KR102348591B1 - Air volume control system for fan filter unit - Google Patents

Abstract

The present invention relates to an air volume control system for a fan filter unit, which is applied to a clean room in which dust, temperature, humidity, air pressure, and other pollutants must be controlled, comprising: an upper chamber, a lower chamber, an air path section, a temperature control module, the fan filter unit, a grating, and a fan filter controller. In the fan filter controller, the fan rotation speed value in the normal status in accordance with a filter differential pressure is preset, and the fan filter controller controls the fan rotation speed to be the fan rotation speed in the normal status in accordance with the filter differential pressure measured by the pressure sensor module in real time. A pressure measuring tube is prepared to measure the filter differential pressure and the external static pressure by respectively connecting the fan filter unit and the inside of the clean room to the pressure sensor module. The installation position of the pressure measuring tube is the same as that of the fire-extinguishing pipe installed for supplying water from a sprinkler. Therefore, the maintenance is possible without disassembling the fan filter unit, and the measurement information of the external static pressure of a single point can be transmitted to two or more pressure measuring sensors, so the installation cost can be reduced.

Description

Air volume control system for fan filter unit

The present invention relates to an airflow control system for a fan filter unit applied to a clean room in which dust, temperature, humidity, air pressure and other contamination are to be controlled and controlled.

In the clean room, which is widely used in various laboratories, high-tech equipment handling facilities, and semiconductor production, an air conditioning system is installed so that suspended particles in the air are managed below a prescribed level.

In the air conditioning system, the fan filter unit supplies purified air into the clean room while continuously removing dust and other contaminants from the circulating air.

In general, a plurality of fan filter units are installed on the ceiling or wall to uniformly supply purified air to a clean room. In a clean room, air conditioning must be continuously performed while air purification is being performed inside, so many fan filter units run for a long time and consume considerable power.

However, since the flow of air flowing inside the air conditioning system for a clean room and the air pressure and air flow inside the clean room are constantly changing depending on the condition of the clean room and changes in the clean room configuration, the fan inside the fan filter unit is installed accordingly. The speed of the starting drive motor needs to be adjusted from time to time.

At this time, the difference between the pressure inside the clean room (outlet side of the fan filter unit) and the ceiling side of the clean room (inlet side of the fan filter unit) is referred to as 'outside static pressure'. Out-of-air static pressure is the static pressure generated by the fan filter unit excluding the in-flight static pressure among the total static pressure of the fan generated to deliver the target air volume (total static pressure = out-board static pressure + in-flight static pressure). The difference between the pressures before and after the filter in the cabin is called 'filter differential pressure'.

In order to keep the positive pressure inside the clean room constant, the filter differential pressure needs to be measured in real time. In this case, when a change in the filter differential pressure occurs, the air flow rate may be adjusted so that the filter differential pressure is constant by controlling the driving motor inside the fan filter unit to adjust the RPM of the fan. These changes may be caused by changes in the environment inside the clean room.

However, in the prior art, a mechanism for measuring the filter differential pressure was installed in the form of penetrating the filter as shown in FIG. 3A . In this case, structurally, the pressure sensor module is inevitably installed inside the fan filter unit. As such, when the pressure measuring device is installed in the form of penetrating the filter, there is a problem of causing an increase in pressure and an imbalance in the surface wind speed due to a decrease in the cross-sectional area of the filter. Also Disassembly and installation of the pressure measuring device is required again every time the filter is maintained, and there is a problem in that the fan filter unit must be dismantled when maintenance of the pressure measuring device is required. There is a problem in that there is no choice but to provide information only to the pressure measuring sensor installed inside the fan filter unit.

Laid-Open Patent Publication No. 10-2008-0054019 (published date: 2008. 06. 17)

Accordingly, the present invention has a structure in which the air flow measurement device that monitors the filter differential pressure in real time to maintain the static pressure inside the clean room is installed independently of the fan filter unit, so maintenance is possible without disassembling the fan filter unit, An object of the present invention is to provide an airflow control system of a fan filter unit that can reduce installation cost by transmitting the measurement information to two or more pressure measuring sensors from outside static pressure information at any one point.

The air volume control system according to the present invention for achieving this object is an air volume control system that controls the blow rate of purified air supplied to the clean room for purifying the air inside the clean room where semiconductor manufacturing is made, and is formed in the upper part of the clean room. an upper chamber communicating with the inside of the clean room; a lower chamber formed under the clean room and communicating with the inside of the clean room; an air passage section formed outside the clean room and connecting the upper chamber and the lower chamber; a temperature control module installed in the wind direction section to control the air passing through the wind speed section to a temperature that meets the standards of a clean room; A housing, a fan installed in the housing, a driving motor for rotating the fan, an air guide installed in the housing, a filter installed in the housing and disposed between the fan and the clean room, and a fan installed in the housing inlet It consists of a bell mouth that guides the A fan filter unit that communicates the upper chamber and the clean room by using a fan filter unit, a grating installed on the floor of the clean room to communicate the clean room and the lower chamber so that the air inside the clean room is discharged to the lower chamber, and the fan rotation speed of the fan filter unit. It consists of a fan filter controller that measures and adjusts in real time, wherein a pressure sensor module for measuring a filter differential pressure, which is an internal pressure of the fan filter unit, is installed in the fan filter unit with the filter interposed therebetween, and the filter differential pressure is installed in the fan filter controller A fan rotation speed value in a steady state is preset according to , and the fan rotation speed is controlled so that the fan rotation speed becomes the normal fan rotation speed according to the filter differential pressure measured in real time by the pressure sensor module.

In this case, the pressure sensor module is preferably installed outside the fan filter unit, and the pressure sensor module includes a filter differential pressure measuring tube connecting the pressure sensor module and the fan filter unit to measure the filter differential pressure, and pressure for measuring external static pressure. By connecting the sensor module and the tube for external static pressure measurement that connects the inside of the clean room, the filter differential pressure measurement bypasses the filter.

In this case, the tube for measuring external static pressure preferably includes a plurality of parallel first mold bars constituting the ceiling of the clean room, and a second mold bar disposed to cross the first mold bar at right angles to form a lattice form together with the first mold bar; , is installed so as to penetrate the ceiling structure of the clean room consisting of a ceiling panel installed to fill the space formed in the grid shape.

Here, the point where the out-of-air static pressure measurement tube passes through the ceiling structure is preferably a point where the first mold bar and the second mold bar intersect, and the out-of-air static pressure measurement tube is the point where the first mold bar and the second mold bar cross. It is connected to the measuring tube adapter that is installed on the

In this case, the measuring tube adapter preferably includes a communication pipe installed vertically at the intersection point, a fixing blade protruding horizontally from the side of the communication pipe, an adapter fixing member, a tube communication socket, and the communication pipe is vertical It consists of a link bracket installed at the crossing point while supporting it to be installed, and a long hole corresponding to a groove formed in the upper part of the first or second mold bar is preferably formed in the fixing wing to fix the adapter. As the member passes through both the groove and the long hole, the fixing wing is fixed to the upper surface of the first or second mold bar.

In particular, the tube communication socket is preferably provided with at least two or more, so that at least two or more pressure sensor modules from one measuring tube adapter provide information on external static pressure inside the clean room.

In addition, at the lower end of the communication pipe exposed to the inside of the clean room through the intersection point, a bell mouse for pressure sensing is installed, which is preferably formed in the form of spreading toward the inside of the clean room.

The fan filter unit air flow control system according to the present invention dismantles the fan filter unit by having a structure in which the air flow measurement device that monitors the filter differential pressure in real time is installed independently of the fan filter unit so as to maintain the static pressure inside the clean room. Maintenance is possible without having to do so, and it is possible to transmit measurement information to two or more pressure measuring sensors from outside static pressure information at any one point, so that installation costs can be reduced.

1 is a schematic diagram of an air volume control system of a fan filter unit according to the present invention;
2A is an overall configuration diagram of an air volume control system of a fan filter unit according to the present invention;
2B is a graph showing the air volume control principle of the air volume control system of the fan filter unit according to the present invention;
3A is a front cross-sectional view of a fan filter unit used in a conventional air flow control system;
3B is a front cross-sectional view of a fan filter unit used in the air flow control system according to the present invention;
Fig. 3c is a modified embodiment of Fig. 3b;
4 is a perspective view and an enlarged view showing an installation state of the air flow control system according to the present invention;
Figure 5 is a perspective view of the communication pipe in Figure 4;
6 is a perspective view showing an installation state of the measuring tube adapter in FIG. 4;
Figure 7 is an exploded perspective view of Figure 6;

Specific structural or functional descriptions presented in the embodiments of the present invention are only exemplified for the purpose of describing embodiments according to the concept of the present invention, and the embodiments according to the concept of the present invention may be implemented in various forms. In addition, it should not be construed as being limited to the embodiments described herein, and it should be understood to include all modifications, equivalents and substitutes included in the spirit and scope of the present invention.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 2A, the air volume control system 1 of the fan filter unit according to the present invention includes an upper chamber 4, a lower chamber 5, a wind speed section 3, a temperature control module (not shown), and a fan filter. It consists of a unit (10), a grating (7) and a fan filter controller (24).

The upper chamber 4 is formed in the upper part of the clean room 2 as shown in FIG. 2A and is a passage communicating with the inside of the clean room 2 , and the lower chamber 5 is formed in the lower part of the clean room 2 and is clean It is a passage communicating with the inside of the room 2 , and the wind passage section 3 is formed outside the clean room 2 and is a passage connecting the upper chamber 4 and the lower chamber 5 .

The temperature control module (not shown) is installed in the wind direction section 3 to control the air passing through the wind speed section 3 to a temperature that meets the standards of the clean room 2 .

The fan filter unit 10 includes a housing 11, a fan installed inside the housing 11, a driving motor 12 for rotating the fan, an air guide 13 installed inside the housing 11, and a housing ( 11) A filter 14 installed inside and disposed between the fan and the clean room 2, and a bell mouth 18 installed at the inlet of the housing 11 to guide air into the housing 11, where the fan is installed. ) and a rotation speed control module 16 installed on the ceiling or inner wall of the housing 11 to control the rotation speed of the drive motor 12, installed in the upper part of the clean room 2 and installed in the upper chamber 4 inside The air is supplied into the clean room 2 while purifying the air, so that the upper chamber 4 and the clean room 2 are communicated through the filter 14 .

The grating 7 is installed on the floor of the clean room 2 to communicate the clean room 2 and the lower chamber 5 so that the air inside the clean room 2 is discharged to the lower chamber 5 .

The rotation speed control module 16 adjusts the fan rotation speed of the fan filter unit 10 while measuring in real time.

At this time, the fan filter unit 10 has a filter 14 interposed therebetween, and the pressure sensor module measures the filter differential pressure, which is the difference between the internal static pressure of the fan filter unit 14 and the external static pressure of the clean room 2 . 23 is installed, and in a control device (not shown) separately provided to control the rotation speed control module, the fan rotation speed value in a normal state according to the filter differential pressure is preset in a program, and the pressure sensor module 23 is The fan rotation speed is controlled to become the normal fan rotation speed according to the filter differential pressure measured in real time.

As a result, the external static pressure, which is a static pressure inside the clean room 2, is constantly maintained, thereby stably maintaining the air purification state for precision work inside the clean room 2 .

The filter differential pressure is different for each wind speed generated by the fan filter unit 10 as shown in FIG. 2B . As such, when the data for each wind speed according to the data shown in FIG. 2B is stored in advance and the in-flight static pressure and the out-of-air static pressure are measured in real time, the wind speed may be automatically controlled according to the preset data to maintain a constant out-of-air static pressure.

Power for the operation of the pressure sensor module 23 may be a single-phase 220 V power source to be compatible with the power of other devices to minimize the power construction cost. In addition, two pressure sensors may be inserted into the pressure sensor module 23 . In this case, one of the two pressure sensors is the filter differential pressure used for measurement and the other one can be used for external static pressure measurement.

In particular, by connecting the inside of the fan filter unit 10 and the clean room 2 from the pressure sensor module 23, a pressure measuring tube 25 is provided for measuring the filter differential pressure and external static pressure, and the pressure measuring tube 25 ) is characterized in that the installation location is the same as that of the fire pipe (not shown) installed to supply water to the sprinkler (not shown). Therefore, a separate process is not required for the installation of the differential pressure measuring assembly 20 including the pressure sensor module 23 and the pressure measuring tube 25, and it is possible to install them together during the fire fighting pipe installation process, resulting in a shorter process time. and cost savings are possible.

Also, the pressure sensor module 23 may be installed outside the fan filter unit 10 as shown in FIGS. 2A and 3A . In this case, the pressure sensor module 23 includes a filter differential pressure measurement tube 251 that connects the pressure sensor module 23 and the fan filter unit 10 to measure the filter differential pressure, and a pressure sensor module 23 for external static pressure measurement. ) and the outside static pressure measurement tube 252 connecting the inside of the clean room 2 are connected, so that the filter differential pressure can be measured by bypassing the filter 14 .

In the conventional fan filter unit 10 shown in FIG. 3A , the pressure sensor module 23 is installed inside the fan filter unit 10 , and the differential pressure measurement is performed through a pipe-shaped member passing through the filter 14 . , In connection with the pressure sensor module 23 or the pressure measurement tube 25 connected to the pressure sensor module 23, or the pressure sensor module 23 and the rotation speed control module 16 or a control device separately provided outside. If a problem occurs, disassembly of the corresponding fan filter unit 10 is inevitable. In addition, since the pressure measurement tube installed to pass through the filter 14 is connected only to the pressure sensor module inside the fan filter unit where the filter 14 is installed, it is difficult to install as many pressure measurement tubes as the number of pressure sensor modules installed. There is a necessary problem.

In the present invention, as shown in FIG. 3B, the pressure sensor module 23 is installed outside the fan filter unit 10 and the pressure measuring tube 25 is installed to bypass the fan filter unit 10, so that the pressure measuring system Disassembly of the fan filter unit 10 is not necessary even if a problem occurs in the .

In addition, it is also possible that two or more pressure sensor modules 23 are connected to one tube for measuring external static pressure 252 as in the modified embodiment shown in FIG. 3C .

Meanwhile, as shown in FIG. 4 , the tube 252 for measuring external static pressure crosses a plurality of parallel first mold bars M1 forming the ceiling of the clean room 2 and the first mold bars M1 at right angles. A clean room 2 comprising a second mold bar M2 arranged to form a lattice form together with the first mold bar M1 and a ceiling panel D installed to fill the space formed in the lattice form. It is installed so as to penetrate the ceiling structure.

More specifically, the point at which the outside static pressure measurement tube 252 passes through the ceiling structure is the point where the first mold bar M1 and the second mold bar M2 intersect, and the outside static pressure measurement tube 252 is It is connected to the measuring tube adapter 21 installed at a point where the first mold bar M1 and the second mold bar M2 intersect.

Here, the measuring tube adapter 21 includes a communication pipe 211 installed vertically at the intersection point, a fixing wing 212 protruding horizontally from the side of the communication pipe 211, and an adapter fixing member 213 and , the tube communication sockets 214 and 215, and the communication pipe 211 is composed of a link bracket 22 installed at the intersection point while supporting to be installed vertically.

At this time, a long hole corresponding to the groove formed on the upper part of the first or second mold bars M1 and M2 is formed in the fixing wing, and the fixing wing is fixed by the adapter fixing member 213 passing through both the groove and the long hole. It is fixed to the upper surface of the first or second mold bars M1 and M2.

For reference, the configuration of the measuring tube adapter 21 is similar to the configuration for installing a sprinkler (not shown) installed on the ceiling structure. However, there is a difference in that the communication pipe 211 is installed in the present invention instead of the sprinkler body at the position where the sprinkler body is installed, and the fixed blade 212 is integrally formed with the communication pipe 211 .

That is, even if there is an advantage that the filter differential pressure is measured by bypassing the filter 14, if the outside static pressure is measured through the ceiling panel D, the measuring tube adapter 21 for measuring the outside static pressure is provided on the ceiling panel D. The process to be installed may become necessary.

In the present invention, in order to solve this problem, the measuring tube adapter 21 is disposed at a point where a sprinkler (not shown) is installed.

For reference, since the sprinklers only need to satisfy the number of installations within a certain area determined according to laws and regulations, they are not installed at each intersection of the first mold bar M1 and the second mold bar M2, but rather between the first mold bar M1 and the first mold bar M1. Since the intersection point of the second mold bar M2 is manufactured in a separate standard or there is a hole forming process to secure a space for installing the sprinkler anyway, the installation of the measuring tube adapter 21 can also be made during the sprinkler installation process. Therefore, the installation process of the measuring tube adapter 21 in the air flow control system according to the present invention can be made very simply and economically.

In particular, as shown in FIGS. 5 and 6 , at least two or more tube communication sockets 214 and 215 installed on the upper end of the measuring tube adapter 21 are installed, so that at least two or more pressures from one measuring tube adapter 21 . It is possible to provide the outside static pressure information inside the clean room (2) to the sensor module (23). Therefore, unlike the prior art in which a member penetrating the filter is installed for every pressure sensor module, in the present invention, the number of the measuring tube adapters 21 can be significantly reduced to at least half or more, thereby significantly reducing material costs, installation costs, and time This is possible.

On the other hand, as shown in FIGS. 6 and 7, the lower end of the communication pipe 211 that penetrates the intersection and is exposed to the inside of the clean room 2 is for pressure sensing formed in the form of being spread toward the inside of the clean room 2 A bell mouse 217 may be installed. As such, when the lower end of the communication pipe 211 is expanded, even if a constant airflow of air is formed in the upper part of the clean room 2, more accurate external static pressure measurement may be made.

The present invention described above is not limited by the above-described embodiments and the accompanying drawings, and it is common in the technical field to which the present invention pertains that various substitutions, modifications and changes can be made within the scope without departing from the technical spirit of the present invention. It will be clear to those who have the knowledge of

D: ceiling panel M1: first mold bar
M2: Second mold bar P1, P2, P3, P4, P5: External static pressure
1: Air volume control system of fan filter unit
2: Clean room 3: Pungdo section
4: upper chamber 5: lower chamber
6: ceiling 7: grating
8: dry cooling coil unit 10: fan filter unit
11: housing 12: drive motor
13: air guide 14: filter
16: rotation speed control module
17: motor base 18: bell mouse
20: differential pressure measuring assembly 21: measuring tube adapter
22: link bracket 23: pressure sensor module
24: fan filter controller 25: tube for pressure measurement
211: communication pipe 212: fixed wing
213: adapter fixing member 214: first tube communication socket
215: second tube communication socket 216: O-ring
217: pressure sensing bell mouse 251: filter differential pressure measurement tube
252: tube for external static pressure measurement

Claims (7)

An air flow control system for controlling the air flow rate of purified air supplied to a clean room for purifying the air inside a clean room in which semiconductor manufacturing is made, comprising:
an upper chamber formed above the clean room and communicating with the inside of the clean room;
a lower chamber formed under the clean room and communicating with the inside of the clean room;
an air passage section formed outside the clean room and connecting the upper chamber and the lower chamber;
a temperature control module installed in the wind direction section to control the air passing through the wind speed section to a temperature that meets the standards of a clean room;
A housing, a fan installed inside the housing, a driving motor for rotating the fan, an air guide installed inside the housing, a filter installed inside the housing and disposed between the fan and the clean room, and a fan installed at the housing inlet to supply air It consists of a bell mouth that guides the a fan filter unit for communicating the upper chamber and the clean room;
a grating installed on the floor of the clean room to communicate the clean room and the lower chamber so that the air inside the clean room is discharged to the lower chamber;
a fan filter controller that measures and adjusts the fan rotation speed of the fan filter unit in real time; is composed of
A pressure sensor module is installed in the fan filter unit to measure the filter differential pressure, which is the internal pressure of the fan filter unit, and the external static pressure, which is the pressure in the clean room, with the filter interposed therebetween;
The fan filter controller has a preset fan rotation speed value in a steady state according to the filter differential pressure, and controls the fan rotation speed to become the normal fan rotation speed according to the filter differential pressure measured by the pressure sensor module in real time,
A pressure measuring tube is provided to measure the filter differential pressure and external static pressure by connecting the fan filter unit and the inside of the clean room from the pressure sensor module, respectively.
The installation position of the pressure measuring tube is the same as the fire pipe installed to supply water to the sprinkler,
The pressure sensor module is installed outside the fan filter unit,
The pressure sensor module is connected with a filter differential pressure measurement tube that connects the pressure sensor module and the fan filter unit to measure the filter differential pressure, and an external static pressure measurement tube that connects the pressure sensor module and the inside of the clean room for external static pressure measurement. The filter differential pressure is measured by bypassing the filter,
The tube for measuring external static pressure includes a plurality of parallel first mold bars constituting the ceiling of the clean room, a second mold bar disposed to cross the first mold bar at right angles to form a lattice form together with the first mold bar, and the lattice form. It is installed so as to penetrate the ceiling structure of the clean room consisting of a ceiling panel installed to fill the formed space,
A point where the tube for measuring external static pressure passes through the ceiling structure is a point where the first mold bar and the second mold bar intersect,
The tube for measuring external static pressure is connected to a measuring tube adapter installed at a point where the first mold bar and the second mold bar intersect,
The measuring tube adapter includes a communication pipe installed vertically at the crossing point, a fixing wing protruding horizontally from the side of the communication pipe, an adapter fixing member, a tube communication socket, and the communication pipe to be installed vertically. It consists of a link bracket installed at the crossing point while
A long hole corresponding to the groove formed on the upper portion of the first or second mold bar is formed in the fixing wing, and the fixing wing is connected to the first or second mold bar by the adapter fixing member passing through both the groove and the long hole. fixed to the top,
By installing at least two or more tube communication sockets,
The air volume control system of a fan filter unit, characterized in that it provides external static pressure information inside the clean room to at least two or more of the pressure sensor modules from one measuring tube adapter. delete delete delete delete delete According to claim 1,
The air volume control system of the fan filter unit, characterized in that a bell mouse for pressure sensing is installed at the lower end of the communication pipe exposed to the inside of the clean room through the intersection point.

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