KR19990030861A - Coating equipment for double-sided cutting tool - Google Patents

Coating equipment for double-sided cutting tool Download PDF

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Publication number
KR19990030861A
KR19990030861A KR1019970051311A KR19970051311A KR19990030861A KR 19990030861 A KR19990030861 A KR 19990030861A KR 1019970051311 A KR1019970051311 A KR 1019970051311A KR 19970051311 A KR19970051311 A KR 19970051311A KR 19990030861 A KR19990030861 A KR 19990030861A
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South Korea
Prior art keywords
cutting tool
coating
double
support
sided cutting
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KR1019970051311A
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Korean (ko)
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KR100248703B1 (en
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이상훈
정용태
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최효병
대한중석 주식회사
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Priority to KR1019970051311A priority Critical patent/KR100248703B1/en
Publication of KR19990030861A publication Critical patent/KR19990030861A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2228/00Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10Coatings

Abstract

본 발명은 초경절삭공구(예를 들어 인서트)상에 Ti계 화합물을 코팅하기 위한 코팅장치에 관한 것으로, 코팅시 제품을 지지하여 주는 치구를 개선하여 절삭공구의 양쪽면(상면과 하면)을 동시에 균일한 두께로 코팅할 수 있는 장치를 제공하기 위한 것이다.The present invention relates to a coating apparatus for coating a Ti-based compound on a cemented carbide cutting tool (for example, an insert), and improves the jig supporting the product at the time of coating to simultaneously cut both sides (top and bottom) of the cutting tool. It is to provide a device that can be coated with a uniform thickness.

본 발명은 반응로 내에 설치되어 증발원(2)에 대해 공전과 자전을 하는 받침원판(6)에 복수개의 지지대(8)를 고정하고 상기 각 지지대에 절곡부(9a)를 가진 여러쌍의 탄성봉(9)을 인접한 절곡부끼리 대향되도록 고정하여 대향된 절곡부 사이에 절삭공구를 끼워 지지할 수 있게 한 양면 사용 절삭공구의 코팅장치이다.The present invention is a plurality of elastic rods are installed in the reactor to secure a plurality of supports (8) to the supporting disk (6) to orbit and rotate about the evaporation source (2) and having a bent portion (9a) on each support (9) is a coating apparatus for a double-sided cutting tool that fixes adjacent bending portions to face each other so that the cutting tool can be sandwiched between the opposite bending portions.

Description

양면 사용 절삭공구의 코팅장치Coating equipment for double-sided cutting tool

본 발명은 초경절삭공구(인서트)상에 Ti계 화합물을 코팅하기 위한 코팅장치에 관한 것으로, 특히 코팅시 제품을 지지하여 주는 치구를 개선하여 절삭공구의 양면을 한 번에 코팅할 수 있도록 한 것이다.The present invention relates to a coating apparatus for coating a Ti-based compound on a carbide cutting tool (insert), in particular to improve the jig to support the product during coating to coat both sides of the cutting tool at once. .

일반적으로 절삭공구는 건식에 의해 코팅되며, 코팅방법으로는 화학기상 증착법과 물리기상증착법이 이용된다.In general, cutting tools are coated by a dry method, and chemical vapor deposition and physical vapor deposition are used as coating methods.

상기 방법중 화학기상증착법은 가스들의 화학반응에 의해 코팅이 이루어지는 방법이기 때문에 치구에 의한 제품의 지지구조가 비교적 간단하고 치구의 형상도 단순하다.Among the above methods, chemical vapor deposition is a method in which coating is performed by chemical reaction of gases, so that the supporting structure of the product by the jig is relatively simple and the shape of the jig is simple.

그러나 물리기상증착법의 경우에는 일정한 위치에 있는 증발원으로부터 증발되는 입자들의 흐름이 제품에 도달함에 의해 증착물질이 제품에 코팅되는 방법이기 때문에 코팅반응로 내에서의 제품의 위치에 따라 코팅의 균일성을 얻기 힘들고, 하나의 제품내에서도 부위별(중앙부, 가장자리부, 코너부등)로 코팅이 불균일하게될 우려가 많다.However, in the case of the physical vapor deposition method, the deposition material is coated on the product by the flow of particles evaporated from the evaporation source in a certain position to the product, so that the uniformity of the coating depends on the position of the product in the coating reactor. It is difficult to obtain, and there is a possibility that the coating may be uneven in parts (center, edge, corner, etc.) even in one product.

따라서 물리기상증착법에서는 코팅시 반응로내에서 제품을 지지하여 주는 치구의 설계가 매우 중요하며, 치구를 적절히 설계함에 의해 코팅의 균일성을 최대한으로 확보할 수 있다.Therefore, in the physical vapor deposition method, the design of the jig that supports the product in the reaction furnace during coating is very important, and by ensuring the proper design of the jig can ensure the maximum coating uniformity.

상기 코팅용 치구가 갖추어야 할 요건으로서는 치구가 증착물질의 흐름을 방해하지 않아야 하고, 제품에 치구 자욱이 최소화 되어야 한다는 것이며, 상기 요건이 충족되어야 증착물질이 제품에 균일하게 코팅될 수 있다.As a requirement of the coating jig, the jig should not interfere with the flow of the deposition material, the jig should be minimized in the product, the deposition material must be uniformly coated on the product when the above requirement is satisfied.

또한 치구는 증발원에 대하여 자전과 공전운동을 하는 것이 필수적이며, 다양한 형상으로된 제품에 대해 다같이 상기와 같은 요건이 충족되어야 하기 때문에 치구는 제품형상에 맞추어 다양하게 설계되어야 한다.In addition, the jig must be rotated and orbited about the evaporation source, and the jig must be designed in various ways according to the shape of the product because the above requirements must be met for various shaped products.

도 1과 도 2에는 종래에 일반적으로 사용되어온 물리기상증착법에 의한 절삭공구의 코팅장치가 도시되어 있다.1 and 2 illustrate a coating apparatus for a cutting tool by physical vapor deposition, which is generally used in the related art.

반응로(1)내의 일측에 증발원(2)이 설치되어 있고 중심부에는 모터(3)의 구동력을 회전하는 중심축(4)이 설치되어 있다.An evaporation source 2 is provided at one side in the reactor 1, and a central axis 4 for rotating the driving force of the motor 3 is provided at the center.

상기 중심축(4)의 둘레에는 복수개의 바깥축(5)이 동심원상으로 배열되어 중심축과 연결되어 있으며, 상기 바깥축(5)은 자체적으로 회전이 가능하도록 설치되어 있다.A plurality of outer shafts 5 are arranged concentrically on the periphery of the central shaft 4 and connected to the central shaft, and the outer shaft 5 is installed to be rotatable by itself.

따라서 모터(3)가 구동하면 중심축(4)이 회전하고 바깥축(5)은 중심축에 대해 공전운동을 함과 동시에 자전운동을 하게 된다.Accordingly, when the motor 3 is driven, the central axis 4 rotates, and the outer axis 5 rotates and rotates about the central axis.

상기 바깥축(5)에는 다수개의 받침원판(6)이 설치되어 있으며, 절삭공구(7)는 상기 받침원판(6)위에 얹혀져 지지된다.A plurality of support discs 6 are provided on the outer shaft 5, and the cutting tool 7 is supported on the support discs 6.

따라서 코팅시 받침원판(6)위에 얹혀진 절삭공구는 증발원(2)에 대해 자전과 공전운동을 하게 되고 증발원으로부터 증발되는 증착물질이 제품에 코팅된다.Therefore, the cutting tool mounted on the support plate 6 during the coating is rotated and orbited about the evaporation source 2 and the deposition material evaporated from the evaporation source is coated on the product.

그러나 상기와 같은 종래의 장치는 한쪽면만을 사용하는 절삭공구의 경우에 한쪽면(도면상 저면)이 비사용 부분이기 때문에 절삭공구를 받침원판위에 올려놓고 코팅을 하여도 아무런 문제가 없으나, 양쪽면을 모두 사용하는 절삭공구를 코팅할때에는 여러 가지 문제점이 발생한다.However, in the conventional apparatus described above, in the case of a cutting tool using only one side, since one side (bottom side in the drawing) is not used, there is no problem even if the cutting tool is placed on the base plate and coated. When coating a cutting tool that uses all of the various problems arise.

즉, 상기와 같은 종래 장치에서는 코팅시 절삭공구의 하면에는 코팅층이 제대로 증착되지 않거나 또는 코팅측의 두께가 얇게 형성되어 상면과 하면간에 코팅두께의 차이가 생기게 되고, 따라서 절삭공구 상,하면간의 코팅두께의 균일성 유지를 위해 1차코팅 공정이 끝난후 절삭공구를 뒤집어 놓고 2차코팅을 하게 되는데 이렇게 하는 경우 코팅원가의 상승은 물론 코팅공정의 증가를 초래하게 된다.That is, in the conventional apparatus as described above, the coating layer is not properly deposited on the lower surface of the cutting tool during coating or the thickness of the coating side is formed to be thin so that a difference in coating thickness occurs between the upper surface and the lower surface, thus coating the upper and lower surfaces of the cutting tool. In order to maintain the uniformity of the thickness, after the first coating process, the cutting tool is turned upside down and the second coating is performed. In this case, the coating cost is increased and the coating process is increased.

또한 치구의 받침원판(6)과 접촉하는 절삭공구의 하면은 코팅공정중에 인가되는 바이어스의 영향에 의해 아크가 발생되어 절삭공구의 인선부에 손상을 초래하기도 한다.In addition, the lower surface of the cutting tool in contact with the base plate 6 of the jig may generate an arc under the influence of the bias applied during the coating process, thereby causing damage to the cutting edge of the cutting tool.

본 발명의 목적은 양면을 사용하는 절삭공구의 코팅시 절삭공구의 양면을 한 번에 균일한 두께로 코팅할 수 있는 장치를 제공하기 위한 것이다.An object of the present invention is to provide an apparatus capable of coating both sides of a cutting tool with a uniform thickness at one time when coating a cutting tool using both sides.

상기와 같은 목적을 달성하기 위한 본 발명의 실시예에 따라 반응로내의 증발원에 대하여 공전과 자전을 하는 받침원판상에 복수개의 수직지지대를 고정하고 각 지지대에 절곡부를 가진 여러쌍의 탄성봉을 절곡부끼리 대향되도록 고정하여 대향된 절곡부 사이에 절삭공구를 지지할 수 있게 구성된 양면 사용 절삭공구의 코팅장치가 제공된다.In accordance with an embodiment of the present invention for achieving the above object, a plurality of vertical supports are fixed on the support disk to rotate and rotate about the evaporation source in the reactor and bend a pair of elastic rods having a bent on each support. Provided is a coating apparatus for a double-sided cutting tool configured to be fixed to face each other so as to support the cutting tool between opposite bent portions.

도 1은 종래 코팅장치를 나타낸 단면도1 is a cross-sectional view showing a conventional coating device

도 2는 종랭 장치에 적용된 회전판의 사시도2 is a perspective view of a rotating plate applied to the cooling device

도 3은 본 발명에 따른 코팅장치의 단면도3 is a cross-sectional view of the coating apparatus according to the present invention

도 4는 본 발명 장치에 적용된 지지대의 사시도Figure 4 is a perspective view of the support applied to the device of the present invention

도면의 주요부분에 대한 부호의 설명Explanation of symbols for main parts of the drawings

1 : 반응로 2 : 증발원1 reactor 2 evaporation source

4 : 중심축 5 : 바깥축4: center axis 5: outer axis

6 : 받침원판 7 : 절삭공구6: supporting disc 7: cutting tool

8 : 지지대 9 : 탄성봉8: support stand 9: elastic bar

9a: 절곡부9a: bend

도 3은 본 발명에 따른 코팅장치의 사시도이고, 도 4는 본 발명 장치에 적용된 지지대의 사시도이다.Figure 3 is a perspective view of the coating apparatus according to the invention, Figure 4 is a perspective view of the support applied to the apparatus of the present invention.

반응로(1)내에 모터(3)에 의해 회전하는 중심축(4)과 상기 중심축에 연결되어 중심축의 회전에 따라 공전하면서 자전을 하는 복수개의 바깥축(5) 및 상기 바깥축에 설치된 복수개의 받침원판(6)의 구성은 종래장치와 같다.A plurality of outer shafts 5 connected to the central shaft 4 rotated by the motor 3 in the reactor 1 and the central shaft and rotating while rotating according to the rotation of the central shaft, and a plurality of outer shafts installed on the outer shaft. The structure of the four support discs 6 is the same as that of the conventional apparatus.

상기 받침원판(6)에는 복수개의 지지대(8)가 고정되어 있고 각 지지대(8)에는 복수개의 탄성봉(9)이 상,하로 나란히 배열고정되어 있다.A plurality of supports 8 are fixed to the support disc 6, and a plurality of elastic rods 9 are fixed to each support 8 arranged side by side.

상기 각 탄성봉(9)에는 만곡된 형상의 절곡부(9a)가 형성되어 있으며, 상기 절곡부(9a)는 인접한 한쌍이 서로 마주보게 배열되어 있다.Each of the elastic rods 9 has a bent portion 9a having a curved shape, and the bent portions 9a are arranged such that adjacent pairs face each other.

따라서 서로 마주보는 탄성봉(9)의 절곡부(9a) 사이로 절삭공구(7)를 끼워 지지할 수 있게 된다.Therefore, the cutting tool 7 can be held between the bent portions 9a of the elastic bars 9 facing each other.

또한 상기 탄성봉(9)은 그 재질이 스프링강선으로 되어 있고, 그 직경은 0.8∼1.5㎜로 형성되어 있으며, 스프링강선의 직경이 0.8㎜ 미만이면 절삭공구의 지지력이 약해 코팅작업시 절삭공구를 충분히 지지할 수 없게 되고, 1.6㎜ 이상이면 코팅증착시 탄성봉에 의해 가려지는 부분이 많아진다.In addition, the elastic rod (9) is made of a spring steel wire material, the diameter of which is formed from 0.8 to 1.5mm, if the diameter of the spring steel wire is less than 0.8mm, the supporting force of the cutting tool is weak and the cutting tool during the coating operation It becomes impossible to fully support it, and when it is 1.6 mm or more, the part covered by the elastic rod at the time of coating deposition increases.

상기와 같이된 본 발명 장치는 받침원판(6)에 고정된 각 탄성봉(9)에 절곡부(9a)가 서로 마주보도록 형성되어 있기 때문에 탄성봉(9)을 살짝 들어올리고 각 절곡부(9a) 사이에 절삭공구(7)를 끼운 후 들어올렸던 탄성봉을 놓으면 자체 복원력에 의해 탄성봉(9)의 절곡부(9a)가 절삭공구에 밀착되도록 절삭공구를 지지하게 된다.Since the bent portions 9a are formed to face each other on the elastic rods 9 fixed to the supporting disc 6, the apparatus of the present invention as described above slightly lifts the elastic rods 9 and each bent portion 9a. After placing the cutting tool (7) between the () and then lifted up the elastic rod to support the cutting tool so that the bent portion (9a) of the elastic rod (9) is in close contact with the cutting tool by its own restoring force.

상기와 같이 탄성봉에 절삭공구가 지지된 상태에서 모터(3)를 구동시키면 중심축(4)의 회전에 의해 바깥축(5)과 받침원판(6)이 증발원(2)에 대해 공전 및 자전을 하게 되므로 탄성봉(9)에 지지된 절삭공구의 양쪽면(상면과 하면)이 동시에 균일한 두께로 코팅되는 것이다.When the motor 3 is driven while the cutting tool is supported by the elastic rod as described above, the outer shaft 5 and the support disk 6 are rotated and rotated about the evaporation source 2 by the rotation of the central shaft 4. Since the two sides (top and bottom) of the cutting tool supported by the elastic rod (9) is coated with a uniform thickness at the same time.

절삭공구의 코팅이 완료된 후에는 전술한 바와 같이 탄성봉(9)을 살짝 들어올리고 절삭공구를 탄성봉 사이에서 쉽게 빼낼 수 있다.After the coating of the cutting tool is completed, the elastic rod 9 may be lifted slightly as described above, and the cutting tool may be easily pulled out between the elastic rods.

상기와 같이 본 발명에 따르면 절삭공구의 양쪽면을 동시에 균일한 두께로 코팅할 수 있으므로 절삭공구의 상면과 하면을 각각 별도의 공정으로 코팅하는 종래 장치에 비해 공정의 단축을 가져오게 되고 절삭공구를 받침원판에 단순히 올려놓고 코팅하는 종래 장치에 비해 1회 코팅시 절삭공구의 장입량이 증가하여 코팅원가를 대폭 낮출 수 있게 된다.As described above, according to the present invention, both sides of the cutting tool can be coated at the same time with a uniform thickness, which brings about a shortening of the process compared to the conventional apparatus for coating the upper and lower surfaces of the cutting tool in separate processes. Compared with the conventional apparatus for simply laying on a base plate and coating, the amount of cutting tool is increased in one coating, thereby greatly reducing the coating cost.

Claims (3)

반응로(1)내에 회전가능한 중심축(4)과 상기 중심축에 연결되어 공전하면서 자전하는 복수개의 바깥축(5)을 설치하고 상기 바깥축에 받침원판(6)을 다단으로 설치하여 받침원판이 반응로내의 증발원(2)에 대해 공전과 자전을 하도록된 절삭공구의 코팅장치에 있어서, 상기 받침원판에 복수개의 수직지지대(8)를 고정하고 각 지지대에 절곡부(9a) 를 가진 여러쌍의 탄성봉(9)을 절곡부끼리 대향되도록 고정하여 대향된 절곡부 사이에 절삭공구를 끼워 지지할 수 있게 함을 특징으로 하는 양면 사용 절삭공구의 코팅장치.In the reactor 1, a rotatable central shaft 4 and a plurality of outer shafts 5 connected to the central shaft to rotate while rotating are installed, and a supporting disk 6 is installed on the outer shaft in multiple stages. In a coating apparatus for a cutting tool configured to rotate and rotate about an evaporation source 2 in the reactor, a plurality of pairs having a plurality of vertical supports 8 fixed to the support discs and having bent portions 9a on each support. Fixing the elastic bar (9) of the bent parts so as to be opposed to each other, the coating device of the two-sided cutting tool, characterized in that the cutting tool can be sandwiched between the opposite bent portions. 제 1 항에 있어서,The method of claim 1, 상기 탄성봉은 스프링강으로된 양면 사용 절삭공구의 코팅장치The elastic rod is a coating device for double-sided cutting tool made of spring steel 제 1 항에 있어서,The method of claim 1, 상기 탄성봉은 직경이 0.8∼1.5㎜로된 양면 사용 절삭공구의 코팅장치.The elastic rod is a coating device for double-sided cutting tool having a diameter of 0.8 ~ 1.5㎜.
KR1019970051311A 1997-10-07 1997-10-07 The coating apparatus for tool KR100248703B1 (en)

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Cited By (3)

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KR20010000555A (en) * 2000-10-06 2001-01-05 조효상 Ground relay of engine driven generator
CN107794505A (en) * 2016-08-30 2018-03-13 科森科技东台有限公司 Carrier for magnetron sputtering
CN117026196A (en) * 2023-10-08 2023-11-10 泰州市长宏钛金科技有限公司 Loading clamping tool for PVD coating

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KR100927796B1 (en) * 2007-09-11 2009-11-20 (주)시엘씨파이켐 Coating installation frame for in-line sputtering device
KR101504580B1 (en) 2012-10-19 2015-03-20 홍성돈 Apparatus for Coating Emblem with Enhanced Capability

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KR20010000555A (en) * 2000-10-06 2001-01-05 조효상 Ground relay of engine driven generator
CN107794505A (en) * 2016-08-30 2018-03-13 科森科技东台有限公司 Carrier for magnetron sputtering
CN117026196A (en) * 2023-10-08 2023-11-10 泰州市长宏钛金科技有限公司 Loading clamping tool for PVD coating
CN117026196B (en) * 2023-10-08 2023-12-05 泰州市长宏钛金科技有限公司 Loading clamping tool for PVD coating

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