KR102623801B1 - Carbon composite material - Google Patents

Abstract

[Problem] To provide a carbon composite member that covers the entire graphite substrate and has a strong pyrolytic carbon layer.
[Solution] A carbon composite member in which a plurality of pyrolytic carbon layers are formed on a graphite substrate 1, wherein a first layer 2A is one pyrolytic carbon layer and a second layer 2B is another pyrolytic carbon layer adjacent thereto. ), a carbon composite member having a pore region (4) at the boundary of which pores (3) exist.

Description

Carbon composite material {CARBON COMPOSITE MATERIAL}

The present invention relates to carbon composite members.

Carbon materials such as graphite are used in many fields such as semiconductor manufacturing, chemical industry, machinery, and nuclear energy because they have excellent chemical stability, heat resistance, and mechanical properties. Additionally, since graphite itself is a porous material, it easily adsorbs gas, moisture, impurities, etc. inside the pores, so the inside of the pores is prone to contamination. Therefore, a technique is known to reduce the adverse effects of graphite by applying a coating of pyrolytic carbon to prevent these contaminants from being re-emitted from the pores.

Pyrolytic carbon is hard and forms a dense film with impermeability to gases, making it particularly suitable for use in a high-purity environment.

Patent Document 1 discloses a member for a semiconductor manufacturing device for this use, which includes a carbon material, has a pyrolytic carbon layer formed on at least the surface in contact with the raw material gas, and has a wet tension of 62.0 mN/m or more on the surface in contact with the raw material gas. It is listed.

Japanese Patent Publication No. 2007-12933

However, the technology described above relates to a semiconductor manufacturing device targeting relatively small wafers, and in order to prevent the adsorption or release of gas, moisture, and impurities into the interior, the support points created during coating are blocked, and the graphite substrate and In addition to the need to cover the entire surface of the same carbon material, especially in large-sized carbon composite members, it is necessary to prevent peeling due to the large impact applied to the pyrolytic carbon coating during handling.

In view of the above problems, the present invention aims to provide a carbon composite member that covers the entire graphite substrate and has a strong pyrolytic carbon layer.

The carbon composite member according to the present invention for solving the above problems is as follows.

(1) A carbon composite member in which a plurality of pyrolytic carbon layers are formed on a graphite substrate,

A carbon composite member characterized by having a pore region in which pores exist at a boundary between one pyrolytic carbon layer and another pyrolytic carbon layer adjacent thereto.

According to the carbon composite member according to the present invention, since the pyrolytic carbon layer includes multiple layers, the effect of preventing adsorption and release of gas, moisture, and impurities from the graphite base can be increased.

On the other hand, the pyrolytic carbon layer is a highly anisotropic material in which the graphite crystals are expanded in the plane direction, and the a-axis direction of the graphite, where carbon bonds are firmly bonded in the plane direction, is expanded, and along the thickness direction, the graphite is weakly bonded by van der Waals force. The c-axis direction of the combined graphite is extended. For this reason, in the case of a plurality of laminated pyrolytic carbon layers, the boundary between one pyrolytic carbon layer and the pyrolytic carbon layer adjacent to it is weak and is prone to peeling off. On the other hand, the carbon composite member according to the present invention has a pore region where pores exist at the boundary between one pyrolytic carbon layer and another pyrolytic carbon layer adjacent to it, so the crystal direction of the pyrolytic carbon is disturbed around the pores. It can strengthen the anchor effect and prevent delamination between layers.

Additionally, the carbon composite member according to the present invention for solving the above problems preferably has the following aspects.

(2) The plurality of pyrolytic carbon layers are sequentially arranged from the side closest to the graphite substrate to a first layer, a second layer,... , when the n-1st floor is the nth layer,

The first layer has a first opening, and the nth layer has an nth opening,

The carbon composite member according to (1), wherein the first opening and the n-th opening are formed at different positions with respect to the graphite substrate.

In the carbon composite member according to a preferred embodiment of the present invention, the first opening in the first layer on the side closest to the graphite substrate and the nth opening in the outermost nth layer are located at different positions with respect to the graphite substrate. , the first opening is blocked, preventing the release of gas, moisture, impurities, etc. from the graphite substrate, and preventing adsorption of gas, moisture, impurities, etc. from the outside.

(3) As the second layer covers the first opening, the pore area at the boundary between the first layer and the second layer around the first opening is inclined and extends toward the graphite substrate. The carbon composite member according to (2), characterized in that:

In the carbon composite member according to a preferred embodiment of the present invention, since the second layer covers the first opening in the first layer, it has the effect of preventing the release of gas, moisture, and impurities from the graphite base and adsorption from the outside. It can be raised. In addition, since the pore area at the boundary between the first layer and the second layer around the first opening extends at an angle toward the graphite substrate, the reinforcing effect of the boundary portion of the first opening where stress concentration tends to occur is achieved. It can be raised.

(4) having the pore region at a boundary between the nth layer and the n-1th layer immediately below the nth layer, wherein the nth layer gradually becomes thinner toward the nth opening. The carbon composite member according to (2) or (3).

The carbon composite member according to a preferred embodiment of the present invention has the pore region at the boundary between the nth layer and the n-1th layer immediately below the nth layer, and the nth layer gradually becomes thinner toward the nth opening. Therefore, stress concentration can be alleviated and the reinforcing effect of the boundary portion of the nth opening, which is thinner than other portions, can be increased.

(5) The carbon composite member according to any one of (1) to (4), wherein the pores have a maximum pore diameter of 0.5 to 3.0 μm.

In the carbon composite member according to a preferred embodiment of the present invention, the maximum pore diameter of the pores is 0.5 μm or more, so that it is possible to sufficiently secure components of pyrolytic carbon with different orientations that occur around the pores, and the generation of pores The anchor effect can be fully demonstrated.

In addition, when the maximum pore diameter of the pore is 3.0 μm or less, stress concentration around the pore can be reduced and strength can be prevented from being lowered due to the presence of pores.

(6) The carbon composite member according to any one of (1) to (5), wherein the total thickness of the pyrolytic carbon layers is 5 to 400 μm.

In the carbon composite member according to a preferred embodiment of the present invention, the total thickness of the pyrolyzed carbon layers is 5 μm or more, so that the irregularities of the porous graphite substrate can be sufficiently covered and gas impermeability can be ensured. Additionally, when the total thickness of the pyrolytic carbon layers is 400 μm or less, it is possible to prevent bending or peeling of the graphite substrate and the pyrolytic carbon layers due to thermal deformation.

(7) The carbon composite member according to any one of (1) to (6), wherein the graphite substrate is an isotropic graphite material.

In the carbon composite member according to a preferred embodiment of the present invention, the graphite base material is an isotropic graphite material, and isotropic graphite has small anisotropy and high uniformity in properties, so the difference in thermal expansion coefficient with the pyrolytic carbon layer depending on location and direction is small. It is small and can make it difficult to peel off.

According to the carbon composite member according to the present invention, since the pyrolytic carbon layer includes multiple layers, the effect of preventing adsorption and release of gas, moisture, and impurities from the graphite base can be increased.

On the other hand, the pyrolytic carbon layer is a highly anisotropic material in which the graphite crystals are expanded in the plane direction, and the a-axis direction of the graphite, where carbon is firmly bonded, is expanded in the plane direction, and along the thickness direction, by van der Waals force. The c-axis direction of the weakly bonded graphite is extended. For this reason, in the case of a plurality of laminated pyrolytic carbon layers, the boundary between one pyrolytic carbon layer and the pyrolytic carbon layer adjacent to it is weak and is prone to peeling off. On the other hand, the carbon composite member according to the present invention has a pore region where pores exist at the boundary between one pyrolytic carbon layer and another pyrolytic carbon layer adjacent to it, so the crystal direction of the pyrolytic carbon is disturbed around the pores. It can strengthen the anchor effect and prevent delamination between layers.

Figure 1 is an enlarged view of the cross section of a carbon composite member according to Embodiment 1 of the present invention.
FIG. 2 is a diagram showing the manufacturing process of a carbon composite member according to Embodiment 1 of the present invention.
Figure 3 is a cross-sectional view of a carbon composite member according to Embodiment 2 of the present invention.
Figure 4 is an enlarged view of the cross section of portion A of the carbon composite member according to Embodiment 2 of the present invention.
Figure 5 is an enlarged view of the cross section of portion B of the carbon composite member according to Embodiment 2 of the present invention.
Figure 6 is a diagram showing the manufacturing process of a carbon composite member according to Embodiment 2 of the present invention.
FIG. 7 is an enlarged view showing each layer formed in steps (C), (D), and (E) in the manufacturing process shown in FIG. 6.

<Embodiment 1>

First, Embodiment 1 of the present invention will be described. Figure 1 is a diagram showing a carbon composite member according to Embodiment 1 of the present invention, and in detail, is an enlarged view of a cross section near the surface of the carbon composite member.

On the graphite substrate 1, a first layer 2A, which is one pyrolyzed carbon layer, and a second layer 2B, which is another pyrolyzed carbon layer, are formed by laminating them. Additionally, at the boundary between the first layer 2A and the second layer 2B, a large number of pores 3 are formed to spread out in a layered manner. The area where pores 3 exist in layers is the pore area 4.

The pyrolytic carbon layers that become the first layer 2A and the second layer 2B can be formed by the CVD method. In the main part of the pyrolytic carbon layer, the a-axis direction widens along the plane direction of the graphite substrate 1, and the c-axis direction extends along the vertical direction. Therefore, if a plurality of pyrolytic carbon layers are laminated, peeling is likely to occur in the boundary area where thermal deformation or the like occurs. Therefore, in the carbon composite member according to the present embodiment, a pore region 4 in which pores 3 exist is formed at the boundary between the adjacent first layer 2A and the second layer 2B, thereby forming a pyrolytic carbon layer. It disturbs the arrangement and makes it difficult to peel.

This pore region 4 can be obtained as follows.

FIG. 2 is a diagram showing the manufacturing process of the carbon composite member shown in FIG. 1. First, prepare a graphite substrate 1 of the desired shape. When the pyrolytic carbon layer is formed on the graphite substrate 1, it becomes as large as the thickness, so it is preferable to process it to be slightly smaller depending on the size of the carbon composite member and the thickness of the pyrolytic carbon layer to be formed. Additionally, in order to increase adhesion to the pyrolytic carbon layer, the surface of the graphite substrate 1 may be processed into a rough surface.

Then, the graphite substrate 1 is placed in a CVD furnace, raised to the film forming temperature, and then raw material gas is introduced. The film formation temperature is not particularly limited, but can be, for example, 800 to 2000°C. The raw material gas for obtaining the pyrolysis carbon layer is not particularly limited as long as it is hydrocarbon. For example, in addition to alkanes such as methane, ethane, propane, and butane, alkenes such as ethylene and propylene, and alkynes such as acetylene, aromatic raw material gases such as benzene and toluene may be used.

Then, by maintaining the film formation temperature and introducing the raw material gas for a certain period of time, one pyrolytic carbon layer, which becomes the first layer 2A, is formed on the surface of the graphite substrate 1. Additionally, as the carrier gas, an inert gas such as Ar can be used.

Subsequently, at the stage where the first layer 2A, which is a pyrolytic carbon layer, has reached a predetermined thickness, a pore region 4 is formed on the surface of the first layer 2A by a method as described in detail below. do. In addition, after forming the pore region 4, pyrolytic carbon is kept constant under the CVD conditions for film formation, and another pyrolytic carbon is added continuously on the pyrolytic carbon layer in which the pore region 4 is formed, forming the second layer 2B. forms a layer.

When the pyrolytic carbon layer is in a stable film formation state, the a-axis direction widens in the horizontal direction (left and right directions in the drawing) with respect to the graphite base material 1, and the c-axis direction increases in the vertical direction (up and down direction in the drawing) with respect to the graphite base material 1. It is formed in a state in which the direction is aligned so that the direction is extended, but if the film is in an unstable film formation state, the raw material gas is thermally decomposed above the graphite substrate 1, becomes particles, falls on the graphite substrate 1, and disrupts the arrangement of the pyrolyzed carbon layer. generates If this disorder of arrangement is created in the main part of the pyrolytic carbon layer, it will cause deterioration of the function of the pyrolytic carbon layer, such as poor airtightness.

However, in the carbon composite member according to the present embodiment, since the pore region 4 is created at the boundary between the first layer 2A and the second layer 2B, it does not cause the performance of the carbon composite member to deteriorate. Rather, it acts to strengthen the bonding strength of the first layer (2A) and the second layer (2B), which are a plurality of pyrolytic carbon layers, and has the effect of making it difficult to separate.

The pore region 4 can be formed either at the end of the film formation of the first layer 2A or at the start of the film formation of the second layer 2B. For example, when forming the second layer 2B at the start of film formation, the surface of the first layer 2A is placed in an unstable situation, such as by increasing the gas partial pressure or increasing the temperature at the start. After generating particles, the pyrolytic carbon layer that becomes the second layer 2B is formed under stable conditions. In addition, in the case of forming at the end of the deposition of the first layer 2A, the gas partial pressure is increased or the temperature is raised at the end to create particles, and then the particles are formed under stable conditions. A pyrolytic carbon layer that becomes the second layer 2B is formed. Since the particles are scattered and accumulated on the surface of the first layer 2A, when the pyrolytic carbon layer that becomes the second layer 2B is deposited thereon, pores 3 are formed around the particles. These pores 3 are expanded in a layered manner at the boundary between the first layer 2A and the second layer 2B, and become the pore area 4.

An example of the conditions for generating and depositing particles of pyrolytic carbon is that the pressure in the CVD furnace is 10 to 10,000 Pa and the temperature is 800 to 2,000°C.

Additionally, in order to form more pores 3 by depositing more particles of pyrolytic carbon on the surface of the first layer 2A, the upper space of the pyrolytic carbon layer in the CVD furnace can be expanded. If the upper space is large, the amount of pyrolytic carbon particles generated increases, and more pyrolytic carbon particles can be deposited on the surface of the first layer 2A.

In addition, in the above, the case where the pyrolytic carbon layer has a two-layer structure of the first layer 2A and the second layer 2B is shown as an example, but the pyrolytic carbon layer according to the present embodiment can have a plurality of three or more layers. You can. In that case, the pore region 4 may be formed in the same manner at the start of film forming of each layer or at the end. In addition, in the case where the pyrolytic carbon layer is three or more layers, the effect of the present invention is exhibited if the pore region 4 is located at the boundary between at least one set of adjacent pyrolytic carbon layers, but the effect of preventing interlayer separation is sufficiently exhibited. To achieve this, it is desirable to have pore regions 4 at all boundaries between a set of adjacent pyrolyzed carbon layers.

In addition, the pyrolytic carbon layer can be formed on both sides of the graphite substrate 1, and after forming the pyrolytic carbon layer on any surface of the graphite substrate 1, the graphite substrate 1 is turned over so that the other side is the upper surface. All you have to do is create a tabernacle that works. Alternatively, a pyrolytic carbon layer may be formed to cover the entire surface of the graphite substrate 1. Then, the pore region 4 may be formed in the same manner at the start of the film formation of each layer or at the end of the film formation.

Subsequently, the pores 3 preferably have a maximum pore diameter of 0.5 to 3.0 μm. Since the maximum pore diameter of the pores 3 is 0.5 μm or more, it is possible to sufficiently secure components of pyrolytic carbon with different orientations that occur around the pores 3, and the anchor effect is sufficiently achieved by the creation of the pores 3. It can be performed. In addition, since the maximum pore diameter of the pores 3 is 3.0 μm or less, stress concentration around the pores 3 can be reduced and strength can be prevented from being reduced due to the presence of the pores 3. Additionally, the maximum pore diameter of the more preferable pores 3 is 1 to 2 μm.

If the pore region 4 is too thick, peeling starting from the pore 3 is likely to occur, and if it is too thin, it has little effect in disrupting the orientation of the pyrolytic carbon and has the effect of strengthening the bonding force between the upper and lower pyrolytic carbon layers. You won't be able to get it. Therefore, the thickness of the pore region 4 is preferably 0.5 to 20 μm, and more preferably 1 to 5 μm.

The total thickness of the pyrolytic carbon layers is preferably 5 to 400 μm. When the total thickness of the pyrolytic carbon layers is 5 μm or more, the irregularities of the porous graphite substrate 1 can be sufficiently covered and gas impermeability can be ensured. In addition, when the total thickness of the pyrolytic carbon layers is 400 μm or less, it is possible to prevent bending or peeling of the graphite substrate 1 and the pyrolytic carbon layer due to thermal deformation. Additionally, a more preferable total thickness of the pyrolytic carbon layers is 10 to 200 μm.

Here, the thickness of the pyrolytic carbon layer is the thickness excluding the pore region 4. For example, the thickness of the first layer 2A is the film thickness of the first layer 2A formed on the graphite substrate 1. , the deposition thickness of pyrolytic carbon formed by changing the film formation conditions to generate particles is not included. Additionally, the thickness of the second layer 2B is the film thickness of the pyrolytic carbon layer when formed into a film after generating particles.

The graphite material used as the graphite substrate 1 is preferably an isotropic graphite material. Since isotropic graphite has small anisotropy and high uniformity in properties, the difference in thermal expansion coefficient with the pyrolytic carbon layer depending on location and direction is small, making it difficult to peel.

<Embodiment 2>

Next, Embodiment 2 of the present invention will be described. Figure 3 is a cross-sectional view of a carbon composite member according to Embodiment 2 of the present invention.

A carbon composite member of the form shown in FIG. 3, that is, of the form of forming a plurality of pyrolytic carbon layers on the entire surface of the graphite substrate 1, is shown, for example, in FIG. 1 of Japanese Patent Application Laid-Open No. 2016-169422. It can be manufactured by a manufacturing method using a predetermined support as shown (details of this manufacturing method will be described later). In this case, the first opening 10 or the second opening 11 is formed in a part of the pyrolytic carbon layer.

As shown in FIG. 3, in the carbon composite member according to the present embodiment, the graphite substrate 1 is covered with the first layer 2A and the second layer 2B, and the first layer 2A is The graphite substrate 1 has first openings 10 (two locations in FIG. 3) on one side (upper surface in the drawing), and the second layer 2B covers the first openings 10. Therefore, airtightness from the first opening 10 to the graphite substrate 1 is ensured in the second layer 2B. On the other hand, the other side of the graphite substrate 1 (the lower surface in the drawing) does not have the first opening 10, and the entire surface is covered with the first layer 2A, and the second layer 2B has a second opening 10. It has openings 11 (two in FIG. 3). Therefore, airtightness from the second opening 11 to the graphite substrate 1 is ensured in the first layer 2A.

That is, the first opening 10 in the first layer 2A on the side close to the graphite substrate and the second opening 11 in the second layer 2B on the outside are at different positions with respect to the graphite substrate 1. Since the first opening 10 and the second opening 11 are located at a position where they do not overlap in the stacking direction of the pyrolytic carbon layer, the first opening 10 is blocked and gas from the graphite substrate 1 is blocked. In addition to preventing the release of moisture, impurities, etc., it is also possible to prevent adsorption of gas, moisture, impurities, etc. from the outside. In addition, the first opening 10 or the second opening 11 may be one in each of the first layer 2A and the second layer 2B, or may be formed in multiple locations.

In FIG. 3, the case where the plurality of pyrolytic carbon layers is two layers, the first layer 2A and the second layer 2B, is explained. However, for example, the plurality of pyrolytic carbon layers can be arranged close to the graphite substrate 1. In order from the side, 1st floor, 2nd floor, … , When the n-1th layer and the nth layer are used, the first layer has a first opening, the nth layer has an nth opening, and the first opening and the nth opening are connected to the graphite substrate 1. In contrast, if the first opening and the n-th opening are formed at a different position (a position where the first opening and the n-th opening do not overlap in the stacking direction of the pyrolytic carbon layer), the same effect as above can be achieved. Additionally, n is an integer of 2 or more.

FIG. 4 is an enlarged view of the cross section of part A of FIG. 3 and shows in detail the periphery of the first opening 10 formed in the first layer 2A (area C in the figure).

As shown in FIG. 4, the second layer 2B covers the first opening 10, and the first layer 2A and the second layer 2B around the first opening (area C) The pore region 4 at the boundary extends at an angle toward the graphite substrate 1. That is, since the second layer 2B covers the first opening 10 in the first layer 2A, it has the effect of preventing the release of gas, moisture, and impurities from the graphite substrate 1 and adsorption from the outside. can be increased. In addition, since the pore region 4 at the boundary between the first layer 2A and the second layer 2B in the periphery of the first opening (region C) is inclined and extended toward the graphite substrate 1, The reinforcing effect of the boundary portion of the first opening 10, where stress concentration tends to occur, can be increased.

FIG. 5 is an enlarged view of the cross section of portion B of FIG. 3 and shows in detail the periphery (area D) of the second opening 11 formed in the second layer 2B.

As shown in FIG. 5, the first layer 2A has no openings, and the second layer 2B is formed by lamination on the upper surface (lower side in the drawing) of the first layer 2A, and the second layer 2B The layer 2B has a second opening 11. And, there is a pore region 4 at the boundary between the second layer 2B and the first layer 2A immediately below the second layer 2B, As shown in area D in the drawing, the second layer 2B is gradually becoming thinner toward the second opening 11, thereby relieving stress concentration and making the boundary portion of the second opening thinner than other portions. The reinforcement effect can be increased.

In FIG. 5, the case where the plurality of pyrolytic carbon layers is two layers, the first layer 2A and the second layer 2B, is explained. However, as in the case explained in FIG. 3, the nth layer and the nth layer If there is a pore region 4 at the boundary of the n-1th layer immediately below and the nth layer gradually becomes thinner toward the nth opening, the same effect as above can be achieved. Additionally, n is an integer of 2 or more.

Next, the method for manufacturing a carbon composite member according to Embodiment 2 of the present invention will be described in detail. To manufacture such a carbon composite member, for example, the process shown in FIG. 6 can be followed.

In the same figure, (A) is the graphite substrate 1, (B) is the formation process of the first layer 2A, and (C) is the pore region 4 on the first surface 1a side of the graphite substrate 1. ), (D) is the formation process of the pore region 4 on the second surface 1b side of the graphite substrate 1 (i.e., the side on which the first opening 10 is formed), (E) is The formation process of the second layer 2B is shown respectively. In addition, as shown in the same drawing (A), one side (upper surface in the drawing) of the graphite substrate 1 is referred to as the first surface 1a, and the other side (lower surface in the drawing) is referred to as the second surface 1b. I'm doing it. Additionally, in FIG. 7, each layer formed in the (C) process, (D) process, and (E) process of FIG. 6 is shown in an enlarged scale.

First, as shown in step (B), the graphite substrate 1 is placed on the support member 20. The support 20 is mounted on a substrate holder (not shown) of the CVD device. The support 20 has, for example, a cylindrical support main body 21 and a support portion 22 protruding from the center of the support main body 21, and is formed integrally. In addition, in order to integrate them, for example, it can be realized by processing the support body 21 and the support part 22 to obtain it, or by bonding the support body 21 and the support part 22 with an adhesive or the like.

The support portion 22 has a truncated cone shape as a whole, and has a shape with an inclined surface that gradually widens from the top surface 23 toward the support main body 21 in a cross section along the axis. In addition, the top surface 23 can be shaped like a cone with a sharp tip, in addition to being flat as shown. The second surface 1b of the graphite substrate 1 is supported in contact with this support portion 22.

In this state, a stable CVD method is performed to form a pyrolytic carbon layer. Thereby, as shown, the first layer 2A is formed to cover the graphite substrate 1 except for the periphery of the support portion 22 of the support member 20. At that time, in the first layer 2A, the first opening 10 is formed in a shape following the outer shape of the support portion 22.

Next, unstable CVD is performed as shown in step (C), and pore regions 4 are sufficiently formed over the entire surface on the side of the first surface 1a of the graphite substrate 1 of the first layer 2A. do. In addition, it can be considered that a considerable number of pore regions 4 are formed on the second surface 1b of the graphite substrate 1, but there are fewer pore regions 4 compared to the first surface 1a of the graphite substrate 1.

Next, as shown in step (D), the graphite substrate 1 is flipped from front to back (up and down) and the first surface 1a is placed on the support member 20. Accordingly, the first opening 10 of the first layer 2A faces upward in the drawing. Then, unstable CVD is performed again to sufficiently form pore regions 4 over the entire surface on the second surface 1b side of the graphite substrate 1 (i.e., the side where the first opening 10 is formed). At that time, particles of pyrolyzed carbon fall and accumulate on the first opening 10, so a pore region 4 is formed also on the first opening 10 (see Fig. 4).

Next, as shown in step (E), stable CVD is performed to form the second layer 2B. Through the above processes, the first opening 10 is blocked by the second layer 2B to enter the state shown in FIG. 4, and a pore region 4 is also formed in the second opening 11, as shown in FIG. 5. It becomes a state of being in the city. That is, according to the above manufacturing method, the second layer 2B covers the first opening 10, and the first layer 2A and the second layer 2B around the first opening (area C) It is possible to manufacture a carbon composite member in which the boundary pore region 4 extends at an angle toward the graphite substrate 1 and the second layer 2B gradually becomes thinner toward the second opening 11. You can.

In addition, as described above, the first support member 20 uses, for example, a cylindrical support member body 21 and a truncated cone-shaped support member 22 protruding from the center of the support member body 21. Since the layer 2A and the second layer 2B are formed, in the openings of each layer (the first opening 10 and the second opening 11), a pyrolytic carbon layer that gradually becomes thinner toward each opening is formed. can be formed.

Although the present invention has been described above with reference to Embodiments 1 and 2, it is not limited to these embodiments and modifications, improvements, changes, etc. can be made as appropriate.

The carbon composite member of the present invention has higher performance as a whole by covering the graphite substrate with a plurality of layers of pyrolytic carbon layers, and peeling of the pyrolytic carbon layers from each other is suppressed and is also excellent in durability. Therefore, it is effective in many fields such as semiconductor manufacturing, chemical industry, machinery, and nuclear energy.

1: Graphite substrate
2A: First layer (one pyrolytic carbon layer)
2B: Second layer (another pyrolytic carbon layer)
3: pores
4: Pore area
10: first opening
11: second opening
20: Earth
21: Support body
22: support part
23: Normal side

Claims (7)

It is a carbon composite member in which a plurality of pyrolytic carbon layers are formed on a graphite substrate,
A carbon composite member characterized by having a pore region in which particles of pyrolyzed carbon and pores exist around the particles at a boundary between one pyrolytic carbon layer and another pyrolytic carbon layer adjacent thereto. The method according to claim 1, wherein the plurality of pyrolytic carbon layers are arranged in order from the side closest to the graphite substrate to a first layer, a second layer, . . . , when the n-1st floor is the nth layer,
The first layer has a first opening, and the nth layer has an nth opening,
A carbon composite member characterized in that the first opening and the n-th opening are formed at different positions with respect to the graphite substrate. The method of claim 2, wherein the second layer covers the first opening, and the pore area at the boundary between the first layer and the second layer around the first opening is directed toward the graphite substrate. A carbon composite member characterized by being inclined and elongated. The method of claim 2 or 3, wherein the pore region is at a boundary between the n-th layer and the n-1 layer immediately below the n-th layer, and the n-th layer is directed toward the n-th opening. A carbon composite member characterized by gradually becoming thinner. The carbon composite member according to any one of claims 1 to 3, wherein the pores have a maximum pore diameter of 0.5 to 3.0 μm. The carbon composite member according to any one of claims 1 to 3, wherein the total thickness of the plurality of pyrolytic carbon layers is 5 to 400 μm. The carbon composite member according to any one of claims 1 to 3, wherein the graphite substrate is an isotropic graphite material.

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