KR19980050454A - Vibration Micro Gyroscope - Google Patents

Abstract

1. TECHNICAL FIELD OF THE INVENTION

Vibration Micro Gyroscope

2. Technical problem to be solved by the invention

The present invention measures the vibration magnitude in the sensing direction from bending deformation by using a piezoresistor, and designs a structure such that the deformation in the sensing direction is relatively large using the piezoelectric resistor, thereby providing a vibration type micro gyroscope having excellent sensitivity. The purpose is to provide.

3. Summary of Solution to Invention

The present invention, the upper and lower support portions are formed, the outer structure vibrating in the vertical direction; Vibration mass provided in the inner central portion of the outer structure, and transmits the Coriolis force proportional to the rotational speed in the vertical direction as a rotational angular velocity is applied to the axis of the horizontal structure and the axis perpendicular to the plane from the outside; Comb electrodes provided on both sides of the mass and providing a horizontal electrostatic force thereto; And first and second anchors connected to both ends of the upper support of the outer structure, the first and second anchors being respectively provided with electrodes to output vibration signals to generate different excitation signals.

4. Important uses of the invention

The magnitude of vibration proportional to the rotational angular velocity in the direction perpendicular to the excitation axis is measured using a piezoresistor.

Description

Vibration Micro Gyroscope

The present invention relates to a silicon micro gyroscope sensor manufactured using micromachining.

In general, gyroscopes are well known as angular velocity measuring devices used in navigational devices and inertial guidance devices such as aircraft, ships and automobiles.

The conventional rotary gyroscope has a number of disadvantages such as being bulky and expensive to maintain high precision, and being easily damaged by shock and vibration.

In addition, a gyroscope using an optical fiber, a laser, etc., has excellent sensitivity but has not overcome the disadvantages of being expensive, difficult to manufacture, and bulky.

Meanwhile, a gyroscope is also required to have high sensitivity, low cost, and miniaturization, and a sensor having a different driving principle has been developed due to a demand for an angular velocity measuring device capable of solving this problem. In the US, Systron manufactures products that process piezoelectric quartz in the form of a tuning fork type beam and detect the amount of deformation due to Coriolis force. In addition, a study on angular velocity devices that have been further miniaturized using silicon micromachining was published in the IEEE MEMS Society in 1993 (J. Bernstein et al., Digest IEEE / ASME Miroco Electro Mechanical Systems (MEMS) Workshop, 1993, pp. 143).

Gyroscopes that can be manufactured using micromachining technology can meet the requirements of low cost and miniaturization. Conventional silicon micro gyroscopes manufactured using such a surface micromachining technique have a principle of vibrating the structure by generating a Coriolis force in a direction perpendicular to the plane on which the structure is placed. In this case, the displacement is very small due to the effects of air attenuation and the influence of the geometry, resulting in a decrease in sensitivity. It also works. In addition, a conventional micro gyroscope (angular velocity sensor) driven by a comb electrode uses a principle of detecting a change in capacitance in a vertical direction by enabling movement of two degrees of freedom in a mechanical structure. However, there is still a problem that the change of capacitance is so small as ^10-15 farad that the influence of parasitic capacitance or noise is large.

Accordingly, the present invention has been made to solve the above problems, by using a piezoresistor to measure the magnitude of the vibration in the sensing direction from bending deformation, the deformation of the sensing direction is relatively large using this The purpose of the present invention is to provide a vibrating micro gyroscope having excellent sensitivity by designing a structure so as to have a high sensitivity.

1 is a configuration diagram of an embodiment of a vibration gyroscope of the present invention in which a piezoresistive sensor is applied to a planar two degree of freedom vibration structure.

2 is a schematic diagram for explaining the principle of instability caused between comb teeth;

3 is a schematic diagram of another embodiment of the vibration gyroscope of the present invention in which a piezoresistive sensor is applied to a spring in the form of a curved beam;

Fig. 4A is a detailed view of a bonded structure showing weak properties in tension due to the brittleness and the bonded shape of the nitride film;

4B is a detailed view of an insulated joint with improved mechanical properties susceptible to tension.

* Detailed description of the main parts of the drawing

1: External Structure 2: First Spring

3: comb electrode 4: second spring

5, 6, 7: 1st, 2nd, 3rd anchor 8: insulation joint

9 piezo resistor 10 grounding electrode

11, 12: sensor electrode 13: insulating layer

14 metal wire 15 vibration mass

In order to achieve the above object, the present invention includes an external structure, a vibration mass provided in the interior of the external structure, and a boss spring connecting the external structure and the vibration mass, wherein the mass is left and right with respect to the external structure. When the external structure is supported by the boss spring so as to be able to move up and down by the boss spring, when the rotational angular velocity with an axis perpendicular to the plane is applied from the outside, the structure is moved up and down in the plane by the Coriolis force. It provides a vibrating micro gyroscope, characterized in that to vibrate.

In addition, the present invention is the upper and lower support portions are formed, the outer structure vibrating in the vertical direction; Vibration mass provided in the inner central portion of the outer structure, and transmits the Coriolis force proportional to the rotational speed in the vertical direction as a rotational angular velocity is applied to the axis of the horizontal structure and the axis perpendicular to the plane from the outside; Comb electrodes provided on both sides of the mass and providing a horizontal electrostatic force thereto; And first and second anchors connected to both ends of the upper support of the outer structure, the first and second anchors being respectively provided with electrodes to output vibration signals to generate different excitation signals.

Hereinafter, with reference to the accompanying drawings will be described an embodiment of the present invention;

1 is a configuration diagram of an embodiment of a vibration gyroscope of the present invention in which a piezoresistive sensor is applied to a planar two degree of freedom vibration structure. 2 is a schematic diagram for explaining the principle of instability caused between comb teeth; 3 is a schematic diagram of another embodiment of the vibration gyroscope of the present invention in which a piezoresistive sensor is applied to a spring in the form of a curved beam; Fig. 4A is a detailed view of a bonded structure showing weak properties in tension due to the brittleness and the bonded shape of the nitride film; 4B is a detailed view of an insulated joint with improved mechanical properties susceptible to tension.

In the drawings, 1 is an external structure, 1a is a support, 2 is a first spring, 3 is a comb electrode, 4 is a second spring, 5, 6, and 7 is a first, second and third anchor, 8 is an insulating joint, and 9 Denotes a piezoresistor, 10 denotes a ground electrode, 11 denotes a sensor electrode, 13 denotes an insulating layer, 14 denotes a metal wire, and 15 denotes a vibration mass.

The vibration type micro gyroscope of the present invention proposes a measuring method using a piezoresistive material to overcome the disadvantages of the conventional capacitance measuring method, so that the vibration in the sensing direction can be converted into the bending deformation of the beam and measured using the piezoresistive material. In addition, it proposes a structure that can move 2 degrees of freedom in the plane, and it is implemented to withstand the vibration environment from the outside because the insulating joint required for this has excellent mechanical properties. Looking at the structure and principle of the micro gyroscope of the present invention is designed so that the motion of (sensing) is all present in the plane in which the structure is placed.

Figure 1 shows a method of piezoresistive sensing with the driving principle of a planar two degree of freedom structure.

The mass 15 is provided with a rectangular structure in the center of the outer structure 1 in which the support 1a is formed in the upper and lower portions in a rectangular frame shape. In addition, the first and third anchors (5, 6, 7) are connected to the upper and lower support portions (1a) of the outer structure (1), all parts of the outer structure except this portion is removed from the substrate It is in a state. The first spring 2 connects the mass 15 and the outer structure 1, and the second spring 4 extending to the first spring 2 has the outer structure 1 and the anchors 5, 6. And 7) to support the entire structure. The mass 1 vibrates in the x direction by receiving electrostatic force from the comb electrodes 3 formed on both sides thereof.

Different excitation signals are applied to the excitation electrodes output from the electrodes 13 and 14 of the first and second anchors 5 and 6, respectively, to generate vibrations, wherein the mass 1 is applied to the third anchor 7. Connected to ground. Here, the insulating joint 8 electrically insulates and mechanically couples the electrodes 13 and 14 provided between the first spring 2 and the second spring 4 and the mass 15 in a ground state. Play a role. When a rotational angular velocity having a rotational axis perpendicular to the plane is applied from the outside, the mass 15 excited in the x direction receives the Coriolis force proportional to the rotational speed in the y direction. At this time, the first spring 2 restrains the y-direction movement of the mass 15 and transmits a force to the external structure. The forced external structure vibrates in the y direction by the guidance of the second spring 4.

The amount of vibration in the y direction is measured by the piezoresistive method to obtain a signal proportional to the angular velocity.

The piezoresistor 9 for measuring the vibration amount has its characteristics by doping boron B to the second spring 4 made of polysilicon, which is a connection portion with the third anchor 7. The piezoresistor 9 is connected to the third anchor 7 and is located at the portion where the bending deformation is greatest in the spring 4 which is in the ground state.

As shown in the enlarged view of FIG. 1, the connection of the metal wire 14 and the arrangement of the electrodes on the insulating film 13 together with the position of the piezoresistor 9 are shown. The piezoresistor 9 doped in the second spring 4 is located at the edge of the width of the second spring 4 so as to be as close to the third anchor 7 as possible to measure the maximum strain.

In addition, the width of the second spring 4 is set to an appropriate value in consideration of the line widths of the piezoresistor 9 and the metal wire 14. In order to improve the sensitivity, it is also possible to arrange the piezoresistive sensors 11 and 12 so as to be symmetrical on both width edges of the second spring 4 subjected to the bending deformation. The ground electrode 10 and the sensor electrodes 11 and 12 of the structure are respectively positioned in a row at the third anchor 7, wherein the sensor electrodes 11 and 12 and the metal wire 14 are placed on the nitride film and doped with poly It is insulated from the silicon structure.

As described above, the gyroscope of the present invention can improve the sensitivity of the sensor by measuring the large strain obtained by bending of the beam by using the piezoresistor 9.

The gyroscope shown in FIG. 1 may be affected by the noise in the y direction, but the influence of the modulation frequency of the excitation signal is much higher than the band of the detection signal.

FIG. 2 is a schematic diagram illustrating the principle of instability that may occur in the comb teeth, and when the voltage difference V is applied between the two comb electrodes 3a and 3b having a distance d, the potential energy U is (One)

Becomes Where ε is permittivity, t is the thickness of the comb electrode, l is the length of the overlapped comb teeth, and n is the number of comb teeth of the moving electrode 3b. If d is constant, the constant electric power fy in the y direction received by the electrode 3b is canceled by a pair of comb teeth to be zero, and the constant electric power fx in the x direction is Becomes Assuming that the electrode 3b has moved slightly in the y direction by Δd, the electrostatic force in the x direction is It is hardly different from Eq. (2), but the electrostatic force in the y direction This results in a force in the direction of increasing Δd further. That is, when Δd occurs, instability occurs between the two electrodes 3a and 3b, and in the worst case, the two electrodes are attached.

Although the vibration mass 15 of FIG. 1 vibrates in both the x direction and the y direction, instability in the comb electrode 3 is not caused because the distance between the comb electrodes 3 can always be kept constant.

FIG. 3 shows another exemplary embodiment with the principle of measuring the strain of the second spring 4 after having the curved second spring 4 have the properties of the piezoresistor 9. As shown in Fig. 3, the second spring 4 is in the form of a curved beam, and the Coriolis force in the y direction acts as a warp, so that a large strain is obtained, so that the sensitivity of the sensor can be improved. Compared with FIG. 1, the structure of FIG. 3 has a limit in increasing the strain, but has an advantage of not being limited in dimensions in the process of doping a piezoresistor and applying a metal wire.

FIG. 4 is an enlarged view of the insulating assembly 8 for the micro gyroscopes of FIGS. 1 and 3, wherein the insulating material deposited at the discontinuous point of the silicon structure is not reactive with the etching solution of the sacrificial layer oxide film. Select the nitride film. In the case where the structure of the insulating joint 8 is the same as that of Fig. 4A, it is weak in tension due to the brittleness and the joining shape of the nitride film. This embodiment proposes a structure that compensates for the above-described weaknesses using the same materials and processes as in FIG. 4A. That is, as shown in Fig. 4B, the annular structure has a large bonding area due to the large bonding area of the nitride film, and some joints are designed to be compressed even when the beam is tensioned, thereby overcoming the mechanical properties of the nitride film that is weak in tension. You can do it.

The present invention described above is not limited to the above-described embodiment and the accompanying drawings, and various substitutions, modifications, and changes are possible within the scope without departing from the technical spirit of the present invention. It will be evident to those who have knowledge of.

As described above, according to the present invention, the high sensitivity of the micro gyroscope using the micro-machining technique through the method of measuring the deformation of the beam subjected to bending by the piezoresistive resistance and by increasing the deformation of the sensing direction by the structural design using the insulation bonding method. Has the effect of achieving.

Claims (10)

External structure, And an oscillating mass provided inside the outer structure and a boss spring connecting the outer structure and the oscillating mass, wherein the mass oscillates from side to side with respect to the outer structure, and the outer structure moves up and down by a boss spring. A vibration type micro gyroscope, characterized in that, when supported by the boss spring, the structure vibrates up and down in the plane by a Coriolis force when a rotational angular velocity with an axis perpendicular to the plane is applied from the outside. The upper and lower support portions are formed, the outer structure vibrating in the vertical direction; Vibration mass provided in the inner central portion of the outer structure, and transmits the Coriolis force proportional to the rotational speed in the vertical direction as a rotational angular velocity is applied to the axis of the horizontal structure and the axis perpendicular to the plane from the outside; Comb electrodes provided on both sides of the mass and providing a horizontal electrostatic force thereto; And first and second anchors connected to both ends of an upper support of the external structure, the first and second anchors being respectively provided to output different excitation signals to generate vibrations. According to claim 2, A first spring for connecting the support and the vibration mass of the external structure, restraining the longitudinal movement of the vibration mass and transmitting a force to the external structure, and the external structure and the first and second anchor And a second spring for guiding the external structure under pressure to vibrate in a longitudinal direction. 3. The apparatus of claim 2, further comprising: insulating bonding means mounted on the upper support of the outer structure and the connection portions of the first and second anchors to electrically insulate and mechanically couple to each other; Vibration type micro gyroscope further comprises. 5. The vibratory micro gyroscope according to claim 4, wherein the insulating bonding means has a planar annular shape for improving mechanical properties that are weak in tension. The method of claim 2 or 3, And a third anchor disposed at both ends of the second spring connected to the lower support of the outer structure, the third anchor measuring the up and down vibration magnitude of the structure proportional to the angular velocity by the bending deformation of the beam. The method of claim 6, And the third anchor further includes a piezoresistor connected to a third anchor in a portion proximate to the second spring to measure a vibration strain obtained by the bending of the second spring. The vibration type micro gyroscope according to claim 7, wherein the oppressive antibody is formed by doping boron to a spring made of polysilicon. The method of claim 2, Further comprising a boss spring disposed in the left and right directions to connect the support and the third anchor of the external structure, by applying a piezoresistive material to a predetermined position of the beam spring to increase the vertical vibration of the external structure proportional to the angular velocity Vibration type micro gyroscope, characterized in that measured by the bending deformation. The method of claim 2, further comprising a boss spring connecting the support and the third anchor of the outer structure, each of which is arranged in the vertical direction in a bent shape by a predetermined angle, the piezoresistive material is applied to a predetermined position of the boss spring Vibration type micro gyroscope, characterized in that for measuring the vertical vibration magnitude of the structure proportional to the angular velocity from the deformation of the curved beam.