KR19990016544A - Effective liquid display device in chemical container - Google Patents

Effective liquid display device in chemical container Download PDF

Info

Publication number
KR19990016544A
KR19990016544A KR1019970039456A KR19970039456A KR19990016544A KR 19990016544 A KR19990016544 A KR 19990016544A KR 1019970039456 A KR1019970039456 A KR 1019970039456A KR 19970039456 A KR19970039456 A KR 19970039456A KR 19990016544 A KR19990016544 A KR 19990016544A
Authority
KR
South Korea
Prior art keywords
chemical
effective liquid
buoy
chemical container
fixed
Prior art date
Application number
KR1019970039456A
Other languages
Korean (ko)
Other versions
KR100216558B1 (en
Inventor
정지완
Original Assignee
정지완
케이와이휴텍 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 정지완, 케이와이휴텍 주식회사 filed Critical 정지완
Priority to KR1019970039456A priority Critical patent/KR100216558B1/en
Publication of KR19990016544A publication Critical patent/KR19990016544A/en
Application granted granted Critical
Publication of KR100216558B1 publication Critical patent/KR100216558B1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/54—Inspection openings or windows
    • B65D25/56—Inspection openings or windows with means for indicating level of contents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2203/00—Decoration means, markings, information elements, contents indicators
    • B65D2203/04—Level indicators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/70—Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for
    • B65D85/84—Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for for corrosive chemicals

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Level Indicators Using A Float (AREA)

Abstract

본 발명은 화학약품이 담겨진 화학약품 용기내의 화학약품 유효액량을 감지하여 표시해 주는 유효액량을 표시장치에 관한 것으로 사용가능한 유효액량에 도달했을 때 이를 감지하여 부저 및 발광소자로 표시해 주는 것이다.The present invention relates to a display device that detects and displays an effective liquid amount of a chemical contained in a chemical container containing a chemical. When the effective liquid amount reaches a usable amount, the present invention detects and displays the effective liquid amount as a buzzer and a light emitting device.

이러한 본 발명은 화학약품 용기내에 유도봉을 설치하고 유도봉 하부 내측에 금속접점을 위치시킨 후 유도봉 하부 외측에 상기 금속접점을 접촉시키는 부표를 끼우되 상기 부표는 유도봉 하부의 일정거리만 이동시키는 한편 내부에는 자석을 위치시킴으로써 이루어지는 것으로 화학약품의 유효액량 도달시 이를 표시시켜 주어 새로운 용기로 쉽게 교체시켜 주게 된다.The present invention is to install the induction rod in the chemical container and place a metal contact on the inside of the bottom of the induction rod and then insert a buoy for contacting the metal contact on the outside of the bottom of the induction rod, but the buoy moves only a certain distance below the induction rod On the other hand, it is made by placing magnet inside, and when it reaches the effective liquid amount of chemical, it is displayed and it is easily replaced with a new container.

Description

화학약품 용기내의 유효액량 표시장치Effective liquid display device in chemical container

본 발명은 화학약품이 담겨진 화학약품 용기내의 화학약품 유효액량을 감지하여 표시해 주는 유효약량 표시장치에 관한 것으로 사용가능한 유효액량에 도달했을 때 이를 감지하여 부저 및 발광소자로 표시해 주는 것이다.The present invention relates to an effective dose display device that detects and displays an effective amount of a chemical in a chemical container in which a chemical is contained. When the effective amount of usable liquid is reached, the present invention detects and displays a buzzer and a light emitting device.

반도체 공장에서 사용되는 TEOS(Tetraethyl orthosilicate), TEB(Triethyl borate), TMB(Trimethyl borate), TMPI(Trimethyl phosphite), TMOP(Trimethyl phosphate), TEPO(Trietyl phosphate)등의 화학약품은 화학약품 용기에 액체형태로 담겨져 공급되고 화학약품용기에 담겨진 화학약품은 어느정도 사용하여 사용가능한 유효액량이 되었을때 새로운 화학약품용기로 교체해 주어야만 한다.Chemicals such as TEOS (Tetraethyl orthosilicate), TEB (Triethyl borate), TMB (Trimethyl borate), TMPI (Trimethyl phosphite), TMOP (Trimethyl phosphate) and TEPO (Trietyl phosphate) are used in chemical containers. Chemicals supplied in the form and contained in chemical containers must be replaced with new chemical containers when the amount of effective liquid available has been used to some extent.

화학약품 용기교체는 작업자가 용기의 무게를 달아 잔여 화학약품량을 측정하는 방식을 사용하게 되어 용기 교체시기가 너무 빠르거나 늦게 되는 경우가 발생된다.In chemical container replacement, the weight of the container is measured by the operator to measure the amount of residual chemicals, which causes the container to be replaced too soon or too late.

용기 교체 시기가 빠르면 사용 할 수 있는 화학약품까지 재충전시 버리게 되는 문제점이 발생되며 용기의 교체시기가 늦으면 용기바닥의 이물질까지 분출되거나 화학약품이 분출되지 않아 반도체 제조시 불량품 발생의 요인이 되는 것이었다.If the container replacement time is too early, the problem of recharging the usable chemicals is generated. If the container replacement time is late, foreign substances or chemicals are not ejected from the bottom of the container.

따라서 화학약품 용기내의 담겨진 화학약품의 사용가능한 유효액량을 정확히 감지하여 표시해 줄 필요가 있는 것이었다.Therefore, it was necessary to accurately detect and display the usable effective amount of the chemical contained in the chemical container.

본 발명은 화학약품 용기에 담겨진 화학약품을 사용하여 사용가능한 유효액량이 되었을때 이를 감지하여 작업자에게 인식시킴으로써 최적의 교체시기에 새로운 화학약품 용기를 교체시켜 주어 용기내의 화학약품을 최대한 사용할 수 있도록 하는 한편 화학약품의 부족이나 이물질 분출을 방지하여 반도체 불량 발생요인을 없애도록 하는 것이다.The present invention detects when the amount of effective liquid available to use the chemicals contained in the chemical container is recognized by the operator to replace the new chemical container at the optimum replacement time to allow the maximum use of the chemical in the container On the other hand, by preventing the shortage of chemicals or foreign substances to remove the cause of semiconductor defects.

이러한 본 발명은 화학약품 용기내에 유도봉을 설치하고 유도봉 하부 내측에 금속접점을 위치시킨 후 유도봉 하부 외측에 상기 금속접점을 접촉시키는 부표를 끼우되 상기 부표는 유도봉 하부의 일정거리만 이동시키는 한편 내부에는 자석을 위치시킴으로써 화학약품을 사용하여 부표가 하강되면 내부 자석에 의해 금속 접점이 접촉되어 부저나 발광소자를 구동시키게 된다.The present invention is to install the induction rod in the chemical container and place a metal contact on the inside of the bottom of the induction rod and then insert a buoy for contacting the metal contact on the outside of the bottom of the induction rod, but the buoy moves only a certain distance below the induction rod On the other hand, when the buoy is lowered by using a chemical by placing a magnet inside, the metal contact is contacted by the internal magnet to drive the buzzer or the light emitting device.

즉 부표는 화학약품의 비중보다 가벼워 뜰 수 있도록 하고 내부에는 자석을 설치하여 상기 자석의 자력에 의해 금속접점이 접촉될 수 있도록 한다.That is, the buoy is lighter than the specific gravity of the chemical so that it can float and a magnet is installed inside so that the metal contact can be contacted by the magnetic force of the magnet.

도1은 유효액량 표시장치가 구비된 화학약품용기의 사시도1 is a perspective view of a chemical container with an effective liquid level display device

도2은 유효액량 표시장치가 구비된 화학약품용기의 일부 절결 단면도2 is a partially cut-away sectional view of a chemical container with an effective liquid level indicator

도3은 본 발명의 분해 사시도Figure 3 is an exploded perspective view of the present invention

도4는 유효액량 표시장치의 결합상태 확대 단면도4 is an enlarged cross-sectional view of a coupling state of an effective liquid level display device;

도5는 본 발명의 부표작동 상태도Figure 5 is a buoy operating state diagram of the present invention

도6은 본 발명의 부표확대 단면도Figure 6 is an enlarged cross-sectional view of the buoy of the present invention

도7은 본 발명의 경보장치 일예도Figure 7 is an example of the alarm device of the present invention

도면의 주요부분에 대한 부호의 설명Explanation of symbols for main parts of the drawings

1 : 화학약품용기 4 : 조임너트1: chemical container 4: tightening nut

10 : 고정구 13 : 테프론링10: fixture 13: Teflon ring

14 : 유도봉 15,16 : 금속핀14: guide rod 15,16: metal pin

20 : 부표 21 : 결속구20: buoy 21: binding sphere

23 : 조임너트 25 : 자석23: tightening nut 25: magnet

30 : 감지부 31 : 리드선30 sensing unit 31 lead wire

33,34 : 금속접점 40 : 경보장치33,34: Metal contact 40: Alarm device

화학약품용기(1)는 화학약품 주입과 배출 및 배출가스 주입을 위한 밸브본체(2)(3)가 설치되며 본 발명은 화학약품용기(1)에 유효액량 표시장치를 구비시킨 것이다.The chemical container 1 is provided with a valve body (2) (3) for chemical injection and discharge and injection of the exhaust gas, the present invention is provided with an effective liquid amount display device in the chemical container (1).

유효액량 표시장치는 하부가 막히고 화학약품용기(1) 내부에 삽입되는 유도봉(14)과 유도봉(14) 하부에 일정거리를 두고 고정된 금속핀(15)(16) 사이를 이동하는 부표(20)와, 유도봉(14) 상부에서 삽입공(12)이 유도봉(14) 내부와 통하게 고정되고 걸림턱(11)이 형성된 고정구(10)와, 걸림턱(11) 하부에 끼워져 기밀을 유지시키는 테프론링(13)과, 유도봉(14) 내부에 끼워지고 하측에 감지부(30)가 형성된 리드선(31)과, 고정구(10)에 끼워지고 리드선(31)을 조임너트(23)의 조임에 따라 조임편(22)으로 잡아주는 결속구(21)로 구성되며, 고정구(10)는 고정너트(4)에 의해 화학약품용기(1)에 고정 설치된다.The effective liquid display device is a buoy which moves between the guide rod 14 inserted into the chemical container 1 and the metal pins 15 and 16 fixed at a certain distance from the bottom of the guide rod 14. 20), the insertion hole 12 in the upper guide bar 14 is fixed to the inside of the guide bar 14, the fastener 10 is formed with a locking jaw (11) and the locking jaw (11) is fitted in the airtight Teflon ring 13 to be retained, a lead wire 31 inserted into the guide rod 14 and a sensing unit 30 formed at a lower side thereof, and a fastening nut 23 fitted into the fixture 10 and fastening nut 23. Consists of a fastener (21) to hold the tightening piece 22 in accordance with the fastening, the fastener 10 is fixed to the chemical container (1) by a fixing nut (4).

리드선(31) 하부에 형성된 감지부(30)의 금속접점(33)(34)은 고정체(35)에 의해 고정되고 금속접점(33)(34)에는 전선이 연결되어 금속접점(33)(34)이 붙을 때 경보장치(40)의 부저나 발광소자(41)를 구동시킨다.The metal contacts 33 and 34 of the sensing unit 30 formed under the lead wire 31 are fixed by the fixing body 35, and wires are connected to the metal contacts 33 and 34 so that the metal contacts 33 ( When the 34 is attached, the buzzer of the alarm device 40 or the light emitting element 41 is driven.

부표(20)는 내부에 자석(25)이 고정되고 공기가 들어있는 상태로 밀폐시켜 주어 화학약품내에서 뜨려는 힘을 받도록 하며, 자석(25)은 자력에 의해 금속접점(33)(34)을 접촉시키게 된다.Buoy 20 is a magnet 25 is fixed inside and sealed in the air containing state to receive the force to float in the chemical, the magnet 25 is a metal contact (33, 34) by magnetic force Will be contacted.

이러한 구성의 본 발명은 고정구(10) 하부에 삽입공(12)과 내부 공간이 일치하는 유도봉(14)을 고정시키되 유도봉(14) 하부는 막혀 있도록 한다.The present invention of such a configuration is fixed to the guide rod (14) and the guide rod 14 and the inner space is coincident with the lower portion of the guide rod 14 so that the lower guide rod 14 is blocked.

유도봉(14) 하부 일정높이에 금속핀(15)을 고정시키고 유도봉(14) 하부에서 부표(20)를 끼운 후 유도봉(14) 하측에 금속핀(16)을 고정시켜 부표(20)가 유도봉(14)을 타고 이동하되 금속핀(15)(16) 사이를 이동하게 한다.The metal pin 15 is fixed at a predetermined height below the induction bar 14 and the buoy 20 is inserted at the bottom of the induction bar 14, and then the buoy 20 is guided by fixing the metal pin 16 under the induction bar 14. The rod 14 is moved to move between the metal pins (15, 16).

그리고 리드선(31)의 선단을 조임너트(23)와 결속구(21)를 관통시켜 유도봉(14) 내부로 끼워주어 감지부(30)가 유도봉(14) 하측에 위치되게하고 조임너트(23)를 조여 조임편(22)을 압착시킴으로써 리드선(31)이 끊어지거나 움직이지 않게 한다.Then, the tip of the lead wire 31 passes through the tightening nut 23 and the binding hole 21 to be inserted into the guide bar 14 so that the sensing unit 30 is positioned below the guide bar 14 and the tightening nut ( 23) is compressed to compress the tightening piece 22 so that the lead wire 31 is not broken or moved.

고정구(10)를 화학약품용기(1)에 고정너트(4)로 고정시켜 테프론링(13)으로 기밀이 유지되게한 후 리드선(31) 선단의 플러그(32)를 감지장치와 접속시킨다.The fixture 10 is fixed to the chemical container 1 with the fixing nut 4 so that the airtightness is maintained by the Teflon ring 13, and the plug 32 at the tip of the lead wire 31 is connected to the sensing device.

화학약품용기(1)내에 화학약품이 채워지면 부표(20)는 떠오르게 되나 금속핀(15)에 걸려 더이상 떠오르지 못하고 금속핀(15)에 걸려있게 된다.When the chemical is filled in the chemical container 1, the buoy 20 is floated but is caught by the metal pin 15 and no longer floats on the metal pin 15.

화학약품용기(1) 내의 화학약품을 사용하며 화학약품이 줄어들면 부표(20)는 화학약품 위에 떠있게 되며 이상태에서 더이상 사용하면 부표(20)는 화학약품을 따라 내려가게 된다.When the chemicals in the chemical container (1) is used and the chemicals are reduced, the buoy 20 floats on the chemicals, and when it is no longer used, the buoy 20 goes down along the chemicals.

화학약품이 도5에 도시된 위치(화학약품의 유효액량)까지 내려가면 부표(20)도 내려가게 되고 이 위치에서 감지부(30)의 금속접점(33)(34)이 부표(20) 내부의 자석(25)에 의해 붙게 된다.When the chemical is lowered to the position shown in FIG. 5 (effective amount of chemical), the buoy 20 is also lowered, and the metal contacts 33 and 34 of the sensing unit 30 are inside the buoy 20 at this position. It is attached by the magnet 25 of.

즉 감지부(30)의 금속접점(33)(34)은 부표(20) 내부의 자석(25)에 의해 붙게 되므로 부표(20)의 위치와 감지부(30)의 위치에 따라 화학약품의 유효액량을 감지하게 된다.That is, since the metal contacts 33 and 34 of the sensing unit 30 are attached by the magnet 25 inside the buoy 20, the chemicals are effective according to the position of the buoy 20 and the position of the sensing unit 30. The amount of liquid will be detected.

부표(20)가 내려가 금속접점(33)(34)이 붙게 되면 경보장치(40)에서 이를 감지하여 부저 및 발광소자(41)를 구동시킴으로써 작업자가 이를 인식하여 화학약품용기(1)를 새것으로 교체사용하면 된다.When the buoy 20 goes down and the metal contacts 33 and 34 are attached, the alarm device 40 detects this and drives the buzzer and the light emitting element 41 so that an operator recognizes it and replaces the chemical container 1 with a new one. Replace it.

따라서 작업자는 부저가 울리면 화학약품용기(1)를 교체해 주게 되므로 최적의 상태로 사용할 수 있으며 용기내의 화학약품 잔량을 측정하기 위해 저울로 달아주는 불편함을 겪지 않아도 된다.Therefore, the operator can replace the chemical container (1) when the buzzer rings can be used in an optimal state, and do not have to suffer the inconvenience of weighing the balance to measure the remaining amount of chemical in the container.

한편 고정구(10)에서 돌출된 리드선(31)을 작업자가 그대로 당길경우 리드선(31)이 끊어질 염려가 있으므로 본 발명에서는 결속구(21)와 조임너트(23)를 이용하여 리드선(31)을 고정시킴으로써 리드선(31)이 끊어지는 문제점을 없앴다.On the other hand, when the operator pulls the lead wire 31 protruding from the fixture 10, the lead wire 31 may be broken. In the present invention, the lead wire 31 may be formed by using the binding tool 21 and the fastening nut 23. Fixing eliminates the problem of breaking the lead wire 31.

즉 결속구(21)를 고정구(10)의 삽입공(12)에 나사결합시킨 상태에서 조임너트(23)를 결속구(21)에 나사결합시키는 것으로 조임너트(23)가 조여질때 결속구(21)의 조임편(22)의 내측으로 밀리면서 리드선(31)을 단단히 압착고정시키게 된다.That is, when the fastening nut 23 is screwed by fastening the fastening nut 23 to the fastening hole 21 while the fastening nut 21 is screwed into the insertion hole 12 of the fastener 10, the fastening hole ( The lead wire 31 is firmly crimped while being pushed into the inside of the fastening piece 22 of 21).

따라서 리드선(31) 외측에서 조임편(22)이 단단히 고정시키게 되므로 리드선(31)을 당기더라도 쉽게 끊어지지 않게 된다.Therefore, the tightening piece 22 is firmly fixed to the outside of the lead wire 31, so that the lead wire 31 is not easily broken even when the lead wire 31 is pulled.

본 발명은 화학약품 용기에 담겨진 화학약품을 사용하여 사용가능한 유효액량이 되었을때 이를 감지하여 작업자에게 인식시킴으로써 최적의 교체시기에 새로운 화학약품 용기로 교체시켜 주어 용기내의 화학약품을 최대한 사용할 수 있도록 하는 한편 화학약품의 부족이나 이물질 분출을 방지하여 반도체 불량 발생을 없애는 효과가 제공된다.The present invention detects when the amount of effective liquid available to use the chemicals contained in the chemical container is recognized by the operator to replace the new chemical container at the optimum replacement time to enable the use of the chemical in the container to the maximum On the other hand, by preventing the shortage of chemicals or foreign substances is provided the effect of eliminating semiconductor defects.

Claims (3)

화학약품용기(1)에 고정너트(4)로 고정되고 기밀유지용 테프론링(13)이 끼워진 고정구(10)와, 고정구(10) 하부에 고정되며 하부가 막힌 유도봉(14)과, 유도봉(14) 하부에서 일정거리를 두고 고정된 금속핀(15)(16) 사이를 이동하는 부표(20)와, 고정구(10)에 끼워지고 조임편(22)이 조임너트(23)에 의해 리드선(31)을 조여 주는 결속구(21)와, 리드선(31)으로 연결되며 유도봉(14) 내부 하측에 위치되는 감지부(30)로 이루어진 것을 특징으로 하는 화학약품 용기내의 유효액량 표시장치.A fixture 10 fixed to the chemical container 1 with a fixing nut 4 and fitted with an airtight Teflon ring 13, a guide rod 14 fixed below the fixture 10 and blocked at the bottom thereof, and induction. Buoy 20 which moves between the fixed metal pins 15 and 16 at a fixed distance from the lower part of the rod 14, and the fastening piece 22 is fitted to the fastener 10 and the lead wire 23 is fastened by the tightening nut 23. An effective liquid amount display device in a chemical container, characterized in that the binding port 21 for tightening the (31), and the sensing unit 30 is connected to the lead wire 31 and located in the lower side of the guide bar (14). 제1항에서, 부표(20)는 유도봉(14)에 끼워져 금속핀(15)(16) 사이를 이동하는 내측에 자석(25)이 고정되며 밀폐된 구형으로 이루어진 것을 특징으로 하는 화학약품 용기내의 유효액량 표시장치.In the chemical container according to claim 1, the buoy 20 is formed in a sealed sphere with a magnet 25 fixed to the inside of the guide rod 14 and moving between the metal pins 15 and 16. Effective liquid display. 제1항에서, 감지부(30)는 고정체(35)로 고정되고 전선에 연결된 금속접점(33)(34)으로 구성되고 부표(20)의 자석(25)에 의해 금속접점(33)(34)이 접촉되게 구성한 것을 특징으로 하는 화학약품 용기내의 유효액량 표시장치.2. The sensing unit 30 is composed of metal contacts 33 and 34 fixed to a fixture 35 and connected to an electric wire, and is made of a metal contact 33 (by magnet 25 of buoy 20). An effective liquid amount indicator in a chemical container, characterized in that 34) is configured to be in contact.
KR1019970039456A 1997-08-16 1997-08-16 Apparatus of effective liquid quantity display in chemical medicine container KR100216558B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019970039456A KR100216558B1 (en) 1997-08-16 1997-08-16 Apparatus of effective liquid quantity display in chemical medicine container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019970039456A KR100216558B1 (en) 1997-08-16 1997-08-16 Apparatus of effective liquid quantity display in chemical medicine container

Publications (2)

Publication Number Publication Date
KR19990016544A true KR19990016544A (en) 1999-03-05
KR100216558B1 KR100216558B1 (en) 1999-08-16

Family

ID=19517808

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970039456A KR100216558B1 (en) 1997-08-16 1997-08-16 Apparatus of effective liquid quantity display in chemical medicine container

Country Status (1)

Country Link
KR (1) KR100216558B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101940406B1 (en) * 2017-07-12 2019-01-18 조정복 device for subdividing of hazardous Chemical substance

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101940406B1 (en) * 2017-07-12 2019-01-18 조정복 device for subdividing of hazardous Chemical substance

Also Published As

Publication number Publication date
KR100216558B1 (en) 1999-08-16

Similar Documents

Publication Publication Date Title
JP3121299B2 (en) Conductive device
EP0167409B1 (en) A level gauge for a liquid container
CN101680811A (en) calorimeter
US5029471A (en) Liquid level sensor assembly
US11904196B2 (en) Magnetic trap suppression tank level sensor
US3633193A (en) Warning system for preventing overfill in underground tanks having a gage box
KR19990016544A (en) Effective liquid display device in chemical container
KR100933481B1 (en) Leakage tester
JPWO2012066747A1 (en) Microbe count measuring device
US3417613A (en) Immersed tube level indicator in automotive vehicles
KR20120035861A (en) Measuring device of liquid sample
KR910008597Y1 (en) High press liquefaction gas volume meter
CN218401837U (en) Liquid storage device of chemiluminescence immunoassay analyzer
GB2120209A (en) Sampler for determining water depth and for obtaining a sample of bottoms from product storage tanks
CN217644988U (en) Cooking waterway system and steaming cooking device
KR0129371Y1 (en) A remaining gas detecting device of a halon gas vessel of fire extinguisher
JPS60827Y2 (en) Liquid container with liquid level detection and display device
CN212687594U (en) Water storage device for water purifier and water purifier
EP1248086B1 (en) Liquid level detection device
CN219694983U (en) Testing device for refrigeration equipment
SU1432376A1 (en) Liquid-sampling device
SU1312425A1 (en) Device for checking gas flow
KR200303971Y1 (en) Hand operated level gauge for liquefied gas using magnet
US5631420A (en) Hydrometer
RU2045749C1 (en) Float of level gauge for tanks subject to high pressure

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20070423

Year of fee payment: 9

LAPS Lapse due to unpaid annual fee