KR102482075B1 - Method and device for selecting the optimal pump capacity when designing a vacuum system - Google Patents

Abstract

A method for selecting a pump with an optimal capacity in a vacuum system including a chamber, a pipe, and a pump according to an embodiment of the present invention includes (a) a chamber of a first vacuum system disposed in a virtual area according to a user's input; Setting specifications and process conditions for piping and pumps; (b) simulating the first vacuum system based on specifications of the chamber, piping, and pump; (c) displaying a first simulation result indicating a time from the chamber starting pressure to a target pressure as a result of the simulation and a second simulation result indicating a change in chamber vacuum according to a gas load (or flow) change; And (d) selecting a pump capacity (peak pumping speed) that satisfies all of the process conditions for each of the first simulation result and the second simulation result, wherein the process condition is related to the first simulation result. It is characterized in that it includes a first process condition and a second process condition related to the second simulation result.

Description

Method and device for selecting the optimal pump capacity when designing a vacuum system}

The present invention relates to a method and apparatus for optimizing a vacuum system design, and more particularly, to a method and apparatus for selecting an optimal pump capacity when designing a vacuum system.

Vacuum technology is a technology that creates a vacuum in a chamber (container) and enables various experiments or production in it. Vacuum technology does not create anything by itself, but is a basic technology that provides the basis for research and manufacturing. Here, vacuum means a state in which the gas pressure in space is lower than atmospheric pressure.

On the other hand, a vacuum system composed of a chamber, a pipe, and a pump makes the inside of the chamber a vacuum state necessary for manufacturing or research to enable smooth processing. Vacuum prevents reactions or oxidation caused by the influence of other gases, lowers the boiling point of materials, cleans the surface, removes residual gases, and facilitates the introduction of desired materials.

A vacuum system providing such an effect is applied to all industrial fields, and is particularly applied to large-scale industries such as semiconductors and displays.

However, most of the vacuum systems used in the field have inefficient parts due to low efficiency piping configurations, such as the use of unnecessarily large-capacity pumps or the use of excessively bent pipes, narrow pipes, and reduced pipes.

Accordingly, there is a demand for a method for selecting optimal specifications of pipes and pumps that satisfy process conditions set by a user through vacuum system simulation when designing a vacuum system.

Korean Registered Patent No. 10-0786285 (registered on December 10, 2007)

An object of the present invention is to design a vacuum system by visual modeling, check whether a pump in the vacuum system satisfies the process conditions set by the user through simulation, and improve the capacity of an inefficient pump to design a vacuum system. It is to provide a way to optimize the capacity of.

A method for selecting a pump of optimal capacity in a vacuum system including a chamber, a pipe, and a pump according to an embodiment of the present invention for achieving the above object is (a) according to a user's input, arranged in a virtual area Setting specifications and process conditions of the chamber, pipe, and pump of the first vacuum system; (b) simulating the first vacuum system based on specifications of the chamber, piping, and pump; (c) as a result of the simulation, a first simulation result showing a pressure change including a time from the chamber start pressure to a target pressure, and a second simulation result showing a change in chamber vacuum according to a change in gas load (or flow) displaying; And (d) selecting a pump capacity (peak pumping speed) that satisfies all of the process conditions for each of the first simulation result and the second simulation result, wherein the process condition is related to the first simulation result. It is characterized in that it includes a first process condition and a second process condition related to the second simulation result.

In addition, an apparatus for optimizing a vacuum system design including a chamber, a pipe, and a pump according to an embodiment of the present invention for achieving the above object includes one or more processors; and a memory connected to the processor, wherein the memory sets specifications and process conditions of the chamber, pipe, and pump of the first vacuum system disposed in the virtual area according to a user's input, and sets the chamber, pipe, and The first vacuum system is simulated based on the specifications of the pump, and as a result of the simulation, a first simulation result representing a pressure change including a time from a chamber start pressure to a target pressure and a gas load (or flow) change Executed by the processor to display a second simulation result representing a change in the degree of vacuum of the chamber according to , and to select a pump capacity (peak pumping speed) that satisfies both the process conditions for each of the first simulation result and the second simulation result. Possible program instructions are stored, and the process conditions include a first process condition related to the first simulation result and a second process condition related to the second simulation result.

The method and apparatus for selecting the optimal pump capacity when designing a vacuum system of the present invention can conveniently set the configuration and specifications of the vacuum system through visual modeling, and the pump specifications among the designed vacuum system configurations satisfy the process conditions. Simulation results can be provided so that they can be replaced with optimal specifications.

In addition, since it is not necessary to use an unnecessarily excessive capacity pump when designing a vacuum system, cost can be saved when constructing a vacuum system.

In addition, since simulation results can be provided for each vacuum system by user selection, intuitive design results are provided and user convenience is increased.

1 is a block diagram for providing a vacuum system design according to an embodiment of the present invention.
2 is a flowchart illustrating a process of selecting a pump with an optimal capacity when designing a vacuum system according to an embodiment of the present invention.
3 is a diagram showing simulation results according to an embodiment of the present invention.
4 is a diagram showing simulation results according to another embodiment of the present invention.

Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings. However, the spirit of the present invention is not limited to the presented embodiments, and those skilled in the art who understand the spirit of the present invention may add, change, delete, etc. other elements within the scope of the same spirit, through other degenerative inventions or the present invention. Other embodiments included within the scope of the inventive idea can be easily proposed, but it will also be said to be included within the scope of the inventive concept. In addition, components having the same function within the scope of the same idea appearing in the drawings of each embodiment are described using the same reference numerals.

1 is a configuration block diagram for designing a vacuum system according to an embodiment of the present invention.

Vacuum system design according to an embodiment of the present invention may be performed by a 'vacuum system design program'. As an embodiment, the vacuum system design program may exist in the server 30 and be provided in a web-based form. In this case, the user accesses the website provided by the server 30 using the user terminal 10 to obtain a vacuum system design program. system can be designed. As another embodiment, the vacuum system design program may be distributed and installed in the user terminal 10 and the server 30 . For example, a part that uses few resources, such as a user interface of a vacuum system design program, may be provided in the user terminal 10, and a part that uses many resources, such as a database, may exist in the server 30. As another embodiment, the vacuum system design program may exist in the user terminal 10 with all configurations including the database. In this case, the user terminal 10 does not need to be connected online for designing the vacuum system, and may be physically connected to an external storage device in which an update file is stored so that the program is updated as needed. Hereinafter, an embodiment in which a vacuum system design program is present in the server 30 and a vacuum system design described below is provided in a web-based form by the server 30 will be described.

For reference, the server 30 may include one or more processors and a memory connected to the processor, and program instructions executable by the processor for performing operations of the server 30 described below may be stored in the memory. . In addition to this, the server 30 may further include a communication unit for communicating with the user terminal 10 .

As an embodiment of the present invention, the server 30 arranges components such as chambers, pipes, and pumps in a 2D or 3D virtual area and sets specifications of each component to implement (design) a vacuum system. can do.

Here, 'specification' refers to the shape (for example, cuboid, cylinder, etc.) and volume, start pressure, target pressure, gas load (or gas flow) in the case of a chamber. flow)), process pressure, etc. may be included. For reference, 'start pressure' and 'target pressure' may be included in 'process conditions' to be described later.

In the case of piping, the type according to shape such as pipe, bent pipe (bend/elbow/miter), reducer, etc., and each length, inner diameter, angle, etc. shall be included in the specification. can

In the case of a pump, specifications may include pump size, inlet size and location, pumping speed, and the like.

The server 30 may simulate a vacuum system designed based on the specifications of the components (chamber, pipe, pump, etc.) of the above-described vacuum system and determine whether the simulation result satisfies or dissatisfies the process conditions. In the present invention, 'process conditions' are the first process conditions including the starting pressure of the chamber, the target pressure, and the time to reach (should) reach the target pressure from the starting pressure of the chamber, and the maximum gas load (Gas load or Gas flow) A second process condition comprising a process pressure of , a gas load at a maximum process pressure, and a gas load at a minimum process pressure. The first process condition and the second process condition may be set by a user, and the server 30 uses a vacuum design program according to an embodiment of the present invention to each component of the entire pipe implemented in the current vacuum system. Extract pipes with inefficient specifications among (pipes, bent pipes, shrink pipes, etc.), determine whether the pump implemented in the current vacuum system corresponds to inefficient specifications, and determine whether the user has optimal specifications in the vacuum system (for example, For example, the relevant information can be provided so that a pump with a capacity) can be selected. Here, 'inefficient' may mean the use of low-efficiency piping or excessively high-specification pumps even if the first process condition and the second process condition are satisfied.

Hereinafter, it is assumed that optimization of piping in the current vacuum system is completed using the vacuum design program according to an embodiment of the present invention, and after optimization of the piping is completed, a pump having an optimal specification, that is, a pump having an optimal capacity Please explain what you are selecting.

FIG. 2 is a flowchart illustrating a process of selecting a pump with an optimal capacity when designing a vacuum system according to an embodiment of the present invention, which may be performed by the server 30 shown in FIG. 1 .

The server 30 implements a vacuum system by arranging chambers, pipes, and pumps in a virtual area according to a user's input (S201).

At this time, the server 30 may implement the system by reflecting the specifications of each component input or selected by the user. For reference, the user can select an icon provided in advance when selecting or inputting each component and specification of the vacuum system, and can set the size or position by dragging the mouse. Of course, the user can directly input the numerical value.

After S201, the server 30 sets the first process condition and the second process condition of the vacuum system according to the user's input (S202).

Here, the first process condition may include a starting pressure of the chamber, a target pressure, and a time required to reach (should) reach from the starting pressure of the chamber to the target pressure, and the second process condition may include a maximum gas load (gas load or gas flow) of process pressure, gas load at maximum process pressure, and gas load at minimum process pressure.

For reference, although it has been described that the process condition setting of the vacuum system is performed after S201, it may be set together when the specifications of each component of the vacuum system are set in S201 according to the embodiment.

After S202, the server 30 performs a simulation based on the components and specifications of the vacuum system designed in S201 (hereinafter referred to as a 'first vacuum system') (S203).

For reference, the server 30 may perform the above-described steps S201 to S203 by calling a previously designed vacuum system into a virtual area.

After S203, the server 30 displays a 'first simulation result' representing the time from the chamber starting pressure to the target pressure as a result of the simulation in S202 and a 'second simulation result' representing a change in chamber vacuum according to a gas load (or flow) change. 2 simulation result' is provided to the user terminal 10 to be displayed on the screen (S204).

Here, the first simulation result may be related to the first process condition, and the second simulation result may be related to the second process condition. The server 30 may display the first process condition together with the first simulation result and display the second process condition together with the second simulation result in S204 .

At this time, the server 30 may provide process conditions and simulation results in one or more of graphs, tables, and text. For example, by displaying simulation results in graphs and displaying process conditions in the corresponding graphs, users can intuitively determine whether the vacuum system they have designed satisfies or does not satisfy process conditions. Information about this is shown in FIGS. 3 and 4, respectively.

After S204, the server 30 sets a process condition that satisfies the first process condition in the first simulation result and satisfies the second process condition in the second simulation result, that is, for each of the first simulation result and the second simulation result. A pump capacity (peak pumping speed) that satisfies all is selected (S205).

Here, the pump capacity (peak pumping speed) selected by the server 30 may not be a specification of an actual (sold) pump. That is, if a pump having the same capacity as the pump capacity selected by the server 30 actually exists (is sold), a pump having the corresponding capacity may be purchased and applied to the vacuum system. However, if the same capacity as the pump capacity selected by the server 30 does not actually exist (sold), the user has a pump with a capacity closest to the corresponding capacity (more specifically, a capacity larger than and closest to the corresponding capacity) (hereinafter referred to as 'alternative pumps'). That is, the capacity of the replacement pump selected by the user may be equal to or greater than the capacity of the pump selected by the server 30 .

A detailed description of S205 will be described later with reference to FIGS. 3 and 4 .

After S205, the server 30 copies the first vacuum system according to the user's input and displays it next to the first vacuum system on the screen (hereinafter referred to as a 'first vacuum system') (S206).

After S206, when the pump capacity of the 1st 'vacuum system is changed to the capacity of the replacement pump by the user, the server 30 replaces the 1st' vacuum system with the second vacuum system in which the capacity of the replacement pump is reflected and displays it, Simulation is performed based on the components and specifications of the second vacuum system (S207).

After S207, the server 30 compares the first process condition and the second process condition set in S202 with the results of the simulation performed in S207 (first simulation result and second simulation result), and performs S204 and subsequent processes. Do (S208).

The server 30 may repeatedly perform the above-described steps according to the user's input until the optimal pump specification is selected in the range where the user-designed vacuum system satisfies both the first process condition and the second process condition. there is.

Here, the server 30 displays the simulation results together with the process conditions until the optimal vacuum system is designed, and the user changes the pump capacity of the vacuum system to an alternative pump capacity and performs the simulation again for each simulation. Simulation results can be provided together so that the results can be compared with each other. For example, the first simulation result (hereinafter referred to as '1-1 simulation result') and the second simulation result (hereinafter referred to as '1-2 simulation result'), which are simulation results of the first vacuum system, are used as a second vacuum It can be displayed on the screen together with the first simulation result (hereinafter referred to as '2-1st simulation result') and the second simulation result (hereinafter referred to as '2-2nd simulation result'), which are simulation results of the system. At this time, the 1-1 simulation result and the 2-1 simulation result may be displayed on the screen side by side or overlapped (accumulated) with each other and displayed on the screen. Of course, the 1-2 simulation results and the 2-2 simulation results may also be identically displayed on the screen.

3 and 4 are diagrams showing simulation results according to an embodiment of the present invention.

The simulation result of FIG. 3 is a first simulation result of simulating the first vacuum system, and shows a chamber target pressure reaching time (pump down time) of the vacuum system designed by the user as a graph. Here, the first process conditions (the starting pressure of the chamber, the target pressure, and the time required to reach the target pressure from the starting pressure of the chamber) 300 are displayed together with a graph.

The simulation result of FIG. 4 is a second simulation result of simulating the first vacuum system, and shows a process pressure change (flow/pressure) according to a gas load as a graph. Here, a second process condition (process pressure at maximum gas load or gas flow, gas load at maximum process pressure, and gas load at minimum process pressure) 400 is shown along with a graph.

When the server 30 provides (displays) the first simulation result and the second simulation result, the pumping speed of the first vacuum system designed by the user, that is, the pump capacity is based (100%) (310, 410).

Referring first to FIG. 3 , the current pump capacity (hereinafter referred to as 'standard pump capacity') 310 of the first vacuum system designed by the user satisfies the first process condition 300 . Even if the standard pump capacity 310 is applied to an actual vacuum system, there is no problem in using it because it sufficiently satisfies the first process condition 300. A pump with a lower capacity than the current pump capacity should be selected.

In this case, the server 30 calculates the pump capacity by reducing the pump capacity by a preset ratio (70%, 50%, 30%) from the standard pump capacity, and displays it as a graph (320, 330, 340), respectively. . Of course, the preset ratio is merely an example and may be set to any number of ratios. Here, among the graphs displayed as the first simulation result, the result of the actual simulation is one reference pump capacity 310, and the remaining graphs 320, 330, and 340 are preset in the server 30 based on the reference pump capacity 310. This is the result calculated by applying the ratio (70%, 50%, 30%). In other words, the server 30 does not need to perform a total of four simulations for the first vacuum system to obtain the four graphs 310, 320, 330, and 340 displayed as the first simulation results, and thus the vacuum system design program It has the advantage of reducing the burden on driving.

The server 30 may select a pump capacity of 70% 320 compared to the standard pump capacity 310 as a pump capacity satisfying the first process condition 300 in the first simulation result shown in FIG. 3 .

Meanwhile, in the second simulation result of FIG. 4 , the standard pump capacity 410 satisfies the second process condition 400 . Even if the standard pump capacity 410 is applied to the actual vacuum system, there is no problem in using it because it sufficiently satisfies the second process condition 400. In order to do this, a pump with a lower capacity than the current pump capacity must be selected. The server 30 may calculate the pump capacity by reducing the pump capacity by a preset ratio (70%, 50%, 30%) from the standard pump capacity 410 and display it as a graph (420, 430, 440), respectively. there is. Here, among the graphs displayed as the second simulation result, the result of the actual simulation is one reference pump capacity 410, and the remaining graphs 420, 430, and 440 are pre-set in the server 30 based on the reference pump capacity 410. This is the result calculated by applying the set ratio (70%, 50%, 30%).

The server 30 uses a pump capacity of 70% (420) and 50% (430) of the standard pump capacity (410) as a pump capacity that satisfies the second process condition (400) in the second simulation result shown in FIG. can be selected

In summary, when the first simulation result of FIG. 3 and the second simulation result of FIG. 4 satisfy the first process condition and the second process condition, respectively, the server 30 reduces the pump capacity by a predetermined ratio to perform each process Each pump capacity matching the conditions was selected. That is, in the first simulation result, a pump capacity of 70% (320) compared to the standard pump capacity (310) was selected, and in the second simulation result, 70% (420) and 50% (430) of the standard pump capacity (410) were selected. The pump capacity was selected. Afterwards, the server 30 may select 70% of the pump capacity that satisfies all of the selected pump capacities as the optimal pump capacity, and the user may select a capacity equal to or maximally close to 70% of the standard pump capacity (70%). Greater than) by finding a pump having a pump that actually exists (sold) and selecting it as a replacement pump, and inputting the actual specifications of the selected replacement pump to the first 'vacuum system, the server 30 determines the replacement pump is reflected. 2 A vacuum system can be simulated.

For reference, the pumping speed has been described as the pump capacity, but the server 30 selects the peak among a plurality of pumping speeds when selecting a pump capacity that satisfies all process conditions. can

In the embodiments of FIGS. 3 and 4, the case where the first simulation result and the second simulation result satisfy both process conditions has been described, but if each process condition among the first simulation result and the second simulation result is one or more In case of dissatisfaction, the server 30 may select each pump capacity close to each process condition by increasing the standard pump capacity at a predetermined rate. At this time, the server 30 may select a larger pump capacity among the selected pump capacities as the optimal pump capacity.

As another embodiment of selecting the optimal pump capacity, when the first simulation result and the second simulation result satisfy both process conditions, the server 30 reduces the capacity from the standard pump capacity to determine the respective process conditions and Each matching pump capacity can be selected, and a larger pump capacity among the selected pump capacities can be selected as the optimal pump capacity. That is, in selecting the optimal pump capacity that satisfies all process conditions, the pump capacity matching the process conditions is directly calculated and provided. If one or more of each of the process conditions of the first simulation result and the second simulation result is unsatisfactory, the server 30 increases the pump capacity to select each pump capacity that matches each process condition, and selects each of the selected pump capacities. Among the pump capacities of , the larger pump capacity can be selected as the optimal pump capacity.

For reference, before performing the above process, the user terminal 10 may attempt to log in to a website for vacuum system design provided by the server 30 . The first member registration process is required for login authentication, and when proceeding as a non-member, the vacuum system program can be used temporarily by personal information authentication, but the benefits provided to members such as discount benefits may be limited.

For example, the server 30 can provide a vacuum system design program service by membership system, and also provides a trial version and a full version by paid payment, and when using the full version service, payment is made for each login , a fixed-term payment method may be employed.

In addition, login authentication may be performed by matching with personal information provided at the time of initial member registration, and for this purpose, the server may encrypt and store personal information in a database.

When login authentication is completed, a web-based vacuum system design program is provided through the communication network 20. To this end, the user terminal needs to periodically access the server through the communication network, so a communication protocol capable of connecting to the communication network can be embedded.

The user terminal may include, for example, a desktop computer, a notebook computer, a tablet PC, a tablet phone, a smart phone, and the like.

10; user terminal
20; communications network
30; server

Claims (10)

A method for selecting a pump of optimal capacity in a vacuum system including a chamber, a pipe, and a pump,
(a) setting specifications and process conditions of a chamber, pipe, and pump of a first vacuum system disposed in a virtual area according to a user's input;
(b) simulating the first vacuum system based on specifications of the chamber, piping, and pump;
(c) as a result of the simulation, a first simulation result showing a pressure change including a time from the chamber start pressure to a target pressure, and a second simulation result showing a change in chamber vacuum according to a change in gas load (or flow) displaying; and
(d) selecting a pump capacity (peak pumping speed) that satisfies all of the process conditions for each of the first simulation result and the second simulation result
Including,
Wherein the process conditions include a first process condition related to the first simulation result and a second process condition related to the second simulation result.
According to claim 1,
Wherein step (c) displays the first process condition and the second process condition in the first simulation result and the second simulation result, respectively.
According to claim 1,
The step (d) is
When the first simulation result and the second simulation result satisfy all of the respective process conditions, the pump capacity is reduced to select each pump capacity matching the respective process conditions, and the selected pump capacity The larger pump capacity is selected as the optimal pump capacity,
When one or more of the respective process conditions of the first simulation result and the second simulation result are unsatisfactory, the pump capacity is increased to select each pump capacity matching the respective process condition, and each of the selected pumps A method for selecting a pump with an optimal capacity when designing a vacuum system, characterized in that the larger pump capacity among the capacities is selected as the optimal pump capacity.
According to claim 1
The step (d) is
When the first simulation result and the second simulation result satisfy all of the respective process conditions, the pump capacity is reduced at a constant rate to select each pump capacity according to the respective process conditions, Among the pump capacities, the larger pump capacity is selected as the optimal pump capacity,
When one or more of the respective process conditions of the first simulation result and the second simulation result are unsatisfactory, the pump capacity is increased at a constant rate to select each pump capacity according to the respective process conditions, A method for selecting a pump with an optimal capacity when designing a vacuum system, characterized in that the larger pump capacity of the pump capacity is selected as the optimal pump capacity.
According to claim 1,
The first process condition includes a chamber starting pressure, a target pressure, and a reaching time from the chamber starting pressure to the target pressure,
The second process condition includes at least one of a process pressure at the maximum gas load (or flow), a gas load at the maximum process pressure, and a gas load at the minimum process pressure. How to select a pump.
According to claim 1,
Wherein the first simulation result and the second simulation result are displayed using a graph.
According to claim 1,
(e) copying the first vacuum system so that it is displayed adjacent to the first vacuum system (hereinafter referred to as a '1' vacuum system);
(f) displaying a second vacuum system reflecting specifications of an alternative pump selected based on the selected pump capacity in the first 'vacuum system;
(g) simulating the second vacuum system; and
(h) displaying the first simulation result and the second simulation result as a simulation result of step (g);
Wherein the replacement pump has a capacity equal to or greater than the selected pump capacity.
According to claim 7,
The step (h) is
A method for selecting a pump of optimal capacity when designing a vacuum system, characterized in that the simulation results of the first vacuum system are accumulated and displayed together.
A computer readable medium containing instructions for performing a method according to any one of claims 1 to 8.
In the device for optimizing the design of a vacuum system including a chamber, a pipe and a pump,
one or more processors; and
memory connected to the processor
Including,
the memory is
According to the user's input, the specifications and process conditions of the chamber, pipe, and pump of the first vacuum system disposed in the virtual area are set, and the first vacuum system is simulated based on the specifications of the chamber, pipe, and pump. , As a result of the simulation, a first simulation result representing a pressure change including a time from the chamber start pressure to a target pressure and a second simulation result representing a change in chamber vacuum according to a change in gas load (or flow) are displayed, , Store program instructions executable by the processor to select a pump capacity (peak pumping speed) that satisfies all of the process conditions for each of the first simulation result and the second simulation result, wherein the process condition is the first An apparatus for designing optimization of a vacuum system comprising a first process condition related to a simulation result and a second process condition related to the second simulation result.

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