KR102515543B1 - Vacuum system design display method and apparatus - Google Patents

Abstract

A method of displaying a design screen of a vacuum system according to an embodiment of the present invention is a method of displaying a design screen of a vacuum system including a chamber, pipe, and pump, (a) implemented in a virtual area according to a user's input. displaying the first vacuum system on the screen; (b) simulating the first vacuum system, and a first simulation result (hereinafter referred to as '1-1 simulation result') and a second simulation result (hereinafter referred to as '1-2 simulation result'), which are results of the simulation (referred to as) displaying on the screen; (c) displaying on the screen a second vacuum system implemented by reflecting a pipe or pump having specifications changed from the first vacuum system according to a user's input; and (d) simulating the second vacuum system, and a first simulation result (hereinafter referred to as '2-1 simulation result') and a second simulation result (hereinafter referred to as '2-2 simulation result'), which are results of the simulation. referred to as) on the screen; Including, but the specifications and process conditions of the chambers of the first vacuum system and the second vacuum system are the same, and the 1-1 simulation result, 1-2 simulation result, 2-1 simulation result, and 2-2 It is characterized in that the process conditions are displayed in the simulation results, respectively.

Description

Vacuum system design display method and apparatus {Vacuum system design display method and apparatus}

The present invention relates to a method and apparatus for displaying a design screen of a vacuum system, and more particularly, to display an optimal vacuum system satisfying a process condition set by a user on a split screen for each vacuum system and display an intuitive graph when designing a vacuum system. It is about UI technology to provide.

Vacuum technology is a technology that creates a vacuum in a chamber (container) and enables various experiments or production in it. Vacuum technology does not create anything by itself, but is a basic technology that provides the basis for research and manufacturing. Here, vacuum means a state in which the gas pressure in space is lower than atmospheric pressure.

On the other hand, a vacuum system composed of a chamber, a pipe, and a pump makes the inside of the chamber a vacuum state necessary for manufacturing or research to enable smooth processing. Vacuum prevents reactions or oxidation caused by the influence of other gases, lowers the boiling point of materials, cleans the surface, removes residual gases, and facilitates the introduction of desired materials.

A vacuum system providing such an effect is applied to all industrial fields, and is particularly applied to large-scale industries such as semiconductors and displays.

However, most vacuum systems used in the field have inefficient parts due to low efficiency piping configurations, such as the use of large pumps with unnecessarily large capacities or the use of excessively bent pipes, narrow pipes, and reduced pipes.

Accordingly, there is a demand for a method for designing an optimal vacuum system capable of satisfying process conditions set by a user.

Furthermore, there is a need to develop a user interface that provides a vacuum system before/after improvement and graphs on a split screen so as to intuitively identify and compare and analyze an optimal vacuum system to be designed.

Korean Patent Publication No. 10-2012-0087288 (published on August 7, 2012)

An object of the present invention is to design a vacuum system by visual modeling, check whether pipes and pumps satisfy the process conditions set by the user in the design of the vacuum system, and display and provide inefficient sections. Provides a design screen display system and method for a vacuum system that implements a user interface to enable intuitive comparative analysis by providing a plurality of vacuum systems and system simulation results, including two vacuum systems, on a split screen including one or more graphs is to do

A method for displaying a design screen of a vacuum system according to an embodiment of the present invention for achieving the above object is a method of displaying a design screen of a vacuum system including a chamber, a pipe, and a pump, comprising: (a) user input displaying the first vacuum system implemented in the virtual area on a screen according to; (b) simulating the first vacuum system, and a first simulation result (hereinafter referred to as '1-1 simulation result') and a second simulation result (hereinafter referred to as '1-2 simulation result'), which are results of the simulation (referred to as) displaying on the screen; (c) displaying on the screen a second vacuum system implemented by reflecting a pipe or pump having specifications changed from the first vacuum system according to a user's input; and (d) simulating the second vacuum system, and a first simulation result (hereinafter referred to as '2-1 simulation result') and a second simulation result (hereinafter referred to as '2-2 simulation result'), which are results of the simulation. referred to as) on the screen; Including, but the specifications and process conditions of the chambers of the first vacuum system and the second vacuum system are the same, and the 1-1 simulation result, 1-2 simulation result, 2-1 simulation result, and 2- 2 The simulation results are characterized in that each process condition is displayed.

In the above, in step (d), the 1-1 simulation result and the 2-1 simulation result are accumulated and displayed together, and the 2-1 simulation result and the 2-2 simulation result are accumulated and displayed together. It is characterized by doing.

In the above, specifications and process conditions of the chambers of the first vacuum system and the second vacuum system are the same.

In the above, (e) when simulation results of the n-th vacuum system (n> 2) exist, the results of at least two simulations selected by the user are accumulated and displayed together on the screen.

In the above, the first vacuum system and the second vacuum system are disposed in different regions of the screen, and the respective regions are adjacent to each other, and the 1-1 simulation result and the 2-1 simulation result , The 2-1 simulation result and the 2-2 simulation result are arranged in the same area in the screen.

An apparatus for displaying a design screen of a vacuum system including a chamber, a pipe, and a pump according to an embodiment of the present invention includes one or more processors; and a memory connected to the processor, wherein the memory displays a first vacuum system implemented in a virtual area on a first area of a screen according to a user's input, simulates the first vacuum system, and generates a corresponding simulation. The result, the first simulation result (hereinafter referred to as '1-1 simulation result') and the second simulation result (hereinafter referred to as '1-2 simulation result') are displayed in the second area of the screen, and the user's According to the input, a second vacuum system implemented by reflecting a pipe or pump having specifications changed in the first vacuum system is displayed in the third area of the screen, and the second vacuum system is simulated to simulate the second vacuum system, which is the result of the simulation. Executable by the processor to display a first simulation result (hereinafter referred to as '2-1 simulation result') and a second simulation result (hereinafter referred to as '2-2 simulation result') in a fourth area of the screen. Stores program instructions.

The memory stores program instructions executable by the processor to accumulate results of at least two simulations selected by a user and display them together on a screen when simulation results of the n-th vacuum system (n> 2) exist. .

A vacuum system design display method and apparatus of the present invention provides a vacuum system design program including visual modeling of a vacuum system composed of pipes, pumps, and chambers, and provides a vacuum system modeled for a vacuum system implemented in the program, and simulation There is an advantage in that the resulting graph can be intuitively displayed on a split screen.

In addition, user convenience is increased by providing a user interface so that a system, graph arrangement position, option change, and filtering functions can be provided according to a user's selection using a vacuum system design program.

1 is a block diagram for providing a vacuum system design according to an embodiment of the present invention.
2A and 2B are flowcharts illustrating a vacuum system design process according to an embodiment of the present invention.
3 is a flowchart illustrating a process of selecting a pump having an optimal capacity when designing a vacuum system according to an embodiment of the present invention.
4, 5a and 5b are diagrams showing the configuration of a vacuum system design screen according to an embodiment of the present invention.

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings. However, the spirit of the present invention is not limited to the presented embodiments, and those skilled in the art who understand the spirit of the present invention may add, change, delete, etc. other elements within the scope of the same spirit, through other degenerative inventions or the present invention. Other embodiments included within the scope of the inventive idea can be easily proposed, but it will also be said to be included within the scope of the inventive concept. In addition, components having the same function within the scope of the same idea appearing in the drawings of each embodiment are described using the same reference numerals.

1 is a configuration block diagram of an apparatus for designing a vacuum system according to an embodiment of the present invention.

Vacuum system design according to an embodiment of the present invention may be performed by a 'vacuum system design program'. As an embodiment, the vacuum system design program may exist in the server 30 and be provided in a web-based form. In this case, a user designs a vacuum system by accessing a website provided by the server using the user terminal 10. can do. As another embodiment, the vacuum system design program may be distributed and installed in user terminals and servers. For example, a part that uses a small amount of resources, such as a user interface of a vacuum system design program, may be provided in a user terminal, and a part that uses a lot of resources, such as a database, may exist in a server. As another embodiment, all configurations of the vacuum system design program including the database may be present in the user terminal. In this case, the user terminal does not need to be connected online to design the vacuum system, and may be physically connected to an external storage device in which an update file is stored so that the program is updated as needed. Hereinafter, an embodiment in which a vacuum system design program is present in a server and a vacuum system design described below is provided in a web-based form by the server will be described.

A device including a program for designing a vacuum system may be a user terminal and/or a server depending on an implementation location. For reference, the user terminal or server may include one or more processors and a memory connected to the processor, and program instructions executable by the processor for performing the operation of the server described below may be stored in the memory. In addition to this, the server may further include a communication unit (not shown) for communicating with the user terminal. In addition, the user terminal may include a monitor (not shown) for receiving a screen for the designed vacuum system.

As an embodiment of the present invention, the server may implement (design) a vacuum system by arranging components such as chambers, pipes, and pumps in a 2D or 3D virtual area and setting specifications of each component. .

Here, 'specification' is the shape (eg cuboid, cylinder, etc.) and volume, start pressure, target pressure, gas load (or gas flow) in the case of a chamber. , process pressure, and the like. For reference, 'start pressure' and 'target pressure' may be included in 'process conditions' to be described later.

In the case of piping, the type according to shape such as pipe, bent pipe (bend/elbow/miter), reducer, etc., and each length, inner diameter, angle, etc. shall be included in the specification. can

In the case of a pump, specifications may include pump size, inlet size and location, pumping speed, and the like.

The server 30 may simulate a vacuum system designed based on the specifications of the components (chamber, pipe, pump, etc.) of the above-described vacuum system and determine whether the simulation result satisfies or dissatisfies the process conditions. In the present invention, 'process conditions' are the first process conditions including the starting pressure of the chamber, the target pressure, and the time to reach (should) reach the target pressure from the starting pressure of the chamber, and the maximum gas load (Gas load or Gas flow) A second process condition comprising a process pressure of , a gas load at a maximum process pressure, and a gas load at a minimum process pressure. The first process condition and the second process condition may be set by a user, and the server 30 uses a vacuum design program according to an embodiment of the present invention to each component of the entire pipe implemented in the current vacuum system. Extract pipes with inefficient specifications among (pipes, bent pipes, shrink pipes, etc.), determine whether the pump implemented in the current vacuum system corresponds to inefficient specifications, and determine whether the user has optimal specifications in the vacuum system (for example, For example, the relevant information can be provided so that a pump with a capacity) can be selected. Here, 'inefficient' may mean the use of low-efficiency piping or excessively high-specification pumps even if the first process condition and the second process condition are satisfied.

For pipe optimization, the server can display pipes with inefficient specifications in the vacuum system designed by the user using a specific color, and the user can change the specifications of the inefficient pipes to higher efficiency pipe specifications (gradually One-angle bend pipe, pipe inner diameter enlargement, gradual reduction/enlargement pipe) can be changed. At this time, when a specific event (for example, positioning a mouse cursor) by a user's input occurs on a pipe that is displayed as an inefficient specification, the server provides information on specifications that can be changed in the pipe or problems with the pipe, etc. Guide information including may be displayed.

The server may reflect the specifications of the corresponding pipe changed by the user to the existing vacuum system, perform the simulation again, and compare the process conditions and simulation results. Pipes with inefficient specifications can be extracted again, and this process can be repeated several times.

Hereinafter, a process of optimizing a pipe when designing a vacuum system will be described in detail with reference to FIGS. 2A and 2B.

2A and 2B are flowcharts illustrating a process of optimizing a pipe when designing a vacuum system according to an embodiment of the present invention, which may be performed by the server 30 shown in FIG. 1 .

The server implements a vacuum system by arranging chambers, pipes, and pumps in a virtual area according to a user's input (S201).

At this time, the server may implement the system by reflecting the specifications of each component input or selected by the user. For reference, the user can select an icon provided in advance when selecting or inputting each component and specification of the vacuum system, and can set the size or position by dragging the mouse. Of course, the user can directly input the numerical value.

After S201, the server sets the process conditions of the vacuum system according to the user's input (S202).

For reference, although it has been described that the process condition setting of the vacuum system is performed after S201, it may be set together when the specifications of each component of the vacuum system are set in S201 according to the embodiment.

After S202, the server performs a simulation based on the components and specifications of the vacuum system designed in S201 (hereinafter referred to as a 'first vacuum system') (S203).

For reference, the server may perform the above-described steps S201 to S203 by calling a previously designed vacuum system into a virtual area.

After S203, the server compares the process condition set in S202 with the result of the simulation performed in S203 to determine whether the process condition is satisfied or not satisfied, and provides information therefor (S204).

After S204, the server compares the conductance of each component (pipe, bent pipe, reduced pipe, etc.) of the entire pipe, extracts the pipe with inefficient specifications, and displays it on the corresponding part of the first vacuum system, The results of the first vacuum simulation are displayed together with the process conditions in the form of a graph in a separate neighboring area (S205).

Here, a pipe having an inefficient specification may be displayed using a specific color, and when the user's mouse cursor is positioned on the pipe, the server displays information on problems with the pipe or specifications that can be changed in the pipe. Guide information can be displayed.

After S205, the server copies the first vacuum system according to the user's input and displays the pipe having the inefficient specification of S204 adjacent to the displayed first vacuum system (hereinafter referred to as the first 'vacuum system') (S206).

This is to easily compare a vacuum system having an inefficient part and a vacuum system in which the corresponding part has been changed (improved).

After S206, when the user changes specifications for pipes among the chambers, pipes, and pumps of the 1st vacuum system, the server replaces the 1st vacuum system with the second vacuum system reflecting the specifications changed by the user. and displays, and simulation is performed based on the components and specifications of the second vacuum system (in the case of piping, specifications changed by the user are reflected) (S207).

After S207, the server compares the process conditions set in S202 with the results of the simulation performed in S207 to determine whether the process conditions are satisfied or not satisfied, and provides information therefor (S208).

After S208, the server compares the conductance between each component of the entire pipe (pipe, bent pipe, reduced pipe, etc.), extracts the pipe with inefficient specifications, and displays it on the corresponding part of the second vacuum system, The results of the second vacuum simulation are displayed together with the process conditions in the form of a graph in a separate neighboring area (S209).

Here, the server may accumulate and display the result of the second vacuum simulation on the result of the first simulation displayed together with the process conditions.

After S209, the server may repeatedly perform the above steps according to the user's input until the vacuum system designed by the user satisfies the process conditions.

When optimization of the piping in the current vacuum system is completed by the operation of the server 30 as described above, the server 30 transmits information so that a pump having an optimal specification, that is, a pump with an optimal capacity, is selected through an operation described below. can provide

Hereinafter, a process of optimizing the pump capacity when designing a vacuum system will be described in detail with reference to FIG. 3 . For reference, after optimization of the pipe as described above is completed, optimization of the pump capacity in the corresponding vacuum system may be subsequently performed.

FIG. 3 is a flowchart illustrating a process of selecting a pump with an optimal capacity when designing a vacuum system according to an embodiment of the present invention, which may be performed by the server 30 shown in FIG. 1 .

The server 30 implements a vacuum system by arranging chambers, pipes, and pumps in a virtual area according to a user's input (S301).

At this time, the server 30 may implement the system by reflecting the specifications of each component input or selected by the user. For reference, the user can select an icon provided in advance when selecting or inputting each component and specification of the vacuum system, and can set the size or position by dragging the mouse. Of course, the user can directly input the numerical value.

After S301, the server 30 sets the first process condition and the second process condition of the vacuum system according to the user's input (S302).

Here, the first process condition may include a starting pressure of the chamber, a target pressure, and a time required to reach (should) reach from the starting pressure of the chamber to the target pressure, and the second process condition may include a maximum gas load (gas load or gas flow) of process pressure, gas load at maximum process pressure, and gas load at minimum process pressure.

For reference, although it has been described that the process condition setting of the vacuum system is performed after S301, it may be set together when the specifications of each component of the vacuum system are set in S301 according to the embodiment.

In addition, although the description of the process of optimizing the piping in S301 is omitted, it is assumed that the optimization of the piping is completed through the above process.

After S302, the server 30 performs a simulation based on the components and specifications of the vacuum system designed in S301 (hereinafter referred to as a 'first vacuum system') (S303).

For reference, the server 30 may perform the above-described steps S301 to S303 by calling a previously designed vacuum system into a virtual area.

After S303, the server 30 displays a 'first simulation result' representing the time from the chamber starting pressure to the target pressure as a result of the simulation in S302 and a 'second simulation result' representing a change in chamber vacuum according to a gas load (or flow) change. 2 simulation result' is provided to the user terminal 10 to be displayed on the screen (S304).

Here, the first simulation result may be related to the first process condition, and the second simulation result may be related to the second process condition. The server 30 may display the first process condition together with the first simulation result and display the second process condition together with the second simulation result in S304 .

At this time, the server 30 may provide process conditions and simulation results in one or more of graphs, tables, and text. For example, by displaying simulation results in graphs and displaying process conditions in the corresponding graphs, users can intuitively determine whether the vacuum system they have designed satisfies or does not satisfy process conditions.

After S304, the server 30 determines the process conditions that satisfy the first process condition in the first simulation result and the second process condition in the second simulation result, that is, for each of the first simulation result and the second simulation result. A pump capacity (peak pumping speed) that satisfies all is selected (S305).

Here, the pump capacity (peak pumping speed) selected by the server 30 may not be a specification of an actual (sold) pump. That is, if a pump having the same capacity as the pump capacity selected by the server 30 actually exists (is sold), a pump having the corresponding capacity may be purchased and applied to the vacuum system. However, if the same capacity as the pump capacity selected by the server 30 does not actually exist (sold), the user has a pump with a capacity closest to the corresponding capacity (more specifically, a capacity larger than and closest to the corresponding capacity) (hereinafter referred to as 'alternative pumps'). That is, the capacity of the replacement pump selected by the user may be equal to or greater than the capacity of the pump selected by the server 30 .

After S305, the server 30 copies the first vacuum system according to the user's input and displays it next to the first vacuum system on the screen (hereinafter referred to as a 'first vacuum system') (S306).

After S306, when the pump capacity of the 1st 'vacuum system is changed to the capacity of the replacement pump by the user, the server 30 replaces the 1st' vacuum system with the second vacuum system in which the capacity of the replacement pump is reflected and displays it, Simulation is performed based on the components and specifications of the second vacuum system (S307).

After S307, the server 30 compares the first process condition and the second process condition set in S302 with the results of the simulation performed in S307 (first simulation result and second simulation result) to perform S304 and subsequent processes. Do (S308).

The server 30 may repeatedly perform the above-described steps according to the user's input until the optimal pump specification is selected in the range where the user-designed vacuum system satisfies both the first process condition and the second process condition. there is.

Here, the server 30 displays the simulation results together with the process conditions until the optimal vacuum system is designed, and the user changes the pump capacity of the vacuum system to an alternative pump capacity and performs the simulation again for each simulation. Simulation results can be provided together so that the results can be compared with each other. For example, the first simulation result (hereinafter referred to as '1-1 simulation result') and the second simulation result (hereinafter referred to as '1-2 simulation result'), which are simulation results of the first vacuum system, are used as a second vacuum It can be displayed on the screen together with the first simulation result (hereinafter referred to as '2-1st simulation result') and the second simulation result (hereinafter referred to as '2-2nd simulation result'), which are simulation results of the system. At this time, the 1-1 simulation result and the 2-1 simulation result may be displayed on the screen side by side or overlapped (accumulated) with each other and displayed on the screen. Of course, the 1-2 simulation results and the 2-2 simulation results may also be identically displayed on the screen.

Meanwhile, the server may provide process conditions and simulation results in one or more of graphs, tables, and text. For example, by displaying simulation results in graphs and displaying process conditions in the corresponding graphs, users can intuitively determine whether the vacuum system they have designed satisfies or does not satisfy process conditions.

In addition, the server compares the simulation results with the process conditions until the optimal vacuum system is designed, extracts and displays pipes with inefficient specifications, or selects the pump capacity for optimization and provides the information. In the process of re-simulating when the specification or capacity of the pump is changed, simulation results may be provided together so that each simulation result can be compared with each other. At this time, the number of simulation results provided together may be set so that comparison is possible.

For reference, the processes shown in FIGS. 2A, 2B, and 3 are summarized and briefly summarized as follows.

1st vacuum system implementation → 1st vacuum system simulation → piping efficiency evaluation from 1st simulation results → 1st vacuum system copy and 2nd vacuum system implementation with inefficient piping changed → 2nd vacuum system simulation and piping optimization (simulation result Comparable) → Evaluate pump efficiency from the simulation results of the second vacuum system → Copy the second vacuum system and implement the third vacuum system reflecting the pump with the changed capacity → Simulate the third vacuum system and optimize the pump (simulation results can be compared)

4 is a diagram showing the configuration of a vacuum system design screen according to an embodiment of the present invention. For reference, FIG. 4 is a screen provided in the process of optimizing piping in a vacuum system.

The first area 410 of the screen 400 displays the first vacuum system implemented by the user, and after the simulation of the first vacuum system, the second area 420 of the screen shows the simulation result of the 1-1 simulation. 421 and 1-2 simulation results 422 may be displayed.

Here, the 1-1 simulation result 421 may be a graph representing a time required to reach a target pressure in the piping design of the first vacuum system, and the 1-2 simulation result 422 is the piping design of the first vacuum system. It may be a graph showing chamber pressure during load (flow).

Then, when the user's specification change for the pipe occurs, the second vacuum system reflecting the user's specification change for the pipe is displayed in the third region 430, which is a spare area created by dividing the first region 410 of the screen. can be placed and displayed. After the simulation of the second vacuum system, the 2-1 simulation result 441 and the 2-2 simulation result 442 may be displayed in the second area 420 as simulation results.

Here, the 2-1 simulation result 441 may be a graph showing a time to reach the target pressure in the piping design of the second vacuum system, and the 2-2 simulation result 442 is the piping design of the second vacuum system. It may be a graph showing chamber pressure during load (flow). And the 1-1 simulation result 421 and the 2-1 simulation result 441, and the 1-2 simulation result 422 and the 2-2 simulation result 442 are accumulated respectively, that is, They can be displayed together on one coordinate.

Depending on the embodiment, the 2-1 simulation result 441 and the 2-2 simulation result 442 may be displayed in a fourth area (not shown) that is different from the second area 420, and the fourth area (not shown) may be a spare area created by dividing the second area 420 .

If the configuration specifications of the vacuum system are changed by the user, an 'n'th vacuum system reflecting the changed specifications may exist. In this case, 'n' may be limited to a predetermined number of times (for example, '6'), and a specific number of vacuum systems most recently simulated and simulation results of the vacuum system may be displayed on the screen. . Of course, depending on the embodiment, specific vacuum systems selected by the user and simulation results of the corresponding vacuum system may be displayed. At this time, simulation results of the vacuum systems displayed together on the screen may be accumulated and displayed together in a graph form on one coordinate in the same area. For reference, in the above 'specific vacuum systems selected by the user', 'user selection' may be indirect selection through a filtering process by user input, or direct selection using an input means such as a mouse or keyboard or a user's touch.

The vacuum system design screen as shown in FIG. 4 provides a default screen configuration in which the vacuum system design screen is displayed on the left side and the vacuum system simulation results are displayed in the form of a side view on the right side of the screen. It can be. And the configuration of this screen can be set in the form of a top/down view arranged up and down according to the user's setting, and the user interface allows the user to freely move the location on the screen through drag in and out. (UI) may be provided.

Through the configuration (arrangement) of the screen described above, the user can intuitively compare the simulation results before and after the improvement of the vacuum system with whether or not the pipe is optimized.

5A and 5B are diagrams showing an actual configuration of a vacuum system design screen according to an embodiment of the present invention, and are screens provided in the process of optimizing pipes in a vacuum system.

As described with reference to FIG. 4 , the first vacuum system implemented by the user is displayed on the first area 410 of the screen 400, and after the simulation of the first vacuum system, the second area 420 of the screen The 1-1 simulation result 421 and the 1-2 simulation result 422 are displayed. In addition, the second vacuum system reflecting the user's specification change for the pipe is displayed in the third area 430, and after the simulation of the second vacuum system, the 2-1 simulation result is displayed in the fourth area 440 as a simulation result. 441 and the 2-2 simulation result 442 are displayed. At this time, since the process conditions of the second vacuum system are also displayed, the user can intuitively check whether the corresponding simulation results satisfy the respective process conditions 451 and 452.

5A and 5B, the second area 420 and the fourth area 440 of the screen overlap each other. That is, since the same simulation results are displayed together in the form of a graph superimposed on one coordinate, the user can intuitively compare the simulation results before and after the improvement of the vacuum system with whether or not the pipe is optimized.

10; user terminal
20; communications network
30; server

Claims (8)

A method of displaying a design screen of a vacuum system including a chamber, a pipe, and a pump,
(a) displaying on a screen a first vacuum system implemented such that the chamber, pipe, and pump have respective specifications in a virtual area according to a user's input;
(b) simulating the first vacuum system based on the specification, and a first simulation result (hereinafter referred to as '1-1 simulation result') and a second simulation result (hereinafter referred to as '1-1 simulation result'), which are results of the simulation 2) displaying a simulation result) on the screen;
(c) displaying on the screen a second vacuum system implemented by reflecting a pipe or pump having specifications changed from the first vacuum system according to a user's input; and
(d) The second vacuum system is simulated based on the changed specifications, and the first simulation result (hereinafter referred to as '2-1 simulation result') and the second simulation result (hereinafter referred to as 'second simulation result'), which are results of the simulation, -2 displaying a simulation result) on the screen;
Including,
The specifications and process conditions of the chambers of the first vacuum system and the second vacuum system are the same, and the 1-1 simulation results, 1-2 simulation results, 2-1 simulation results, and 2-2 simulation results The method of displaying a design screen of a vacuum system, characterized in that it includes a result indicating a change in pressure according to the process conditions and time in the chamber, and a result indicating a change in vacuum degree according to a gas load.
According to claim 1,
In the step (d), the 1-1 simulation result and the 2-1 simulation result are accumulated and displayed together, and the 2-1 simulation result and the 2-2 simulation result are accumulated and displayed together. How to display the design screen of the vacuum system to be displayed.
According to claim 1,
The specifications and process conditions of the chambers of the first vacuum system and the second vacuum system are the same, and the 1-1 simulation results, 1-2 simulation results, 2-1 simulation results, and 2-2 simulation results ,
and displaying the process conditions together with information for determining whether each simulation result satisfies or dissatisfies the process conditions.
According to claim 2,
(e) When there are simulation results of the n-th vacuum system (n> 2), a method for displaying a design screen of a vacuum system, characterized in that the results of at least two simulations selected by the user are accumulated and displayed on the screen together. .
According to claim 2,
The first vacuum system and the second vacuum system are disposed in different regions of the screen, and the respective regions are adjacent to each other;
The 1-1 simulation result and the 2-1 simulation result, and the 2-1 simulation result and the 2-2 simulation result are arranged in the same area on the screen.
A computer readable medium containing instructions for performing a method according to any one of claims 1 to 5.
In the design screen display device of a vacuum system including a chamber, a pipe and a pump,
one or more processors; and
memory connected to the processor
Including,
the memory is
According to the user's input, the first vacuum system implemented so that the chamber, pipe, and pump have respective specifications is displayed in the first area of the screen in a virtual area, and the first vacuum system is simulated based on the specifications. to display the first simulation result (hereinafter referred to as '1-1 simulation result') and the second simulation result (hereinafter referred to as '1-2 simulation result'), which are the results of the simulation, on the second area of the screen According to the user's input, a second vacuum system implemented by reflecting a pipe or pump having specifications changed in the first vacuum system is displayed in the third area of the screen, and the second vacuum system is displayed based on the changed specifications. By simulating the system, the first simulation result (hereinafter referred to as '2-1 simulation result') and the second simulation result (hereinafter referred to as '2-2 simulation result'), which are the results of the simulation, are displayed on the fourth screen of the screen. displayed in the area
The 1-1 simulation results, the 1-2 simulation results, the 2-1 simulation results, and the 2-2 simulation results include process conditions and a result showing a change in pressure in the chamber over time, and a degree of vacuum according to a gas load. A design display device for a vacuum system that stores program instructions executable by the processor to include results indicating changes.
According to claim 7,
the memory is
When there are simulation results of the n-th vacuum system (n> 2), the vacuum system stores program commands executable by the processor to accumulate results for at least two simulations selected by the user and display them together on the screen. Design display device.

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