KR102625829B9 - - Fixed-abrasive Polishing Pad and Fabrication Method using Vertically Aligned Carbon Nanotubes - Google Patents

- Fixed-abrasive Polishing Pad and Fabrication Method using Vertically Aligned Carbon Nanotubes

Info

Publication number
KR102625829B9
KR102625829B9 KR1020210089224A KR20210089224A KR102625829B9 KR 102625829 B9 KR102625829 B9 KR 102625829B9 KR 1020210089224 A KR1020210089224 A KR 1020210089224A KR 20210089224 A KR20210089224 A KR 20210089224A KR 102625829 B9 KR102625829 B9 KR 102625829B9
Authority
KR
South Korea
Prior art keywords
fixed
carbon nanotubes
polishing pad
vertically aligned
fabrication method
Prior art date
Application number
KR1020210089224A
Other languages
Korean (ko)
Other versions
KR102625829B1 (en
KR20220152106A (en
Inventor
김산하
강석경
김성재
정지훈
Original Assignee
한국과학기술원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한국과학기술원 filed Critical 한국과학기술원
Priority to US17/526,134 priority Critical patent/US20220355435A1/en
Publication of KR20220152106A publication Critical patent/KR20220152106A/en
Application granted granted Critical
Publication of KR102625829B1 publication Critical patent/KR102625829B1/en
Publication of KR102625829B9 publication Critical patent/KR102625829B9/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
KR1020210089224A 2021-05-07 2021-07-07 Fixed-abrasive Polishing Pad and Fabrication Method using Vertically Aligned Carbon Nanotubes KR102625829B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US17/526,134 US20220355435A1 (en) 2021-05-07 2021-11-15 Fixed-abrasive pad using vertically aligned carbon nanotubes and fabrication method for the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20210058912 2021-05-07
KR1020210058912 2021-05-07

Publications (3)

Publication Number Publication Date
KR20220152106A KR20220152106A (en) 2022-11-15
KR102625829B1 KR102625829B1 (en) 2024-01-15
KR102625829B9 true KR102625829B9 (en) 2024-03-13

Family

ID=84042064

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020210089224A KR102625829B1 (en) 2021-05-07 2021-07-07 Fixed-abrasive Polishing Pad and Fabrication Method using Vertically Aligned Carbon Nanotubes

Country Status (1)

Country Link
KR (1) KR102625829B1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4049369B2 (en) * 2002-07-31 2008-02-20 京セラキンセキ株式会社 Polishing carrier
JP2004358588A (en) * 2003-06-03 2004-12-24 Unitika Ltd Abrasive pad and its manufacturing method
JP2009190155A (en) * 2008-02-18 2009-08-27 Daiken Chemical Co Ltd Polishing tool
JP6924436B2 (en) * 2017-06-26 2021-08-25 山形県 Carbon nanotube-coated abrasive grains

Also Published As

Publication number Publication date
KR102625829B1 (en) 2024-01-15
KR20220152106A (en) 2022-11-15

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Legal Events

Date Code Title Description
E902 Notification of reason for refusal
AMND Amendment
E601 Decision to refuse application
AMND Amendment
X701 Decision to grant (after re-examination)
GRNT Written decision to grant
G170 Re-publication after modification of scope of protection [patent]