KR19990030876A - Facility structure for monitoring static electricity - Google Patents

Facility structure for monitoring static electricity Download PDF

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Publication number
KR19990030876A
KR19990030876A KR1019970051333A KR19970051333A KR19990030876A KR 19990030876 A KR19990030876 A KR 19990030876A KR 1019970051333 A KR1019970051333 A KR 1019970051333A KR 19970051333 A KR19970051333 A KR 19970051333A KR 19990030876 A KR19990030876 A KR 19990030876A
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KR
South Korea
Prior art keywords
static electricity
monitoring
work
facility structure
static
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KR1019970051333A
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Korean (ko)
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KR100448941B1 (en
Inventor
정도순
Original Assignee
윤종용
삼성전자 주식회사
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Priority to KR1019970051333A priority Critical patent/KR100448941B1/en
Publication of KR19990030876A publication Critical patent/KR19990030876A/en
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Publication of KR100448941B1 publication Critical patent/KR100448941B1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/12—Measuring electrostatic fields or voltage-potential
    • G01R29/14—Measuring field distribution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R13/00—Arrangements for displaying electric variables or waveforms
    • G01R13/02—Arrangements for displaying electric variables or waveforms for displaying measured electric variables in digital form
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0046—Arrangements for measuring currents or voltages or for indicating presence or sign thereof characterised by a specific application or detail not covered by any other subgroup of G01R19/00
    • G01R19/0061—Measuring currents of particle-beams, currents from electron multipliers, photocurrents, ion currents; Measuring in plasmas
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/15—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on an electrochromic effect
    • G02F1/163—Operation of electrochromic cells, e.g. electrodeposition cells; Circuit arrangements therefor
    • G02F2001/1635—Operation of electrochromic cells, e.g. electrodeposition cells; Circuit arrangements therefor the pixel comprises active switching elements, e.g. TFT

Abstract

이 발명은 정전기 모니터링이 가능한 박막 트랜지스터-액정 표시 장치의 측정 설비 구조에 관한 것으로서,The present invention relates to a measurement facility structure of a thin film transistor-liquid crystal display device capable of static electricity monitoring.

정전기가 취약한 부위의 이온 밸런스를 맞추기 위한 이온 블로우와, 정전기를 측정하기 위한 정전기 측정용 센서, 이 정전기 측정용 센서를 통해 감지된 정전기를 디지탈로 표시하기 위한 표시부, 그리고 처음 작업 시작시 측정된 정전기값과 작업이 완료된 후 측정된 정전기값을 비교함으로써 작업 중 발생한 정전기를 모니터링할 수 있게 하는 제어기를 포함한다.Ion blow to balance ions in areas where static electricity is vulnerable, static electricity measuring sensor to measure static electricity, display to digitally display static electricity sensed by this static electricity measuring sensor, and static electricity measured at the start of the first work And a controller to monitor the static electricity generated during the operation by comparing the value with the static value measured after the operation is completed.

Description

정전기 모니터링이 가능한 설비 구조Facility structure for monitoring static electricity

이 발명은 정전기 모니터링이 가능한 박막 트랜지스터-액정 표시 장치의 측정 설비 구조에 관한 것이다.The present invention relates to a measurement facility structure of a thin film transistor-liquid crystal display device capable of static electricity monitoring.

박막 트랜지스터-액정 표시 장치의 검사 및 측정 장비에 있어서, 정전기 피해를 방지할 수 있는 구조의 장치 개발은 절대적으로 필요하다고 할 수 있으며 현재 많은 설비들이 정전기 방지를 위한 여러 장치들을 부착하고 있지만, 효과적인 정전기 모니터링이 가능한 구조를 갖는 설비가 없다.In the inspection and measurement equipment of the thin film transistor-liquid crystal display device, it is absolutely necessary to develop a device having a structure that can prevent electrostatic damage. There is no facility with a structure that can be monitored.

특히, 기존 설비들은 도 1에서 도시한 바와 같이 정전기가 취약한 설비 부위에 이온 블로우(ion blow)를 설치하여 이온 밸런스(ion balance)를 맞추도록 되어 있으나, 이온 블로우의 상태 및 측정 시스템의 EOS에 의한 정전기 발생, 설비 내에 충전된 전하들에 의한 글래스의 정전 피해시에는 설치된 이온 블로우가 제기능을 발휘하지 못하여 정전기 피해를 다량으로 입은 후에야 조치가 가능해지게 된다는 문제점이 있다.In particular, the existing equipment is to set the ion balance (ion blow) to install the ion blow (ion blow) in the installation site where the static electricity is weak as shown in Figure 1, but the state of the ion blow and due to the EOS of the measurement system In case of static electricity damage of the glass due to the generation of static electricity and electric charges charged in the equipment, there is a problem that the action is only possible after the installed ion blow does not function properly and suffers a large amount of static damage.

따라서 이 발명의 과제는 상기한 문제점을 해결하기 위한 것으로서, 확실한 정전기 모니터링이 가능한 박막 트랜지스터-액정 표시 장치의 측정 설비를 제공하는 데에 있다.Accordingly, an object of the present invention is to solve the above problems, and to provide a measuring apparatus for a thin film transistor-liquid crystal display device capable of reliable electrostatic monitoring.

도 1은 종래 박막 트랜지스터-액정 표시 장치의 측정 설비 구조를 나타낸 도면,1 is a view showing a measurement facility structure of a conventional thin film transistor-liquid crystal display device;

도 2는 이 발명의 실시예에 따른 정전기 모니터링이 가능한 박막 트랜지스터-액정 표시 장치의 측정 설비 구조를 나타낸 도면이다.FIG. 2 is a diagram illustrating a measurement facility structure of a thin film transistor-liquid crystal display device capable of static electricity monitoring according to an exemplary embodiment of the present invention.

상기의 과제를 달성하기 위한 이 발명은,This invention for achieving said subject,

정전기가 취약한 부위의 이온 밸런스를 맞추기 위한 이온 블로우,Ion blows to balance ions in areas that are susceptible to static electricity,

정전기를 측정하기 위한 정전기 측정용 센서,Sensor for measuring static electricity,

상기 정전기 측정용 센서를 통해 감지된 정전기를 디지탈로 표시하기 위한 표시부, 그리고A display unit for digitally displaying the static electricity sensed by the static electricity measuring sensor, and

처음 작업 시작시 측정된 정전기값과 작업이 완료된 후 측정된 정전기값을 비교함으로써 작업 중 발생한 정전기를 모니터링할 수 있게 하는 제어기를 포함한다.And a controller for monitoring the static electricity generated during the operation by comparing the static electricity value measured at the start of the first operation with the static electricity value measured after the operation is completed.

이하, 이 발명이 속하는 기술 분야에서 통상의 지식을 가진 자가 이 발명을 용이하게 실시할 수 있을 정도로 상세히 설명하기 위해 이 발명의 바람직한 실시예를 첨부된 도면을 참조로 설명하기로 한다.DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention.

도 2는 이 발명의 실시예에 따른 정전기 모니터링이 가능한 박막 트랜지스터-액정 표시 장치의 측정 설비 구조를 나타낸 도면이다.FIG. 2 is a diagram illustrating a measurement facility structure of a thin film transistor-liquid crystal display device capable of static electricity monitoring according to an exemplary embodiment of the present invention.

도 2에서 도시한 바와 같이, 설비의 카세트부에 정전기 측정용 센서 및 디지탈 계기판을 부착하여 글래스를 카세트에서 빼낸 직후 정전기를 측정한 후 그 값을 표시 및 기억하고, 글래스가 본체에 전달되어 측정을 마친 후 언로딩(unloading)시 카세트부에 집어넣기 전에 다시 한 번 정전기값을 측정 및 디스플레이함으로써 설비가 동작 중 발생한 정전기를 모니터링할 수 있게 된다.As shown in FIG. 2, the static electricity measuring sensor and the digital instrument panel are attached to the cassette part of the facility, immediately after removing the glass from the cassette, and after measuring the static electricity, the value is displayed and stored, and the glass is transferred to the main body to measure the measurement. After unloading, it is possible to monitor the static electricity generated during the operation of the equipment by measuring and displaying the static electricity value once again before inserting it into the cassette during unloading.

또한, 기억하고 있는 정전기값을 호스트 컴퓨터 및 시스템 본체에 저장하므로 관리 데이터로도 활용할 수 있으며, 기준값을 설정하여 이상 발생시 설비의 알람 장치와 연결하여 알람을 발생시키므로 정전기 피해를 실시간으로 예방할 수 있게 된다.In addition, the stored static electricity value is stored in the host computer and the system main body, so it can be used as management data. When an error occurs by setting a reference value, an alarm is generated by connecting to the alarm device of the facility, thereby preventing the static electricity damage in real time. .

따라서 이 발명의 효과는, 확실한 정전기의 모니터링을 통하여 정전기로 인한 피해를 최소화할 수 있게 한다는 것이다.Therefore, the effect of this invention is that it is possible to minimize the damage caused by static electricity through reliable monitoring of static electricity.

Claims (1)

정전기가 취약한 부위의 이온 밸런스를 맞추기 위한 이온 블로우,Ion blows to balance ions in areas that are susceptible to static electricity, 정전기를 측정하기 위한 정전기 측정용 센서,Sensor for measuring static electricity, 상기 정전기 측정용 센서를 통해 감지된 정전기를 디지탈로 표시하기 위한 표시부, 그리고A display unit for digitally displaying the static electricity sensed by the static electricity measuring sensor, and 처음 작업 시작시 측정된 정전기값과 작업이 완료된 후 측정된 정전기값을 비교함으로써 작업 중 발생한 정전기를 모니터링할 수 있게 하는 제어기를 포함하는 박막 트랜지스터-액정 표시 장치의 측정 설비.A measuring device for a thin film transistor-liquid crystal display device comprising a controller for monitoring the static electricity generated during a work by comparing the static electricity value measured at the beginning of work with the static electricity measured after the work is completed.
KR1019970051333A 1997-10-07 1997-10-07 Equipment for monitoring electrostatic, especially minimizing damage due to electrostatic KR100448941B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019970051333A KR100448941B1 (en) 1997-10-07 1997-10-07 Equipment for monitoring electrostatic, especially minimizing damage due to electrostatic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019970051333A KR100448941B1 (en) 1997-10-07 1997-10-07 Equipment for monitoring electrostatic, especially minimizing damage due to electrostatic

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KR19990030876A true KR19990030876A (en) 1999-05-06
KR100448941B1 KR100448941B1 (en) 2004-11-16

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100598023B1 (en) * 2004-07-13 2006-07-13 김귀영 Measuring circuit of static electricity

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62207971A (en) * 1986-03-07 1987-09-12 Seiko Instr & Electronics Ltd Matrix display device
JPH01303416A (en) * 1988-05-31 1989-12-07 Mitsubishi Electric Corp Matrix type display device
JPH021825A (en) * 1988-06-10 1990-01-08 Matsushita Electric Ind Co Ltd Manufacture of active matrix substrate
JPH0629098A (en) * 1992-07-09 1994-02-04 Nec Kagoshima Ltd Prober for display panel
KR100237670B1 (en) * 1992-12-28 2000-01-15 윤종용 Signal line structure of lcd panel with electrostatic protecting function and monitoring method using this

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100598023B1 (en) * 2004-07-13 2006-07-13 김귀영 Measuring circuit of static electricity

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