KR102556322B1 - Storage - Google Patents

Abstract

An embodiment of the present invention includes a cover for accommodating an object to be processed and having a hole on one surface, and a connecting member having one side adjacent to the object and the other side electrically connected to an external electrode, The object to be processed provides a storage container in which plasma is generated through the hole.

Description

Storage container {Storage}

The present invention relates to a storage container, and more particularly, to a storage container in which plasma is generated.

An implant refers to a substitute for restoring human tissue when the original human tissue is lost, but in dentistry, it refers to an artificial tooth.

A dental implant is an artificial tooth structure formed by implanting an artificial tooth root made of titanium, etc., which is not rejected by the human body, into the bone where the tooth has been extracted to replace the tooth root of a lost tooth, attaching it to the alveolar bone, and fixing a prosthesis to the artificial tooth root. This means a dental procedure.

In general, a dental implant consists of a fixture made of titanium and placed in the alveolar bone, an abutment fixed on the fixture to support a prosthesis, and an abutment screw to fix the abutment to the fixture. ) and a prosthesis as an artificial tooth fixed to the abutment.

Since each component of such a dental implant must be maintained in a sterilized state and a surface activated state as they are components inserted into human tissue, it is the most important task to prevent contamination or damage during packaging, transportation, and opening of the packaging. is becoming

In particular, in the case of a predetermined ampoule for storing a fixture for implantation, the fixture is directly placed in the alveolar bone, so that in storing the fixture in the ampoule, a configuration for maintaining sterility and preventing contamination and damage to the fixture this is required

(Patent Document 1) KR 2009-0000395 A (2009.01.07)

A technical problem to be achieved by the present invention is to provide a storage container in which an object to be treated can be easily subjected to plasma surface treatment by forming a moving path of plasma inside the container when the surface of the container is subjected to plasma surface treatment.

An embodiment of the present invention includes a cover for accommodating an object to be processed and having a hole on one surface, and a connecting member having one side adjacent to the object and the other side electrically connected to an external electrode, The object to be processed provides a storage container in which plasma is generated through the hole.

In one embodiment of the present invention, the object to be treated is made of a conductive material and may be an electrode for generating plasma.

In one embodiment of the present invention, a moving path of plasma may be formed through the hole.

In one embodiment of the present invention, the cover accommodates the object to be processed and includes an inner cover having a first hole on one surface, and an outer cover surrounding the inner cover and having a second hole on one surface. can include

In one embodiment of the present invention, one surface of the outer cover provided with the second hole may be a surface facing the one surface of the inner cover provided with the first hole.

In one embodiment of the present invention, the first hole is provided on one surface of the inner cover perpendicular to the longitudinal direction of the storage container, and the second hole is provided on a surface of the outer cover perpendicular to the longitudinal direction of the storage container. It may be provided on one side.

In one embodiment of the present invention, the first hole is provided on a side surface of the inner cover parallel to the longitudinal direction of the storage container, and the second hole is provided on a side surface of the outer cover parallel to the longitudinal direction of the storage container. It may be provided on the side.

In one embodiment of the present invention, the first hole and the second hole may at least partially overlap.

In one embodiment of the present invention, the storage container further includes a support member for supporting one end of the object to be treated, and the inner cover protrudes into a main body portion surrounding the object to be treated and an inside of the main body portion. A prevention part surrounding a part of the support member may be included.

In one embodiment of the present invention, the support member may include a support portion supporting one end of the object to be processed, and a protrusion protruding from one surface of the support portion and surrounded by the prevention portion of the inner cover.

In one embodiment of the present invention, the thickness of the prevention portion may be thicker than the thickness of the body portion.

In one embodiment of the present invention, the connection member includes a contact portion contacting one end of the object to be processed, and the contact portion protrudes out of the connection member and can be inserted into one end of the object to be treated.

In one embodiment of the present invention, the outer cover may be rotatably provided with respect to the inner cover.

In one embodiment of the present invention, the outer cover includes a first outer cover provided with the second hole and a second outer cover coupled to the first outer cover, the first outer cover is the second outer cover It may be rotatably provided with respect to the outer cover.

In one embodiment of the present invention, the outer cover may have an exposure hole formed to expose the other side of the connection member.

In the storage container according to the embodiments of the present invention, the first hole provided on one surface of the inner cover and the second hole provided on one surface of the outer cover are the first hole and the first hole when plasma surface-treating the object to be treated. A plasma movement path is formed through the two holes, so that plasma can be easily generated inside the storage container. Accordingly, the object to be treated can be easily subjected to plasma surface treatment through the first hole and the second hole.

1 is a perspective view showing a storage container according to an embodiment of the present invention.
2 is an exploded perspective view of the storage container of FIG. 1;
3 is a cross-sectional view taken along line II of FIG. 1 .
Figure 4 is a plan view of Figure 1;
5 is a cross-sectional view of a storage container according to another embodiment of the present invention.
6 is a side view of a storage container according to another embodiment of the present invention.
FIG. 7 is a cross-sectional view taken along line VII-VII of FIG. 6 .
8 is a view showing an embodiment in which a storage container according to an embodiment of the present invention is stored in a plasma processing apparatus.

Hereinafter, the following embodiments will be described in detail with reference to the accompanying drawings, and when describing with reference to the drawings, the same or corresponding components are given the same reference numerals, and redundant description thereof will be omitted.

Since the technical idea of the present invention can be made with various changes and can have various embodiments, specific embodiments will be illustrated in the drawings and described in detail. However, this is not intended to limit the technical spirit of the present invention to specific embodiments, and should be understood to include all modifications, equivalents, or substitutes included in the scope of the technical spirit of the present invention.

In describing the technical idea of the present invention, if it is determined that a detailed description of related known technologies may unnecessarily obscure the subject matter of the present invention, the detailed description will be omitted. In addition, numbers (eg, first, second, etc.) used in the description process of this specification are only identifiers for distinguishing one component from another component.

In addition, in this specification, when one component is referred to as “connected” or “connected” to another component, the one component may be directly connected or directly connected to the other component, but in particular Unless otherwise described, it should be understood that they may be connected or connected via another component in the middle.

In addition, terms such as "~ unit", "~ group", "~ character", and "~ module" described in this specification mean a unit that processes at least one function or operation, which includes a processor, a micro Processor (Micro Processor), Micro Controller, CPU (Central Processing Unit), GPU (Graphics Processing Unit), APU (Accelerate Processor Unit), DSP (Drive Signal Processor), ASIC (Application Specific Integrated Circuit), FPGA (Field Programmable Gate Array), etc., or a combination of hardware and software, or may be implemented in a form combined with a memory storing data necessary for processing at least one function or operation. .

In addition, it is intended to make it clear that the classification of components in this specification is merely a classification for each main function in charge of each component. That is, two or more components to be described below may be combined into one component, or one component may be divided into two or more for each more subdivided function. In addition, each component to be described below may additionally perform some or all of the functions of other components in addition to its main function, and some of the main functions of each component may be performed by other components. Of course, it may be dedicated and performed by .

1 is a perspective view showing a storage container according to an embodiment of the present invention, FIG. 2 is an exploded perspective view of the storage container of FIG. 1, FIG. 3 is a cross-sectional view taken along line II of FIG. 1, and FIG. 1 is a plan view.

Referring to FIGS. 1 to 4 , the storage container 100 according to an embodiment of the present invention may include a cover and a connection member 150 . In addition, the storage container 100 may further include a support member 140 , a holder block 160 and a fixing member 170 .

The cover may include an inner cover 110 and an outer cover 120 .

The inner cover 110 may accommodate the object to be processed 130 therein, and the outer cover 120 may surround the inner cover 110 . The inner cover 110 and the outer cover 120 may perform a function of protecting the object to be processed 130 together.

The inner cover 110 and the outer cover 120 may be made of an insulating material, for example, a resin material. In addition, the inner cover 110 and the outer cover 120 may be made of a transparent material so that the object to be processed 130 stored therein can be checked.

The inner cover 110 may have a first hole 1101 on one surface. In exemplary embodiments, the first hole 1101 may be provided on one surface of the inner cover 110 perpendicular to the longitudinal direction (z direction) of the storage container 100 .

The outer cover 120 may include a first outer cover 121 and a second outer cover 122 that are detachable from each other. Here, the first outer cover 121 may be an upper cover disposed adjacent to the object to be processed 130, and the second outer cover 122 may be a lower cover fitted to the upper cover.

In this case, the first outer cover 121 may be made of a transmissive material, and the second outer cover 122 may be made of an impermeable material. A connection member 150 and a holder block 160 to be described below may be accommodated in the second outer cover 112 .

The first outer cover 121 may have a second hole 1211 on one surface.

In exemplary embodiments, a plurality of first holes 1101 may be provided on one surface of the inner cover 110, and a plurality of second holes 1211 may be provided on one surface of the first outer cover 121. And, the first hole 1101 and the second hole 1211 may have various shapes.

In exemplary embodiments, one surface of the first outer cover 121 provided with the second hole 1211 may be a surface facing one surface of the inner cover 110 provided with the first hole 1101, Accordingly, the second hole 1211 may be provided on one surface of the outer cover 120 perpendicular to the z direction.

In example embodiments, the first hole 1101 and the second hole 1211 may at least partially overlap.

In one embodiment, the first outer cover 121 may be rotatably provided with respect to the inner cover 110 . In this case, while the object to be processed 130 is stored in the storage container 100, the first hole 1101 and the second hole 1211 may not overlap. contamination can be prevented. Thereafter, the storage container 100 may be seated in the plasma processing device (see 10 in FIG. 6 ), and the first hole ( 1101) and the second hole 1211 may at least partially overlap.

The storage container 100 may communicate with the outside through the first hole 1101 and the second hole 1211 . Specifically, before subjecting the object 130 to plasma surface treatment, air inside the container 100 may be exhausted through the first hole 1101 and the second hole 1211 . In addition, during the surface treatment of the object 130 with plasma, the first hole 1101 and the second hole 1211 provide a path for plasma to move to the object 130, so that the first hole 1101 and Plasma surface treatment of the object to be treated 130 may be performed through the second hole 1211 .

The object to be treated 130 may be any object that can be sterilized through plasma treatment, and for example, may be a biomaterial such as an implant fixture or a bone graft material.

In one embodiment, the object to be treated 130 may be made of a material having conductivity itself. Accordingly, since the object to be treated 130 can serve as an electrode for generating plasma when the surface of the object to be treated 130 is subjected to plasma surface treatment, the clogging effect of the dielectric layer can be reduced. The object to be processed 130 may be made of a material that is harmless to the human body and easily fused with bone tissue, such as titanium, but is not limited thereto.

In one embodiment, the object to be treated 130 may be configured as a predetermined structure that is inserted into the alveolar bone and supports the artificial tooth. The object to be processed 130 extends in the vertical direction and may have a column shape as a whole.

In one embodiment, the object to be processed 130 may have a screw-like structure to increase a contact area with the surrounding area, and may have a structure in which an outer diameter expands or contracts in one direction.

If the first hole 1101 is not formed on one surface of the inner cover 110 and the second hole 1211 is not formed on one surface of the first outer cover 121, the container 100 is completely sealed. , It may be difficult to generate plasma inside the storage container 100 when the plasma surface treatment of the object 130 is performed. Specifically, the object to be processed 130 may be an electrode for generating plasma, but since the inner cover 110 and the first outer cover 121 have a high dielectric constant and are completely sealed, an electric field is applied to the inner cover. 110 and the first outer cover 121 may fall significantly, and consequently, it may be difficult to generate plasma inside the container 100.

In other words, a normal dielectric has a dielectric constant (k) of about 10, and because of this, the voltage drop may be 10 times higher than that of air even when passing through the same thickness. That is, in forming an electric field inside the cover, due to the cover made of dielectric, the thickness of the cover feels as if it is 10 times or more, and when sealed by the storage container 100, when passing through the cover As a result of the large electric field, it may be difficult to generate plasma inside the cover.

However, in exemplary embodiments, a first hole 1101 may be formed on one surface of the inner cover 110 and a second hole 1211 may be provided on one surface of the first outer cover 121 .

First, air inside the storage container 100 can be smoothly exhausted through the first hole 1101 and the second hole 1211 . Accordingly, the inside of the container 100 can be easily vacuumed through the first hole 1101 and the second hole 1211 before subjecting the object 130 to plasma surface treatment.

Thereafter, the electric field can be well transmitted through the first hole 1101 and the second hole 1211 while the plasma surface treatment of the object 130 is performed. That is, a moving path of plasma is formed through the first hole 1101 and the second hole 1211 so that plasma can be easily generated inside the container 100 . Accordingly, the object to be treated 130 can be easily subjected to plasma surface treatment through the first hole 1101 and the second hole 1211 .

In addition, as another embodiment, even when the first hole 1101 and the second hole 1211 partially overlap, a detour structure is formed through the gap, thereby realizing an effect of shortening the effective length of the dielectric. Therefore, plasma discharge can be easily performed on the surface of the object to be treated 130 inside the cover.

1 to 4, the first hole 1101 is provided only on one surface of the inner cover 110 perpendicular to the z direction, and the second hole 1211 is perpendicular to the z direction of the first outer cover 121. Although it is shown that it is provided on only one side, the present invention is not necessarily limited thereto.

In one embodiment, the first hole 1101 may be provided only on the side surface of the inner cover 110, and the second hole 1211 may be provided only on the side surface of the first outer cover 121.

In another embodiment, the first hole 1101 is provided on one surface perpendicular to the z-direction and a side surface parallel to the z direction of the inner cover 110, and the second hole 1211 is provided on the first outer cover 121. It may be provided on one side perpendicular to the z direction and one side parallel to the z direction.

In another embodiment, the first hole 1101 is provided only on one surface of the inner cover 110 perpendicular to the z direction, but the second hole 1211 is parallel to the z direction of the first outer cover 121. It is provided on only one side, or the first hole 1101 is provided only on the side parallel to the z direction of the inner cover 110, but the second hole 1211 is provided on one side perpendicular to the z direction of the first outer cover 121. It can be provided only in In this case, the first hole 1101 and the second hole 1211 do not overlap, but a plasma movement path may be provided through the first hole 1101 and the second hole 1211 .

The support member 140 may support one end of the object to be processed 130 . Accordingly, the support member 140 prevents the object to be processed 130 from falling down and does not deviate from the center of the storage container 100 in the horizontal direction so as to stably fix and store the object to be treated 130. can be done

In example embodiments, the support member 140 may be made of the same material as the object to be treated 130, and thus contamination and damage to the object to be treated 130 may be prevented.

In example embodiments, the support member 140 may include a support portion 141 supporting one end of the object to be processed 130 and a protrusion 142 protruding from one surface of the support portion 141 .

The support part 141 may have a support groove 1411 on the other side opposite to one side, and one end of the object to be processed 130 may be inserted into the support groove 1411 and supported.

On the other hand, the inner cover 110 includes a body portion 111 surrounding the object to be processed 130 and a prevention portion 112 that protrudes into the inside of the body portion 111 and surrounds a part of the support member 140. can do. In example embodiments, the prevention part 112 may have a first width w1 in the x-direction perpendicular to the z-direction, and the support part 141 may have a second width w1 in the x-direction perpendicular to the z-direction. It may have a width w2. The first width w1 may be equal to or larger than the second width w2, and thus the prevention part 112 surrounds all surfaces of the protruding part 142 and one surface of the support part 141 perpendicular to the z direction. can be rice

If the inner cover 110 does not include the prevention part 112, when the object to be treated 130 is subjected to the plasma surface treatment, the support member 140 may be exposed to plasma and subjected to the plasma surface treatment together. That is, since the plasma is distributed to the support member 140 , the surface of the object to be treated 130 may not be properly treated with plasma.

However, in exemplary embodiments, since the prevention part 112 is made of an insulating material and surrounds all surfaces of the protruding part 142 and one surface of the support part 141, it is difficult for the support member 140 to be exposed to plasma. It can be minimized, and accordingly, the prevention unit 112 allows the plasma to be concentrated on the object to be treated 130, so that the object to be treated 130 can be properly plasma-surface treated.

In example embodiments, the body portion 111 may have a first thickness t1 in the x direction perpendicular to the z direction, and the prevention portion 112 may have a second thickness t2 in the z direction. , and the second thickness t2 may be thicker than the first thickness t1. The protrusion 142 protrudes toward the first hole 1101 and the second hole 1211 and may be vulnerable to plasma exposure, but the prevention portion 112 is formed thick in the z direction and all of the protrusion 142 Since it surrounds the surface, exposure of the protruding portion 142 to plasma can be completely blocked.

In exemplary embodiments, the prevention part 112 may be provided with an insertion groove 1111 on one surface, and the protrusion 142 may be inserted into and fitted into the insertion groove 1111. That is, one end of the object to be processed 130 may be inserted into the support groove 1411 and supported by the support portion 141, and the support member 140 may be inserted into the insertion groove 1111 and supported by the prevention portion 112. Therefore, one end of the object to be processed 130 may be supported by the support member 140 and the inner cover 110 .

One side of the connecting member 150 may be adjacent to the other end of the object to be processed 130 and the other side may be electrically connected to an external electrode. The connection member 150 is made of a conductive material, and can receive external power through the exposed other side and transmit it to the object to be processed 130 . To this end, a first exposure hole 1221 for exposing the other side of the connecting member 150 may be provided on one surface of the second outer cover 122 . In example embodiments, the other side of the connecting member 150 and one surface of the second outer cover 122 may be disposed at the same position in the z direction, and thus the first exposure hole 1221 is formed by the connecting member. It may be disposed at the same position as the other side of 150 in the z direction.

In one embodiment, the connecting member 150 may be made of a material such as aluminum (Al). Through this, the connection member 150 may secure stability of electrical connection with the object to be processed 130 .

In one embodiment, the connecting member 150 is made of a magnetic material, and can secure connectivity with an electrode of an external plasma processing device. For example, the connection member 150 may be made of a material such as iron (Fe) or nickel (Ni).

The connection member 150 may include a contact portion 151 that contacts the other end of the object to be processed 130 on one side. In example embodiments, the contact portion 151 may protrude to the outside of the connecting member 150 and may have a pointed shape. In this case, the object to be processed 130 may have a sharp contact groove at the other end, and the contact groove may be formed in a shape corresponding to the shape of the contact portion 151, and thus the contact portion 151 may have a shape corresponding to the contact portion 151. Can be inserted into the groove. The connecting member 150 may increase a contact area with the object to be processed 130 through the contact portion 151 having the above-described shape, thereby securing stable electrical connectivity.

In addition, since the contact portion 151 of the connecting member 150 is inserted into the contact groove of the object to be processed 130, the connecting member 150 can support the other end of the object to be treated 130. That is, the support member 140 and the inner cover 110 may support one end of the object to be processed 130, and the connection member 150 may support the other end of the object to be treated 130. there is. Accordingly, the support member 140, the inner cover 110, and the connection member 150 can stably fix and store the object to be treated 130 together.

The holder block 160 may surround and fix the connecting member 150 . Accordingly, the holder block 160 may more stably fix the object to be processed 130 supported by the connecting member 150 .

The holder block 160 may be connected to and coupled to the inner cover 110 .

The holder block 160 is made of an insulating material so that the electrical connection to the object to be processed 130 can be directly connected through the connecting member 150 .

The fixing member 170 is disposed between the inner cover 110 and the holder block 160 and may perform a function of fixing the object to be processed 130 . Accordingly, the fixing member 170 may perform a function of stably fixing and storing the object to be processed 130 together with the support member 140 , the inner cover 110 , and the connection member 150 .

In addition, the fixing member 170 may press the side of the object 130 to restrict the movement of the object 130 in a horizontal direction, and thus the object 130 and the connecting member 150 It is possible to secure the stability of the electrical connection with the

The fixing member 170 is formed in a ring shape, and one side is open so that it can be inserted into the object to be processed 130 through the open area. In example embodiments, the fixing member 170 may be made of an elastic material.

5 is a cross-sectional view of a storage container according to another embodiment of the present invention.

Referring to FIG. 5 , in the storage container 100 according to another embodiment, only the structure of the second outer cover 122 is different from that of the first embodiment, and other configurations are the same as those of the first embodiment, so duplicate descriptions will be omitted. do.

The storage container 100 according to another embodiment may include a cover, a support member 140, a connection member 150, a holder block 160, and a fixing member 170.

The cover may include an inner cover 110 and an outer cover 120 .

The inner cover 110 may accommodate the object to be processed 130 therein, and the outer cover 120 may surround the inner cover 110 . The inner cover 110 and the outer cover 120 may perform a function of protecting the object to be processed 130 together.

The inner cover 110 and the outer cover 120 may be made of an insulating material, for example, a resin material. Accordingly, the inner cover 110 and the outer cover 120 may have a high dielectric constant value (dielectric constant, k). In one embodiment, the dielectric constant value of the inner cover 110 and the outer cover 120 may be about 10. In addition, the inner cover 110 and the outer cover 120 may be made of a transparent material so that the object to be processed 130 stored therein can be confirmed.

The object to be treated 130 may be any object that can be sterilized through plasma treatment, and for example, may be a biomaterial such as an implant fixture or a bone graft material. In one embodiment, the object to be treated 130 may be made of a material having conductivity itself.

The support member 140 may support one end of the object to be processed 130 . Accordingly, the support member 140 prevents the object to be processed 130 from falling down and does not deviate from the center of the storage container 100 in the horizontal direction to stably fix and store the object to be treated 130. can be done

One side of the connecting member 150 may be adjacent to the other end of the object to be processed 130 and the other side may be electrically connected to an external electrode. The connection member 150 is made of a conductive material, and can receive external power through the exposed other side and transmit it to the object to be processed 130 . To this end, a first exposure hole 1221 for exposing the other side of the connecting member 150 may be provided on one surface of the second outer cover 122 . In example embodiments, one surface of the second outer cover 122 may be disposed at a lower position in the z direction than the other side of the connecting member 150, and thus the first exposure hole 1221 is formed by the connecting member 150. It may be disposed at a lower position in the z direction than the other side of (150).

In one embodiment, an electrode for applying power may be formed on an upper surface of the seating part 12 on which the storage container 100 is seated, and the electrode may protrude toward the storage container 100 in the z direction. there is. In this case, the electrode may be inserted into the storage container 100 through the first exposure hole 1221 and contact the other side of the connecting member 150 while being fitted. That is, since the electrode can be coupled with the storage container 100 to apply power, stable electrical connectivity can be secured.

In another embodiment, the storage container 100 may further include a power applying member (not shown) having one end connected to the other side of the connection member 150 and the other end connected to the seating portion 12 . The power applying member may be made of the same material as the connecting member 150 . The power applying member passes through the first exposure hole 1221 and is disposed between the other side of the connecting member 150 and the electrode of the seating portion 12, thereby connecting the other side of the connecting member 150 and the seating portion 12. can Accordingly, since the power applying member can connect the connecting member 150 and the seating portion 12 more firmly, stable electrical connectivity can be secured.

The holder block 160 may surround and fix the connecting member 150 . Accordingly, the holder block 160 may more stably fix the object to be processed 130 supported by the connecting member 150 .

The fixing member 170 is disposed between the inner cover 110 and the holder block 160 and may perform a function of fixing the object to be processed 130 . Accordingly, the fixing member 170 may perform a function of stably fixing and storing the object to be processed 130 together with the support member 140 , the inner cover 110 , and the connection member 150 .

6 is a side view of a storage container according to another embodiment of the present invention, and FIG. 7 is a cross-sectional view taken along line VII-VII of FIG. 6 . Since a storage container according to another embodiment includes components substantially the same as or similar to those of the storage container described with reference to FIGS. 1 to 5 , redundant descriptions thereof will be omitted.

Referring to FIGS. 6 and 7 , the storage container 100 according to another embodiment may include a cover, a connection member 150, and a fixing member 170.

The cover may include an upper cover 124 , a central cover 126 and a lower cover 128 .

The upper cover 124 may be coupled to an upper portion of the central cover 126 and the lower cover 128 may be coupled to a lower portion of the central cover 126 .

In one embodiment, the coupling of the upper cover 124 and the central cover 126 and the coupling of the lower cover 128 and the central cover 126 may be coupled by a screw coupling method or an interference fit coupling method.

The cover can accommodate the object to be processed 130 therein, and the upper cover 124, the central cover 126 and the lower cover 128 can perform a function of protecting the object to be treated 130 together. there is. In one embodiment, the central cover 126 may accommodate the target object 130 therein.

The upper cover 124, the central cover 126, and the lower cover 128 may be made of an insulating material, for example, a resin material. In addition, the upper cover 124, the central cover 126, and the lower cover 128 may be made of a transparent material so that the object to be processed 130 stored therein can be confirmed. In one embodiment, the target object 130 may be accommodated in the lower cover 128 . In addition, a connecting member 150 and a fixing member 170 to be described below may be accommodated in the lower cover 128 .

The cover may have a third hole 1281 on one surface. In example embodiments, the third hole 1281 may be provided on one surface of the cover perpendicular to the z direction. In one embodiment, the third hole 1281 may be provided on one surface of the lower cover 128 perpendicular to the z direction. Accordingly, the side surface of the object to be processed 130 may be exposed to the outside through the third hole 1281 .

6 and 7 show that one third hole 1281 is provided on one surface of the cover and has a rectangular shape, but the present invention is not necessarily limited thereto, and the third hole 1281 is It may be provided in plurality on one surface of the cover and may have various shapes.

The storage container 100 may communicate with the outside through the third hole 1281 . Specifically, before subjecting the object 130 to plasma surface treatment, air inside the storage container 100 may be exhausted through the third hole 1281 . In addition, during surface treatment of the object 130 with plasma, the third hole 1281 provides a path for the plasma to move to the object 130, so that the object 130 can be treated through the third hole 1281. Plasma surface treatment of can be performed.

If the storage container 100 is completely sealed because the third hole 1281 is not provided on one surface of the lower cover 128, when the object to be treated 130 is subjected to plasma surface treatment, the inside of the storage container 100 is plasma may be difficult to occur. Specifically, the object to be processed 130 may be an electrode for generating plasma, but since the upper cover 124 and the central cover 126 have a high dielectric constant and are completely sealed, an electric field is generated from the upper cover 124 ) and the central cover 126, it may fall significantly, and consequently, it may be difficult to generate plasma inside the storage container 100.

However, in exemplary embodiments, a third hole 1281 may be provided on one surface of the lower cover 128 .

In other exemplary embodiments, the third hole 1281 provided on one side of the lower cover 128 may be configured to be relatively thin compared to the other side of the cover other than a completely open hole. Alternatively, the third hole 1281 provided on one side of the lower cover 128 may be made of another material having a smaller dielectric constant than a material constituting the other side of the cover. A plasma discharge structure is formed so that a plasma discharge that becomes the object to be treated 130 is generated with two electrodes corresponding to the first electrode of the device by applying a material that is relatively thin or has a low permittivity.

First, air inside the storage container 100 can be smoothly exhausted through the third hole 1281 . Accordingly, the inside of the container 100 can be easily vacuumed through the third hole 1281 before subjecting the object 130 to plasma surface treatment.

Thereafter, while the plasma surface treatment of the object 130 is performed, the electric field may be well transmitted through the third hole 1281 . That is, a plasma movement path is formed through the third hole 1281 so that plasma can be easily generated inside the storage container 100 . Accordingly, the object to be treated 130 can be easily subjected to plasma surface treatment through the third hole 1281 .

In addition, as the third hole 1281 is provided on one surface of the lower cover 128 perpendicular to the z direction, uniformity of the plasma surface treatment of the object 130 in the z direction can be improved.

One side of the connecting member 150 may be adjacent to the other end of the object to be processed 130 and the other side may be electrically connected to an external electrode. The connection member 150 is made of a conductive material, and can receive external power through the exposed other side and transmit it to the object to be processed 130 . To this end, a second exposure hole 1282 for exposing the other side of the connecting member 150 may be provided on one surface of the lower cover 128 . In example embodiments, one side of the lower cover 128 may be disposed at a lower position in the z direction than the other side of the connecting member 150, and thus the second exposure hole 1282 is formed on the connecting member 150. ) It may be disposed at a lower position in the z direction than the other side of the.

The fixing member 170 is disposed inside the lower cover 128 and may perform a function of fixing the target object 130 . Accordingly, the fixing member 170 may perform a function of stably fixing and storing the object to be processed 130 together with the connecting member 150 .

8 is a view showing an embodiment in which a storage container according to an embodiment of the present invention is stored in a plasma processing apparatus.

Referring to FIG. 8 , the plasma processing apparatus 10 includes a seating portion 12 on which the storage container 100 is seated, and an airtight portion that moves relative to the seating portion 12 and seals the storage container 100 from the external environment. 14, a processing unit (not shown) for discharging plasma inside the sealing unit 14 sealed from the external environment, and an exhaust unit (not shown) for exhausting air inside the sealing unit 14 sealed from the external environment. And, it may be provided with an upper block 13 disposed on the upper portion of the seating portion 12, and the main body 11 forming the exterior.

Seating part 12 is disposed to be located in front of the main body 11, may be disposed to be located in the lower portion of the upper block (13). An electrode for applying power to the storage container 100 may be formed on the upper surface of the seating portion 12 .

At this time, the seating portion 12 has a hole (not shown) accommodating the entire lower portion of the storage container 100, or when the connecting member 150 of the storage container 100 has a protruding structure, the protruding connecting member ( 150) may be formed with a hole (not shown).

In addition, a magnet is provided in the seating part 12, and the contact force can be strengthened by magnetic force with the connection member 150. The magnet may be provided on the bottom surface of the hole (not shown).

The sealing part 14 moves relative to the seating part 12 to seal the storage container 100 from the external environment. In the present invention, as an example, the sealing part 14 is raised and lowered so that the lower part of the sealing part 14 comes into contact with the upper surface of the seating part 12, thereby forming a closed space inside the sealing part 14. .

The upper block 13 may be disposed to be positioned in front of the main body 11 and above the seating portion 12 . The upper block 13 may be provided with a lifting part (not shown) for lifting and lowering the sealing part 14 .

When the sealing part 14 descends and the seating part 12 and the sealing part 14 are sealed, the processing unit (not shown) discharges plasma into the hollow of the sealing part 14 constituting the closed space to perform the plasma treatment. function can be performed. The processing unit (not shown) includes a first electrode (not shown) provided on the seating part 12 to be electrically connected to the storage container 100 and a second electrode provided on the sealing part 14 to surround the storage container 100. It may include two electrodes (not shown) and a power supply unit (not shown) for applying power to the first electrode (not shown) and the second electrode (not shown).

The exhaust unit (not shown) may perform a function of exhausting air inside the sealed unit 14 from the external environment.

As described above, the storage container 100 according to one embodiment of the present invention includes an inner cover 110 having a first hole 1101 on one surface and a first hole 1211 having a second hole 1211 on one surface. An outer cover 121 may be included. Before subjecting the object 130 to plasma surface treatment, the inside of the container 100 can be easily vacuumed through the first hole 1101 and the second hole 1211 . Thereafter, the electric field may be well transmitted through the first hole 1101 and the second hole 1211 while the plasma surface treatment of the object 130 is performed. That is, a moving path of plasma is formed through the first hole 1101 and the second hole 1211 so that plasma can be easily generated inside the container 100 . Accordingly, the object to be treated 130 can be easily subjected to plasma surface treatment through the first hole 1101 and the second hole 1211 .

Also, the storage container 100 according to other embodiments of the present invention may include a lower cover 128 having a third hole 1281 on one surface. Before subjecting the object 130 to plasma surface treatment, the inside of the container 100 can be easily vacuumed through the third hole 1281 . Thereafter, while the plasma surface treatment of the object 130 is performed, the electric field may be well transmitted through the third hole 1281 . That is, a moving path of plasma is formed through the third hole 1281 so that plasma can be easily generated inside the storage container 100 . Accordingly, the object to be treated 130 can be easily subjected to plasma surface treatment through the third hole 1281 . In addition, as the third hole 1281 is provided on one surface of the lower cover 128 perpendicular to the z direction, uniformity of the plasma surface treatment of the object 130 in the z direction can be improved.

In the above, the present invention has been described in detail with preferred embodiments, but the present invention is not limited to the above embodiments, and various modifications and changes are made by those skilled in the art within the technical spirit and scope of the present invention. this is possible

10: plasma processing device
100: storage container
110: inner cover
120: outer cover
130: object to be treated
140: support member
150: connecting member
160: holder block
170: fixed member

Claims (15)

a cover accommodating an object to be processed and having a hole on one surface; and
A connecting member having one side adjacent to the object to be processed and the other side electrically connected to an external electrode;
The cover accommodates the object to be processed and includes an inner cover having a first hole on one surface and an outer cover surrounding the inner cover and having a second hole on one surface,
The outer cover is rotatably provided with respect to the inner cover,
The hole provides a moving path of plasma by transmitting an electric field to the object to be treated, so that the object to be treated is subjected to plasma surface treatment. According to claim 1,
The object to be treated is made of a material having conductivity and becomes an electrode for generating plasma. delete delete According to claim 1,
Wherein one surface of the outer cover provided with the second hole is a surface facing the one surface of the inner cover provided with the first hole. According to claim 5,
The first hole is provided on one surface of the inner cover perpendicular to the longitudinal direction of the storage container,
The second hole is provided on one surface of the outer cover perpendicular to the longitudinal direction of the storage container. According to claim 5,
The first hole is provided on a side surface of the inner cover parallel to the longitudinal direction of the storage container,
The second hole is provided on a side surface of the outer cover parallel to the longitudinal direction of the storage container. delete According to claim 1,
A support member for supporting one end of the object to be processed; further comprising,
The storage container according to claim 1 , wherein the inner cover includes a main body portion surrounding the object to be processed and a prevention portion protruding into the main body portion and surrounding a part of the support member. According to claim 9,
The support member may include a support portion supporting one end of the object to be processed; and
A storage container comprising a protruding portion protruding from one surface of the support portion and surrounded by the prevention portion of the inner cover. According to claim 9,
The thickness of the prevention part is thicker than the thickness of the main body part, the storage container. According to claim 1,
The connecting member includes a contact portion contacting one end of the object to be processed,
The storage container of claim 1 , wherein the contact portion protrudes to the outside of the connecting member and is inserted into one end of the object to be processed. delete According to claim 1,
The outer cover includes a first outer cover provided with the second hole and a second outer cover coupled to the first outer cover,
Wherein the first outer cover is rotatably provided with respect to the second outer cover, the storage container. According to claim 1,
The outer cover includes an exposure hole formed to expose the other side of the connecting member.