KR102665455B1 - Leak Detection Method For Detecting Leakage Of Interior Of Target Substance - Google Patents

Abstract

A leak detection method for detecting leaks within a target material is disclosed. The leak detection method generates terahertz waves in the ultra-high frequency band using one or more frequencies output from a dual-mode laser, radiates the terahertz waves to the target material, and then uses the reflected signal emitted from the target material to detect the target material. Determine whether there is an internal leak.

Description

Leak Detection Method For Detecting Leakage Of Interior Of Target Substance}

The description below relates to a leak detection method for detecting leaks in the target material. More specifically, it relates to a method for detecting leakage occurring inside the target material in a non-contact and non-destructive manner.

Terahertz wave is an electromagnetic wave that vibrates 1 trillion times per second. These terahertz waves are located between far-infrared rays (light waves, light waves) and microwaves (radio waves) in the spectrum and have both the properties of light traveling straight and the properties of radio waves that easily penetrate substances. Therefore, terahertz waves easily penetrate materials made of non-polar materials such as clothing, paper, wood, cardboard, plastic, and ceramics, while metals and water, which are representative of non-polar materials, are representative materials through which electromagnetic waves have difficulty penetrating.

Generally, fog or clouds in the atmosphere cause radio wave loss. According to this principle, the ability of terahertz waves to penetrate the human body is very limited due to water, which is a major component of human cells.

However, terahertz waves have high contrast characteristics and high transmittance for non-polar materials, so they can be used to analyze properties in materials that cannot be identified with the naked eye. In detail, the leak inspection system can utilize broadband terahertz waves to eliminate the ambiguity of the reference point of a single frequency to distinguish between leak and non-leak areas. A leak detection system using terahertz waves is largely composed of a terahertz generator, signal generator, detector, and signal processor, and can be divided into pulse wave and continuous wave (CW) detection systems depending on the characteristics of the wave source.

Since the pulse-type detection system has a wide bandwidth equivalent to several terahertz, it is possible to analyze the sample to be measured according to frequency. In addition, by using an optical delay device, the pulse-type detection system can relatively easily measure and analyze signals reflected from arbitrary areas in the time domain to inspect heterogeneous leakage phenomena occurring inside the desired material.

However, in the case of a pulse-type detection system for homodyne measurement, the optical delay must be adjusted differently each time depending on the thickness and material of the material to be measured. Additionally, when a pulse-type detection system is measured in a high-humidity environment, the frequency characteristics become complicated due to absorption and dispersion due to interaction with moisture in the air, and this causes the terahertz wave pulse width to increase, causing an increase in the time domain. analysis becomes difficult.

In particular, when pulse-type detection systems are applied to actual industrial sites, the development of portable systems is very limited due to the large volume and weight of expensive femtosecond lasers, the fact that femtosecond optical pulse characteristics are very sensitive to the surrounding environment, and the use of optical delay devices. It is becoming a major obstacle to industrial utilization.

On the other hand, the continuous wave detection system, unlike the femtosecond laser, can manufacture the beating light sources of two lasers (frequencies f1 and f2) to generate terahertz waves in a small size the size of a semiconductor chip. In addition, the continuous wave detection system is recognized as the optimal system for industrial field applications because it can directly detect the generated terahertz-terahertz waves without optical delay, making it possible to develop a portable terahertz leak inspection system.

However, the continuous wave detection system has the disadvantage that, unlike pulse waves, where it is easy to analyze the signals reflected from each medium in the time domain, the signals transmitted and reflected from all media are overlapped and measured simultaneously, making analysis difficult. In other words, in a continuous wave detection system, when a 200 GHz terahertz wave signal is incident perpendicularly to check for water leaks in the same medium, the sum of the signals reflected from the boundary of each medium is mutually affected by the phase difference between the signals. Due to constructive and destructive interference, the measured signal value may change regardless of water leakage, resulting in measurement errors.

Therefore, a method is needed that can solve these problems and more efficiently detect leaks occurring inside the material.

The present invention can provide a method for inspecting, in a non-contact and non-destructive manner, whether there is leakage, gas, oil, etc. inside a target material surrounded by an exterior material capable of transmitting terahertz waves.

The present invention has a structure that is portable and can be realized at low cost, and can provide a method for inspecting in real time whether water, oil, hydrogen, etc. leaks occurring inside non-metallic and non-polar target materials. .

A leak detection device according to one embodiment includes a dual-mode laser that generates terahertz waves in an ultra-high frequency band using one or more frequencies; A signal generator that radiates the generated terahertz waves to a specific space where a target material composed of a medium through which terahertz waves can penetrate and a metal through which leakage of an object can be confirmed is located; A signal detector that receives a reflected signal reflected from a target material by terahertz waves; And it may include a signal processor that determines whether the target material leaks from the inside of the target material from the reflected signal.

A dual-mode laser according to one embodiment can generate terahertz waves by varying the frequency of a beating light source corresponding to the difference between one or more frequencies.

The signal generator according to one embodiment may radiate the generated terahertz wave in one of a normal incidence method or an oblique incidence method, considering the degree of absorption and reflection of the target material for the terahertz wave.

When using a vertical incidence method, the signal generator according to one embodiment may radiate the terahertz wave through a beam splitter for splitting the terahertz wave.

The target material according to one embodiment includes at least one medium capable of transmitting millimeters, and the signal detector is configured to receive a reflected signal including a signal reflected from each boundary surface of the at least one medium and a signal reflected from the metal. You can.

A signal detector according to an embodiment may decompose a reflected signal reflected from a target material by a diffraction grating into individual frequency components and receive the signal.

The present invention uses terahertz waves, which are harmless to the human body, to check for leaks inside materials such as plastics, sponges, and non-woven fabrics that can transmit terahertz waves, and uses low-cost, portable, non-contact, and non-destructive methods to detect leaks inside materials such as plastic, sponge, and non-woven fabric. It is possible to provide a leak detection method that can detect whether a leak occurs in

The present invention detects leaks occurring inside the target material in a non-contact, non-destructive manner using terahertz waves, thereby detecting various samples, such as solids and liquids, according to the high contrast characteristics between dissimilar materials that were impossible to detect with the naked eye. , can provide a leak detection method applicable to gases.

The present invention provides a leak detection method that enables the implementation of a high-speed, low-cost, ultra-small terahertz non-destructive measurement system without being affected by the external environment by generating photonics-based tunable terahertz waves using two stable wavelengths oscillated from one resonator. can do.

The present invention can provide a leak detection method that can be easily applied in industrial sites by expanding the application area to enable measurement of liquids, gases, etc. using watertightness testers at production sites.

1 is a diagram showing a leak detection device according to an embodiment of the present invention.
Figure 2 is a diagram showing the detailed configuration of a leak detection device according to an embodiment of the present invention.
FIG. 3 is a diagram illustrating the operation of adjusting the band of terahertz waves in consideration of the interference phenomenon of signals reflected by media constituting the target material according to an embodiment of the present invention.
Figure 4 is a diagram for explaining the operation of radiating terahertz waves to a target material according to a normal incidence method and an oblique incidence method according to an embodiment of the present invention.
Figure 5 is a diagram for explaining the characteristics that appear depending on the medium of the target material when using the normal incidence method according to an embodiment of the present invention.
Figure 6 is a diagram for explaining the characteristics that appear depending on the medium of the target material when using the oblique incidence method according to an embodiment of the present invention.
Figure 7 is a diagram for explaining coherent characteristics of terahertz waves due to interference when terahertz waves are generated according to an embodiment of the present invention.

Hereinafter, embodiments will be described in detail with reference to the attached drawings. However, various changes can be made to the embodiments, so the scope of the patent application is not limited or limited by these embodiments. It should be understood that all changes, equivalents, or substitutes for the embodiments are included in the scope of rights.

The terms used in the examples are for descriptive purposes only and should not be construed as limiting. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as “comprise” or “have” are intended to designate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but are not intended to indicate the presence of one or more other features. It should be understood that this does not exclude in advance the possibility of the existence or addition of elements, numbers, steps, operations, components, parts, or combinations thereof.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by a person of ordinary skill in the technical field to which the embodiments belong. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related technology, and unless explicitly defined in the present application, should not be interpreted in an ideal or excessively formal sense. No.

In addition, when describing with reference to the accompanying drawings, identical components will be assigned the same reference numerals regardless of the reference numerals, and overlapping descriptions thereof will be omitted. In describing the embodiments, if it is determined that detailed descriptions of related known technologies may unnecessarily obscure the gist of the embodiments, the detailed descriptions are omitted.

1 is a diagram illustrating a leak detection device according to an embodiment of the present invention.

Referring to FIG. 1, the leak detection device 101 can detect whether there is a leak occurring inside the target material 103 through a non-contact and non-destructive method using the terahertz wave 102. More specifically, the leak detection device 101 can inspect the interior of a target material through which terahertz waves can penetrate. The leak detection device 101 may use frequency-variable terahertz waves with a bandwidth over a certain range to ensure the accuracy of measurement results depending on whether the target material is leaking. The terahertz wave 102 may be a terahertz-millimeter wave having a frequency band. The terahertz wave 102 is an electromagnetic wave with high transmittance in media (material 104) made of non-polar materials such as clothes, paper, wood, cardboard, plastic, and ceramics. Additionally, the terahertz wave 102 is an electromagnetic wave that has a low transmittance in water 105 or metal 106, which are non-polar materials.

At this time, the leak detection device 101 may set the band of the terahertz wave to increase the signal-to-noise ratio between measurement components leaking from the inside of the target material 103. In detail, the leak detection device 101 can use terahertz waves generated by photonics. Terahertz waves generated by photonics can easily provide the frequency variable characteristics of terahertz waves by varying the beating frequency of the beating light source.

The target material 103 may be composed of a medium 104 through which terahertz waves 102 can penetrate, water 105, and a metal 106 through which leakage of the target material 103 can be confirmed. The medium 104 is an exterior material to protect the metal 106 and may be a medium capable of transmitting the terahertz wave 102. For example, the medium 104 may be composed of clothing, paper, wood, cardboard, plastic, ceramic, sponge, non-woven fabric, etc. through which terahertz waves 102 can penetrate.

The medium 104 may be composed of multiple layers, and the multiple layers may each be composed of different materials or the same material. The terahertz wave 102 may be reflected at the boundary of the medium 104 composed of multiple layers. The leak detection device 101 may receive a signal reflected from each boundary surface of the medium 104 constituting the target material 103 and a signal reflected from the water 105 or the metal 106.

Additionally, the leak detection device 101 may determine leakage and non-leakage areas within the target material using signals reflected from the inside of the target material 103. In detail, the leak detection device 101 uses the size between signals due to interference between signals reflected from each boundary surface of the medium 104 and signals reflected from water 105 or metal 106 in the target material 103. Thus, leakage and non-leakage areas within the target material can be determined.

The leak detection device 101 uses terahertz waves 102 to measure any gas or oil leaks that may occur inside the target material in a non-contact and non-destructive manner, thereby detecting the inside of the target material that cannot be identified with the naked eye. You can judge the status more safely and easily.

Figure 2 is a diagram showing the detailed configuration of a leak detection device according to an embodiment of the present invention.

Referring to FIG. 2, the leak detection device 201 uses terahertz waves to determine whether a leak occurs inside the target material 206, and includes a dual structure laser 202, a signal generator 203, and a signal processor. It may include (204) and a signal detector (205).

The dual structure laser 202 may be a laser having a single resonator structure by integrating two lasers and a phase control region that can control the interaction between the lasers. The dual structure laser 202 can control the interaction between the two lasers. In addition, the dual structure laser 202 can output frequencies (f ₁ , f ₂ ) by adjusting the operating wavelength of each oscillation mode using an integrated micro heater. For example, the dual structure laser 202 can output frequencies (f ₁ , f ₂ ) having a wide range from 300 GHz to 1.3 THz or more, and in this case, the frequency may be a beating frequency.

Here, the dual structure laser 202 can easily change the frequencies (f1, f2) as a way to solve the interference problem caused by the normal incidence method using terahertz waves.

The dual structure laser 202 can generate a terahertz wave 207 in the ultra-high frequency band using one or more frequencies output from the single resonator structure laser. In detail, the dual structure laser 202 can form a beating light source by overlapping one or more frequencies (f ₁ , f ₂ ) output from the dual mode laser. That is, the dual structure laser 202 can form a beating light source corresponding to the difference between one or more frequencies output from the dual mode laser. Additionally, the dual structure laser 202 can generate terahertz waves 207 in the ultra-high frequency band by varying the frequency of the beating light source.

The present invention can measure the characteristics of terahertz waves depending on the frequency by varying the frequency from tens to hundreds of GHz (eg, 100 to 500 GHz).

The signal generator 203 may radiate the generated terahertz wave 207 to a specific space where the target material 206 is located. At this time, the signal generator 203 radiates the terahertz wave 207 generated in one of the normal incidence method and the oblique incidence method in consideration of the degree of absorption and reflection of the target material 206 with respect to the terahertz wave. can do. A detailed description of this will be provided through FIGS. 3 to 6.

The signal detector 205 may receive a reflected signal reflected from the target material by the terahertz wave 207. The signal detector 205 may receive a reflected signal 208 including a signal reflected from each boundary surface of at least one medium and a signal reflected from a metal. The signal reflected from the interface and the signal reflected from the metal may vary depending on the size of the terahertz wave 207 absorbed by the medium.

The signal processor 204 may determine whether the target material 206 is leaking from the inside of the target material 206 from the reflected signal.

Through this, the leak detection device 201 detects whether moisture exists inside the target material 206 using the terahertz wave 207, thereby measuring the waterproof ability and performance of the product containing the target material 206. Degradation characteristics can be evaluated.

FIG. 3 is a diagram illustrating the operation of adjusting the band of terahertz waves in consideration of the interference phenomenon of signals reflected by media constituting the target material according to an embodiment of the present invention.

Referring to FIG. 3, the leak detection device may receive a reflection signal reflected from the target material by terahertz waves according to the measurement environment within the target material. Here, the measurement environment within the target material may include the thickness of the medium, the distance between the signal generator and the signal detector, etc.

Additionally, the leak detection device may receive a reflection signal reflected from the target material by terahertz waves in response to cases where there is water inside the target material and cases where there is no water inside the target material. Here, the leak detection device may receive a reflected signal to which an interference phenomenon of signals reflected by the media constituting the target material according to the measurement environment within the target material is applied.

As shown in (a) of FIG. 3, the leak detection device can measure the reflected signal in the presence of water to be larger than the reflection signal in the absence of water (Ref) due to the interference phenomenon of signals. In other words, assuming that a reflection signal is received in response to a state without water in the target material and a state with water in the target material, in general, the leak detection device will detect the reflection signal measured in the state without water in the target material. It can be measured to be larger than the reflected signal measured in this state. At this time, even if the leak detection device is in the same measurement environment, the reflected signal in the presence of water may be measured to be larger than the reflection signal in the absence of water (Ref) due to interference between signals.

Considering the interference phenomenon according to the measurement environment, the leak detection device can selectively utilize the terahertz wave band according to the properties of the target material by varying the frequency through a dual-mode laser as shown in Figure 3 (b). . In other words, by varying the frequency, the leak detection device can minimize interference between signals and measure whether there is an abnormality in the cycle of occurrence of the main line phenomenon. The leak detection device can analyze the average or frequency slope of the reflected signal for each medium from the measured results. The leak detection device can determine whether there is a possible leak inside the target material from the analysis results. A leak detection device can select a measurement band depending on the material being detected, from the band slope millimeter to the terahertz band.

Figure 4 is a diagram for explaining the operation of radiating terahertz waves to a target material according to a normal incidence method and an oblique incidence method according to an embodiment of the present invention.

Referring to FIG. 4, the leak detection device 401 uses one of a vertical incidence method or an oblique incidence method to emit terahertz waves in consideration of the degree of absorption and reflection of the target material 406 for terahertz waves. You can select . Here, the leak detection device 401 may consider the degree of absorption and reflection in the structure of the medium constituting the target material 406.

(1) Normal incidence method

When terahertz waves are radiated using a vertical incidence method, the leak detection device 401 detects the difference frequency (f1-f2) of the frequencies (f1, f2) of the dual-mode laser 402, which can change the frequency at high speed. It is possible to generate terahertz waves corresponding to . The leak detection device 401 can radiate the generated terahertz waves to the area where the target material is located. Terahertz waves may be radiated to the area where the target material is located through the signal generator 406 of the leak detection device 401. At this time, the terahertz wave may be incident on the target material after passing through the beam splitter, and may be incident vertically to determine whether there is a leak occurring inside the target material.

The incident terahertz wave may be reflected from each boundary surface of at least one medium forming the target material, and absorption and scattering may occur inside the medium. In addition, the size of the signal reflected from the metal or water located on the lower surface of the target material may vary depending on whether water, which has a high absorption rate of radio waves, is present in the incident terahertz wave.

The signal detector 405 may detect a reflection signal reflected from each boundary surface of at least one medium forming the target material. Here, the reflected signal may pass through the beam splitter and be received by the signal detector 405.

The reflected signal detected through the signal detector 405 may be a signal composed of interference between signals reflected from the interface of at least one medium forming the target material and a signal reflected from a metal that can confirm water leakage.

(2) Oblique incidence method

When terahertz waves are radiated using an oblique incidence method, the leak detection device 401 detects the difference frequency (f1-f2) of the frequencies (f1, f2) of the dual-mode laser 402, which can change the frequency at high speed. It is possible to generate terahertz waves corresponding to . The leak detection device 401 can radiate the generated terahertz waves to the area where the target material is located. At this time, the leak detection device 401 may emit terahertz waves at a constant angle of incidence in order to remove interference between signals reflected from each boundary surface of at least one medium forming the target material.

The magnitude of the signal reflected by the incident terahertz wave from metal or water located on the lower surface of the target material may vary depending on whether water, which has a high absorption rate of radio waves, is present in the target material.

The signal detector 405 may detect a reflection signal reflected from each boundary surface of at least one medium forming the target material. Here, the reflected signal detected through the signal detector 405 may be a signal reflected from a metal that can confirm water leakage.

Figure 5 is a diagram for explaining the characteristics that appear depending on the medium of the target material when using the normal incidence method according to an embodiment of the present invention.

Referring to FIG. 5, the media constituting the target material may be composed of materials with high transmittance of terahertz waves. These media may have a low refractive index and low absorption in the terahertz wave range. Depending on the characteristics of these media, the reflection signal reflected from the interface of the target material may be small, and the signal reflected from the metal may be large. For example, media may be composed of plastic, paper, ceramic, non-woven fabric, etc.

Looking at (a) of FIG. 5, the leak detection device can determine whether a leak occurs inside the target material using a vertical incidence method. Here, the target material may consist of one medium, water, or metal. For example, a leak detection device based on a vertical incidence method measures the presence or absence of water leaks under the non-woven fabric (medium 1) used as the interior material of a car trunk, and shows the presence of metal (blue line) or water (red line) on the surface and inside of the non-woven fabric. ) can be used.

In the graph shown in (a) of FIG. 5, measured values change in all areas due to interference between signals reflected from each medium and metal.

At this time, in the leak detection device, the ratio of the signal reflected from the surface of the non-woven fabric (medium) is smaller than the signal reflected from the metal, so the ratio of the measured signal depending on the presence or absence of water (water/metal reflection signal) is about 10 to 20%. It can be seen that water leak detection is possible.

Therefore, in the case of a medium with low reflection and absorption, the leak detection device can detect whether the target material is leaking by terahertz waves using a vertical incidence method.

In addition, the leak detection device utilizes a parallel beam that enlarges the terahertz wave generated above a certain size to minimize the effect caused by the distance between the signal generator and the target material, allowing users to carry and measure more conveniently. Implementation of a non-contact detection system may be easy.

Looking at (b) of FIG. 5, the leak detection device can determine whether a leak occurs inside the target material using a vertical incidence method. Here, the target material may be composed of a plurality of media, water, and metal. At this time, the medium may include foam capper (medium 2), urethane foam (medium 3), etc., which have small reflection and allow transmission, but have relatively high absorption of electromagnetic waves. For example, the target materials are materials that are located on the bottom of the front seats of actual cars and are used as absorbers of noise and vibration coming from the engine room.

Most of the above-mentioned target materials are used to check water leaks. Terahertz waves are absorbed while passing through various media before reaching metal or water and are then reflected from the metal, so that the signal reaching the signal detector is below 20-30 dB. It may appear. However, in this case, the signal reflected from the interface of medium 1 is larger than the signal measured by reflection from the metal, so if interference occurs between the two signals, it is necessary to determine whether the measured signal is caused by water leakage or a signal reflected from the surface. There may be cases where it is difficult to do.

In the end, the leak detection device sometimes measured larger if a leak existed depending on the measurement environment. Additionally, when a leak detection device investigates a leak, the magnitude of the reflected signal measured by the signal detector may be measured to be significantly lower than the power of the reflected signal reflected from the boundary surface of the medium. Here, the size of the reflected signal measured by the signal detector may be the size of the signal that finally passes through all media and is reflected once again. In this case, the leak detection device may not accurately measure the size of the reflected signal measured by the signal detector because it is buried in noise. It can be seen that the normal incidence method can be applied to limited samples.

Figure 6 is a diagram for explaining the characteristics that appear depending on the medium of the target material when using the oblique incidence method according to an embodiment of the present invention.

Referring to FIG. 6, the media constituting the target material may be composed of materials with a high absorption rate of terahertz waves. A leak detection device may use an oblique incidence method to remove interference between signals reflected from the interface of the medium.

The signals reflected from the interface of each medium proceed in different paths, and the leak detection device positions the signal detector so that only the signal reflected from the interface of the material to be checked for leakage can be measured, It is possible to determine whether there is a water leak or not.

As a result, when using the oblique incidence method, unlike the vertical incidence method, the leak detection device can detect a reflected signal reduced to a signal of about 10 dB when water leaks. Therefore, when using the oblique incidence method, the leak detection device may be able to measure leakage more accurately than the vertical incidence method in detecting leaks inside materials with high reflection or absorption.

Here, because the oblique incidence method is a reflective structure, the distance from the leak detection device to the target material may be important during measurement. Accordingly, the present invention can improve the precision of the distance by attaching it to a robot arm for inspection of the production process that can adjust the distance between the target material and the leak detection device. For example, the present invention can use a robot arm capable of position control, an auxiliary device capable of measuring distance, and adjustment of the angle of incidence of the generator and detection element.

The leak detection device can improve distance precision by using two terahertz lenses and providing a zoom function by physically adjusting the distance between the lenses. In this case, the leak detection device additionally uses a drive motor. There is a possibility of building a smaller and lighter system.

Figure 7 is a diagram for explaining coherent characteristics of terahertz waves due to interference phenomenon when terahertz waves are generated according to an embodiment of the present invention.

Referring to FIG. 7, the leak detection device can use a method of generating coherent characteristics of the generated wave, which causes interference when a broadband terahertz wave is generated, using a high-output broadband LED (light-emitting diode). . In this case, the leak detection device may use an integrated filter and an array-type signal detector corresponding to each frequency. Additionally, the leak detection device can use a diffraction grating to decompose spatially generated broadband terahertz waves into individual frequency components and then utilize a signal detector corresponding to each frequency component.

The graph shown in (a) of Figure 7 is the result of using a beating light source composed of a DFB laser and a tunable laser, and a beating light source composed of a stable DFB light source and a high-output LED with a wide spectrum.

The graph shown in (b) of FIG. 7 can be configured by combining terahertz waves with a very wide bandwidth with an appropriate filter and signal detector.

In the graph shown in (c) of FIG. 7, a broadband terahertz wave can be decomposed into each frequency component by a diffraction grating and then measured with a receiver.

The method according to the embodiment may be implemented in the form of program instructions that can be executed through various computer means and recorded on a computer-readable medium. The computer-readable medium may include program instructions, data files, data structures, etc., singly or in combination. Program instructions recorded on the medium may be specially designed and configured for the embodiment or may be known and available to those skilled in the art of computer software. Examples of computer-readable recording media include magnetic media such as hard disks, floppy disks, and magnetic tapes, optical media such as CD-ROMs and DVDs, and magnetic media such as floptical disks. -Includes optical media (magneto-optical media) and hardware devices specifically configured to store and execute program instructions, such as ROM, RAM, flash memory, etc. Examples of program instructions include machine language code, such as that produced by a compiler, as well as high-level language code that can be executed by a computer using an interpreter, etc. The hardware devices described above may be configured to operate as one or more software modules to perform the operations of the embodiments, and vice versa.

Software may include a computer program, code, instructions, or a combination of one or more of these, which may configure a processing unit to operate as desired, or may be processed independently or collectively. You can command the device. Software and/or data may be used on any type of machine, component, physical device, virtual equipment, computer storage medium or device to be interpreted by or to provide instructions or data to a processing device. , or may be permanently or temporarily embodied in a transmitted signal wave. Software may be distributed over networked computer systems and stored or executed in a distributed manner. Software and data may be stored on one or more computer-readable recording media.

Although the embodiments have been described with limited drawings as described above, those skilled in the art can apply various technical modifications and variations based on the above. For example, the described techniques are performed in a different order than the described method, and/or components of the described system, structure, device, circuit, etc. are combined or combined in a different form than the described method, or other components are used. Alternatively, appropriate results may be achieved even if substituted or substituted by an equivalent.

Therefore, other implementations, other embodiments, and equivalents of the claims also fall within the scope of the following claims.

101: Leak detection device
102: Terahertz wave
103: Target substance
104: Beating
105: water
106: metal

Claims (7)

A dual-mode laser that generates terahertz waves in the ultra-high frequency band using one or more frequencies;
A signal generator that radiates the generated terahertz waves to a specific space where a target material composed of a medium through which terahertz waves can penetrate and a metal through which leakage of an object can be confirmed is located;
a signal detector that receives a reflected signal reflected from a target material by the terahertz wave; and
A signal processor that determines whether the target material leaks from the reflected signal
A leak testing device comprising:
According to paragraph 1,
The dual mode laser,
A leak detection device that generates terahertz waves by varying the frequency of the beating light source corresponding to the difference between one or more frequencies output from the dual-mode laser. According to paragraph 1,
The signal generator is,
A leak detection device that radiates terahertz waves in either a vertical or oblique incidence manner, taking into account the degree of absorption and reflection of the material structure for terahertz waves. According to paragraph 3,
The signal generator is,
When using the vertical incidence method,
A leak detection device that emits terahertz waves using a beam splitter to split the terahertz waves. According to paragraph 3,
The material structure is,
Comprising at least one medium through which the terahertz waves can penetrate,
The signal detector is,
A leak detection device for receiving a reflected signal including a signal reflected from each boundary surface of the at least one medium and a signal reflected from the metal. According to paragraph 1,
The terahertz wave is,
A leak detection device in which the size reflected by metal or water varies depending on the presence or absence of water in the space between the medium and the metal. According to paragraph 1,
The signal detector is,
A leak detection device that decomposes and receives reflected signals reflected from a material structure by a diffraction grating into individual frequency components.

Images