KR102534371B1 - Portable Electrolytic polisher Using Neutral Salt Electrolyte - Google Patents

Abstract

The present invention can be easily moved even in a working environment where production facilities such as semiconductors, food, and medicine are maintained and repaired, and side effects such as respiratory diseases, skin irritation, and burns of workers due to electrolyte can be prevented, and on-site facilities It relates to a portable electrolytic polisher using a neutral salt electrolyte that can conveniently support maintenance and repair work according to the characteristics or installation location of the electrolytic polisher. The working box is configured to include an electrolytic polishing liquid reservoir, a forward/reverse rotation pump and an operation panel, and the main body and the working box are connected with a power line and a control line, and the working box is connected to a (-) power line) and a control panel. It is characterized in that it is configured to be connected to the torch through the wire and the electrolytic polishing liquid transfer hose.
According to the present invention, it is possible to remove adverse effects on the human body of the operator, and to prevent the occurrence of defects such as ultra-precision semiconductor equipment by removing the effect of fume of acidic electrolyte solution, and flip off cap ) prevents leakage of the electrolyte, improves the structure of the power supply line and the electrolyte supply line, improves the convenience of polishing work, and makes it easy to move the electrolytic polisher and easily removes unnecessary foreign substances generated during the work process. There are effects that can be done.

Description

Portable Electrolytic polisher Using Neutral Salt Electrolyte}

The present invention relates to a portable electropolishing machine using a neutral salt electrolyte, and more particularly, it is suitable for maintaining and repairing clean room equipment or facilities in the fields of semiconductors, food, and pharmaceuticals, can be easily moved at work sites, and is particularly acidic. It relates to a portable electropolishing machine using a neutral salt electrolyte that can prevent fatal defects in ultra-precision semiconductor equipment due to the effect of fumes caused by the use of electrolyte or side effects in terms of health such as respiratory diseases and skin damage to workers. .

The polishing process may be classified into mechanical polishing, chemical polishing, and electrolytic polishing, and each polishing process may be performed separately or as a mixed process. At this time, electrolytic polishing is performed by applying a voltage between the anode and the cathode, using the workpiece made of metal material dissolved in the electrolytic solution as the anode and the processed metal insoluble in the electrolytic solution as the cathode. It is a process used to obtain a glossy, smooth surface of a workpiece through selective dissolution.

In particular, electropolishing machines that support the polishing process are widely used to replace aging equipment in large structures such as shipbuilding or offshore facilities or to remove corrosive substances or discolored areas around welded areas, but the device itself is bulky and heavy. Since it is often fixed and installed in a specific space due to its considerable size, the field demand related to the need for an electropolishing machine that can be moved to suit the working environment and is convenient to use is increasing.

Reflecting these field needs, technologies with improved mobility and convenience are continuously being developed in the field of electropolishing machines.

First of all, Patent 10-1246892 (Prior Patent 1) shows an electrolytic polishing device applied to large structures such as shipbuilding or marine facilities. The polishing operation unit equipped with a recovery pump is mounted on a moving cart equipped with a moving handle and a cable hanger, and the polishing operation unit and the polishing operation unit are connected by an electrolyte supply pipe and an electrode line to enable polishing of the workpiece through the polishing operation unit. A supporting technical configuration is disclosed, and Patent No. 10-1324315 (Prior Patent 2) discloses an electrode-applied fixture that allows an electrode connection part to adhere to a work object.

However, the electropolishing machines of the prior patents 1 and 2 are specialized for polishing work of large structures such as shipbuilding or marine facilities, and this is not based on the use of neutral salt electrolyte, which can cause fatal defects in ultra-precision semiconductor equipment or respiratory diseases of workers. It is a structure accompanied by side effects such as skin damage, and the electrolyte storage tank is fixed to the mobile cart, so it is not easy to replace it, and the components mounted on the mobile cart (power supply transformer, storage tank, supply and recovery pump) Because of the structure inevitably increasing its volume and weight, horizontal movement on the ground is possible, but there is a realistic limit to vertical movement from the ground to the working position in the air.

In addition, Patent 10-0363586 (Prior Patent 3) shows a portable electrolytic polishing device. In Prior Patent 3, a pipe-shaped connection part held by a worker and a carbon-based brush are installed at the bottom of the connection part, and the outer surface of the brush A non-conductive fiber material is provided to cover the pipe, but a pipe for supplying electrolyte and an electric wire for supplying power are built into the pipe-shaped connection part, and the connection part can also function as a handle for a worker. has been

However, the above prior patent 3 is not based on the use of a neutral salt electrolyte, so it is inevitable to be affected by fumes (side effects such as defects in semiconductors or respiratory diseases of workers) due to the use of acid electrolyte, and In that a carbon-based brush that generates sparks or conductive dust is used, it is not suitable for maintenance and repair work of semiconductor clean room facilities, and has a structural problem of not preventing leakage of electrolyte remaining in the connection part (handle part).

(Prior Patent Document 1) Registered Patent No. 10-1246892 (Prior Patent Document 2) Registered Patent No. 10-1324315 (Prior Patent Document 3) Registered Patent No. 10-0363586

The present invention has been made in view of the problems of the above background art,

An object of the present invention is to use a neutral salt electrolyte to remove adverse effects on the human body, to be suitable for maintenance and repair of semiconductor manufacturing equipment in which a clean room environment is important, and to remove unnecessary electrolyte through a flip off cap. It is to provide a portable electropolishing machine using a neutral salt electrolyte capable of preventing leakage.

Another object of the present invention is to improve the structure of the power supply line and the electrolyte supply line to increase the degree of freedom of operation, and to provide a portable electropolishing machine using a neutral salt electrolyte solution that can be easily moved and improved in convenience of use. .

Another object of the present invention is to provide a portable electropolishing machine using a neutral salt electrolyte solution that can easily handle unnecessary by-products such as a falling solution that may occur in the electropolishing process.

A portable electropolishing machine using a neutral salt electrolyte according to a preferred embodiment of the present invention is configured by separating the main body and the working box from each other, and the control unit, rectifying section and output unit are disposed in the main body, and the electropolishing liquid reservoir and the It is composed by arranging a reverse rotation pump and an operation panel, and the main body and the work box are connected by a power line and a first control line 60, and a (-) power line and a second control line 61 and transfer of electrolytic polishing liquid to the work box It is connected to the torch through a hose, and the torch and polishing pad are combined through a connecting rod with a power line and an electrolytic polishing liquid hose built in, and the (+) power line of the work box is attached with a clamp that supports connection with the work object. characterized by

In addition, the present invention uses a neutral salt electropolishing solution for electropolishing of SUS (Steel Use Stainless) structures, and the electropolishing solution contains 0.5 to 8% potassium pyrophosphate or potassium monophosphate, which is an inorganic compound. By weight, 5 to 15% by weight of sodium hexametaphosphate or sodium hypophosphite, 5 to 15% by weight of dibasic sodium phosphate or dibasic potassium phosphate is mixed with distilled water and set to PH 6 to 8.

In addition, it is characterized in that a caustic soda-based material such as sodium hydroxide or potassium hydroxide is intentionally excluded as a pH adjusting agent of the neutral salt electropolishing liquid used in the electropolishing machine of the present invention.

In addition, the electropolishing machine of the present invention is configured to fix the coupling structure of the connecting rod connecting the torch and the polishing pad with a fastening nut, and by mounting a flip off cap inside the coupling structure, the remaining hose of the connecting rod remains. It is characterized in that it is configured to prevent leakage of the electrolytic polishing liquid.

In addition, the electropolishing machine of the present invention is characterized in that the connecting rod is made of a bellows-shaped tube so that the electrode plate can be adjusted up, down, left, or right according to the working position.

In addition, the portable electropolishing machine of the present invention is provided with a suction pad that can be hung on the outside of the work object using a webbing string and a binding means (buckle or Velcro tie), and the suction pad is provided with a solution on the waterproof pad made of waterproof fabric. It is manufactured in a structure in which a pad can be placed, and the waterproof pad is characterized in that a stainless steel rod having a smaller diameter than the thickness of the waterproof pad is inserted at the end of the four sides to finish sewing.

In addition, when the portable electropolishing machine of the present invention is applied to fields other than semiconductor, food, and pharmaceutical fields, one end of the insulating shrinkage tube is screwed to the torch through a rubber O-ring, and the other end is a carbon fiber brush. It is configured to be screwed to the pad, but a transparent Teflon tube is installed outside the carbon fiber brush pad to prevent scattering of the electropolishing liquid, and electropolishing is performed by interposing two rubber O-rings between the brush pad connection and the transparent Teflon tube. It is characterized in that the liquid supply path is formed only in the direction of the brush pad.

According to the present invention, since the neutral salt electrolyte is used, adverse effects on the operator's body can be removed, and the effect of fumes of the acidic electrolyte can be removed to prevent defects such as ultra-precision semiconductor equipment, Since leakage of electrolyte can be prevented by using a flip-off cap, contamination of peripheral facilities can be prevented and inconvenience in use can be eliminated.

In addition, the structure of the power supply line and the electrolyte supply line can be improved to increase the degree of freedom of the polishing operation, and the effect of easily removing unnecessary foreign substances generated during the work process as well as easy movement of the electrolytic polisher can be expected. .

1 (a) and (b) are exemplary diagrams for explaining a conventional electrolytic polishing apparatus.
2 is a configuration diagram for explaining the structure of an electropolishing machine according to a preferred embodiment of the present invention.
3 is an exemplary view for explaining an embodiment of a connecting rod structure of the present invention.
4 is an exemplary view showing another embodiment of the connecting rod structure of the present invention.
5 is an exemplary diagram for explaining a means for treating by-products such as a falling solution generated in the electropolishing process of the present invention.
6 is a configuration diagram for explaining another embodiment of the present invention.

Hereinafter, a portable electropolishing apparatus using a neutral salt electrolyte according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

For reference, in the description of the present invention, if it is determined that a detailed description of a known configuration or function may unnecessarily obscure the subject matter of the present invention, a detailed description thereof will be omitted. And the technical terms used in the present invention are only used to describe specific embodiments, and are not intended to limit the present invention, and the technical terms used in the present invention are not specifically defined in the present invention in a different meaning, It is natural to interpret it in a meaning generally understood by those skilled in the art to which the present invention belongs, but it should not be interpreted in an excessively comprehensive or excessively reduced meaning.

1 shows the structure of a conventional electropolishing machine. Figure 1 (a) is the electrolytic polisher of the prior patent 1 mentioned above, the electrolyte storage unit 100, the polishing operation unit 200, the polishing operation unit 300 and the A configuration in which a two-electrode line 370 is the main configuration and a moving handle 440, a cable hanger 450, and a torch holder 430 are added is exemplified. Here, the polishing operation unit 200 is composed of a power supply unit 210, a supply pump 231 and a recovery pump 141, and the polishing operation unit 300 includes a polishing liquid supply line 340 and a recovery line ( 380), and the first electrode line 330 are built together, and the control box 360 is installed on the outside, and consists of a work handle 350, a torch 310, and a textile torch cover 320.

Meanwhile, FIG. 1(b) shows a structure in which the tongs 371 and the electrode applying tool 500 are connected to the second electrode line 370, where the electrode applying tool 500 adheres closely to the workpiece. It is configured so that the second electrode line 370 can be smoothly connected to the cylindrical workpiece through the band part that wraps as much as possible.

However, when the above prior art is applied to large-scale structures such as shipbuilding and marine facilities, it is possible to secure some degree of mobility and to improve the convenience of work, but semiconductor production facilities or production of food and medicine It is too bulky and heavy to apply to the maintenance and repair of the facility, and at least 5 (if omitting the recovery line, 4 In that there is no choice but to connect two lines, it was insufficient to meet the level of mobility and work convenience at the site. When using a conventional acidic electrolyte, the generation of fumes due to vaporization of the electrolyte affects sensitive sensors or control circuit boards in semiconductor facilities, resulting in There was always a possibility of fatal defects, and it could cause side effects on the skin and respiratory system of workers, so there was a realistic limit that could not guarantee safety in the field of food and medicine that emphasizes health and hygiene.

The present invention was conceived in order to overcome the above practical limitations, and redesigned the structure of the conventional electrolytic polisher to improve mobility and work convenience, and to utilize neutral salt harmless to the human body as an electrolyte for defects in ultra-precision semiconductor production equipment. It is to propose a customized electropolishing machine that can meet the level of demand in the field by ensuring the safety of health and sanitation while preventing induction, and actively applying it to various working environments and facility scales.

2 shows the basic configuration of an electropolishing machine according to a preferred embodiment of the present invention. The electrolytic polishing machine of FIG. 2 is configured by separating the main body 10 and the working box 20, and the connection line between the main body 10 and the working box 20 is connected to the power supply line 70 and the first control line 60. It is characterized in that it is configured to ensure the convenience of work by shortening the length so that the transfer hose 80 of the electropolishing liquid exists only between the work box 20 and the polishing pad 41. At this time, the control unit 11, the rectifying unit 12, and the output unit 13 are disposed in the main body 10, and in the work box 20, a replaceable electrolytic polishing liquid reservoir 21 with a capacity of 1 to 2 liters and an electrolytic polishing liquid It is configured to have a forward/reverse rotation pump 22 that supports the supply and recovery of and an operation panel 23 that supports selection of output voltage or forward or reverse rotation of the forward/reverse rotation pump 22. . In addition, the torch 30 is provided with a switch (not shown) capable of adjusting the supply amount of the electropolishing liquid.

In order to perform the electrolytic polishing work using the electrolytic polisher of FIG. 2, first move the main body 10 and the working box 20 to the vicinity of the scheduled work site, place the main body 10 on the ground and connect the connecting lines 60 and 70 While withdrawing the work box 20 and the torch 30, the worker arrives at the work site with a vertically moving ladder truck, etc., and performs the electrolytic polishing operation. At this time, unlike the prior art, the connection lines 60 and 70 between the main body 10 and the work box 20 exclude electrolytic polishing liquid hoses and simply consist of only the first control line 60 and the power line 70. It is possible to prevent side effects caused by twisting or clogging of the electrolytic polishing liquid hose 80, thereby eliminating the need for additional auxiliary support personnel.

In addition, the electrolytic polishing liquid is supplied to the polishing pad 41 via the (-) electrode plate 70 through the operation of the forward/reverse rotation pump 22 provided in the work box 20, The supply amount of the polishing liquid can be adjusted through a switch (not shown) of the torch 30, and the forward/reverse rotation pump 22 rotates forward through operation of a switch (not shown) provided on the control panel 23 ( Supply of electropolishing solution) and reverse rotation (recovery of electropolishing solution) can be selected.

In addition, the polishing pad 41 uses a cotton material, felt material, or aramid fiber fabric that is resistant to heat so that the polishing solution can naturally permeate along the nozzle, and the electropolishing principle solves the problem of gradually becoming thinner when used for a long time In order to do this, it is preferable to configure the (-) electrode plate 70 and the polishing pad 41 by adopting a fixing method of screw coupling so that they can be easily replaced periodically.

According to the electropolishing machine of FIG. 2, since the operator can perform the polishing work of the object with the work box 20 close to it, there is an advantage in that the electrolytic polishing liquid transfer hose 80 is shortened, but the acid that is harmful to the human body In the case of using electrolytic polishing liquid, there is a double-sidedness that also has the risk of safety accidents due to the nature of close-up work.

Therefore, in order to maximize the advantages of the electropolishing machine of FIG. 2, it is necessary to consider the use of a neutral salt electropolishing liquid harmless to the human body first. Neutral salt electrolytic polishing liquid does not cause discoloration or corrosion even when exposed to walls or floors of facilities, and can be used in AC and DC power sources. Decide. In particular, when applied to SUS (Steel Use Stainless) structures, preferred neutral salt electrolytic polishing solution components include 0.5 to 8% by weight of inorganic compound potassium pyrophosphate or potassium monophosphate, sodium hexametaphosphate or hypophosphorous acid 5 to 15% by weight of sodium, 5 to 15% by weight of dibasic sodium phosphate or dibasic potassium phosphate is mixed with distilled water and used after setting the pH between 6 and 8. However, in theory, it is possible to adjust the PH using a caustic soda-based material such as sodium hydroxide or potassium hydroxide as a PH regulator, but this causes stains or damage to the surface of SUS piping, which is the main workpiece of the present invention. The use of these caustic soda-based materials is consciously excluded in the present invention.

In this way, when neutral salt electropolishing solution is used, fume is generated due to vaporization of acidic electrolyte when using normal acidic electrolyte, which affects sensitive sensors or control circuit boards in semiconductor facilities. The effect of preventing fatal defects that may occur can be expected, and in the field of food and medicine that emphasizes health and hygiene, it can solve adverse effects on the skin and respiratory system of workers, as well as contribute to improving the safety of food and medicine itself. will be. However, when applied to maintenance work in a special environment such as a semiconductor clean room, even if a neutral salt electrolytic polishing solution is used, a carbon-based material such as carbon fiber is used as the polishing pad 41 or electrode material 40 It should be noted that it must be deliberately excluded.

However, the electropolishing machine of the present invention is not limited to being applied to clean rooms such as semiconductors, food, and pharmaceuticals, and it is also possible to use acidic electropolishing liquid as necessary for outdoor work in other fields where separate safety measures are provided. Anything is possible. At this time, the electrolytic polishing liquid used in areas other than clean rooms such as semiconductors, food, and pharmaceuticals is acidic or neutral salt electrolytic polishing liquid according to the situation in consideration of the characteristics of the polishing work, the scale or installation location of the work object, and the working environment. You can choose to use it.

On the other hand, the electrolytic polishing work performed through the (+) electrode clamp 50 fastened to the work object and the polishing pad 41 having a structure surrounding the (-) electrode plate is applied as is the well-known technology, so here it is. A detailed description of the working process will be omitted.

According to the configuration of FIG. 2, it is easy for the body 10 to be located near the work site and the operator to move to the work site with only the lighter work box 20 using a ladder truck, etc., and the electropolishing that was difficult to handle. By disposing the liquid transfer hose 80 limited to a short length only between the work box 20 and the electrode plate 40, the electropolishing liquid transfer hose 80 is twisted, resulting in clogging of the electropolishing liquid or unexpected problems. A leakage accident can be prevented, and side effects such as damage to nearby electronic components or electric shock due to unexpected electrolytic polishing liquid leakage can be prevented.

In addition, according to the configuration of FIG. 2, by using a plastic reservoir 21 with a capacity of 1 to 2 liters without fixing the electrolytic polishing liquid reservoir 21 to the work box 20, the stopper is unscrewed and replaced with a new reservoir. It is not only easy to do, but also it is possible to reduce the weight of the work box 20, so that the operator can hold the handle 24 of the work box 20 and conveniently move it to the work site.

3 shows another embodiment of the present invention. 3 shows an improved structure of the connecting rod 90, and the electrode plate 40 is used to prevent unnecessary leakage of the electrolytic polishing liquid remaining in the transfer hose 80 between the torch 30 and the electrode plate 40. It is characterized by adding a flip-off cap (91) between the connecting rod (90). One end of the connecting rod 90 is screwed to the torch 30 through a rubber O-ring, and the other end is fastened by mounting a flip-off cap 91 inside the electrode plate 40 in a bolt-on type to secure a fastening nut 92 It is configured to be fixed with .

According to the connecting rod structure of FIG. 3, when the normal/reverse rotation pump 22 rotates forward, the flip-off cap 91 is opened by the pump pressure to supply the polishing liquid. Through the operation of the switch, the forward/reverse rotation pump 22 is intentionally rotated in reverse to recover the electrolyte remaining in the transfer hose 80 and the torch 30 of the connecting rod to the storage container 21, thereby storing or repairing Alternatively, when replacing consumables, unnecessary leakage of residual electrolyte is prevented, and thus, an effect of preventing contamination of surrounding facilities can be expected.

4 shows another embodiment of the structure of the connector 90 of the present invention. 4 is characterized in that the handle part 93 provided at the end of the connecting rod 90 and the electrode plate 40 are connected by a bellows type pipe 94 through a rubber O-ring 32. In this way, if the end of the connecting rod 90 is configured by extending the bellows type pipe 94, the electrode plate 40 can move freely up, down, left and right, so that the effect of increasing worker freedom in a narrow space can be expected.

And FIG. 5 shows a structure in which an adsorption pad for treating electropolishing liquid flowing down a workpiece during the electropolishing process is attached. The electropolishing machine of the present invention induces an electrolytic action through the (+) and (-) electrodes in a state where the polishing pad 41 made of cotton or fiber absorbs the electropolishing liquid, so that the electropolishing liquid does not flow down from the workpiece. can't avoid If the flowing electropolishing liquid is left unattended, the surroundings of the work site or the floor may be contaminated with stains and may impair the aesthetics. At this time, the suction pad is made of a structure in which the solution pad 96 can be placed on the waterproof pad 97 made of waterproof fabric, but the four ends of the waterproof pad 97 have a thickness smaller than that of the waterproof pad 97. When manufactured by sewing finishing after inserting a stainless rod of a diameter, the waterproof pad 97 and the solution pad 96 remain unfolded without being folded, so that the effect of covering a large area of the falling solution can be expected. will be. In addition, the waterproof pad 97 wraps the upper surface while adjusting the webbing strap 98 according to the size of the work object using the webbing strap 98 connected to the end of the four sides and a binding means (Velcro tie 95 or buckle, etc.) When used in combination with the structure, it will have the advantage of being able to easily handle the falling solution simply by replacing the solution pad 96 placed on the waterproof pad 97 from time to time.

On the other hand, FIG. 6 shows that the electrode plate 40 and the polishing pad 41 of FIG. 3 are made of carbon fiber when electrolytic polishing is performed in an outdoor workplace that does not require high cleanliness and hygiene standards, such as in the semiconductor, food, and pharmaceutical fields. It shows how to use it by replacing it with a brush pad of a material. At this time, the alternative structure to the brush pad consists of “a brush pad connecting rod in which one end of the insulating shrink tube is screwed to the torch 30 through a rubber O-ring 32 and the other end is screwed to a carbon fiber brush pad” In order to prevent the electrolytic polishing liquid of the carbon fiber brush pad from scattering to the surroundings, a transparent Teflon tube is installed in a structure that surrounds the brush pad connection, and two rubber O-rings 32 are interposed between the brush pad connection and the transparent Teflon tube for electrolysis. The supply path of the polishing liquid is formed in the direction of the brush pad.

If such an alternative structure is adopted, work efficiency is improved in that the work speed is faster than when the structure of the electrode plate 40 and the polishing pad 41 as shown in FIG. 3 is used and the replacement cycle of the electrode plate 40 can be increased. effect can be expected.

Although preferred embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and anyone skilled in the art can make various modifications without departing from the gist of the present invention. It will be possible.

10: body 11: control unit
12: rectifier 13: output unit
14, 24: handle 20: work box
21: electrolytic polishing liquid reservoir 22: forward / reverse rotation pump
23: operation panel 30: torch
31: fastening nut 32: rubber O-ring
40; (-) electrode plate 41: polishing pad
50: (+) electrode clamp 60, 61: control line
70, 71, 72: power line 80: electropolishing fluid transfer hose
90: connecting rod 91: flip-off cap
92: fastening nut 93: polishing handle
94: Bellows type connector 95: Velcro tie
96: solution pad 97: waterproof pad
98: webbing strap 99: falling solution

Claims (7)

In a portable electropolishing machine using a neutral salt electrolyte solution comprising a main body 10, a work box 20, a torch 30, a (-) electrode plate 40, and a polishing pad 41,
The main body 10 and the work box 20 are configured separately from each other,
The main body 10 is provided with a control unit 11, a rectifying unit 12 and an output unit 13,
The work box 20 includes a replaceable 1-2 liter capacity electrolytic polishing liquid reservoir 21, a forward/reverse rotation pump 22, and an operation panel 23,
The main body 10 and the work box 20 are connected by a power line 70 and a first control line 60, and the work box 20 and the (-) electrode plate 40 are connected to the torch ( 30) and the connecting rod 90 to connect the (-) power line 71 and the electrolytic polishing liquid transfer hose 80,
A second control line 61 is further provided between the work box 20 and the torch 30 to transmit an operation signal of the polishing liquid supply amount control switch provided in the torch 30,
The clamp 50 for binding to the work object has a structure coupled to the end of the (+) power line 72 drawn from the work box 20,
A suction pad for processing the falling solution 99 is coupled to the work object,
The suction pad has a structure in which the solution pad 96 can be placed on the upper surface of the waterproof pad 97 made of waterproof fabric, and the suction pad is a binding means 95 for supporting the upper surface of the workpiece And it is configured to further include a webbing string 98 whose length can be adjusted according to the size of the work object,
Portable electropolishing machine using neutral salt electrolyte, characterized in that the four-sided ends of the waterproof pad (97) are manufactured in the form of sewing finishing by inserting a stainless steel rod with a smaller diameter than the thickness of the waterproof pad (97) ◈Claim 2 was abandoned when the registration fee was paid.◈ <Delete> ◈Claim 3 was abandoned when the registration fee was paid.◈ <Delete> According to claim 1,
Binding of the connecting rod 90 and the (-) electrode plate 40 is performed through a coupling part fixed with a fastening nut 92,
The neutral salt electrolyte characterized in that the flip-off cap 91 is installed inside the coupling part to prevent leakage of the electrolytic polishing liquid remaining in the transfer hose 80 and the torch 30 of the connecting table 90. Portable electropolishing machine using According to claim 1,
The connector 90 is made of a bellows-shaped tube and is configured to move the (-) electrode plate 40 and the polishing pad 41 up, down, left, and right according to the working position. Portable electropolishing machine using ◈Claim 6 was abandoned when the registration fee was paid.◈ <Delete> According to claim 1,
For electrolytic polishing work in general outdoor workplaces that do not require high cleanliness and hygiene standards, such as semiconductors, food or pharmaceutical manufacturing fields,
In place of the connecting rod 90, one end of the insulating shrink tube is screwed with the torch 30 through a rubber O-ring 32, and the other end is a separate connecting rod having a structure in which a carbon fiber brush pad is screwed. configured so that
A transparent Teflon tube is installed outside the carbon fiber brush pad to prevent scattering of the electrolytic polishing liquid,
A portable electropolishing machine using a neutral salt electrolyte characterized in that a supply path of the electropolishing liquid is formed in the direction of the carbon fiber brush pad by interposing two rubber O-rings 32 between the separate connecting rod and the transparent Teflon tube.

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