KR20000065351A - Three-way valve of waste gas treating apparatus. - Google Patents

Three-way valve of waste gas treating apparatus. Download PDF

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Publication number
KR20000065351A
KR20000065351A KR1019990011561A KR19990011561A KR20000065351A KR 20000065351 A KR20000065351 A KR 20000065351A KR 1019990011561 A KR1019990011561 A KR 1019990011561A KR 19990011561 A KR19990011561 A KR 19990011561A KR 20000065351 A KR20000065351 A KR 20000065351A
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South Korea
Prior art keywords
gas
waste gas
valve
way valve
bushing
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KR1019990011561A
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Korean (ko)
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KR100324808B1 (en
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이선영
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이선영
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Publication of KR100324808B1 publication Critical patent/KR100324808B1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/02—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with screw-spindle
    • F16K1/06—Special arrangements for improving the flow, e.g. special shape of passages or casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/46—Attachment of sealing rings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves

Abstract

PURPOSE: A three-way valve of an exhaust gas treatment system is provided to flow exhaust gas in a valve smoothly as well as to reinforce sealing of a cylinder. CONSTITUTION: An O-ring(24) is contacted with a flange(20) when one of shafts(8) withdraws back and a valve is opened. The shaft(8) does not meet with exhaust gas during opening of the valve. In percolation of the exhaust gas into the shaft(8), a bushing(22) prevents the percolation primarily, then the O-ring(24), a seal bushing(11) and a gas curtain corresponds to it secondarily. A gas flow unit(26) discharges the exhaust gas promptly with a high pressure to remove remaining gas and dust in a valve body(1).

Description

폐기가스 처리장치의 3웨이 밸브{Three-way valve of waste gas treating apparatus.}Three-way valve of waste gas treating apparatus

본 발명은 폐기가스 처리장치의 3웨이 밸브에 관한 것으로, 더욱 상세하게는 실린더 밸브내의 폐기가스 침투를 방지하기 위하여 실링을 다단계로 보강하고 가스압력에 의하여 밸브내의 폐기가스를 강제배기시킴으로써 분진에 의해 밸브가 폐색되는 것을 방지한 폐기가스 처리장치의 3웨이 밸브에 관한 것이다.The present invention relates to a three-way valve of a waste gas treatment device, and more particularly, to prevent waste gas infiltration into a cylinder valve, and to reinforce the sealing in multiple stages and to force exhaust of the waste gas in the valve by gas pressure. It relates to a three-way valve of the waste gas treatment device that prevented the valve from being blocked.

제품의 생산 중에 폐기가스가 배출되는 공정들, 반도체 제작공정을 예로 들면, 웨이퍼 처리공정에서는 챔버내의 웨이퍼에 다종의 반응가스를 공급 화학반응시켜 웨이퍼 상면에 산화막 처리를 한다.For example, in a process in which waste gas is discharged during production of a product and a semiconductor manufacturing process, in the wafer processing process, various reaction gases are supplied and chemically reacted to the wafer in the chamber to perform an oxide film treatment on the upper surface of the wafer.

이때, 챔버내에서는 웨이퍼의 산화막 성장에 관여하면서 유독가스, 수분, 잔류가스와 분진형태의 산화규소 등의 잔류물질이 형성된다.At this time, in the chamber, toxic gases, moisture, residual gases, and dusty silicon oxide in the form of dust are formed while being involved in the oxide film growth of the wafer.

특히, 반도체 제조공정에서는 다종의 반응가스를 사용하게되는데, 상기 가스들은 대개가 매우 독성이 강해서 인체에 치명적이고, 또한 다른 가스나 공기와 혼합되면 폭발할 수도 있어서 공정후 폐기가스 정화장치를 통해 무해한 가스로 배출되고 있다.In particular, the semiconductor manufacturing process uses a variety of reaction gases, which are usually very toxic to the human body, and may explode when mixed with other gases or air, harmless through post-process waste gas purification device Emitted as gas.

이러한 가스의 흐름을 제어하기 위하여 3웨이 밸브를 이용하는데, 종래의 3웨이 밸브는 벨로우즈 형식을 채택하고 있고, 이러한 벨로우즈 방식은 작업중 또는 종료시 밸브내에 공정 진행중 발생하는 분진물질의 잔여로 밸로우즈에 분진이 증착되어 밸로우즈의 파손과 밸브의 작동불량이 일어났다는 문제점이 있었다.In order to control the flow of gas, a three-way valve is used. The conventional three-way valve adopts a bellows type, and this bellows method has a dust in the bellows due to the residual of dust material generated during the process in the valve during operation or at the end. There was a problem that the deposition caused the breakage of the bellows and malfunction of the valve.

이에 본인은 벨로우즈 형식을 배제하고 실린더 형식을 채용한 실린더 밸브(출원번호201998009540)를 출원한 바 있으며, 이것은 도 1 에 도시된 바와같이 개폐수단으로서 가스압에 의한 샤프트의 이동을 이용한 것이다.Therefore, I have applied for a cylinder valve (application number 201998009540) employing a cylinder type excluding the bellows type, which uses the movement of the shaft by gas pressure as an opening and closing means as shown in FIG.

즉, 밸브몸체(1)의 흡입구(2)와 배출구(3)사이의 연결몸체(4)에 부싱프렌지(5)를 격벽으로 스프링실린더(6)를 설치하는 한편, 스프링실린더(6)에는 패킹(7)과 일체로 연결된 샤프트(8)를 설치하고, 부싱프렌지(5)에는 구동포트(6)를 마련하여 여기에서 패킹(7)으로 가스압이 작용되도록 한 것이다.That is, the spring cylinder 6 is installed on the connecting body 4 between the inlet 2 and the outlet 3 of the valve body 1 with the bushing flange 5 as a partition wall, while the spring cylinder 6 is packed. The shaft 8 is integrally connected with (7), and the driving port 6 is provided in the bushing flange 5 so that the gas pressure is applied to the packing 7.

따라서, 구동포트(6)를 통해 가스가 송압되면 패킹(7)이 후퇴되면서 샤프트(8) 및 개폐패킹(9)이 후퇴되어 어느 일측의 밸브가 개방되는 것이며, 가스의 송압이 중단되면 리턴스프링(10)에 의해 밸브가 폐쇄되는 것이다.Therefore, when the gas is pumped through the drive port 6, the packing 7 is retracted and the shaft 8 and the opening / closing packing 9 are retracted to open the valve on either side, and the return spring is stopped when the gas feeding is stopped. The valve is closed by (10).

한편, 스프링실린더(6) 내에 폐기가스의 분진이 침투되거나 샤프트(8)가 분진에 의해 손상되지 않도록 실링처리가 되어있는데, 이것은 실부싱(11)을 위시하여 오링(12)과 오일챔버(13)가 설치되어 있으며, 퍼지포트(14)를 통해 고압의 질소가스를 분사하여 샤프트(8)에 오일챔버(13)의 윤활오일을 공급함과 더불어 가스막을 형성하도록 하였다.On the other hand, a sealing treatment is performed to prevent dust of waste gas from penetrating into the spring cylinder 6 or damaging the shaft 8 by dust, which includes an o-ring 12 and an oil chamber 13, including a seal bushing 11. And a high pressure nitrogen gas are injected through the purge port 14 to supply the lubricating oil of the oil chamber 13 to the shaft 8 and to form a gas film.

또한, 개폐패킹(9)의 외측에도 흡입구(2) 측과 배출구(3) 측을 차단하는 오링(15)이 설치되어 있다.In addition, an O-ring 15 is provided outside the opening / closing packing 9 to block the inlet 2 side and the outlet 3 side.

상술된 바와 같이, 반도체 공정 등의 반응가스의 흐름을 제어하기 위하여는 3웨이 밸브가 필수적이고 이러한 3웨이 밸브는 공정에서 발생된 폐기가스에 의해 손상될 우려가 있어 개선의 여지가 있으며, 이에 의해 밸로우즈 방식이 배제된 실린더 형식의 3웨이 밸브가 개발되었다.As described above, in order to control the flow of the reaction gas, such as a semiconductor process, a three-way valve is essential, and the three-way valve may be damaged by the waste gas generated in the process, and thus there is room for improvement. A cylindrical three-way valve has been developed that eliminates the bellows type.

한편, 이러한 실린더 형식의 3웨이 밸브도 폐기가스내의 분진에 의한 손상을 완벽히 극복하였다라고는 볼 수 없으며, 이러한 분진에 의한 손상을 방지하기 위하여는 더욱 보강된 실링구조가 요구된다.On the other hand, such a three-way valve of the cylinder type does not seem to completely overcome the damage caused by the dust in the waste gas, in order to prevent such damage caused by a more reinforced sealing structure is required.

또한, 상기 밸브는 그 하나의 흡입구(2)에 두 개의 배출구(3)가 형성되는 연결구조상 연결몸체(4)와 같은 굴곡부위의 형성이 불가피하며, 이러한 굴곡부위에 분진이 증착될 우려가 있음을 고려할 때, 상기 굴곡부위에서 가스를 강제적으로 신속히 배출시킬 필요가 있는 것이다.In addition, the valve is inevitable to form a bent portion, such as a connecting body (4) due to the connection structure in which two outlets (3) are formed in one inlet (2), there is a risk that dust is deposited on the bent portion. Considering this, it is necessary to quickly and forcibly discharge the gas in the bent portion.

이에 본 발명은 실린더의 실링을 보강하고 밸브내의 폐기가스를 신속하고 원할하게 이송시키는 폐기가스 처리장치의 3웨이 밸브를 제공함에 그 목적이 있는 것이다.Accordingly, an object of the present invention is to provide a three-way valve of a waste gas treatment device for reinforcing a sealing of a cylinder and quickly and smoothly transferring waste gas in a valve.

이를 위한 본 발명은 본 발명은 연장프랜지와 연장부싱 그리고 연장프랜지와 개폐패킹의 간극을 차단하는 오링을 설치하여 기존의 실링을 다단계로 보강하였으며, 가스압력에 의하여 코안다(COANDA) 효과를 일으키는 가스운송부를 구비하여 밸브내의 폐기가스를 강제배기시키도록 하였다.The present invention for this purpose is to install the extension flange and the extension bushing and the O-ring blocking the gap between the extension flange and the opening and closing the reinforcement of the existing sealing in multiple stages, the gas causing the COANDA effect by the gas pressure (COANDA) A transport unit was provided to force the exhaust gas in the valve.

따라서, 본 발명은 폐기가스 분진의 침투를 더욱 방지하여 밸브의 손상을 방지하였으며, 밸브내의 폐가가스를 신속히 배출시켜 폐기가스의 분진에 의한 밸브의 손상 역시 방지하는 효과가 있는 것이다.Therefore, the present invention further prevents the ingress of waste gas dust, thereby preventing damage to the valve, and quickly discharges the waste gas in the valve, thereby preventing the damage of the valve by dust of the waste gas.

도 1 (가)는 종래 3웨이 밸브를 나타낸 단면설명도,1 (a) is a cross-sectional explanatory view showing a conventional three-way valve,

(나)는 도 1 (가)의 A부 확대설명도,(B) is an enlarged explanatory diagram of part A of FIG.

도 2 (가)는 본 발명에 따른 3웨이 밸브를 나타낸 단면설명도,Figure 2 (a) is a cross-sectional explanatory view showing a three-way valve according to the present invention,

(나)는 도 2 (가)의 B부 확대설명도,(B) is an enlarged explanatory diagram of part B of FIG.

(다)는 도 2 (가)의 C부 확대설명도,(C) is an enlarged explanatory diagram of part C of Figure 2 (A),

도 3 (가)는 본 발명에 따른 가스운송부 장착의 다른예를 보인 단면설명도,3 (a) is a cross-sectional explanatory view showing another example of the gas transportation unit mounting according to the present invention,

(나)는 본 발명에 따른 가스운송부 장착의 다른예를 보인 단면설명도이다.(B) is a cross-sectional explanatory view showing another example of the gas transportation unit mounting according to the present invention.

- 도면의 주요부분에 대한 부호의 설명 --Explanation of symbols for the main parts of the drawings

1 - 밸브몸체, 2 - 흡입구,1-valve body, 2-inlet,

3 - 배출구, 4 - 연결몸체,3-outlet, 4-connecting body,

5 - 부싱프랜지, 6 - 스프링실린더,5-bushing flange, 6-spring cylinder,

8 - 샤프트, 9 - 개폐패킹,8-shaft, 9-opening and closing packing,

11 - 실부싱, 20 - 연장프랜지,11-seal bushing, 20-extension flange,

22 - 연장부싱, 24 - 오링,22-extension bushing, 24-o-ring,

26 - 가스운송부, 28 - 가스실,26-gas carrier, 28-gas chamber,

30 - 노즐, 32 - 코안다 유도곡면,30-nozzle, 32-Coanda guide surface,

이하 첨부된 예시도면과 함께 본 발명을 설명하면 다음과 같다.Hereinafter, the present invention will be described with reference to the accompanying drawings.

본 발명은 부싱프랜지(5)의 외측에 연장프랜지(20)가 설치되고 이 연장프랜지(20)를 관통하여 실부싱(11)과 연결되는 연장부싱(22)이 설치됨과 더불어, 연장프랜지(20)나 개폐패킹(9)의 외측에는 샤프트(80의 후퇴시 개폐패킹(9)과 연장프랜지(20) 간의 간극이 차단되도록 오링(24)이 설치되는 한편, 밸브몸체(1)에는 배출구측(3)으로 가스압에 의해 폐기가스를 배기시키는 가스운송부(26)가 설치된 3웨이 밸브이다.According to the present invention, an extension flange 20 is installed outside the bushing flange 5 and an extension bushing 22 connected to the seal bushing 11 through the extension flange 20 is installed. Or an outer ring 24 is provided at the outside of the opening and closing seal 9 so that the gap between the opening and closing seal 9 and the extension flange 20 is blocked when the shaft 80 is retracted, while the valve body 1 has an outlet side ( 3) is a three-way valve provided with a gas transportation unit 26 for exhausting waste gas by gas pressure.

여기서, 가스운송부(26)는 밸브몸체(1)에 그 내측으로 가스를 공급하는 가스실(28)이 마련되고, 가스실(28)에는 밸브몸체(1) 내측 폐기가스의 이동방향으로 가스를 분사하는 노즐(30)이 형성됨과 더불어, 상기 노즐(30)의 분사부위에는 코안다 유도곡면(32)이 형성되며, 상기 노즐(30)은 코안다 유도곡면(32)측으로 예각으로 형성된 것을 특징으로 한다.Here, the gas transportation unit 26 is provided with a gas chamber 28 for supplying gas into the valve body 1, and the gas chamber 28 injects gas in the moving direction of the waste gas inside the valve body 1. In addition, the nozzle 30 is formed, and the Coanda guide surface 32 is formed on the injection portion of the nozzle 30, the nozzle 30 is characterized in that formed at an acute angle toward the Coanda guide surface 32. do.

또한, 상기 가스운송부(26)는 연결몸체(4)의 입구측에 각각 독립되어 설치된 것을 특징으로 한다.In addition, the gas transport unit 26 is characterized in that each is installed independently on the inlet side of the connecting body (4).

또한, 상기 가스운송부(26)는 배출구(3)측에 각각 독립되어 설치된 것을 특징으로 한다.In addition, the gas transport unit 26 is characterized in that the outlet port 3, each independently installed.

또한, 상기 가스운송부(26)는 흡입구(2)측에 설치된 것을 특징으로 한다.In addition, the gas transport unit 26 is characterized in that installed on the suction port (2) side.

예시도면 도 2 는 본 발명에 따른 3웨이 밸브를 나타낸 단면설명도이고, 예시도면 도 3 은 본 발명에 따른 가스운송부의 다른 장착예를 나타낸 단면설명도로서, 본 발명은 기존의 실링에 보강실링을 설치하여 폐기가스 분진의 침투를 방지하였으며, 가스압력에 의한 가스운송부(26)를 구비하여 3웨이 밸브내의 폐기가스를 강제배기시킴으로써 분진에 의해 3웨이 밸브가 폐색되는 것을 방지하였다.Figure 2 is a cross-sectional explanatory view showing a three-way valve according to the present invention, Figure 3 is a cross-sectional explanatory view showing another mounting example of the gas transportation unit according to the present invention, the present invention reinforcement sealing to the existing seal In order to prevent the infiltration of waste gas dust, and provided with a gas transport unit 26 by the gas pressure to force the exhaust gas in the three-way valve to prevent the three-way valve is blocked by the dust.

이를 위한 본 발명은 먼저 실링의 보강으로서, 연장프랜지(20)와 연장부싱(22) 그리고 연장프랜지(20)와 개폐패킹(9)의 간극을 차단하는 오링(24)을 설치하였다.The present invention for this purpose is first installed as an extension of the sealing, the extension flange 20 and the extension bushing 22 and the O-ring 24 for blocking the gap between the extension flange 20 and the opening and closing packing (9).

상기 연장프랜지(20)는 부싱프랜지(5)에 연장되어 연장부싱(22)을 지지하며, 연장부싱(22)은 기존의 실부싱(11)에 연장되어 폐기가스의 침투를 더욱 방지하도록 설치되어 있는 것이다.The extension flange 20 extends to the bushing flange 5 to support the extension bushing 22, and the extension bushing 22 extends to the existing seal bushing 11 to further prevent infiltration of waste gas. It is.

한편, 상기 연장부싱(22)은 부싱의 전체적인 길이연장으로 인함에도 불구하고 샤프트(8)의 원할한 이동을 확보하기 위하여 테프론으로 제작됨이 바람직하다.On the other hand, the extension bushing 22 is preferably made of Teflon in order to ensure a smooth movement of the shaft 8 in spite of the overall length extension of the bushing.

상기 오링은 샤프트(8)의 후퇴시 연장프랜지(20)와 개폐패킹(9) 사이를 차단하여 최전방의 실러역할을 하게되는 것이다.The O-ring serves to seal the frontmost sealer by intercepting the extension flange 20 and the opening / closing packing 9 when the shaft 8 is retracted.

즉, 도시된 바와 같이 스프링실린더(6)에 가스가 공급되어 샤프트(8)가 후퇴되면 개폐패킹(9)의 외측에 설치된 오링(24)과 연장프랜지(20)의 외측면이 접촉하게 되고, 이에 의해 개폐패킹(9)과 연장프랜지(20)의 간극이 차단되는 것이다.That is, as shown, when the gas is supplied to the spring cylinder 6 and the shaft 8 is retracted, the O-ring 24 installed on the outside of the opening / closing packing 9 comes into contact with the outer surface of the extension flange 20. As a result, the gap between the opening / closing packing 9 and the extension flange 20 is blocked.

따라서, 샤프트(8)의 후퇴에 의한 밸브개방시 폐기가스와 샤프트(8)의 접촉을 1차로 방지하게 되는 것이다.Therefore, when the valve is opened by the retraction of the shaft 8, the contact of the waste gas and the shaft 8 is primarily prevented.

여기서, 상기 오링(24)은 연장프랜지(20)나 개폐패킹(9) 어느곳에 장착되어도 1차 실러의 역할을 수행하므로 도시된 오링(24)의 장착위치는 연장프랜지(20)에 국한되는 것은 아니다.Here, the O-ring 24 serves as the primary sealer even if the O-ring 24 is mounted on either the extension flange 20 or the opening / closing packing 9, so that the mounting position of the illustrated O-ring 24 is limited to the extension flange 20. no.

한편, 밸브몸체(1)에는 폐기가스를 신속히 이동시켜 배기시키도록 가스운송부(26)가 설치되어 있다.On the other hand, the valve body 1 is provided with the gas transportation part 26 so that waste gas can be moved quickly and exhausted.

가스운송부(26)는 질소 등의 소량의 압축유체를 흡입하여 그 양의 20-30배인 주변 폐기가스를 대량으로 이송하는 코안다(COANDA)효과를 이용한 것으로, 밸브몸체(1)에 질소 등의 가스를 흡입시키기 위하여 가스실(28)이 마련되어 있고, 가스실(28)에는 폐기가스의 유동방향으로 노즐(30)이 형성되어 있다.The gas transportation unit 26 utilizes the COANDA effect of sucking a small amount of compressed fluid such as nitrogen and transferring a large amount of surrounding waste gas 20-30 times the amount thereof, and the valve body 1 includes nitrogen and the like. The gas chamber 28 is provided in order to inhale the gas of the gas, and the nozzle 30 is formed in the gas chamber 28 in the flow direction of waste gas.

상기 노즐(30)은 코안다 유도곡면(32) 측으로 분사되도록 하였으며, 이를 위하여 노즐(30)은 코안다 유도곡면(32) 측으로 예각이 지게 형성되어 있다.The nozzle 30 was sprayed to the coanda guide surface 32 side, for this purpose, the nozzle 30 is formed to be acute angle to the coanda guide surface 32 side.

따라서, 노즐(30)을 통해 코안다 유도곡면(32)으로 가스가 분사되면 가스운송부(26)의 입구측에 부압지역이 형성되며 이에 의해 입구주변의 폐기가스가 신속히 흡입되어 배출되는 것이다.Therefore, when gas is injected into the coanda guide curve 32 through the nozzle 30, a negative pressure region is formed at the inlet side of the gas transport unit 26, whereby the waste gas around the inlet is quickly sucked out and discharged.

이러한 가스운송부(26)는 상기 3웨이 밸브가 폐기가스의 흐름을 제어하는 것을 고려하여 연결몸체(4)나 배출구(3) 측에 독립적으로 설치하여 어느 측의 밸브가 개방될 때 이에 맞추어 작동되게 하거나, 흡입구(2) 측에 하나 설치하여 통합적으로 작동시키게 할 수도 있다.The gas transport unit 26 is installed independently of the connecting body 4 or the outlet port 3 in consideration of the three-way valve to control the flow of waste gas to operate according to when the valve of any side is opened. Alternatively, it may be installed on the suction port 2 side to operate integrally.

이하 본 발명의 작용을 설명하면 다음과 같다.Hereinafter will be described the operation of the present invention.

먼저, 실린더 밸브의 작동은 종래와 동일하며, 그러나 어느 측의 샤프트(8)가 후퇴되어 밸브가 개방될 때, 그 샤프트(8)의 개폐패킹(9)에 설치된 오링(24)과 연장프랜지(20)의 측면이 접촉되어 밸브 개방시 폐기가스와 샤프트(8)가 접촉되는 것이 일차적으로 방지된다.First, the operation of the cylinder valve is the same as in the prior art, but when the shaft 8 on either side is retracted and the valve is opened, the O-ring 24 and the extension flange installed on the opening / closing packing 9 of the shaft 8 are opened. The side of 20 is first contacted to prevent the waste gas from contacting the shaft 8 upon valve opening.

상기 오링(24)에도 불구하고 폐기가스가 샤프트(8) 측으로 침투되면 연장부싱(22)이 이에 대응하며, 그 후로부터는 기존의 오링과 실부싱(11), 가스막이 폐기가스 침투에 대응하여 기존에 비해 2단계의 실러가 보강된 것이다.In spite of the O-ring 24, when the waste gas penetrates into the shaft 8, the extension bushing 22 corresponds to this, and after that, the existing O-ring, seal bushing 11, and the gas film correspond to the waste gas infiltration. Compared with the existing two-stage sealer is reinforced.

한편, 어느 일측의 밸브개방시 이에 맞추어 가스운송부(26)가 작동하게 되며 가스운송부(26)는 소량의 고압가스를 분사 코안다 효과를 일으켜 주변의 폐기가스를 신속히 배출시켜 밸브몸체(1)내의 잔류가스와 분진을 제거하게 되는 것이다.On the other hand, when opening one of the valves in accordance with the gas delivery unit 26 is operated in accordance with the gas delivery unit 26 is a small amount of high-pressure gas injection Coanda effect to discharge the surrounding waste gas quickly to the valve body (1) This will remove residual gas and dust inside.

상기와 같은 본 발명의 구성은 3웨이 밸브에 한정하여 사용되는 것은 아니며 "L자형 밸브"·"＋자형 밸브"등 다양한 밸브에 적용시킬 수 있으며, 밸브몸체(1)와 실린더 샤프트(8)등 폐기가스와 직접적으로 접하는 금속부부은 부식방지를 위해 염소계 부식성가스 및 불소계 부식성가스에 강한 코팅처리가 되어 있다.The configuration of the present invention as described above is not limited to the three-way valve, and can be applied to various valves such as "L-shaped valve", "+ -shaped valve", and the valve body 1 and the cylinder shaft 8 and the like. The metal part directly contacting the waste gas has a strong coating on chlorine corrosive gas and fluorine corrosive gas to prevent corrosion.

상술된 바와 같이 본 발명은 연장프랜지와 연장부싱 그리고 연장프랜지와 개폐패킹의 간극을 차단하는 오링을 설치하여 기존의 실링을 다단계로 보강하였으며, 가스압력에 의하여 코안다 효과를 일으키는 가스운송부를 구비하여 밸브내의 폐기가스를 강제배기시키도록 하였다.As described above, the present invention installs an extension flange and an extension bushing and an O-ring for blocking the gap between the extension flange and the opening / closing packing to reinforce the existing seal in multiple stages, and includes a gas transportation unit that causes a Coanda effect by gas pressure. The exhaust gas in the valve was forced to exhaust.

따라서, 본 발명은 폐기가스 분진의 침투를 더욱 방지하여 밸브의 손상을 방지하였으며, 밸브내의 폐가가스를 신속히 배출시켜 폐기가스의 잔류와 분진에 의한 밸브의 손상 역시 방지하는 효과가 있는 것이다.Therefore, the present invention further prevents the ingress of waste gas dust to prevent damage to the valve, and also has the effect of quickly discharging the waste gas in the valve to prevent waste gas residue and damage to the valve due to dust.

Claims (5)

부싱프랜지(5)의 외측에 연장프랜지(20)가 설치되고 이 연장프랜지(20)를 관통하여 실부싱(11)과 연결되는 연장부싱(22)이 설치됨과 더불어, 연장프랜지(20)나 개폐패킹(9)의 외측에는 샤프트(8)의 후퇴시 개폐패킹(9)과 연장프랜지(20) 간의 간극이 차단되도록 오링(24)이 설치되는 한편, 밸브몸체(1)에는 배출구(3)측으로 가스압에 의해 폐기가스를 배기시키는 가스운송부(26)가 설치된 페기가스 처리장치의 3웨이 밸브.An extension flange 20 is installed outside the bushing flange 5, and an extension bushing 22 connected to the seal bushing 11 through the extension flange 20 is installed. On the outer side of the packing 9, an o-ring 24 is provided so that the gap between the opening / closing packing 9 and the extension flange 20 is blocked when the shaft 8 is retracted, while the valve body 1 is disposed toward the outlet 3 side. A three-way valve of a waste gas processing apparatus provided with a gas transportation unit 26 for exhausting waste gas by gas pressure. 제 1 항에 있어서, 가스운송부(26)는 밸브몸체(1)에 그 내측으로 가스를 공급하는 가스실(28)이 마련되고, 가스실(28)에는 밸브몸체(1) 내측 폐기가스의 이동방향으로 가스를 분사하는 노즐(30)이 형성됨과 더불어, 상기 노즐(30)의 분사부위에는 코안다 유도곡면(32)이 형성되며, 상기 노즐(30)은 코안다 유도곡면(32)측으로 예각으로 형성된 것을 특징으로 하는 페기가스 처리장치의 3웨이 밸브.The gas transport unit (26) according to claim 1, wherein the gas transport unit (26) is provided with a gas chamber (28) for supplying gas to the valve body (1), and the gas chamber (28) has a moving direction of waste gas inside the valve body (1). A nozzle 30 for injecting gas is formed, and a coanda guide surface 32 is formed at the injection portion of the nozzle 30, and the nozzle 30 is acutely angled toward the coanda guide surface 32. 3-way valve of the waste gas treatment apparatus, characterized in that formed. 제 1 항에 있어서, 상기 가스운송부(26)는 연결몸체(4)의 입구측에 독립되어 설치된 것을 특징으로 하는 페기가스 처리장치의 3웨이 밸브.The three-way valve of the waste gas treatment apparatus according to claim 1, wherein the gas transportation unit (26) is installed independently at the inlet side of the connecting body (4). 제 1 항에 있어서, 상기 가스운송부(26)는 배출구(3)측에 독립되어 설치된 것을 특징으로 하는 페기가스 처리장치의 3웨이 밸브.The three-way valve of the waste gas treatment apparatus according to claim 1, wherein the gas transportation unit (26) is installed independently at the outlet (3) side. 제 1 항에 있어서, 상기 가스운송부(26)는 흡입구(2)에 설치된 것을 특징으로 하는 페기가스 처리장치의 3웨이 밸브.The three-way valve of the waste gas treatment apparatus according to claim 1, wherein the gas transportation unit is installed at an intake port.
KR1019990011561A 1999-04-02 1999-04-02 Three-way valve of waste gas treating apparatus. KR100324808B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100730074B1 (en) * 2005-12-26 2007-06-20 주식회사 포스코 Cup valve assembly
KR101511917B1 (en) * 2014-10-01 2015-04-20 주식회사 에코프로 Damper for harmful gas decomposing equipment

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101828427B1 (en) * 2017-11-22 2018-03-29 주식회사 보야 Powder protecting 3way valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100730074B1 (en) * 2005-12-26 2007-06-20 주식회사 포스코 Cup valve assembly
KR101511917B1 (en) * 2014-10-01 2015-04-20 주식회사 에코프로 Damper for harmful gas decomposing equipment

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