KR20000000924U - Glass Substrate Collision Avoidance Device for Dry Equipment - Google Patents

Abstract

The present invention discloses a glass substrate collision avoidance device for dry equipment. The disclosed subject matter is a vacuum robot having four laser sensors (10) consisting of a light emitting portion (11) and a light receiving portion (12), which are provided at the bottom of the exit load lock chamber (1), and are arranged in the exit load lock chamber (1). Each edge of the glass substrate G placed on (6) is sensed. The signal sensed by the laser sensor 10 is processed by the sensor controller 20 and then input to the main controller 30 that controls the operation of the entire dry equipment. The main controller 30 sends a control signal to the vacuum robot controller 40, and when the glass substrate G is in an unaligned state, the operation of the vacuum robot 6 is stopped so that the glass substrate G is gated 5. Can be prevented from being damaged due to a crash.

Description

Glass Substrate Collision Avoidance Device for Dry Equipment

The present invention relates to an apparatus for preventing glass substrate collision of dry equipment, and more particularly, to an apparatus for preventing a glass substrate carried between a reaction chamber of a dry equipment and a load lock chamber from colliding with a gate provided between each chamber. It is about.

In general, the load lock chamber of dry equipment is a chamber into which the glass substrate is to wait before loading or unloading the glass substrate into the reaction chamber. These chambers are divided into inlet load lock chambers waiting before entry and exit load lock chambers to wait for a while in consideration of rapid temperature difference after the export.

A schematic block diagram of a conventional reaction chamber and a load lock chamber is shown in FIG.

Referring to FIG. 1, two reaction chambers 3 are connected to both sides of the inlet load lock chamber 1, and an outlet load lock chamber 2 is connected to the front of the inlet load lock chamber 1. . Gates 5 are provided between the chambers 1, 2, 3. On the other hand, the inlet load lock chamber 1 is provided with the vacuum robot 6 which selectively carries in / out of a glass substrate with each reaction chamber 3.

At the exit side of the exit load lock chamber 2, a conveyance chamber 4 through which the glass substrate is conveyed is provided, and the glass substrate is temporarily placed at an entrance of the conveyance chamber 4, that is, the position adjacent to the exit load lock chamber 2. The standby robot 7 which waits in the holding state is arrange | positioned. Two cassettes 8 in which the glass substrates are stacked are stored in the transfer chamber 4. A gate 5 is also provided between the standby robot 7 and the exit load lock chamber 2.

By the way, conventionally, the glass substrate may not be aligned on the arm of the vacuum robot 6, but the arm enters each gate 5 in such a state, and the glass substrate collides with the gate 5 and is damaged. The incident happened frequently.

The present invention devised to solve the problems described above, by detecting whether the glass substrate is aligned in the right position on the arm of the vacuum robot, and stops the operation of the vacuum robot if not aligned in the correct position, the glass substrate An object of the present invention is to provide an apparatus for preventing collision of glass substrates in dry equipment that can prevent damage caused by collision with a gate.

1 is a view showing a layout relationship between a general load lock chamber and a reaction chamber

Figure 2 is a block diagram schematically showing a glass substrate collision avoidance apparatus according to the present invention

Figure 3 is a view showing the position where the laser sensor which is the main part of the present invention is installed on the bottom surface of the exit load lock chamber

FIG. 4 is an enlarged perspective view of part IV of FIG. 3.

-Explanation of symbols for the main parts of the drawing-

1-Exit Roadlock Chamber 5-Gate

6-Vacuum Robot 10-Laser Sensor

11-light emitting unit 12-light receiving unit

20-Sensor Controller 30-Main Controller

40-vacuum robot controller

The present invention is made in the following configuration to achieve the above object.

The exit load lock chamber is disposed between two process chambers in which the dry process is performed, and a gate is provided therebetween. An inlet load lock chamber is disposed on the outlet side of the outlet load lock chamber, and a gate is provided therebetween. The vacuum robot which conveys a glass substrate to each chamber is arrange | positioned at an exit load lock chamber.

On the bottom surface of the exit load lock chamber, a laser sensor composed of a light emitting unit and a light receiving unit for detecting an edge of the glass substrate is installed. The electrical signal of the laser sensor is input to the sensor controller, and the output signal of the sensor controller is input to the main controller which controls the overall operation of the dry equipment. The control signal of the main controller is input to the controller of the vacuum robot to control the operation of the arm of the vacuum robot according to whether the glass substrate is aligned in position.

According to the present invention having the above-described configuration, when the laser emitted from each light emitting part of the laser sensor is not transmitted to the light receiving part by hitting each corner of the glass substrate, it means that the glass substrate is aligned in the right position, and thus the operation of the vacuum robot. Is continued, on the other hand, if the laser is input to any one of the light receiving sections, it means that the glass substrate is not aligned in the right position, thereby immediately stopping the operation of the vacuum robot, thereby preventing the glass substrate from colliding with the gate and breaking. do.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Figure 2 is a schematic block diagram showing a glass substrate collision preventing device according to the present invention, Figure 3 is a perspective view showing a position where the laser sensor which is the main part of the present invention is disposed on the bottom surface of the exit load lock chamber, Figure 4 It is the detail which showed the IV site | part of 3 and expanded.

First, as shown in FIG. 3, four laser sensors 10 are installed on the bottom of the exit load lock chamber 1. Each laser sensor 10 is composed of a light emitting portion 10 and a light receiving portion 11, as shown in Fig. 2, so that the glass is placed on the arm of the vacuum robot 6 disposed in the exit load lock chamber 1 The four edges of the board will be detected. Each laser sensor 10 fits into a hole formed in the bottom of the exit load lock chamber 1, as shown in more detail in FIG.

In FIG. 2, the electrical signal sensed by the laser sensor 10 is input to the sensor controller 20, and the signal output from the sensor controller 20 is input to the main controller 30 that controls the operation of the entire dry equipment. . The main controller 30 transmits a control signal to the controller 40 of the vacuum robot according to the input signal, whereby the operation of the vacuum robot 6 is controlled according to whether the glass substrate is aligned.

Hereinafter, the operation of this embodiment configured as described above will be described in detail.

In order to convey the glass substrate G from the exit load lock chamber 1 to the process chamber or the inlet load lock chamber, the vacuum robot 6 in which the glass substrate G is placed in front of the gate 5 installed between the respective chambers. Cancer will be located.

At this time, the laser is irradiated vertically upward from four light emitting parts 11. If four lasers are not detected at each light receiving unit 12, it means that each laser hits the glass substrate G, and thus the glass substrate G is recognized as being aligned in position. Therefore, the main controller 30 does not send a stop signal to the vacuum robot controller 40, and the vacuum robot 6 conveys the glass substrate G to the chamber.

However, if a laser is detected at either light receiving portion 12, it means that the laser has not hit the glass substrate G, and thus it is recognized that the glass substrate G is not aligned in position. The signal is transmitted to the main controller 30 via the sensor controller 20, and the main controller 30 transmits a stop signal to the vacuum robot controller 40. Therefore, the carry-in operation | movement of the vacuum robot 6 is stopped and it can prevent beforehand that glass substrate G collides with the gate 5 and is damaged.

According to the present invention as described above, the glass substrate (G) by detecting the position alignment state in advance in the laser sensor 10, the operation of the vacuum robot 6 is controlled, the glass substrate (not aligned in position) As G) enters as it is, it is possible to prevent a situation of collision with the gate 5 and being damaged in advance.

On the other hand, the present invention is not limited to the above-described specific preferred embodiment, any person having ordinary knowledge in the field to which the present invention belongs without departing from the gist of the present invention claimed in the claims can be variously modified. will be.

Claims (1)

It is a device that prevents the glass substrates conveyed to each process chamber or inlet load lock chamber from being aligned in position by the vacuum robot disposed in the outlet load lock chamber of the dry equipment and collides with the gate provided between the respective chambers. , Four laser sensors installed on a bottom surface of the exit load lock chamber and configured to emit a laser to sense each corner of the glass substrate placed on the vacuum robot, and a light receiver to detect the laser; A sensor controller configured to output an electrical signal sensed by the laser sensor; A main controller configured to input an electrical signal output from the sensor controller and output a signal for controlling the operation of the vacuum robot according to the input signal; And a vacuum robot controller configured to receive an output signal of the main controller and control the operation of the vacuum robot.