KR102647324B1 - Boat apparatus - Google Patents

Abstract

The present invention relates to a boat device that prevents deposition of insulating portions due to infiltration of process gases during a deposition process and easily discharges residual solution during wet cleaning of the boat device.
One embodiment of the present invention includes a plurality of electrode plates arranged to be spaced apart from each other and a plurality of substrates loaded therebetween, and among the plurality of electrode plates, the electrode plates are disposed between two adjacent electrode plates having the same polarity, without being spaced apart from the electrode plates. It includes a gap-maintaining insulating part in close contact, a through-insulating part penetrating the plurality of electrode plates and the gap-maintaining insulating part, and a sealing member fastened to both ends of the through-insulating part, and at least a portion of an outer peripheral surface of the through-insulating part and maintaining the gap. Disclosed is a boat device in which there is a gap between the inner peripheral surfaces of the insulating parts.

Description

boat device {BOAT APPARATUS}

The present invention relates to a boat device, and more specifically, to a boat device that prevents deposition of insulating parts due to infiltration of process gases during a deposition process and easily discharges residual solution during wet cleaning of the boat device.

A solar cell converts the sun's light energy to produce electrical energy. Solar power generation using solar cells is classified as a type of new and renewable energy that does not use existing fossil fuels. A solar cell has a structure in which an N (negative) type semiconductor and a P (positive) type semiconductor are joined, and the boundary between the two semiconductors is called a PN junction.

When manufacturing a solar cell, there is a process of putting a substrate (wafer) into a chamber, going through a deposition process such as PECVD (Plasma Enhanced Chemical Vapor Deposition) within the chamber, and forming a PN junction on the substrate. . A boat device refers to a device that supports a substrate within a chamber during the process.

The boat device has a structure in which a plurality of electrode plates on which a plurality of substrates are loaded are arranged to be spaced apart from each other. If electricity flows between electrode plates during the process, a short circuit may occur. To prevent this, a gap-maintaining insulator is placed between two adjacent electrode plates.

Meanwhile, as the boat device undergoes repeated deposition processes, deposition accumulates on the boat device itself, so periodic wet cleaning of the boat device is required. In order to remove the solution remaining in the boat device after wet cleaning, a hole was conventionally added to the gap-maintaining insulator and the remaining solution was discharged through the hole. However, during the deposition process, the process gas penetrates into the hole, causing deposition of the gap-maintaining insulating part, resulting in a problem of a decrease in the insulation of the gap-maintaining insulating part.

The above-mentioned background technology is technical information that the inventor possessed for deriving the present invention or acquired in the process of deriving the present invention, and cannot necessarily be said to be known technology disclosed to the general public before filing the application for the present invention.

The present invention is intended to solve the above-described problems, and its purpose is to provide a boat device that prevents deposition of the insulation portion due to penetration of process gas during the deposition process and easily discharges residual solution during wet cleaning of the boat device. .

However, these problems are illustrative, and the problems to be solved by the present invention are not limited thereto. Problems not mentioned can be clearly understood by those skilled in the art from this specification and the attached drawings.

One embodiment of the present invention includes a plurality of electrode plates arranged to be spaced apart from each other and having a plurality of substrates stacked therebetween, and among the plurality of electrode plates, the electrode plates are disposed between two adjacent electrode plates having the same polarity, without being spaced apart from the electrode plates. It includes a gap-maintaining insulating part in close contact, a through-insulating part penetrating the plurality of electrode plates and the gap-maintaining insulating part, and a sealing member fastened to both ends of the through-insulating part, and at least a portion of an outer peripheral surface of the through-insulating part and maintaining the gap. Disclosed is a boat device in which there is a gap between the inner peripheral surfaces of the insulating parts.

In this embodiment, the gap-maintaining insulating part may not include a hole penetrating between the outer peripheral surface and the inner peripheral surface of the gap-maintaining insulating unit.

In this embodiment, the through-insulating portion includes a first side, a second side, a third side, and a fourth side, and there is a gap between the first side and the inner peripheral surface of the gap-maintaining insulating portion, and the second side and there is a gap between the inner peripheral surface of the gap-maintaining insulating part, and the third surface and the fourth surface may be in contact with the inner peripheral surface of the gap-maintaining insulating part.

In this embodiment, the width of the cross-section of the through-insulating portion may become narrower from the center of the through-insulating portion in the longitudinal direction to both ends of the through-insulating portion in the longitudinal direction.

In this embodiment, the through-insulating part may include at least one first slot.

In this embodiment, the depth of the first slot may become deeper from the center of the longitudinal direction of the penetrating insulating part to both ends of the longitudinal direction of the penetrating insulating part.

In this embodiment, the through-insulating portion may be twisted along the longitudinal direction of the through-insulating portion.

In this embodiment, the gap maintaining insulating part may include at least one second slot disposed on the inner peripheral surface.

In the present embodiment, it includes a fixing member fastened to the through insulating part and disposed between the sealing member and an outermost electrode plate among the plurality of electrode plates, wherein the fixing member is disposed on the inner peripheral surface of at least one It includes a third slot, and the third slot may be placed in a position corresponding to the second slot.

In this embodiment, both ends of the through-insulating part may be screwed to the sealing member.

Another embodiment of the present invention is a plurality of electrode plates arranged spaced apart from each other and having a plurality of substrates stacked therebetween, and among the plurality of electrode plates, the electrode plates are disposed between two adjacent electrode plates with the same polarity, without being spaced apart from the electrode plates. A gap-maintaining insulating part in close contact, a through-insulating part penetrating the plurality of electrode plates and the gap-maintaining insulating part, at least one gap disposed between the gap-maintaining insulating part and the through-insulating part, and fastened to both ends of the through-insulating part. and a boat device including a sealing member that blocks the gap from the outside.

Other aspects, features and advantages other than those described above will become apparent from the detailed description, claims and drawings for carrying out the invention below.

In the boat device according to an embodiment of the present invention, the gap-maintaining insulating part is in close contact with the electrode plate without separation, thereby preventing process gas from flowing into the gap-maintaining insulating part and depositing the insulating part during a process in the chamber.

In the boat device according to an embodiment of the present invention, residual solution after wet cleaning of the boat device may be discharged through a gap disposed between the gap maintenance insulating portion and the penetrating insulating portion. Through the gap, not only the residual solution after wet cleaning is quickly discharged, but also the drying time of the boat device can be shortened, thereby reducing the downtime period of the process due to wet cleaning. As the process downtime period is reduced, more substrates can be input into the process during the same period of time. Therefore, the effect of improving solar cell or semiconductor production efficiency can be obtained.

The boat device according to an embodiment of the present invention prevents process gas from penetrating into the gap by fastening sealing members to both ends of the penetrating insulation portion, thereby preventing deposition of the insulation portion due to the penetration of the process gas. On the other hand, when wet cleaning the boat device, by unfastening the sealing member, the residual solution inside the boat device can be easily discharged through the gap.

The effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from this specification and the attached drawings. .

Figure 1 is a perspective view showing a boat device according to an embodiment of the present invention.
Figure 2 is an enlarged view of part I of Figure 1.
FIG. 3 is a cross-sectional view taken along line II-II' of FIG. 2, showing the positional relationship between the penetrating insulating part and the gap-maintaining insulating part according to an embodiment of the present invention.
FIG. 4 is a portion cut along line III-III' of FIG. 2 and is a diagram showing the cross-sectional shape of a penetrating insulating part and a gap maintaining insulating part according to an embodiment of the present invention.
Figure 5 is a diagram showing the cross-sectional shape of a penetrating insulating part and a gap maintaining insulating part according to another embodiment of the present invention.
Figure 6 is a diagram showing a penetrating insulation portion according to another embodiment of the present invention.
FIG. 7 is a cross-sectional view taken along line IV-IV' of FIG. 6 and passing through the center of the through-insulating portion.
Figure 8 is a diagram showing the cross-sectional shape of a penetrating insulation portion according to another embodiment of the present invention.
Figure 9 is a diagram showing a penetrating insulation portion according to another embodiment of the present invention.
FIG. 10 is a cross-sectional view taken along line V-V' of FIG. 9 and passing through the center of the through-insulating portion.
Figure 11 is a diagram showing a penetrating insulating part according to another embodiment of the present invention.
Figure 12 is a diagram showing a penetrating insulating part according to another embodiment of the present invention.
Figure 13 is a diagram showing the cross-sectional shape of a gap maintenance insulating part according to another embodiment of the present invention.
Figure 14 is a diagram showing the third slot of the fixing member arranged to correspond to the second slot of the gap maintaining insulating part.
Figure 15 is a diagram showing the cross-sectional shape of a penetrating insulating part and a gap maintaining insulating part according to another embodiment of the present invention.
Figure 16 is a diagram showing the cross-sectional shape of a penetrating insulating part and a gap maintaining insulating part according to another embodiment of the present invention.

Since the present invention can be modified in various ways and can have various embodiments, specific embodiments will be illustrated in the drawings and described in detail in the description of the invention. However, this is not intended to limit the present invention to specific embodiments, and should be understood to include all transformations, equivalents, and substitutes included in the spirit and technical scope of the present invention. In describing the present invention, the same identification numbers are used for the same components even if they are shown in different embodiments.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. When describing with reference to the drawings, identical or corresponding components will be assigned the same reference numerals and redundant description thereof will be omitted. .

In the following embodiments, terms such as first and second are used not in a limiting sense but for the purpose of distinguishing one component from another component.

In the following examples, singular terms include plural terms unless the context clearly dictates otherwise.

In the following embodiments, terms such as include or have mean that the features or components described in the specification exist, and do not exclude in advance the possibility of adding one or more other features or components.

In the drawings, the sizes of components may be exaggerated or reduced for convenience of explanation. For example, the size and thickness of each component shown in the drawings are arbitrarily shown for convenience of explanation, and the present invention is not necessarily limited to what is shown.

In the following embodiments, the For example, the X-axis, Y-axis, and Z-axis may be orthogonal to each other, but may also refer to different directions that are not orthogonal to each other.

In cases where an embodiment can be implemented differently, a specific process sequence may be performed differently from the described sequence. For example, two processes described in succession may be performed substantially at the same time, or may be performed in an order opposite to that in which they are described.

The terms used in this application are only used to describe specific embodiments and are not intended to limit the invention. In this application, terms such as “comprise” or “have” are intended to designate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but are not intended to indicate the presence of one or more other features. It should be understood that this does not exclude in advance the possibility of the existence or addition of elements, numbers, steps, operations, components, parts, or combinations thereof.

In the following embodiments, when membranes, regions, components, etc. are connected, not only are the membranes, regions, and components directly connected, but also other membranes, regions, and components are interposed between the membranes, regions, and components. This includes cases where it is indirectly connected. For example, in this specification, when membranes, regions, components, etc. are said to be electrically connected, not only are the membranes, regions, components, etc. directly electrically connected, but also other membranes, regions, components, etc. are interposed between them. This also includes cases of indirect electrical connection.

Hereinafter, a leak prevention structure according to an embodiment of the present invention will be described with reference to FIGS. 1 to 16.

Figure 1 is a perspective view showing a boat device 1 according to an embodiment of the present invention. Figure 2 is an enlarged view of part I of Figure 1. FIG. 3 is a cross-sectional view taken along line II-II' of FIG. 2, showing the positional relationship between the through-insulating part 20 and the gap-maintaining insulating part 30 according to an embodiment of the present invention.

The boat device 1 may serve to insert and support a substrate into a chamber for a deposition process when manufacturing solar cells or semiconductors. The boat device 1 may include an electrode plate 10, a penetrating insulating part 20, a gap maintaining insulating part 30, a sealing member 40, and a fixing member 50.

The electrode plates 10 are arranged to be spaced apart from each other and may serve to load a plurality of substrates W therebetween. The boat device 1 may include a plurality of electrode plates 10 . One electrode plate 10a and the adjacent electrode plate 10b may have different polarities. For example, the polarity of one electrode plate 10a may be positive (+), and the polarity of the electrode plate 10b adjacent thereto may be negative (-). That is, the electrode plate 10a of the same polarity may be disposed with the electrode plate 10b of a different polarity interposed therebetween.

Referring to FIG. 1 , the penetrating insulating portion 20 forms the framework of the boat device 1 and may serve to fix and support the plurality of electrode plates 10 . The penetrating insulating portion 20 may extend in a direction perpendicular to the plurality of electrode plates 10 as the longitudinal direction (X-axis). The penetrating insulation portion 20 may include a non-conductive material. Accordingly, electricity transmission between the plurality of electrode plates 10 can be blocked. In one embodiment, the material of the penetrating insulation portion 20 may include a ceramic material.

Referring to FIGS. 2 and 3 , the penetrating insulating portion 20 may penetrate a plurality of electrode plates 10 and a gap maintaining insulating portion 30 to be described later. Specifically, among the plurality of electrode plates 10, the electrode plate 10a and the gap maintaining insulating part 30 having the same polarity may be alternately fastened to the through insulating part 20. Accordingly, the plurality of electrode plates 10 can be aligned.

The penetrating insulation portion 20 may include a fastening member 22 . Referring to FIG. 3 , the fastening members 22 may be disposed at both ends of the penetrating insulating portion 20 . The fastening member 22 may be fastened to the sealing member 40 and the fixing member 50, which will be described later.

As shown in FIG. 3, the fastening member 22 may include a first fastening member 22a and a second fastening member 22b. The first fastening member 22a may be disposed at the extreme end of the penetrating insulating portion 20. The second fastening member 22b may be a portion that protrudes outward from the outermost electrode plate among the plurality of electrode plates 10. The first fastening member 22a may be fastened to the sealing member 40, which will be described later. The second fastening member 22b may be fastened to the fixing member 50.

Referring to FIG. 3, the cross section of the first fastening member 22a may be smaller than the cross section of the second fastening member 22b. The cross section of the second fastening member 22b may be the same as the cross section of the portion of the penetrating insulating part 20 that penetrates the electrode plate 10 and the gap maintaining insulating part 30.

The cross-sectional shape of the penetrating insulating part 20 will be described when explaining the cross-sectional shape of the gap-maintaining insulating part 30, which will be described later.

The gap maintenance insulator 30 may be disposed between two adjacent electrode plates 10a that have the same polarity among the plurality of electrode plates 10 . Accordingly, it can serve to maintain the gap between two adjacent electrode plates 10. The gap maintenance insulating portion 30 may have a ring-shaped cross section extending in the longitudinal direction (X-axis). Accordingly, the penetrating insulating part 20 can penetrate the gap maintaining insulating part 30.

The length (X-axis direction) of the gap-maintaining insulating part 30 may be shorter than the length of the through-insulating part 20. That is, referring to FIG. 3 , the penetrating insulating part 20 may penetrate a plurality of gap maintaining insulating parts 30 .

The gap maintenance insulating part 30 may include a non-conductive material. Accordingly, electricity transmission between the plurality of electrode plates 10 can be blocked. In one embodiment, the material of the gap maintaining insulating portion 30 may include a ceramic material.

The gap maintaining insulating part 30 may be in close contact with the electrode plate 10 without separation. In other words, both end surfaces of the gap maintaining insulating part 30 and the two adjacent electrode plates 10a can be completely contacted without separation. The gap maintenance insulating part 30 has no hole or gap connecting the inside through which the through insulating part 20 penetrates and the outside outside the outer peripheral surface 32. In other words, the gap-maintaining insulating part 30 does not include a hole penetrating between the outer peripheral surface 32 and the inner peripheral surface 31 of the gap-maintaining insulating part. Accordingly, it is possible to prevent process gas from flowing into the gap maintaining insulating part 30 during processing in the chamber and depositing the inner peripheral surface 31 or the through insulating part 20 of the gap maintaining insulating part.

The sealing member 40 may be fastened to both ends of the penetrating insulating portion 20. The sealing member 40 may serve to prevent or minimize the infiltration of process gas through the gap G during the process by blocking the entrance of the gap G, which will be described later. That is, the sealing member 40 can block the gap G from the outside.

Referring to FIG. 3, the sealing member 40 may be fastened to the first fastening member 22a. In one embodiment, the sealing member 40 may be in the form of a cap that is closed on one side and includes a hole corresponding to the first fastening member 22a on the other side, as shown in FIG. 3. .

The sealing member 40 may be fastened to the first fastening member 22a, or the fastening with the first fastening member 22a may be released.

During the process, the process gas can be prevented from penetrating into the gap G by fastening the sealing member 40 to the first fastening member 22a. Accordingly, it is possible to prevent deposition of the penetrating insulation portion 20 and the inner peripheral surface 31 of the gap-maintaining insulation portion due to penetration of the process gas. On the other hand, when wet cleaning the boat device 1, the sealing member 40 is unfastened from the first fastening member 22a, so that the residual solution inside the boat device 1 is easily discharged through the gap G. It can be.

The method of fastening the sealing member 40 and the first fastening member 22a is not particularly limited. In one embodiment, the sealing member 40 and the first fastening member 22a may be fastened through screw coupling. In addition, the sealing member 40 and the first fastening member 22a can be fastened using various known fastening methods to block the gap G from the outside.

The fixing member 50 is fastened to both ends of the penetrating insulating part 20 and serves to fix and support the electrode plate 10 by bringing the plurality of electrode plates 10 and the plurality of gap maintaining insulating parts 30 into close contact. You can. The fixing member 50 may be disposed between the outermost electrode plate and the sealing member 40 among the plurality of electrode plates 10 .

Referring to FIG. 3, the fixing member 50 may be fastened to the second fastening member 22b. The diameter of the inner peripheral surface of the fixing member 50 may correspond to the diameter of the cross section of the second fastening member 22b. As described above, the cross section of the second fastening member 22b may be the same as the cross section of the portion of the penetrating insulating portion 20 that penetrates the electrode plate 10 and the gap maintaining insulating portion 30. For this reason, a through hole g may be provided between the fixing member 50 and the second fastening member 22b, as shown in FIG. 3 . The through hole (g) may be a space connected to a gap (G) between the through insulating part 20 and the gap maintaining insulating part 30, which will be described later. After wet cleaning of the boat device 1, the residual solution may move along the gap G and exit through the through hole g and be discharged to the outside of the boat device 1.

The method of fastening the fixing member 50 and the second fastening member 22b is not particularly limited. In one embodiment, the fixing member 50 and the second fastening member 22b may be fastened through screw coupling. In addition, the fixing member 50 and the second fastening member 22b may be fastened using various known fastening methods.

There may be a gap between at least a portion of the outer peripheral surface 21 of the through-insulating part and the inner peripheral surface 31 of the gap-maintaining insulating part. Accordingly, at least one gap G may be disposed between the gap maintaining insulating part 30 and the penetrating insulating part 20. The gap (G) refers to a gap created by separating a portion of the outer peripheral surface (21) of the penetrating insulation portion and the inner peripheral surface (31) of the gap-maintaining insulation portion. The gap G may serve as a passage through which residual solution is discharged after wet cleaning of the boat device 1. Accordingly, not only can the residual solution be discharged quickly after wet cleaning, but the drying time of the boat device 1 can be shortened, thereby reducing the downtime period of the process due to wet cleaning. As the process downtime period is reduced, more substrates can be input into the process during the same period of time. Therefore, the effect of improving solar cell or semiconductor production efficiency can be obtained.

Referring to FIG. 3, the length (X-axis direction) of the gap G may be shorter than the length of the through-insulating portion 20. Specifically, the gap G may not be formed in a portion corresponding to the fastening member 22 disposed at both ends of the penetrating insulating portion 20. Meanwhile, the length of the gap G may be longer than the length of the gap maintaining insulating part 30. That is, the gap G may be continuously formed corresponding to the plurality of gap maintaining insulating parts 30 .

Hereinafter, various embodiments of the gap G will be described, focusing on the shapes of the penetrating insulating part and the gap maintaining insulating part.

FIG. 4 is a portion cut along line III-III' of FIG. 2 and is a diagram showing the cross-sectional shape of the through insulation portion 20A and the gap maintaining insulation portion 30 according to an embodiment of the present invention. Figure 5 is a diagram showing the cross-sectional shape of the through insulating part 20B and the gap maintaining insulating part 30 according to another embodiment of the present invention.

In one embodiment, the penetrating insulating portion 20A may include a first side 21a, a second side 21b, a third side 21c, and a fourth side 21d. More specifically, the outer peripheral surface 21 of the penetrating insulating part may include a first surface 21a, a second surface 21b, a third surface 21c, and a fourth surface 21d. Among them, there may be a gap between the first surface 21a and the inner peripheral surface 31 of the gap-maintaining insulating part. There may be a gap between the second surface 21b and the inner peripheral surface 31 of the gap-maintaining insulating part. On the other hand, the third surface 21c and the fourth surface 21d may be in contact with the inner peripheral surface 31 of the gap maintaining insulating part.

Specific examples of this are shown in Figures 4 and 5. That is, the through-insulating portion 20A and the gap-maintaining insulating portion 30 may extend in the longitudinal direction (X-axis) while maintaining the cross-sectional shape as shown in FIGS. 4 and 5.

Referring to FIG. 4, the gap-maintaining insulating portion 30 has an inner peripheral surface 31 made of a circle with a predetermined diameter r1 and an outer peripheral surface 32 made of a circle with a diameter r2 larger than the diameter r1 of the inner peripheral surface. ) may include. The diameter (r1) of the inner peripheral surface and the diameter (r2) of the outer peripheral surface of the gap-maintaining insulating part may be determined according to the weight of the electrode plate 10 and the density and hardness of the gap-maintaining insulating part 30.

The first surface 21a and the second surface 21b may be parallel to the Y-axis and perpendicular to the Z-axis. Accordingly, a gap G may be formed between the first surface 21a and the inner peripheral surface 31 of the gap-maintaining insulating part and between the second surface 21b and the inner peripheral surface 31 of the gap-maintaining insulating part.

Meanwhile, the third surface 21c and the fourth surface 21d may be curved surfaces formed by extending an arc having the same diameter as the inner peripheral surface 31 of the gap-maintaining insulating part. That is, the third surface 21c and the fourth surface 21d may contact the inner peripheral surface 31 of the gap-maintaining insulating part. Accordingly, the penetrating insulating part 20A can support the gap maintaining insulating part 30.

In one embodiment, the height (h) of the gap may be about 10% to 50% of the diameter (r1) of the inner peripheral surface of the gap maintaining insulating part 30. As shown in FIG. 4, the height h of the gap is determined by measuring the outer peripheral surface 21 of the through-insulating part and the inner peripheral surface 31 of the gap-maintaining insulating part in a direction perpendicular to the outer peripheral surface 21 of the through-insulating part within one gap G. It refers to the largest value among the intervals. If the height (h) of the gap is less than 10% of the diameter (r1) of the inner peripheral surface of the gap maintaining insulating part 30, it may not be easy to discharge the remaining solution through the gap (G). On the other hand, when the height (h) of the gap exceeds 50% of the diameter (r1) of the inner peripheral surface of the gap-maintaining insulating part 30, the portion where the through-insulating part 20 and the gap-maintaining insulating part 30 contact each other As the thickness decreases, the reliability of the through-insulating part 20 and the gap-maintaining insulating part 30 may deteriorate. Accordingly, the height (h) of the gap may be about 10% to 50% of the diameter (r1) of the inner peripheral surface of the gap maintaining insulating part 30. Accordingly, the residual solution after wet cleaning can be effectively discharged while maintaining the reliability of the through-insulating portion 20 and the gap-maintaining insulating portion 30.

In another embodiment, referring to FIG. 5 , the first surface 21e and the second surface 21f of the through-insulating portion 20B may be surfaces perpendicular to the Y-axis and parallel to the Z-axis. Accordingly, a gap G may be generated between the first surface 21e and the inner peripheral surface 31 of the gap-maintaining insulating part and between the second surface 21f and the inner peripheral surface 31 of the gap-maintaining insulating part.

That is, the through-insulating portion 20B in FIG. 5 has the same shape as the through-insulating portion 20A in FIG. 4 rotated by 90°. In addition, any shape in which the penetrating insulating portion 20A in FIG. 4 is rotated at a certain angle may be included in an embodiment of the present invention. This also applies to other embodiments of the through-insulating portions 20C, 20D, 20E, 20F, 20G, 60, 60A, and 60B and the gap-maintaining insulating portion 70 described below.

Figure 6 is a diagram showing a through insulation portion 20C according to another embodiment of the present invention. FIG. 7 is a cross-sectional view taken along line IV-IV' of FIG. 6 and passing through the center C of the through-insulating portion 20C.

In another embodiment, the width (w) of the cross-section of the through-insulating portion (20C) varies from the center (M) in the longitudinal direction of the through-insulating portion (20C) to both ends of the longitudinal direction (X-axis) of the through-insulating portion (20C). It may become narrower as you go further. Here, referring to FIG. 7 , the cross-sectional width (w) of the through-insulating portion 20C means the width of the cross-section of the through-insulating portion 20C in the Z-axis direction.

In a specific embodiment, as shown in FIG. 6, the first surface 21g forming the gap G may be inclined toward the end of the longitudinal direction (X-axis) of the through-insulating portion 20C. When the axis passing through the center of a circle, which is a cross-section at the center (M) of the longitudinal direction of the through-insulating portion (20C), is referred to as the center (C) of the through-insulating portion (20C), the Y-axis passes through the center (C) of the through-insulating portion (20C). The cross section perpendicular to may be in the shape of a diamond, as shown in FIG. 7.

Accordingly, with the help of gravity, the effect of discharging the residual solution to the outside through the gap G after wet cleaning of the boat device 1 can be improved.

FIG. 8 is a diagram showing the cross-sectional shape of a through-insulating portion 20D according to another embodiment of the present invention.

In another embodiment, the through-insulating portion 20D may include at least one first slot 23. The first slot 23 may be extended in the longitudinal direction (X-axis) of the through-insulating portion 20D. The first slot 23 may serve as a passage through which residual solution is discharged after wet cleaning of the boat device 1. Referring to FIG. 8, there are four first slots 23a, 23b, 23c, and 23d and may be arranged in the Y-axis direction, Z-axis direction, direction opposite to the Y-axis, and direction opposite to the Z-axis, respectively. However, Figure 8 is only one of the specific embodiments, and the number of first slots 23 and the arrangement direction of the first slots 23 are not particularly limited.

Accordingly, the discharging effect of the remaining solution can be further improved by dispersing the spaced portions between the outer peripheral surface 21 of the through-insulating part and the inner peripheral surface 31 of the gap-maintaining insulating part. In addition, the support effect of the through-insulating portion 20D can be improved by dispersing the portion where the through-insulating portion 20D is in contact with the gap-maintaining insulating portion 30.

Figure 9 is a diagram showing a through-insulating portion 20E according to another embodiment of the present invention. FIG. 10 is a cross-sectional view taken along line V-V' of FIG. 9 and passing through the center of the through-insulating portion 20E.

In another embodiment, in the through insulating portion 20E, the depth d of the first slot 23 is determined from the longitudinal center M of the through insulating portion 20E in the longitudinal direction of the through insulating portion 20E. It can become deeper towards both ends of the (X axis).

In a specific embodiment, as shown in FIG. 9, the depth d of the first slot 23 may be 0 at the longitudinal center M of the through-insulating portion 20E. That is, the cross section at the center M in the longitudinal direction of the penetrating insulating portion 20E may be circular. Additionally, the bottom portion of the first slot 23 may be inclined toward the end of the longitudinal direction (X-axis) of the through-insulating portion 20E. When the axis passing through the center of a circle, which is a cross-section at the center (M) of the longitudinal direction of the through-insulating portion (20E), is referred to as the center (E) of the through-insulating portion (20E), the Y-axis passes through the center (E) of the through-insulating portion (20E). The cross section perpendicular to may be in the shape of a diamond, as shown in FIG. 10.

Accordingly, by dispersing the spaced portions between the outer peripheral surface 21 of the penetrating insulating part and the inner peripheral surface 31 of the gap-maintaining insulating part and at the same time with the help of gravity, the residual solution after wet cleaning of the boat device 1 is removed from the gap ( G), the effect of discharge to the outside can be improved. In addition, the support effect of the through-insulating portion 20E can be improved by dispersing the portions of the through-insulating portion 20E in contact with the gap-maintaining insulating portion 30.

Figure 11 is a diagram showing a through insulation portion 20F according to another embodiment of the present invention. Figure 12 is a diagram showing a through insulation portion 20G according to another embodiment of the present invention.

In another embodiment, the through-insulating portion 20 may be twisted along the longitudinal direction (X-axis) of the through-insulating portion. In other words, the through-insulating portion 20 may be twisted like a twist along the longitudinal direction (X-axis) of the through-insulating portion. A plurality of specific embodiments of this are shown in FIGS. 11 and 12.

First, referring to FIG. 11 , the cross-sectional shape of one end of the through-insulating portion 20F in the longitudinal direction (X-axis) is the same as the cross-sectional shape of the through-insulating portion 20A of FIG. 4 . In the case of FIG. 4, the shape of the cross section extends in the X-axis direction as is to form a through-insulating portion 20A. On the other hand, in the case of FIG. 11, when the cross-sectional shape at each point is viewed along the X-axis direction from one end of the through-insulating portion 20F, the cross-sectional shape may appear as if it is rotating.

Referring to FIG. 11 , the through-insulating portion 20F may include a first surface 21h, a second surface 21i, a third surface 21j, and a fourth surface 21k. The first surface 21h and the second surface 21i may each form a gap G together with the inner peripheral surface 31 of the gap maintaining insulating part. On the other hand, the third surface 21j and the fourth surface 21k may be in contact with the inner peripheral surface 31 of the gap maintaining insulating part.

Referring to FIG. 12 , the cross-sectional shape of one end of the through-insulating portion 20G in the longitudinal direction (X-axis) is the same as the cross-sectional shape of the through-insulating portion 20D of FIG. 8 . In the case of FIG. 8, the shape of the cross section extends in the X-axis direction as is to form a through-insulating portion 20D. On the other hand, in the case of FIG. 12, when the cross-sectional shape at each point is viewed along the X-axis direction from one end of the through-insulating portion 20G, the cross-sectional shape may appear to be rotating.

The number of times the cross-sectional shape of the through-insulating portions 20F and 20G rotates may be determined depending on the material and strength of the through-insulating portions, the viscosity of the residual solution, the length of the through-insulating portions, etc. In one embodiment, as shown in FIG. 11, the number of times the cross-sectional shape of the through insulating portion 20F rotates is equal to the center M in the longitudinal direction of the through insulating portion 20F at one end of the through insulating portion 20F. It can be up to 0.5 times. In another embodiment, as shown in FIG. 12, the number of times the cross-sectional shape of the through insulating portion 20G rotates is equal to the center M in the longitudinal direction of the through insulating portion 20G at one end of the through insulating portion 20G. It can be up to 1 time.

As the through-insulating portion is twisted along the longitudinal direction, one side of the through-insulating portion 20F, 20G forming the gap G is bent, so that the residual solution after wet cleaning of the boat device 1 is on one side. Accordingly, it can be discharged more easily. Here, one side of the through insulation forming the gap G is specifically, the first side 21h and the second side 21i in FIG. 11 and the first slots 23a, 23b, 23c, and 23d in FIG. 12. refers to the bottom surface (f) of

Figure 13 is a diagram showing the cross-sectional shape of the gap maintenance insulating part 70 according to another embodiment of the present invention.

The boat device 1A may include an electrode plate 10, a penetrating insulating part 60, a gap maintaining insulating part 70, a sealing member 40, and a fixing member 80. Since the electrode plate 10 and the sealing member 40 are the same as those of the boat device 1, their description is omitted. Since the through-insulating portion 60, the gap-maintaining insulating portion 70, and the fixing member 80 are similar to the through-insulating portion 20, the gap-maintaining insulating portion 30, and the fixing member 50 of the boat device 1, Below, the explanation will focus on the differences.

Referring to FIG. 13 , the penetrating insulating portion 60 may be in the form of a circular bar with a circular cross-section and extending along the longitudinal direction (X-axis).

The gap maintaining insulating part 70 may include at least one second slot 72. Referring to FIG. 13 , the second slot 72 may be disposed on the inner peripheral surface 71 of the gap maintaining insulating part 70. The second slot 72 may form a gap G together with the outer peripheral surface 61 of the penetrating insulating part. The second slot 72 may serve as a passage through which residual solution is discharged after wet cleaning of the boat device 1. Referring to FIG. 13, there are four second slots 72 and may be arranged in the Y-axis direction, Z-axis direction, direction opposite to the Y-axis, and direction opposite to the Z-axis, respectively. However, Figure 13 is only one of the specific embodiments, and the number of second slots 72 and the arrangement direction of the second slots 72 are not particularly limited.

Accordingly, the discharging effect of the remaining solution can be further improved by dispersing the spaced portions between the outer peripheral surface 61 of the through-insulating part and the inner peripheral surface 71 of the gap-maintaining insulating part. Additionally, since the through-insulating portion 60 has a circular cross-section without additional processing, the durability of the through-insulating portion 60 can be improved and it can stably support other components.

FIG. 14 is a diagram showing the third slot 81 of the fixing member 80 disposed to correspond to the second slot 72 of the gap maintaining insulating part 70.

The fixing member 80 is fastened to the through-insulating portion 60 and may be disposed between the outermost electrode plate and the sealing member among the plurality of electrode plates. The fixing member 80 may include at least one third slot 81. The third slot 81 may be disposed on the inner peripheral surface of the fixing member 80.

The third slot 81 may be placed in a position corresponding to the second slot 72. Specifically, referring to FIGS. 13 and 14, it is as follows. The through-insulating part 60 and the gap-maintaining insulating part 70 shown in FIG. 14 are the same as the through-insulating part 60 and the gap-maintaining insulating part 70 shown in FIG. 13 . The second slots 72 are arranged in the Y-axis direction, the Z-axis direction, the direction opposite to the Y-axis, and the direction opposite to the Z-axis. The third slot 81 may be disposed in a position corresponding to the second slot 72, that is, in the Y-axis direction, Z-axis direction, direction opposite to the Y-axis, and direction opposite to the Z-axis.

Accordingly, the remaining solution moving through the second slot 72 can be smoothly discharged out of the boat device 1A through the third slot 81.

The third slot 81 may be blocked by the sealing member 40 when the aforementioned sealing member 40 is fastened to the penetrating insulating portion 60. Conversely, when the sealing member 40 is removed from the through-insulating portion 60, the third slot 81 is connected to the outside and the remaining solution can be discharged to the outside.

Figure 15 is a diagram showing the cross-sectional shape of the through insulating part 60A and the gap maintaining insulating part 70 according to another embodiment of the present invention. FIG. 16 is a diagram showing the cross-sectional shape of the through-insulating portion 60B and the gap-maintaining insulating portion 70 according to another embodiment of the present invention.

In the boat device 1A, the through insulation portion 60 may include at least one first slot 62. That is, the penetrating insulating part 60 may include a first slot 62, and the gap maintaining insulating part 70 may include a second slot 72. Since the first slot 62 in the boat device 1A is the same as the first slot 23 in the boat device 1, detailed description will be omitted.

When the first slot 62 and the second slot 72 exist at the same time, there is no second slot 72 and only the first slot 62, or there is no first slot 62 and the second slot The depth of the first slot 62 and the second slot 72 can be designed to be smaller than when only (72) exists, thereby improving the durability of the penetrating insulating part 60 and the gap maintaining insulating part 70. there is.

At this time, the depth of the first slot 62 and the second slot 72 may be determined depending on the material and strength of the penetrating insulating part 60 and the gap maintaining insulating part 70, the viscosity of the remaining solution, etc.

The first slot 62A may be arranged to correspond to the second slot 72. In other words, as shown in FIG. 15, the first slot 62A and the second slot 72 may form one gap G. Accordingly, the circumference of the cross-section of the gap (G) is reduced compared to the cross-sectional area of the gap (G), and the influence of friction, etc. on the movement of the residual solution is reduced, so that the residual solution can be discharged more smoothly. In addition, by increasing the cross-sectional area of the gap G, ventilation is smooth when the sealing member 40 is removed, thereby shortening the drying time of the boat device 1A.

In another embodiment, the first slot 62B may be arranged to be staggered with the second slot 72. In other words, as shown in FIG. 16, the second slot 72 may be arranged between a plurality of first slots 62B, or the first slot 62B may be arranged between a plurality of second slots 72. there is. In this case, the first slot 62B and the second slot 72 may separately form a gap G. Accordingly, the number of gaps G increases, thereby reducing the time for the residual solution scattered in all directions to reach the gap, thereby shortening the total discharge time of the residual solution. In addition, the drying time of the boat device 1A can be shortened by expanding the area exposed to the outside when the sealing member 40 is removed.

Although the present invention has been described with reference to the embodiments shown in the drawings, these are merely examples. Those skilled in the art can fully understand that various modifications and equivalent other embodiments are possible from the embodiments. Therefore, the true technical protection scope of the present invention should be determined based on the attached claims.

The specific technical content described in the embodiment is an example and does not limit the technical scope of the embodiment. In order to describe the invention concisely and clearly, descriptions of conventional general techniques and configurations may be omitted. In addition, the connection of lines or the absence of connections between components shown in the drawings exemplify functional connections and/or physical or circuit connections, and in actual devices, various functional connections or physical connections may be replaced or added. It can be expressed as connections, or circuit connections. Additionally, if there is no specific mention such as “essential,” “important,” etc., it may not be a necessary component for the application of the present invention.

“The” or similar designators used in the description and claims may refer to both the singular and the plural, unless otherwise specified. In addition, when a range is described in an example, the invention includes the application of individual values within the range (unless there is a statement to the contrary), and each individual value constituting the range is described in the description of the invention. same. Additionally, unless the order of the steps constituting the method according to the embodiment is clearly stated or there is no description to the contrary, the steps may be performed in an appropriate order. The embodiments are not necessarily limited by the order of description of the steps above. The use of any examples or illustrative terms (e.g., etc.) in the embodiments is merely to describe the embodiments in detail, and unless limited by the claims, the examples or illustrative terms do not limit the scope of the embodiments. That is not the case. Additionally, those skilled in the art will appreciate that various modifications, combinations and changes may be made according to design conditions and factors within the scope of the appended claims or their equivalents.

1(1A): Boat device
10: electrode plate 20: penetrating insulating portion
23: first slot 30: gap maintaining insulation portion
40: sealing member 50: fixing member
60: penetrating insulating portion 62: first slot
70: gap maintenance insulating part 72: second slot
80: fixing member 81: third slot

Claims (10)

a plurality of electrode plates arranged to be spaced apart from each other and having a plurality of substrates loaded therebetween;
a gap-maintaining insulating portion disposed between two adjacent electrode plates of the plurality of electrode plates having the same polarity and in close contact with the electrode plates without separation;
a penetrating insulating part penetrating the plurality of electrode plates and the gap maintaining insulating part; and
It includes a sealing member fastened to both ends of the through-insulating portion,
There is a gap between at least a portion of the outer peripheral surface of the through-insulating portion and the inner peripheral surface of the gap-maintaining insulating portion,
A boat device, wherein the width of the cross-section of the through-insulating portion becomes narrower from the center of the through-insulating portion in the longitudinal direction to both ends of the through-insulating portion in the longitudinal direction. According to claim 1,
The boat device wherein the gap maintaining insulating portion does not include a hole penetrating between the outer peripheral surface and the inner peripheral surface of the gap maintaining insulating portion. delete delete a plurality of electrode plates arranged to be spaced apart from each other and having a plurality of substrates loaded therebetween;
a gap-maintaining insulating portion disposed between two adjacent electrode plates of the plurality of electrode plates having the same polarity and in close contact with the electrode plates without separation;
a penetrating insulating part penetrating the plurality of electrode plates and the gap maintaining insulating part; and
It includes a sealing member fastened to both ends of the through-insulating portion,
There is a gap between at least a portion of the outer peripheral surface of the through-insulating portion and the inner peripheral surface of the gap-maintaining insulating portion,
The through insulation portion includes at least one first slot,
The depth of the first slot increases from the longitudinal center of the penetrating insulating part to both ends of the penetrating insulating part in the longitudinal direction, a boat device. delete a plurality of electrode plates arranged to be spaced apart from each other and having a plurality of substrates loaded therebetween;
a gap-maintaining insulating portion disposed between two adjacent electrode plates of the plurality of electrode plates having the same polarity and in close contact with the electrode plates without separation;
a penetrating insulating part penetrating the plurality of electrode plates and the gap maintaining insulating part; and
It includes a sealing member fastened to both ends of the through-insulating portion,
There is a gap between at least a portion of the outer peripheral surface of the through-insulating portion and the inner peripheral surface of the gap-maintaining insulating portion,
A boat device, wherein the through-insulating portion is twisted along the longitudinal direction of the through-insulating portion. a plurality of electrode plates arranged to be spaced apart from each other and having a plurality of substrates loaded therebetween;
a gap-maintaining insulating portion disposed between two adjacent electrode plates of the plurality of electrode plates having the same polarity and in close contact with the electrode plates without separation;
a penetrating insulating part penetrating the plurality of electrode plates and the gap maintaining insulating part; and
It includes a sealing member fastened to both ends of the through-insulating portion,
There is a gap between at least a portion of the outer peripheral surface of the through-insulating portion and the inner peripheral surface of the gap-maintaining insulating portion,
The through insulation portion includes at least one first slot,
Boat device, wherein the gap maintaining insulator includes at least one second slot disposed on an inner peripheral surface. According to clause 8,
A fixing member is fastened to the through-insulating portion and disposed between the outermost electrode plate among the plurality of electrode plates and the sealing member,
The fixing member includes at least one third slot disposed on the inner peripheral surface,
The third slot is disposed in a position corresponding to the second slot. a plurality of electrode plates arranged to be spaced apart from each other and having a plurality of substrates loaded therebetween;
a gap-maintaining insulating portion disposed between two adjacent electrode plates of the plurality of electrode plates having the same polarity and in close contact with the electrode plates without separation;
a penetrating insulating part penetrating the plurality of electrode plates and the gap maintaining insulating part;
at least one gap disposed between the gap maintaining insulating part and the through insulating part; and
It includes a sealing member that is fastened to both ends of the through-insulating portion and blocks the gap from the outside,
A boat device, wherein the width of the cross-section of the through-insulating portion becomes narrower from the center of the through-insulating portion in the longitudinal direction to both ends of the through-insulating portion in the longitudinal direction.

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