KR20000012568U - Waste gas treatment device - Google Patents

Abstract

According to the present invention, after the gaseous toxic gas is converted to a non-toxic purified gas and a non-toxic solid granule, the particles are supplied to a cyclone dust collector having a cylindrical shape, and the particles having a relatively high weight in the particles are Centrifugal separation is performed inside the cyclone dust collector by centrifugal force, and the particles contained in the refined gas without being centrifuged due to their fine weight are separated by a filter installed inside the cyclone dust collector so that only the purified gas is discharged to the outside. The present invention relates to a waste gas treatment device, and according to the present invention, a filter device is installed in a cyclone dust collector that collects dust particles generated as a by-product in the process of purifying toxic waste gas. Forms particle removal means to remove particles As well as compactly the size of waste gas processing equipment, not to remove the particles adhering to the filter unit do not have to disassemble the cyclone collector extends significantly the cleaning period of the downtime and waste gas treatment apparatus of the waste gas treatment apparatus.

Description

Waste gas treatment device

The present invention relates to a waste gas treatment device, and more specifically, to a gaseous toxic gas is converted to a non-toxic purified gas and a non-toxic solid granules phase particles, the purified gas and particles are supplied to the cylindrical cyclone dust collector Therefore, particles having a relatively large weight among the particles are centrifuged in the cyclone dust collector by centrifugal force, and particles contained in the refined gas without being centrifuged due to their fine weight are separated by a filter installed inside the cyclone dust collector. The present invention relates to a waste gas treatment device for allowing only purified gas to be discharged to the outside.

In recent years, the semiconductor industry, which has undergone rapid growth and technological development, requires many semiconductor equipment and semiconductor manufacturing processes that are as complex as its usefulness and require high precision.The semiconductor manufacturing process has various toxic, Corrosive and flammable gases are used in large quantities.

For example, CVD (Chemical Vapor Deposition) process, one of the typical semiconductor thin film manufacturing processes, is toxic to a large amount of silane, dichloro silane, ammonia, nitrogen oxide, arsine, phosphine, diboron, boron, trichloride, etc. With the use of gases, they are consumed only in trace amounts during the semiconductor process and are mostly emitted from the process equipment in the form of waste gases. Thus, the waste gases generated after the semiconductor process are very toxic as mentioned above.

In addition, various toxic waste gases are generated in many semiconductor processes such as plasma enhanced CVD, plasma etching, epitaxy deposition, and the like.

As such, the toxic waste gas generated during the semiconductor manufacturing process is very toxic, and if it is released into the air, the toxic waste gas seriously affects the human body and the ecosystem. Thus, the toxic waste gas generated during the semiconductor manufacturing process must meet the legal standards. Is treated and released into the atmosphere.

Thus, the waste gas treatment device necessary for the semiconductor process is non-toxic by decomposing the waste gas into non-toxic gas and by-products by the oxidation reaction when heat is applied to the flammable and toxic waste gas, and by supplying and dissolving the water-soluble waste gas into the aqueous solution. Focusing on chemical reaction with solution, it is separated into dry waste gas treatment device and wet waste gas treatment device.

In the description of the dry waste gas treatment device, an air-waste gas mixing device called a manifold, which mixes the toxic waste gas discharged through the exhaust pipe of the semiconductor facility with the waste gas oxidation air, is mixed in the manifold connected to the manifold. A heating chamber for oxidizing the waste gas by heating the mixer to a predetermined temperature or more, and a collecting chamber for primary separation of the non-toxic particles formed by the phase change of the waste gas oxidized in the heating chamber and the collecting chamber, without being collected in the collecting chamber. It consists of a cyclone dust collector for centrifugal separation from the refinery gas by applying centrifugal force to the particles contained in the refinery gas, and a filter device for collecting and separating the fine particles that are not separated from the refinery gas for the third time. do.

The filter device is filled with a filter member called an absorber so that the refiner gas passes through the refiner and the fine particles are mixed, but passes through the refinery gas but not the fine particles.

The Absorber is a shape in which holes are formed on the surface of the cross-shaped plate or holes are formed on the outer circumferential surface of the cylinder. As the particles and purified gas pass through the filter device, the flow rate is reduced by the Absorber, whereby particles are deposited on the Absorber and purified. Only gas is discharged out of the filter unit and then out through the main duct.

However, the conventional waste gas treatment apparatus has the following complex problems.

First, it is necessary to periodically remove particles trapped in the filter device of the waste gas treatment device so that the overall performance of the waste gas treatment device does not occur due to deterioration of the filter device. In order to periodically remove particles trapped in the filter device, After separating the filter apparatus from the waste gas treatment apparatus, there may be a method of cleaning the filter member housed inside the filter apparatus, a method of spraying and removing a separate cleaning material into the filter apparatus.

When the filter device is separated from the waste gas treatment device as in the former case, this method is very inconvenient to use because the waste gas treatment process must be temporarily stopped, and when spraying a separate cleaning material as in the latter case, Since the particles deposited on the filter member are not easy to be completely removed, the cleaning cycle is shortened and there is a problem that the particles are not completely removed.

Secondly, the particles are not filtered by the filter member filled in the filter device and are discharged to the main duct, so that the efficiency and reliability of the filter device are deteriorated.

Third, there is a problem that the overall size of the waste gas treatment device is increased by the filter device.

Therefore, the present invention was devised in view of the problems of the waste gas treatment device, and an object of the present invention is to install a filter device for finally filtering the particles contained in the purified gas in the cyclone dust collector, which is a dust collector. The overall area of the waste gas treatment system is greatly reduced.

Another object of the present invention is to remove particles deposited on a filter device installed inside a cyclone dust collector of a waste gas treatment device without disassembling the cyclone dust collector.

Another object of the present invention is to scrape off particles deposited on the filter device installed inside the cyclone dust collector.

Another object of the present invention is to remove particles deposited on the filter device by giving an intermittent vibration to the filter device installed inside the cyclone dust collector.

Another object of the present invention is to scrape off the particles while applying intermittent vibration to the particles to the filter device installed inside the cyclone dust collector.

Another object of the present invention will become more apparent from the detailed description of the present invention to be described later.

1 is a conceptual diagram of a waste gas treatment apparatus according to the present invention.

2 is a perspective view of a waste gas treatment apparatus according to the present invention.

Figure 3 is a longitudinal sectional view showing an embodiment of a cyclone dust collector according to the present invention.

Figure 4 is a longitudinal sectional view showing another embodiment of the cyclone dust collector according to the present invention.

Figure 5 is a longitudinal sectional view showing another embodiment of a cyclone dust collector according to the present invention.

Figure 6 is an exploded perspective view of the cyclone dust collector according to the present invention.

In order to achieve the object of the present invention, the waste gas treatment apparatus mixes oxidizing air with waste gas generated during a semiconductor process, and then heats the waste gas-air mixer to a predetermined temperature to generate non-toxic purified gas and particles, and then generates particles. Particles and purified gases are first collected and separated from the purified gas by using the property of being deposited on the cold substance, and particles not separated from the purified gas by the collection are introduced into the cyclone dust collection chamber where centrifugal force is applied. Secondary centrifugation of particles by the difference in weight, and after the particle is removed from the purified gas by installing a filter device in the cyclone dust collection chamber to filter particles that are not easy to centrifuge because the weight is very small After that, the purified gas is separated and discharged into the main duct.

In order to realize the object of the present invention, the filter device is preferably rotated at a predetermined rotational speed inside the cyclone dust collector, and scrapes off particles deposited on the filter device while contacting the filter device rotated in the cyclone dust collector. Particle removal means is provided.

Optionally, the particle removal means comprises a brush attached to and fixed to the cyclone dust collector to scratch the outer surface of the filter device.

Optionally, the particle removing means comprises a vibrator fixed to and attached to the cyclone dust collector to apply intermittent vibration to the outer surface of the filter device.

Preferably, the particle removing means is a vibrator attached to the cyclone dust collector so as to scratch the outer surface of the filter device in the state of first removing the particles deposited on the filter device by applying intermittent vibration to the outer surface of the filter device and Include a brush together.

Preferably, the outer surface of the filter device is pleated to increase the filter area.

Hereinafter, with reference to the accompanying drawings a more detailed configuration and operation of the waste gas treatment apparatus according to the present invention.

1 and 2 attached to the waste gas treatment apparatus 700 according to the present invention as a whole manifold 100, waste gas oxidation chamber 200, particle collection chamber 300 and the cyclone dust collector 400 And a particle container 500.

Specifically, the manifold 100 is a cylinder so as to mix the oxidizing air and the inert gas to prevent the intense oxidation reaction with the oxidizing air and the waste gas supplied from the waste gas exhaust pipe 10 of the semiconductor processing equipment (not shown). The air supply pipe 20 and the inert gas supply pipe 40 are formed in the manifold body 30 having a shape.

In addition, the manifold 100 is provided with a pressure gauge 50 for measuring the negative pressure inside the manifold 100, the pressure gauge 50 serves to detect abnormal operation of the cyclone dust collector 400 to be described later. The pressure gauge 50 inputs a predetermined signal corresponding to the measured pressure to the controller 60, and the controller 60 processes a signal input from the pressure gauge 50 to control actuators 332 and 334 to be described later. Apply.

The waste gas oxidation chamber 200 communicates with the manifold 100 configured as described above, and the waste gas oxidation chamber 200 includes an inner tube (not shown) inserted into a cylindrical heater (not shown) and an outer tube 110 surrounding the heater. ) To heat the waste gas, the oxidizing air and the inert gas mixer to a predetermined temperature.

On the other hand, the particle collection chamber 300 in communication with the waste gas oxidation chamber 200 is in communication with the waste gas oxidation chamber 200 is much more than the particles and purified gas to separate the non-toxic particles formed from the waste gas oxidation chamber 200 from the purified gas. Cooling chamber (not shown) configured to have low temperature to allow particles and purified gas to pass through and condensate on the cold side, and cooling chamber so that particles and purified gas that are not condensed and deposited from the cooling chamber are not discharged to the outside. It is composed of a particle removal unit (not shown) for scraping off the particles deposited on the collecting chamber cover 310, the cooling chamber and the collecting chamber cover 310 surrounding the.

The particles in the form of lumps scraped off by the particle removal unit are introduced into the particle container 500 along the connection pipe 320, and the mixer in which the fine particles and the purified gas are not collected in the cooling chamber is mixed with the collection chamber 300. It is supplied to the cyclone dust collector 400 which is in tangential communication with the end of the mixer pipe 330 in communication with the through-hole formed in the side of the) is performed at the same time centrifugation and filtering.

At this time, the cyclone dust collector 400 is at least two or more in the multi-step, preferably four units are provided in the present invention. In this case, the two cyclone dust collectors 400 are connected in series in a pair, and the four cyclone dust collectors 400 form two cyclone dust collector groups.

At this time, each cyclone dust collector group is again connected in parallel with the mixer pipe 330, the branched mixer pipe 330 to be connected in parallel with the mixer pipe 330, actuator opening and closing valves such as air valve or solenoid valve (332,334) are installed.

As such, the cyclone dust collector group formed by tying two cyclone dust collectors 400 in a pair is connected in parallel to the mixer pipe 330, and the actuator on / off valves 332 and 334 are formed in the branched mixer pipe 330, respectively. When the controller 60 recognizes that an abnormality has occurred in the cyclone dust collector group in which the dust collection is being performed, the controller 60 recognizes that an operation abnormality has occurred by opening only one of the actuator on / off valves 332 and 334. 60 closes the actuator on / off valve of the mixer pipe 330 in communication with the cyclone dust collector group in which dust collection is being performed, and opens the actuator on / off valve in communication with the remaining cyclone dust collector group to stop waste gas treatment. Don't let that happen.

This allows cleaning or repair of the cyclone dust collector group in which a malfunction occurs without interruption of the waste gas treatment process.

After centrifugation and filtering of the particles in the cyclone dust collector 400 is performed, the purified gas is completely discharged through the exhaust duct 600 by the blower 310 in communication with the cyclone dust collector 400. do.

Referring to the cyclone dust collector in which the centrifugation and filtering of the particles are performed as described above in more detail with reference to the accompanying drawings.

First embodiment

Referring to the accompanying drawings, any one of the cyclone dust collector 400 shown in Figure 2 as follows.

Referring to FIG. 3, the cyclone dust collector 400 has a filter device 430 fixedly installed inside the cyclone dust collector body 410, the purified gas exhaust pipe 420, and the cyclone dust collector body 410. It is composed of

More specifically, as shown in FIG. 2, the cyclone dust collector body 410 has a long cylindrical shape with upper and lower ends opened, and the cylinder has a solid shape gradually decreasing in diameter from a predetermined position toward the lower end.

A particle container 500 having a box shape is connected to the opening formed at the lower end of the cylinder whose diameter is reduced compared to the upper end. Referring to FIG. 3 again, a ring-shaped flange 411 is separately provided on the inner side of the upper end of the cylinder, or the flange is formed by bending a predetermined length of the upper end toward the inner side of the upper end of the cylinder. At this time, a plurality of screw fastening holes 411a are formed in the flange 411.

The flange 411 formed on the cyclone dust collector body 410 is fixed to the filter device 430 to be fixed to the interior of the cyclone dust collector body 410.

In this case, as shown in FIG. 2, the filter device 430 may be installed in the cyclone dust collector of the rear stage in which particles having a relatively light weight are collected from two cyclone dust collectors or connected in series.

The filter device 430 installed as described above includes a filter 431 and a support member 432 for fixing the filter 431 to the flange 411 formed on the cyclone dust collector body 410.

The support member 432 is a bushing 432b having a flange 432a formed on an outer circumferential surface thereof, and the size of the support member 432 that can be screwed with the screw fastening hole 411a of the flange 411 formed in the cyclone dust collector body 410 on the flange 432a. Has

The inner diameter of the bushing 432b of the support member 432 extends from the inner circumferential surface of the support member 432 toward the center of the bushing 432b, and another support 432c extends from the inner circumferential surface of the support member 432 to the center of the support 432c. Bushing 432d is formed.

The long shaft 432e is coupled to the bushing 432d, and the filter 431 is fixed to the shaft 432e.

The filter 431 is manufactured by fixing the upper cover 431b and the lower cover 431c made of a metal material at both ends of the bellows-shaped filter member 431a of which the surface is regularly corrugated to increase the surface area.

The upper cover 431b of the filter 431 coupled to the flange 432a of the supporting member 432 has a through hole which is equal to or smaller than the inner diameter of the bushing 432b of the supporting member 432, and has a lower portion of the filter 431. Only the screw fastening hole (not shown) is formed in the cover 431c to be coupled to the aforementioned shaft 432e and then fastened with the nut 432f.

The filter member 431a has a particle size in which particles are not permeated and only purified gas passes.

The end of the purified gas exhaust pipe 420 having an elbow tube shape is screwed to the flange 432 of the support member 432 in the support member 432 formed as described above.

Reference numeral 440 denotes a gasket, and 450 denotes a mixer inlet pipe communicating with the mixing exhaust pipe 330 and attached to a tangential direction of the inner circumferential surface of the cyclone dust collector body 410.

Referring to the operation of the cyclone dust collector 400 according to the first embodiment of the present invention configured as described above, the cyclone dust collector is a particle-purified gas mixed through the mixing exhaust pipe 330 of the collection chamber 310 As the inside of the apparatus body 410 is tangentially introduced into the apparatus body 410 and is pivoted in the tangential direction of the cyclone dust collector body 410, the mixer of the particle and the purified gas receives centrifugal force of the same size.

At this time, the rotational arrangement of the particles is also changed by the difference in the weight of the particles, for example, the heavy particles are turned by the particles by gravity while turning close to the inner wall of the cyclone dust collector body 410 as mentioned above Collected by the collecting container 500, the relatively light particles are weakly affected by the centrifugal force and do not flow directly into the particle collecting container 500, but are continuously turned in the central portion of the cyclone dust collector body 410.

At this time, the pressure distribution in the cyclone dust collector body 410 and the aforementioned filter device 431 and the purified gas exhaust pipe 420 corresponds to the space between the cyclone dust collector body 410 and the filter device 431. The pressure of the portion is the largest, the pressure of the refinery gas exhaust pipe 420 is the lowest, and the inside of the filter device 431 is similar to the pressure of the refinery gas exhaust pipe 420, the purified gas and the particles naturally by the pressure distribution gradient It is intended to be introduced into the filter device 431.

However, since the particles cannot pass through the filter member 431a, only the purified gas passes through the filter member 431a and is discharged to the purified gas exhaust pipe 420.

The first embodiment described above can reduce the overall size of the waste gas treatment apparatus 700 according to the present invention by installing the filter device 431 inside the cyclone dust collector 400, but the cyclone dust collector In order to solve this problem, the particles 400 deposited on the filter device 431 must be removed by periodically dismantling the 400 and the particles deposited on the filter device 431 by disassembling the cyclone dust collector 400. Another embodiment has been described which eliminates the need to remove.

Second embodiment

The cyclone dust collector 400 according to the second embodiment is composed of a cyclone dust collector body 460, a purified gas exhaust pipe 470, and a filter device 480 as a whole, and the filter device 480 is again a filter ( 482, filter support unit 486, filter drive unit 488 and particle removal member 489.

Like the first embodiment, the cyclone dust collector body 460 has a long cylindrical shape with upper and lower ends opened and has a solid shape gradually decreasing in diameter from a predetermined position of the cylinder to the lower end.

A particle container 500 having a box shape is connected to the opening formed at the lower end of the cylinder having a reduced diameter as compared to the upper end, and a ring-shaped flange 461 is installed on the inner side of the upper end of the cylinder, or a predetermined length of the upper end is provided. The flange 461 is formed by bending in the direction of the inner side of the upper end of the cylinder. At this time, a plurality of screw fastening holes 461a are formed in the flange 461.

The filter support unit 486 supporting the filter 482 of the filter device 480 is installed at the flange 461 of the cyclone dust collector body 460 formed as described above.

The filter support unit 486 will be described in more detail. The first stepped portion 483a is formed on the upper circumferential surface of the fixed support body 483 having the outer diameter and the inner diameter formed by lathe machining, and the first stepped 483a. ) Has a ring-shaped support plate 483b having an inner diameter seated on the first stepped 483a and an outer diameter slightly larger than the outer diameter of the fixed support body 483, and thereafter, the ring-shaped support plate 483b and the fixed support body 483 are seated. The first step 483a of) is combined.

In addition, the upper inner circumferential surface of the fixed support body 483 is processed to expand the inner diameter by boring or drilling, so that the second stepped 483c is formed on the upper inner circumferential surface of the fixed support body 483, and the fixed support body ( The lower inner peripheral surface of the 483 is processed to expand the inner diameter by boring or drilling, and then the sealing ring 483d is installed at the portion where the inner diameter is extended so as to slightly protrude from the inner diameter of the fixed support body 483. Reference numeral 483e denotes a sealing ring support.

As the inner diameter of the fixed support body 483 formed as described above, a cylindrical rotary support body 484 is inserted.

A third step 484a is formed in a direction from the upper end of the outer circumferential surface of the rotary support body 484 to the lower end, and the filter support plate 484b in close contact with the filter 482 to be described later on the lower end of the rotary support body 484. ) Is coupled by screws or the like.

The second step 483c and the rotary support body 484 formed on the outer circumferential surface of the fixed support body 483 so as to rotatably fix the rotary support body 484 formed as described above with respect to the fixed support body 483 with minimal friction. Ball bearing 485 is interposed on the third stepped 484a surface formed on the outer circumferential surface of the bar, and the outer ring 485b of the ball bearing 485 is seated on the second stepped 483c, and the third stepped 484a The inner ring 485a of the ball bearing 485 is seated therein.

Although the ball bearing 485 may be coupled to the rotary support body 484 and the fixed support body 483 in a press fit manner, the ball bearing 485 may be used to clean or repair the rotary support body 484 and the fixed support body 483. Disassembly / assembly is very difficult and it is preferable to fix it as follows.

First, the inner diameter of the fixed support body 483 is the second step 448c of the fixed support body 483 and the third step 484a of the rotary support body 484 with the rotary support body 484 inserted. The inner ring 485a and the outer ring 485b of the ball bearing 485 are simply inserted. At this time, the female screw portion is formed in the portion cut to form the third step 484a.

Subsequently, a washer-shaped spacer 484c is inserted into the female screw portion formed in the outer diameter of the rotary support body 484, and a lock nut 484d is fastened to the female screw portion formed in the outer diameter of the rotary support body 484. The inner ring 485a of 485 is strongly fixed.

Thus, even if the inner ring 485a of the ball bearing 485 is firmly fixed by the lock nut 484d, the rotation supporting body 484 including the ball bearing 485 is not fixed if the outer ring 485b of the ball bearing 485 is fixed. The outer ring 485b of the ball bearing 485 is fixed by a separate ball bearing fixing plate 483f that is fixed to the fixed supporting body 483 because it is to be separated from the fixed supporting body 483.

Meanwhile, at least two supports 484e extend toward the center of the rotary support body 484 on the upper inner circumferential surface and the lower inner circumferential surface of the cylindrical rotating support body 484, and the bushing is welded to the end of the support 484e. And the like, and an elongated shaft 484f is inserted into the bushing to be integrally fixed.

The ring-shaped support plate 483b of the fixed support body 483 configured as described above is detachably coupled to the purified gas exhaust pipe 470 in the form of an elbow tube, and the shaft fixed to the support 484e of the purified gas exhaust pipe 470. The through hole 472 is formed at a position corresponding to the 484f, and the rotating shaft 488b of the motor 488a is inserted into the through hole 472, and then the rotating shaft 488b and the shaft 484f of the motor 488a are inserted. ) Is pin coupled.

On the other hand, the upper cover 482a and the lower cover 482b of the filter 482 are inserted through the shaft 484f so that the upper cover 482a of the filter 482 supports the filter fixing bushing 484g and the filter support. The bottom cover 482b of the filter 482 is tightly fixed to the plate 484b, and is firmly fixed by a nut fitted to the shaft 484f.

In order to rotate the filter 482 while having a complicated configuration as described above, the particles attached to the filter 482 can be removed without disassembling the cyclone dust collector 400. 483 is provided with a particle removing member according to the following three embodiments.

In the first embodiment, the particle removing member is a brush 489b which physically scrapes off the pleated filter member 482c of the filter 482, and the brush 489b is coupled to the brush holding member 489a and the brush holding member ( 489a is coupled to the fixed support body 483 again to remove the particles deposited on the filter member 482c while the brush 489b contacts the pleated filter member 482c.

In a second embodiment, as shown in FIG. 5, the particle removing member intermittently impacts the pleated filter member 482c of the filter 482 such that the particles are removed from the filter member 482c by the impact force. Using the principle, the fixing support body 483 is provided with a fixing member 489c, and the fixing member 489c has a vibrator 489d positioned between the pleats and the pleats of the filter 480 to be elastically installed. As the vibrator 489d strikes the pleats relatively strongly, the particles attached to the filter 480 are blown off by the impact.

In the third embodiment, by using the above-described two embodiments in combination, the particle removing member is provided with a plurality of fixing members 489a and 489c on the fixing support body 483, so that any one of the fixing members 489a and 489c can be installed. One is provided with a vibrator (489d) that impacts the filter member 482c, and the remaining fixing members (489a, 489c) by removing the particles deposited on the filter member 482c by scratching the filter member 482c, the filter member Particles deposited at 482c can be more efficiently removed.

As such, the filter support unit 486, the filter driving unit 488, the filter 482, the particle removing member 489, and the purified gas pipe 470 may include a flange formed at an open upper end of the cyclone dust collector body 480. After being seated at 461, the flange 461 and the ring-shaped support plate 483b of the filter support unit 486 are coupled, and a blower 310 is installed at an end of the refinery gas pipe 470 so that the cyclone dust collector ( 400), a strong negative pressure acts on the polymer collection chamber 300, the waste gas oxidation chamber 200, and the manifold 100.

Referring to the accompanying drawings, the operation of the waste gas treatment apparatus according to the present invention configured as described above is as follows.

First, as the waste gas exhausted from the exhaust port of the semiconductor processing equipment by the blower 310 flows into the manifold 100, the waste gas is mixed with air and an inert gas to form a mixer, and the mixer immediately enters the waste gas oxidation chamber 200. It is oxidized by the formed high temperature heat and converted to purified gas and particles.

Thereafter, the particles mixed with the hot refined gas are condensed and deposited on the walls of the cooling chamber of the collecting chamber 300 so that the particles are separated first from the purified gas, and the particles and the purified gas not separated by the primary separation are blowers ( Due to the negative pressure of 310 is introduced into the cyclone dust collector 400 again along the mixer pipe 330.

At this time, when the mixer of the particle and the purified gas passes through the cyclone dust collector 400, the mixer flows in a tangential direction along the inner wall of the cyclone dust collector 400, the inside of the cyclone dust collector 400 The vehicle turns while having a predetermined turning strength.

At this time, the same centrifugal force is applied to the refined gas and the particles, the heavy particles are compared to the refined gas by the second centrifugal separation according to the weight, the heavy particles are rotated along the inner wall of the cyclone dust collector body 460 and then the gravity direction It is collected by the particle collector 500 while falling little by little.

Particles and purified gas which are too fine in weight and are not collected even by secondary centrifugation are introduced into the low pressure filter 482 even in the cyclone dust collector body 460, but the mesh of the filter 482 Even though refined gas smaller than) is introduced into the filter 482, particles larger than the mesh of the filter 482 do not flow into the filter 482 but are agglomerated by being deposited on the filter 482.

The filter 482 is a brush 489b or a vibrator 489d installed on the fixed support body 483 so as to contact the filter 482 while rotating at a predetermined rotational speed by the rotation support body 484 and the filter drive unit 488. The particles deposited on the outside of the filter 482 are removed from time to time.

At this time, the particles removed from the filter 482 by the brush 489a or the vibrator 489d are rotated by the action of the centrifugal force formed in the cyclone dust collector body 460 to be reattached to the filter 482. Should not be high.

Although the embodiments described above with reference to the accompanying drawings illustrate that the particles generated after pyrolyzing toxic waste gas generated in the semiconductor process are subjected to centrifugal separation and filtering at the same time by a cyclone separator. To install only the cyclone dust collector with the filter according to the present invention separately to remove the fine particles, or to install only the cyclone dust collector with the filter according to the present invention where you want to remove the mist consisting of fine particles It is apparent that the cyclone dust collector incorporating the filter according to the present invention can be widely applied without departing from the technical spirit of the present invention.

As described above in detail, a filter device is installed inside the cyclone dust collector which collects dust particles generated as a by-product during the purification of the toxic waste gas from the waste gas treatment device, and removes particles deposited on the filter device. By forming the particle removal means to compact the size of the waste gas treatment device, it is not necessary to disassemble the cyclone dust collector in order to remove particles deposited on the filter device, so that the waste gas treatment device is stopped and the cleaning cycle of the waste gas treatment device is eliminated. It is effective to significantly extend.

Claims (9)

A manifold receiving a toxic waste gas and mixing air and an inert gas; A waste gas oxidation chamber configured to receive and oxidize the mixer mixed in the manifold; A capture chamber for firstly collecting purified gas and solid by-products formed in the waste gas oxidation chamber; It includes a cyclone dust collector for collecting the particles by applying a centrifugal force to the particles and the purified gas not collected in the collection chamber, The cyclone dust collector includes a cyclone dust collector body for generating centrifugal force to the particles and the purified gas; A purified gas pipe communicating with the cyclone dust collector body; And a filter means installed in the cyclone dust collector body so as to communicate with the purified gas pipe. The method of claim 1 wherein the filter means A support plate installed inside the cyclone dust collector body and having a through hole formed therein; And a filter installed in the through hole of the support plate and discharging only the purified gas from the particles and the purified gas introduced into the cyclone dust collector body to the purified gas pipe. The method of claim 1 wherein the filter means A support plate having a through hole formed inside the cyclone dust collector body, a fixed support body having a cylindrical shape fixed to the through hole, a rotating support body having a cylindrical shape inserted into the fixed support body, and the fixed support body and the rotation A filter support unit including a friction reducing means installed between the support bodies and a shaft fixed to the center of the rotatable support body; A filter driving unit installed to penetrate the purified gas pipe and having a rotating shaft coupled to the shaft; A filter fixed to the rotatable support body by the shaft in close contact with the rotatable support body; And particle removal means for contacting the filter to remove the particles deposited on the filter. 4. The waste gas treatment apparatus according to claim 3, wherein a sealing ring is further provided between the fixed support body and the rotatable support body to prevent the particles from entering. The method of claim 3 wherein the particle removal means A support member installed on the fixed support body; Waste gas treatment device, characterized in that coupled to the support member and comprises a brush (bursh) in contact with the filter. The method of claim 3 wherein the particle removal means A support member installed on the fixed support body; And a vibrator coupled to the support member to generate an intermittent vibration in the filter. The method of claim 3 wherein the particle removal means A plurality of support members installed on the fixed support body; A vibrator coupled to any one of the support members to generate an intermittent vibration in the filter; Waste gas treatment device, characterized in that coupled to any one of the supporting member to the brush to scratch the surface of the filter. 8. The filter according to claim 2, wherein the filter comprises: an upper cover having a predetermined area and a lower cover having a screw fastening hole; And a filter member formed between the upper cover and the lower cover. 9. The waste gas treating apparatus according to claim 8, wherein the surface of the filter member is corrugated to increase the surface area.