KR20010028306A - Polishing holder device for waveguide chip - Google Patents

Abstract

PURPOSE: A holder for polishing an arrayed waveguide chip is provided to keep the polishing face of the arrayed waveguide chip and a plate of a polisher in a horizontal state. CONSTITUTION: A holder for polishing an arrayed waveguide chip consists of an upper ring(110) having plural rod holes; plural guide cylinders(130) vertically installed on the bottom face of the upper ring; a lower ring(120) prepared with plural guide holes and combined with a lower end of the guide cylinder; a guide rod(140) prepared with a stopper on an upper end protruded through the rod hole by penetrating through the guide cylinder; a moving plate(150) coupled to a lower end of the guide rod; a chuck plate(160) attached to the bottom face of the moving plate; a chip holder mount(10) made up of a chip fixing unit; a cylindrical housing for supporting the bottom face of the lower ring; and a base made up of a hanging sill for limiting the descent of the moving plate. The end face of the arrayed waveguide chip and a plate of a polisher keep a horizontal state so that the polish work is performed as desired. Thereby, the quality of the arrayed waveguide chip is improved.

Description

Optical waveguide chip holder holder device {POLISHING HOLDER DEVICE FOR WAVEGUIDE CHIP}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the manufacture of optical waveguide chips, and more particularly, to a holder device for polishing an optical waveguide chip, which is used when polishing a cross section of an optical waveguide chip.

In general, an optical waveguide chip in which an arrayed waveguide grating or the like is formed is polished inclined at an angle to a predetermined angle in order to reduce reflection loss generated when connecting with another optical waveguide chip or an optical component. A cross-sectional polishing process of such an optical waveguide chip has been disclosed in US Pat. No. 5,005,320.

The end face polishing of the optical waveguide chip is performed by a polishing machine having a surface plate and a holder device for polishing an optical waveguide chip seated on the surface plate. The optical waveguide chip polishing holder device is a device for fixing the optical waveguide chip so that the cross section of the optical waveguide chip can be polished by a polishing machine.

The optical waveguide chip polishing holder device includes a base mounted on a surface plate, and a chip holder mount coupled by the base and a plurality of screws. The chip holder mount has a load adjustment knob, and the operator adjusts the load on the optical waveguide chip by turning the load adjustment knob by hand.

However, the conventional optical waveguide chip polishing holder device controls the load applied to the optical waveguide chip by manually operating the load adjusting knob, and thus there is a problem that it is difficult to standardize the polishing process due to an operation error caused by an operator or a working time. .

Further, in the conventional optical waveguide chip polishing holder device, since the base and the chip holder mount are coupled by screwing, the polishing surface and the surface of the optical waveguide chip, which should always be horizontal, cannot be leveled according to the degree of screwing. there was. In addition, in the conventional optical waveguide chip polishing holder device, since the base and the chip holder mount are screwed together, the operator has to lift the whole optical waveguide chip polishing holder device to observe the polishing state of the optical waveguide chip. There was a problem of uncomfortable handling.

SUMMARY OF THE INVENTION In order to solve the above problems, an object of the present invention is to provide an optical waveguide chip polishing holder device for ensuring that the polishing surface of the optical waveguide chip and the surface plate of the polishing machine are always horizontal.

Another object of the present invention is to provide an optical waveguide chip holder holder which is convenient for the operator to observe the polishing state of the optical waveguide chip and is easy to handle.

In order to achieve the above object, the present invention is an optical waveguide chip polishing holder device seated on a surface plate of the polishing machine, the upper ring having a plurality of rod holes, and a plurality of guide cylinders installed perpendicular to the bottom of the upper ring And a lower ring coupled to the lower end of the guide cylinder having a plurality of guide holes formed at equal intervals from the rod hole, and a guide rod having a stopper mounted on the upper end penetrating the inside of the guide cylinder and protruding through the rod hole. A chip holder mount coupled to a lower end of the guide rod, the movable plate having a smaller diameter than a lower ring, a chuck plate attached to the bottom of the movable plate, and a chip fixing part provided on the bottom of the chuck plate; Holder for optical waveguide chip polishing, characterized in that the upper end comprises a cylindrical housing for supporting the bottom of the lower ring, and a base which protrudes from the inner wall of the housing to limit the lowering of the movable plate. To provide.

1 is a perspective view showing a chip holder mount of the optical waveguide chip polishing holder device according to a preferred embodiment of the present invention,

Figure 2 is a perspective view showing the base of the optical waveguide chip polishing holder device according to a preferred embodiment of the present invention,

3 is a cross-sectional view of an optical waveguide chip holder holder according to a preferred embodiment of the present invention.

<Description of the code | symbol about the principal part of drawing>

100: chip holder mount 110: upper ring

120: lower ring 130: guide cylinder

140: guide rod 150: movable ring

200: base 300: optical waveguide chip holder holder device

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, if it is determined that detailed descriptions of related known functions or configurations may unnecessarily obscure the gist of the present invention, the detailed description thereof will be omitted.

1 is a perspective view showing a chip holder mount of the optical waveguide chip polishing holder device according to a preferred embodiment of the present invention, Figure 2 is a perspective view showing a base of the optical waveguide chip polishing holder device according to a preferred embodiment of the present invention 3 is a cross-sectional view of an optical waveguide chip polishing holder device according to a preferred embodiment of the present invention.

1 to 3, the optical waveguide chip polishing holder device 300 according to the preferred embodiment of the present invention is fixed to the optical waveguide chip to fix the optical waveguide chip and to polish the cross section of the optical waveguide chip. Chip holder mount 100 that provides a constant load, and the base 200 is installed on the surface plate of the grinding machine in combination with the chip holder mount 100.

First, as illustrated in FIGS. 1 and 3, the chip holder mount 100 may include an upper ring 110 having a plurality of rod holes, a plurality of guide cylinders 130 installed perpendicularly to a bottom surface of the upper ring, and a plurality of guide cylinders 130. And a lower ring 120 coupled to the lower end of the guide cylinder 130 and having a plurality of guide holes formed at equal intervals from the rod hole, and an upper end penetrating through the inside of the guide cylinder 130 and protruding through the rod hole. The guide rod 140 is mounted with a stopper 114, the movable plate 150 having a diameter smaller than the lower ring 120 and coupled to the lower end of the guide rod 140, and the bottom of the movable plate 150 The attached chuck plate 160 and the chip fixing portion 170 provided on the bottom surface of the chuck plate 160.

In addition, the chip fixing part 170 has a fixing chuck 172 having an inclined surface at the inner end, a screw chuck 174 having a screw hole, an adjusting screw 175 fastened to the screw hole, and the fixing. A movable chuck installed between the chuck 172 and the screw chuck 174 to be movable and having an inclined surface corresponding to the inclined surface of the fixed chuck 172 at an inner end thereof and having a moving width adjusted by the adjustment screw 175 ( 176). The optical waveguide chip 400 to be polished is clamped between the fixed chuck 172 and the movable chuck 176.

The movable plate 150 has a circular groove 152 stepped at least one layer on the upper surface. The circular groove 152 is located at the center of the top surface of the movable plate 150. A circular weight having a predetermined weight is inserted into the circular groove 152 to increase the load applied to the optical waveguide chip 400. The load applied to the optical waveguide chip 400 is determined according to the weight of the circular weight and the weight of the movable plate 150. Since the movable plate 150 is installed at the lower end of the guide rod 140 penetrating the rod hole of the upper ring 110, the guide cylinder 130 and the guide hole of the lower ring 120, the weight of the own weight and the circular weight As a result, a load is applied to the optical waveguide chip 400.

In addition, the movable plate 150 has at least one plate hole 154 penetrating the upper and lower surfaces. The plate hole 154 reduces the weight of the movable plate 150, thereby reducing the overall weight of the chip holder mount 100.

As shown in FIGS. 2 and 3, the base 200 has a cylindrical housing 210 having an upper end supporting a bottom surface of the lower ring 120, and protrudes from an inner wall of the housing 210. It consists of a base 200 made of a locking jaw 220 to limit the falling of the plate 150.

The housing 210 guides the movable plate 150 of the chip holder mount 100 mounted on the base 200 to move up and down. The housing 210 has a plurality of abrasive supply grooves 230 penetrating the inner wall and the outer wall of the housing 210 on the outer peripheral surface of the bottom. The abrasive supply groove 230 is a passage through which the abrasive supplied to the end surface of the optical waveguide chip 400 moves when the optical waveguide chip polishing holder device 300 is installed on the surface plate of the polishing machine.

Looking at the process of polishing the optical waveguide chip 400 using the optical waveguide chip holder holder 300 according to the characteristics of the present invention.

The operator mounts the optical waveguide chip 400 to be polished to the chuck fixing part 170 of the chip holder mount 100 and then mounts the chip holder mount 100 in the base 200 mounted on the surface plate of the polishing machine. do. Then, the movable plate 150 of the chip holder mount 100 is lowered by the weight of the own weight and the circular weight, and the end surface of the optical waveguide chip 400 is in close contact with the polishing surface of the polishing machine. In this case, since the movable plate 150 is guided by the inner wall of the housing 210 of the base 200, the end surface of the optical waveguide chip 400 may be always horizontal with the surface plate of the polishing machine.

Subsequently, when the polishing machine is driven, a surface plate on which the optical waveguide chip polishing holder device 300 of the present invention is mounted is rotated, and the end face of the optical waveguide chip 400 is worn out due to friction with the polishing surface of the polishing machine. Polishing of the optical waveguide chip 400 is performed. The operator stops driving the polishing machine every predetermined time, and lifts only the chip holder mount 100 from the base 200 so that the operator can easily observe the end surface polishing state of the optical waveguide chip 400.

As described above, in the optical waveguide chip polishing holder device according to the embodiment of the present invention, since the end surface of the optical waveguide chip and the surface plate of the polishing machine can always be horizontal, the input terminal of the optical element is polished to be completely perpendicular to the input waveguide. Therefore, it can be polished as desired, thereby improving the quality of the optical waveguide chip.

In addition, the optical waveguide chip polishing holder device according to the embodiment of the present invention is light in weight, so that the polishing machine does not overwhelm the polishing device, and in order to observe the polishing state of the optical waveguide chip, the operator only needs to lift the chip holder mount separated from the base. There is an effect that is easy to handle.

In addition, the holder for the optical waveguide chip polishing holder according to an embodiment of the present invention can reduce the polishing error caused by the manual operation has the effect of increasing the process yield of the optical waveguide chip.

Claims (6)

In the optical waveguide chip holder holder seated on the surface plate of the polishing machine, An upper ring having a plurality of rod holes, a plurality of guide cylinders installed perpendicular to the bottom of the upper ring, a plurality of guide holes formed at equal intervals from the rod holes, and a lower ring coupled to the lower end of the guide cylinder; A guide rod having a stopper mounted thereon, a movable plate coupled to a lower end of the guide rod and having a smaller diameter than a lower ring, and a chuck attached to the bottom of the movable plate; A chip holder mount comprising a plate and a chip fixing portion provided on the bottom of the chuck plate; Holder for optical waveguide chip polishing, characterized in that the upper end comprises a cylindrical housing for supporting the bottom of the lower ring, and a base which protrudes from the inner wall of the housing to limit the lowering of the movable plate. . The optical waveguide chip polishing holder device according to claim 1, wherein the movable plate has a circular groove stepped on at least one layer on an upper surface thereof. The holder of claim 2, wherein at least one circular weight is mounted in the circular groove. The method of claim 1, wherein the chip fixing unit, A fixed chuck having an inclined surface at an inner end thereof; A screw chuck with a screw hole, An adjusting screw fastened to the screw hole, It is installed between the fixing chuck and the screw chuck to be movable, having an inclined surface corresponding to the inclined surface of the fixed chuck at the inner end, and the optical waveguide chip polishing, characterized in that made of a movable chuck is controlled by the adjustment screw Holder device. The optical waveguide chip polishing holder device according to claim 1, wherein the housing forms at least one abrasive supply groove in a lower outer peripheral surface thereof. The optical waveguide chip polishing holder device of claim 1, wherein the movable plate has at least one plate hole penetrating the upper and lower surfaces.