KR19990066155A - Management Method of Semiconductor Equipment with Multi Chamber - Google Patents

Abstract

After selecting the chamber having the best condition among the plurality of chambers installed in the semiconductor facility, the chamber prioritization module is brought online to the semiconductor facility management system for the process to proceed. The semiconductor equipment management method which has is disclosed.

According to the present invention, the method includes periodically checking a state of a chamber in which a plurality of semiconductor devices are installed, displaying the chamber state by receiving the confirmed state data of the chamber, and referring to the displayed state of the chamber. Selecting the step, and characterized in that it comprises the step of proceeding the process by the selected chamber.

Description

Management Method of Semiconductor Equipment with Multi Chamber

The present invention relates to a method for managing a semiconductor device having a multi-chamber, and more particularly, to select a chamber having the best state among a plurality of chambers installed in the semiconductor device, and then prioritize the chamber to the semiconductor facility management system so that the process proceeds. The present invention relates to a method for managing a semiconductor device having a multi-chamber that increases the efficiency of chamber management and chamber operation by bringing the ranking module online.

The products produced by the home appliance industry and the computer industry, which are rapidly developing in recent years, are all pursuing miniaturization with high performance.

As such, the pursuit of miniaturization and high performance of the product requires, among other things, the need for semiconductor products with high integration. For this reason, various developments of semiconductor products have been continuously conducted in order to realize more improved performance of semiconductor products.

In addition, in order to produce a single semiconductor product, a number of manufacturing processes and a plurality of semiconductor equipments for performing the manufacturing process must be performed several times. Recently, development of a method for managing semiconductor equipment installed in a semiconductor production line is rapidly progressing. It is true. This is because the operation efficiency of the semiconductor equipment management method with the improved function can increase the operation efficiency in actual operation of the production line.

1 is a block diagram showing a system for managing such a conventional semiconductor facility.

The conventional semiconductor equipment management system is a semiconductor equipment A (60), a semiconductor equipment B (70), a semiconductor equipment C (80), where the semiconductor equipment A (60), a semiconductor equipment, which actually proceeds with the process and actually manufactures a semiconductor product. B 70, semiconductor equipment C 80 are all assumed to be the same semiconductor equipment) and semiconductor equipment A, B, C (60, 70, 80) process proceeding sequence and various data required for the process It includes a host (10) for downloading the semiconductor equipment A, B, C (60, 70, 80) to support the semiconductor equipment A, B, C (60, 70, 80) to proceed with the process Doing.

In addition, the semiconductor facilities A, B, C (60, 70, 80) and the host 10 are brought online with each other so that the host 10 can communicate with each other. For each of the semiconductor equipment A (60), semiconductor equipment B (70), and semiconductor equipment C (80), an online server A (30), an online server B (40), and an online server C (50) are respectively installed correspondingly. have.

In addition, the online server A (30), the online server B (40), the online server C (50) is again integrated control of the online servers A, B, C (30, 40, 50) and host the results according to the control (10) On the host 10, the online server integrated management module 20 is online.

In more detail, the chambers I (62, 72, 82) and the chambers that perform a plurality of processes are performed in the semiconductor equipment A 60, the semiconductor equipment B 70, and the semiconductor equipment C 80, which all perform the same process. II (64, 74, 84) and chamber III (66, 86) are provided.

At least two of these chambers are provided so that the process proceeds even when the chamber is in an online down state and the chamber state is not able to proceed with the process in the chamber.

In addition, the semiconductor equipment A 60, the semiconductor equipment B 70, and the semiconductor equipment C 80 mentioned above are connected to the online servers 30, 40, and 50 by the RS-232C protocol or the SECS protocol. Online, the online server 30, 40, 50, the online server integrated management module 20, the host 10 is online by the TCP / IP protocol.

When managing the semiconductor facilities 60, 70, and 80 by the conventional semiconductor equipment management system configured as described above, the worker is any one of the semiconductor equipment A 60, the semiconductor equipment B 70, and the semiconductor equipment C 80. After checking the state of the plurality of chamber I (62, 72, 82), chamber II (64, 74, 84), chamber III (66, 86) installed in the chamber, to perform the process in the chamber capable of performing the process In order to transmit a process start wait signal to the host 10, the host 10 downloads the process proceedings and all data necessary for performing the process to the semiconductor facilities A, B, and C (60, 70, 80) and installs the semiconductor equipment. A, B, C (60, 70, 80) is to perform the process in the chamber specified by the operator.

However, in the semiconductor equipment management method having such a conventional multi-chamber, all the multi-chambers are managed by a worker by hand. The reason is that it is difficult to store and manage many abnormal conditions that may occur in multiple chambers in the host. For this reason, it is difficult for an operator to identify the state of each of the multi-chambers installed in the semiconductor facilities scattered on the semiconductor production line, so it is difficult to search for the chamber having the most optimal state for the semiconductor process. There was this.

Accordingly, the present invention has been made in view of such a conventional problem, and an object of the present invention is to communicate with a semiconductor facility and an on-line server and the on-line server integrated management modules, thereby providing a multi-chamber currently installed in the semiconductor facility. The state (RUN, DOWN, IDLE stature) can be known at once to optimize the management of the multi-chamber.

FIG. 1 is a conceptual diagram illustrating a method of managing a semiconductor facility having a conventional multi-chamber.

2 is a conceptual diagram illustrating a method of managing a semiconductor facility having a multi-chamber according to the present invention.

3 is a view illustrating a chamber state shown in an input / output monitor installed at an operator side.

4 is a flowchart illustrating a method for managing a semiconductor device having a multi-chamber according to the present invention.

The semiconductor device management method having a multi-chamber according to the present invention for achieving the object of the present invention comprises the steps of periodically checking the state of the chamber in which a plurality of semiconductor equipment is installed, and receiving the state data of the identified chamber chamber Displaying a state, selecting a chamber with reference to the displayed state of the chamber, and performing a process by the selected chamber.

Preferably, the chamber state checking step includes the step of checking the down, idle, run state of the chamber.

Preferably, after the step of confirming the chamber state, characterized in that it comprises the step of downloading the chamber state data to the device usage prioritization module.

Preferably, displaying the chamber status comprises the device usage prioritization module transmitting status data of the chamber to a monitor of the O / I computer.

Hereinafter, a semiconductor device management method and system having a multi-chamber of the present invention will be described in detail. First, the semiconductor device management system having a multi-chamber of the present invention will be described in detail with reference to FIG. 3.

In the semiconductor equipment management system having a multi-chamber, the semiconductor equipments A, B, C (160, 170, 180) and the semiconductor equipment A, B, C (160, 170, 180) having the multi-chambers which perform the same process as a whole are optimal. The semiconductor device A, B, C (160, 170, 180) to bring the host 100 and the semiconductor equipment A, B, C (160, 170, 180) and the host 100 online with each other to provide a process sequence and data so that the process can be performed. And an on-line server (130, 140, 150) that is online with the multi-chambers, an on-line server integrated management module (150) for controlling and controlling the on-line server (130, 140, 150), and the semiconductor equipment A, B, C (160, 170, 180) It is provided with a device use priority determination module 200 for receiving the state data of the multi-chambers installed in the display and display it to the operator.

These components will be described in more detail below.

In the semiconductor equipment A 160, the semiconductor equipment B 140, and the semiconductor equipment C 150 which perform the same process, the chambers I (162, 172, 182), chambers II (164, 174, 184), and chamber III (166, 186), in which the processes are actually performed, are respectively provided. It is installed. Some of the chambers I, II, and III may be installed in the semiconductor facilities A, B, and C (160, 170, 180), and all may be installed.

In addition, the semiconductor facilities A, B, and C (160, 170, 180) having the multi-chambers are online with the online server A 130, the online server B 140, and the online server C 150. At this time, the semiconductor equipment A, B, C (160, 170, 180) and the online servers A, B, C (130, 140, 150) are mutually communicated by the RS-232C method or SECS protocol.

In addition, the online servers A, B, and C (130, 140, 150), which are online on the semiconductor facilities A, B, and C (160, 170, 180), respectively, are online with the online server integrated management module 150 that controls the respective online servers.

Meanwhile, the online server integrated management module 150 is online with the host 100 and the device usage priority determining module 200.

The device use priority determination module 200 receives chamber state data checked from the online servers A, B, and C (130, 140, and 150), and the input data is O online with the device use priority determination module 200. / I Computer Displayed by the monitor.

By simply observing the status of the O / I monitor, the operator can identify the chamber in the current process run state, the idle state chamber, and the chamber in the down state. You can determine if it is most effective.

In this way, after the operator selects a chamber through the O / I monitor and transmits the selected chamber to the host 100, the chamber becomes a process ready state, and all the necessary processes for the process from the host 100 are performed. Once the data is downloaded to the semiconductor facility where the chamber is installed, the process begins.

Referring to the accompanying drawings, a management method by the semiconductor facility management system having such a multi-chamber is as follows.

First, the online server periodically checks a plurality of chamber states installed in a semiconductor facility to generate a plurality of chamber state data. In addition, the semiconductor equipment also periodically transmits the state data of the chambers to the online server so that the online server can recognize the current state of the chambers (step 10).

The online server downloads the plurality of chamber status data back to the device usage prioritization module, and the device usage prioritization module sends the current chamber status data back to the O / I monitor so that the operator displays the displayed chamber status. (Step 20).

The operator then analyzes the chamber state data displayed on the O / I monitor to determine which semiconductor facility and chamber will perform the optimal process (step 30).

4 is a diagram illustrating chamber state data displayed on an O / I monitor.

Referring to the accompanying drawings, a chamber I, a chamber II, and a chamber III are installed in the semiconductor facility A, chamber I and chamber II are installed in the semiconductor facility B, and chamber I and chamber II are installed in the semiconductor facility C. 2 shows that chamber III is formed.

In addition, the semiconductor equipment A shown in the current O / I monitor shows that the chambers I and II are in the down state, and the process is not possible at present, and the chamber III is in the process standby state.

In addition, the semiconductor equipment B shown in the O / I monitor shows that both chambers I and II are currently in process.

In addition, the semiconductor equipment C shown in the current O / I monitor shows that the chambers I, II, and III are all in the process standby state. Select the chamber.

Naturally, the current O / I monitor shows that the operator will select the semiconductor equipment C with the best condition of the semiconductor equipment and chamber, and if the semiconductor equipment B finishes the process if the semiconductor equipment C cannot be performed for unavoidable reasons, Or a series of steps to quickly recover the down state of semiconductor equipment A.

After that, when a semiconductor facility and a chamber are selected to perform a semiconductor process, an operator prepares a process in the semiconductor facility and a chamber, and downloads data necessary for the process, environment, and other processes necessary for the process from the host to the semiconductor facility. (Step 40).

Thereafter, when the downloading of the process data from the host is completed, the worker performs the process in the semiconductor facility and the chamber (step 50). When the process is performed, the on-line server transmits the completion of the process to the device use prioritization module again, so that the device use prioritization module has a semiconductor having an optimal process environment through the connected O / I monitor. Displays the fixtures and chambers.

As described in detail above, the semiconductor device and the online server online transmit the chamber state of the multi-chamber installed in the semiconductor device to the device use priority determining module, and transmit the current chamber state data from the device use priority module. It can be sent to the display unit so that the operator can see at a glance the status of multiple semiconductor equipment and multiple chambers at a glance so that the process can be performed in which chamber and which chamber is currently down or idle. It is effective to manage.

Claims (4)

Periodically checking a state of a chamber in which a plurality of semiconductor facilities are installed; Receiving the state data of the chamber and displaying the chamber state; Selecting the chamber with reference to the displayed state of the chamber; And processing the process by the selected chamber. The method of claim 1, wherein the checking of the chamber state includes checking down, idle, and run states of the chamber. 2. The method of claim 1, including downloading chamber state data to a device usage prioritization module after the step of identifying the chamber state. 5. The semiconductor of claim 4, wherein displaying the chamber status comprises transmitting, by the device usage prioritization module, status data of the chamber to a monitor of an O / I computer. How to manage your equipment.