KR102632273B1 - Cooling system to prevent scattering of foreign substances - Google Patents

Abstract

It is characterized by comprising a coolant tank capable of storing coolant and a cooling module disposed on an upper part of the coolant tank.

Description

Cooling system to prevent scattering of foreign substances}

The present invention relates to a block-type cooling system, and more specifically, to a block-type cooling system that cools high-temperature coolant used in equipment with low-temperature coolant.

In general, coolant is used in cabinet modules to cool the heat generated during the operation of semiconductor production equipment, but the used coolant is at a high temperature and can no longer serve as a coolant.

In this way, a cooling module is installed to re-cool the used high-temperature coolant and re-introduce it to the equipment. This cooling module can improve cooling efficiency by installing cooling fins inside it to improve cooling efficiency.

Accordingly, these cooling fins are generally formed in a fin-shaped multiple stacked structure and installed in the cooling module.

Typically, in the case of such a cooling module, heat exchange is performed by circulating coolant through pipes in which cooling fins are arranged, thereby cooling high-temperature coolant with low-temperature coolant. This heat exchange process is performed through multiple circulations. At this time, because the high-temperature coolant must be circulated, the circulation module must be continuously operated, which not only imposes economic costs, but also causes the air around the cooling fins to increase due to continuous heat exchange. It is formed at a high temperature, so heat convection gradually decreases, which not only reduces the heat exchange efficiency by heat conduction, but also causes other foreign substances, such as harmful fine substances, to scatter during the circulation and cooling process, which has a harmful effect on the environment and the body. there is.

The present invention is intended to solve the problems described above, and is a block-type device that cools the heated high-temperature coolant used in semiconductor production equipment with low-temperature coolant and prevents foreign substances from scattering to the outside through the blowing unit. The purpose is to provide a cooling system.

A block-type cooling system according to an embodiment of the present invention may include a coolant tank capable of storing coolant and a cooling module disposed on an upper part of the coolant tank.

A block-type cooling system according to another embodiment of the present invention includes a first cooling unit disposed on an upper portion of the coolant tank, and a second cooling unit manufactured in the same manner as the first cooling unit and disposed on an upper portion of the first cooling unit. It includes a cooling unit, a third cooling unit manufactured in the same way as the first cooling unit and the second cooling unit and disposed on an upper surface of the second cooling unit, and a blowing unit disposed on an upper surface of the third cooling unit. , the first cooling unit includes a first housing forming a space therein, and a first heat exchange unit disposed on both sides of the space inside the first housing, and the second cooling unit has a space therein. It includes a second housing and a second heat exchange unit disposed on both sides of the space inside the second housing, and the third cooling unit is a shooting type that forms a space therein and the blowing unit can be coupled to the upper surface. It includes a third housing in which a blowing unit coupler is formed, and a third heat exchange unit disposed on both sides of the space inside the third housing, wherein the blowing unit includes a casing coupled to the blower unit coupler, It includes a fan disposed inside the casing, and a driving source that provides a rotational driving force to the fan to form a downward airflow in the space inside the first to third housings, and the third heat exchange unit moves downward from above. It includes an inlet passage formed to allow coolant to be introduced, and a cooling fin disposed on an outer surface of the inlet passage, wherein the second heat exchange unit includes an intermediate passage connected to the inflow passage, and an intermediate passage disposed on an outer surface of the intermediate passage. The first heat exchange unit may include a discharge passage connected to the inflow passage and capable of discharging the coolant into the coolant tank, and the cooling fin disposed on an outer surface of the discharge passage. there is.

A block-type cooling system according to another embodiment of the present invention includes a damping unit disposed between the four inner surfaces of the blowing unit coupler and the four outer surfaces of the casing, and the damping unit is disposed on the outside of the casing. A first guide portion including a first rail disposed on the side and a first block installed to be slidably transferred on the first rail, and a second guide portion disposed at right angles to the first rail on the inner surface of the blowing unit coupler. A fastening device arranged to connect a second guide portion including a rail and a second block installed to be slidably transported on the second rail, the first block and the second block, and a plurality of locking members formed at the edges. an elastic member whose end is coupled to the fastening member and whose other end is coupled to one of the inner surface of the blowing unit coupler and the outer surface of the casing so as to be inclined with the first rail and the second rail; A friction member is disposed between the first guide portion and the second guide portion and is disposed to rub against an inner surface of the blowing unit coupler or an outer surface of the casing, and the friction member is formed in a spherical shape to form a friction member for the blowing unit. It may be rotatably provided on a support plate installed on either the inner surface of the coupler or the outer surface of the casing.

*In the block-type cooling system according to one aspect of the present invention, when high-temperature cold water used in equipment, etc. is input, it is cooled to low-temperature coolant through a cooling module, stored in the coolant tank, and then fed back into the equipment using a pump, etc. This has the effect of allowing the coolant to be reused.

In addition, the block-type cooling system according to another aspect of the present invention generates a downward airflow by placing a blowing unit on the upper surface of the third cooling unit disposed at the top of the cooling module composed of three layers, which can occur during the cooling process. Not only can it prevent harmful substances and other foreign substances from scattering to the outside, but it can also improve the durability and stability of the block-type cooling system by attenuating the vibration generated by the operation of the blowing unit by placing an additional damping unit. There is an effect.

1 and 2 are schematic perspective views to explain a block-type cooling system.
Figure 3 is a schematic perspective view to explain the cooling fins.
4 to 6 are schematic perspective views for explaining an attenuation unit.
7 to 9 are schematic perspective views for explaining the extension unit.

Hereinafter, various embodiments will be described in more detail with reference to the attached drawings. The embodiments described herein may be modified in various ways. Specific embodiments may be depicted in the drawings and described in detail in the detailed description. However, the specific embodiments disclosed in the attached drawings are only intended to facilitate understanding of the various embodiments. Therefore, the technical idea is not limited to the specific embodiments disclosed in the attached drawings, and it should be understood that all equivalents or substitutes included in the spirit and technical scope of the invention are included.

Terms containing ordinal numbers, such as first, second, etc., may be used to describe various components, but these components are not limited by the above-mentioned terms. The above-mentioned terms are used only for the purpose of distinguishing one component from another.

In this specification, terms such as “comprise” or “have” are intended to indicate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but are not intended to indicate the presence of one or more other features. It should be understood that this does not exclude in advance the possibility of the existence or addition of elements, numbers, steps, operations, components, parts, or combinations thereof. When a component is said to be "connected" or "connected" to another component, it is understood that it may be directly connected to or connected to the other component, but that other components may exist in between. It should be. On the other hand, when it is mentioned that a component is “directly connected” or “directly connected” to another component, it should be understood that there are no other components in between.

Meanwhile, a “module” or “unit” for a component used in this specification performs at least one function or operation. And the “module” or “unit” may perform a function or operation by hardware, software, or a combination of hardware and software. Additionally, a plurality of “modules” or a plurality of “units” excluding a “module” or “unit” that must be performed on specific hardware or performed on at least one processor may be integrated into at least one module. Singular expressions include plural expressions unless the context clearly dictates otherwise.

In addition, when describing the present invention, if it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the gist of the present invention, the detailed description thereof is abbreviated or omitted.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the drawings.

1 and 2 are schematic perspective views to explain a block-type cooling system.

Referring to FIGS. 1 and 2 , the block-type cooling system 100 may include a coolant tank 110 and a cooling module 200.

The coolant tank 110 may store coolant as it passes through the cooling module 200.

In this embodiment, the coolant tank 110 has the same horizontal and vertical length as the cooling module 200, and its height is adjustable depending on the situation. Therefore, it is obvious that the shape of the coolant tank 110 can be formed in various shapes without being limited by this embodiment.

The cooling module 200 may be placed on top of the coolant tank 110. Cooling water flows in through the cooling module 200, and the cooling module 200 cools the flow-in coolant and discharges it into the coolant tank 110.

For example, high-temperature coolant (approximately 35 degrees Celsius) discharged when the equipment is operated is input into the cooling module 200, and the high-temperature coolant passes through the cooling module 200 to cool the low-temperature coolant (approximately 5 degrees Celsius). It may be cooled and discharged into the cooling water tank 110.

In addition, although not shown, a pump unit (not shown) is disposed in the coolant tank 110, so that the cooled coolant can be re-injected into the equipment and used.

The cooling module 200 may include a first cooling unit 210, a second cooling unit 220, a third cooling unit 230, and a blowing unit 240.

The first cooling unit 210 may be placed and connected to the upper part of the coolant tank 110.

The first cooling unit 210 may include a first housing 211 and a first heat exchange unit 213.

The first housing 211 may have a space formed inside it.

The first heat exchange unit 213 may be disposed on both sides of the first housing 211.

The first heat exchange unit 213 may include a discharge passage 215 and a cooling fin 250.

The second cooling unit 220 may be placed on and connected to the first cooling unit 210.

The second cooling unit 220 may include a second housing 221 and a second heat exchange unit 223.

The second housing 221 may be placed on and coupled to the first housing 211 . Additionally, the second housing 221 may have an internal space of the same size as the internal space of the first housing 211.

The second heat exchange unit 223 may include a middle passage 225 and cooling fins 250.

The third cooling unit 230 may be placed on and connected to the second cooling unit 220.

The third cooling unit 230 may include a third housing 231 and a third heat exchange unit 233.

The third housing 231 may be placed on and connected to the second housing 221. Additionally, the third housing 231 may have an internal space having the same size as the internal space of the first and second housings 211 and 221.

The third heat exchange unit 233 may include an inlet passage 235 and a cooling fin 250.

The first, second, and third housings 211, 221, and 231 may be formed in a shape with a space formed therein, and may all have the same shape. In addition, a rectangular blowing unit coupler 237 to which the blowing unit 240 can be coupled may be formed at the top of the third housing 231.

The blowing unit coupler 237 may be formed in the same shape as the blowing unit 240, which will be described later. Preferably, the blowing unit coupler 237 is disposed with the attenuation unit 300, which will be described later. It may be formed in a rectangular shape.

In addition, the first, second, and third heat exchange units 213, 223, and 233 may have an discharge passage 215, a middle passage 225, and an inlet passage 235 formed therein, respectively, and the discharge passage The cooling fins 250 may be disposed on the outer surfaces of 215, the middle passage 225, and the inlet passage 235.

That is, cooling water may flow in through the inlet passage 235 of the third heat exchange unit 233, and through the middle passage 225 of the second heat exchange unit 223 connected to the inlet passage 235. The coolant passes through the discharge passage 215 of the first heat exchange unit 213 and is stored in the coolant tank 110.

For example, when high-temperature coolant (about 35 degrees) used when operating the equipment flows into the inlet passage 235, it passes through the middle passage 225 and the discharge passage 215 by gravity and low-temperature coolant It can be cooled to (about 5 degrees).

The cooling fins 250 may be surrounded and disposed on outer surfaces of the discharge passage, middle passage, and inlet passage 215, 225, and 235.

Referring to FIG. 3, the cooling fin 250 is disposed on the outer surface of the cooling object, that is, the passage through which the coolant passes, and cools the heat conducted from the injected high-temperature coolant through a convection effect in the cooling fin 250. You can. The cooling fins 250 in this embodiment may be formed in a honeycomb structure, and the cooling fins 250 may be formed in the shape of a thin and long plate. The cooling fins 250 may be made of a material with a high thermal conductivity, and their thickness and length may be extended to improve thermal conductivity. Various known technologies may be applied to the cooling fins 250.

The blowing unit 240 may include a casing 241, a fan 243, and a driving source 245.

The blowing unit 240 may be coupled to the blowing unit coupler 237. The blowing unit 240 can form a downward airflow by using external air in the space inside the first, second, and third housings 211, 221, and 231. As a result, not only can the cooling efficiency be improved by generating a convection phenomenon in the cooling fin 250, but also preventing the scattering of foreign substances or harmful dust generated during cooling, which is not only environmentally friendly but also facilitates maintenance. .

The casing 241 not only protects the fan 243 by accommodating the fan 243 therein, but also serves to couple to the blowing unit coupler 237. The casing 241 may be coupled to the blowing unit coupler 273 in various ways, for example, interference fitting, welding, bolting, etc.

The fan 243 is disposed inside the casing 241 and can generate a downward airflow of external air into the internal space.

The driving source 245 may provide rotational driving force to the fan 243.

4 to 6 are schematic perspective views for explaining an attenuation unit.

Referring to Figures 6 through 6, the block-type cooling system 100 may further include an attenuation unit 300 between the inner surface of the blowing unit coupler 237 and the outer surface of the casing 241. .

The attenuation unit 300 may be disposed between the four inner surfaces of the blowing unit coupler 237 and the casing 241, respectively. In this embodiment, it will be described that the attenuation units 300 are arranged on each of the four sides.

The damping unit 300 can absorb vibration generated when the blowing unit 240 is operated, vibration applied from the outside, or other shocks.

The damping unit 300 may include a first guide part 310, a second guide part 320, a fastening member 330, a friction member 340, and an elastic member 350.

The first guide unit 310 may include a first rail 311 and a first block 313.

The first rail 311 may be disposed on the outer surface of the casing 241.

The first block 313 may be arranged to be slidably transported on the first rail 311.

The first guide unit 310 may be a known LM guide, and may be installed in pairs so that the first rails 311 are parallel to each other at opposing positions.

The second guide unit 320 may include a second rail 321 and a second block 323.

The second rail 321 may be installed on the inner surface of the blowing unit coupler 237 so as to be perpendicular to the first rail 311.

The second block 323 may be installed to be slidably transported on the second rail 321.

The second guide part 320 may be formed of the same known LM guide as the first guide part 310, and is installed as a pair in opposing positions, and the second rail 321 is the first guide part 310. 1 It may be installed perpendicular to the guide portion 310, and the second block 323 may be connected to the first block 313 through the fastening member 330, which will be described later.

For this reason, if the first guide part 310 guides the transport inside the blowing unit coupler 237 in the X-axis direction, the second guide part 320 serves to guide the transport in the Y-axis direction. can be performed.

In addition, the fastening member 330 may be provided to connect the first and second blocks 313 and 323 of the first and second guide parts 310 and 320, and may have a plurality of locking members at the edges. (331) can be formed. The fastening member 330 may be located between the first and second guide parts 310 and 320, and on one side the first block 313 may be fastened, and on the other side the second block ( 323) can be concluded. In addition, the fastening member 330 may have a locking member 331 formed on an edge adjacent to a square corner in the form of a hole or protruding in the form of a pin, so that the elastic member 350, which will be described later, can be coupled thereto.

In addition, one end of the elastic member 350 may be fastened to the fastening member 330, and the inner surface of the blowing unit coupler 237 may be inclined to the first and second rails 311 and 321. And the other end may be bound to either the outer surface or the center of the casing 241. The elastic members 350 may be provided to be symmetrical to each other about the first or second rails 311 and 321, and when one end of them is installed on the outer surface of the casing 241, the other end is It can be installed on the blowing unit coupler 237.

In addition, the elastic member 350 is installed at an angle with the first and second rails 311 and 321, and at this time, the elastic member 350 is installed at an angle of about 45 degrees to uniformly generate a repulsive force to respond to movement in all directions on the plane. It may be desirable to install it at an inclination angle of degrees.

In this way, the elastic member 350 is installed at an inclination angle, so the tensile distance of the elastic member 350 is reduced compared to the moving distance of the inner surface of the blowing unit coupler 237 or the outer surface of the casing 241. It can be. As a result, the movement distance of the inner surface of the blowing unit coupler 237 or the outer surface of the casing 241 can be expanded in response to the maximum stroke limit of the elastic member 350, so that the maximum stroke within a limited space can be achieved. You can use .

The friction member 340 is disposed between the first and second guide parts 310 and 320 so that one surface rubs against the inner surface of the blowing unit coupler 237 or the outer surface of the casing 241. You can. The friction member 340 may be made of a synthetic resin material to enable a smooth sliding movement in consideration of the material of the friction surface of the inner surface of the blowing unit coupler 237 or the outer surface of the casing 241.

The friction member 340 may be accommodated with a spring 343 on the support hole 341 installed on either the inner surface of the blowing unit coupler 237 or the outer surface of the casing 241. . In this case, the friction member 340 can provide friction according to the movement of the inner surface of the blowing unit coupler 237 or the outer surface of the casing 241 due to the elastic restoring force of the spring 343.

In addition, the friction member 340 has one surface formed as an inclined surface, and the end where the inclined surface is formed is the support hole ( 341) may be disposed together with the second friction member 345. At this time, the second friction member 345 is formed in a spherical shape made of an elastic material such as rubber and is provided to move the friction member 340 so that the friction member 340, whose end is formed as an inclined surface, is not subject to wear. When the distance between the inner surface of the blowing unit coupler 237 and the casing 241 changes, it moves by the changed length to provide elastic force, so that the elastic force of the second friction member 345 is maintained uniformly. It can be.

In addition, the friction member 340 is formed in a spherical shape and can be rotatably disposed on the support hole 341 installed on one of the inner surfaces of the blowing unit coupler 237 or the outer surface of the casing 241. there is. That is, the friction member 340 is formed in the form of a ball flange, and the frictional force can be reduced as the inner surface of the blowing unit coupler 237 or the outer surface of the casing 241 is driven when it moves, and the frictional force of the friction surface is reduced. Wear and damage can be prevented, which not only improves durability but also facilitates maintenance. Since micro-vibration mainly occurs when the blowing unit 240 is operated, it can be appropriately responded to.

7 to 9 are schematic perspective views for explaining the extension unit.

Referring to FIGS. 7 to 9 , the block-type cooling system 100 may further include an extension unit 400.

The extension unit 400 is disposed at each end of the fan 243 of the blowing unit 240 and can vary the length of the fan 243 depending on the situation.

The extension unit 400 has a shape whose length can be varied while maintaining the same shape as the streamlined curve of the fan 243, and includes a guide member 410 forming a 'ㄷ'-shaped cross-sectional structure, and the guide. It may be composed of a support member 420 connected to the lower end of the member 410.

The guide member 410 may be formed so that the fixing hole 413, where the fan 243 and the fixing member 411 for fixing are fastened, has a long hole shape of a certain length.

Additionally, the support member 420 may be provided with a spring member 421 for attenuating shock, and a friction member 415 may be provided inside the guide member 410 to increase friction with the fan 243. can be formed.

Due to the above-described structure, the friction force is improved during the sliding movement of the fan 243, which not only enables stable length variation, but also has the advantage of facilitating maintenance by easily removing accumulated foreign matter.

Additionally, the fixing hole 413 may be formed in the form of a long hole of a certain length, and more preferably, may be formed in a concave-convex shape to improve stability. More specifically, a plurality of bolt holes formed in a circular or diamond shape may be connected.

In this configuration, during the process of adjusting the length of the fan 243 using the extension unit 400, the locking action of the fixing member 411 can be achieved through the continuous uneven shape of the fixing hole 413, Variable control of the length of the fan 243 can be achieved stably.

In the above, preferred embodiments of the present invention have been shown and described, but the present invention is not limited to the specific embodiments described above, and may be used in the technical field to which the invention pertains without departing from the gist of the present invention as claimed in the claims. Of course, various modifications can be made by those skilled in the art, and these modifications should not be understood individually from the technical idea or perspective of the present invention.

100: block-type cooling system 110: coolant tank
200: cooling module 210: first cooling unit
211: first housing 213: first heat exchange unit
215: discharge passage 220: second cooling unit
221: second housing 223: second heat exchange unit
225: middle passage 230: third cooling unit
231: third housing 233: third heat exchange unit
235: discharge passage 237: blowing unit coupling port
240: blowing unit 241: casing
243: fan 245: drive source
300: Attenuation unit 310: First guide unit
311: first rail 313: first block
320: second guide part 321: second rail
323: second block 330: fastening member
331: Hook member 340: Friction member
341: support hole 343: spring
345: second friction member 350: elastic member
400: Extension unit 410: Guide member
411: fixing member 413: fixing hole
415: friction member 420: support member

Claims (2)

Coolant tank capable of storing coolant; and
It includes a cooling module disposed on the top of the coolant tank,
The cooling module is,
a first cooling unit disposed on an upper portion of the coolant tank and including a first housing defining an internal space;
a second cooling unit manufactured identically to the first cooling unit and disposed on an upper portion of the first cooling unit;
a third cooling unit manufactured in the same manner as the first cooling unit and the second cooling unit, disposed on an upper portion of the second cooling unit, and including a third housing disposed and connected to an upper portion of the second housing; and
It includes a blowing unit disposed on the upper surface of the third cooling unit,
The second housing is disposed and coupled to the upper part of the first housing and forms a space of the same size as the inner space of the first housing,
The blowing unit is,
A casing coupled to the blowing unit coupler;
A fan disposed inside the casing;
It includes a driving source that provides a rotational driving force to the fan so as to form a descending airflow in the space inside the first to third housings,
It further includes; a damping unit disposed between the four inner surfaces of the blowing unit coupler and the four outer surfaces of the casing,
The attenuation unit is,
a first rail disposed on the outer surface of the casing; and
a first guide unit including a first block installed to be slidably transported on the first rail;
a second rail disposed on an inner surface of the blowing unit coupler so as to be perpendicular to the first rail; and
a second guide unit including a second block installed to be slidably transported on the second rail;
A fastening member disposed to connect the first block and the second block and having a plurality of locking members formed at an edge;
an elastic member whose end is coupled to the fastening member and whose other end is coupled to one of the inner surface of the blowing unit coupler and the outer surface of the casing so as to be inclined with the first rail and the second rail;
It includes a friction member disposed between the first guide part and the second guide part to rub against the inner surface of the blowing unit coupler or the outer surface of the casing,
The friction member is formed in a spherical shape and is rotatably provided on a support plate installed on either the inner surface of the blowing unit coupler or the outer surface of the casing,
It further includes an extension unit disposed at each end of the fan of the blowing unit to vary the length of the fan depending on the situation,
The extension unit is,
A guide member whose length can be varied while maintaining the same shape as the streamlined curve of the fan and has a 'ㄷ'-shaped cross-sectional structure; and
It includes a support member connected to the lower end of the guide member,
The guide member is,
The fixing hole into which the fan and the fixing member are fastened may be formed in the shape of a long hole of a certain length,
The support member is,
A block-type cooling system may be provided with a spring member to attenuate shock, and a friction member 415 is formed inside the guide member to increase friction with the fan.
delete