KR102655428B1 - Vacuum Chamber And Gate Structure Using Linear Stage - Google Patents

Abstract

The present invention relates to a gate structure using a vacuum chamber and a linear stage, and relates to a process chamber in which a housing opening is formed in the front to create a vacuum environment inside the housing, a door base opening is formed in the direction of the housing opening, and a door base flange is formed on the inner upper surface. A door base bottom hole is formed on the bottom of the door base, and a sample entrance through which the sample enters and exits is formed at the front, and the door unit includes a door base coupled to the front side of the housing and a door coupled to the outside of the door base to open and close the sample entrance. A holder unit including a sample holder on which a sample holder is loaded on the upper surface of which a sample holder flange is formed on the outer peripheral surface and a holder base on which a holder base hole is formed and the sample holder is loaded on the upper surface, and a holder unit installed inside the housing to secure the holder base. A transfer unit that transfers to the first axis and a push bar installed to penetrate the bottom hole of the door base are coupled to the top of the push bar and penetrate the holder base hole so that the sample holder flange contacts and presses the door base flange. It includes a bellows unit formed on the lower side of the door base and provided with a push block for transporting the sample holder.

Description

Gate structure using vacuum chamber and linear stage {Vacuum Chamber And Gate Structure Using Linear Stage}

The present invention relates to a gate structure using a vacuum chamber and a linear stage.

A vacuum chamber refers to a device containing a space maintained in a vacuum state, and examples include devices such as semiconductor manufacturing equipment, scanning electron microscope (SEM), and mass spectrometry.

In general, these vacuum chambers include a process chamber in which a vacuum environment is created for manufacturing, processing, inspection, analysis, etc., a transfer chamber that can transfer samples into the process chamber, and a vacuum environment in the process chamber when carrying in or out of the sample. Includes load lock chamber and gate valve for maintenance.

This conventional vacuum chamber is composed of a plurality of chambers as described above, so not only is it difficult to miniaturize, but there is a problem in that the structures for maintaining airtightness between each chamber are relatively complicated.

In addition, the manufacturing cost of such conventional vacuum chambers increases due to the plurality of chambers and gate valves, and maintenance is difficult due to the plurality of configurations.

The present invention was devised to solve the above-mentioned problems, and its purpose is to provide a vacuum chamber that maintains a vacuum state in the process chamber by a transfer unit installed in the process chamber without using a gate valve.

In addition, the present invention aims to provide a vacuum chamber that is suitable for miniaturization and has a relatively simple structure and is easy to disassemble and assemble for maintenance such as cleaning.

The vacuum chamber according to the present invention includes a process chamber, a door unit, a holder unit, a transfer unit, and a bellows unit.

The process chamber has a housing opening formed at the front to create a vacuum environment inside the housing.

The door unit includes a door base with a door base opening formed on the front upper side in the direction of the housing opening, a door base flange formed on the inner upper surface, and a doorless bottom hole formed on the lower surface, and coupled to the front side of the housing.

In addition, the door unit further includes a door coupled to the outside of the door base to open and close the door base opening.

The holder unit includes a sample holder on which a sample holder flange is formed on the outer peripheral surface and a sample is loaded on the upper surface.

In addition, the holder unit further includes a holder base on which a holder base hole is formed and the sample holder is loaded.

The transfer unit is installed inside the housing and transfers the holder unit along the first axis.

The bellows unit is coupled to a push bar installed to penetrate the bottom hole of the door base and the top of the push bar, and passes through the holder base hole to transport the sample holder so that the sample holder flange contacts and is pressed against the door base flange. Includes push blocks.

Additionally, the bellows unit is formed below the door base.

More specifically, the housing opening is formed to allow the holder unit to enter and exit.

Additionally, a protrusion that is inserted into the holder base hole is formed on the bottom of the sample holder.

Meanwhile, the bellows unit includes a bellows unit base coupled to the front of the housing.

In addition, the bellows unit further includes a servomotor coupled to one side of the bellows unit base to linearly reciprocate a cam follower block with an inclined portion formed on an upper surface.

In addition, the bellows unit further includes a door bellows that is provided with a push bar, a push block, and a cam follower in contact with an inclined portion of the cam follower block and moves up and down along the linear reciprocating motion of the cam follower block.

Additionally, the bellows unit further includes a vertical support on which a vertical linear guide is formed.

At this time, the door bellows includes a vertical linear block coupled to the vertical linear guide.

Additionally, the vacuum chamber according to the present invention includes a sealing member on one of the door base flange and the sample holder flange.

Additionally, the door bellows is coupled to the bottom hole of the door base to be sealed.

Meanwhile, the transfer unit transfers the sample holder in the direction of a second axis that perpendicularly intersects the first axis.

More specifically, the transfer unit includes a second-axis encoder formed on one side, a second-axis stator and a second-axis linear guide respectively installed extending in the second axis direction, and a slider base coupled to the inner bottom of the housing. do.

In addition, the transfer unit includes a first axis stator, a first axis linear guide, and a first axis scale that extend in the first axis direction at the top, respectively, and a second axis mover formed on one side of the lower part and extend in the second axis direction. It further includes a second-axis slider that moves linearly in the second-axis direction relative to the slider base, including a second-axis scale installed and a second-axis linear block movably coupled to the second-axis linear guide. can do.

In addition, the transfer unit includes a first axis mover formed at the bottom, a first axis encoder, and a first axis linear block movably coupled to the first axis linear guide, and is positioned relative to the second axis slider. A first axis slider that moves linearly in one axis direction may be further provided.

Meanwhile, the second-axis encoder and the second-axis stator each penetrate the bottom of the housing and are coupled to the slider base.

The vacuum chamber according to the present invention can be implemented at a relatively low cost by not using a gate valve to maintain a vacuum state in the process chamber when introducing or removing a sample, and can improve space utilization within the process chamber. .

In addition, the vacuum chamber according to the present invention has a relatively simple structure, is suitable for miniaturization, and can improve maintainability such as cleaning.

In addition to the above-described effects, specific effects of the present invention are described below while explaining specific details for carrying out the invention.

1 is a perspective view of a vacuum chamber according to an embodiment of the present invention.
Figure 2 is an exploded perspective view of a vacuum chamber according to an embodiment of the present invention.
Figure 3 is a side cross-sectional view of a door unit in a vacuum chamber according to an embodiment of the present invention.
Figure 4 is an exploded perspective view of a holder unit in a vacuum chamber according to an embodiment of the present invention.
Figure 5 is a perspective view of a transfer unit in a vacuum chamber according to an embodiment of the present invention.
Figure 6 is a bottom perspective view of the transfer unit in the vacuum chamber according to an embodiment of the present invention.
Figure 7 is a perspective view of a bellows unit in a vacuum chamber according to an embodiment of the present invention.
Figure 8 is a front view of a bellows unit in a vacuum chamber according to an embodiment of the present invention.
Figure 9 is a side cross-sectional view of a bellows unit in a vacuum chamber according to an embodiment of the present invention.
Figure 10 is a view showing the transfer state of the holder unit in the vacuum chamber according to an embodiment of the present invention.
Figure 11 is a view showing the transfer state of the holder unit in the vacuum chamber according to an embodiment of the present invention.
Figure 12 is a diagram showing the transfer state of the holder unit in the vacuum chamber according to an embodiment of the present invention.

Hereinafter, some embodiments of the present invention will be described in detail through illustrative drawings. When adding reference numerals to components in each drawing, it should be noted that identical components are given the same reference numerals as much as possible even if they are shown in different drawings. Additionally, when describing embodiments of the present invention, if detailed descriptions of related known configurations or functions are judged to impede understanding of the embodiments of the present invention, the detailed descriptions will be omitted.

Additionally, when describing the components of an embodiment of the present invention, terms such as first, second, A, B, (a), and (b) may be used. These terms are only used to distinguish the component from other components, and the nature, sequence, or order of the component is not limited by the term. When a component is described as being “connected,” “coupled,” or “connected” to another component, that component can be connected or connected directly to that other component, but there is no need for another component between each component. It should be understood that may be “connected,” “combined,” or “connected.”

1 and 2 are a perspective view and an exploded perspective view, respectively, of a vacuum chamber according to an embodiment of the present invention.

Referring to Figures 1 and 2, the vacuum chamber according to the present invention includes a process chamber 100, a door unit 200, a holder unit 300, a transfer unit 400, and a bellows unit 500.

The process chamber 100 is coupled to the outside of the housing 110 and the housing 110, which has a housing opening 111 at the front through which samples are introduced or exported, to create a vacuum environment in the inner space of the housing 110. It includes a vacuum pump 120 that does.

More specifically, the housing 110 includes a box-shaped housing body 110a with an open top and a housing cover 110b coupled to the upper side of the housing body 110a.

In addition, the surface where the housing body 110a and the housing cover 110b are joined is sealed from the external environment by a sealing member.

Additionally, the process chamber 100 may include a vacuum valve for controlling the vacuum environment therein.

Additionally, the process chamber 100 may further include a window through which the inside of the housing 110 can be observed on the rear side and the opposite side where the vacuum pump 120 is installed.

Meanwhile, Figure 3 is a side cross-sectional view of a door unit in a vacuum chamber according to an embodiment of the present invention.

Referring to FIG. 3, the door unit 200 has a door base opening 211 formed in the direction of the housing opening 111, a door base flange 213 on the inner upper surface, and a door base bottom hole 212 on the bottom. A sample entrance 214 through which a sample enters and exits is formed at the front, and includes a door base 210 coupled to the front side of the housing 110.

In addition, the door unit 200 further includes a door 220 that is coupled to the outside of the door base 210 to open and close the sample entrance 214.

More preferably, the surface where the door base 210 and the housing 110 are joined is sealed from the external environment by a sealing member.

Additionally, the surface on which the sample entrance 214 is formed is preferably formed to be inclined.

Meanwhile, the door 220 can be opened and closed manually or automatically.

Figure 4 is an exploded perspective view of a holder unit in a vacuum chamber according to an embodiment of the present invention.

Referring to FIG. 4, the holder unit 300 has a sample holder flange 311 formed on the outer peripheral surface, a sample holder 310 on which a sample is loaded on the upper surface, and a holder base hole 321 formed on the upper surface of the sample holder. It includes a holder base 320 on which 310 is loaded.

More preferably, the sample holder 310 is coupled to the holder base 320 by its own weight, and the holder base is installed on the bottom of the sample holder 310 to prevent the sample holder 310 from moving back and forth and left and right. It may further include a protrusion 312 that can be inserted into the hole 321.

Meanwhile, the transfer unit 400 is installed inside the housing 110 and transfers the holder base 320 along the first axis.

Additionally, the transfer unit 400 may transfer the sample holder 310 in the direction of a second axis that perpendicularly intersects the first axis.

5 and 6 are a perspective view and a bottom perspective view of a transfer unit, respectively, in a vacuum chamber according to an embodiment of the present invention.

The detailed configuration of the transfer unit 400 will be described with reference to FIG. 5 as follows.

The transfer unit 400 is provided with a second-axis encoder 433 formed on one side, a second-axis stator 431 and a second-axis linear guide 432 that extend in the second axis direction and are respectively installed in the housing. (110) Includes a slider base 430 coupled to the inner bottom surface.

In addition, the transfer unit 400 is formed on one side of the lower part with a first axis stator 421, a first axis linear guide 422, and a first axis scale 423, which are respectively installed at the top and extending in the first axis direction. A second axis mover 424, a second axis scale 425 installed extending in the second axis direction, and a second axis linear block 426 movably coupled to the second axis linear guide 432. It further includes a second axis slider 420 that moves linearly in the second axis direction relative to the slider base 430.

In addition, the transfer unit 400 includes a first axis linear block (411) formed at the bottom, a first axis encoder (413), and a first axis linear block ( 412), and further includes a first axis slider 410 that moves linearly in the first axis direction relative to the second axis slider 420.

More specifically, the second-axis encoder 433 and the second-axis stator 431 formed on the slider base 430 each penetrate the bottom of the housing 110 and are coupled to the slider base 430.

It is preferable that the second axis linear guide 432 is formed of at least two pieces.

In addition, the second-axis slider 420 moves linearly in the second-axis direction along the second-axis linear guide 432 by current flow between the second-axis stator 431 and the second-axis mover 424. .

Additionally, the second-axis slider 420 can be controlled by a second-axis scale 425 coupled to the bottom and a second-axis encoder 433 fixed to the slider base 430.

In addition, the first axis linear guide 422 is preferably formed of at least two, and the first axis scale 423 and the second axis scale 425 are the first axis encoder 413 and the second axis encoder 413, respectively. It is formed at a position corresponding to the axis encoder 433.

In addition, the first axis slider 410 moves linearly in the first axis direction along the first axis linear guide 422 by the current flow between the first axis stator 421 and the first axis mover 411. .

Additionally, the first axis slider 410 can be controlled by the first axis encoder 413 and the first axis scale 423 fixed to the second axis slider 420.

In addition, the holder base 320 is fixedly coupled to the upper part of the first axis slider 410.

Meanwhile, the bellows unit 500 is coupled to a push bar 531 installed to penetrate the door base bottom hole 212 and the top of the push bar 531, and penetrates the holder base hole 321 to produce the sample. A holder flange 311 is formed on the lower side of the door base 210 and includes a push block 532 that transports the sample holder 310 so that it contacts and presses the door base flange 213.

7 to 9 are a perspective view, a front view, and a side cross-sectional view of a bellows unit in a vacuum chamber according to an embodiment of the present invention, respectively.

The detailed configuration of the bellows unit 500 will be described with reference to FIGS. 7 to 9 as follows.

The bellows unit 500 includes a bellows unit base 510 with a horizontal linear guide 511 installed on the upper surface and a servomotor 512 on one side and coupled to the front of the housing 110.

In addition, the bellows unit 500 has a horizontal linear block 532 coupled to the horizontal linear guide 512 installed on the bottom and an inclined portion 531 formed on the top, so that it can be reciprocated in a straight line by the servomotor 511. It further includes a moving cam follower block 520.

More specifically, the cam follower block 520 has a nut corresponding to the thread formed on the rotation axis of the servomotor 512, and can perform linear reciprocating motion by the rotational movement of the servomotor 511.

In addition, the bellows unit 500 is provided with a cam follower 533 that contacts the inclined portion 521 of the cam follower block 520, and moves up and down according to the linear reciprocating movement of the cam follower block 520. It further includes a bellows 530.

More specifically, the door bellows 530 is coupled to the outer peripheral surface of the door base bottom hole 212 so that the door base bottom hole 212 is sealed.

In addition, the door bellows 530 has a push bar 531 coupled to the top of the door bellows 530 formed at the center, and a vertical linear block 534 is formed on the housing 110 side.

Meanwhile, the bellows unit 500 includes a vertical support 540 on which a vertical linear guide 541 to which the vertical linear block 534 is coupled is fixed.

Accordingly, the door bellows 530 moves the cam follower 533 upward or downward along the inclined portion 521 when the cam follower block 520 moves linearly, thereby operating the vertical linear guide ( 541) and moves vertically up and down.

10 to 12 are diagrams showing the transfer state of a holder unit in a vacuum chamber according to an embodiment of the present invention, respectively.

More specifically, Figure 10 is a side cross-sectional view of the vacuum chamber showing the state in which the holder unit 300 is transported to load a sample into the sample holder 310.

In addition, FIG. 11 is a side cross-sectional view of the vacuum chamber illustrating a state before loading the sample into the sample holder 310 is completed, the door 220 is closed, and the holder unit 300 is transferred into the process chamber 100.

In addition, Figure 12 is a side cross-sectional view of the vacuum chamber showing the state in which the holder unit 300 is transferred into the process chamber 100 for sample inspection and processing.

The operating method of the vacuum chamber according to the present invention will be described with reference to FIGS. 10 to 12 as follows.

The holder unit 300 is transferred toward the housing opening 111 by the first axis slider 410.

At this time, as shown in FIG. 10, the sample holder 310 is located inside the door base 210 through the housing opening 111 and the door base opening 211.

That is, one side of the holder base 320 coupled with the first axis slider 410 is located within the process chamber 100, and the other side coupled with the sample holder 310 is located within the door base 210.

In addition, the sample holder 310 is separated from the holder base 320 by the bellows unit 500, and the sample holder flange 311 is in close contact with the door base flange 213.

More specifically, the sample holder 310 is moved upward by a push block 532 formed on the upper side of the door bellows 530 that moves upward along the inclined portion 521 according to the linear movement of the cam follower block 520. adheres closely to

At this time, a sealing member is provided on one side of the sample holder flange 311 or the door base flange 213 to block the inside of the door base 210 from the outside.

In addition, the cam follower 533 formed on the door bellows 530 may be located on the upper side of the inclined portion 521 of the cam follower block 520 or on a straight portion formed on the upper side of the inclined portion 521. there is.

Meanwhile, the door 220 is opened so that a sample can be introduced into the sample holder 310 through the sample entrance 214.

At this time, the inner space of the process chamber 100 and the door base 210 is blocked from the outside by the close contact between the sample holder flange 311 and the door base flange 213, although the door 220 is open. It can be maintained in a vacuum state.

Afterwards, as shown in FIG. 11, the sample entrance 214 is closed by the door 220.

Additionally, the sample holder 310 loaded with the sample is seated on the holder base 320 by the bellows unit 500.

More specifically, the cam follower 533 of the door bellows 530 moves downward along the inclined portion 521 of the cam follower block 520.

Accordingly, the sample holder 310 is coupled to the holder base 320 by inserting the protrusion 312 into the holder base hole 321 by its own weight.

Thereafter, as shown in FIG. 12, the sample holder 310 on which samples are always loaded is transferred into the process chamber 100 by the first axis slider 410.

In addition, the sample holder 310 can be finely adjusted by the first-axis slider 410 and the second-axis slider 420 to enable inspection and analysis by probes, vision inspection devices, manufacturing devices, etc., so that the sample holder 310 can be finely adjusted. Inspection, analysis, manufacturing, etc. can be easily performed.

The preferred embodiments of the present invention described above have been disclosed for illustrative purposes, and those skilled in the art will be able to make various modifications, changes, and additions within the spirit and scope of the present invention, and such modifications, changes, and additions will be possible. The addition should be viewed as falling within the scope of the patent claims below.

100. Process chamber
110. Housing
110a. housing body
110b. housing cover
111. Housing opening
120. Vacuum pump
200. Door unit
210. Door base
211. Door base opening
212. Door base bottom hole
213. Door base flange
214. Sample entrance
220. Door
300. Holder unit
310. Sample holder
311. Sample holder flange
312. Protrusion
320. Holder base
321. Holder base hole
400. Transfer unit
410. 1st axis slider
411. Axis 1 mover
412. 1st axis linear block
413. 1st axis encoder
420. 2nd axis slider
421. First axis stator
422. 1st axis linear guide
423. 1st axis scale
424. Second axis mover
425. Second axis scale
426. 2nd axis linear block
430. Slider Base
431. 2nd axis stator
432. 2nd axis linear guide
433. 2nd axis encoder
500. Bellows unit
510. Bellows unit base
511. Horizontal linear guide
512. Servo motor
520. Cam follower block
521. Inclined part
522. Horizontal linear block
530. Door bellows
531. Push bar
532. Push block
533. Cam Follower
534. Vertical linear block
540. Vertical support
541. Vertical linear guide

Claims (10)

A process chamber 100 that creates a vacuum environment in the internal space;
It is connected to one side of the process chamber 100 in the first direction to create a vacuum environment in the internal space with the process chamber, and a door base flange 213 is provided on one side of the second direction intersecting the first direction. a door base 210 having a sample entrance 214 on one side further in the second direction than the door base flange 213 and a door base hole 212 on the other side in the second direction;
A door 220 installed on the door base 210 to open and close the sample entrance 214 from an external space of the door base 210;
It is installed to be movable in a first direction between at least a first position in the inner space of the door base 210 and a second position in the inner space of the process chamber 100, and when disposed in the first position, the A holder base 320 provided with a holder base hole 321 facing the door base hole 212 in a second direction;
It is loaded on one surface of the holder base 320 in the second direction, and the door base flange is mounted in the holder base 320 in the second direction while the holder base 320 is placed in the first position. A sample holder (310) provided with a sample holder flange (311) facing (213); and
A push bar ( 531), and includes a bellows unit 500 that transports the push bar 531 in a second direction,
When the push bar 531 is moved to one side in the second direction while the holder base 320 on which the sample holder 310 is loaded is placed in the first position, the push bar 531 is moved to the holder base. By passing through the hole 321 and transferring the sample holder 310 to one side in the second direction, the sample holder flange 311 contacts and is pressed against the door base flange 213, and thus the door 220 A vacuum chamber in which a vacuum environment in the interior space of the door base 210 excluding the sample entrance 214 is maintained even when opened.
In claim 1,
The bellows unit 500 is a vacuum chamber that transfers the push bar 531 to the other side in the second direction so that the push bar 531 comes out of the holder base hole 321 to the other side in the second direction.
In claim 1,
A vacuum chamber in which a sealing member is provided on one side of the door base flange 213 and the sample holder flange 311 facing each other in the second direction.
In claim 1,
The bellows unit 500:
The second direction linear guide 541 disposed outside the process chamber 100 and the door base 2210 and extending in a second direction;
a second direction linear block 534 whose slide movement in the second direction is guided by the second direction linear guide 541; and
One end in the second direction is coupled to the door base 210 to surround the holder base hole 321, extends flexibly in the second direction to surround the push bar 531, and the other end in the second direction It includes a door bellows 530, the end of which is connected to the second direction linear block 534,
A vacuum chamber in which the push bar 531 is transferred in the second direction as the second direction linear block 534 slides in the second direction.
In claim 1,
The holder base 320 is a vacuum chamber that can be moved in the first direction by the transfer unit 400 installed in the process chamber 100.
In claim 5,
The transfer unit 400 is:
A first axis linear guide 422 extending in the first direction; and
It includes a first axis slider 410 that slides in a first direction under the guidance of the first axis linear guide 422 and is fixedly coupled to the holder base 320,
The holder base 320 extends from the first axis slider 410 to one side in a first direction,
The holder base hole 321 is a vacuum chamber provided on one side of the holder base 320 in the first direction.
In claim 6,
The transfer unit 400 is:
a slider base 430 having a second axis linear guide 432 extending in a third direction intersecting the first direction; and
A vacuum chamber further comprising a second axis slider 420, which slides in the third direction under the guidance of the second axis linear guide 432 and includes the first axis linear guide 422. .
In claim 7,
and the third direction intersects the second direction.
In claim 7,
The second axis slider 420 includes a second axis mover 424,
The slider base 430 has a second axis stator 431 that interacts with the second axis mover 424,
The second axis stator 431 penetrates the housing 110 of the process chamber 100 and is coupled to the slider base 430.
In claim 7,
The second axis slider 420 has a second axis scale 425,
The slider base 430 is provided with a second-axis encoder 433 that detects a second-axis scale 425,
The second axis encoder 433 is a vacuum chamber that penetrates the housing 110 of the process chamber 100 and is coupled to the slider base 430.