KR19980083316A - Ripple Hexagon Socket Screw and Ripple Hex Wrench for Semiconductor Manufacturing Equipment Assembly - Google Patents

Ripple Hexagon Socket Screw and Ripple Hex Wrench for Semiconductor Manufacturing Equipment Assembly Download PDF

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Publication number
KR19980083316A
KR19980083316A KR1019970018576A KR19970018576A KR19980083316A KR 19980083316 A KR19980083316 A KR 19980083316A KR 1019970018576 A KR1019970018576 A KR 1019970018576A KR 19970018576 A KR19970018576 A KR 19970018576A KR 19980083316 A KR19980083316 A KR 19980083316A
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South Korea
Prior art keywords
ripple
hexagonal
screw
groove
wrench
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KR1019970018576A
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Korean (ko)
Inventor
이윤재
이호준
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윤종용
삼성전자 주식회사
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Priority to KR1019970018576A priority Critical patent/KR19980083316A/en
Publication of KR19980083316A publication Critical patent/KR19980083316A/en

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Abstract

조립때 발생되는 나사 및 렌치의 마모를 줄이기 위해 육각 홈 및 렌치의 끝부분을 물결모양, 즉 리플형으로 제작한 반도체 제조설비 조립용 리플형 육각홈붙이나사 및 리플형 육각렌치에 관한 것이다.The present invention relates to a ripple hexagonal screw and a ripple hexagonal wrench for assembling semiconductor manufacturing equipment, in which a hexagonal groove and a tip of a wrench are formed in a wave shape, that is, ripple, in order to reduce wear of screws and wrenches generated during assembly.

본 발명에 따른 반도체 제조설비 조립용 리플형 육각홈붙이나사는, 반도체 제조설비 조립용 리플형 육각홈붙이나사에 있어서, 나사머리에 육각홈이 형성되고, 상기 육각홈의 각 내벽이 중심을 향해 볼록하게 형성됨을 특징으로 한다.In the ripple hexagonal grooved screw for assembling semiconductor manufacturing equipment according to the present invention, in the ripple hexagonal grooved screw for assembling semiconductor manufacturing equipment, a hexagonal groove is formed in the screw head, and each inner wall of the hexagonal groove is directed toward the center. It is characterized by being formed convex.

따라서, 본 발명에 의하면 리플형 육각홈붙이나사의 홈을 라운딩 형상화하고 리플형 육각렌치를 사용함으로써 홈의 측벽 및 렌치의 마모를 줄이고, 나사의 체결 및 체결해체시 나사와 리플형 육각렌치 상호간에 작용하는 힘의 효율을 향상시키는 효과가 있다.Therefore, according to the present invention, by rounding the groove of the ripple hexagonal grooved screw and using the ripple hexagonal wrench, the wear of the side wall and the wrench of the groove is reduced, and the screw and the ripple hexagonal wrench are mutually secured. There is an effect of improving the efficiency of the applied force.

Description

반도체 제조설비 조립용 리플형 육각홈붙이나사 및 리플형 육각렌치Ripple Hexagon Socket Screw and Ripple Hex Wrench for Semiconductor Manufacturing Equipment Assembly

본 발명은 반도체 제조설비 조립용 리플형 육각홈붙이나사 및 리플(Ripple)형 렌치(Wrench)에 관한 것으로서, 보다 상세하게는 조립때 발생되는 나사 및 렌치의 마모를 줄이기 위해 육각 홈 및 렌치의 끝부분을 물결모양, 즉 리플형으로 제작한 반도체 제조설비 조립용 리플형 육각홈붙이나사 및 리플형 육각렌치에 관한 것이다.The present invention relates to a ripple type hexagon groove screw and a ripple wrench (Wrench) for assembling semiconductor manufacturing equipment, and more particularly, to reduce wear of screws and wrenches generated during assembly. The present invention relates to a ripple hexagonal grooved screw and a ripple hexagonal wrench for assembling semiconductor manufacturing equipment, which are manufactured in a wave shape, that is, in a ripple shape.

나사(Screw)는 가장 많이 사용되는 결합용 기계요소 중 하나이다. 나사는 모든 기계, 기구, 각종장치등의 다양한 도구에 이르기까지 광범위하게 사용되고, 특히 육각홈붙이나사는 통상의 일자형 및 십자형나사에 비해 체결력이 뛰어나서 여러 분야에 사용되며 특히 반도체 제조설비에 포함되어 유용하게 사용된다.Screws are one of the most commonly used joining machines. Screws are widely used for various tools such as all machines, instruments, and various devices. Especially, hexagonal grooved screws are used in various fields because they have superior fastening force compared to general straight and cross-head screws, and are especially useful in semiconductor manufacturing facilities. Is used.

도1에서 보는 바와 같이 종래의 육각홈붙이나사는 나사머리(10)에 정육각형의 홈(12)이 형성되어 있다.As shown in Figure 1, the conventional hexagonal grooved screw is formed with a regular hexagonal groove 12 in the screw head (10).

나사머리(10)에 정육각형의 홈(12)이 형성되어 있는 육각홈붙이나사는 통상의 육각렌치(도시하지 않음)를 사용하여 조립하거나 해체시 육각렌치와의 접촉면이 넓어 통상의 나사에 비해 큰 힘이 작용된다.Hexagonal grooved screws with the regular hexagonal grooves 12 formed on the screw head 10 are assembled using a regular hexagonal wrench (not shown), or have large contact surfaces with the hexagonal wrench when dismantled. Force is at work.

그러나, 사용 중 육각홈붙이나사의 홈(12)과 육각렌치의 크기가 맞지 않은 상태에서 무리한 힘을 가하게 되면 육각홈붙이나사의 홈(12)의 측벽과 육각렌치의 모서리가 마모된다. 이는 육각홈붙이나사의 홈(12)의 측벽과 육각렌치의 닿는 면적이 줄어들어 발생되는 문제로 마모나 손상이 심한 경우 육각홈붙이나사를 체결하거나 체결해체하는데 어려움이 따른다.However, if an excessive force is applied in a state where the groove 12 of the hexagonal grooved screw 12 and the hexagonal wrench do not match during use, the sidewalls of the grooved groove of the hexagonal grooved screw 12 and the edges of the hexagonal wrench are worn. This is a problem caused by reducing the contact area between the side wall of the groove 12 of the hexagonal grooved screw 12 and the hexagonal wrench is difficult to fasten or disassemble the hexagonal grooved screw when severe wear or damage.

따라서, 종래의 육각홈붙이나사는 전술한 바와 같이 마모나 손상이 발생되기 쉬웠으며, 그로 인하여 육각홈붙이나사를 이용한 반도체 설비의 조립에 어려움이 따르게 되는 문제점이 있었다.Therefore, the conventional hexagonal grooved screw is easy to be worn or damaged as described above, and thus there is a problem in that it is difficult to assemble the semiconductor equipment using the hexagonal grooved screw.

본 발명의 목적은, 홈의 측벽과 렌치의 마모를 줄이고, 나사를 체결하거나 체결해체하는데 작용하는 힘의 효율을 높이는 반도체 제조설비 조립용 리플형 육각홈붙이나사 및 리플형 육각렌치를 제공하는 데 있다.SUMMARY OF THE INVENTION An object of the present invention is to provide a ripple hexagonal grooved screw and a ripple hexagonal wrench for assembling semiconductor manufacturing equipment which reduce the wear of the groove sidewalls and the wrench and increase the efficiency of the force acting on tightening or disengaging the screw. have.

도1은 종래의 반도체 제조설비 조립용 육각홈붙이나사를 나타내는 평면도와 Ⅰ - Ⅰ선 단면도이다.1 is a plan view and a sectional view taken along line I-I of a conventional hexagonal grooved screw for assembling semiconductor manufacturing equipment.

도2는 본 발명에 따른 반도체 제조설비 조립용 리플형 육각홈붙이나사 및 렌치의 실시예를 나타내는 평면도와 Ⅱ - Ⅱ선 단면도이다.2 is a plan view and II-II cross-sectional view showing an embodiment of a ripple hexagonal grooved screw and a wrench for assembling semiconductor manufacturing equipment according to the present invention.

도3은 본 발명에 따른 리플형 육각홈붙이나사와 이를 조립가능하게 하는 리플형 육각렌치를 보여주는 사시도이다.Figure 3 is a perspective view showing a ripple hex grooved screw according to the present invention and a ripple hexagon wrench to be able to assemble it.

* 도면의 주요 부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings

10, 20 : 나사머리 12, 22 : 홈10, 20: screw head 12, 22: groove

30 : 리플형 육각렌치30: Ripple Hex Wrench

상기 목적을 달성하기 위한 본 발명에 따른 반도체 제조설비 조립용 리플형 육각홈붙이나사는, 반도체 제조설비 조립용 리플형 육각홈붙이나사에 있어서, 나사머리에 육각홈이 형성되고, 상기 육각홈의 각 내벽이 중심을 향해 볼록하게 형성됨을 특징으로 한다.In order to achieve the above object, a ripple hexagonal grooved screw for assembling semiconductor manufacturing equipment according to the present invention comprises a hexagonal groove formed at a screw head in a ripple hexagonal grooved screw for assembling semiconductor manufacturing equipment. Each inner wall is formed to be convex toward the center.

본 발명에 따른 반도체 제조설비 조립용 리플형 육각렌치는, 나사머리에 각 내벽이 중심을 향해 볼록한 리플형 육각홈이 형성된 리플형 육각홈붙이나사를 조립하기 위한 리플형 육각렌치에 있어서, 상기 리플형 육각홈에 삽입되는 단부의 각 면이 오목하게 상기 리플형 육각홈에 대응되는 형상을 갖도록 구성됨을 특징으로 한다.In the ripple hexagon wrench for assembling a semiconductor manufacturing equipment according to the present invention, in the ripple hexagon wrench for assembling a ripple hexagon groove screw having a screw head formed with a ripple hexagon groove with a convex inner wall toward the center, the ripple Each surface of the end inserted into the hexagonal groove is characterized in that it is configured to have a shape corresponding to the ripple hexagonal groove.

이하, 본 발명의 구체적인 실시예를 첨부한 도면을 참조하여 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

본 발명에 따른 리플형 육각홈붙이나사의 실시예는 도2에서 보는 바와 같이 나사머리(20)의 홈(22)의 측벽이 내측으로 볼록하게 형성되어 있고, 상세한 홈형상이 Ⅱ - Ⅱ선의 단면에 나타나 있다.As shown in FIG. 2, the side wall of the groove | channel 22 of the screw head 20 is convexly formed inwardly, and the detailed groove shape is a cross section of the II-II line | wire as shown in FIG. Is shown in.

도2의 리플형 육각홈붙이나사는 도3과 같이 리플형 육각렌치(30)로 조립에 이용될 수 있으며, 리플형 육각렌치(30)의 단부는 리플형 육각홈붙이나사의 홈(22)과 대응되는 오목한 측벽을 갖는 형상이다.The ripple hexagonal grooved screw of FIG. 2 can be used for assembly with the rippled hexagonal wrench 30 as shown in FIG. 3, and the end of the rippled hexagonal wrench 30 is the groove 22 of the rippled hexagonal grooved screw. And a concave sidewall corresponding to the shape.

도2의 리플형 육각홈붙이나사는 반도체 설비를 조립 및 해체할 때 도3의 리플형 육각렌치(30)를 이용하여 조립 및 해체될 수 있으며, 리플형 육각렌치(30)의 단부가 리플형 육각홈붙이나사의 홈(22)에 삽입된 상태에서 리플형 육각렌치(30)를 회전시키면, 회전력이 리플형 육각홈붙이나사로 전달된다.The ripple hexagonal grooved screw of FIG. 2 can be assembled and disassembled using the ripple hexagon wrench 30 of FIG. 3 when assembling and disassembling the semiconductor equipment, and the end of the ripple hexagon wrench 30 is ripple type. When the ripple hexagon wrench 30 is rotated in the state inserted into the groove 22 of the hexagonal grooved screw, the rotational force is transmitted to the rippled hexagonal grooved screw.

리플형 육각홈붙이나사의 홈(22)의 라운딩 형상은 리플형 육각렌치(30)를 사용할 때 단순한 육각형인 경우에 비해 상호간의 접촉면이 확장되어 힘의 전달효율이 높고, 리플형 육각홈붙이나사의 홈(22) 및 리플형 육각렌치(30)의 마모가 감소하는 이점이 있다.The rounding shape of the groove (22) of the ripple type hexagon slotted screw has a higher force transmission efficiency due to the expansion of the contact surface between the hexagonal wrenches (30) than the simple hexagon type, and the ripple type hexagon slotted screw There is an advantage that the wear of the groove 22 and the ripple hexagon wrench 30 is reduced.

따라서, 본 발명에 의하면 리플형 육각홈붙이나사의 홈을 라운딩 형상화하고 리플형 육각렌치를 사용함으로써 홈의 측벽 및 렌치의 마모를 줄이고, 나사의 체결 및 체결해체시 나사와 리플형 육각렌치 상호간에 작용하는 힘의 효율을 향상시키는 효과가 있다.Therefore, according to the present invention, by rounding the groove of the ripple hexagonal grooved screw and using the ripple hexagonal wrench, the wear of the side wall and the wrench of the groove is reduced, and the screw and the ripple hexagonal wrench are mutually secured. There is an effect of improving the efficiency of the force acting.

이상에서 본 발명은 기재된 구체예에 대해서만 상세히 설명되었지만 본 발명의 기술사상 범위 내에서 다양한 변형 및 수정이 가능함은 당업자에게 있어서 명백한 것이며, 이러한 변형 및 수정이 첨부된 특허청구범위에 속함은 당연한 것이다.Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical scope of the present invention, and such modifications and modifications are within the scope of the appended claims.

Claims (2)

반도체 제조설비 조립용 리플형 육각홈붙이나사에 있어서,In the ripple hexagon socket head screw for assembling semiconductor manufacturing equipment, 나사머리에 육각홈이 형성되고, 상기 육각홈의 각 내벽이 중심을 향해 볼록하게 형성됨을 특징으로 하는 반도체 제조설비 조립용 리플형 육각홈붙이나사.Hexagonal groove is formed in the screw head, each inner wall of the hexagonal groove is ripple hexagonal grooved screw for assembling semiconductor manufacturing equipment, characterized in that is formed convexly toward the center. 나사머리에 각 내벽이 중심을 향해 볼록한 리플형 육각홈이 형성된 리플형 육각홈붙이나사를 조립하기 위한 리플형 육각렌치에 있어서,In the ripple hexagon wrench for assembling a ripple hexagon hexagonal screw having a screw head with a convex ripple hexagon groove formed at its inner wall, 상기 리플형 육각홈에 삽입되는 단부의 각 면이 오목하게 상기 리플형 육각홈에 대응되는 형상을 갖도록 구성됨을 특징으로 하는 반도체 제조설비 조립용 리플형 육각렌치.Ripple hexagon wrench for assembling semiconductor manufacturing equipment, characterized in that each side of the end inserted into the ripple hexagon groove is configured to have a shape corresponding to the ripple hexagon groove.
KR1019970018576A 1997-05-13 1997-05-13 Ripple Hexagon Socket Screw and Ripple Hex Wrench for Semiconductor Manufacturing Equipment Assembly KR19980083316A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101050236B1 (en) * 2010-12-20 2011-07-19 정효경 Tool device driver

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101050236B1 (en) * 2010-12-20 2011-07-19 정효경 Tool device driver

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