KR102575977B1 - Apparatus for Diagnosis of Pressure Sensor - Google Patents

Abstract

The present invention includes an upper housing extending from the bottom to the top and having an upper air receiving groove through which air flows into the interior, and an upper through hole penetrating into the upper air receiving groove from the upper surface, and an upper air receiving groove of the upper housing. An air dispersion module is located inside and distributes air to the lower part of the upper air receiving groove, and is coupled to the lower part of the upper housing to form a pressure forming space with the upper air receiving groove, and a middle air receiving hole where the pressure sensor is located. Disclosed is a pressure sensor diagnostic device comprising an intermediate spacer including an intermediate spacer, a lower housing sealing the lower portion of the intermediate air receiving hole, and a load cell module including a load cell exposed to the inside of the intermediate air receiving hole from the upper surface of the lower housing.

Description

Pressure sensor diagnostic device {Apparatus for Diagnosis of Pressure Sensor}

The present invention relates to a pressure sensor diagnostic device that diagnoses the presence or absence of an abnormality in a pressure sensor.

A pressure sensor is a sensor that measures pressure applied in a vertical or horizontal direction to a plane. Pressure sensors can be formed in various shapes depending on the purpose of measuring pressure and the shape of the measurement object.

Meanwhile, a flat panel display module such as a liquid crystal display device or an organic light emitting diode display device may include various coating layers formed on a flat substrate such as a glass substrate. The coating layer may be formed by a coating process such as a sputtering process or a plasma enhanced chemical vapor deposition (PECVD) process. The coating process may be performed in a coating device such as a sputtering device or a chemical vapor deposition device. The coating device includes a process chamber maintained in vacuum, an electrostatic chuck located inside the process chamber, and a coating material supply module.

Recently, the method of supporting the glass substrate in the coating device has been changed from a method using a conventional fixing pin to a method using an electrostatic chuck. That is, the coating device seats the flat substrate on the upper surface of the electrostatic chuck and then fixes the flat substrate using the chucking force of the electrostatic chuck. The coating device is required to stably fix the flat substrate to an electrostatic chuck to prevent the flat substrate from moving during the coating process. In order for the electrostatic chuck to stably fix a flat substrate, it is necessary to maintain the chucking force of the electrostatic chuck above a certain level. The chucking force of the electrostatic chuck can be measured using a pressure sensor formed in the form of a film. For example, the pressure sensor is located between the glass substrate and the electrostatic chuck and can measure the chucking force applied when the electrostatic chuck operates.

Additionally, the pressure sensor requires a diagnostic device to check whether the chucking force is appropriately measured. However, a diagnostic device for diagnosing the film-type pressure sensor has not yet been commercialized.

The purpose of the present invention is to provide a pressure sensor diagnostic device that can diagnose a pressure sensor using pneumatic pressure.

A pressure sensor diagnostic device according to an embodiment of the present invention positions a pressure sensor inside a pressure forming space where pressure is formed by gas, and diagnoses whether the pressure sensor senses pressure while supplying the gas. It is characterized by

In addition, the pressure sensor diagnostic device includes a load cell module exposed to pressure together with the pressure sensor in the pressure forming space, and can sense pressure from the load cell module to provide a standard for diagnosis of the pressure sensor. there is.

In addition, the pressure sensor diagnostic device of the present invention includes an upper housing extending from the bottom to the top and having an upper air receiving groove through which air flows into the interior, and an upper through hole penetrating into the upper air receiving groove from the upper surface; An air dispersion module located inside the upper air receiving groove of the upper housing to disperse the air to the lower part of the upper air receiving groove, and a pressure forming space coupled to the lower part of the upper housing and together with the upper air receiving groove It forms an intermediate spacer having an intermediate air receiving hole where the pressure sensor is located, a lower housing that seals the lower part of the intermediate air receiving hole, and a load cell exposed to the inside of the intermediate air receiving hole from the upper surface of the lower housing. It is characterized by having a load cell module.

In addition, the air dispersion module is formed in the shape of a pillar, is coupled to the upper through hole of the upper housing, and is formed in the shape of an air inlet block and a disk having a passage through which air flows into the upper part of the upper air receiving groove to introduce the air. It is coupled to the bottom of the block and may include an air distribution plate having a plurality of air injection holes penetrating from the upper surface to the lower surface.

In addition, the air inlet block includes a block vertical passage formed at a predetermined depth from the top to the bottom, and at least two block horizontal passages connected to a lower part of the block vertical passage and penetrating the outer peripheral surface of the air inlet block, A plurality of air injection holes are formed to be spaced apart from each other in the circumferential direction based on the center of the air distribution plate at a predetermined interval from the center to the outer end, and are formed to increase in diameter from the center to the outside of the air distribution plate. You can.

In addition, the air intake block includes a block vertical passage penetrating from the upper surface to the lower surface and at least two block horizontal passages penetrating from the inner peripheral surface to the outer peripheral surface of the block vertical passage, and the plurality of air injection holes are provided in the air distribution plate. They are formed to be spaced apart from each other in the circumferential direction based on the center at a predetermined interval from the center to the outer end, and may be formed so that the diameter increases from the center to the outside of the air distribution plate.

In addition, the pressure sensor diagnostic device is made of an elastic material and may further include an elastic pressure plate positioned between the lower surface of the upper housing and the upper surface of the intermediate spacer to block the lower portion of the upper air receiving groove.

In addition, the elastic pressure plate divides the pressure forming space into an upper pressure space and a lower pressure space by the air supplied to the upper air receiving groove, and is transformed into the upper pressure space into the interior of the middle air receiving hole, thereby forming the lower housing. It can be in contact with the upper surface of .

Additionally, the elastic pressure plate may be fixed by having its central area coupled to the central area of the lower surface of the air distribution plate.

In addition, the lower housing extends downward from the upper surface, and includes a lower cell accommodating groove located inside the intermediate air accommodating hole, a ring-shaped lower accommodating step extending outward from the upper part of the lower cell accommodating groove, and the A lower draw-out hole is provided in the lower cell receiving groove through the outer peripheral surface of the lower housing, and the load cell module includes a load cell having a cell central hole in the center and located in the lower cell receiving groove, and an upper surface of the load cell. A cell pressure block exposed to the pressure forming space in contact with a pressure block support plate formed in a ring shape and coupled to the lower receiving step on the outside of the cell pressure plate and connected to a terminal of the load cell, and the lower housing It may include a terminal lead wire drawn out to the outside of the lower housing through the lower lead-out hole.

A pressure sensor diagnostic device according to an embodiment of the present invention can diagnose the presence or absence of an abnormality in a film-type pressure sensor using pneumatic pressure.

Additionally, the pressure sensor diagnostic device of the present invention can diagnose a pressure sensor while applying uniform pressure to the pressure sensor using pneumatic pressure and an elastic pressure plate.

In addition, the pressure sensor diagnostic device of the present invention places the pressure sensor in a closed space and diagnoses the pressure sensor while applying pneumatic pressure, thereby ensuring reliability of diagnosis.

1 is a perspective view of a pressure sensor diagnostic device according to an embodiment of the present invention.
FIG. 2 is a vertical cross-sectional view taken along AA of FIG. 1.
Figure 3 is a perspective view of the air distribution plate of Figure 1.
Figure 4 is a partial enlarged view of B in Figure 1.
Figure 5 is a vertical cross-sectional view of a pressure sensor diagnostic device according to another embodiment of the present invention.
Figure 6 is a top view of a pressure sensor diagnosed by the pressure sensor diagnostic device of the present invention.
Figure 7 is a vertical cross-sectional view of CC of Figure 6.
Figure 8 is a vertical cross-sectional view of DD in Figure 6.
FIG. 9 is a vertical cross-sectional view of the pressure sensor of FIG. 6 in an operating state.
FIG. 10 is a vertical cross-sectional view showing the operation of the pressure sensor diagnostic device of FIG. 5.
FIG. 11 is a schematic diagram showing the operation of the pressure sensor diagnostic device of FIG. 5.
Figure 12 is a vertical cross-sectional view of a pressure sensor diagnostic device according to another embodiment of the present invention.
Figure 13 is a partial enlarged view of “E” in Figure 12.
FIG. 14 is a schematic diagram showing the operation of the pressure sensor diagnostic device of FIG. 12.

Hereinafter, a pressure sensor diagnostic device according to an embodiment of the present invention will be described in detail with reference to the attached drawings.

First, a pressure sensor diagnostic device according to an embodiment of the present invention will be described.

1 is a perspective view of a pressure sensor diagnostic device according to an embodiment of the present invention. FIG. 2 is a vertical cross-sectional view taken along line A-A of FIG. 1. Figure 3 is a perspective view of the air distribution plate of Figure 1. Figure 4 is a partial enlarged view of B in Figure 1.

Referring to FIGS. 1 to 4, the pressure sensor diagnostic device 10 according to an embodiment of the present invention includes an upper housing 100, a middle spacer 200, a lower housing 300, and an air dispersion module 400. and a load cell module 500.

The pressure sensor diagnostic device 10 is a closed space and can place a pressure sensor in the pressure forming space 10a where pressure is formed by injected air and diagnose whether the pressure sensor is appropriately sensing the pressure. . In addition, the pressure sensor diagnostic device 10 positions the load cell module 500 exposed to pressure together with the pressure sensor in the pressure forming space 10a so that the load cell module 500 is exposed to the pressure in the pressure forming space 10a. By sensing, it is possible to provide a standard for diagnosis of a pressure sensor. Additionally, the pressure sensor diagnostic device 10 may correct the measured value of the pressure sensor by comparing it with the pressure measured by the load cell module when the pressure sensor is deformed while being used. The pressure sensor diagnostic device 10 may control the pressure of the pressure forming space 10a by controlling the pressure of air supplied to the pressure forming space 10a. The pressure forming space 10a may be formed in a cylindrical shape to create uniform pressure. Meanwhile, pressure in the pressure forming space 10a may be formed by various gases instead of air. For example, the gas may be an inert gas such as nitrogen (N ₂ ) gas or argon (Ar) gas. Therefore, the present invention will be described below as forming pressure in the pressure forming space 10a using air, but includes forming pressure using gas. The pressure sensor may be in the form of a film with a thin thickness and a small pressure sensing area. Specific embodiments of the pressure sensor will be described later.

The upper housing 100 may include an upper air receiving groove 110 and an upper through hole 120. In addition, the upper housing 100 may further include an upper bolt through hole 130, an upper O-ring groove 140, and an upper O-ring 150. The upper housing 100 may be formed as a block with a predetermined thickness. The upper housing 100 may be formed to a thickness necessary to form an upper air receiving groove 110 and an upper air inlet hole therein. The upper air receiving groove 110 may form a space into which air flows to create pressure. Additionally, a pressure sensor may be located at the bottom of the upper air receiving groove 110. Accordingly, the upper housing 100 can be formed to a thickness that is not deformed by the pressure formed in the upper air receiving groove 110. The upper housing 100 may have a planar shape such as a circular shape or a square shape.

The upper air receiving groove 110 may be formed in a groove shape extending upward from the lower surface of the upper housing 100. That is, the upper air receiving groove 110 may be formed in a groove shape that opens downward within the upper housing 100. The upper air receiving groove 110 may provide a space for receiving air supplied to create pressure therein. That is, the upper air receiving groove 110 may form the upper part of the pressure forming space 10a. The upper air receiving groove 110 may be formed at a predetermined height. The upper air receiving groove 110 may be formed to have a height smaller than the thickness of the upper housing 100. Additionally, the upper air receiving groove 110 may be formed to have an area larger than the area of the pressure sensor and the load cell module 500.

The upper through hole 120 may be formed by penetrating from the upper surface of the upper housing 100 to the inside of the upper air receiving groove 110. The upper through hole 120 may provide a space where a portion of the air dispersion module 400 is coupled. The upper through hole 120 may have a threaded portion formed on its inner peripheral surface.

The upper bolt through hole 130 is spaced outward from the inner surface of the upper air receiving groove 110 and may be formed by penetrating from the upper surface to the lower surface of the upper housing 100. A plurality of the upper bolt through-holes 130 may be spaced apart from each other along the circumferential direction of the upper housing 100. The upper bolt through hole 130 may be formed with an upper through hole step 131 on which the head of the upper bolt is seated. An upper bolt 132 may be inserted and coupled to the upper bolt through hole 130.

The upper O-ring groove 140 may be formed in a ring shape along the upper air receiving groove 110 between the upper air receiving groove 110 and the upper bolt through hole 130 on the lower surface of the upper housing 100. Meanwhile, the upper O-ring groove 140 may be formed on the upper surface of the intermediate spacer 200 instead of the lower surface of the upper housing 100.

The upper O-ring 150 may be inserted and seated in the upper O-ring groove 140. When the upper O-ring 150 is inserted into the upper O-ring groove 140, it may protrude from the lower surface of the upper housing 100 at a predetermined height. The upper O-ring 150 can seal between the lower surface of the upper housing 100 and the upper surface of the intermediate spacer 200.

The intermediate spacer 200 may include an intermediate air receiving hole 210 and an intermediate bolt fastening hole 220. The intermediate spacer 200 may be coupled to the lower part of the upper housing 100. The intermediate spacer 200 may be formed in a ring shape with a predetermined thickness. Meanwhile, although not specifically shown, the intermediate spacer 200 may have an intermediate O-ring groove corresponding to the upper O-ring groove 140 formed on its upper surface. In this case, the upper O-ring groove 140 may be omitted. An upper O-ring 150 may be coupled to the middle O-ring groove.

The intermediate air receiving hole 210 may be formed inside the intermediate spacer 200 by penetrating from the upper surface to the lower surface. The inner diameter of the middle air receiving hole 210 may be the same as the inner diameter of the upper air receiving groove 110. The middle air receiving hole 210 may communicate with the upper air receiving groove 110. Air may flow into the middle air receiving hole 210 from the upper air receiving groove 110. The middle air receiving hole 210, together with the upper air receiving groove 110, may form a pressure forming space 10a in which a pressure sensor is located.

The intermediate bolt fastening hole 220 may be formed to be spaced apart from the inner surface of the intermediate air receiving hole 210 to the outside and penetrate from the upper surface to the lower surface of the intermediate spacer 200. The intermediate bolt fastening hole 220 may be formed at a position corresponding to the upper bolt through hole 130 when the intermediate spacer 200 is coupled to the lower part of the upper housing 100. The intermediate bolt fastening holes 220 may be formed in a number corresponding to the number of upper bolt through holes 130. That is, a plurality of intermediate bolt through-holes may be spaced apart along the circumferential direction of the intermediate spacer 200. The intermediate bolt through hole may have a threaded portion formed on its inner peripheral surface. The intermediate bolt through hole may provide a space into which the lower part of the upper bolt 132 is inserted and screwed.

The lower housing 300 may include a lower cell receiving groove 310 and a lower draw-out hole 320. Additionally, the lower housing 300 may further include a lower O-ring groove 330 and a lower O-ring 340. The lower housing 300 may be formed in the shape of a block or plate having a predetermined thickness. The lower housing 300 may be formed to have a flat upper surface. The lower housing 300 may be coupled to the lower surface of the intermediate spacer 200. Accordingly, the lower housing 300 can shield the lower part of the intermediate air receiving hole 210. Additionally, the lower housing 300 may support a pressure sensor located in the intermediate air receiving hole 210 on its upper surface. That is, the lower housing 300 can support the lower surface of the pressure sensor located in the central area of the upper surface.

Meanwhile, although not specifically shown, the lower housing 300 may be coupled to the upper housing 100 by a separate clamp (not shown). The clamp may couple the upper housing 100 and the lower housing 300 while contacting the upper surface of the upper housing 100 and the lower surface of the lower housing 300. A plurality of the clamps may be coupled while being spaced apart along the circumferential direction of the upper housing 100. Additionally, the lower housing 300 may be coupled to the middle spacer 200 by a separate lower bolt (not shown) in the same way that the upper housing 100 is coupled to the middle spacer 200.

The lower cell receiving groove 310 may be formed in a groove shape extending downward from the upper surface of the lower housing 300. The lower cell receiving groove 310 may be located inside the intermediate air receiving hole 210 when the lower housing 300 is coupled to the lower part of the intermediate spacer 200. The lower cell receiving groove 310 may be formed to accommodate the load cell module 500 therein. That is, the lower cell receiving groove 310 may be formed as a groove having a predetermined depth and inner diameter or width. In addition, the lower cell receiving groove 310 may further include a lower receiving step 311 at the top. The lower receiving step 311 may be formed in a ring shape extending outward from the top of the lower cell receiving groove 310. That is, the lower receiving step 311 may be formed to have a predetermined depth and inner diameter. A portion of the load cell module 500 may be seated on the lower receiving step 311.

The lower draw-out hole 320 may be formed by penetrating from the lower cell receiving groove 310 to the outer peripheral surface of the lower housing 300. The lower drawing hole 320 may provide a path through which the terminal wire of the load cell module 500 is drawn out. The lower draw-out hole 320 may be formed to be open together with the lower surface of the lower housing 300. In this case, the lower draw-out hole 320 can allow the terminal wire of the load cell module 500 to be easily drawn out through the lower lead-out hole 320.

The lower O-ring groove 330 may be formed in a ring shape on the outer side of the intermediate air receiving hole 210 on the upper surface of the lower housing 300 along the circumferential direction of the intermediate air receiving hole 210. Meanwhile, the lower O-ring groove 330 may be formed on the lower surface of the intermediate spacer 200 instead of the upper surface of the lower housing 300.

The lower O-ring 340 may be inserted into and seated in the lower O-ring groove 330. When the lower O-ring 340 is inserted into the lower O-ring groove 330, it may protrude to the upper surface of the lower housing 300 at a predetermined height. The lower O-ring 340 can seal between the upper surface of the lower housing 300 and the lower surface of the intermediate spacer 200.

The air distribution module 400 may include an air inlet block 410 and an air distribution plate 420. The air dispersion module 400 is located inside the upper air receiving groove 110 of the upper housing 100 to allow air to flow uniformly throughout the entire area of the lower part of the upper air receiving groove 110 and the middle air inlet hole. can do.

The air intake block 410 may include a block vertical passage 411 and a block horizontal passage 412. The air inlet block 410 may be provided with a passage through which air flows into the upper part of the upper air receiving groove 110 from the outside. The air intake block 410 may be formed in a pillar shape, such as a cylinder or square pillar. The air inlet block 410 may be formed to have a diameter corresponding to the upper through hole 120 of the upper housing 100. Additionally, the air inlet block 410 may be formed to have a height greater than the height of the upper through hole 120. Additionally, the air inlet block 410 may be formed to have a height smaller than the height of the upper air receiving groove 110. Additionally, the air intake block 410 may have a threaded portion formed on its outer peripheral surface. The air inlet block 410 may be inserted into and coupled to the upper through hole 120. The air inlet block 410 may be screwed to the upper through hole 120. Additionally, the air inlet block 410 may be sealed with the upper through hole 120 by a separate O-ring (not shown).

The block vertical passage 411 may be formed at a predetermined depth in the direction from the top to the bottom of the air inlet block 410. The block vertical passage 411 may be formed so as not to penetrate the lower surface of the air inlet block 410. The block vertical passage 411 is connected to an external pneumatic system and allows air to flow in from the top to the bottom.

The block horizontal passage 412 may be connected to the lower part of the block vertical passage 411 and penetrate the outer peripheral surface of the air inlet block 410. That is, the block horizontal passage 412 has an inner end connected to the block vertical passage 411, extends in the horizontal direction inside the air inlet block 410, and has an outer end open to the outer peripheral surface of the air inlet block 410. You can. At least two block horizontal passages 412 may be formed to be spaced apart along the circumferential direction of the air inlet block 410. The block horizontal passages 412 may preferably be formed in four blocks spaced apart at 90 degree intervals. The block horizontal passage 412 may supply air supplied from the block vertical passage 411 from the bottom of the air inlet block 410 to the outside. At this time, the block horizontal passage 412 can supply air entirely along the circumferential direction of the air inlet block 410.

The air distribution plate 420 may include an air injection hole 421. The air distribution plate 420 is formed in a disk shape and may be formed with a diameter smaller than the inner diameter of the upper air receiving groove 110. The center of the upper surface of the air distribution plate 420 may be coupled to the lower end of the air inlet block 410. Therefore, the air distribution plate 420 is located at the lower part of the upper air receiving groove 110 and can completely block the lower part of the upper air receiving groove 110. At this time, the air distribution plate 420 may be positioned such that its outer circumferential surface is in contact with the inner circumferential surface of the upper air receiving groove 110 or is spaced apart by a predetermined distance. The air distribution plate 420 can ensure that the air sprayed through the block horizontal passage 412 is uniformly distributed throughout the middle air receiving hole 210.

The air injection hole 421 may be formed by penetrating from the upper surface to the lower surface of the air distribution plate 420. The air injection holes 421 may be distributed throughout the entire area of the air distribution plate 420. A plurality of air injection holes 421 may be positioned to be spaced apart from each other in the circumferential direction with respect to the center of the air distribution plate 420. Additionally, a plurality of air injection holes 421 may be formed to be spaced apart from the center at predetermined intervals.

The air injection hole 421 may be formed to increase in diameter from the center of the air distribution plate 420 to the outside. Accordingly, the air distribution plate 420 can ensure that air flowing into the upper surface is uniformly supplied downward.

The load cell module 500 may include a load cell 510, a cell pressure block 520, a pressure block support plate 530, and a terminal lead 540. The load cell module 500 is mounted on the lower housing 300 and the pressure of the pressure forming space 10a can be applied together with the pressure sensor. Accordingly, the load cell module 500 can measure the pressure of the pressure forming space 10a together with the pressure sensor. The load cell module 500 can measure the pressure in the pressure forming space 10a and provide a standard for diagnosing whether the pressure sensor is operating properly.

The load cell 510 may be formed as a general load cell. For example, the load cell 510 may be formed as an overall ring-shaped load cell. Accordingly, the load cell 510 may have a cell central hole 511 penetrating upward and downward in the center. The load cell 510 may be formed as a load cell that measures a pressure range including the measurement pressure range of the pressure sensor. The load cell 510 may be positioned by being inserted into the lower cell receiving groove 310 of the lower housing 300.

The cell pressing block 520 may include a cell coupling bar 521 and a cell pressing plate 522. The upper surface of the cell pressurizing block 520 may be exposed to the pressure forming space 10a while contacting the upper surface of the load cell 510. The cell pressurizing block 520 may shield the load cell 510 from being directly exposed to the pressure forming space 10a and allow the pressure of the pressure forming space 10a to be transmitted to the load cell 510.

The cell coupling bar 521 is formed in a cylindrical shape and can be inserted into the cell central hole 511 of the load cell 510. The cell coupling bar 521 may have an outer diameter smaller than the inner diameter of the cell central hole 511. Additionally, the cell coupling bar 521 may be formed to have a height smaller than the height of the cell central hole 511.

The cell pressure plate 522 may be formed in a disk shape with an outer diameter smaller than that of the load cell 510. The cell pressure plate 522 may be coupled to the top of the cell coupling bar 521. The lower surface of the cell pressure plate 522 may be in contact with the upper surface of the load cell 510. The upper surface of the cell pressure plate 522 may be flush with the upper surface of the lower housing 300. Accordingly, the upper surface of the cell pressure plate 522 may be exposed to the pressure forming space 10a. The cell pressure plate 522 can transmit the pressure of the pressure forming space 10a applied to the upper surface to the load cell 510.

The cell pressure plate 522 may have a pressure step 523 formed along the outer peripheral surface of the upper surface. The pressure step 523 may be formed in a ring shape of the cell pressure plate 522.

The pressure block support plate 530 may be formed in a ring shape with a predetermined thickness. That is, the pressure block support plate 530 may have a block support through hole 531 on the inside. The pressure block support plate 530 may have an outer diameter that corresponds to the inner diameter of the lower receiving step 311. Additionally, the block support through hole 531 may have an inner diameter that corresponds to the outer diameter of the cell pressure plate 522. Additionally, the pressure block support plate 530 may be formed to have a thickness corresponding to the height of the lower receiving step 311. The pressure block support plate 530 may be coupled to the lower receiving step 311 on the outside of the cell pressure plate 522. That is, the cell pressure plate 522 can be inserted into the block support through hole 531. The pressure block support plate 530 may form the same plane as the cell pressure plate 522. The pressure block support plate 530 may support the cell pressure plate 522 of the cell pressure block 520.

The pressure block support plate 530 may have a support protrusion ring 532 formed along the inner peripheral surface. The support protruding ring 532 may be formed in a shape opposite to that of the pressing step 523. Accordingly, the support protruding ring 532 can be combined with the pressing step 523.

The terminal lead lines 540 are lines connected to terminals of the load cell 510. One end of the terminal lead wire 540 is connected to the terminal of the load cell 510, and the other end is drawn out of the lower housing 300 through the lower lead hole 320 of the lower housing 300 and is connected to a measuring device (not shown). city) can be connected to. The terminal leader line 540 may be formed as a general terminal leader line connected to the load cell 510. The terminal lead 450 can transmit the measurement signal measured by the load cell 510 to an external measuring device.

Next, a pressure sensor diagnostic device according to another embodiment of the present invention will be described.

Figure 5 is a vertical cross-sectional view of a pressure sensor diagnostic device according to another embodiment of the present invention.

Referring to FIG. 5, the pressure sensor diagnostic device 20 according to another embodiment of the present invention includes an upper housing 100, an intermediate spacer 200, a lower housing 300, an air dispersion module 400, and a load cell. It may include a module 500 and an elastic pressure plate 600.

The pressure sensor diagnostic device 20 according to another embodiment of the present invention may be formed by further including an elastic pressure plate 600 compared to the pressure sensor diagnostic device 10 according to the embodiment of FIGS. 1 to 3. Therefore, the pressure sensor diagnostic device 20 will be described below with a focus on the elastic pressure plate 600. In addition, the pressure sensor diagnostic device 20 may be assigned the same reference numerals for components that are the same or similar to the pressure sensor diagnostic device 10 of FIGS. 1 to 3 and detailed descriptions may be omitted.

The elastic pressure plate 600 may be provided with an elastic through hole 610. The elastic pressure plate 600 may be made of an elastic material such as rubber or latex. The elastic pressure plate 600 may be formed as a disk having a diameter corresponding to the outer diameter of the upper housing 100. The elastic pressure plate 600 may be located between the lower surface of the upper housing 100 and the upper surface of the intermediate spacer 200. The elastic pressure plate 600 can block the lower part of the upper air receiving groove 110 of the upper housing 100 and separate it from the middle air receiving hole 210. Accordingly, the elastic pressure plate 600 can separate the pressure forming space 10a into an upper pressure space 10b and a lower pressure space 10c. The elastic pressure plate 600 may be deformed into the middle air receiving hole 210 by the air flowing into the upper pressure space 10b. The elastic pressure plate 600 may be deformed and come into contact with the upper surface of the lower housing 300. To this end, the elastic pressure plate 600 may be deformed to the extent of applying pressure to the upper surface of the lower housing 300 while contacting the upper surface of the lower housing 300 during the deformation process.

The elastic through hole 610 may be formed at a position corresponding to the upper bolt through hole 130 when the elastic pressure plate 600 is coupled to the lower surface of the upper housing 100. The elastic through-holes 610 may be formed in the same number as the upper bolt through-holes 130. The elastic through hole 610 may be connected to the upper bolt through hole 130. The elastic through-hole 610 may provide a path through which the upper bolt 132 penetrates the upper bolt through-hole 130. The pressure elastic plate may be coupled and fixed together when the upper housing 100 and the intermediate spacer 200 are coupled by the upper bolt 132. In addition, the pressure elastic plate can be elastically compressed to further seal between the lower surface of the upper housing 100 and the upper surface of the intermediate spacer 200.

Next, a pressure sensor used in a pressure sensor diagnostic device according to an embodiment of the present invention will be described.

Figure 6 is a top view of a pressure sensor diagnosed by the pressure sensor diagnostic device of the present invention. Figure 7 is a vertical cross-sectional view taken along B-B in Figure 6. Figure 8 is a vertical cross-sectional view taken along line C-C of Figure 6. FIG. 9 is a vertical cross-sectional view of the pressure sensor of FIG. 6 in an operating state.

Referring to FIGS. 6 to 9, the pressure sensor 700 used in the pressure sensor diagnostic device according to embodiments of the present invention includes a first sensing layer 710, a second sensing layer 720, and an intermediate support layer ( 730), a first electrode layer 740, a second electrode layer 750, a first insulating layer 760, a second insulating layer 770, and a pressure spacer 780. Additionally, the pressure sensor 700 may further include a first terminal 745 and a second terminal 755. The pressure sensor may in particular be a film-type pressure sensor. However, the pressure sensor described here corresponds to an embodiment applied to a pressure sensor diagnostic device, and pressure sensors of various structures may be applied.

Referring to FIG. 8, the pressure sensor 700 measures the change in electrical resistance value between the first sensing layer 710 and the second sensing layer 720 when pressure is applied to the second sensing layer 720. , the applied pressure can be measured by measuring changes in electrical characteristics, such as changes in capacitance or changes in voltage. The pressure sensor 700 may be applied to an electrostatic chuck (not shown) of a sputtering device used to manufacture a flat display panel such as an organic light emitting diode panel or a liquid crystal display panel. For example, the pressure sensor may be mounted between an electrostatic chuck and a flat substrate (not shown) such as a glass substrate mounted on the top surface of the electrostatic chuck and used to measure the chucking force of the electrostatic chuck. More specifically, as the electrostatic chuck operates, the pressure generated when the glass substrate is chucked to the electrostatic chuck may be applied to the pressure sensor. The pressure sensor may respond to the chucking force by moving or deforming the pressure spacer 780, the second electrode layer 750, and the second sensing layer 710 due to the chucking force generated by the electrostatic chuck. The pressure sensor 700 may preferably have a total thickness of 0.10 to 1.20 mm. The pressure sensor may be formed as an overall thin film.

The first sensing layer 710 is formed in the shape of a block or plate with a predetermined thickness and may be formed in a disk or circular block. Additionally, the first sensing layer 710 may be formed in a square plate or square block shape. The first sensing layer 710 may be formed to have a thickness of 0.01 to 0.20 mm. If the thickness of the first sensing layer 710 is too thin, the change in resistance is small, making it difficult to accurately measure the change in resistance. If the thickness of the first sensing layer 710 is too thick, the thickness of the pressure sensor may be unnecessarily increased. Additionally, the first sensing layer 710 may be formed to have a diameter or width of 3 to 10 mm.

The first sensing layer 710 may be formed of a piezo resistive material. For example, the first sensing layer 710 may be formed including electrically conductive powder and a binder. The electrically conductive powder may be formed of a metal such as nickel, copper or iron. The binder may be formed of a resin material such as polyimide, polyethylene, polycarbonate, silicone, acrylic, urethane, epoxy, melamine, or vinyl. The conductive powder may be dispersed in the binder.

The first sensing layer 710 may be deformed by the applied pressure, thereby increasing contact between electrically conductive powders located therein, thereby reducing electrical resistance. The first sensing layer 710 may exhibit a characteristic of reducing electrical resistance in inverse proportion to the applied force.

The second sensing layer 720 may be formed in the same or similar shape as the first sensing layer 710. The second sensing layer 720 may be formed to have the same planar shape and the same area as the first sensing layer 710. The second sensing layer 720 may be formed to have the same thickness as the first sensing layer 710. The second sensing layer 720 may be formed to have a thickness of 0.01 to 0.20 mm. Additionally, the second sensing layer 720 may preferably be formed to have a relatively thin thickness compared to the first sensing layer 710. Since the second sensing layer 720 is deformed by pressure applied to the upper surface during the chucking force measurement process, deformation may be easier if the second sensing layer 720 is thinner than the first sensing layer 710.

The second sensing layer 720 may be formed of the same material as the first sensing layer 710. The second sensing layer 720 may be formed of a piezo resistive material. For example, the second sensing layer 720 may be formed including electrically conductive powder and a binder. The electrically conductive powder may be formed of a metal such as nickel, copper or iron. The binder may be formed of a resin material such as polyimide, polyethylene, polycarbonate, silicone, acrylic, urethane, epoxy, melamine, or vinyl. The conductive powder may be dispersed in the binder.

The second sensing layer 720, like the first sensing layer 710, may be deformed by applied pressure and electrical resistance may be reduced as the electrically conductive powders located therein come into contact with each other.

The second sensing layer 720 may be positioned on top of the first sensing layer 710 at a predetermined height. The second sensing layer 720 may be deformed by pressure applied from the top surface and come into physical contact with the first sensing layer 710. The contact area of the second sensing layer 720 with the first sensing layer 710 may increase as the pressure applied to the upper surface of the second sensing layer 720 increases. Accordingly, the second sensing layer 720 may form a current path with the first sensing layer 710, thereby increasing voltage and reducing electrical resistance.

The intermediate support layer 730 may be formed in a ring shape or two arc shapes. The outer diameter or outer side of the intermediate support layer 730 may match the outer diameter or outer side of the first sensing layer 710. Additionally, the intermediate support layer 730 may be formed to have an inner diameter of a predetermined diameter. The middle support layer 730 may have a support through hole 731 passing from the upper surface to the lower surface on the inside. The intermediate support layer 730 may support the upper surface of the first sensing layer 710 and the lower surface of the second sensing layer 720 to face each other through the support through hole 731.

The intermediate support layer 730 may be formed to have a thickness of 0.01 to 0.05 mm. The intermediate support layer 730 is located between the first sensing layer 710 and the second sensing layer 720, and maintains the first sensing layer 710 and the second sensing layer 720 at a predetermined level when no pressure is applied. Can be spaced apart in height. The intermediate support layer 730 maintains the gap between the first sensing layer 710 and the second sensing layer 720 to prevent current from flowing between the first sensing layer 710 and the second sensing layer 720. You can. When pressure is applied to the upper surface of the second sensing layer 720, the intermediate support layer 730 may deform the second sensing layer 720 and provide a path for contacting the first sensing layer 710.

The intermediate support layer 730 may be formed of a resin film or adhesive layer made of a resin such as polyethylene terephthalate ( PET) or polyether sulfone (PES). The intermediate support layer 730 may be coupled to the first sensing layer 710 and the second sensing layer 720 so as not to be separated.

Additionally, the intermediate support layer 730 may further include a support extension layer 735. The support extension layer 735 may be formed in a bar shape extending from the middle support layer 730 to one side. The support extension layer 735 may be formed to have an area corresponding to the area formed by the first terminal 745 and the second terminal 755. The support extension layer 735 may be located between the first terminal 745 and the second terminal 755 to vertically space the first terminal 745 and the second terminal 755. Accordingly, the support extension layer 735 can more stably insulate the first terminal 745 and the second terminal 755. Meanwhile, when the first terminal 745 and the second terminal 755 are spaced apart in the horizontal direction and do not physically contact each other, the support extension layer 735 may be omitted.

The first electrode layer 740 may be located below the first sensing layer 710. The first electrode layer 740 may be formed as a plate or thin plate with a shape corresponding to the lower surface of the first sensing layer 710. The first electrode layer 740 may be formed to have an area corresponding to the lower surface of the first sensing layer 710. Additionally, the first electrode layer 740 may be formed to have an area that protrudes to the outside of the first sensing layer 710 by a predetermined width. The first electrode layer 740 may be electrically connected to the lower surface of the first sensing layer 710.

The first electrode layer 740 may be formed to have a predetermined thickness through which the current required to measure the resistance of the first sensing layer 710 flows. The first electrode layer 740 may preferably be formed to have a thickness of 0.01 to 0.25 mm. If the thickness of the first electrode layer 740 is too thin, its electrical resistance increases, making it difficult to accurately measure the change in resistance of the first sensing layer 710. Additionally, if the thickness of the first electrode layer 740 is too thick, the thickness of the pressure sensor 700 may be unnecessarily increased. The first electrode layer 740 may be formed of an electrically conductive material. The first electrode layer 740 may be formed of a metal such as nickel, aluminum, or copper.

The first electrode layer 740 may be coupled so that its upper surface is in contact with the lower surface of the first sensing layer 710. The first electrode layer 740 may provide a path through which the current necessary to measure the resistance of the first sensing layer 710 flows. Additionally, the first electrode layer 740 may provide a path to measure the resistance or voltage of the first sensing layer 710.

The first terminal 745 is formed in a bar shape, one side is connected to the first electrode layer 740, and the other side may extend in a direction opposite to the first electrode layer 740. Additionally, one side of the first terminal 745 may be electrically connected to the first electrode layer 740. The first terminal 745 may be formed to have a predetermined thickness through which a current required to measure the resistance of the first sensing layer 710 flows. The first terminal 745 may be formed to have the same thickness as the first electrode layer 740. The first terminal 745 may preferably be formed to have a thickness of 0.01 to 0.25 mm. The first terminal 745 may be formed of an electrically conductive material. The first terminal 745 may be formed of a metal such as nickel, aluminum, or copper. The first terminal 745 may electrically connect the first electrode layer 740 to an external power supply or resistance measurement device.

The second electrode layer 750 may be located on top of the second sensing layer 720. The second electrode layer 750 may be formed as a plate or thin plate with a shape corresponding to the upper surface of the second sensing layer 720. The second electrode layer 750 may be formed to have an area corresponding to the upper surface of the second sensing layer 720. Additionally, the second electrode layer 750 may be formed to have an area that protrudes to the outside of the second sensing layer 720 by a predetermined width. The second electrode layer 750 may be in electrical contact with the top surface of the second sensing layer 720.

The second electrode layer 750 may be formed to have a predetermined thickness through which the current required to measure the resistance of the second sensing layer 720 flows. The second electrode layer 750 may preferably be formed to have a thickness of 0.01 to 0.25 mm. If the thickness of the second electrode layer 750 is too thin, its electrical resistance increases, making it difficult to accurately measure the change in resistance of the second sensing layer 720. Additionally, if the thickness of the second electrode layer 750 is too thick, the thickness of the pressure sensor 700 may be unnecessarily increased. Additionally, the second electrode layer 750 may be formed to be thinner than the first electrode layer 740. Accordingly, the second electrode layer 750 can more easily transmit pressure to the second sensing layer 720 when pressure is applied. Additionally, the second electrode layer 750 may be formed of an electrically conductive material. The second electrode layer 750 may be formed of a metal such as nickel, aluminum, or copper.

The second electrode layer 750 may be coupled so that its upper surface is in contact with the upper surface of the second sensing layer 720. The second electrode layer 750 may provide a path through which the current necessary to measure the resistance of the second sensing layer 720 flows. Additionally, the second electrode may provide a path to measure the resistance or voltage of the second sensing layer 720.

The second terminal 755 is formed in a bar shape, one side is connected to the second electrode layer 750, and the other side may extend in a direction opposite to the second electrode layer 750. The second terminal 755 may be spaced apart from the first terminal 745 in a direction perpendicular to the direction in which it extends based on the horizontal plane. Additionally, one side of the second terminal 755 may be electrically connected to the second electrode layer 750 to supply current. The second terminal 755 may be formed to have a predetermined thickness through which a current required to measure the resistance of the second sensing layer 720 flows. The second terminal 755 may be formed to have the same thickness as the second electrode layer 750. The second terminal 755 may preferably be formed to have a thickness of 0.01 to 0.25 mm. The second terminal 755 may be formed of an electrically conductive material. The second terminal 755 may be formed of a metal such as nickel, aluminum, or copper. The second terminal 755 may electrically connect the second electrode layer 750 to an external power supply or resistance measurement device.

The first insulating layer 760 may be formed to surround the lower surface of the first electrode layer 740. Additionally, the first insulating layer 760 may be formed to surround the lower surface of the first terminal 745. Accordingly, the first insulating layer 760 may be formed in an overall bar shape with a predetermined width and length. The first insulating layer 760 may be formed to have a width greater than the diameter or width of the first electrode layer 740. The first insulating layer 760 may be formed to have a length greater than the diameter or width of the first electrode layer 740. Additionally, the first insulating layer 760 may be formed to have a length greater than the diameter or width of the first electrode layer 740 and the length of the first terminal 745. The upper surface of the first insulating layer 760 may be combined with the lower surface of the first electrode layer 740 and the first terminal 745.

The first insulating layer 760 may be formed of a resin film. The first insulating layer 760 is made of acrylic, polycarbonate (PC), polyvinyl chloride (PVC), polyethylene terephthalate (PET), and polyimide (PI). Alternatively, it may be made of a material such as polychlorinated biphenyl (PCB). The first insulating layer 760 may be formed to have a thickness of 0.01 to 0.25 mm.

The first insulating layer 760 may further include a first insulating extension layer 765. The first insulating extension layer 765 extends below the first terminal 745 and the second terminal 755 and may be formed to surround the lower surfaces of the first terminal 745 and the second terminal 755. . The first insulating extension layer 765 may be formed of the same material as the first insulating layer 760. Additionally, the first insulating extension layer 765 may be formed integrally with the first insulating layer 760. The first insulating extension layer 765 may electrically insulate the lower surfaces of the first terminal 745 and the second terminal 755 from the outside.

The second insulating layer 770 may be formed to surround the upper surface of the second electrode layer 750. Additionally, the second insulating layer 770 may be formed to surround the upper surface of the second terminal 755. Accordingly, the second insulating layer 770 may be formed as a bar shape with an overall width and length. The second insulating layer 770 may be formed to have a width greater than the diameter or width of the second electrode layer 750. Additionally, the second insulating layer 770 may be formed to have a length greater than the diameter or width of the second electrode layer 750 and the length of the second terminal 755. The top surface of the second insulating layer 770 may be combined with the top surface of the second electrode layer 750 and the second terminal 755.

The second insulating layer 770 may be formed of a resin film. The second insulating layer 770 is made of acrylic, polycarbonate (PC), polyvinyl chloride (PVC), polyethylene terephthalate (PET), and polyimide (PI). Alternatively, it may be made of a material such as polychlorinated biphenyl (PCB). The second insulating layer 770 may be formed to have a thickness of 0.01 to 0.25 mm. Additionally, the second insulating layer 770 may be formed to be thinner than the first insulating layer 760. Accordingly, the second insulating layer 770 can allow pressure to be more easily transmitted to the second insulating layer 770 when pressure is applied.

The second insulating layer 770 may further include a second insulating extension layer 775. The second insulating extension layer 775 may extend above the first terminal 745 and the second terminal 755 and may be formed to surround the upper surfaces of the first terminal 745 and the second terminal 755. . The second insulating extension layer 775 may be formed of the same material as the second insulating layer 770. Additionally, the second insulating extension layer 775 may be formed integrally with the second insulating layer 770. The second insulating extension layer 775 may electrically insulate the top surfaces of the first terminal 745 and the second terminal 755 from the outside.

The pressure spacer 780 may be formed in a block shape that corresponds to the planar shape of the support through hole 731 and has a smaller area than the support through hole 731. The pressure spacer 780 may be made of a metal material such as nickel, aluminum, stainless steel, or iron. The pressure spacer 780 may be formed of a non-compressed plastic material. The pressure spacer 780 may be formed to have a thickness of 0.05 to 0.25 mm. Additionally, the pressure spacer 780 may be formed to have an area of 0.10 to 0.7 times the area of the support through hole 731. Alternatively, the pressure spacer 780 may be formed to have a diameter of 0.10 to 0.7 times the diameter of the support through hole 731. Accordingly, the pressing spacer 780 can efficiently press the second sensing layer 720 corresponding to the center of the support through hole 731.

The pressure spacer 780 may be coupled to the top of the second insulating layer 770 at a position corresponding to the support through hole 731 on the top of the second sensing layer 720. Additionally, the pressure spacer 780 may be coupled to the lower part of the first insulating layer 760 at a position corresponding to the support through hole 731 in the lower part of the first sensing layer 710. The pressurized space may be coupled to the upper surface of the second insulating layer 770 or the lower surface of the first insulating layer 760. The pressure spacer 780 can efficiently transmit pressure to the first and second sensing layers 710 and 720 when pressure is applied to the pressure sensor 700.

The pressure sensor 700 is seated so that the lower surface of the first insulating layer 760 is in contact with the upper surface of the area where pressure is to be measured. The pressure sensor 700 may be seated so that the pressure spacer 780 is located at the top. The first terminal 745 and the second terminal 755 may be simultaneously connected to a power supply and a resistance measurement device. The power supply device can apply an appropriate voltage between the first terminal 745 and the second terminal 755. The first terminal 745 and the second terminal 755 are electrically connected to the first electrode layer 740 and the second electrode layer 750, respectively. In the pressure sensor, when no pressure is applied, the first sensing layer 710 and the second sensing layer 720 are spaced apart by the intermediate support layer 730, so the first terminal 745 and the second terminal 755 ), no current flows between them.

When pressure is applied to the pressure sensor 780, the pressure sensor 780 can sequentially press the second insulating layer 770, the second electrode layer 750, and the second sensing layer 720. The second sensing layer 720 may be deformed by the pressure of the pressing spacer 780 and the lower surface may pass through the support through-hole 731 and come into physical contact with the upper surface of the first sensing layer 710. Additionally, when the applied pressure increases, the pressure applied to the first sensing layer 710 and the second sensing layer 720 by the pressure spacer 780 may increase. The first sensing layer 710 and the second sensing layer 720 may contract in the vertical direction and electrical resistance may be reduced as current flows.

The electrical resistance of the pressure sensor 700 may decrease as the applied pressure increases. The pressure sensor 700 can relatively evaluate the applied pressure according to the degree of decrease in electrical resistance or increase in voltage. The pressure sensor 700 implements concentrated pressure through the pressure spacer 780 when pressure is applied from the top. The pressure sensor can efficiently pressurize the sensing layer by expanding the contact area between the first and second sensing layers 710 and 720.

Next, the operation of the pressure sensor diagnostic device according to another embodiment of the present invention will be described.

FIG. 10 is a vertical cross-sectional view showing the operation of the pressure sensor diagnostic device of FIG. 5. FIG. 11 is a schematic diagram showing the operation of the pressure sensor diagnostic device of FIG. 5.

As shown in FIG. 10, the pressure sensor diagnostic device 20 positions the pressure sensor 700 at the lower part of the pressure forming space 10a. That is, the pressure sensor 700 is positioned so that its lower surface contacts the upper surface of the lower housing 300. The pressure sensor 700 may be located adjacent to the cell pressing block 520 or on top of the cell pressing block 520, where the portion where the first sensing layer is formed is exposed to the upper surface of the lower housing 300. The pressure sensor 700 is installed so that the first and second insulating extension layers pass through the lower surface of the intermediate spacer 200 and extend to the outside of the intermediate spacer 200. The pressure sensor diagnostic device 20 is sealed between the lower surface of the intermediate spacer 200 and the upper surface of the lower housing 300 by the lower O-ring 340, and the first insulating extension layer and the second insulating layer of the pressure sensor 700 are sealed. Ensure that the extension layer extends outward.

External air is supplied to the upper air receiving groove 110 of the upper housing 100 through the air inlet block 410 of the air distribution module 400. The air may be supplied at an air pressure preset by an air regulator. The air pressure may be preset to a constant pressure or a pressure that is gradually or gradually increased within a predetermined range. The air is supplied to the upper part of the air distribution plate 420 through the block vertical passage 411 and the block horizontal passage 412. The air is supplied to the lower part of the air distribution plate 420 and the upper part of the elastic pressure plate 600 through the air injection hole 421. The elastic pressure plate 600 is deformed downward by air and its lower surface contacts the upper surface of the pressure sensor 700 and the upper surface of the cell pressing block 520. At this time, the elastic pressure plate 600 directly applies pressure to the upper part of the pressure sensor 700, as shown in FIG. 11. The elastic pressure plate 600 applies pressure to the pressure spacer of the pressure sensor 700, and as shown in FIG. 9, the pressure spacer descends and connects the second insulating layer 770, the second electrode layer 750, and the second insulating layer 770. 2 The sensing layer 720 can be sequentially pressed. The pressure sensor 700 can measure applied pressure as described above. Additionally, the elastic pressure plate 600 directly applies pressure to the cell pressurizing block 520 and the load cell 510, and allows the load cell 510 to measure the pressure. The pressure sensor 700 can diagnose whether it is operating properly by determining whether the pressure measured by the applied pneumatic pressure is within a preset pressure or pressure range. Additionally, it is possible to diagnose whether the pressure of the pressure sensor 700 is appropriate by comparing the pressure measured by the load cell 510 and the preset pressure.

Additionally, the pressure sensor diagnostic device 20 may establish a correlation between the pressure measured by the load cell 510 and the measurement value measured by the pressure sensor 700. That is, the pressure sensor diagnostic device 20 can establish a correlation between the load cell pressure measured by the load cell 510 and the sensor measurement value measured by the pressure sensor 700 while gradually increasing the air pressure. The correlation may be set as a two-dimensional or more equation for the measured pressure of the load cell 510 and the measured value of the pressure sensor 700. Additionally, the correlation may be set as a look-up table for the measured pressure of the load cell 510 and the measured value of the pressure sensor 700 instead of an equation. Accordingly, the pressure sensor 700 can sense the actual pressure by applying the correlation with the load cell 510 to the measured value according to the pressure applied in an actual use environment.

In addition, if the measured value of the pressure sensor 700 changes during use due to deformation, etc., the pressure of the load cell 510 and the measured value of the pressure sensor 700 are re-measured using the pressure sensor diagnostic device 20. A correlation can be established for . Therefore, the pressure sensor 700 can continue to be used even if deformation occurs during use.

Meanwhile, when the pressure sensor diagnostic device 20 does not include the elastic pressure plate 600, the pressure spacer is directly pressed by the pressure formed in the pressure forming space 10a.

The pressure sensor 700 can be diagnosed as to whether it operates normally using the pressure sensor diagnostic device 20 before or during use. In particular, if the pressure sensor 700 is formed in a film shape, it may be deformed during use. In this case, the pressure sensor diagnostic device 20 can check the pressure sensor 700 and diagnose whether it is operating normally.

Next, a pressure sensor diagnostic device according to another embodiment of the present invention will be described.

Figure 12 is a vertical cross-sectional view of a pressure sensor diagnostic device according to another embodiment of the present invention. Figure 13 is a partial enlarged view of “E” in Figure 12.

Referring to FIGS. 12 and 13, the pressure sensor diagnostic device 30 according to another embodiment of the present invention includes an upper housing 100, a middle spacer 200, a lower housing 300, and an air dispersion module 400. ) and a load cell module 500 and an elastic pressure plate 600.

The pressure sensor diagnostic device 30 according to another embodiment of the present invention has a different configuration of the air dispersion module 400 and the elastic pressure plate 600 compared to the pressure sensor diagnostic device 20 according to the embodiment of FIG. 5. can be formed. Therefore, the pressure sensor diagnostic device 30 will be described below with a focus on the different configurations of the air dispersion module 400 and the elastic pressure plate 600. In addition, the pressure sensor diagnostic device 30 may be assigned the same reference numerals for components that are the same or similar to the pressure sensor diagnostic device 20 of FIG. 5 and detailed descriptions may be omitted.

The air distribution module 400 may include an air inlet block 410, an air distribution plate 420, and a pressure plate support means 430.

The air intake block 410 may include a block vertical passage 411 and a block horizontal passage 412.

The block vertical passage 411 may be formed by penetrating from the upper surface to the lower surface of the air intake block 410. The block vertical passage 411 may be formed of an upper equal-diameter region 411a, a middle inclined region 411b, and a lower equal-diameter region 411c. The upper same-diameter area 411a is an area formed with the same inner diameter, and may be an area from the upper surface of the air inlet block 410 to a depth lower than the area where the block horizontal passage 412 is formed. The upper equal diameter area 411a may be an area corresponding to the depth from the top surface of the air inlet block 410 to the top surface of the air distribution plate 420. The middle inclined area 411b is an area whose inner diameter gradually becomes smaller, and may be an area of a predetermined depth from the bottom of the upper same-diameter area 411a. The lower equal diameter area 411c is an area formed with the same inner diameter, and may be an area penetrating from the middle inclined area 411b to the lower surface of the air inlet block 410. The lower equal-diameter region 411c may be formed with an inner diameter smaller than that of the upper equal-diameter region 411a. The upper equal-diameter region 411a is connected to an external pneumatic system, and air can be introduced into the upper area. The lower equal diameter area 411c may provide a space where the pressure plate coupling block is coupled from the bottom.

The block horizontal passage 412 may be formed by penetrating from the inner peripheral surface of the block vertical passage 411 to the outer peripheral surface of the air inlet block 410. More specifically, the block horizontal passage 412 may pass through the outer peripheral surface of the air inlet block 410 at the bottom of the upper same-diameter area 411a of the block vertical passage 411. Additionally, the block horizontal passage 412 may penetrate above the upper surface of the air distribution plate 420. Accordingly, the block horizontal passage 412 may penetrate the area between the upper surface of the air distribution plate 420 and the inner lower surface of the upper air receiving groove 110.

At least two block horizontal passages 412 may be formed to be spaced apart along the circumferential direction of the air inlet block 410. The block horizontal passages 412 may preferably be formed in four blocks spaced apart at 90 degree intervals. The block horizontal passage 412 may supply air supplied from the block vertical passage 411 from the bottom of the air inlet block 410 to the outside. At this time, the block horizontal passage 412 can supply air entirely along the circumferential direction of the air inlet block 410.

The air distribution plate 420 may include an air injection hole 421. The air distribution plate 420 is formed in a disk shape and may be formed with a diameter smaller than the inner diameter of the upper air receiving groove 110. The center of the upper surface of the air distribution plate 420 may be coupled to the lower end of the air inlet block 410. Therefore, the air distribution plate 420 is located at the lower part of the upper air receiving groove 110 and can completely block the lower part of the upper air receiving groove 110. At this time, the air distribution plate 420 may be positioned such that its outer circumferential surface is in contact with the inner circumferential surface of the upper air receiving groove 110 or is spaced apart by a predetermined distance. The air distribution plate 420 can ensure that the air sprayed through the block horizontal passage 412 is uniformly distributed throughout the middle air receiving hole 210.

The air injection hole 421 may be formed by penetrating from the upper surface to the lower surface of the air distribution plate 420. The air injection holes 421 may be distributed throughout the entire area of the air distribution plate 420. A plurality of air injection holes 421 may be positioned to be spaced apart from each other in the circumferential direction with respect to the center of the air distribution plate 420. Additionally, a plurality of air injection holes 421 may be formed to be spaced apart from the center at predetermined intervals.

The air injection hole 421 may be formed to increase in diameter from the center of the air distribution plate 420 to the outside. Accordingly, the air distribution plate 420 can ensure that air flowing into the upper surface is uniformly supplied downward.

The pressure plate support means 430 may include a support coupling screw 431 and a support coupling head 432. The pressure plate support means 430 may be detachably coupled to the lower part of the block vertical passage 411 of the air inlet block 410. The pressure plate support means 430 may support the center of the upper surface of the pressure elastic plate.

The support coupling screw 431 is formed as a screw having a predetermined height and may be screwed to the lower part of the block vertical passage 411 of the air inlet block 410. More specifically, the support coupling screw 431 may be screwed to the lower inner diameter area of the same size.

The support coupling head 432 is formed as a disk with an area larger than the diameter of the support coupling screw 431, and may be coupled to the lower part of the support coupling screw 431. The support coupling head 432 may provide an area where the center of the upper surface of the elastic pressure plate 600 is contacted and supported.

Meanwhile, an O-ring is positioned between the upper surface of the support coupling head 432 and the lower surface of the air distribution plate 420 to seal the space between the support coupling head 432 and the air distribution plate 420. In addition, the upper surface of the support coupling head 432 and the lower surface of the air distribution plate 420 may further be provided with an O-ring groove necessary to partially accommodate the O-ring.

The elastic pressure plate 600 may include an elastic through hole 610 and a pressure plate fixing means 620.

The pressure plate fixing means 620 may be formed by means such as bolts. The pressure plate fixing means 620 may pass through the center of the lower surface of the elastic pressure plate 600 and be screwed to the pressure plate support means 430. The pressure plate fixing means 620 may be screwed to the lower surface of the support coupling head 432 of the pressure plate support means 430. The pressure plate fixing means 620 may couple the central area of the elastic pressure plate 600 to the pressure plate supporting means 430. Accordingly, the pressure plate fixing means 620 can ensure that the central region is not deformed and is fixed when the elastic pressure plate 600 is deformed in the downward direction by air supplied from the top. The elastic pressure plate 600 may be deformed into a ring shape when deformed by pressure supplied from the top.

Next, the operation of a pressure sensor diagnostic device according to another embodiment of the present invention will be described.

FIG. 14 is a schematic diagram showing the operation of the pressure sensor diagnostic device of FIG. 12.

As shown in FIG. 12, the pressure sensor diagnostic device 30 can measure the pressure of the pressure sensor 700 in a state where a glass substrate is placed on the pressure sensor 700. The pressure sensor 700 can be used to measure the chucking force of an electrostatic chuck of a flat panel display manufacturing device. The electrostatic chuck can fix the glass substrate using chucking force while the glass substrate is seated on the upper surface. When the pressure sensor 700 measures the chucking force of the electrostatic chuck, the pressure sensor 700 is located at the bottom of the glass substrate and measures the pressure applied as the glass substrate is deformed into an arch shape.

The pressure sensor diagnostic device 30 positions the pressure sensor 700 at the center of the pressure forming space 10a. Accordingly, the pressure sensor 700 is located below the pressure plate fixing means 620. The pressure sensor diagnostic device 30 places a glass substrate on top of the pressure sensor 700 in order to implement the same usage environment as the pressure sensor 700. The center of the elastic pressure plate 600 of the pressure sensor diagnostic device 30 is fixed to the pressure plate support means 430 by the pressure plate fixing means 620. As shown in FIG. 14, when air flows into the elastic pressure plate 600 from the top, the outer end and the center are fixed and the area between them is deformed to the bottom. The elastic pressure plate 600 is deformed and pressurizes the glass substrate located on the upper part of the pressure sensor 700. At this time, the elastic pressure plate 600 does not contact the glass substrate located on top of the pressure sensor 700, but contacts the glass substrate located in the peripheral area of the pressure sensor 700. The glass substrate is deformed into an arch shape while being pressed by the elastic pressure plate 600 and presses the pressure sensor 700. The pressure sensor 700 is pressurized under conditions similar to the environment located between the electrostatic chuck and the glass substrate and can sense the pressure.

What has been described above is only one embodiment for carrying out the pressure sensor diagnostic device according to the present invention, and the present invention is not limited to the above-described embodiment, and the gist of the present invention is summarized as claimed in the following claims. Without departing from this, anyone with ordinary knowledge in the field to which the invention pertains will say that the technical spirit of the present invention exists to the extent that various modifications can be made.

10, 20, 30: Pressure sensor diagnostic device
10a: pressure forming space
10b: upper pressure space 10c: lower pressure space
100: upper housing 110: upper air receiving groove
120: upper through hole 130: upper bolt through hole
140: Upper O-ring groove 150: Upper O-ring
200: middle spacer 210: middle air receiving hole
220: Middle bolt fastening hole 230: Middle upper O-ring groove
300: lower housing 310: lower cell receiving groove
320: Lower withdrawal hole 330: Lower O-ring groove
340: Lower O-ring
400: air dispersion module 410: air inlet block
411: block vertical passage 412: block horizontal passage
420: Air distribution plate 421: Air injection hole
430: pressure plate support means 431: support coupling screw
432: support coupling head
500: load cell module 510: load cell
520: Cell pressurizing block 530: Pressing block support plate
540: Terminal lead line
600: Elastic pressure plate 610: Elastic through hole
620: Pressure plate fixing means
700: pressure sensor
710: first sensing layer 720: second sensing layer
730: middle support layer 731: support through hole
735: Support extension layer
740: first electrode layer 745: first terminal
750: second electrode layer 755: second terminal
760: first insulating layer 770: second insulating layer
780: Pressurized spacer

Claims (10)

delete delete An upper housing extending from the bottom to the top and having an upper air receiving groove through which air flows into the upper housing, and an upper through hole penetrating into the upper air receiving groove from the upper surface;
an air dispersion module located inside the upper air receiving groove of the upper housing to disperse the air to the lower part of the upper air receiving groove;
An intermediate spacer coupled to the lower part of the upper housing to form a pressure forming space with the upper air receiving groove and having an intermediate air receiving hole where a pressure sensor is located;
A lower housing that seals the lower part of the intermediate air receiving hole, and
A pressure sensor diagnostic device comprising a load cell module including a load cell exposed to the inside of the intermediate air receiving hole on the upper surface of the lower housing. According to claim 3,
The air dispersion module is
An air inlet block formed in a column shape, coupled to the upper through hole of the upper housing, and having a passage through which air flows into the upper part of the upper air receiving groove, and
A pressure sensor diagnostic device comprising an air distribution plate formed in a disk shape, coupled to the lower end of the air inlet block, and having a plurality of air injection holes penetrating from the upper surface to the lower surface. According to claim 4,
The air inlet block includes a block vertical passage formed at a predetermined depth from the top to the bottom, and at least two block horizontal passages connected to a lower part of the block vertical passage and penetrating the outer peripheral surface of the air inlet block,
A plurality of air injection holes are formed to be spaced apart from each other in the circumferential direction based on the center of the air distribution plate at a predetermined interval from the center to an outer end, and are formed to increase in diameter from the center to the outside of the air distribution plate. A pressure sensor diagnostic device characterized in that. According to claim 4,
The air intake block includes a block vertical passage penetrating from the upper surface to the lower surface and at least two block horizontal passages penetrating from the inner peripheral surface to the outer peripheral surface of the block vertical passage,
A plurality of air injection holes are formed to be spaced apart from each other in the circumferential direction based on the center of the air distribution plate at a predetermined interval from the center to an outer end, and are formed to increase in diameter from the center to the outside of the air distribution plate. A pressure sensor diagnostic device characterized in that. According to claim 4,
The pressure sensor diagnostic device is made of an elastic material and further includes an elastic pressure plate located between the lower surface of the upper housing and the upper surface of the intermediate spacer to block the lower portion of the upper air receiving groove. . According to claim 7,
The elastic pressure plate separates the pressure forming space into an upper pressure space and a lower pressure space by the air supplied to the upper air receiving groove, and is transformed into the upper pressure space into the interior of the intermediate air receiving hole to form a space on the upper surface of the lower housing. A pressure sensor diagnostic device characterized in that it is in contact with. According to claim 7,
A pressure sensor diagnostic device, wherein the central area of the elastic pressure plate is coupled and fixed to the central area of the lower surface of the air distribution plate. According to claim 3,
The lower housing extends downward from the upper surface, and includes a lower cell accommodating groove located inside the intermediate air accommodating hole, a ring-shaped lower accommodating step extending outward from the upper part of the lower cell accommodating groove, and the lower cell. It has a lower draw-out hole penetrating from the receiving groove to the outer peripheral surface of the lower housing,
The load cell module is
A load cell having a cell central hole in the center and located in the lower cell receiving groove,
A cell pressurizing block that contacts the upper surface of the load cell and is exposed to the pressure forming space, and includes a cell coupling bar inserted into the cell central hole of the load cell and a cell pressure plate coupled to the top of the cell coupling bar;
It is formed in a ring shape, is connected to a pressure block support plate coupled to the lower receiving step on the outside of the cell pressure plate, and a terminal of the load cell, and a terminal is drawn out of the lower housing through a lower withdrawal hole of the lower housing. A pressure sensor diagnostic device comprising a lead line.