KR102613795B1 - Method and apparatus for scanning object using light with adjusted line width - Google Patents

Abstract

In order to adjust the linewidth of light used to scan an object, raw light is emitted through a laser light source into a diffraction grating, and the raw light is reflected through the diffraction grating to diffract into a plurality of lights having different orders, and first A target light having a primary order among a plurality of lights is reflected to a diffraction grating through a directional mirror, the target light is reflected to a laser light source through the diffraction grating, and the line width of the raw light emitted by the laser light source due to the target light is It is regulated.

Description

Object scanning method and device using light with adjusted line width {METHOD AND APPARATUS FOR SCANNING OBJECT USING LIGHT WITH ADJUSTED LINE WIDTH}

The following embodiments relate to technology for scanning an object, and specifically, technology for scanning an object using laser light whose line width is adjusted.

In Korean Patent Publication No. 2020-0120056 (published on October 21, 2029), instead of the light source and the device that moves the light source used in general scanners, a sensor of the same size as a transparent display that is transparent enough to transmit reflected light is used. By using it in a scanner, a transparent display and sensor function together as a light source and a device that moves the light source, eliminating the need for a device that moves the light source, increasing the scanning speed and stability of scanning, and reducing the size of the scanner. there is.

One embodiment may provide a method of adjusting the line width of laser light and scanning an object using the laser light with the adjusted line width.

One embodiment may provide an electronic system that adjusts the linewidth of laser light and scans an object using the laser light with the adjusted linewidth.

However, technical challenges are not limited to the above-mentioned technical challenges, and other technical challenges may exist.

According to one aspect, a method of adjusting the linewidth of light, performed by an optical linewidth adjusting device, includes emitting raw light through a laser light source to a diffraction grating, reflecting the raw light through the diffraction grating to each other. Diffracting a plurality of lights having different orders, reflecting a target light having a first order among the plurality of lights through a mirror having a first direction to the diffraction grating, and It includes reflecting the target light to the laser light source through a diffraction grating, and the line width of the raw light emitted by the laser light source is adjusted by the target light.

The method of adjusting the linewidth of light further includes emitting second raw light whose linewidth is adjusted compared to the raw light through the laser light source, and the second raw light can be used as light for scanning an object. there is.

The method of adjusting the linewidth of light further includes adjusting a direction of the mirror from the first direction to a second direction, and providing the second raw light to an imaging device through the mirror having the second direction. It can be included.

The maximum intensity of the second source light may be stronger than the maximum intensity of the source light.

According to another aspect, an optical linewidth adjusting device for controlling the linewidth of light includes a memory in which a program for adjusting the linewidth of light is recorded, and a processor that executes the program, wherein the program generates raw light through a laser light source. emitting light to a diffraction grating, diffracting the raw light into a plurality of lights having different orders by reflecting the raw light through the diffraction grating, and diffracting the raw light into a plurality of lights having different orders, Reflecting a target light having a first order among the lights onto the diffraction grating, and reflecting the target light into the laser light source through the diffraction grating, wherein the laser beam is generated by the target light. The line width of the raw light emitted by the light source can be adjusted.

According to another aspect, an object scanning method performed by an electronic system includes adjusting a first linewidth of raw light emitted by a laser light source to a second linewidth through a first optical system, wherein the second raw light is Having a line width of 2 -, separating the second raw light transmitted through a second optical system into first light and second light through a beam splitter, irradiating the first light to an object, Receiving first reflected light, which appears as the first light is reflected by the object, through a camera - the first reflected light is transmitted to the camera through a third optical system - and the second light through a fourth optical system receiving through the camera, photographing an interference pattern that appears on the camera due to interference between the first reflected light and the second light, and obtaining depth information about the object based on the interference pattern. This may include scanning the object.

The step of adjusting the first linewidth of the raw light emitted by the laser light source to the second linewidth through the first optical system includes emitting the raw light through the laser light source to a diffraction grating, the diffraction grating diffracting the raw light into a plurality of lights having different orders by reflecting the raw light through a mirror, diffracting the target light having a first order among the plurality of lights through a mirror having a first direction. Reflecting with a diffraction grating, reflecting the target light to the laser light source through the diffraction grating, emitting second raw light whose linewidth is adjusted compared to the raw light through the laser light source, and the mirror It may include adjusting the direction from the first direction to the second direction.

The sum of the distance that the first light travels from the beam splitter to the object and the distance that the first reflected light travels from the object to the camera is the distance that the second light travels from the beam splitter to the camera It may be equal to the sum of .

Receiving the second light through the camera through the fourth optical system may include adjusting the distance that the second light travels from the beam splitter to the camera through a translation stage (TS). You can.

The maximum intensity of the second source light may be stronger than the maximum intensity of the source light.

According to another aspect, an electronic device in an electronic system includes a memory in which a program for scanning an object is recorded, and a processor for executing the program, wherein the program includes a first linewidth of raw light emitted by a laser light source. Controlling the electronic system to adjust a second linewidth through the first optical system, wherein the second raw light has the second linewidth, causes the second raw light transmitted through the second optical system to be transmitted through a beam splitter. Controlling the electronic system to separate into first light and second light through a splitter, controlling the electronic system to irradiate the first light to an object, the first light is reflected by the object Controlling the electronic system so that the appearing first reflected light is received through the camera, wherein the first reflected light is transmitted to the camera through a third optical system, and wherein the second light is transmitted through the camera through a fourth optical system. controlling the electronic system to receive, controlling the electronic system to photograph an interference pattern appearing on the camera due to interference between the first reflected light and the second light, and based on the interference pattern, A step is performed to control the electronic system so that the object is scanned by obtaining depth information about the object.

A method of adjusting the linewidth of laser light and scanning an object using the laser light with the adjusted linewidth may be provided.

An electronic system can be provided that adjusts the linewidth of laser light and scans an object using the laser light with the adjusted linewidth.

1 is a configuration diagram of an electronic system according to an embodiment.
Figure 2 is a configuration diagram of an optical line width adjustment device according to an example.
Figure 3 is a flowchart of a method for adjusting the linewidth of light according to one embodiment.
FIG. 4 illustrates a method of reflecting a target light having a primary order among a plurality of lights with a diffraction grating according to an example.
5 is a flow diagram of a method of providing second raw light to an imaging device according to an example.
6 shows a linewidth of raw light and a linewidth of second raw light according to an example.
Figure 7 shows an imaging device according to one embodiment.
Figure 8 is a flowchart of a method for scanning an object according to one embodiment.
Figure 9 is a flowchart of a method for scanning the internal space of an object according to an example.
10 is a configuration diagram of an electronic device according to an embodiment.

Specific structural or functional descriptions of the embodiments are disclosed for illustrative purposes only and may be changed and implemented in various forms. Accordingly, the actual implementation form is not limited to the specific disclosed embodiments, and the scope of the present specification includes changes, equivalents, or substitutes included in the technical idea described in the embodiments.

Terms such as first or second may be used to describe various components, but these terms should be interpreted only for the purpose of distinguishing one component from another component. For example, a first component may be named a second component, and similarly, the second component may also be named a first component.

When a component is referred to as being “connected” to another component, it should be understood that it may be directly connected or connected to the other component, but that other components may exist in between.

Singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as “comprise” or “have” are intended to designate the presence of the described features, numbers, steps, operations, components, parts, or combinations thereof, and are intended to indicate the presence of one or more other features or numbers, It should be understood that this does not exclude in advance the possibility of the presence or addition of steps, operations, components, parts, or combinations thereof.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by a person of ordinary skill in the art. Terms as defined in commonly used dictionaries should be interpreted as having meanings consistent with the meanings they have in the context of the related technology, and unless clearly defined in this specification, should not be interpreted in an idealized or overly formal sense. No.

Hereinafter, embodiments will be described in detail with reference to the attached drawings. In the description with reference to the accompanying drawings, identical components will be assigned the same reference numerals regardless of the reference numerals, and overlapping descriptions thereof will be omitted.

1 is a configuration diagram of an electronic system according to an embodiment.

According to one aspect, the electronic system 100 may include an optical line width adjustment device 110, an imaging device 120, and an electronic device 130. For example, electronic system 100 may be a digital holographic microscope system.

The optical linewidth adjusting device 110 may adjust the linewidth of the raw light of the laser light source used and provide the second raw light with the adjusted linewidth to the imaging device 120 . The optical linewidth adjusting device 110 and the method of adjusting the linewidth of light using the optical linewidth adjusting device 110 will be described in detail below with reference to FIGS. 2 to 6 .

The imaging device 120 may scan an object using the second raw light provided from the optical linewidth adjusting device 110. The method for scanning an object is described in detail below with reference to FIGS. 7 to 9.

The electronic device 130 may control the operations of the optical linewidth adjustment device 110 and the imaging device 120. That is, the electronic system 100 can be controlled by the electronic device 130.

Figure 2 is a configuration diagram of an optical line width adjustment device according to an example.

According to one aspect, the optical linewidth adjustment device 110 may include a laser light source 210, a collimation lens 220, a diffraction grating 230, and a mirror 240. The laser light source 210, collimating lens 220, diffraction grating 230, and mirror 240 may be referred to as the first optical system.

The laser light source 210 may emit raw light. The optical characteristics of the raw light source may vary depending on the diode of the laser light source 210. For example, the optical properties may be the wavelength of light and the linewidth of light. In a method of scanning an object using a laser light source 210 and an interferometer, the characteristics of the light affect the resolution at which the object is scanned.

The aiming lens 220 can cause the raw light emitted by the laser light source 210 to travel in parallel.

The diffraction grating 230 can reflect the collimated raw light and diffract it into a plurality of lights having different orders. For example, the diffraction grating 230 can be positioned at a specific reflection angle relative to the laser light source 210 and the collimating lens 230. The plurality of lights having different orders generated by the diffraction grating 230 will be described in detail below with reference to FIG. 4 .

The mirror 240 may reflect at least some of the plurality of lights reflected by the diffraction grating 230 in a preset direction. The setting direction of the mirror can be adjusted by the electronic device 130. For example, in the process of adjusting the line width of light, the direction of the mirror 240 may be set to the first direction. The first direction of the mirror 240 is described in detail below with reference to FIG. 3.

As another example, in the process of scanning an object, the direction of the mirror 240 may be set to the second direction. An example shown in FIG. 2 is a case where the direction of the mirror 240 is set to the second direction. Laser light 211 emitted by the laser light source 210 may be provided to the imaging device 120 by the mirror 240 set in the second direction.

Figure 3 is a flowchart of a method for adjusting the linewidth of light according to one embodiment.

The steps 310 to 340 below may be performed by the electronic device 130 controlling the optical line width adjustment device 110.

In step 310, the electronic device 130 may emit raw light to the diffraction grating 230 through the laser light source 210. The raw light may have a first linewidth. The first linewidth may be the linewidth of unadjusted raw light. Raw light may be transmitted to the diffraction grating 230 through the collimating lens 220.

In step 320, the electronic device 130 may reflect the raw light through the diffraction grating 230 to diffract it into a plurality of lights having different orders. For example, the plurality of lights may include 0th order, 1st order, -1st order, 2nd order, -2nd order, 3rd order, and -3rd order. Each of the plurality of lights may be reflected from the surface of the diffraction grating 230 at different angles. For example, the 0th order light may have a reflection angle corresponding to the incident angle of the raw light, and the corresponding lights having the closest reflection angle based on the 0th order light may be the 1st order light and the -1st order light, respectively. It can be a madness of order.

In step 330, the electronic device 130 reflects the target light having the first order among the plurality of lights having different orders through the mirror 240 having the first direction to the diffraction grating 230.

The target light reflected by the diffraction grating 230 is directed back to the laser light source 210 by the diffraction grating 230, and the laser light source 210 may be pumped by the target light. Light emitted by the laser light source 210 pumped by the target light may have characteristics different from those of the original raw light. For example, the wavelength of light may vary. As another example, the line width of light may be changed to become narrower.

The laser light source 210 may be pumped again based on the first pumped light. As the laser light source 210 is pumped, the line width of the raw light emitted by the laser light source 210 may gradually narrow. If the linewidth of the narrowed raw light falls within a preset linewidth, the raw light can be used for object scanning. As the line width of light becomes narrower, the resolution of the scanned object can increase.

When the laser light source 210 is sufficiently pumped (i.e., when the linewidth of the raw light emitted by the laser light source 210 is narrower than the preset linewidth), light with an adjusted linewidth may be provided to the imaging device 120. . A method of providing light with an adjusted line width to the imaging device 120 will be described in detail below with reference to FIGS. 5 and 6.

FIG. 4 illustrates a method of reflecting a target light having a primary order among a plurality of lights with a diffraction grating according to an example.

The laser light source 210 emits raw light 410. Raw light 410 may be light emitted before the laser light source 210 is sufficiently pumped. The raw light 41 may be diffracted through the diffraction grating 230 into a plurality of lights 411, 412, 413, 414, and 415 having different orders. Light 411 has zero order, light 412 has first order, light 413 has -1 order, light 414 has second order, and light 415 has -Can have secondary order.

Among the plurality of lights 411, 412, 413, 414, and 415, the characteristics of the light 411 having the 0th order are not changed through the optical system. The characteristics of light 412, 413, 414, and 415 other than the light 411 having the 0th order may be changed through an optical system. For example, the linewidth of light can be adjusted. Among the lights 412, 413, 414, and 415, the 1st order light 412 and the -1st order light with the highest light intensity may be used to pump the laser light source 210.

The mirror 240 may be placed in a position to reflect at least a portion of the plurality of lights 411, 412, 413, 414, and 415, and in particular, may reflect the first order light 412 to the diffraction grating 230. It can be set to a first direction that can be reflected. The first order light 412 may be referred to as target light.

The reflected light 412 appearing as the light 412 is reflected by the mirror 230 is transmitted to the diffraction grating 230, and the reflected light 421 appearing by the diffraction grating 230 is transmitted to the laser light source 210. do. The laser light source 210 is pumped by the reflected light 421, and the laser light source 210 may emit second raw light whose light characteristics are adjusted compared to the raw light 410.

5 is a flow diagram of a method of providing second raw light to an imaging device according to an example.

According to one aspect, the steps 510 to 530 below may be performed after the step 340 described above with reference to FIG. 3 is performed.

In step 510, the electronic device 130 emits second raw light whose linewidth is adjusted compared to the raw light through the laser light source 210. The linewidth of the second raw light may be less than a preset linewidth.

*In step 520, the electronic device 130 adjusts the direction of the mirror 230 from the first direction to the second direction. The second direction may be a direction in which the second raw light reflected by the mirror 230 is directed to the imaging device 120.

In step 530, electronic device 130 provides second raw light to imaging device 120 through mirror 230 having a second direction.

6 shows a linewidth of raw light and a linewidth of second raw light according to an example.

The raw light emitted by the laser light source 210 before being pumped has a wavelength a at the first intensity b of the peak point and has a linewidth 610.

The second raw light emitted by the laser light source 210 pumped using light of the first order of the raw light has a wavelength at the second intensity c of the peak point and has a linewidth 620. The second intensity (c) of the second raw light may be greater than the first intensity (b), and the line width 620 may be narrower than the line width 610. The greater the intensity of light used to scan an object and the narrower the line width, the better the resolution of the scanned object.

Figure 7 shows an imaging device according to one embodiment.

According to one aspect, the imaging device 120 includes a second optical system 710, a beam splitter 720, a third optical system 730, a camera 750, and a fourth optical system 760.

The second optical system 710 may include a wave plate 711, an objective lens 712, a pin-hole 713, and a lens 714. The second optical system 710 transmits the second raw light having the second linewidth provided from the optical linewidth adjusting device 110 to the beam splitter 720.

Beam splitter 720 splits the second raw light into first light and second light. The separated first light and second light may travel through different optical paths.

The third optical system 730 through which the first light and the first reflected light travel may include a wave plate 731 and beam splitters 732 and 733. The first light may be irradiated to the object 740 through the third optical system 730.

The first reflected light, which appears when the first light is reflected by the object 740, may be transmitted to the camera 750 through the third optical system 730. The first reflected light may be received through the camera 750. The path along which the first light and the first reflected light travel from the beam splitter 720 toward the camera 750 may be defined as the first path.

The fourth optical system 760 may include a beam splitter 761 and a mirror 762. The mirror 762 may include a translation stage (TS). TS can adjust the distance of the second path along which the second light travels from the beam splitter 720 to the camera 750.

The sum of the distance that the first light travels from the beam splitter 720 to the object 740 and the distance that the first reflected light travels from the object 740 to the camera 750 (i.e., the distance of the first path) is, It may be equal to the sum of the distance that the second light travels from the beam splitter 720 to the camera 750 (that is, the distance of the second path). Depending on the depth of the object to be scanned, the position of the mirror 762 can be adjusted through TS.

Figure 8 is a flowchart of a method for scanning an object according to one embodiment.

Steps 810 to 870 below may be performed by the electronic device 130 controlling the electronic system 100.

In step 810, the electronic device 130 adjusts the first linewidth of the raw light emitted by the laser light source 210 to the second linewidth through the first optical system. The second raw light may have a second linewidth. Step 810 may include steps 310 to 340 described above with reference to FIG. 3 and steps 510 to 530 described above with reference to FIG. 5 .

In step 820, the electronic device 130 separates the second raw light transmitted through the second optical system 710 into first light and second light through the beam splitter 720.

In step 830, the electronic device 130 irradiates the first light to the object 740 through the third optical system 730.

In step 840, the electronic device 130 receives first reflected light, which appears when the first light is reflected by the object 740, through the camera 750. The first reflected light may be transmitted to the camera 750 through a third optical system.

In step 850, the electronic device 130 receives the second light through the camera 750 through the fourth optical system 760. For example, the distance that the second light travels from the beam splitter 720 to the camera 750 is adjusted through the TS, so that the difference between the phase of the first reflected light received by the camera 750 and the phase of the second light is adjusted. It can happen.

In general, a holographic interference pattern generated by the interference of divided laser lights is strongly generated when the travel distances of each laser light are the same. Accordingly, when part of the second distance that the second light travels through the second path is adjusted to correspond to the first distance that the first light and the first reflected light travel through the first path, a relatively clear A graphical interference pattern can be obtained.

In step 860, the electronic device 130 photographs an interference pattern that appears on the camera 750 due to interference between the first reflected light and the second light.

The first reflected light and the second light transmitted through different paths may interfere in the plane of the camera 750, and an interference pattern indicated by the interference may be photographed or imaged through the camera 750.

In step 870, the electronic device 130 scans the object 750 by obtaining depth information about the object 750 based on the interference pattern.

According to one aspect, the scan result may appear as a three-dimensional image of the internal space of the object 750. Internal space can be expressed through depth ranges. For example, the maximum depth of the interior space can be revealed as a result of the scan.

Figure 9 is a flowchart of a method for scanning the internal space of an object according to an example.

According to one aspect, step 870 described above with reference to FIG. 8 may include steps 910 and 920 below.

In step 910, the electronic device 130 obtains depth information about the internal space of the object 750 (eg, a through hole (TSV) of the object 750) based on the interference pattern.

Signals within the interference pattern may include light intensity information and phase information, and among them, depth information about the internal space of the object may be obtained based on the phase information.

In step 920, the electronic device 130 scans the internal space of the object 750 based on depth information about the internal space of the object 750.

10 is a configuration diagram of an electronic device according to an embodiment.

The electronic device 130 may include a communication unit 1010, a processor 1020, and a memory 1030.

The communication unit 1010 is connected to the processor 1020 and the memory 1030 to transmit and receive data. The communication unit 1010 can be connected to other external devices to transmit and receive data. The expression to transmit and receive “A” may refer to transmitting and receiving “information or data representing A.”

The communication unit 1010 may be implemented as a circuitry within the electronic device 130. For example, the communication unit 1010 may include an internal bus and an external bus. As another example, the communication unit 1010 may be an element that connects the electronic device 130 and an external device. The communication unit 1010 may be an interface. The communication unit 1010 may receive data from an external device and transmit the data to the processor 1020 and the memory 1030.

The processor 1020 processes data received by the communication unit 1010 and data stored in the memory 1030.

A “processor” may be a data processing device implemented in hardware that has a circuit with a physical structure for executing desired operations. For example, the intended operations may include code or instructions included in the program. For example, data processing devices implemented in hardware include microprocessors, central processing units, processor cores, multi-core processors, and multiprocessors. , ASIC (Application-Specific Integrated Circuit), and FPGA (Field Programmable Gate Array).

The processor 1020 executes computer-readable code (e.g., software) stored in memory (e.g., memory 1030) and instructions triggered by the processor 1020.

The memory 1030 stores data received by the communication unit 1010 and data processed by the processor 1020. For example, the memory 1030 may store programs (or applications, software). The stored program may be a set of syntaxes that are coded and executable by the processor 1020 to control the electronic system 100 to scan an object.

According to one aspect, the memory 1030 may include one or more volatile memory, non-volatile memory, random access memory (RAM), flash memory, a hard disk drive, and an optical disk drive.

The memory 1030 stores a set of instructions (eg, software) that operates the electronic device 130. A set of instructions for operating the electronic device 130 is executed by the processor 1020. For example, the memory 1030 may be a register designed to perform preset operations, and is not limited to the described embodiment.

The embodiments described above may be implemented with hardware components, software components, and/or a combination of hardware components and software components. For example, the devices, methods, and components described in the embodiments may include, for example, a processor, a controller, an arithmetic logic unit (ALU), a digital signal processor, a microcomputer, and a field programmable gate (FPGA). It may be implemented using a general-purpose computer or a special-purpose computer, such as an array, programmable logic unit (PLU), microprocessor, or any other device capable of executing and responding to instructions. The processing device may execute an operating system (OS) and software applications running on the operating system. Additionally, a processing device may access, store, manipulate, process, and generate data in response to the execution of software. For ease of understanding, a single processing device may be described as being used; however, those skilled in the art will understand that a processing device includes multiple processing elements and/or multiple types of processing elements. It can be seen that it may include. For example, a processing device may include multiple processors or one processor and one controller. Additionally, other processing configurations, such as parallel processors, are possible.

Software may include a computer program, code, instructions, or a combination of one or more of these, which may configure a processing unit to operate as desired, or may be processed independently or collectively. You can command the device. Software and/or data may be used on any type of machine, component, physical device, virtual equipment, computer storage medium or device to be interpreted by or to provide instructions or data to a processing device. , or may be permanently or temporarily embodied in a transmitted signal wave. Software may be distributed over networked computer systems and stored or executed in a distributed manner. Software and data may be stored on a computer-readable recording medium.

The method according to the embodiment may be implemented in the form of program instructions that can be executed through various computer means and recorded on a computer-readable medium. A computer-readable medium may include program instructions, data files, data structures, etc., singly or in combination, and the program instructions recorded on the medium may be specially designed and constructed for the embodiment or may be known and available to those skilled in the art of computer software. It may be possible. Examples of computer-readable recording media include magnetic media such as hard disks, floppy disks, and magnetic tapes, optical media such as CD-ROMs and DVDs, and magnetic media such as floptical disks. -Includes optical media (magneto-optical media) and hardware devices specifically configured to store and execute program instructions, such as ROM, RAM, flash memory, etc. Examples of program instructions include machine language code, such as that produced by a compiler, as well as high-level language code that can be executed by a computer using an interpreter, etc.

The hardware devices described above may be configured to operate as one or multiple software modules to perform the operations of the embodiments, and vice versa.

As described above, although the embodiments have been described with limited drawings, those skilled in the art can apply various technical modifications and variations based on this. For example, the described techniques are performed in a different order than the described method, and/or components of the described system, structure, device, circuit, etc. are combined or combined in a different form than the described method, or other components are used. Alternatively, appropriate results may be achieved even if substituted or substituted by an equivalent.

Therefore, other implementations, other embodiments, and equivalents of the claims also fall within the scope of the claims described below.

100: Electronic system
110: Optical line width adjustment device
120: imaging device
130: electronic device

Claims (12)

delete delete delete delete delete delete An object scanning method, performed by an electronic system, includes:
adjusting a first linewidth of raw light emitted by a laser light source to a second linewidth through a first optical system, wherein the second raw light has the second linewidth;
Separating the second raw light transmitted through a second optical system into first light and second light through a beam splitter;
irradiating the first light to an object;
Receiving first reflected light, which appears as the first light is reflected by the object, through a camera - the first reflected light is transmitted to the camera through a third optical system;
Receiving the second light through the camera through a fourth optical system;
photographing an interference pattern appearing on the camera due to interference between the first reflected light and the second light; and
Scanning the object by obtaining depth information about the object based on the interference pattern.
Including,
How to scan an object.
In clause 7,
The step of adjusting the first linewidth of the raw light emitted by the laser light source to the second linewidth through the first optical system,
emitting the raw light through the laser light source to a diffraction grating;
diffracting the raw light into a plurality of lights having different orders by reflecting the raw light through the diffraction grating;
reflecting a target light having a first order among the plurality of lights to the diffraction grating through a mirror having a first direction;
reflecting the target light to the laser light source through the diffraction grating;
emitting second raw light whose line width is adjusted compared to the raw light through the laser light source; and
Adjusting the direction of the mirror from the first direction to the second direction
Including,
How to scan an object.
In clause 7,
The sum of the distance that the first light travels from the beam splitter to the object and the distance that the first reflected light travels from the object to the camera is the distance that the second light travels from the beam splitter to the camera equal to the sum of,
How to scan an object.
In clause 7,
The step of receiving the second light through the camera through the fourth optical system,
Adjusting the distance that the second light travels from the beam splitter to the camera through a translation stage (TS)
Including,
How to scan an object.
In clause 7,
the maximum intensity of the second source light is stronger than the maximum intensity of the source light,
How to scan an object.
Electronic devices within an electronic system include:
A memory in which a program for scanning objects is recorded; and
Processor that executes the above program
Including,
The above program is,
controlling the electronic system to adjust a first linewidth of raw light emitted by a laser light source to a second linewidth through a first optical system, wherein the second raw light has the second linewidth;
Controlling the electronic system to separate the second raw light transmitted through a second optical system into first light and second light through a beam splitter;
controlling the electronic system to irradiate the first light to an object;
Controlling the electronic system so that first reflected light, which appears when the first light is reflected by the object, is received through a camera, wherein the first reflected light is transmitted to the camera through a third optical system;
controlling the electronic system to receive the second light through the camera through a fourth optical system;
controlling the electronic system to capture an interference pattern that appears on the camera due to interference between the first reflected light and the second light; and
Controlling the electronic system to scan the object by obtaining depth information about the object based on the interference pattern.
To perform,
Electronic devices.