KR102677405B1 - Fan filter unit - Google Patents

Abstract

The present invention relates to fan filter units. A fan filter unit according to the present invention includes a housing; a fan disposed inside the housing; a filter disposed on one side of the fan to purify air; a filter frame coupled to one side of the housing and surrounding an edge of the filter; A differential pressure measurement sensor disposed inside the housing or exposed to the outside of the housing and measuring the differential pressure between the upstream side of the filter and the downstream side of the filter; a fitting part installed to penetrate at least a portion of the housing or the filter frame; and a connection part connected to the differential pressure measurement sensor and the fitting part.

Description

Fan filter unit {FAN FILTER UNIT}

The present invention relates to a fan filter unit comprising a differential pressure measurement sensor.

A clean room refers to an enclosed space where floating particles in the air are removed and environments such as temperature, humidity, and air pressure are controlled for the production of high-precision electronic products. A fan filter unit is installed on the ceiling of the clean room and/or a booth containing equipment and equipment within the clean room to maintain the air at a certain level of cleanliness, and inside the fan filter unit, the differential pressure between the upstream and downstream sides of the filter is installed. A differential pressure measurement sensor is provided to measure.

An example of such a fan filter unit is disclosed in Patent Publication No. 10-2008-0054019 (June 17, 2008). The fan filter unit disclosed in Patent Publication No. 10-2008-0054019 includes a differential pressure measurement sensor for detecting the differential pressure between the front and back of the filter member. Additionally, the fan filter unit includes an external communication means connected to the differential pressure measurement sensor to enable communication with the lower part of the filter member, and the external communication means is installed inside the fan filter unit. This structure had the problem of making it difficult for workers to install and maintain external communication means.

The first object of the present invention is to provide a fan filter unit including a fitting part that is easy to install as an external communication means for measuring the pressure on the downstream side of the filter using a differential pressure measurement sensor installed inside the housing. It is provided.

The second object of the present invention is to provide a fan filter unit having a fitting on the outside of the housing to facilitate connection and maintenance of the differential pressure measurement sensor and the fitting by an operator.

The third object of the present invention is to provide a configuration that can protect the fitting part installed on the outside of the housing from external shock.

The fourth purpose of the present invention is to propose a fan filter unit capable of controlling the wind speed of the fan by checking the wind volume value on the downstream side of the filter through real-time monitoring, and a clean room equipped with the same.

The fan filter unit according to the present invention described above includes a housing; a fan disposed inside the housing; a filter disposed on one side of the fan to purify air; a filter frame coupled to one side of the housing and surrounding an edge of the filter; A differential pressure measurement sensor disposed inside the housing or exposed to the outside of the housing and measuring the differential pressure between the upstream side of the filter and the downstream side of the filter; a fitting part installed to penetrate at least a portion of the housing or the filter frame; and a connection part connected to the differential pressure measurement sensor and the fitting part.

The connection portion corresponds to a first connection portion, and the fitting portion includes: a first fitting portion mounted to penetrate at least a portion of the housing; and a second fitting part mounted to penetrate at least a portion of the filter frame, wherein the differential pressure measurement sensor is disposed on the inside of the housing, and the first fitting part is connected to the first connection part disposed on the inside of the housing. It is connected to, and the first fitting part and the second fitting part are connected to each other by a second connection part on the outside of the housing.

At least a portion of the differential pressure measurement sensor is installed to be exposed to the outside of the housing, the fitting portion is installed to penetrate at least a portion of the filter frame, and the differential pressure measurement sensor is connected to the fitting portion by the connection portion on the outside of the housing. It is characterized by being connected to.

The filter frame includes an inner wall surrounding the periphery of the filter; and an outer wall surrounding the inner wall at a position spaced apart from the inner wall, wherein the fitting part penetrates at least a portion of the filter frame and is exposed to an inner space formed between the inner wall and the outer wall. do.

A hole in the filter frame is formed between the inner wall and the outer wall, and the filter frame further includes a support portion protruding from a periphery of the outer wall, and the filter frame is formed on the downstream side of the filter and the inner side of the filter frame through the hole. In order to allow spaces to communicate with each other, the support part is characterized in that the outer surface between the inner wall and the outer wall is spaced from the mold bar where the fan filter unit is installed.

A sealing part is installed on the outer surface between the inner wall and the outer wall, and the two parts of the sealing part are spaced apart from each other at a position corresponding to the lower hole to form an air flow path extending from the lower hole to the downstream side of the filter. Do it as

The inner wall includes a first area facing the periphery of the filter; and a second area extending from the first area and exposed to the downstream side of the filter, wherein a hole is formed in the second area to communicate between the downstream side of the filter and the inner space of the filter frame. It is characterized by

The fan filter unit further includes a fitting cover, the fitting cover comprising: an outer wall formed to surround the fitting exposed to the outside of the housing or to the outside of the filter frame; and a coupling portion protruding from the outer wall, wherein the fitting cover is coupled to the housing or the filter frame by a fastening member connecting the coupling portion and the housing.

A threaded structure is formed or installed in the filter frame and is screwed to the fitting part. The threaded structure formed in the filter frame is formed by processing at least a portion of the filter frame into a thread shape, and the threaded structure is formed in the filter frame. The structural part is characterized by having threads on the inner peripheral surface that are screwed together with the fitting part.

Additionally, the present invention provides a clean room equipped with the fan filter unit. The clean room of the present invention includes a mold bar installed at the top of the clean room to form a mounting area for a plurality of fan filter units; It includes a plurality of fan filter units installed in the plurality of fan filter unit mounting areas formed by the mold bar, wherein each of the plurality of fan filter units includes a housing; a fan disposed inside the housing; a filter disposed on one side of the fan to purify air; a filter frame coupled to one side of the housing and surrounding an edge of the filter; A differential pressure measurement sensor disposed inside the housing or exposed to the outside of the housing and measuring the differential pressure between the upstream side of the filter and the downstream side of the filter; a fitting part installed to penetrate at least a portion of the housing or the filter frame; and a connection part connected to the differential pressure measurement sensor and the fitting, wherein each of the fans provided in the plurality of fan filter units is located upstream and downstream of the filter measured by the differential pressure measurement sensor of each fan filter unit. It is characterized in that it is independently controlled based on the differential pressure on the side.

The effects of the present invention obtained through the above-described solution are as follows.

First, according to the present invention, the differential pressure measurement sensor is disposed inside the housing or installed to be exposed to the outside of the housing, the fitting part is installed to penetrate at least a portion of the housing or the filter frame, and the differential pressure measuring sensor and the fitting are connected by the connection part. Since they are connected to each other, it is possible to measure the differential pressure between the upstream and downstream sides of the filter by the differential pressure measurement sensor.

In addition, since the connection to the fitting part is completed by inserting a connection part consisting of a hose, tube, pipe, etc. into the fitting part, this structure allows the worker to easily install and maintain the fan filter unit equipped with a differential pressure measurement sensor. Make repairs possible.

Second, a hole is formed at the bottom of the filter frame to enable communication between the inner space of the filter frame and the downstream side of the filter, and a support portion is formed at the bottom of the filter frame to space the filter frame upward from the mold bar. Accordingly, air located on the downstream side of the filter can flow into the inner space of the filter frame through the gap between the bottom of the filter frame and the mold bar, and the pressure of the inner space of the filter frame is the same as the pressure on the downstream side of the filter. It becomes. The differential pressure measurement sensor is connected to the hose and the fitting, and the fitting is penetrated and coupled to the filter frame, so the differential pressure measurement sensor can measure the internal pressure of the filter frame corresponding to the downstream pressure of the filter.

In addition to this structure, according to another embodiment of the present invention, the inner wall of the filter frame is divided into a first area surrounding the periphery of the filter and a second area extending from the first area and exposed to the downstream side of the filter, As a hole is formed in area 2, the downstream side of the filter and the inner space of the filter frame can communicate with each other through the hole. In this case as well, since the pressure of the inner space of the filter frame is the same as the pressure of the downstream side of the filter, the internal pressure of the filter frame corresponding to the pressure of the downstream side of the filter can be measured through the differential pressure measurement sensor.

Third, the fitting cover may include an outer wall formed to surround the fitting and a coupling portion coupled to the housing of the fan filter unit. The fitting part cover can protect the fitting part from external shock.

Fourth, due to the ease of installation and maintenance of the differential pressure measurement sensor, a differential pressure measurement sensor can be installed in each fan filter unit. The wind speed of the fan provided in each fan filter unit can be independently and actively controlled based on the difference between the upstream and downstream pressures of the filter measured by each differential pressure measurement sensor.

1 is a conceptual diagram of the installation of a fan filter unit.
Figure 2 is a perspective view of a fan filter unit and a fitting cover separated from the fan filter unit.
Figure 3 is an exploded perspective view of the fan filter unit.
Figure 4 is an enlarged view of a fitting part that is a component of a fan filter unit.
Figure 5 is a cross-sectional view of the fan filter unit.
Figure 6 is a perspective view of a filter and filter frame, which are components of a fan filter unit.
Figure 7 is a perspective view of a sealing portion coupled to a filter frame.
Figure 8 is a partial perspective view of a filter frame for a variant of the fan filter unit.
Figure 9 is a cross-sectional view of the filter and filter frame at the position where the lower hole is formed for a modified example of the fan filter unit.
Figure 10 is a cross-sectional view showing another embodiment of the fan filter unit.
Figure 11 is a conceptual diagram showing the difference in external static pressure for each zone in a clean room regarding a control method using a fan filter unit.
Figure 12 is a conceptual diagram comparing a conventional control method (a) and the control method (b) of the present invention regarding a control method using a fan filter unit.
13 is a perspective view of an equipment fan filter unit as another example of a fan filter unit.
14 is a cross-sectional view of an equipment fan filter unit as another example of a fan filter unit.

Hereinafter, the fan filter unit 10 including the differential pressure measurement sensor 300 will be described in detail with reference to the drawings.

First, referring to FIGS. 1 and 2, the appearance of the fan filter unit 10 will be described.

FIG. 1 is a conceptual diagram of the installation of the fan filter unit 10, and FIG. 2 is a perspective view of the fan filter unit 10 and the fitting cover 600 separated from the fan filter unit 10.

At the top of the clean room, partition frames or mold bars (M) are formed in a grid like a checkerboard, and the fan filter unit 10 formed by the partition frames or mold bars (M) is seated. settled in the area.

As shown in FIG. 1, a plurality of fan filter unit 10 seating areas may be formed, and accordingly, a plurality of fan filter units 10 may be installed in a clean room.

The fan filter unit 10 may be installed in a clean room, but may also be installed in equipment within the clean room or in a booth containing the equipment. This will be described later with reference to separate drawings.

Referring to FIG. 2, the fan filter unit 10 has an overall shape close to a hexahedron. The fan filter unit 10 includes a housing 700 that forms the top and side surfaces of a hexahedron. Here, the standards for directions such as top or side surfaces are determined by referring to the drawings for convenience of explanation, and do not mean absolute directions. And the filter 100 (see FIG. 3) and the filter frame 200 are coupled to the lower part of the housing 700. A fan unit 900 and a differential pressure measurement sensor 300, which will be described later, are installed inside the hexahedron formed by the housing 700 and the fan 910. Below, each configuration will be described one by one.

The housing 700 includes a main body 710 and side walls 720 and 730. Here, the main body 710 has a diagonal (C) shape that forms the two opposing sides and top of the hexahedron. And the side walls 720 and 730 form the remaining two sides that are not formed by the main body 710. The side walls 720 and 730 are arranged to face each other at spaced apart positions, and are formed in a structure that can be coupled to or separated from the main body 710.

The side walls 720 and 730 may be divided into a first side wall 720 and a second side wall 730 depending on the installation of the fitting part 400 (see FIG. 3). For example, the side wall through which the fitting part 400 is installed may be divided into a first side wall 720, and the side wall through which the fitting part 400 is not installed may be divided into a second side wall 730.

The first side wall 720 and the second side wall 730 have an overall shape similar to a flat plate, but the lower end of the first side wall 720 and the lower end of the second side wall 730 are seated on the filter frame 200, which will be described later. It has the shape to become. Specifically, extension portions are formed at the bottom of the first side wall 720 and the bottom of the second side wall 730, respectively. In order to distinguish the extension formed at the bottom of the first side wall 720 from the extension formed at the bottom of the second side wall 730, they will be called first extension 721 and second extension 731, respectively. This is possible, and this will be described later (see FIG. 3).

A filter 100 is installed in the lower part of the housing 700. The filter 100 refers to a particle filter that filters particles in the air, and may have a shape corresponding to a flat hexahedron. The filter 100 is configured to filter particulate matter from air supplied to the clean room through the fan filter unit 10.

The filter frame 200 wraps around the filter 100 to fix the filter 100. Here, the circumference of the filter 100 refers to the circumference in the lateral direction based on the drawing. For example, the filter frame 200 is formed to surround the filter 100 in the lateral direction. The filter frame 200 is coupled to the lower part of the housing 700, and the circumference of the filter 100 is fixed to the filter frame 200.

The fan unit 900 is seated in the area formed by the housing 700. The upper surface of the housing 700 is open, and the fan unit 900 is exposed to the upper side of the housing 700. When the fan 910 of the fan unit 900 operates, air above the fan filter unit 10 flows into the fan filter unit 10, passes through the filter 100, and is supplied to the clean room.

The top cover 800 is disposed on the upper surface of the housing 700. The top cover 800 is disposed on one side and the other side of the fan unit 900 in one direction.

The fitting part cover 600 is formed to protect the fitting part 400 from external shock. The fitting cover 600 includes an outer wall 610 and a coupling portion 620.

When looking at the first side wall 720 through which the fitting part 400 is installed from the front, the outer wall 610 is formed to surround the left, right, and upper sides of the fitting part 400. The coupling portion 620 protrudes from the outer wall 610 on both sides and comes into contact with the first side wall 720, and extends along the first side wall 720.

A coupling hole 630 is formed in the coupling portion 620 at a position facing the first side wall 720 of the housing 700. When a fastening member (not shown) is fastened to the coupling hole 630, the coupling portion 620 is coupled to the housing 700.

Referring to FIG. 2, the fitting cover 600 is separated from the first side wall 720. When the fitting cover 600 is separated from the side wall of the housing 700, the fitting part 400 and the connection parts 440 and 450 that are protected by the fitting cover 600 are exposed.

The fitting part 400 includes a first fitting part 410 and a second fitting part 470. The first fitting part 410 is mounted on the first side wall 720 corresponding to the side surface of the housing 700. And the second fitting part 470 is mounted on the upper part of the filter frame 200. The differential pressure measurement sensor 300, which will be described later, is connected to the first fitting part 410 through a first connection part 440. And the first fitting part 410 penetrates the side of the housing 700 of the fan filter unit 10 and is exposed to the outside of the housing 700.

At least a portion of the first fitting portion 410 may extend downward from the outside of the housing 700 toward the filter frame 200 . And the first fitting part 410 and the second fitting part 470 are connected to each other by a second connection part 450 on the outside of the housing 700.

The second fitting part 470 is formed to extend in one direction. The second fitting part 470 may penetrate the upper part of the filter frame 200 and at least a portion of the second fitting part 470 may be exposed to the inner space of the filter frame 200.

Next, the fan filter unit 10 will be described for each component with reference to FIGS. 3, 4, and 5.

FIG. 3 is an exploded perspective view of the fan filter unit 10, FIG. 4 is an enlarged view of the fitting part 400, which is a component of the fan filter unit 10, and FIG. 5 is a cross-sectional view of the fan filter unit 10.

The fan filter unit 10 according to an embodiment of the present invention includes a filter 100, a filter frame 200, a differential pressure measurement sensor 300, a fitting part 400, a motor 500, a housing 700, and a fan. Includes a unit 900 and a top cover 800.

The filter 100 filters particulate matter from the air supplied to the clean room, and is disposed at the most downstream side of the fan filter unit 10 based on the air flow. Accordingly, the air passing through the fan filter unit 10 is finally filtered through the filter 100 and then discharged from the fan filter unit 10 and supplied to the clean room.

The filter frame 200 is formed in a structure that surrounds the side of the edge of the filter 100. The filter frame 200 includes an inner wall 220 and an outer wall 230.

The inner wall 220 of the filter frame 200 is formed to face the side of the filter 100 in the lateral direction of the filter 100. The inner wall 220 of the filter frame 200 surrounds the perimeter or edge of the filter 100.

The outer wall 230 of the filter frame 200 is formed to face the inner wall 220 at a position spaced apart from the inner wall 220 based on the lateral direction of the filter 100. The outer wall 230 surrounds the inner wall 220 at a position spaced apart from the inner wall 220.

The structure of the filter frame 200 will be described in detail later with reference to FIGS. 6 and 7.

The differential pressure measurement sensor 300 is disposed inside the housing 700 and installed on the upper side of the filter 100. The differential pressure measurement sensor 300 measures the pressure difference by measuring the upstream pressure (upper pressure) and the downstream pressure (lower pressure) of the filter 100. The upstream pressure or upper pressure of the filter 100 refers to the internal pressure of the fan filter unit 10. In addition, the downstream pressure or lower pressure of the filter 100 refers to the pressure of the clean room, which is the area where air is discharged based on the air flow.

However, the pressure in the clean room may vary by zone. Therefore, the downstream pressure or lower pressure of the filter 100 detected by the differential pressure measurement sensor 300 does not represent the pressure of the entire clean room, but corresponds to the pressure of the zone where the fan filter unit 10 is installed. .

The differential pressure measurement sensor 300 is connected to the fitting part 400 by a hose to measure the pressure at the bottom of the particle filter 100. The fitting part 400 is installed to penetrate at least a portion of the housing 700 or the filter frame 200 of the fan filter unit 10. The fitting part 400 includes a first fitting part 410 mounted on the first side wall 720 of the housing 700 and a second fitting part 470 mounted on the upper part of the filter frame 200.

The first fitting part 410 is installed to penetrate the first side wall 720 of the housing 700 in the lateral direction. The first fitting part 410 can be divided into a part disposed inside the housing 700 based on the first side wall 720 and another part exposed to the outside of the housing 700.

A connection receiving portion 420 is formed at the end of the first fitting portion 410. Here, the end of one part refers to the part furthest from the first side wall 720 to the inside of the housing 700. The first connection part 440 is inserted into this connection receiving part 420 using a one-touch fitting method. Here, the one-touch fitting method refers to a method in which the connection parts 440 and 450 are fixed within the connection receiving part 420 upon insertion of the connection parts 440 and 450, and the hose is not arbitrarily pulled out without separate manipulation. In addition, here, the separate operation refers to the operation of pulling the end of the connection portion receiving portion 420 to release the fixation of the connection portions 440 and 450.

A connection part receiving part 420 is also formed at the end of the other part of the first fitting part 410. The other portion is exposed to the outside of the housing 700 and extends downward toward the filter frame 200 in an elbow shape. For example, the elbow shape may have a memory (L) shape as shown in FIG. 4. The end of the other part refers to the part furthest from the first side wall 720 to the outside of the housing 700. The second connection part 450 is inserted into this connection receiving part 420 using a one-touch fitting method.

When the first connection part 440 is inserted into the connection receiving part 420 through the one-touch fitting method, the differential pressure measurement sensor 300 is connected to the first fitting part 410 by the first connection part 440 on the inside of the housing 700. ) is connected to. Likewise, the first fitting part 410 may be connected to the second fitting part 470 by the second connection part 440 on the outside of the housing 700, and the one-touch fitting method connects the second connection part 450 and the second connection part 450. It can also be applied to the combination of the fitting portion 470.

In the present invention, the connection portions 440 and 450 have an internal space and refer to a configuration that can be connected to a counterpart, and may be made of various configurations such as hoses, tubes, and piping.

Meanwhile, according to this structure, the fan filter unit 10 can be installed more easily by an operator. When installing the fan filter unit 10 including the differential pressure measurement sensor 300 inside the housing 700 in a clean room, the second fitting part 470 is connected to the filter frame 200 from the outside of the housing 700. This is because installation can be completed simply by inserting the second connection part 450 into the first fitting part 410 and the second fitting part 470 after installation on the upper part.

The operation of connecting the differential pressure measurement sensor 300 and the first fitting part 410 using the first connection part 440 may be performed before the fan filter unit 10 is shipped. Accordingly, at the installation site of the fan filter unit 10, no separate work is required to connect the differential pressure measurement sensor 300 to the first fitting part 410.

In addition, the first fitting part 410, the second fitting part 470, and the second connection part 440, which are components that connect the differential pressure measurement sensor 300 to the second fitting part 470, are attached to the housing 700. Since it is exposed to the outside, maintenance of these components also facilitates maintenance work for workers in that there is no need to disassemble the housing 700.

The first fitting part 410 has a body 411 formed in a cylindrical structure. Additionally, the first fitting part 410 has a flange 413 with a larger diameter than the body 411.

A fitting hole through which the body 411 of the first fitting part 410 can be coupled is formed in the first side wall 720 of the housing 700. The body 411 of the first fitting part 410 is inserted into the fitting hole from the outside of the housing 700, and at this time, the flange 413 is attached to the first fitting part 410 so that it can be coupled only to a certain portion of the body 411. The diameter of the body 410 (410) is larger than that of the body 411. The nut 412 may be coupled toward the body 411 of the first fitting part 410 from the inside of the housing 700. A flange 413 is formed on the outside of the housing 700 based on the first side wall 720, and a nut 412 is coupled to the outside of the housing 700 to form the first fitting portion 410 on the first side wall ( 720).

A portion of the second fitting portion 470 is coupled to the end of the first fitting portion 410 by a second connecting portion 450 in a one-touch fitting manner. The second fitting portion 470 is formed to extend from one part to the other part in one direction. One part of the second fitting part 470 is exposed to the outside of the filter frame 200, and the other part of the second fitting part 470 penetrates the upper part of the filter frame 200 so that at least a portion of the second fitting part 470 is exposed to the outside of the filter frame 200. may be exposed to the inner space of

Additionally, a threaded structure to which the second fitting part 470 can be coupled may be formed or installed in the filter frame 200.

An example of the threaded structure formed of the filter frame 200 may include processing at least a portion of the filter frame 200 into a threaded shape, such as a burring operation. When a hole is formed in the filter frame 200 through a burring operation, a thread is formed on the inner peripheral surface of the hole.

An example of a threaded structure installed on the filter frame 200 may be a structure having threads, such as a pop nut 480. For example, as shown in the drawing, an upper hole 260 into which a pop nut 480 can be pressed is formed at the top of the filter frame 200. A thread is formed on the inner peripheral surface of the pop nut 480 press-fitted into the upper part of the filter frame 200, and the second fitting part 470 is screwed to the pop nut 480.

If the structure of the pop nut 480 is described in more detail with reference to FIG. 4, the pop nut 480 includes a body 481 and a head 482. The body 481 has a hollow cylindrical shape, and the previously described screw thread is formed on the inner peripheral surface of the body 481.

And the head 482 is formed at the top of the body 481 and has a larger outer diameter than the body 481. Accordingly, the body 481 of the pop nut 480 may be press-fitted into the upper hole 260 of the filter frame 200, and the head 482 may be seated on the upper surface of the filter frame 200.

The motor 500 that drives the fan 910 is seated on one surface of the support member 510. The support member 510 may be coupled to two sides of the main body 710 of the housing 700. Support member 510 includes protrusions 512 . The protrusion 512 may be formed to protrude toward a portion that contacts both sides of the support member 510 and the two sides of the corresponding main body 710. In addition, the protrusion 512 is provided with a screw hole 511 that can be coupled to the main body 710.

Referring to the upper right side of FIG. 3, the first side wall 720 of the housing 700 is supported by the filter frame 200, and the first side wall 720 is formed to surround one upper surface of the filter frame 200. It includes a first extension portion 721. The first extension portion 721 protrudes outward from the bottom of the first side wall 720. In addition, the first extension 721 extends from the end of the first extension 721 protruding outward from the first side wall 720 in the direction of the filter frame 200 so as to surround the outer surface of the filter frame 200. A downward projection is formed.

The second side wall 730 of the housing 700 may also have substantially the same shape as the first side wall 720 so that it is supported by the filter frame 200.

The first extension 721 has a seating hole 722 formed at a position facing the upper hole 260 of the filter frame 200, which will be described later. The inner diameter of the seating hole 722 is larger than the inner diameter of the upper hole 260 of the filter frame 200. The second fitting part 470 passes through the seating hole 722 formed in the first extension part 721 and is coupled to the upper hole 260 of the filter frame 200.

Next, referring to FIGS. 6 and 7, the structure of the filter frame 200 will be described.

FIG. 6 is a perspective view of the filter 100 and the filter frame 200, which are components of the fan filter unit 10, and FIG. 7 is a perspective view of the sealing portion 250 coupled to the filter frame 200.

Referring to FIGS. 6 and 7 , the filter frame 200 is formed to surround the side edge of the filter 100 installed in the lower portion of the housing 700.

The filter frame 200 may be composed of an inner wall 220 in contact with the edge surface of the filter 100, and an outer wall 230 facing the inner wall 220 at a position spaced apart from the inner wall 220. there is. Due to the structure of the inner wall 220 and the outer wall 230 of the filter frame 200, an inner space is formed between the inner wall 220 and the outer wall 230.

The filter frame has an upper wall and a lower wall connecting the inner wall 220 and the outer wall 230, and a lower hole 210 is formed in the lower wall between the inner wall 220 and the outer wall 230.

The lower hole 210 is formed at a position corresponding to the upper hole 260 formed at the top of the filter frame 200. The lower hole 210 communicates with the second fitting part 470 installed in the upper hole 260 by the second connection part 450.

The filter frame 200 may further include a support portion 290 protruding from the periphery of the outer wall 230. For example, the support portion 290 may protrude downward along the perimeter of the outer wall 230. The support portion 290 may space the filter frame 200 at a certain interval from the mold bar M described in FIG. 1 to form an air flow path in the space between the support portion 290 and the mold bar M. .

To explain this structure again, the support part 290 is connected to the inner wall 220 and the outer wall so that the downstream side of the filter 100 and the inner space of the filter frame 200 can communicate with each other through the lower hole 210. The lower wall corresponding to the outer surface between (230) is spaced upward from the mold bar.

According to this structure of the support part 290, air can be introduced from the clean room on the downstream side of the filter 100, and the differential pressure measurement sensor ( Using the air coming into 300), the pressure on the downstream side of the filter 100 can be measured.

Sealing parts 250 may be disposed at both ends of the empty space formed between the inner wall 220 and the outer wall 230 to prevent air from leaking. The sealing part 250 may serve to prevent air leakage from parts in contact with each other in order to maintain the airtightness of the space.

The sealing portion 250 is configured for airtightness and may be made of, for example, a gasket, rubber, or other material. The sealing portion 250 may also be installed on the outer surface between the inner wall 220 and the outer wall 230.

At the bottom of the filter frame 200, an empty space may be provided between the filter frame 200 and the mold bar M due to the structure of the support portion 290 formed on the filter frame 200. The sealing portion 250 may be installed in close contact with the support portion 290 formed on the filter frame 200. Additionally, when the fan filter unit 10 is installed on the mold bar (M), the sealing portion 250 may be pressed by the lower wall of the filter frame 200 and the mold bar (M).

Referring to FIG. 7, the sealing portion 250 is not installed in the lower hole 210 formed in the filter frame 200 and the portion adjacent to the lower hole 210. Due to this structure, an air flow path used to measure the pressure downstream of the filter 100 can be formed in the area adjacent to the lower hole 210. Additionally, the air flow path formed in the area adjacent to the lower hole 210 may be formed to extend from the lower hole 210 to the lower part of the filter 100.

Meanwhile, the lower hole 210 of the filter frame 200 may be formed in a location other than the lower wall, which will be described with reference to FIGS. 8 and 9.

Figures 8 and 9 relate to a modified example of the fan filter unit provided by the present invention. Figure 8 is a partial perspective view of the filter frame, and Figure 9 is a cross-sectional view of the filter and the filter frame at the position where the lower hole is formed.

The inner wall 220' of the filter frame 200' may be divided into a first area 220'a and a second area 220'b depending on whether the inner wall 220' faces the periphery of the filter 100'.

The first area 220'a corresponds to an area facing the periphery of the filter 100'. Based on the drawing, the first area 220'a faces the side perimeter of the filter 100'. And the second area 220'b extends from the first area 220'a and is exposed to the downstream side of the filter 100'. Unlike the first area 220'a, the second area 220'b does not face the side surface of the filter 100'.

According to this structure, the upper and lower heights of the filter frame 200' are formed to be higher than the filter 100' by the upper and lower heights of the second area 220'b. If the top of the filter 100' and the top of the filter frame 200' are formed at the same position, the bottom of the filter frame 200' is formed at a lower position than the bottom of the filter 100'.

A lower hole 210' opening toward the downstream side of the filter 100', that is, the clean room, is formed in the second area 220'b. The lower hole 210' is open toward the side. Since the second area 220'b is not obscured by the filter 100', the inner space of the filter frame 200' and the downstream space of the filter 100' communicate with each other through the lower hole 210'. You can do it.

According to this structure, there is no support at the bottom of the filter frame 200', and even if the bottom of the filter frame 200' is in close contact with the mold bar M, air on the downstream side of the filter 100' flows through the lower hole 210. '), an air flow path flowing into the internal space of the filter frame 200' is formed. Accordingly, when the differential pressure measurement sensor 300 measures the pressure of the inner space of the filter frame 200' through the fitting part 400 and the connection parts 440 and 450, this is the pressure on the downstream side of the filter 100'. will be measured.

Next, another embodiment of the present invention will be described. Figure 10 is a cross-sectional view showing another embodiment of the fan filter unit proposed in the present invention.

Unlike the previous differential pressure measurement sensor installed inside the housing, in the embodiment of FIG. 10, the differential pressure measurement sensor 310'' is provided within the external controller 300'' and is exposed to the outside of the housing 700''. It is installed.

At this time, one of the ports provided in the differential pressure measurement sensor 310'' to measure the differential pressure between the two spaces is exposed to the inside of the housing 700'', and the other port is exposed to the outside of the housing 700''. exposed. The port 320'' exposed to the inside of the housing 700'' is for measuring the upstream pressure of the filter 100'', and the port 330'' exposed to the outside of the housing 700'' ) is for measuring the pressure on the downstream side of the filter (100'').

The port 330'' exposed to the outside of the housing 700'' is connected to the fitting part 470'' by a connection part 440'' on the outside of the housing 700''. The fitting part 470'' is installed to penetrate at least a portion of the filter frame 200'', and the fitting part 470'' is connected to the differential pressure on the outside of the housing 700'' by the connection part 440''. When connected to the measurement sensor 310'', the differential pressure measurement sensor 310'' can measure the pressure of the inner space of the filter frame 200''.

The design of the fitting part cover 600'' may be changed depending on the shape of the fitting part 470''. For example, the fitting part cover 600'' may be formed to be coupled to the side and top surfaces of the housing 700'' to protect the fitting part 470'' and the connection part 440''.

In the above structure, the differential pressure measurement sensor 310'' and the fitting part 470'' can be connected using the connection part 440'' on the outside of the housing 700'', thereby forming the fan filter unit 10''. While installation is easy, both the upstream and downstream pressures of the filter 100'' can be measured even if only one fitting part 470'' is provided, which is an advantage over the previously described embodiment.

The description of other components not illustrated in FIG. 10 is replaced with the description of the previously described embodiment.

Next, with reference to FIGS. 11 and 12, a control method using the fan filter unit provided by the present invention will be described.

Figure 11 is a conceptual diagram showing that the external static pressure is different for each zone in the clean room.

Figure 12 is a conceptual diagram comparing the conventional control method (a) and the control method (b) of the present invention.

In FIG. 11, the large square corresponds to the upper area of the clean room, and the five small squares within the large square each indicate fan filter units. The numbers in the large squares indicate the external static pressure, and the numbers in the small squares indicate the filter static pressure and wind speed.

Referring to (a) of FIG. 11, it can be seen that the external static pressure at the top of the fab is different for each zone, and the filter static pressure is operated differently for each external static pressure. As a result, in the past, multiple fan filter units in the clean room were installed. An imbalance in wind speed occurs. In particular, there was a problem in which energy wasted as the fan of the fan filter unit was operated at an excessively high speed in a zone where the external static pressure was low.

For example, in (a) of FIG. 12, the external static pressure is set lower toward the left. As a result, the leftmost filter static pressure among the five fan filter units is set the highest, causing the fan provided in the fan filter unit to be relatively excessive. It was driven at high speed. In addition, the existing control method shown in (a) did not allow the user to know the air volume value in real time.

The present invention is intended to solve this problem. Referring to (b), regardless of the external static pressure, the wind speed of the fan is automatically controlled based on the differential pressure on the upstream and downstream sides of the filter, thereby reducing the gap in external static pressure. It is done to offset. According to this control method, even if the external static pressure is set differently for each zone, the wind speed of each fan is controlled by the differential pressure measured by each differential pressure measurement sensor, and this balances the wind speed between fan filter units in the clean room. This is achieved, and improvements in power consumption and the environment can be expected.

Next, another example of a fan filter unit will be described.

Figures 13 and 14 are perspective views and partial cross-sectional views showing an equipment fan filter unit as another example of a fan filter unit.

Unlike the fan filter unit 10 used in a clean room, the equipment fan filter unit 20 is installed and operated in facilities, process equipment, booths, etc. within the clean room. Figure 13 shows a configuration in which a fitting and a connection part are installed in an equipment fan filter unit, and Figure 14 shows a configuration in which the fitting part is connected to a differential pressure measurement sensor by a connection part inside the housing.

The equipment fan filter unit 20 has a shape close to a cube. The equipment fan filter unit 20 includes a housing 1700 that forms the top and side surfaces of a cube. And the filter 1000 and the filter frame 1200 are coupled to the lower part of the housing 1700. Additionally, a fan unit 1900 and a differential pressure measurement sensor 1300 are installed inside the housing 1700.

The filter frame 1200 wraps around the filter 1000 to fix the filter 1000. For example, the filter frame 1200 is formed to surround the filter 1000 in the lateral direction. The filter frame 1200 is coupled to the lower part of the housing 1700, and the circumference of the filter 1000 is fixed to the filter frame 1200.

The fan unit 1900 is seated in the area formed by the housing 1700. The upper surface of the housing 1700 is open, and the fan unit 1900 is exposed to the upper side of the housing 1700.

The side wall of the housing 1700 may be divided into a first side wall 1710 and a second side wall 1720 depending on the installation of the fitting part 1400 and the differential pressure measurement sensor 1300.

For example, the side wall through which the fitting part 1400 is installed may be divided into a first side wall 1710, and the side wall through which the differential pressure measurement sensor 1300 is installed may be divided into a second side wall 1720.

The fitting part 1400 includes a first fitting part 1410 and a second fitting part 1470. The first fitting part 1410 is mounted on the first side wall 1710 corresponding to the side surface of the housing 1700. And the second fitting part 1470 is mounted on the upper part of the filter frame 1200.

The differential pressure measurement sensor 1300 is connected to the first fitting part 1410 through the first connection part 1440. And the first fitting part 1410 penetrates the side of the housing 1700 of the equipment fan filter unit 20 and is exposed to the outside of the housing 1700.

At least a portion of the first fitting portion 1410 may extend downward from the outside of the housing 1700 toward the filter frame 1200. And the first fitting part 1410 and the second fitting part 1470 are connected to each other by a second connection part 1450 on the outside of the housing 1700.

The second fitting part 1470 is formed to extend in one direction, and may penetrate the upper part of the filter frame 1200 and at least a portion of the second fitting part 1470 may be exposed to the inner space of the filter frame 1200.

The fitting part cover 1600 is formed to protect the fitting part 1400 from external shock. The fitting cover 1600 includes an outer wall 1610 and a coupling portion 1620.

When looking at the first side wall 1720 through which the fitting part 1400 is installed from the front, the outer wall 1610 is formed to surround the left, right, and upper sides of the fitting part 1400. The coupling portion 1620 protrudes from the outer wall 1610 on both sides and comes into contact with the first side wall 1720, and extends along the first side wall 1720.

A coupling hole 1630 is formed in the coupling portion 1620 at a position facing the first side wall 1720 of the housing 1700. When a fastening member (not shown) is fastened to the coupling hole 1630, the coupling portion 1620 is coupled to the housing 1700. The fan filter unit defined in the present invention is a concept that includes not only a fan filter unit used in a clean room, but also an equipment fan filter unit used in process equipment, etc. Substantially all of the structures, modifications, and other embodiments of the fan filter unit described above can be applied to the equipment fan filter unit, but there are some differences in the application target.

The fan filter unit 10, which automatically adjusts wind speed by controlling the pressure of the filter described above, is not limited to the configuration and method of the above-described embodiments, and the above embodiments are each implemented so that various modifications can be made. All or part of the examples may be configured by selectively combining them.

Claims (6)

housing;
a fan disposed inside the housing;
a filter disposed on one side of the fan to purify air;
a filter frame coupled to one side of the housing and surrounding an edge of the filter;
a differential pressure measurement sensor disposed inside the housing or exposed to the outside of the housing, and measuring a differential pressure between an upstream side of the filter and a downstream side of the filter;
a fitting part installed to penetrate at least a portion of the housing or the filter frame; and
It includes a connection part connected to the differential pressure measurement sensor and the fitting part,
The connection part corresponds to the first connection part,
The fitting part,
a first fitting part mounted to penetrate at least a portion of the housing; and
A second fitting part mounted to penetrate at least a portion of the filter frame,
The differential pressure measurement sensor is disposed inside the housing and connected to the first fitting portion by the first connection portion disposed inside the housing,
The first fitting portion and the second fitting portion are connected to each other by a second connection portion on the outside of the housing. housing;
a fan disposed inside the housing;
a filter disposed on one side of the fan to purify air;
a filter frame coupled to one side of the housing and surrounding an edge of the filter;
a differential pressure measurement sensor disposed inside the housing or exposed to the outside of the housing, and measuring a differential pressure between an upstream side of the filter and a downstream side of the filter;
a fitting part installed to penetrate at least a portion of the housing or the filter frame; and
It includes a connection part connected to the differential pressure measurement sensor and the fitting part,
The filter frame is,
an inner wall surrounding the filter; and
It includes an outer wall surrounding the inner wall at a position spaced apart from the inner wall,
The fitting part penetrates at least a portion of the filter frame and is exposed to an inner space formed between the inner wall and the outer wall,
A hole in the filter frame is formed between the inner wall and the outer wall,
The filter frame further includes a support portion protruding from a periphery of the outer wall,
To enable communication between the downstream side of the filter and the inner space of the filter frame through the hole, the support part separates the outer surface between the inner wall and the outer wall from the mold bar where the fan filter unit is installed,
A sealing portion is installed on the outer surface between the inner wall and the outer wall,
The two parts of the sealing part are spaced apart from each other at a position corresponding to the hole to form an air flow path extending from the hole to the downstream side of the filter. According to paragraph 2,
The inner wall is,
a first area facing the periphery of the filter; and
It includes a second area extending from the first area and exposed to the downstream side of the filter,
The fan filter unit wherein the hole is formed in the second area. According to paragraph 1,
The fan filter unit further includes a fitting cover,
The fitting cover is,
an outer wall formed to surround the fitting portion exposed to the outside of the housing or the filter frame; and
It includes a coupling part protruding from the outer wall,
The fan filter unit wherein the fitting portion cover is coupled to the housing or the filter frame by a fastening member connecting the coupling portion and the housing. According to paragraph 1,
A threaded structure is formed or installed on the filter frame to be screwed to the fitting part,
The thread structure formed on the filter frame is formed by processing at least a portion of the filter frame into a thread shape,
A fan filter unit wherein the threaded structure installed on the filter frame has threads screwed to the fitting portion on an inner peripheral surface. A mold bar installed at the top of the clean room to form a mounting area for a plurality of fan filter units;
A plurality of fan filter units installed in the plurality of fan filter unit mounting areas formed by the mold bar,
Each of the plurality of fan filter units,
housing;
a fan disposed inside the housing;
a filter disposed on one side of the fan to purify air;
a filter frame coupled to one side of the housing and surrounding an edge of the filter;
A differential pressure measurement sensor disposed inside the housing or exposed to the outside of the housing and measuring the differential pressure between the upstream side of the filter and the downstream side of the filter;
a fitting part installed to penetrate at least a portion of the housing or the filter frame; and
It includes a connection part connected to the differential pressure measurement sensor and the fitting part,
Each of the fans provided in the plurality of fan filter units is independently controlled based on the differential pressure between the upstream and downstream sides of the filter measured by the differential pressure measurement sensor of each fan filter unit,
The connection part corresponds to the first connection part,
The fitting part,
a first fitting part mounted to penetrate at least a portion of the housing; and
A second fitting part mounted to penetrate at least a portion of the filter frame,
The differential pressure measurement sensor is disposed inside the housing and connected to the first fitting portion by the first connection portion disposed inside the housing,
A clean room wherein the first fitting part and the second fitting part are connected to each other by a second connection part on the outside of the housing.

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