KR20000050825A - Self-testing method for non-electrode discharge light source system and apparatus thereof - Google Patents

Abstract

PURPOSE: A self-checking device of a discharging light source system is provided to prevent the generation of a fire which can be generated by the heating of a magnetron by self-checking a discharging member of a resonant cavity, a metal net, and a magnetron. CONSTITUTION: A self-checking device of a discharging light source system comprises a resonant cavity(102), a discharging member(103), a light reflection plate(102b), a metal net(102c). A light amount detecting section(200) is installed in the vicinity of the resonant avity(102), and measures the amount of the light which is radiated form the metal net(102c). A signal processing section(201) processes the light signal which is detected from the light amount detecting section(200). A current detecting section(204) measures the current which is supplied to a magnetron(100). A microprocessor(203) determines the disorder of a device and generates a control signal for controlling an AC power source. A voltage intercepting section(206) supplies and intercepts a common AC power source according to the control of the microprocessor(203).

Description

Self-testing method for non-electrode discharge light source system and apparatus

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrodeless microwave discharge light source device, and more particularly to a discharge tube, a metal network arranged in a resonance cavity in a microwave discharge light source device having an electrodeless bulb disposed in a resonant cavity of a microwave. And a self-diagnostic method and apparatus for an electrodeless discharge light source system for self-diagnosing an abnormality of a magnetron to prevent power consumption, shorten the life of the magnetron, and protect it from the risk of fire.

In recent years, an electrodeless microwave discharge light source device having an electrodeless bulb disposed in a microwave resonant cavity has been developed, and has attracted attention because of its long life and good luminous efficiency.

Such an electrodeless microwave discharge light source device has a microwave resonant cavity in which a large part of the resonant cavity wall surface is formed of a light transmitting member, and is known, for example, from Japanese Patent Laid-Open No. 56-126250.

FIG. 1 shows one such electrodeless microwave discharge light source device described in Japanese Laid-Open Patent Publication No. 56-126250, and FIG. 2 shows a cross-sectional view of the electrodeless microwave discharge light source device of FIG. will be.

In the above apparatus, the magnetron 100 having the antenna 100a has a waveguide having a ventilation hole 101a for supplying microwaves generated by the magnetron 100 to the resonant cavity 102 through the microwave supply port 102a. The resonant cavity 102 is disposed at the end of the resonator cavity 101. The resonant cavity 102 has a parabolic light reflecting plate 102b having a light reflection rotationally symmetrical inner surface and a microwave, but transmits light and forms a front surface of the resonant cavity 102 It is formed of the metal mesh 102c.

The spherical electrodeless discharge tube 103 disposed in the resonant cavity 102 and the plasma generating medium encapsulated therein emits light through the metal mesh 102c covering the entire surface of the resonant cavity 102. When the gas is discharged into the discharge tube 103, the gas enclosed in the tube tube is discharged due to the microwaves radiated into the resonance cavity 102. Thus, the inner surface of the discharge tube 103 is heated, and the discharge tube 103 The metal such as mercury deposited on the inner surface of the e) is evaporated into gas, and eventually the discharge in the discharge tube 103 becomes the discharge of the metal gas, so that light rays having an emission spectrum inherent to the type of metal are emitted from the discharge metal gas. . The emitted light rays are reflected by the cavity wall, that is, the parabolic light reflecting plate 102b, and are radiated forward through the front net, that is, the front of the metal net 102c.

The apparatus also has a cooling fan 104 on the distal wall of the housing 105 to cool the magnetron 100 and the discharge port 103.

However, in such an electrodeless microwave discharge light source device, it is common to use a mesh made of a fine metal wire (hereinafter referred to as an element wire) as the metal mesh 102c at the intersection of the element wires. There is a risk that the metal network 102c is heated and broken by the microwave loss due to the electrical contact resistance, and the power injection efficiency of the discharge tube 103 is poor and the luminous efficiency is poor.

In addition, such a net is mechanically weak, and when an external force is applied, the microwave resonant cavity 102 is deformed and cannot maintain the resonant condition of the microwave, so that the microwave power becomes difficult to be incident in the resonant cavity 102, and thus the discharge tube ( There was a fear that the power to the discharge of 103) would drop. In addition, the wire spacing of the metal mesh 102c becomes uneven with the deformation of the resonant cavity 102. In particular, the microwave wire leaks out of the resonant cavity 102 and causes a fatal injury to the human body from the undesirably large wire spacing. There was a problem.

As a method for avoiding a decrease in power injection efficiency and a decrease in luminous efficiency caused by the wires of the metal network as described above, FIG. 3 is a method for controlling an electrodeless microwave discharge light source device by sensing light emitted from the metal network. Devices such as are disclosed.

3 is a schematic configuration diagram for explaining a discharge apparatus monitor device in a conventional electrodeless discharge light source device. 1 and 2, the same reference numerals are assigned to the same components, and redundant description thereof will be omitted.

3, an optical fiber 106 for transmitting light emitted from the metal network 102c of the resonant cavity 102, and a pulse generator for detecting whether light is emitted from the optical fiber 106 and generating a pulse signal. 107 and the microprocessor 108 which controls the high voltage generation part 109 which applies the acceleration high voltage to the magnetron 100 according to the presence or absence of the pulse signal detected by the pulse generation part 107. As shown in FIG.

In the conventional electrodeless discharge light source device configured as described above, a discharge device monitor device will be described in detail below.

First, light radiated to the metal network 102c of the resonance cavity 102 included in the electrodeless discharge light source device is transmitted to the pulse generator 107 through the optical fiber 106.

The pulse generator 107 generates a pulse signal when the light is transmitted from the optical fiber 106 and provides the pulse signal to the microprocessor 108, but does not generate a pulse signal when there is no light.

When the pulse signal is input from the pulse generator 107, the microprocessor 108 normally starts the magnetron 100 through the high pressure generator 109. It is determined that the present invention is to stop the supply of the acceleration high voltage of the high-pressure generator 109 to suppress the oscillation of the magnetron 100.

In the electrodeless discharge light source device according to the prior art described above, the apparatus for monitoring the discharge bulb outputs a constant pulse signal when the discharge bulb emits light using an optical fiber to start the magnetron normally, and generates a high pressure when the discharge bulb does not emit light. It can be seen that the magnetron stops the operation of the magnetron.

However, in the above-described conventional electrodeless discharge light source device, the discharge device monitor device generates a pulse even when the intensity of light through the metal mesh of the resonant cavity is weak, that is, even small light, and is mistaken for normal operation even in abnormal light emission. have.

That is, the magnetron oscillates normally and emits microwaves, but any problem, for example, a part of the metal network is broken or crushed, so that the microwaves are not leaked to the outside or concentrated on the discharge tube or abnormally operated by the discharge tube itself. Only part of the microwave is transmitted to the discharge tube, and even though it emits light weakly, it is recognized as normal operation and continues to oscillate. As a result, extra microwaves return to the magnetron, shortening the life of the magnetron, and causing a problem in severe fire.

In addition, a large amount of microwave energy leaks from the broken portion of the metal mesh, which causes fatal effects on the human body and consumes power.

Therefore, it is desirable to provide a low-cost discharge light source device in terms of cost, and a more efficient and safe discharge light source device in terms of reliability while alleviating the above problems.

Accordingly, it is an object of the present invention to provide a method and apparatus for self-diagnosis of an electrodeless discharge light source system for suppressing oscillation of a magnetron by determining whether an electric discharge tube is abnormal or a metal mesh is broken according to the intensity of light emitted from a resonance cavity. Is in.

Another object of the present invention is to self-diagnose the abnormality of the magnetron when the discharge tube of the resonant cavity does not emit light in a normal state or emits light weakly.

Still another object of the present invention is to temporarily block the operation of the discharge light source device when the intensity of the light quantity corresponding to the oscillation level of the magnetron is reacted at a predetermined level or more is not detected.

Another object of the present invention is to self-diagnose the abnormality of the discharge tube and the magnetron to display the corresponding portion on the display means.

1 is a schematic perspective view showing a part of a typical electrodeless discharge light source device,

2 is a sectional view of the electrodeless discharge light source device viewed from the front,

3 is a schematic configuration diagram for explaining a discharge device monitor device in the electrodeless discharge light source device;

Figure 4 is a block diagram showing an embodiment provided in the description of the self-diagnostic apparatus of the electrodeless discharge light source system according to the present invention,

5 is a signal flowchart of a self-diagnostic method of an electrodeless discharge light source system according to the present invention.

<Description of the code | symbol about the principal part of drawing>

100: magnetron 100a: antenna

101: waveguide 101a: ventilator

102: resonant cavity 102a: microwave supply port

102b: light reflection plate 102c: metal mesh

103: discharge tube 104: cooling fan

200: light amount detection unit 201: signal processing unit

202: operation panel 203: microprocessor

204: current detecting unit 205: high pressure generating unit

206: voltage interrupter

Self-diagnosis method of the electrodeless discharge light source system according to an aspect of the present invention for achieving the above object, the microwave energy is supplied from the waveguide through the microwave supply port and the energy of the light in the resonance cavity of the supplied microwave energy In a microwave discharge light source system that converts and radiates into:

(1) measuring the intensity of the amount of light emitted from the resonance cavity and comparing it with a reference value;

(2) measuring the current of the magnetron when the intensity of light is lower than a reference value and comparing the current with a set reference current;

(3) suppressing the oscillation of the magnetron by determining that the current measured is higher than the reference current as a result of the discharge tube and the metal network; And

(4) determining that the current measured current is lower than the reference current, and determining that the magnetron is abnormal to cut off the power applied to the magnetron.

Preferably, when the intensity of the light amount corresponding to the level of the current applied to the magnetron is not measured, oscillation of the magnetron is suppressed.

Optionally, it is characterized by visually displaying whether or not the determined discharge tube, the metal mesh and the magnetron.

In addition, according to the self-diagnostic apparatus of the electrodeless discharge light source system of the present invention, a resonant cavity in which microwave energy is supplied from a waveguide through a microwave supply port, a discharge tube disposed in the resonant cavity to convert microwave energy into energy of light, In a microwave discharge light source device comprising a light reflector reflecting light from the discharge tube and a metal network formed on the front surface of the resonant cavity to block microwave energy and allow light to pass through:

(1) light quantity detecting means which is installed in a close proximity to an external location of the resonant cavity and measures the amount of light emitted from the metal network;

(2) signal processing means for waveform shaping the optical signal detected by the light quantity detecting means;

(3) current detecting means for measuring a current generated by the high pressure generating means and supplied to the magnetron;

(4) a microprocessor for generating a control signal for controlling an AC power source by determining whether the device is abnormal according to the level of the waveform obtained by the signal processing means and the level of the current detected by the current detecting means; And

(5) voltage interrupting means for supplying or interrupting commercial AC power to the high-voltage generating means under the control of the microprocessor.

Optionally, the light quantity detecting means is composed of any one of a phototransistor or a photoconductive cell.

Optionally, the display apparatus may further include display means for displaying an abnormality of the magnetron, the discharge port, and the metal mesh under the control of the microprocessor.

Preferably, the voltage interrupting means is configured as an analog switch.

In this way, by detecting the intensity of light emitted from the discharge tube of the resonant cavity and the applied current of the magnetron, it is possible to accurately determine the breakage of the metal network, the abnormality of the discharge tube itself, and the abnormality of the magnetron. You can see that the corresponding parts will be displayed.

As a result, the human body is not adversely affected by the microwave energy caused by the breakage of the metal mesh of the resonant cavity, and the life of the magnetron is not reduced due to the feedback of the remaining microwaves in the resonant cavity due to the abnormality of the discharge tube. There is an advantage.

And, there may be a plurality of embodiments of the present invention, the following will be described in detail for the most preferred embodiment.

Through this preferred embodiment, the objects, other objects, features and advantages of the present invention will become more apparent from the following description with an embodiment according to the present invention in connection with the accompanying drawings shown for illustrative purposes.

Hereinafter, preferred embodiments of a self-diagnostic method and apparatus for an electrodeless discharge light source system according to the present invention will be described in detail with reference to the accompanying drawings.

In addition, in each figure used for description, the same component may be attached | subjected, and may show the same number, and the overlapping description may be abbreviate | omitted.

Figure 4 is a block diagram showing an embodiment provided in the description of the self-diagnostic apparatus of the electrodeless discharge light source system according to the present invention.

The self-diagnostic apparatus of the electrodeless discharge light source system according to the present embodiment includes a high-voltage generator 205 for boosting and rectifying a commercial AC power AC input through a plug 207 at a high voltage for acceleration, and outputting the same. Waveguide 101 as a microwave guide device having a magnetron 100 that oscillates by the high voltage for acceleration and radiates microwave energy of approximately 2.45 GHz through the antenna 100a, and a vent hole 101a for guiding the emitted microwave energy. And a resonant cavity (102) provided at the end of the waveguide (101) and receiving microwave energy from the waveguide (101) through the microwave supply port (102a), and disposed within the resonant cavity (102). The spherical discharge tube 103 which encloses therein and changes the microwave energy supplied to the resonant cavity 102 into energy of light, and reflects the light emitted from this discharge tube 103 to the outside. A light reflecting plate 102b having a parabolic shape, a metal mesh 102c formed on the front surface of the resonant cavity 102 to block microwave energy and allowing light to pass through, and a predetermined distance to an external location of the resonant cavity 102. And a light amount detector 200 for detecting energy of light emitted from the metal network 102c as an electrical signal, a signal processor 201 for waveform-shaping and outputting the detected electrical signal, and a high voltage generator ( A discharge light source according to a current detector 204 for detecting a current generated by the 205 and input to the magnetron 100 and a level of a waveform input from the signal processor 201 and a current input from the current detector 204. A microprocessor 203 for determining an abnormality of the device and generating a control signal according thereto and controlling the overall operation of the discharge light source device according to the key signal input from the operation panel 202; In response to a control signal from the stand 203 it is composed of a voltage intermittent part 206 that the commercial AC power source (AC) to supply or to block a high voltage generation unit 205.

5 detects the energy of light emitted from the metal network 102c of the resonant cavity 102 through the light amount detector 200 and detects the current applied to the magnetron 100 through the current detector 204. Electrode according to the present invention for the oscillation and suppression of the magnetron 100 by determining whether the discharge tube 103, the metal mesh (102c), or the magnetron 100 is abnormal according to the light intensity and the level of the current Signal flow chart for the self-diagnosis method of the discharge light source system.

The self-diagnostic apparatus of the electrodeless discharge light source system according to the present invention made as described above will be described in more detail with reference to FIGS. 4 and 5.

First, when the operation panel 202 is operated and input to the microprocessor 203 to start the electrodeless discharge light source device, the microprocessor 203 short-circuits the voltage interrupter 206 such as an analog switch. A commercial AC power supply AC through the plug 207 is applied to the high pressure generator 205.

The high voltage generator 205 boosts the input commercial AC power to a high voltage for accelerating the voltage, for example, to a magnetron 100 installed in the housing 105 by boosting the voltage to a high voltage of 4.2 KV.

The magnetron 100 is oscillated by the accelerated high voltage generated in the high-pressure generating unit 205, through the antenna 100a of the waveguide 101 having a very high frequency, for example, microwave energy of 2.45 GHz, the ventilation hole (101a) and The microwave supply port 102a of the resonant cavity 102 is installed in the resonant cavity 102 and is transferred to the discharge tube 103 in which the plasma generating medium is sealed. In connection with this, the discharge tube 103 absorbs microwave energy to emit light as described above, and the light is reflected from the light reflector 102b having a parabolic shape and formed on the front surface of the resonance cavity 102. It is emitted outward through the network 102c (step ST10). At this time, the microwave energy is blocked by the metal mesh 102c.

In the electrodeless discharge light source device operating in this manner, an external force is applied or distorted to the metal mesh 102c of the resonant cavity 102 or the metal mesh is lost due to the loss of microwave energy due to contact resistance at the intersection of the wires. When 102c) is heated and disconnected or there is an abnormality in the discharge tube 103 itself, under all these conditions, the light divergence efficiency of the discharge tube 103 is extremely inferior or does not diverge.

That is, when there is an abnormality in the discharge tube 103, the light itself does not emit light, and when the metal mesh 103 is distorted by an external force and is damaged, microwave energy does not concentrate on the discharge tube 103, Light of the discharge tube 103 is weakly emitted or is not emitted.

At this time, it is installed in close proximity to the metal mesh 102c, preferably, installed near the bottom or top or left and right of the metal mesh 102c that does not interfere with the emission of light and is operated by the voltage of the power supply terminal Vcc. The photodetector 200 such as a phototransistor or a photoconductive cell detects the energy of the emitted light as an electrical signal (step ST20) and supplies it to the signal processor 201.

The signal processor 202 waveform-forms an electrical signal according to the energy of light input from the light quantity detector 200 and supplies the waveform to the microprocessor 203.

The microprocessor 203 compares the level of the input waveform with a preset reference value for the intensity of the light quantity (step; ST30). If the level of the input waveform is large, that is, the intensity of the light quantity is large, the discharge tube 103, the metal It is determined that the network 102c and the magnetron 100 are normal, and short-circuits the voltage interrupter 206. As a result, the magnetron 100 receives the high voltage for acceleration from the high-pressure generator 205 and continuously receives microwave energy. Is generated (step; ST40) and radiated to the waveguide 101.

When the intensity of the light amount is lower than the reference value as a result of the comparison in step ST30, the microprocessor 203 scans the current detector 204 such as a current transformer.

The current detector 204 measures the amount of current applied to the magnetron 100 from the operation time of the magnetron 100 (step ST50) and supplies it to the microprocessor 203.

Therefore, when the intensity of the light amount is lower than the reference value, the microprocessor 203 determines whether the magnetron 100 is operating normally by comparing the level of the current detected by the current detector 204 with the set reference level value (step ST60). ).

As a result of the comparison, when the current measured by the current detector 204 is lower than the set reference level, it is determined that the magnetron 100 is abnormal (step ST70), and the voltage interrupter 206 is immediately opened to the magnetron 100. The applied high acceleration voltage is cut off (step ST90) and is displayed through display means (not shown).

If the level of the current measured by the current detector 204 in step ST60 is higher than the reference level, it is determined that the magnetron 100 operates normally. On the contrary, the discharge tube 103 or the metal mesh 102c has an abnormality. It is determined that it has occurred (step ST80) and the oscillation of the magnetron 100 is immediately stopped through the voltage interrupter 206 in the same manner as described above (step ST90) and displayed through the display means.

On the other hand, according to another embodiment of the present invention, when the discharge light source device is started, it measures the current applied to the magnetron 100 through the current detector 204 and has the intensity of light compared to the measured input current discharge tube 103 ), It is determined whether or not the metal mesh 102c is abnormal.

In such an embodiment, since the magnetron 100 is hardly burned even under external force or other conditions, the magnetron 100 has the intensity of the amount of light detected by the light quantity detector 200 compared to the current input to the magnetron 100. The oscillation of the magnetron 100 is stopped by determining whether the discharge tube 103 or the metal mesh 102c is abnormal. For example, when the level of the current input to the magnetron 100 is high but the intensity of light is weak, it is determined that the discharge tube 103 or the metal mesh 102c is abnormal and suppresses the oscillation of the magnetron 100.

On the other hand, as a comparative example, in contrast to the conventional technology, that is, to monitor only the operation of the discharge tube using the optical fiber, the present invention accurately self-diagnose whether the breakage of the metal mesh or the discharge tube or magnetron of the resonance cavity It can be seen that when an abnormality occurs, the magnetron is suppressed from oscillation and the corresponding portion is displayed through the display means.

As a result, according to the present invention, it is possible to prevent risks such as shortening the life of the magnetron and the fire caused by the feedback of the remaining microwaves in the resonance cavity without being severely affected by the human body from the microwave energy due to the breakage of the metal network. There is an advantage to that.

As described above, in this embodiment, by detecting the breakage of the metal mesh of the resonant cavity or the abnormality of the discharge tube itself and the abnormality of the magnetron, the acceleration high voltage of the high-pressure generating means is cut off, so that Even if an abnormality occurs, the extra microwave energy is not fed back, which shortens the life of the magnetron and does not cause heating.

According to this application example, it is possible to provide a low cost electrodeless discharge light source device in terms of cost, and a more efficient and stable discharge light source device in terms of reliability.

In addition, although specific embodiments of the present invention have been described and illustrated above, it is obvious that the present invention may be variously modified and implemented by those skilled in the art.

Such modified embodiments should not be individually understood from the technical spirit or the prospect of the present invention, and such modified embodiments should fall within the appended claims of the present invention.

It is clear from the above description that the self-diagnosis method and apparatus of the electrodeless discharge light source system according to the present invention, when the metal mesh is broken or crushed in the discharge light source device and the abnormality of the discharge tube itself or abnormality in the magnetron occurs exactly this By sensing and suppressing the occurrence of the magnetron, it is possible to prevent the shortening of life and risk of fire due to the heating of the magnetron, and also to reduce the discharge efficiency of the discharge tube and minimize the power consumption.

Claims (8)

In a microwave discharge light source system in which microwave energy is supplied from a waveguide through a microwave supply port, and the microwave energy is converted into light energy in a resonant cavity and radiated. (1) measuring the intensity of the amount of light emitted from the resonant cavity and comparing it with a set reference value; (2) measuring the current of the magnetron and comparing it with the set reference current when the intensity of the light amount is lower than the set reference value; (3) suppressing the oscillation of the magnetron by determining that the current measured is higher than the reference current as a result of the discharge tube and the metal network; And And (4) if the current measured current is lower than the reference current, determining that the magnetron is abnormal and shutting off the power applied to the magnetron. The method of claim 1, Self-diagnosis method of the electrodeless discharge light source system, characterized in that it has an intensity of the light amount compared to the input current of the magnetron to determine the abnormality of the discharge tube, the metal network. The method of claim 2, Self-diagnosis method of the electrodeless discharge light source system, characterized in that the oscillation of the magnetron is suppressed when the intensity of the light amount corresponding to the level of the current applied to the magnetron is not measured. The method of claim 1, Self-diagnostic method of the electrodeless discharge light source system, characterized in that it further comprises the step of visually displaying whether the discharge tube, the metal mesh and the magnetron. A resonant cavity in which microwave energy is supplied from the waveguide through the microwave supply port, a discharge tube disposed in the resonant cavity to convert microwave energy into energy of light, and a light reflector reflecting light from the discharge tube hole; In the microwave discharge light source device is formed on the front surface of the resonant cavity made of a metal network to block microwave energy and pass light: (1) light quantity detecting means which is installed in a close proximity to an external location of the resonant cavity and measures the amount of light emitted from the metal network; (2) signal processing means for waveform shaping the optical signal detected by the light quantity detecting means; (3) current detecting means for measuring a current generated by the high pressure generating means and supplied to the magnetron; (4) a microprocessor for generating a control signal for controlling an AC power source by determining whether the device is abnormal according to the waveform level of the signal processing means and the current level of the current detecting means; And (5) A self-diagnosis apparatus for an electrodeless discharge light source system, comprising voltage interrupting means for supplying or interrupting commercial AC power to the high-voltage generating means under the control of the microprocessor. The method of claim 5, Self-diagnosis apparatus for an electrodeless discharge light source system, characterized in that the light amount detecting means comprises any one element of a phototransistor and a light conduction cell. The method of claim 5, Self-diagnosis apparatus for an electrodeless discharge light source system, characterized in that it comprises a display means for displaying the abnormal state of the magnetron, the discharge port and the metal network under the control of the microprocessor. The method of claim 5, Self-diagnosis apparatus for an electrodeless discharge light source system, characterized in that the voltage interrupting means is configured by an analog switch.