JP2876095B2 - Graphite electrolytic electrode - Google Patents

Graphite electrolytic electrode

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Publication number
JP2876095B2
JP2876095B2 JP4092720A JP9272092A JP2876095B2 JP 2876095 B2 JP2876095 B2 JP 2876095B2 JP 4092720 A JP4092720 A JP 4092720A JP 9272092 A JP9272092 A JP 9272092A JP 2876095 B2 JP2876095 B2 JP 2876095B2
Authority
JP
Japan
Prior art keywords
graphite
electrode
pyrolytic carbon
electrolytic processing
carbon film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4092720A
Other languages
Japanese (ja)
Other versions
JPH05285735A (en
Inventor
俊 高木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP4092720A priority Critical patent/JP2876095B2/en
Publication of JPH05285735A publication Critical patent/JPH05285735A/en
Application granted granted Critical
Publication of JP2876095B2 publication Critical patent/JP2876095B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Carbon And Carbon Compounds (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、鍛造型、ダイキャスト
型、プラスチック成形型等三次元形状に加工された金型
等の金属表面の光沢仕上げ加工に利用される電解仕上加
工に使用される黒鉛製電解加工用電極に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is used for electrolytic finishing used for luster finishing of metal surfaces of three-dimensional dies such as forging dies, die casting dies, and plastic molding dies. It relates to an electrode for graphite electrolytic processing.

【0002】[0002]

【従来の技術】電解加工装置は、図2に示すように、ワ
ーク20とこのワーク20の加工面に倣った電極面を有
する電極10とを静止した電解液30中で所定の間隙で
対設させ、その極間にパルス状電流を加えることによっ
て、ワーク20表面から金属イオンを溶出させ、ワーク
20の光沢面加工を行う構造となっている。
2. Description of the Related Art As shown in FIG. 2, in an electrolytic processing apparatus, a work 20 and an electrode 10 having an electrode surface following the processed surface of the work 20 are opposed to each other at a predetermined gap in a stationary electrolyte 30. By applying a pulsed current between the electrodes, metal ions are eluted from the surface of the work 20 and a glossy surface of the work 20 is processed.

【0003】従来、この電解加工の電極には、電極の製
作が容易で、電極消耗が無い黒鉛が使用されている。し
かしながら、黒鉛はもともとポーラスな構造であるか
ら、電解加工時に電解液が電極の気孔内に浸透し、使用
後、乾燥によって電解液成分が結晶となって析出してく
るので、電極の洗浄に手間がかかり、又、析出物による
作業環境の悪化が問題となっていた。
Heretofore, graphite has been used as the electrode for electrolytic processing because graphite is easy to manufacture and does not wear out the electrode. However, since graphite originally has a porous structure, the electrolytic solution penetrates into the pores of the electrode during electrolytic processing, and after use, the electrolytic solution component becomes crystalline and precipitates out after use. And the deterioration of the working environment due to precipitates has been a problem.

【0004】これに対し、出願人は、電極となる黒鉛基
材の表面に緻密な熱分解炭素の被膜を形成した電解加工
用電極を提案している(特願平3−333478号)。
On the other hand, the applicant has proposed an electrode for electrolytic processing in which a dense pyrolytic carbon film is formed on the surface of a graphite base material serving as an electrode (Japanese Patent Application No. 3-333478).

【0005】[0005]

【発明が解決しようとする課題】しかしながら、複雑な
形態のワークを電解加工する場合には、電極自体の形状
も複雑となるため、電極基材と熱分解炭素被膜の熱膨張
差によって応力が発生することにより、熱分解炭素の被
膜と黒鉛基材との剥離が発生しやすくなり、さらに剥離
によってその部分からの加工液の浸透が発生し、これが
電極寿命を短くする原因になるといった問題があった。
However, when a workpiece having a complicated form is subjected to electrolytic processing, the shape of the electrode itself is also complicated, so that stress is generated due to a difference in thermal expansion between the electrode substrate and the pyrolytic carbon film. By doing so, there is a problem that the pyrolytic carbon film and the graphite substrate are liable to peel off, and the peeling causes the penetration of the working fluid from that portion, which shortens the life of the electrode. Was.

【0006】本発明は、このような事情に鑑みなされた
ものであり、その目的とするところは、熱分解炭素の被
膜を有する黒鉛製電解加工用電極において、被膜が剥離
しにくく長寿命の黒鉛製電解加工用電極を提供すること
にある。
SUMMARY OF THE INVENTION The present invention has been made in view of such circumstances, and an object of the present invention is to provide a graphite electrode having a pyrolytic carbon film, which is hardly peeled off and has a long life. An object of the present invention is to provide an electrode for electrolytic processing.

【0007】[0007]

【課題を解決するための手段】すなわち、上記目的を達
成するための手段として、請求項1記載の発明は、「黒
鉛基材の表面に熱分解炭素の被膜を形成して成る黒鉛製
電解加工用電極であって、前記黒鉛基材の20℃〜40
0℃における平均熱膨張係数が1.3×10 -6/℃〜
6.0×10-6/℃であることを特徴とする黒鉛製電解
加工用電極」を、その要旨としている。
That is, the above object has been achieved.
As means for achieving this, the invention described in claim 1 is based on “black
Made of graphite with a pyrolytic carbon coating formed on the surface of a lead substrate
An electrode for electrolytic processing, wherein the graphite substrate has a temperature of 20 ° C to 40 ° C.
The average coefficient of thermal expansion at 0 ° C. is 1.3 × 10 -6/ ℃ ~
6.0 × 10-6/ ° C, characterized by graphite electrolysis
"Electrode for processing" is the gist of this.

【0008】また、請求項2記載の発明は、「黒鉛基材
の表面に熱分解炭素の被膜を形成して成る黒鉛製電解加
工用電極であって、前記黒鉛基材の20℃〜400℃に
おける平均熱膨張係数が1.3×10 -6/℃〜6.0×
10-6/℃であり、かつ水銀圧入法で測定される75オ
ングストローム〜75000オングストロームの径を有
する微細気孔の占める容積が0.02cc/g〜0.1
5cc/gであることを特徴とする黒鉛製電解加工用電
極」を、その要旨としている。
[0008] Further, the invention according to claim 2 is based on a "graphite base material".
Graphite electrolytic coating with pyrolytic carbon coating
A working electrode, wherein the graphite substrate has a temperature of 20 ° C. to 400 ° C.
Average thermal expansion coefficient of 1.3 × 10 -6/ ° C-6.0x
10-6/ ° C and 75 ° C measured by the mercury intrusion method.
With a diameter of ~ 75,000 Angstroms
The volume occupied by the micropores is 0.02 cc / g to 0.1.
A graphite electroforming electrode characterized by being 5 cc / g.
The pole is the gist.

【0009】この黒鉛製電解加工用電極の黒鉛基材は、
石炭系あるいは石油系のタール、ピッチ、天然黒鉛、人
造黒鉛等の材料から得ることができる。熱分解炭素の被
膜を黒鉛基材の表面に形成させる方法としては、各種化
学蒸着法により行うことができる。通常は、黒鉛基材を
加熱し、メタン、プロパン等の炭化水素ガスを高温の黒
鉛基材に接触させることにより反応させ、黒鉛基材の表
面に熱分解炭素を生成させる方法による。熱分解炭素の
被膜は、十分な気密性が得られる範囲としては厚みが1
0μm以上であり、好ましくは、20μm〜500μm
の範囲がよい。
[0009] The graphite base material of the graphite electrode for electrolytic processing is
It can be obtained from materials such as coal-based or petroleum-based tar, pitch, natural graphite, and artificial graphite. As a method of forming a pyrolytic carbon film on the surface of a graphite substrate, various chemical vapor deposition methods can be used. Usually, a method is used in which a graphite substrate is heated and reacted by bringing a hydrocarbon gas such as methane or propane into contact with a high-temperature graphite substrate to generate pyrolytic carbon on the surface of the graphite substrate. The pyrolytic carbon coating has a thickness of 1 as a range in which sufficient airtightness can be obtained.
0 μm or more, preferably 20 μm to 500 μm
Range is good.

【0010】[0010]

【作用】請求項1記載の黒鉛製電解加工用電極にあって
は、黒鉛基材の平均熱膨張係数が1.3×10-6/℃〜
6.0×10-6/℃の範囲内であり、熱分解炭素の熱膨
張係数に対応している。このため、黒鉛基材と熱分解炭
素の被膜との熱膨張差によって被膜が剥離するのが防止
される。
In the graphite electrode for electrolytic processing according to claim 1, the graphite substrate has an average coefficient of thermal expansion of 1.3 × 10 -6 / ° C.
The range is 6.0 × 10 −6 / ° C., which corresponds to the coefficient of thermal expansion of pyrolytic carbon. For this reason, peeling of the coating due to the difference in thermal expansion between the graphite substrate and the coating of pyrolytic carbon is prevented.

【0011】請求項2記載の黒鉛製電解加工用電極にあ
っては、さらに黒鉛基材の水銀圧入法で測定される75
オングストローム〜75000オングストロームの径を
有する微細気孔の占める容積が0.02cc/g〜0.
15cc/gとしていることから黒鉛基材の気孔内に熱
分解炭素被膜の一部が入り込んでアンカー効果が生じ黒
鉛基材と熱分解炭素の被膜との密着性が高められ、被膜
がさらに剥離しにくくなる。
[0011] In the graphite electrode for electrolytic processing according to the second aspect, the graphite base material is further measured by a mercury intrusion method.
The volume occupied by micropores having a diameter of from Angstroms to 75000 Angstroms is from 0.02 cc / g to 0.
Since it is 15 cc / g, a part of the pyrolytic carbon film enters into the pores of the graphite base material, and an anchor effect is generated, whereby the adhesion between the graphite base material and the pyrolytic carbon film is enhanced, and the film is further peeled. It becomes difficult.

【0012】黒鉛基材に存在する微細気孔の占める容積
を上記範囲内としたのは、0.02cc/g未満では十
分なアンカー効果が得られず、又、0.20cc/gを
超えると基材表面の凹凸が大きくなり、そこに被覆され
る膜の微小な部位で応力が集中し、被膜が剥離しやすく
なるからである。
The reason why the volume occupied by the fine pores present in the graphite base material is set within the above range is that if the volume is less than 0.02 cc / g, a sufficient anchor effect cannot be obtained. This is because unevenness on the surface of the material increases, and stress concentrates on minute portions of the film to be coated thereon, and the coating is easily peeled.

【0013】[0013]

【実施例】以下、実施例について説明する。 実施例 黒鉛基材として等方性黒鉛を使用し、図1に示すよう
に、100mm×200mm×50mmの大きさの複数
の凸部を電極面10aに形成した電解加工用電極を作製
し、これを反応炉内に入れ、減圧下1400℃に加熱
し、水素ガスをキャリアとしてメタンを供給し、黒鉛基
材11上に50μmの熱分解炭素被膜12を形成させた
電解加工用電極10を作製した。これをサンプル1〜3
とし、それらの物性を表1に示す。
Embodiments will be described below. Example An isotropic graphite was used as a graphite base material, and as shown in FIG. 1, an electrode for electrolytic processing was formed by forming a plurality of protrusions having a size of 100 mm × 200 mm × 50 mm on an electrode surface 10 a. Was placed in a reaction furnace, heated to 1400 ° C. under reduced pressure, methane was supplied using hydrogen gas as a carrier, and an electrolytic processing electrode 10 in which a 50 μm pyrolytic carbon film 12 was formed on a graphite substrate 11 was produced. . Samples 1-3
And their physical properties are shown in Table 1.

【0014】比較例 黒鉛基材として等方性黒鉛を使用し、実施例と同じ形
状,同じ処理方法により黒鉛基材上に50μmの熱分解
炭素被膜を形成させた電解加工用電極を作製した。これ
をサンプル4、5とし、それらの物性を表1に示す。
COMPARATIVE EXAMPLE An electrode for electrolytic processing was prepared by using isotropic graphite as a graphite base material and forming a 50 μm pyrolytic carbon film on the graphite base material in the same shape and the same processing method as in the embodiment. These were designated as Samples 4 and 5, and their physical properties are shown in Table 1.

【0015】 (平均熱膨張係数は20℃〜400℃における平均値、
微細気孔容積は水銀圧入法で測定される75オングスト
ローム〜75000オングストロームの径を有する微細
気孔の占める容積)
[0015] (The average coefficient of thermal expansion is an average value at 20 ° C to 400 ° C,
The micropore volume is the volume occupied by micropores having a diameter of 75 Å to 75000 Å measured by a mercury intrusion method)

【0016】上記サンプル1〜5について、それぞれ電
解加工装置にセットし、硝酸ナトリウムの電解液中、電
流密度40A/cm2、ワーク材としてSKD−61を
使用し、あらかじめRma×30μmまで放電加工によ
り加工をしたワークを用い、取り代100μmの電解加
工による仕上げ処理を10回繰り返した。
Each of the samples 1 to 5 was set in an electrolytic processing apparatus, and a current density of 40 A / cm 2 was used in an electrolytic solution of sodium nitrate, SKD-61 was used as a work material, and a discharge machining was performed to Rma × 30 μm in advance. Using the processed workpiece, a finishing treatment by electrolytic processing with a machining allowance of 100 μm was repeated 10 times.

【0017】その結果、サンプル1、2、3について
は、熱分解炭素被膜の剥離、クラックの発生もなく、電
解液成分の結晶の析出も認められなかった。サンプル4
については、熱分解炭素被膜の剥離がみられ、電解液成
分の結晶の析出が認められた。サンプル5については、
熱分解炭素被膜の剥離は見られなかったがクラックが発
生し、電解液成分の結晶の析出が認められた。
As a result, with respect to Samples 1, 2, and 3, there was no peeling of the pyrolytic carbon coating and no cracks, and no precipitation of the electrolyte component crystal was observed. Sample 4
With regard to, peeling of the pyrolytic carbon film was observed, and precipitation of crystals of the electrolyte component was observed. For sample 5,
No peeling of the pyrolytic carbon film was observed, but cracks occurred, and precipitation of crystals of the electrolyte component was observed.

【0018】[0018]

【発明の効果】以上説明したように、請求項1又は請求
項2記載の発明は、複雑な形態のワークを電解加工する
場合、熱膨張の差により熱分解炭素の被膜と黒鉛基材と
の剥離が発生しやすくなり、さらに剥離によってその部
分から加工液の浸透が発生し、これが電極寿命を短くす
る原因になっていた従来の問題を解決したものであっ
て、請求項1記載の発明にあっては、熱膨張の面から熱
分解炭素の被膜の剥離を防止する構造とし、請求項2記
載の発明にあっては、さらに黒鉛基材の微細気孔容積の
面から、熱分解炭素の被膜の密着性を高める構造とし、
これによって、表面に熱分解炭素の被膜を有する黒鉛製
電解加工用電極について被膜が剥離しにくく長寿命の電
極を提供することができる。
As described above, according to the first or second aspect of the present invention, when a workpiece having a complicated form is subjected to electrolytic machining, a difference in thermal expansion between a pyrolytic carbon film and a graphite base material is caused. The present invention solves the conventional problem that peeling is likely to occur, and furthermore, the working fluid penetrates from the part due to the peeling, and this has caused the problem of shortening the electrode life. In this case, the pyrolytic carbon coating is prevented from peeling off from the surface of thermal expansion. In the invention according to claim 2, the pyrolytic carbon coating is further reduced from the viewpoint of the fine pore volume of the graphite base material. With a structure that enhances the adhesion of
This makes it possible to provide a long-life electrode in which the coating is hardly peeled off from the graphite electrolytic processing electrode having a coating of pyrolytic carbon on the surface.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る黒鉛製電解加工用電極の一実施例
を模式的にあらわした断面図である。
FIG. 1 is a cross-sectional view schematically showing an embodiment of a graphite electrode for electrolytic processing according to the present invention.

【図2】電解加工装置の概要を示す正面図である。FIG. 2 is a front view showing the outline of the electrolytic processing apparatus.

【符号の説明】[Explanation of symbols]

10 電極 11 黒鉛基材 12 熱分解炭素被膜 DESCRIPTION OF SYMBOLS 10 Electrode 11 Graphite base material 12 Pyrolytic carbon coating

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6,DB名) B23H 3/06 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) B23H 3/06

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 黒鉛基材の表面に熱分解炭素の被膜を形
成して成る黒鉛製電解加工用電極であって、前記黒鉛基
材の20℃〜400℃における平均熱膨張係数が1.3
×10-6/℃〜6.0×10-6/℃であることを特徴と
する黒鉛製電解加工用電極。
1. An electrode for electrolytic processing of graphite comprising a graphite substrate having a pyrolytic carbon film formed on the surface thereof, wherein the graphite substrate has an average coefficient of thermal expansion at 20 ° C. to 400 ° C. of 1.3.
Graphite electrochemical machining electrode which is a × 10 -6 /℃~6.0×10 -6 / ℃.
【請求項2】 黒鉛基材の表面に熱分解炭素の被膜を形
成して成る黒鉛製電解加工用電極であって、前記黒鉛基
材の20℃〜400℃における平均熱膨張係数が1.3
×10-6/℃〜6.0×10-6/℃であり、かつ水銀圧
入法で測定される75オングストローム〜75000オ
ングストロームの径を有する微細気孔の占める容積が
0.02cc/g〜0.15cc/gであることを特徴
とする黒鉛製電解加工用電極。
2. An electrode for electrolytic processing of graphite comprising a graphite substrate having a pyrolytic carbon film formed on the surface thereof, wherein the graphite substrate has an average coefficient of thermal expansion at 20 ° C. to 400 ° C. of 1.3.
A × 10 -6 /℃~6.0×10 -6 / ℃, and the volume occupied by fine pores having a diameter of 75 Å ~75000 angstroms as measured by mercury porosimetry is 0.02cc / g~0. An electrode for electrolytic processing made of graphite, which is 15 cc / g.
JP4092720A 1992-04-13 1992-04-13 Graphite electrolytic electrode Expired - Fee Related JP2876095B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4092720A JP2876095B2 (en) 1992-04-13 1992-04-13 Graphite electrolytic electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4092720A JP2876095B2 (en) 1992-04-13 1992-04-13 Graphite electrolytic electrode

Publications (2)

Publication Number Publication Date
JPH05285735A JPH05285735A (en) 1993-11-02
JP2876095B2 true JP2876095B2 (en) 1999-03-31

Family

ID=14062292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4092720A Expired - Fee Related JP2876095B2 (en) 1992-04-13 1992-04-13 Graphite electrolytic electrode

Country Status (1)

Country Link
JP (1) JP2876095B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10101040A1 (en) * 2001-01-11 2002-07-25 Wacker Chemie Gmbh Device and method for producing a polycrystalline silicon rod
US7658902B2 (en) * 2006-09-12 2010-02-09 Graftech International Holdings Inc. Low CTE highly isotropic graphite
JP2021004150A (en) * 2019-06-26 2021-01-14 イビデン株式会社 Carbon-based composite material
JP2021017391A (en) * 2019-07-23 2021-02-15 イビデン株式会社 Carbon composite material
JP2021183553A (en) * 2020-05-22 2021-12-02 イビデン株式会社 Carbon composite member

Also Published As

Publication number Publication date
JPH05285735A (en) 1993-11-02

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