to 10 g of bismuth oxide was mixed and stirred for 1 to 5 hours, and then 5 to 40 g of silver iodide or potassium iodide dissolved in 20% by weight in 10% aqueous ammonia was added, and vanadium pentoxide, tungsten trioxide, and molybdenum trioxide were added thereto. 1 to 5 g of each, 5 to 25 g of manganese dioxide, 10 to 40 g of copper oxide, and 1 to 2 g of cobalt oxide were added and finally stirred for 2 to 8 hours.
분산이 완료된 반도체 조성물을 스테인레스 메쉬 또는 스테인레스 화이버 매트에 코팅한 후 350∼500℃에서 6∼12시간 소성하여 최종 산화성 반도체 촉매전극을 얻는다.The dispersion-finished semiconductor composition is coated on a stainless mesh or stainless fiber mat, and then fired at 350 to 500 ° C. for 6 to 12 hours to obtain a final oxidative semiconductor catalyst electrode.
<이산화티타늄 반도체 촉매전극 제조> < Titanium Dioxide Semiconductor Catalyst Electrode Fabrication>
티타늄 알콕사이드를 5wt% 황산수용액/알콕사이드 몰비를 50으로 하여 두 용액을 혼합한 후 2∼3시간 교반하여 가수분해 반응을 일으킨다.Titanium alkoxide is mixed with two solutions with a 5 wt% aqueous sulfuric acid solution / alkoxide molar ratio of 50, followed by stirring for 2-3 hours to cause a hydrolysis reaction.
이에서 얻어진 올소티탄산 100g을 기준으로 하여 4wt% 수산화리듐 수용액 20∼40g과 산화란타니움 10∼20g을 혼합하여 2∼4시간 교반한다. 그후 10% 암모니아수에 20wt%로 용해시킨 요드화 은 또는 요드칼륨을 10∼40g을 투입하고, 카본을 0.5∼2.0g 혼합하여 2∼8시간 최종교반한다. 분산이 완료된 반도체 조성물을 스테인레스 메쉬 또는 스테인레스 화이버매트에 코팅한 후 350∼500℃에서 6∼12시간 소성하여 최종 이산화티타늄 반도체 촉매전극을 얻는다.20-40 g of aqueous 4 wt% aqueous lithium hydroxide solution and 10 to 20 g of lanthanum oxide are mixed and stirred for 2 to 4 hours, based on 100 g of oligo titanic acid obtained therefrom. Thereafter, 10 to 40 g of silver iodide or potassium iodide dissolved in 20% by weight in 10% ammonia water is added, 0.5 to 2.0 g of carbon is mixed and finally stirred for 2 to 8 hours. After the dispersion is completed, the semiconductor composition is coated on a stainless mesh or stainless fiber mat, and then calcined at 350 to 500 ° C. for 6 to 12 hours to obtain a final titanium dioxide semiconductor catalyst electrode.
도1은 고전압 프라즈마부의 기본도1 is a basic diagram of a high voltage plasma unit
도2는 고주파 프라즈마부의 기본도2 is a basic diagram of a high frequency plasma unit
<도면의 주요 부분에 대한 부호의 설명><Description of the code | symbol about the principal part of drawing>
1 - 산화성 반도체 촉매 전극1-oxidative semiconductor catalyst electrode
2 - 이산화티타늄 반도체 촉매전극2-Titanium Dioxide Semiconductor Catalytic Electrode
..
상기한 바와 같이 본 발명은 전기에너지에 의하여 산화성 반도체 표면에 전자-정공을 형성시킴과 동시에 고전장에 의한 휘발성 유기화합물, 산소, 수분의 분자를 전기적으로 여기시켜 분해함으로써 대용량, 고농도를 신속하게 처리할 수 있을 뿐만 아니라 설치면적의 감소, 유지관리비가 적은 에너지 절약형으로 설계할 수 있음으로 반응 효율을 극대화시킬 수 있는 효과가 있다.As described above, the present invention forms electron-holes on the surface of an oxidative semiconductor by electrical energy and electrically excites and decomposes molecules of volatile organic compounds, oxygen, and moisture due to high fields, thereby rapidly processing large capacity and high concentration. In addition, the energy efficiency can be maximized by reducing the installation area and designing an energy-saving type with low maintenance cost.
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Cited By (4)
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KR20020026323A (en) * | 2002-03-06 | 2002-04-09 | (주)유니에코 | Nitrogen Oxides degradation apparatus combined non-thermal plasma with electrocatalytic reduction reactions. |
KR20020037303A (en) * | 2002-03-06 | 2002-05-18 | (주)유니에코 | Closed loop system for nondegradable waste water treatment by semiconductor electrode and pulse power supply. |
KR20020062865A (en) * | 2002-05-06 | 2002-07-31 | (주)유니에코 | Apparatus for volatile organic compounds degradation by non-thermal plasma combined electro-oxidation catalysis. |
US8105546B2 (en) * | 2005-05-14 | 2012-01-31 | Air Phaser Environmental Ltd. | Apparatus and method for destroying volatile organic compounds and/or halogenic volatile organic compounds that may be odorous and/or organic particulate contaminants in commercial and industrial air and/or gas emissions |
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JPS60260402A (en) * | 1984-06-04 | 1985-12-23 | Mitsubishi Electric Corp | Silent discharge ozone generator |
EP0180335A1 (en) * | 1984-10-01 | 1986-05-07 | Exxon Research And Engineering Company | Improved carboxylic anhydride catalysts |
JPH01305855A (en) * | 1988-06-03 | 1989-12-11 | Nippon Oil & Fats Co Ltd | Ceramic composition for reduction-reoxidation type semiconductor capacitor |
JPH02186550A (en) * | 1989-01-12 | 1990-07-20 | Tdk Corp | Electrode material |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20020026323A (en) * | 2002-03-06 | 2002-04-09 | (주)유니에코 | Nitrogen Oxides degradation apparatus combined non-thermal plasma with electrocatalytic reduction reactions. |
KR20020037303A (en) * | 2002-03-06 | 2002-05-18 | (주)유니에코 | Closed loop system for nondegradable waste water treatment by semiconductor electrode and pulse power supply. |
KR20020062865A (en) * | 2002-05-06 | 2002-07-31 | (주)유니에코 | Apparatus for volatile organic compounds degradation by non-thermal plasma combined electro-oxidation catalysis. |
US8105546B2 (en) * | 2005-05-14 | 2012-01-31 | Air Phaser Environmental Ltd. | Apparatus and method for destroying volatile organic compounds and/or halogenic volatile organic compounds that may be odorous and/or organic particulate contaminants in commercial and industrial air and/or gas emissions |
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