KR102575267B9 - 웨이퍼의 칩핑 검사 장치 및 방법 - Google Patents
웨이퍼의 칩핑 검사 장치 및 방법Info
- Publication number
- KR102575267B9 KR102575267B9 KR1020220153690A KR20220153690A KR102575267B9 KR 102575267 B9 KR102575267 B9 KR 102575267B9 KR 1020220153690 A KR1020220153690 A KR 1020220153690A KR 20220153690 A KR20220153690 A KR 20220153690A KR 102575267 B9 KR102575267 B9 KR 102575267B9
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- chipping
- inspecting
- inspecting chipping
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020220153690A KR102575267B1 (ko) | 2022-11-16 | 2022-11-16 | 웨이퍼의 칩핑 검사 장치 및 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020220153690A KR102575267B1 (ko) | 2022-11-16 | 2022-11-16 | 웨이퍼의 칩핑 검사 장치 및 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR102575267B1 KR102575267B1 (ko) | 2023-09-07 |
KR102575267B9 true KR102575267B9 (ko) | 2024-01-11 |
Family
ID=87974889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020220153690A KR102575267B1 (ko) | 2022-11-16 | 2022-11-16 | 웨이퍼의 칩핑 검사 장치 및 방법 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR102575267B1 (ko) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4973062B2 (ja) * | 2006-08-14 | 2012-07-11 | ヤマハ株式会社 | 半導体チップの検査方法及びウェハのクラック検査装置 |
JP2010161216A (ja) * | 2009-01-08 | 2010-07-22 | Toshiba Corp | パターン検査装置およびパターン検査方法 |
KR20120106913A (ko) * | 2011-03-16 | 2012-09-27 | 삼성테크윈 주식회사 | 자동 광학 검사기의 자동 초점 조절 장치. |
KR101606093B1 (ko) * | 2015-06-26 | 2016-03-24 | 주식회사 넥서스원 | 기판 결함 검사장치 및 방법 |
JP2021093336A (ja) * | 2019-12-12 | 2021-06-17 | 株式会社日立ハイテク | 画像調整方法および荷電粒子ビームシステム |
-
2022
- 2022-11-16 KR KR1020220153690A patent/KR102575267B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR102575267B1 (ko) | 2023-09-07 |
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