KR102580165B1 - Degasing module for of manufacture Vapor chamber - Google Patents

Abstract

The present invention relates to a degassing device for processing and removing gas from a tube used for injection of working fluid when manufacturing a vapor chamber. The present invention injects the working fluid into the inside of the vapor chamber, and allows leaks to be checked simultaneously when removing gas by automatically sealing the tube in a process of removing the tube from the vapor chamber in a process of processing the tube. Thus, the present invention can increase the quality reliability of manufactured vapor chambers. The vapor chamber tube processing device includes a loading unit; a drive unit; an upper pressing unit; a lower pressing unit; and a degassing unit.

Description

Vapor chamber tube processing device {Degasing module for of manufacture Vapor chamber}

The present invention relates to a degassing device for processing and removing gas from a tube used for injection of a working fluid when manufacturing a vapor chamber.

In general, vapor chambers are manufactured as flat-type devices or circular heat pipe-type devices. In order to achieve slimness through thinness, vapor chambers are mainly manufactured as flat-type devices.

This vapor chamber is a type of heat pipe capable of efficiently transporting heat and is equipped to perform a heat dissipation function.

The vapor chamber, which is usually manufactured as a flat device, forms a sealed hollow between the upper and lower plates, and a working fluid such as water or alcohol is injected into the hollow, and the working fluid is injected into the hollow of the upper and lower plates. On the top, wicks with a porous structure are installed in a pair structure on the upper and lower sides to form an evaporation section and a condensation section to support the movement of the working fluid using the capillary phenomenon of osmotic pressure and to exert a heat dissipation function.

In other words, when the working fluid is heated by a heat source, evaporation occurs in the evaporation part on the wick side, and the working fluid in the gas phase moves to the condensation part on the wick side, which is a low temperature area, and the gas phase existing in the low temperature area. The working fluid is cooled and condensed. Through this, the heat received by the working fluid in the evaporation unit is released to the outside of the vapor chamber.

At this time, the condensed working fluid moves by capillary action on the (wick) side, which has a porous structure, and returns to the evaporation unit, and the working fluid returning to the evaporation unit repeats the process of evaporating again and moving to the low temperature area.

In this way, the vapor chamber exerts a heat dissipation function by transporting heat using latent heat through repeated evaporation and condensation of the working fluid. It dissipates heat using the phase change between the liquid and gas on the working fluid. This is the way to do it.

Conventional vapor chambers made of such flat-type devices are widely used for cooling electronic devices such as smartphones.

Meanwhile, the vapor chamber for the above structure and function uses a brazing welding method that melts and attaches the materials of the upper and lower plates at a high temperature when joining to seal the upper and lower plates, and a diffusion bonding method used in semiconductor bonding. It is mainly used.

However, most of the welding or joining methods used in the above prior art are performed in a high temperature environment and take a certain amount of working time, and the vapor chamber produced is oxidized on the upper and lower plates or the metal material is softened. There are problems with side durability, quality deterioration, high processing costs, and it is not suitable for mass production.

In addition, the process of injecting the working fluid involves a manual process using a fine syringe, which reduces the efficiency of the process. To prevent oxidation, the upper and lower plates are installed inside the vacuum room. Because the installation process and the process of vacuuming the interior are essential, the work process is long, and processing costs are high due to the use of vacuum room equipment, and mass production is difficult.

In particular, the automated process of injecting working fluid into the vapor chamber and discharging the internal gas (degassing) is difficult, which has emerged as a problem of process delay.

Korean Patent Publication No. 2015-0091905 Korean Patent Publication No. 2021-0138333

The present invention was devised to solve the above-mentioned problem, and the purpose of the present invention is to automatically inject the working fluid into the inside of the vapor chamber, in the process of processing the tube, and in the process of removing the tube from the vapor chamber. The purpose is to provide a processing device that can improve the quality reliability of the vapor chamber being manufactured by sealing the tube body and simultaneously checking the gas removal (degassing) process and leakage.

As a means to solve the above-described problem, an embodiment of the present invention provides a device as shown in FIGS. 1 to 13, but is provided with at least one seating portion 311 for seating the vapor chamber 10. A loading unit 310 including a loading unit (L) and a driving unit 312 that moves the loading unit (L) forward or backward; A driving unit (M) that moves the loading unit along the first guide rail (G); When the loading unit 310 is disposed at the lower part, an upper pressing unit 320 including a pressing plate 321 on which a pressing part 322 that primarily presses each of the vapor chambers is formed at the upper part; Approach the tube body 18 from the lower direction where the loading unit 310 is disposed and press one end of the tube body through a pair of pressure tips (t1, t2) provided opposite to each other in the upper pressing unit. Lower pressing unit 330 for compression; In a state in which the upper pressing unit pressurizes the vapor chamber, a degassing unit 340 coupled to the tube 18 of the vapor chamber and applying a suction force to intake gas through the intake portion 343; comprising a. , to provide a vapor chamber tube processing device.

In addition, in the present invention, the degassing unit 340 performs compression of the tube 18 with the upper and lower pressing units 320 and 330 while the degassing unit 340 applies suction force. A vapor chamber tube processing device is operated to continuously maintain the suction power of the degassing unit 340 during the compression process of the pair of pressure tips (t1, t2) and to determine whether there is leakage. to be able to provide it.

Furthermore, in the present invention, the loading unit 310 includes a vapor chamber having a mesh body 12 in which a metal upper plate and a lower plate made of a conductive material are combined, and the working fluid is absorbed in the internal receiving space (S); The tube connection portion 16 at the distal end of the vapor chamber 10 is implemented as an assembly connected to the vapor chamber main body 11, the vapor chamber is seated at the top, and one end of the tube is arranged to protrude to the outside. , to provide a vapor chamber tube processing device.

In this case, the upper pressing unit 320 includes a pressing unit 322 that is disposed to correspond to the arrangement position of the vapor chamber 10 and performs pressing by contacting the upper surface of the vapor chamber 10; a buffer shaft 344 disposed above the pressing unit 322 to apply pressure and elastic force to the pressing unit; It can be implemented as a vapor chamber tube processing device that includes a pressure plate 321 that applies pressure from the top to the bottom of the buffer shaft 344.

In addition, in an embodiment of the present invention, the degassing unit 340 includes an intake front end 343 that is fitted to the tube body; To provide a vapor chamber tube processing device comprising a vacuum intake unit 342 that applies intake force through the intake front end, and a second driving unit 345 that moves the intake front end and the vacuum intake unit. do.

According to an embodiment of the present invention, the process of automatically sealing the tube and removing gas in the process of injecting the working fluid into the interior of the vapor chamber and removing the tube from the vapor chamber in the processing process of the tube body. This has the effect of increasing the quality reliability of the vapor chamber being manufactured by simultaneously checking for leaks.

Figure 1 is a schematic diagram conceptually showing the manufacturing process of a vapor chamber according to the present invention, and Figure 2 is a diagram showing an overall top plan view of the vapor chamber manufacturing apparatus according to an embodiment of the present invention.
Figures 3 and 4 show a perspective conceptual diagram and a main sectional view of the dispenser module that leads the process of injecting the working fluid into the vapor chamber among the vapor chamber manufacturing devices in the present invention.
Figure 5 shows a device (hereinafter referred to as 'this device') that performs degassing to remove the gas inside the vapor chamber after injecting the working fluid into the vapor chamber, among the vapor chamber manufacturing devices of the present invention. This shows the concept of squint.).
Figures 6 and 7 show enlarged views and cross-sectional conceptual diagrams of main parts of Figure 5.
8 to 14 are diagrams for explaining the operating process of the present invention.

The advantages and features of the present invention and methods for achieving them will become clear by referring to the embodiments described in detail below along with the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided so that the disclosure will be thorough and complete and so that the spirit of the invention can be sufficiently conveyed to those skilled in the art.

The terms used in this application are only used to describe specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, terms such as “comprise” or “have” are intended to designate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but are not intended to indicate the presence of one or more other features. It should be understood that this does not exclude in advance the possibility of the existence or addition of elements, numbers, steps, operations, components, parts, or combinations thereof.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by a person of ordinary skill in the technical field to which the present invention pertains. Terms defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related technology, and should not be interpreted as having an ideal or excessively formal meaning unless explicitly defined in the present application. No.

1. Vapor chamber manufacturing process and filling of working fluid

Figure 1 is a schematic diagram conceptually showing the manufacturing process of a vapor chamber according to the present invention, and Figure 2 is an overall top plan view of the vapor chamber manufacturing apparatus (hereinafter referred to as 'the present invention') according to an embodiment of the present invention. This is a drawing. Figures 3 and 4 show a perspective conceptual diagram and a main sectional view of the dispenser module that leads the process of injecting the working fluid into the vapor chamber among the vapor chamber manufacturing devices in the present invention.

Overall, as shown in FIG. 1, the present invention is a vaporizer having a mesh body 12 in which a metal upper plate and a lower half made of conductive material are combined, and the working fluid is absorbed into the internal receiving space (S). To provide a device structure for manufacturing a chamber. These devices form modules for each function, and are interconnected to enable loading and manufacturing of vapor chambers to be implemented in a unified system within one system device.

As a configuration for this, the present invention is implemented as an assembly in which a tube connection portion 16 is connected to the vapor chamber main body 11 at the distal end of the vapor chamber 10, and includes a loading module 100 for loading the assembly, the By aligning the assembly flowing in from the loading module 100, the dispenser needle is guided to the tube body 18 and the working fluid (DI water) is automatically injected into the vapor chamber main body 11 through the tube body 18. A dispenser module 200, which performs a process of sealing the tube body portion of the assembly that receives the working fluid from the dispenser module 200 through pressurization and exhausting the internal gas, a tube pressurizing and degassing module 300 ), For the assembly in which the tube body is sealed through the tube pressurizing and degassing module 300, a press bar 510 is used to press and press the connection portion of the tube connection portion 16 and the main body portion 11 from above and below. It includes a pressing module 500, a welding module 600 that performs welding on the area pressed by the press bar 510, and a cutting module 700 that cuts the welded area of the assembly via the welding module 600. ) so that it can be configured to include.

Referring to FIGS. 1, 3, and 4, the structure of FIG. 3 shows the structure of the dispenser module 200, and the dispenser module 200 includes a body (M) in which a receiving space (S) is formed, and A vapor chamber (VC: 10) having a tube body (18) partially interpolated into the body (M) and communicating with the receiving space (S), and at least one seating portion (211) for seating the vapor chamber. A loading unit 210 including a loading unit (L) and a driving unit 212 that moves the loading unit (L) forward or backward, arranged to be spaced apart from the loading unit 210, and the loading unit ( 210) approaches the injection unit 220, which includes a guide portion 221 into which the tube body 18 is interpolated, is disposed on the opposite side of the loading unit 210, and approaches the injection unit 220. Thus, it can be configured to include a dispenser unit 230 including a probe 231 interpolated into the guide portion 211 and a working fluid supply portion 232.

In this structure, with the plurality of vapor chambers 10 and the tube body 18 seated on the seating portion 211, the loading unit 210 moves toward the injection unit 220 located at the center (primary movement). Thus, the tube body 18 is allowed to enter the inside of the injection unit 220, and then the injection unit 220 and the loading unit 210 move together for a second time toward the dispenser unit disposed on the opposite side, and then the dispenser The unit 230 performs a third movement approaching the injection unit 220, so that the probe 231 enters the inside of the injection unit 220 and enters by fitting into the tube body whose position has already been set. and then operates by supplying the working fluid.

When the working fluid is filled inside the vapor chamber, each component is moved to its original position in the reverse order of the operation method for injection, and the structure of the vapor chamber 10 and the tube body compresses the tube portion and seals it. The process of degassing the internal gas is carried out.

2. Processing and degassing process for the vapor chamber tube structure

Figure 5 shows a device (hereinafter referred to as 'this device') that performs degassing to remove the gas inside the vapor chamber after injecting the working fluid into the vapor chamber, among the vapor chamber manufacturing devices of the present invention. ) is a perspective conceptual diagram, and FIG. 6 is an enlarged view of the main part of FIG. 5, and FIG. 7 is a cross-sectional conceptual diagram of FIG. 6.

Referring to Figures 5 to 7, this device includes a loading part (L) having at least one seating part 311 for seating the vapor chamber 10, and a device for moving the loading part (L) forward or backward. A loading unit 310 including a driving unit 312, a driving unit (M) that moves the loading unit along the first guide rail (G), and when the loading unit 310 is disposed at the bottom, it is first loaded from the top. An upper pressing unit 320 having a pressing plate 321 on which a pressing part 322 for pressurizing each of the vapor chambers is formed, approaches the tube body 18 from the lower direction where the loading unit 310 is disposed. A lower pressing unit 330 presses and compresses one end of the tube through a pair of pressing tips (t1, t2) provided to face each other on the upper pressing unit, a state in which the upper pressing unit presses the vapor chamber. It may be configured to include a degassing unit 340 that is coupled to the tube body 18 of the vapor chamber and applies suction force to suck in gas through the intake unit 343.

That is, the loading unit (L) filling the vapor chamber tube assembly (hereinafter referred to as 'assembly') with the working fluid, such as the structure of Figure 1 (a) in Figures 3 and 4, is formed in the structure of Figure 5. You will enter this device.

The loading unit 310 has the same structure as the structure described above in FIGS. 3 and 4, and specifically, a metal upper and lower plate made of conductive material are combined, and the working fluid is absorbed into the internal receiving space (S). A seating portion 311 on which the vapor chamber 10 including the mesh body 12 is seated is provided. The vapor chamber is an upper seating portion 311, and the loading unit 310 enters the apparatus in an automated process in a configuration in which one end of the tube body is arranged to protrude to the outside. (In the present invention, the loading unit ( 310) is defined as a concept encompassing the loading part (L), the seating part 311, and the driving part, which are plate-shaped structures in which the seating part is formed.)

In the center of the device, an upper pressing unit 320 and a lower pressing unit 330 are arranged to be spaced apart from each other, and the upper pressing unit 320 and the lower pressing unit 330 are based on the central frame (F), It is implemented to perform up and down movement.

The upper pressing unit 320 is arranged to correspond to the arrangement position of the vapor chamber 10, and includes a pressing part 322 that contacts the upper surface of the vapor chamber 10 to perform pressing, and the pressing part ( It is configured to include a buffer shaft 344 disposed on the upper part of the buffer shaft 322 to apply pressure and elastic force to the pressing portion, and a pressure plate 321 to apply pressure from the top to the bottom of the buffer shaft 344. Through this, when the loading unit (L) moves and aligns in the work space between the upper pressing unit 320 and the lower pressing unit 330, the upper pressing unit 320 descends to pressurize the entire surface of the vapor chamber. By ensuring that the operation is preceded, the vapor chamber is prevented from shaking or leaving when subsequent processes such as the combination of the degassing unit 340 and the gas degassing process are performed, thereby increasing process stability.

In particular, the pressing force applied downward from the pressing plate 321 is transmitted to the pressing part 322 through the buffer shaft 344, and the pressing part 322 is manufactured to correspond to the shape of the vapor chamber 10. Thus, it is possible to pressurize the entire upper surface of the designated vapor chamber 10 uniformly, and at the same time, solve the problem of the vapor chamber 10 being damaged by applying excessive pressure through the elastic buffer shaft 344. Let it happen.

In addition, as shown in Figure 7, in the case of the upper pressing unit 320, a first pressing tip (t1) structure arranged in an upright structure in the downward direction can be disposed at one end. This is disposed in a position opposite to the second pressing tip (t2) disposed in the lower pressing unit 330, which will be described later, so that the lower pressing unit 330 moves upward, and is connected to the lower part of the loading unit (L). In the case of contact, the second pressure tip (t2) and the first pressure tip (t1) approach each other with the tube body 18 as the center, so that the designated position of the tube body 18 can be compressed and sealed. do.

The lower pressing unit 330 is disposed below the upper pressing unit 220 and has a lower pressing plate 331 raised by a raising unit 332, and has a protruding structure on the upper part of the pressing plate. The formed second pressure tip (t2) structure can be placed. As described above, the second pressure tip (t2) is preferably arranged to engage with the first pressure tip (t1) (the tip of the tip is disposed in a position where the tips can be in contact with each other).

As shown in FIGS. 6 and 7, the degassing unit 340 is disposed on the side of the work space where the upper pressing unit 320 and the lower pressing unit 330 are disposed.

The degassing unit 340 includes an intake front end 343 that is fitted to the tube body 18, and a vacuum intake unit 342 that applies intake force through the intake front end 343. ), and a second driving unit 345 that moves the intake front end 343 and the vacuum intake unit 342.

The intake front end 343 is configured to apply suction pressure through a groove structure, and is in contact with the end of the tube body 18, which will be described later, to perform a degassing process by intake pressure inside the vapor chamber. Allows you to perform. This means that the pressure applied from the vacuum pump (not shown) is transmitted through the vacuum intake part 342 in communication with the connection part 341, and finally, the vacuum intake pressure is transmitted to the inside of the tube through the intake front end 343. , so that the degassing process can be performed. Preferably, the intake front end portion 343 is implemented as a hole structure with a wedge-shaped cross section, as shown in FIG. 13, so that the end of the tube body 18 can be easily interpolated.

Hereinafter, the implementation process of the device will be described by applying FIGS. 8 to 13, based on the main configuration of the device shown in FIGS. 5 to 7.

First, as shown in FIG. 5, an assembly of the vapor chamber 10 and the tube body 18 mounted on the loading unit 310 is disposed.

Thereafter, as shown in FIGS. 8 and 9, the loading unit (L) of the loading unit 310 moves (moves in the z direction) to the work space where the upper pressing unit 320 and the lower pressing unit 340 are placed. (Figure 9 is a cross-sectional view of the main part of Figure 8.)

Thereafter, as shown in FIG. 10, the upper pressing unit 320 descends and presses the upper surface of the vapor chamber 10, which is disposed on the seating portion of the loading portion (L), through the pressing portion 322. Pressurize each to maintain a fixed state.

Thereafter, the degassing unit 330 moves to approach the end of the tube body 18, and moves until the intake front end 343 and the end of the tube body 18 come into contact. When the end of the tube body 18 passes through the intake front end 343 and is inserted into the inside, the degassing unit stops. Afterwards, vacuum suction begins through the vacuum suction unit 342.

At the same time, as shown in FIG. 12, the lower pressing unit 330 rises and comes into contact with the lower part of the loading unit (L) to maintain a constant pressing force. At the same time, a pair of pressure tips (t1, t2) provided in each of the upper pressing unit 320 and the lower pressing unit 340 contact the tube body 18 so that the edge of the tube body 18 can be compressed. do.

In this process, while the degassing unit 330 is applying suction force, the tube body 18 is compressed by the upper and lower pressing units 320 and 340, and the pair of pressing tips t1 and t2 ) During the compression process, the suction power of the degassing unit 340 is continuously maintained, so that leakage can be determined. Finally, when degassing is no longer achieved, it is determined that there is no leak, and the pressing process is terminated.

Afterwards, as shown in FIGS. 13 and 14, a process of returning each component to its original position is performed in the reverse order of the progress process. In particular, first, the degassing unit 330 retreats (a), and then the lower pressing unit 340 equipped with the second pressing tip (t2) returns to its original position (b), and the upper pressing The unit 320 rises and returns to its original position (c), and finally, the loading unit 310 returns to its original position (d).

Through this process, gas is degassed from the 'assembly' structure that injects the working fluid into the vapor chamber, and at the same time, the tube is compressed and sealed, and a leak test is performed to check the integrity of the seal.

Thereafter, as described above in FIG. 1, the connection portion between the tube and the body portion 11 of the vapor chamber is pressed with a press, then the portion is laser welded and a cutting process is performed to complete the vapor chamber. do.

Through the configuration of this device, the process of automatically sealing the tube and removing gas in the process of injecting the working fluid into the inside of the vapor chamber, in the process of processing the tube, and in the process of removing the tube from the vapor chamber. The advantage of being able to increase the quality reliability of the vapor chamber being manufactured can be realized by simultaneously checking for leaks.

As described above, the technical idea of the present invention has been described in detail in the preferred embodiments, but the preferred embodiments described above are for explanation and not limitation. As such, a person skilled in the art will understand that various embodiments are possible through combination of embodiments of the present invention within the scope of the technical idea of the present invention.

100: Loading module
200: Dispenser module
300: Tube pressurization and degassing module
310: loading unit
320; Upper pressing unit
330: Lower pressing unit
340: Degassing unit
400: Heating module
500: Pressing module
600: Welding module
700: Cutting module
800: Inspection module
900: Unloading module

Claims (5)

A metal upper plate and lower half made of conductive material are combined, a mesh body 12 through which the working fluid is absorbed is provided in the internal receiving space S, and a tube connection portion 16 is provided at the end of the vapor chamber 10 to form the vapor chamber main body. In the apparatus for processing a structure including a tube body (18) formed on a portion (11), the distal end of which is fixed to the tube connection portion (16), and the end opposite the distal end protrudes to the outside,
A loading unit 310 including a loading unit (L) having at least one seating part 311 for seating the vapor chamber 10, and a driving unit 312 that moves the loading unit (L) forward or backward. ; A driving unit (M) that moves the loading unit along the first guide rail (G); When the loading unit 310 is disposed at the lower part, an upper pressing unit 320 having a pressing plate 321 on which a pressing part 322 is formed to primarily press each of the vapor chambers 10 from the upper part; Approach the tube body 18 from the lower direction where the loading unit 310 is disposed and press the tube body through a pair of pressure tips (t1, t2) provided opposite to each other on the upper pressing unit 320. A lower pressing unit 330 that pressurizes and compresses one end of (18); In a state where the upper pressing unit 320 pressurizes the vapor chamber 10, a degassing unit 340 is coupled to the tube body 18 and applies a suction force to intake gas through the intake portion 343. ); includes,
The degassing unit 340 includes an intake front end 343 that is fitted into the tube body 18; A vacuum intake unit 342 that applies intake force through the intake front end 343; It includes a second driving unit 345 that moves the intake front end 343 and the vacuum intake unit 342, and while the degassing unit 340 is applying suction force, the upper pressing unit 320 ) and the lower pressing unit 330 to compress the tube body 18.
During the compression process of the pair of pressure tips (t1, t2), the suction force of the degassing unit 340 is continuously maintained and driven to determine whether there is leakage.
Vapor chamber tube processing device.
delete delete In claim 1,
The upper pressing unit 320,
A pressurizing unit 322 that is disposed to correspond to the arrangement position of the vapor chamber 10 and performs pressurization by contacting the upper surface of the vapor chamber 10;
A buffer shaft 344 disposed above the pressing part 322 and applying pressure and elastic force to the pressing part 322;
A pressure plate 321 that applies pressure from the top to the bottom of the buffer shaft 344;
Consisting of,
Vapor chamber tube processing device.
delete