KR102560535B1 - Capacitive sensor - Google Patents

Abstract

A capacitive sensor according to an embodiment of the present invention includes an upper block, a lower block, a plurality of elastic supports elastically supporting the upper block and the lower block, and an upper part formed to have a surface perpendicular to the lower surface of the upper block. A vertical electrode, a lower vertical electrode formed to have a surface perpendicular to the upper surface of the lower block and disposed to face the upper vertical electrode so that at least a portion overlaps the upper vertical electrode, and the upper vertical electrode and the lower vertical electrode Included as part of a circuit, outputting a signal corresponding to a change in capacitance between the upper vertical electrode and the lower vertical electrode that is changed by a force or torque acting on at least one of the upper block and the lower block contains electronic circuits;

Description

Capacitive sensor {Capacitive sensor}

The present invention relates to a capacitive sensor, and more particularly, to a capacitive sensor that senses a 6-axis force/torque using a change in capacitance.

Most conventional force/torque sensors use a method of sensing or measuring force/torque using a strain gauge.

In general, a sensor using a strain gauge is composed of a pair of external connectors to which an external force is applied, an elastic body connecting the pair of external connectors, and a strain gauge attached to the elastic body to measure a deformation amount of the elastic body. A strain gauge senses or measures an external force by detecting a resistance that changes according to an amount of deformation of an elastic body deformed by an external force applied to an external connector.

Sensors using strain gauges are manufactured by attaching a number of strain gauges to an elastic body. In this process, manufacturing costs increase, and after a long period of time, the adhesive used to attach the strain gauges hardens and damages the adhesive. Problems such as this easily caused often occurred.

Recently, a sensor for measuring the amount of deformation of an elastic body using an optical method has been developed, but since a large number of optical parts must be used, there are also limitations in manufacturing difficulty and high cost.

An object to be solved by the present invention is to provide a capacitive sensor with a simpler structure, reduced manufacturing difficulty, and improved durability.

The tasks of the present invention are not limited to the tasks mentioned above, and other tasks not mentioned will be clearly understood by those skilled in the art from the following description.

A capacitive sensor according to an embodiment of the present invention for solving the above problems is an upper block, a lower block, a plurality of elastic supports for elastically supporting the upper block and the lower block, perpendicular to the lower surface of the upper block An upper vertical electrode formed to have a surface, a lower vertical electrode formed to have a surface perpendicular to the upper surface of the lower block and disposed to face the upper vertical electrode such that at least a portion overlaps the upper vertical electrode, and the upper vertical electrode and the lower vertical electrode as part of a circuit, wherein capacitance between the upper vertical electrode and the lower vertical electrode is changed by a force or torque acting on at least one of the upper block and the lower block. and an electronic circuit outputting a corresponding signal.

The capacitance change may be caused by a change in a distance between the upper vertical electrode and the lower vertical electrode.

Three or more upper vertical electrodes may be provided, and the lower vertical electrodes may be provided to correspond to each of the upper vertical electrodes.

The upper vertical electrode may protrude from the lower surface of the upper block, and the lower vertical electrode may protrude from the upper surface of the lower block.

The upper vertical electrode may be recessed from the lower surface of the upper block, and the lower vertical electrode may protrude from the upper surface of the lower block.

The upper vertical electrode may protrude from the lower surface of the upper block, and the lower vertical electrode may be recessed from the upper surface of the lower block.

The upper vertical electrode may be formed on a side surface of the upper block, and the lower vertical electrode may protrude from an upper surface of the lower block.

The upper vertical electrode may protrude from a lower surface of the upper block, and the lower vertical electrode may be formed on a side surface of the lower block.

An upper horizontal electrode formed to have a surface parallel to or formed on the same plane as the lower surface of the upper block and a surface formed to be parallel to or formed on the same plane with the upper surface of the lower block, and the upper horizontal electrode and A lower horizontal electrode disposed to face the upper horizontal electrode so as to overlap at least a portion of the lower horizontal electrode may be further included.

The electronic circuit includes the upper horizontal electrode and the lower horizontal electrode as part of a circuit, and the signal is changed by a force or torque acting on at least one of the upper block and the lower block, and the upper vertical electrode and the It may change in response to a capacitance change between the lower vertical electrode and a capacitance change between the upper horizontal electrode and the lower horizontal electrode.

The signal may include information on each of force components (Fx, Fy, Fz) and torque components (Tx, Ty, Tz) acting in three directions orthogonal to each other.

The signal may include information about the capacitance between the upper vertical electrode and the lower vertical electrode and the capacitance between the upper horizontal electrode and the lower horizontal electrode.

Other specific details of the invention are included in the detailed description and drawings.

According to embodiments of the present invention, at least the following effects are obtained.

The simple structure lowers the manufacturing difficulty, has improved durability, and more accurately senses the 6-axis force/torque.

Effects according to the present invention are not limited by the contents exemplified above, and more various effects are included in the present specification.

1 is an exploded perspective view showing a capacitive sensor according to a first embodiment of the present invention.
2 is a perspective view showing the lower surface of the upper block of the capacitive sensor according to the first embodiment of the present invention.
3 is a view showing a lower surface of the upper block and an upper surface of the lower block of the capacitive sensor according to the first embodiment of the present invention.
4 is a diagram schematically illustrating initial positions of an upper vertical electrode and a lower vertical electrode of a capacitive sensor according to a first embodiment of the present invention.
FIG. 5 is a diagram schematically illustrating a positional change of an upper vertical electrode and a lower vertical electrode that is changed by an X-direction force (Fx) acting on an upper block of a capacitive sensor according to a first embodiment of the present invention.
FIG. 6 is a diagram schematically illustrating a change in position of an upper vertical electrode and a lower vertical electrode that is changed by a Y-direction force Fy acting on an upper block of a capacitive sensor according to a first embodiment of the present invention.
FIG. 7 is a diagram schematically illustrating a positional change of an upper vertical electrode and a lower vertical electrode that is changed by a Z-direction torque (Tz) acting on an upper block of a capacitive sensor according to an exemplary embodiment of the present invention.
8 is a diagram schematically illustrating initial positions of an upper horizontal electrode and a lower horizontal electrode of a capacitive sensor according to a first embodiment of the present invention.
FIG. 9 is a diagram schematically showing position changes of the upper horizontal electrode and the lower horizontal electrode that are changed by a Z-direction force Fz acting on the upper block of the capacitive sensor according to the first embodiment of the present invention.
FIG. 10 is a diagram schematically illustrating a positional change of an upper horizontal electrode and a lower horizontal electrode that is changed by an X-direction torque (Tx) acting on an upper block of a capacitive sensor according to the first embodiment of the present invention.
FIG. 11 is a diagram schematically showing positional changes of upper and lower horizontal electrodes that are changed by Y-direction torque (Ty) acting on the upper block of the capacitive sensor according to the first embodiment of the present invention.
12 is an exploded perspective view schematically illustrating an upper block and a lower block of a capacitive sensor according to a second embodiment of the present invention.
13 is a perspective view illustrating an assembled state of an upper block and a lower block of a capacitive sensor according to a second embodiment of the present invention.
14 is an exploded perspective view schematically illustrating a lower surface of an upper block and a lower surface of a lower block of a capacitive sensor according to a third embodiment of the present invention.
15 is a perspective view illustrating an assembled state of an upper block and a lower block of a capacitive sensor according to a third embodiment of the present invention.
16 is an exploded perspective view schematically showing a lower surface of an upper block and a lower surface of a lower block of a capacitive sensor according to a fourth embodiment of the present invention.

Advantages and features of the present invention, and methods of achieving them, will become clear with reference to the detailed description of the following embodiments taken in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and only these embodiments make the disclosure of the present invention complete, and common knowledge in the art to which the present invention belongs. It is provided to completely inform the person who has the scope of the invention, and the present invention is only defined by the scope of the claims. Like reference numbers designate like elements throughout the specification.

In addition, the embodiments described in this specification will be described with reference to cross-sectional views and/or schematic views, which are ideal exemplary views of the present invention. Accordingly, the shape of the illustrative drawings may be modified due to manufacturing techniques and/or tolerances. In addition, in each drawing shown in the present invention, each component may be shown somewhat enlarged or reduced in consideration of convenience of explanation. Like reference numbers designate like elements throughout the specification.

Hereinafter, the present invention will be described with reference to drawings for explaining capacitive sensors according to embodiments of the present invention.

1 is an exploded perspective view showing a capacitive sensor according to a first embodiment of the present invention, and FIG. 2 is a perspective view showing a lower surface of an upper block of the capacitive sensor according to a first embodiment of the present invention. 3 is a view showing the lower surface of the upper block and the upper surface of the lower block of the capacitive sensor according to the first embodiment of the present invention.

As shown in FIG. 1, the capacitive sensor 1 according to the first embodiment of the present invention includes a housing 10, an upper block 20, a lower block 30, and elastic supports 41, 42, and 43 ).

The housing 10 includes a body 11 forming an accommodation space 14 therein. At least a portion of the upper block 20 , the elastic supports 41 , 42 , and 43 , and the lower block 30 may be accommodated in the accommodation space 14 .

The body 11 may be combined with the lower block 30, in which case the lower end of the body 11 is in contact with the upper end of the base plate 31 of the lower block 30 or surrounds the side of the base plate 31. can be combined together.

A plurality of first upper block fixing holes 12a, 12b, and 12c and a plurality of first elastic support fixing holes 13a, 13b, and 13c may be formed at an upper end of the body 11.

The first upper block fixing holes 12a, 12b, and 12c are spaces in which a fixing member (not shown, for example, a screw) for fixing the upper block 20 to the housing 10 is inserted, and the first elastic support is fixed. The holes 13a, 13b, and 13c are spaces into which fixing members (not shown, for example, screws) for fixing the elastic supports 41, 42, and 43 to the housing 10 are inserted.

Meanwhile, the upper block 20 includes a printed circuit board (PCB) 21 on which electronic circuits are printed.

A plurality of second upper block fixing holes 21a, 21b, and 21c corresponding to the plurality of first upper block fixing holes 12a, 12b, and 12c are formed in the PCB 21. The second upper block fixing holes 21a, 21b, and 21c are spaces into which fixing members inserted through the first upper block fixing holes 12a, 12b, and 12c are inserted.

The upper block 20 is fixed to the housing 10 by the fixing member and moves integrally with the housing 10 .

As shown in FIG. 2 , a plurality of upper vertical electrodes 23a, 23b, and 23c and a plurality of upper horizontal electrodes 24a, 24b, and 24c are formed on the lower surface of the PCB 21.

The upper vertical electrodes 23a, 23b, and 23c protrude from the lower surface to have a surface perpendicular to the lower surface, and the upper horizontal electrodes 24a, 24b, and 24c have surfaces parallel to or formed on the same plane as the lower surface. formed to have

The plurality of upper vertical electrodes 23a, 23b, and 23c may be arranged at equal intervals. Although the present embodiment shows an example in which three upper vertical electrodes 23a, 23b, and 23c are radially disposed at intervals of 120 degrees, four or more upper vertical electrodes may be disposed according to embodiments.

Similarly, the plurality of upper horizontal electrodes 24a, 24b, and 24c may also be arranged at regular intervals. Although the present embodiment shows an example in which three upper horizontal electrodes 24a, 24b, and 24c are radially disposed at intervals of 120 degrees, four or more upper horizontal electrodes may be disposed according to embodiments.

Also, depending on the embodiment, the upper vertical electrodes 23a, 23b, and 23c and the upper horizontal electrodes 24a, 24b, and 24c may be provided in different numbers.

Also, the plurality of upper vertical electrodes 23a, 23b, and 23c and the plurality of upper horizontal electrodes 24a, 24b, and 24c may be arranged in a manner other than radial. For example, three electrodes may be arranged to form a substantially triangular shape, or four electrodes may be arranged to form a square shape.

On the other hand, as shown in Figure 1, the elastic support (41, 42, 43) is provided with a plurality. Although three elastic supports 41, 42 and 43 are shown in this embodiment, the number of elastic supports 41, 42 and 43 may be changed according to the embodiment.

The three elastic supports 41, 42 and 43 may have the same structure, and for convenience of explanation, one elastic support 41 will be specifically described, and the other elastic supports 42 and 43 will be described. omit

The elastic support 41 includes an upper support end 41a, an upper rod 41b, an elastic part 41c, a lower rod 41d, and a lower support end 41e.

The upper support end 41a is coupled to the housing 10 . To this end, a second elastic supporter fixing hole 41f is formed in the upper support end 41a. The second elastic supporter fixing hole 41f is formed to correspond to the first elastic supporter fixing hole 13c, and a separate fixing member is connected to the first elastic supporter fixing hole 13c and the second elastic supporter fixing hole 41f. It is inserted to fix the elastic support 41 to the housing 10.

The upper rod 41b extends downward from the center of the upper support end 41a and connects the upper support end 41a and the elastic part 41c.

The elastic part 41c may have a ring shape to facilitate elastic deformation by an external force. Depending on the embodiment, the shape of the elastic part 41c may be variously modified.

The lower rod 41d and the lower support end 41e are formed symmetrically with the upper support end 41a and the upper rod 41b around the elastic part 41c. A third elastic supporter fixing hole 41g is formed in the lower support end 41e. The third elastic support fixing hole 41g is a space into which a fixing member (not shown) for fixing the lower support end 41e to the lower block 30 is inserted.

Meanwhile, as shown in FIGS. 1 and 3 , the lower block 30 includes a base plate 31 and a lower horizontal electrode 31a protruding from an upper surface of the base plate 31 . In this embodiment, the lower horizontal electrode 31a forms the upper surface of the lower block 30 .

In this embodiment, the lower horizontal electrode 31a is composed of a plate facing the plurality of upper horizontal electrodes 24a, 24b, and 24c, but according to the embodiment, the plurality of upper horizontal electrodes 24a, 24b, and 24c It may be composed of a plurality of lower horizontal electrodes separated from each other so as to correspond one to one.

The lower horizontal electrode 31a is parallel to the upper horizontal electrodes 24a, 24b and 24c and at least partially overlaps with them. Accordingly, each of the upper horizontal electrodes 24a, 24b, and 24c functions as a capacitor having the lower horizontal electrode 31a and air as a dielectric layer, and the lower horizontal electrode 31a and the upper horizontal electrode 24a, 24b, 24c) becomes part of the electronic circuit formed on the PCB 21. Depending on the embodiment, a separate dielectric material may be interposed between the upper horizontal electrodes 24a, 24b, and 24c and the lower horizontal electrode 31a.

As shown in FIGS. 2 and 3 , the lower block 30 includes a plurality of electrode grooves 32a, 32b, and 32c recessed from the lower horizontal electrode 31a to the base plate 31. The plurality of electrode grooves 32a, 32b, and 32c correspond to positions of the plurality of upper vertical electrodes 23a, 23b, and 23c, respectively, and are formed to receive at least a portion of the plurality of upper vertical electrodes 23a, 23b, and 23c. . When the capacitive sensor 1 according to the present embodiment is assembled, the upper vertical electrodes 23a, 23b, and 23c do not contact the bottom and side surfaces of the electrode grooves 32a, 32b, and 32c.

Sides of the electrode grooves 32a, 32b, and 32c facing the upper vertical electrodes 23a, 23b, and 23c become the lower vertical electrodes 33a, 33b, and 33c. The lower vertical electrodes 33a, 33b, and 33c are formed to have a plane perpendicular to the lower horizontal electrode 31a, which is the upper surface of the lower block 30, and at least partially overlap the upper vertical electrodes 23a, 23b, and 23c. do.

Each of the upper vertical electrodes 23a, 23b, 23c and the lower vertical electrodes 33a, 33b, 33c function as a capacitor using air as a dielectric layer, and the upper vertical electrodes 23a, 23b, 23c and the lower vertical electrodes 23a, 23b, 23c A capacitor composed of the vertical electrodes 33a, 33b, and 33c becomes part of an electronic circuit formed on the PCB 21. Depending on the embodiment, a separate dielectric may be interposed between the upper vertical electrodes 23a, 23b, and 23c and the lower vertical electrodes 33a, 33b, and 33c.

In addition, as shown in FIG. 1, a plurality of elastic support body receiving grooves 34a, 34b, and 34c are formed on the upper surface of the base plate 31. The elastic supports receiving grooves 34a, 34b, and 34c are spaces into which the lower support ends 41e of the elastic supports 41, 42, and 43 are inserted, and are formed to correspond to the positions of the elastic supports 41, 42, and 43. .

In addition, fourth elastic supporter fixing holes 35a, 35b, and 35c are formed in each of the elastic supporter receiving grooves 34a, 34b, and 34c. The fourth elastic supporter fixing holes 35a, 35b, and 35c are formed to correspond to the third elastic supporter fixing hole 41g, and a separate fixing member is provided to the third elastic supporter fixing hole 41g and the fourth elastic supporter fixing hole. It is inserted into (35a, 35b, 35c) to fix the elastic supports (41, 42, 43) to the lower block (30).

The elastic supports 41, 42, and 43 elastically support the housing 10 and the lower block 30. Since the upper block 20 is installed to be fixed to the housing 10, as a result, the elastic supports 41, 42, and 43 elastically support the upper block 20 and the lower block 30.

When an external force is applied to the housing 10, the upper block 20 moves integrally with the housing 10, so the upper block 20 moves relative to the lower block 30. Conversely, when an external force is applied to the lower block 30, the lower block 30 moves relative to the upper block 20.

As the upper block 20 and the lower block 30 move relative to each other, the distance between the upper vertical electrodes 23a, 23b, and 23c and the lower vertical electrodes 33a, 33b, and 33c changes, and the upper horizontal electrode The distance between 24a, 24b, 24c and the lower horizontal electrode 31a varies.

The capacitance (C) of the capacitor is proportional to the permittivity (ε) and the overlap area (A), and is inversely proportional to the distance (d) between the electrodes (C = εA/d).

Therefore, the upper block 20 and the lower block 30 move relative to each other by the external force, and the gap between the upper vertical electrodes 23a, 23b, and 23c and the lower vertical electrodes 33a, 33b, and 33c and the upper horizontal When the distance between the electrodes 24a, 24b, 24c and the lower horizontal electrode 31a changes, the capacitance formed by the upper vertical electrodes 23a, 23b, 23c and the lower vertical electrodes 33a, 33b, 33c causes static electricity. The capacitance changes, and the capacitance of the capacitor formed by the upper horizontal electrodes 24a, 24b, and 24c and the lower horizontal electrode 31a changes.

The capacitive sensor 1 according to the present embodiment senses information on force components (Fx, Fy, Fz) and torque components (Tx, Ty, Tz) acting in three axial directions using the changing capacitance. .

An electronic circuit constituted by the PCB 21, the upper vertical electrodes 23a, 23b, and 23c, the lower vertical electrodes 33a, 33b, and 33c, the upper horizontal electrodes 24a, 24b, and 24c, and the lower horizontal electrode 31a. Is the capacitance between the upper vertical electrodes 23a, 23b, 23c and the lower vertical electrodes 33a, 33b, 33c and the capacitance between the upper horizontal electrodes 24a, 24b, 24c and the lower horizontal electrode 31a. It may be an electronic circuit that outputs a correspondingly changing signal.

As an example, the electronic circuit has a capacitance between the upper vertical electrodes 23a, 23b, and 23c and the lower vertical electrodes 33a, 33b, and 33c and between the upper horizontal electrodes 24a, 24b, and 24c and the lower horizontal electrode 31a. It may be an electronic circuit that outputs capacitance, respectively.

Alternatively, signals output from the electronic circuit may include information on force components (Fx, Fy, Fz) and torque components (Tx, Ty, Tz) acting in three axial directions. In this case, the capacitance between the upper vertical electrodes 23a, 23b, and 23c and the lower vertical electrodes 33a, 33b, and 33c and the capacitance between the upper horizontal electrodes 24a, 24b, and 24c and the lower horizontal electrode 31a A calculation unit may be included that calculates force components (Fx, Fy, Fz) and torque components (Tx, Ty, Tz) acting in three axial directions.

Hereinafter, the relationship between forces (Fx, Fy, Fz)/torques (Tx, Ty, Tz) and changes in capacitance acting in three axial directions will be described in detail with reference to FIGS. 4 to 11 . 4 to 11 are for explaining the relative movement between the electrodes of the capacitive sensor according to the first embodiment, and components unnecessary for explanation are omitted, and the upper block 20 and the lower block 30 are circular. Simplified.

4 is a diagram schematically illustrating initial positions of an upper vertical electrode and a lower vertical electrode of a capacitive sensor according to a first embodiment of the present invention.

As shown in FIG. 4, in the capacitive sensor 1 according to the first embodiment of the present invention, three upper vertical electrodes 23a, 23b, and 23c are provided at intervals of 120 degrees, and three lower vertical electrodes are provided. (33a, 33b, 33c) are provided to correspond one-to-one with the three upper vertical electrodes (23a, 23b, 23c). As described above, the three upper vertical electrodes 23a, 23b, and 23c are supported on the upper block 20, and the three lower vertical electrodes 33a, 33b, and 33c are supported on the base plate 31 of the lower block 30. ) is formed.

As shown in FIG. 4, in a situation where no external force is applied to the upper block 20 and the lower block 30, three upper vertical electrodes 23a, 23b, 23c and three lower vertical electrodes 33a, 33b , 33c) exist in a state of being approximately parallel and at regular intervals.

Hereinafter, for convenience of explanation, the upper vertical electrode 33a parallel to the X-axis in FIG. 4 is referred to as a first upper vertical electrode, and the upper vertical electrode 33a located in the +120 degree direction from the first upper vertical electrode 23a. The electrode 23b is referred to as a second upper vertical electrode, and the upper vertical electrode 23c located in a direction of -120 degrees from the first upper vertical electrode 23a is referred to as a third upper vertical electrode.

And, the lower vertical electrode 33a facing the first upper vertical electrode 23a is the first lower vertical electrode, and the lower vertical electrode 33b facing the second upper vertical electrode 23b is the second lower vertical electrode. , the lower vertical electrode 33c facing the third upper vertical electrode 23c is referred to as a third lower vertical electrode.

And, the lower block 30 is maintained in a fixed state, and the upper block 20 will be described on the premise that it moves relative to the lower block 30.

FIG. 5 is a diagram schematically illustrating a positional change of an upper vertical electrode and a lower vertical electrode that is changed by an X-direction force (Fx) acting on an upper block of a capacitive sensor according to a first embodiment of the present invention.

When a force Fx in the X direction acts on the housing 10, as shown in FIG. 5, the upper block 20 moves slightly in the X direction together with the housing 10. By the movement of the upper block 20, the distance between the first upper vertical electrode 23a and the first lower vertical electrode 33a does not change, and the second upper vertical electrode 23b and the second lower vertical electrode 33b do not change. ) becomes shorter, and the distance between the third upper vertical electrode 23c and the third lower vertical electrode 33c becomes longer.

Accordingly, the capacitance C1 between the first upper vertical electrode 23a and the first lower vertical electrode 33a hardly changes (the difference between the first upper vertical electrode 23a and the first lower vertical electrode 33a). When the overlap area is reduced, the capacitance may decrease slightly), the capacitance (C2) between the second upper vertical electrode 23b and the second lower vertical electrode 33b increases, and the third upper vertical electrode The capacitance C3 between 23c and the third lower vertical electrode 33c decreases.

As the X-direction force Fx applied to the housing 10 increases, the distance between the second upper vertical electrode 23b and the second lower vertical electrode 33b becomes shorter, and the third upper vertical electrode 23c and the third lower vertical electrode 33c is further increased.

Therefore, the capacitance C2 between Fx and the second upper vertical electrode 23b and the second lower vertical electrode 33b is proportional to Fx and the third upper vertical electrode 23c and the third lower vertical electrode 33c. ) between the capacitance (C3) is inversely proportional.

Using this relationship, the force (Fx) acting in the X direction can be detected.

FIG. 6 is a diagram schematically illustrating a change in position of an upper vertical electrode and a lower vertical electrode that is changed by a Y-direction force Fy acting on an upper block of a capacitive sensor according to a first embodiment of the present invention.

When a Y-direction force Fy acts on the housing 10, as shown in FIG. 6, the upper block 20 moves slightly in the Y-direction together with the housing 10. By the movement of the upper block 20, the distance between the first upper vertical electrode 23a and the first lower vertical electrode 33a becomes longer, and the second upper vertical electrode 23b and the second lower vertical electrode 33b The distance between them is shortened, and the distance between the third upper vertical electrode 23c and the third lower vertical electrode 33c is shortened.

Accordingly, the capacitance C1 between the first upper vertical electrode 23a and the first lower vertical electrode 33a decreases, and the capacitance between the second upper vertical electrode 23b and the second lower vertical electrode 33b decreases. The capacitance C2 increases, and the capacitance C3 between the third upper vertical electrode 23c and the third lower vertical electrode 33c increases.

As the Y-direction force Fy applied to the housing 10 increases, the distance between the first upper vertical electrode 23a and the first lower vertical electrode 33a becomes longer, and the second upper vertical electrode 23b and the second lower vertical electrode 33b is further shortened, and the distance between the third upper vertical electrode 23c and the third lower vertical electrode 33c is further shortened.

Therefore, the capacitance C1 between Fy and the first upper vertical electrode 23a and the first lower vertical electrode 33a is inversely proportional to Fy and the second upper vertical electrode 23b and the second lower vertical electrode 33b. ) is proportional to the capacitance C2, and the capacitance C3 between Fy and the third upper vertical electrode 23c and the third lower vertical electrode 33c is proportional.

Using this relationship, the force (Fy) acting in the Y direction can be detected.

FIG. 7 is a diagram schematically illustrating a positional change of an upper vertical electrode and a lower vertical electrode that is changed by a Z-direction torque (Tz) acting on an upper block of a capacitive sensor according to an exemplary embodiment of the present invention.

When a Z-direction torque Tz acts on the housing 10, as shown in FIG. 7, the upper block 20 rotates along with the housing 10 in the Z-direction. By the rotation of the upper block 20, the distance between the first upper vertical electrode 23a and the first lower vertical electrode 33a, the distance between the second upper vertical electrode 23b and the second lower vertical electrode 33b The distance and the distance between the third upper vertical electrode 23c and the third lower vertical electrode 33c become longer.

Therefore, the capacitance C1 between the first upper vertical electrode 23a and the first lower vertical electrode 33a and the capacitance C2 between the second upper vertical electrode 23b and the second lower vertical electrode 33b ) and the capacitance C3 between the third upper vertical electrode 23c and the third lower vertical electrode 33c decreases.

As the Z-direction torque Tz applied to the housing 10 increases, the distance between the first upper vertical electrode 23a and the first lower vertical electrode 33a, the distance between the second upper vertical electrode 23b and the second The distance between the lower vertical electrodes 33b and the distance between the third upper vertical electrode 23c and the third lower vertical electrode 33c are further increased.

Therefore, Tz is the capacitance C1 between the first upper vertical electrode 23a and the first lower vertical electrode 33a and the capacitance between the second upper vertical electrode 23b and the second lower vertical electrode 33b. (C2) and inversely proportional to the capacitance (C3) between the third upper vertical electrode 23c and the third lower vertical electrode 33c.

Using this relationship, the torque (Tz) acting in the Z direction can be detected.

8 is a diagram schematically illustrating initial positions of an upper horizontal electrode and a lower horizontal electrode of a capacitive sensor according to a first embodiment of the present invention.

As shown in FIG. 8 , in the capacitive sensor 1 according to the first embodiment of the present invention, three upper horizontal electrodes 24a, 24b, and 24c are provided on the lower surface of the upper block 20. As shown in FIG. 3, the three upper horizontal electrodes 24a, 24b, and 24c are provided at intervals of 120 degrees. Also, the lower horizontal electrode 31a protrudes from the base plate 31 of the lower block 30 .

As shown in FIG. 8, in a situation where no external force is applied to the upper block 20 and the lower block 30, the three upper horizontal electrodes 24a, 24b, 24c and the lower horizontal electrode 31a are approximately parallel It exists at regular intervals.

Hereinafter, for convenience of description, the upper horizontal electrode 24a positioned at the rightmost side of FIG. 8 is referred to as a first upper horizontal electrode, and the upper horizontal electrode 24b positioned at the farthest left is referred to as a second upper horizontal electrode. , the upper horizontal electrode 24c located in the center is referred to as a third upper horizontal electrode.

FIG. 9 is a diagram schematically showing position changes of the upper horizontal electrode and the lower horizontal electrode that are changed by a Z-direction force Fz acting on the upper block of the capacitive sensor according to the first embodiment of the present invention.

When a Z-direction force Fz acts on the housing 10, as shown in FIG. 9, the upper block 20 moves slightly in the Z-direction together with the housing 10. Due to the movement of the upper block 20, the distance between the three upper horizontal electrodes 24a, 24b and 24c and the lower horizontal electrode 31a becomes longer.

Therefore, the capacitance C4 between the first upper horizontal electrode 24a and the lower horizontal electrode 31a, the capacitance C5 between the second upper horizontal electrode 24b and the lower horizontal electrode 31a, and the third All capacitances C6 between the upper horizontal electrode 24c and the lower horizontal electrode 31a decrease.

As the Z-direction force Fz applied to the housing 10 increases, the distance between the three upper horizontal electrodes 24a, 24b and 24c and the lower horizontal electrode 31a becomes longer.

Therefore, Fz is the capacitance C4 between the first upper horizontal electrode 24a and the lower horizontal electrode 31a, the capacitance C5 between the second upper horizontal electrode 24b and the lower horizontal electrode 31a, and It is inversely proportional to the capacitance C6 between the third upper horizontal electrode 24c and the lower horizontal electrode 31a.

Using this relationship, the force (Fz) acting in the Z direction can be detected.

FIG. 10 is a diagram schematically illustrating a positional change of an upper horizontal electrode and a lower horizontal electrode that is changed by an X-direction torque (Tx) acting on an upper block of a capacitive sensor according to the first embodiment of the present invention.

When the X-direction torque Tx acts on the housing 10, as shown in FIG. 10, the upper block 20 rotates along with the housing 10 in the X-direction. By the rotation of the upper block 20, the distance between the first upper horizontal electrode 24a, the third upper horizontal electrode 24c and the lower horizontal electrode 31a is shortened, and the second upper horizontal electrode 24b and the lower The distance between the horizontal electrodes 31a becomes long.

Accordingly, the capacitance C4 between the first upper horizontal electrode 24a and the lower horizontal electrode 31a and the capacitance C6 between the third upper horizontal electrode 24c and the lower horizontal electrode 31a increase, , the capacitance C5 between the second upper horizontal electrode 24b and the lower horizontal electrode 31a decreases.

As the X-direction torque Tx applied to the housing 10 increases, the distance between the first upper horizontal electrode 24a, the third upper horizontal electrode 24c and the lower horizontal electrode 31a becomes shorter, 2 The distance between the upper horizontal electrode 24b and the lower horizontal electrode 31a becomes longer.

Therefore, the capacitance C4 between Tx and the first upper horizontal electrode 24a and the lower horizontal electrode 31a and the capacitance C6 between the third upper horizontal electrode 24c and the lower horizontal electrode 31a are In addition, Tx and the capacitance C5 between the second upper horizontal electrode 24b and the lower horizontal electrode 31a are inversely proportional.

Using this relationship, the torque Tx acting in the X direction can be detected.

FIG. 11 is a diagram schematically showing positional changes of upper and lower horizontal electrodes that are changed by Y-direction torque (Ty) acting on the upper block of the capacitive sensor according to the first embodiment of the present invention.

When Y-direction torque Ty acts on the housing 10, as shown in FIG. 11, the upper block 20 rotates along with the housing 10 in the Y-direction.

Since the second upper horizontal electrode 24b is located adjacent to the Y-axis, the distance between the second upper horizontal electrode 24b and the lower horizontal electrode 31a does not change significantly.

However, the distance between the first upper horizontal electrode 24a and the lower horizontal electrode 31a becomes longer, and the distance between the third upper horizontal electrode 24c and the lower horizontal electrode 31a becomes shorter.

Therefore, the capacitance C5 between the second upper horizontal electrode 24b and the lower horizontal electrode 31a hardly changes, and the capacitance between the first upper horizontal electrode 24a and the lower horizontal electrode 31a ( C4) decreases, and capacitance C6 between the third upper horizontal electrode 24c and the lower horizontal electrode 31a increases.

As the Y-direction torque (Ty) applied to the housing 10 increases, the distance between the first upper horizontal electrode 24a and the lower horizontal electrode 31a becomes longer, and the third upper horizontal electrode 24c and the lower The distance between the horizontal electrodes 31a becomes shorter.

Therefore, the capacitance C4 between Ty and the first upper horizontal electrode 24a and the lower horizontal electrode 31a is inversely proportional, and the capacitance between Ty and the third upper horizontal electrode 24c and the lower horizontal electrode 31a is inversely proportional. The capacitance C6 becomes proportional.

Using this relationship, the torque (Ty) acting in the Y direction can be detected.

The three-axis direction according to changes in the relative positions of the upper vertical electrodes 23a, 23b, and 23c, the lower vertical electrodes 33a, 33b, and 33c, and the upper horizontal electrodes 24a, 24b, and 24c with respect to the X, Y, and Z axes. Methods for detecting force components (Fx, Fy, Fz) and torque components (Tx, Ty, Tz) acting as .

Hereinafter, a capacitive sensor according to a second embodiment of the present invention will be described. For convenience of explanation, the same reference numerals are used for parts similar to those of the first embodiment, and descriptions of parts common to the first embodiment are omitted.

12 is an exploded perspective view schematically illustrating an upper block and a lower block of a capacitive sensor according to a second embodiment of the present invention, and FIG. 13 is an upper block of a capacitive sensor according to a second embodiment of the present invention. It is a perspective view showing the assembled state of the and lower blocks.

As shown in FIG. 12, the upper block 220 of the capacitive sensor 2 according to the second embodiment of the present invention has a similar shape to the lower horizontal electrode 31a of the first embodiment.

The upper block 220 includes a plate 221 forming a body, the side of the plate 221 functions as upper vertical electrodes 223a, 223b, and 223c, and the lower surface of the plate 221 serves as an upper horizontal electrode. function as That is, in this embodiment, the upper vertical electrodes 223a, 223b, and 223c are formed on the side of the upper block 220.

Meanwhile, the lower block 230 includes a plurality of lower vertical electrodes 233a, 233b, and 233c and a plurality of lower horizontal electrodes 232a, 232b, and 232c protruding from the upper surface of the base plate 231.

As shown in FIG. 13 , the plurality of lower horizontal electrodes 232a, 232b, and 232c overlap the lower surface of the plate 221 . The plurality of lower horizontal electrodes 232a, 232b, and 232c and the lower surface of the plate 221 do not contact each other.

In addition, the plurality of lower vertical electrodes 233a, 233b, and 233c are disposed to be spaced apart from the side surface of the plate 221, respectively. Sides of the plate 221 facing the lower vertical electrodes 233a, 233b, and 233c function as the upper vertical electrodes 223a, 223b, and 223c.

Although not shown, the capacitive sensor 2 according to the present embodiment also includes the housing 10 and the elastic supports 41, 42, and 43 similarly to the capacitive sensor 1 according to the first embodiment described above. can include Then, the upper block 220 is fixed to the housing 10, and the elastic supports 41, 42, and 43 elastically support the housing 10 and the lower block 230, respectively, so that the external forces (Fx, Fy, Fz, The upper block 220 and the lower block 230 may be relatively movable by Tx, Ty, and Tz.

In the capacitive sensor 2 according to the present embodiment, the upper vertical electrodes 223a, 223b, and 223c, the lower vertical electrodes 233a, 233b, and 233c, and the upper and lower horizontal electrodes 232a and 232b are formed by an external force. , 232c), it is possible to detect force components (Fx, Fy, Fz) and torque components (Tx, Ty, Tz) acting in three axial directions by using the change in the distance/capacitance between the spaces.

As a modified example of the capacitive sensor 2 according to the second embodiment, the upper block 220 and the lower block 230 may be arranged so that their positions are reversed. That is, the lower block 230 of FIGS. 12 and 13 is inverted 180 degrees and functions as an upper block, and the upper block 220 is inverted 180 degrees and functions as a lower block.

In this case, the plurality of lower vertical electrodes 233a, 233b, and 233c and the plurality of lower horizontal electrodes 232a, 232b, and 232c shown in FIG. 12 become upper vertical electrodes and upper horizontal electrodes, respectively. Also, the upper vertical electrodes 223a, 223b, and 223c formed on the side surfaces of the plate 221 function as lower vertical electrodes, and one surface of the plate 221 functions as a lower horizontal electrode.

That is, in the capacitive sensor according to the modified example, the upper vertical electrode protrudes from the lower surface of the upper block, and the lower vertical electrode is formed on the side surface of the lower block.

Hereinafter, a capacitive sensor according to a third embodiment of the present invention will be described. For convenience of description, the same reference numerals are used for parts similar to those of the first embodiment, and descriptions of parts common to the first embodiment are omitted.

14 is an exploded perspective view schematically showing a lower surface of an upper block and a lower surface of a lower block of a capacitive sensor according to a third embodiment of the present invention, and FIG. 15 is an electrostatic capacitance according to a third embodiment of the present invention. It is a perspective view showing an assembled state of the upper and lower blocks of the capacitive sensor.

As shown in FIG. 14, the upper block 320 of the capacitive sensor 3 according to the third embodiment of the present invention includes a plurality of upper vertical electrodes 323a protruding from the lower surface of the upper plate 321, 323b and 323c) and a plurality of upper horizontal electrodes 324a, 324b and 324c.

The lower block 330 includes a plurality of lower vertical electrodes 333a, 333b, and 333c and a plurality of lower horizontal electrodes 332a, 332b, and 332c protruding from the upper surface of the base plate 331.

As shown in FIG. 15 , the plurality of upper vertical electrodes 323a, 323b, and 323c and the plurality of lower vertical electrodes 333a, 333b, and 333c partially overlap each other and are disposed to face each other without touching each other. At the same time, the plurality of upper vertical electrodes 323a, 323b, and 323c are formed not to contact the base plate 331, and the plurality of lower vertical electrodes 333a, 333b, and 333c are formed not to come into contact with the upper plate 321. .

In addition, the plurality of upper horizontal electrodes 324a, 324b, and 324c are positioned on top of the plurality of lower horizontal electrodes 332a, 332b, and 332c to overlap each other without contacting each other.

Although not shown, the capacitive sensor 3 according to the present embodiment also includes the housing 10 and the elastic supports 41, 42, and 43 similarly to the capacitive sensor 1 according to the first embodiment described above. can include Then, the upper block 320 is fixed to the housing 10, and the elastic supports 41, 42, and 43 elastically support the housing 10 and the lower block 330, respectively, so that the external forces (Fx, Fy, Fz, The upper block 320 and the lower block 330 may be relatively movable by Tx, Ty, and Tz.

In the capacitive sensor 3 according to the present embodiment, the upper vertical electrodes 323a, 323b, and 323c, the lower vertical electrodes 333a, 333b, and 333c, and the upper horizontal electrodes 324a, 324b, and 324c are separated by an external force. Force components (Fx, Fy, Fz) and torque components (Tx, Ty, Tz) acting in the 3-axis direction can be detected using the change in spacing/capacitance between the lower horizontal electrodes 332a, 332b, and 332c. there is.

Hereinafter, a capacitive sensor according to a fourth embodiment of the present invention will be described. For convenience of description, the same reference numerals are used for parts similar to those of the third embodiment, and descriptions of parts common to those of the first embodiment are omitted.

16 is an exploded perspective view schematically showing a lower surface of an upper block and a lower surface of a lower block of a capacitive sensor according to a fourth embodiment of the present invention.

As shown in FIG. 16, the capacitive sensor 4 according to the fourth embodiment of the present invention has an upper block 420 compared to the capacitive sensor 3 according to the third embodiment described above. shape is slightly different.

In the capacitive sensor 4 according to the fourth embodiment of the present invention, a plurality of upper vertical electrodes 423a, 423b, and 423c are recessed from the lower surface of the upper plate 321.

Accordingly, some of the plurality of lower vertical electrodes 333a, 333b, and 333c formed on the lower block 330 are inserted into the upper block 420 to face the upper vertical electrodes 423a, 423b, and 423c.

As some of the lower vertical electrodes 333a, 333b, and 333c are inserted into the upper block 420, the gap between the upper block 420 and the lower block 330 narrows, so that the plurality of upper horizontal electrodes 424a, 424b and 424c) may have shorter protruding lengths than those of the third embodiment, or may be formed on the same plane as the lower surface of the upper plate 321 .

As described above, the capacitive sensor according to the embodiments of the present invention uses the relative movement of the upper block and the upper block caused by an external force in the upper vertical electrode and the lower vertical electrode, and the upper horizontal electrode and the lower horizontal electrode. Based on the change in capacitance, force components (Fx, Fy, Fz) and torque components (Tx, Ty, Tz) acting in three axial directions are detected.

Those skilled in the art to which the present invention pertains will understand that the present invention can be embodied in other specific forms without changing its technical spirit or essential features. Therefore, the embodiments described above should be understood as illustrative in all respects and not limiting. The scope of the present invention is indicated by the following claims rather than the detailed description above, and all changes or modifications derived from the meaning and scope of the claims and equivalent concepts should be construed as being included in the scope of the present invention. do.

1, 2, 3, 4: capacitive sensor 10: housing 11: body
12a, 12b, 12c: first upper block fixing hole
13a, 13b, 13c: first elastic support fixing hole
14: accommodation space 20. 220, 320, 420: upper block 21: PCB
21a, 21b, 21c: second upper block fixing hole
23a, 23b, 23c, 223a, 223b, 223c, 323a, 323b, 323c, 423a, 423b, 423c: upper vertical electrode
24a, 24b, 24c, 324a, 324b, 324c, 424a, 424b, 424c: upper horizontal electrode
30: lower block 31, 231, 331: base plate
31a, 232a, 232b, 232c, 332a, 332b, 332c: lower horizontal electrode
32a, 32b, 32c: electrode groove
33a, 33b, 33c, 233a, 233b, 233c, 333a, 333b, 333c: lower vertical electrode
34a, 34b, 34c: elastic support body receiving groove
35a, 35b, 35c: fourth elastic support fixing hole
41, 42, 43: elastic support 41a: upper support
41b: upper rod 41c: elastic part
41d: lower rod 41e: lower support end
41f: second elastic supporter fixing hole 41g: third elastic supporter fixing hole

Claims (12)

upper block;
lower block;
a plurality of elastic supports for elastically supporting the upper block and the lower block;
an upper vertical electrode formed to have a surface perpendicular to the lower surface of the upper block;
a lower vertical electrode formed to have a surface perpendicular to an upper surface of the lower block and disposed to face the upper vertical electrode such that at least a portion thereof overlaps with the upper vertical electrode;
an upper horizontal electrode formed to have a surface parallel to or formed on the same plane as the lower surface of the upper block;
a lower horizontal electrode formed to have a surface parallel to or formed on the same plane as the upper surface of the lower block, and disposed to face the upper horizontal electrode such that at least a portion overlaps with the upper horizontal electrode;
The upper vertical electrode, the lower vertical electrode, the upper horizontal electrode, and the lower horizontal electrode are included as part of a circuit, and the upper vertical electrode is changed by a force or torque acting on at least one of the upper block and the lower block. and an electronic circuit outputting signals corresponding to changes in capacitance between electrodes and the lower vertical electrode and changes in capacitance between the upper horizontal electrode and the lower horizontal electrode. According to claim 1,
The capacitance change between the upper vertical electrode and the lower vertical electrode is caused by a change in the distance between the upper vertical electrode and the lower vertical electrode,
The capacitance type sensor, wherein the change in capacitance between the upper horizontal electrode and the lower horizontal electrode is caused by a change in the distance between the upper horizontal electrode and the lower horizontal electrode. According to claim 1,
The upper vertical electrode is provided with three or more,
Wherein the lower vertical electrodes are provided to correspond to the upper vertical electrodes, respectively. According to claim 1,
Wherein the upper vertical electrode protrudes from the lower surface of the upper block, and the lower vertical electrode protrudes from the upper surface of the lower block. According to claim 1,
Wherein the upper vertical electrode is recessed from the lower surface of the upper block, and the lower vertical electrode is formed to protrude from the upper surface of the lower block. According to claim 1,
Wherein the upper vertical electrode protrudes from the lower surface of the upper block, and the lower vertical electrode is recessed from the upper surface of the lower block. According to claim 1,
The upper vertical electrode is formed on a side surface of the upper block, and the lower vertical electrode protrudes from the upper surface of the lower block. According to claim 1,
Wherein the upper vertical electrode protrudes from a lower surface of the upper block, and the lower vertical electrode is formed on a side surface of the lower block. According to claim 1,
The upper horizontal electrode is provided with three or more,
Wherein the lower horizontal electrodes are provided to correspond to the upper horizontal electrodes, respectively. delete According to claim 1,
The signal includes information on each of force components (Fx, Fy, Fz) and torque components (Tx, Ty, Tz) acting in three axial directions orthogonal to each other. According to claim 1,
Wherein the signal includes information on the capacitance between the upper vertical electrode and the lower vertical electrode and the capacitance between the upper horizontal electrode and the lower horizontal electrode.

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