KR102647814B1 - High temperature high speed gas valve operated by motor - Google Patents

Abstract

The present invention relates to a high-temperature, high-speed gas valve operated by a motor, in which a gas inlet pipe 111 is formed at one end and a gas discharge pipe 113 is formed at the other end, and the gas inlet pipe 111 and the A gas flow block 110 having a gas movement path 115 connecting the gas discharge pipe 113; an actuator 120 that is movable up and down in the gas passage 115 and controls the movement of gas by opening and closing the gas passage 115; an actuator support block 130 provided on the upper part of the gas flow block 110 to support the actuator 120 to move up and down; Pressure rotation means 140 provided on the upper part of the actuator support block 130 to protrude upward; a driving motor 170 provided on one side of the pressurized rotating ball 140; The actuator support block ( It is characterized in that it includes a ball lifting cam 150 formed with a cam protrusion 151a that causes the 130) to be lowered.

Description

High temperature high speed gas valve operated by motor}

The present invention relates to a high-temperature, high-speed gas valve, and more specifically, to a high-temperature, high-speed gas valve that is driven by a motor and enables fast operation and response speed.

Recently, the introduction of the ALD (Atomic Layer Deposition) process as a semiconductor manufacturing process is progressing. In the ALD process, in a high-temperature (approximately 200°C) atmosphere, multiple types of gases such as precursors, inert gases, and oxidizing species gases are alternately supplied to the chamber from a gas supply system through high-speed switching in an extremely short cycle, and nano-materials are deposited on the wafer in the chamber. A thin film is formed as if atomic layers are stacked homogeneously and uniformly, one layer at a time.

The ALD valve used in such a gas supply system is often a direct diaphragm valve equipped with a pneumatic actuator from the viewpoint of air operation and advantages due to valve characteristics.

Figure 1 is a diagram showing the configuration of a conventional ALD valve 10. As shown, the conventional ALD valve 100 includes a gas inlet pipe 11 through which gas flows, a gas discharge pipe 12 through which gas is discharged to the process chamber, and a gas inlet pipe 11 and a gas discharge pipe 12. It includes a gas movement path 13 that forms a gas movement path therebetween, and an actuator 14 that moves up and down the gas movement path 13 and opens and closes the gas movement path.

The actuator 14 is moved up and down by the actuator driving unit 15, which is operated depending on whether air (A) is supplied.

Since the conventional ALD valve 10 is operated by pneumatic pressure, the air pressure changes when the temperature is high during operation, and there is a risk of deterioration in performance due to deviation in pneumatic pressure.

Accordingly, the conventional ALD valve 10 has the disadvantage of requiring additional parts for operational stability at high temperatures and accurate pneumatic control, complicating the overall configuration.

In addition, there was a problem that particles were generated when the bellows 14a surrounding the actuator 14 moved up and down when the actuator 14 moved up and down, which could contaminate the moving gas.

In addition, when a plurality of ALD valves 10 are used for gas flow, it is inconvenient to connect a pneumatic supply structure to each ALD valve 10.

Korean Patent Publication No. 10-2019-0024797 “Attachment structure of electromagnetic valve for actuator and actuator-mounted valve”

The purpose of the present invention is to solve the above-mentioned problems and to provide a high-temperature, high-speed gas valve operated using a motor.

Another object of the present invention is to provide a high-temperature, high-speed gas valve that can be stably used for a long time by improving durability.

Another object of the present invention is to provide a high-temperature, high-speed gas valve that can prevent particle generation by bellows.

Another object of the present invention is to provide a high-temperature, high-speed gas valve that can be used by connecting a plurality of valves to one motor.

The above objects and various advantages of the present invention will become more apparent to those skilled in the art from preferred embodiments of the present invention.

The object of the present invention can be achieved by a high-temperature, high-speed gas valve operated by a motor. The high-temperature, high-speed gas valve of the present invention has a gas inlet pipe 111 formed at one end, a gas discharge pipe 113 formed at the other end, and the gas inlet pipe 111 and the gas discharge pipe 113 are connected inside. A gas flow block 110 having a gas movement path 115 formed therein; an actuator 120 that is movable up and down in the gas passage 115 and controls the movement of gas by opening and closing the gas passage 115; an actuator support block 130 provided on the upper part of the gas flow block 110 to support the actuator 120 to move up and down; Pressure rotation t means 140 provided on the upper part of the actuator support block 130 to protrude upward; A driving motor 170 provided on one side of the pressing and rotating means 140; The actuator support block ( It is characterized in that it includes a ball lifting cam 150 formed with a cam protrusion 151a that causes the 130) to be lowered.

According to one embodiment, an inlet hole (111a) in communication with the gas inlet pipe 111 and an discharge hole (113a) in communication with the gas discharge pipe 113 are formed in the lower part of the gas movement path 115. , an actuator head 121 of a size capable of blocking the discharge hole 113a is provided at the bottom of the actuator 120, and the actuator support block 130 is horizontally positioned on the upper part of the gas flow block 110. a lower support plate 131 that is fixed; an upper support plate (132) disposed at a certain height and spaced apart from the lower support plate (131) and on which the ball lifting cam (150) is fixedly coupled; A connecting shaft 133 that is fixedly coupled to the upper support plate 132 and whose lower part is coupled to the upper part of the actuator 120; a plurality of support shafts 134 provided perpendicularly to the border area between the lower support plate 131 and the upper support plate 132 to support the connecting shaft 133 to be vertically raised and lowered; an elastic member 135 coupled to the support shaft 134 and applying an elastic force to raise the connecting shaft 133 when the pressing force of the ball lifting cam 150 is released; A plurality of guide rollers (133a) are provided on the outer peripheral surface of the connecting shaft 133 and rotate in idle contact with the support shaft 134 when being lifted, and guide the connecting shaft 133 to be vertically raised and lowered. desirable.

According to one embodiment, the coupling plate 143 is fixedly coupled to the upper surface of the upper support plate 132; and the pressing and rotating means 140 is partially exposed to the outside on the upper part of the coupling plate 143. It may further include a ball receiving block 141 that is rotated by contact with the ball lifting cam 150.

According to one embodiment, a bellows 123 provided to surround the outside of the actuator 120 in the gas movement path 115; It may further include a bellows cover 125 surrounding the bellows 123 and the actuator head 121.

According to one embodiment, it is provided between the gas flow block 110 and the actuator support block 130 and supplies air between the connecting shaft 133 and the upper support plate 132 to actuate the actuator 120. It may further include a cooling air supply block 180 that cools frictional heat generated when the actuator support block 130 moves up and down.

According to one embodiment, the cooling air supply block 180 is replaced with the lower support plate 131 and is positioned horizontally on the upper part of the gas flow block 110, and the actuator 120 is inserted into the central area. A cooling block body 181 through which an actuator coupling hole 184 is formed; The upper surface of the cooling block body 181 is concentrically embedded with the actuator coupling hole 184 in the boundary area of the connection shaft 133 and the support shaft 134 and is positioned at a certain angle to the plate surface along the circumferential direction. A cooling ring (183) having a plurality of air discharge holes (183a) at intervals; an air supply pipe (187) coupled to one outer periphery of the cooling block body (181) and supplying air to the cooling block body (181); It may include air movement paths (182a, 185) formed inside the cooling block body (181) to move the air supplied to the air supply pipe (187) to the lower part of the cooling ring (183).

The high-temperature, high-speed gas valve according to the present invention has the advantage of fast operation and response speed because the actuator is raised and lowered by a drive motor rather than air pressure.

In addition, there is an advantage that the radius of the cam body, the outer diameter of the pressurizing rotation means, the arc length of the cam protrusion, the angle of the connecting arc, etc. can be designed in various ways depending on the size of the process chamber and the type and amount of process gas.

In addition, the pressurized rotating means is provided to rotate, improving durability and enabling stable use for a long time.

In addition, by providing a bellows casing that surrounds the bellows of the actuator, it is possible to block particles generated during the operation of the bellows from entering the gas.

In addition, since a drive motor is used, there is an advantage in that a plurality of valves can be connected at once by combining a plurality of ball lifting cams on the drive shaft.

In addition, it has the advantage of cooling the actuator support block by supplying air to the actuator support block, which moves up and down at high speed and generates frictional heat, thereby enabling stable operation.

1 is an exemplary diagram schematically showing the configuration of a conventional ALD valve;
Figure 2 is a perspective view showing the configuration of a high-temperature and high-speed gas valve according to the present invention;
Figure 3 is a perspective view showing the internal configuration of the high-temperature and high-speed gas valve according to the present invention;
Figure 4 is an exemplary diagram showing the operation process of the high-temperature and high-speed gas valve according to the present invention;
Figure 5 is a diagram showing the configuration of the ball lifting cam of the high-temperature high-speed gas valve according to the present invention;
Figure 6 is a cross-sectional example showing a state in which the gas movement path is opened by the high-temperature and high-speed gas valve according to the present invention;
Figure 7 is a partial perspective cross-sectional view showing a state in which the gas movement path is closed by the high-temperature high-speed gas valve according to the present invention;
Figure 8 is a cross-sectional example showing a state in which a gas movement path is closed by a high-temperature high-speed gas valve according to another embodiment of the present invention;
Figure 9 is a perspective view showing the configuration of a cooling block of a high-temperature and high-speed gas valve according to another embodiment of the present invention;
Figure 10 is a diagram showing the air movement path through the cooling block.

In order to fully understand the present invention, preferred embodiments of the present invention will be described with reference to the accompanying drawings. Embodiments of the present invention may be modified in various forms, and the scope of the present invention should not be construed as being limited to the embodiments described in detail below. This example is provided to more completely explain the present invention to those with average knowledge in the art. Therefore, the shapes of elements in the drawings may be exaggerated to emphasize a clearer description. It should be noted that identical members in each drawing may be indicated by the same reference numerals. Detailed descriptions of well-known functions and configurations that are judged to unnecessarily obscure the gist of the present invention are omitted.

Figure 2 is a perspective view showing the configuration of the high-temperature, high-speed gas valve 100 according to the present invention, Figure 3 is an internal perspective view showing the internal configuration of the high-temperature, high-speed gas valve 100, and Figure 4 is a view showing the configuration of the high-temperature, high-speed gas valve 100 according to the present invention. This is a perspective view showing a state in which the ball lifting cam 150 of the high-temperature high-speed gas valve 100 pressurizes the pressing rotation means 140.

As shown in the drawing, the ALD valve 100 according to the present invention includes a gas flow block 110 through which gas flows, and an actuator 120 that moves up and down inside the gas flow block 110 and regulates the gas movement. and an actuator support block 130 that supports the actuator 120 so that the actuator 120 moves up and down, a pressurizing rotation means 140 provided on the upper part of the actuator support block 130, and a power supply. A drive motor 170 that rotates and is coupled to the drive shaft of the drive motor 170 and pressurizes the pressure rotation means 140 to lower the actuator support block 130 and the actuator 120 coupled thereto. Includes (150).

This high-temperature, high-speed gas valve can be used as an ALD valve in an ALD process that requires high-speed operation of the valve in a high-temperature environment, but is not limited to this.

The ALD valve 100 according to the present invention raises and lowers the actuator 120 using a drive motor 170 operated by power supply, unlike the conventional ALD valve 10 that raises and lowers the actuator 14 by pneumatic pressure. .

As a result, compared to the conventional ALD valve 10, the on/off time can be reduced to less than 5 ms, and since there is no need for a separate pneumatic control configuration, the configuration is simple and has the advantage of providing stability at high temperature operation.

FIG. 6 is a side cross-sectional view showing the configuration of the high-temperature high-speed gas valve 100 in a gas supply state, and FIG. 7 is a perspective cross-sectional view showing the configuration of the high-temperature high-speed gas valve 100 in a state in which the gas supply is cut off. .

The gas flow block 110 is provided at the lower part of the high-temperature and high-speed gas valve 100 and forms a path through which gas moves. As shown in FIG. 6, the gas flow block 110 has a gas inlet pipe 111 through which gas (G) flows from a gas supply unit (not shown), and a gas inlet pipe (111) that discharges gas (G) into a process chamber (not shown). It includes a gas discharge pipe 113 and a gas movement path 115 provided between the gas inlet pipe 111 and the gas discharge pipe 113 through which the gas flowing into the gas inlet pipe 111 moves to the gas discharge pipe 113. do.

At the lower part of the gas passage 115, an inlet hole 111a connected to the gas inlet pipe 111 and an discharge hole 113a connected to the gas discharge pipe 113 are formed in a vertical direction. A sealing member 113b is provided in the connection area between the bottom of the gas passage 115 and the discharge hole 113a, and when the actuator head 121 descends and blocks the discharge hole 113a, as shown in FIG. Blocks the movement of gas (G).

As shown in FIG. 6, the actuator 120 is provided perpendicular to the gas movement path 115 of the gas flow block 110 and moves up and down in conjunction with the operation of the pressure rotation means 140 and the ball lifting cam 150. It goes up and down and blocks the discharge hole (113a) to control the movement of gas (G).

An actuator head 121 is provided at the lower part of the actuator 120 to block the movement of gas (G) by descending and blocking the discharge hole (113a). In addition, the upper part of the actuator 120 is provided with a connection shaft insertion end 122 that is press-fitted into the connection shaft 133 and fixes the connection shaft 133 and the actuator 120.

A bellows 123 is coupled to the outside of the actuator 120 to surround it. In addition, the gas movement path 115 surrounds the outside of the bellows 123 and the actuator head 121 so that particles generated as the length of the bellows 123 changes when the actuator 120 moves up and down flow into the gas (G). A bellows cover 125 is provided to block it. The gas G can be prevented from being contaminated by particles generated from the bellows 123 by the bellows cover 125.

The actuator support block 130 transmits the pressure of the pressure rotation means 140 by the ball elevation cam 150 to the actuator 120 to support the actuator 120 to be lifted.

This pressing and rotating means 140 is preferably manufactured in the shape of a ball, for example, as shown in FIG. 4, but is not limited thereto.

As shown in Figures 4 and 6, the actuator support block 130 has a lower support plate 131 horizontally fixedly coupled to the upper part of the gas flow block 110, and is horizontally spaced at a certain height from the lower support plate 131. The upper support plate 132 is provided, the connection shaft 133 is provided perpendicular to the central area between the lower support plate 131 and the upper support plate 132, and the lower part is fixed to the actuator 120, and the lower support plate 131 It includes a plurality of support shafts 134 vertically coupled to the border area between the upper support plate 132 and the upper support plate 132.

The lower support plate 131 is fixedly coupled to the upper part of the gas flow block 110 and supports the actuator 120 so that it can move up and down the coupled connecting shaft 133. A movement space through which the actuator 120 can move is formed through the center of the lower support plate 131.

The upper support plate 132 is formed integrally with the connecting shaft 133, as shown in FIG. 6, and is lowered together with the connecting shaft 133 by the pressure of the pressure rotating ball 140. The connecting shaft 133 is integrally coupled to the lower part of the upper support plate 132 in the form of a square pillar. The lower part of the connecting shaft 133 is provided with an actuator insertion hole 133b into which the connecting shaft insertion end 122 of the actuator 120 is fitted.

A plurality of guide rollers 133a are provided on the four sides of the connecting shaft 133. The guide roller (133a) is provided to be capable of idling rotation on the connecting shaft (133). The guide roller 133a rotates in contact with the support shaft 134 when ascending and lowering, and guides the connecting shaft 133 to be vertically elevated.

This is to prevent gas leakage from occurring when the connecting shaft 133 is lifted and lowered biased in a specific direction rather than the vertical direction, and the actuator 120 coupled to the lower portion does not accurately block the discharge hole 113a.

A plurality of support shafts 134 are arranged perpendicularly to the four corner areas of the lower support plate 131 and the upper support plate 132. The lower end of the support shaft 134 is fixed to the lower support plate 131, and the upper end, although not shown in the drawing, is provided so that it can be lifted to a certain height in the support shaft insertion hole (not shown) of the upper support plate 132. An elastic member 135 is provided between the upper part of the support shaft 134 and the upper support plate 132.

The elastic member 135 is elastically compressed when the connecting shaft 133 is lowered together with the upper support plate 132 by the pressure of the pressure rotating ball 140 and supports the connecting shaft 133 so that it can be lowered. Then, when the pressure on the pressurized rotating ball 140 is released, an elastic force is applied to raise the connecting shaft 133 to its initial position.

The pressurized rotating ball 140 is provided on the upper part of the actuator support block 130, rotates in contact with the ball lifting cam 150, and applies a pressing force to lift the actuator support block 130. The pressurized rotating ball 140 is rotatably accommodated inside the ball receiving block 141 as shown in FIG. 4 . The pressurized rotating ball 140 is provided so that only 1/3 of the area is exposed to the outside of the ball receiving block 141, comes into line contact with the ball lifting cam 150, and receives a pressing force.

When the pressurized rotating ball 140 is fixed, the same area as the ball lifting cam 150 is repeatedly contacted and is worn by friction, and the lifting height may change over time. In order to solve this problem, in the present invention, the pressurized rotating ball 140 is rotatably provided in the ball receiving block 141 so that the area in contact with the ball lifting cam 150 is variable. This has the advantage of increasing the durability of the pressurized rotating ball 140 so that it can be used stably for a long time.

The ball receiving block 141 is provided on the upper part of the coupling plate 143, and the ball receiving block 141 is fixedly coupled to the upper support plate 132 by a fixing member 145.

The ball lifting cam 150 is rotated by the driving force of the driving motor 170 and pressurizes the pressurized rotating ball 140 to lower the actuator 120 and intermittently regulate the movement of gas (G). Figure 5(a) is a diagram showing the side configuration of the ball lifting cam 150. As shown, the ball lifting cam 150 has a cam body 151 in a circular shape with a certain radius. The outer periphery of the cam body 151 is provided with a cam protrusion 151a that protrudes with a radius larger than the radius of the cam body 151. The cam projection (151a) is connected to the cam body 151 by a connecting arc (151b).

Here, the difference in radius between the cam protrusion 151a and the cam body 151 is provided to correspond to the distance d between the actuator head 121 and the discharge hole 113a shown in FIG. 6.

As shown in FIG. 6, the cam body 151 rotates and the pressure rotating ball 140 contacts the outer peripheral surface of the cam body 151 and rotates inside the ball receiving block 141. In this state, as shown in FIG. 7, when the cam projection 151a is in contact with the pressure rotation ball 140, the pressure rotation ball 140 is pressed by the radius difference with the cam body 151, and the cam projection 151a The pressurized rotating ball 140 and the actuator support block 110 and actuator 120 coupled thereto are lowered by the difference in radius between the cam body 151 and the cam body 151.

The actuator head 121 of the lowered actuator 120 blocks the movement of gas (G) by blocking the discharge hole (113a).

Here, the gas movement blocking time can be adjusted by the arc length (a) of the cam projection (151a). In other words, as the arc length (a) becomes longer, the time for the actuator 120 to descend increases and the time to block the movement of the gas (G) increases.

Additionally, the response speed can be adjusted depending on the angle of the connecting signal 151b. The larger the angle of the connecting signal (151b), the faster the response speed can be.

The radius of the ball lifting cam 150, the radius of the cam protrusion 151a, the arc length of the cam protrusion 151a, and the angle of the connecting arc 151b depend on the capacity of the process chamber (not shown) and the type of gas used. It is desirable to design with this in mind.

At this time, the above high-temperature, high-speed valves may be formed as a plurality of cam projections with different arc lengths, and the drive motor simultaneously drives a plurality of ball lifting cams having cam projections with different arc lengths on the plurality of valves. You may.

In addition, the ball lifting cam 150 according to a preferred embodiment of the present invention is designed to have one cam protrusion 151a on the cam body 151, as shown in (a) of FIG. 5. In this case, gas blocking occurs once per rotation of the cam body 151.

On the other hand, as shown in (b) of FIG. 5, the cam body 151 may be provided with a plurality of cam protrusions 151a and 151a'. If a plurality of cam protrusions (151a, 151a') are provided on the cam body 151, gas blocking occurs multiple times during one rotation of the cam body 151.

The plurality of cam protrusions (151a, 151a') may be two facing each other, or four may be provided at 90-degree intervals.

This change in shape of the ball lifting cam 150 has the advantage of increasing the opening and closing speed. That is, since the rotational speed of the drive motor 170 is limited, there is an advantage in that the opening and closing speed can be further improved by changing the shape of the ball lifting cam 150.

Meanwhile, the ball lifting cam 150 is accommodated inside the cam cover 160 as shown in FIG. 2. The ball lifting cam 150 is connected and rotated by the drive motor 170 and the rotation shaft 153. The rotation shaft 153 is rotatably coupled to the cam cover 160 by a bearing 155.

The drive motor 170 is provided on one side of the cam cover 160 as shown in FIG. 3. The drive motor 170 is rotated by a control signal from a control unit (not shown). The drive motor 170 transmits rotational force by coupling the drive shaft 171 to the rotation shaft 153 of the ball lifting cam 150 by a coupling 173.

Here, the high-temperature, high-speed gas valve 100 according to a preferred embodiment of the present invention is shown as having one ball lifting cam 150 coupled to the drive shaft 171 of the drive motor 170, but in some cases, the drive shaft 171 ), a plurality of ball lifting cams 150 are provided along the longitudinal direction, and the cam protrusions 151a of each ball lifting cam 150 are provided differently at regular angular intervals, so that the driving motor 170 rotates during one rotation. The plurality of ball lifting cams 150 are rotated, and the cam protrusions 151a of the plurality of ball lifting cams 150 may sequentially pressurize the corresponding pressure rotation balls 140.

The structure of the drive motor 170 has the advantage of being able to modify the connection method to simultaneously drive a plurality of high-temperature, high-speed gas valves 100.

The operation process of the high-temperature, high-speed gas valve 100 according to the present invention having this configuration will be described with reference to FIGS. 2 to 7.

As shown in Figure 2, the high-temperature and high-speed gas valve 100 of the present invention is coupled to the gas supply path outside the process chamber (not shown). The high-temperature, high-speed gas valve 100 is equipped with a gas supply unit (not shown) connected to a gas inlet pipe 111, and a gas discharge pipe 113 connected to the gas supply path.

The drive motor 170 is operated by a control signal from the control unit (not shown), and the actuator 120 opens and closes the gas movement path 115 of the gas flow block 110 to control gas supply.

As shown in FIG. 6, when the drive motor 170 operates and the drive shaft 171 rotates, the rotation shaft 153 coupled to the drive shaft 171 rotates and the ball lifting cam 150 rotates.

At this time, the pressurized rotating ball 140 is in contact with the outer peripheral surface of the ball lifting cam 150 and rotated inside the ball receiving block 141.

When the pressurized rotating ball 140 contacts the lifting cam body 151, the actuator head 121 maintains a certain distance (d) from the discharge hole 113a and flows into the gas inlet pipe 111. The gas (G) is moved to the gas movement path 115 through the inlet hole 111a, moved to the gas discharge pipe 113 through the discharge hole 113a, and then supplied to the process chamber (not shown).

As shown in FIG. 7, when the drive shaft 171 continues to rotate and the cam protrusion 151a of the ball elevating cam 150 comes into contact with the pressure rotation ball 140, the pressure rotation ball 140 is pressed and the cam projection ( The pressure rotating ball 140 and the actuator support block 130 and actuator 120 coupled thereto are lowered by the difference in radius between 151a) and the cam body 151.

When the upper support plate 132 and the connection shaft 133 are lowered, the guide roller 133a coupled to the outer peripheral surface of the connection shaft 133 is lowered along the support shaft 134 while in contact with the support shaft 134. The connection shaft 133 is guided to descend vertically.

The actuator 120 coupled to the lower part of the connecting shaft 133 is vertically lowered along the gas movement path 115, and the actuator head 121 blocks the discharge hole 113a and moves through the inlet hole 111a. Blocks the gas (G) from moving to the gas discharge pipe (113).

When the ball lifting cam 150 is rotated and the cam body 151 and the pressurized rotating ball 140 come into contact with the connecting arc 151b, the upper support plate 132 is raised by the elastic force of the elastic member 135 and the actuator (120) rises together. Then, the gas G is discharged to the process chamber (not shown) through the gas discharge pipe 113 via the gas movement path 115.

Meanwhile, Figure 8 is a cross-sectional example showing the closed state of the gas movement path 115 of the high-temperature high-speed gas valve 100a according to another embodiment of the present invention, and Figure 9 shows the configuration of the cooling air supply block 180. It is a perspective view showing, and Figure 10 is an example diagram showing the air supply path through the cooling air supply block 180.

In the high-temperature, high-speed gas valve 100 according to the preferred embodiment described above, the actuator 120 moves up and down according to the rotation of the ball lifting cam 150, and at the same time supports the connecting shaft 133 of the actuator support block 130. The shaft 134 also moves up and down.

When the ball lifting cam 150 rotates at a high speed of 2000 rpm, the connecting shaft 133 and the support shaft 134 are lifted and lowered at high speed, so in this process, frictional heat due to friction is generated in the contact area and the guide roller 133a. It can happen. When frictional heat is generated in the actuator support block 130, the temperature of the entire ALD valve 100 may increase, and the increase in temperature may affect the durability and stable operation of the internal components.

Accordingly, the high-temperature, high-speed gas valve 100a according to another embodiment supplies air to the actuator support block 130, which is raised and lowered at high speed, to cool frictional heat.

For this purpose, as shown in FIG. 8, in a preferred embodiment, a cooling air supply block 180 is provided at the position where the lower support plate 131 is placed. As shown in FIG. 9, the cooling air supply block 180 is coupled to the plate-shaped cooling block body 181 and the outer peripheral surface of the cooling block body 181 and is an air supply pipe that supplies air to the cooling block body 181. 187).

The cooling block body 181 is formed through an actuator coupling hole 184 in the central area through which the actuator 120 can be moved up and down. And, the cooling ring 183 is coupled to the upper surface of the cooling block body 181 around the actuator coupling hole 184.

As shown in (b) of FIG. 10, the cooling ring 183 is located in the actuator coupling hole 184 on the upper surface of the cooling block body 181 so as to be disposed in the boundary area of the connection shaft 133 and the support shaft 134. They are combined in the form of concentric circles. The cooling ring 183 is embedded in the cooling block body 181 and is provided at the same height as the upper surface of the cooling block body 181 without being stepped.

The cooling ring 183 is formed with a plurality of air discharge holes 183a penetrating upward and downward at regular angle intervals along the circumferential direction.

One side of the cooling block body 181 is provided with an air supply pipe connection hole 182 to which the air supply pipe 187 is coupled. The air supply pipe 187 supplies high-pressure air compressed by a compressor to the air supply pipe connection hole 182.

As shown in (b) of Figure 10, inside the cooling block body 181, there is a horizontal air passage 182a and a vertical air passage through which air can move between the air supply pipe connection hole 182 and the cooling ring 183. A movement path 185 is formed.

The horizontal air movement path (182a) is horizontally connected from the air supply pipe connection hole (182) to the lower position of the cooling ring (183) to supply air. The vertical air passage 185 is provided in a ring shape at the position of the air discharge hole 183a at the bottom of the cooling ring 183 and supplies air moved to the horizontal air passage 182a to the cooling ring 183. .

As a result, as shown in (a) of FIG. 10, air (A) is discharged upward through the air discharge hole (183a) of the cooling ring (183).

The air (A) discharged through the air discharge hole 183a of the cooling ring 183 moves upward along the boundary area between the support shaft 134 and the connection shaft 133, as shown in FIG. It is transmitted upward through the boundary area between the upper support plate 132 and the support shaft 134.

As air (A) is supplied to the entire actuator support block 130 in this way, the actuator support block 130 is lifted and lowered at high speed, and the generated heat can be cooled by the air (A), and the entire inside of the ALD valve 100a Temperature may drop.

As discussed above, the high-temperature, high-speed gas valve according to the present invention has the advantage of fast operation and response speed because the actuator is raised and lowered by a drive motor rather than air pressure.

In addition, there is an advantage in that the radius of the cam body, the outer diameter of the pressurized rotating ball, the arc length of the cam protrusion, the angle of the connecting arc, etc. can be designed in various ways depending on the size of the process chamber and the type and amount of process gas.

In addition, the pressurized rotating ball is equipped to rotate, improving durability and enabling stable use for a long time.

In addition, by providing a bellows casing that surrounds the bellows of the actuator, it is possible to block particles generated during the operation of the bellows from entering the gas.

In addition, since a drive motor is used, there is an advantage in that a plurality of valves can be connected at once by combining a plurality of ball lifting cams on the drive shaft.

In addition, the supply of air cools the parts that are lifted and lowered at high speed, allowing stable operation to be performed continuously.

The embodiments of the high-temperature, high-speed gas valve of the present invention described above are merely exemplary, and those skilled in the art will understand that various modifications and other equivalent embodiments are possible therefrom. You will find out. Therefore, it will be understood that the present invention is not limited to the forms mentioned in the detailed description above. Therefore, the true scope of technical protection of the present invention should be determined by the technical spirit of the attached patent claims. In addition, the present invention should be understood to include all modifications, equivalents and substitutes within the spirit and scope of the present invention as defined by the appended claims.

10: Conventional ALD valve 11: Gas inlet pipe
12: gas discharge pipe 13: gas flow path
14: Actuator 15: Actuator driving part
15a: Air supply pipe 100: High-temperature high-speed gas valve
110: gas flow block 111: gas inlet pipe
111a: inlet hole 113: gas discharge pipe
113a: discharge hole 113b: sealing member
115: gas movement path 120: actuator
121: Actuator head 122: Connection shaft insertion end
123: bellows 125: bellows casing
130: Actuator support block 131: Lower support plate
132: upper support plate 133: connection shaft
133a: Guide roller 133b: Actuator insertion hole
134: support shaft 135: elastic member
140: Pressurized rotating ball 141: Ball receiving block
143: Coupling plate 145: Fixing member
150: Ball elevation cam 151: Cam body
151a: Cam projection 151b: Connecting arc
153: rotation axis 155: bearing
160: Cam cover 170: Drive motor
171: drive shaft 173: coupling
180: Cooling air supply block 181: Cooling block body
182: Air supply pipe connection hole 182a: Horizontal air movement path
183: Cooling ring 183a: Air discharge hole
184: Actuator coupling hole 185: Vertical air movement path
187: air supply pipe
A: air
G: gas

Claims (7)

A gas inlet pipe 111 is formed at one end, a gas discharge pipe 113 is formed at the other end, and a gas movement path 115 connecting the gas inlet pipe 111 and the gas discharge pipe 113 is formed inside. Gas flow block 110;
an actuator 120 that is movable up and down in the gas passage 115 and controls the movement of gas by opening and closing the gas passage 115;
an actuator support block 130 provided on the upper part of the gas flow block 110 to support the actuator 120 to move up and down;
a pressure rotating ball 140 provided on the upper part of the actuator support block 130 to protrude upward;
A driving motor 170 provided on one side of the pressurized rotating ball 140;
The actuator support block ( 130) includes a ball lifting cam 150 formed with a cam protrusion 151a that lowers,
An inlet hole (111a) in communication with the gas inlet pipe 111 and an outlet hole (113a) in communication with the gas discharge pipe 113 are formed in the lower part of the gas movement path 115,
An actuator head 121 of a size capable of blocking the discharge hole 113a is provided at the bottom of the actuator 120,
The actuator support block 130 is,
a lower support plate 131 fixed horizontally to the upper part of the gas flow block 110;
an upper support plate (132) disposed at a certain height and spaced apart from the lower support plate (131) and on which the ball lifting cam (150) is fixedly coupled;
A connecting shaft 133 that is fixedly coupled to the upper support plate 132 and whose lower part is coupled to the upper part of the actuator 120;
a plurality of support shafts 134 provided perpendicularly to the border area between the lower support plate 131 and the upper support plate 132 to support the connecting shaft 133 to be vertically raised and lowered;
an elastic member 135 coupled to the support shaft 134 and applying an elastic force to raise the connecting shaft 133 when the pressing force of the ball lifting cam 150 is released;
A plurality of guide rollers 133a are provided on the outer peripheral surface of the connecting shaft 133 and rotate in idle contact with the support shaft 134 when being lifted, and guide the connecting shaft 133 to be vertically raised and lowered,
A coupling plate 143 fixedly coupled to the upper surface of the upper support plate 132;
It further includes a ball receiving block 141 on the upper part of the coupling plate 143 that accommodates the pressure rotating ball 140 to be rotated by contact with the ball lifting cam 150 in a state in which only a portion is exposed to the outside. ,
a bellows 123 provided to surround the outside of the actuator 120 in the gas movement path 115;
It further includes a bellows cover 125 surrounding the bellows 123 and the actuator head 121,
It is provided between the gas flow block 110 and the actuator support block 130 and supplies air between the connecting shaft 133 and the upper support plate 132 to control the actuator support block 130 by the actuator 120. ) A high-temperature, high-speed gas valve further comprising a cooling air supply block (180) that cools the frictional heat generated when the gas moves up and down.
delete delete According to paragraph 1,
The valve is,
The cam projections are formed with a plurality of arcs of different lengths,
The high-temperature, high-speed gas valve is characterized in that the drive motor simultaneously drives a plurality of ball lifting cams having cam projections having different arc lengths on the plurality of valves.
delete delete According to paragraph 1,
The cooling air supply block 180 is,
A cooling block body 181 that is replaced with the lower support plate 131 and is positioned horizontally on the upper part of the gas flow block 110 and has an actuator coupling hole 184 through which the actuator 120 is inserted in the central area. ;
The upper surface of the cooling block body 181 is concentrically embedded with the actuator coupling hole 184 in the boundary area of the connection shaft 133 and the support shaft 134 and is positioned at a certain angle to the plate surface along the circumferential direction. A cooling ring (183) with a plurality of air discharge holes (183a) formed at intervals;
an air supply pipe (187) coupled to one outer periphery of the cooling block body (181) and supplying air to the cooling block body (181);
A high-temperature, high-speed gas comprising an air movement path (182a, 185) formed inside the cooling block body (181) and moving the air supplied to the air supply pipe (187) to the lower part of the cooling ring (183). valve.

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