KR102471345B1 - Dispenser device for supplying chemical and chemical dispensing system using the same - Google Patents

Abstract

Disclosed are a dispenser device for chemical substance supply and a chemical substance dispensing system employing the same. The dispenser device for chemical substance supply includes: a head unit including a main outlet for suctioning and discharging a chemical substance stored in a container and a residue outlet for suctioning and removing residues precipitated or stagnated in the bottom of the container from the chemical substance in the container; a pipe unit coupled to the heat unit to be led into the container, and having a first flow path and a second flow path separated from the first flow path, wherein the first flow path is connected to the main outlet, and the second flow path is connected to the residue outlet; a chemical substance suctioning unit installed in a first area of the pipe unit, having a chemical substance suction passage connected to the first flow path, and suctioning the chemical substance from the container through the chemical substance suction passage; and a residue suctioning unit installed in a second area located below the first area of the pipe unit, having a residue suction passage connected to the second flow path, and suctioning the residues through the residue suction passage. Therefore, the present invention is capable of improving a mixture characteristic of chemicals as well as performing two kinds of work through one single head component.

Description

Dispenser device for supplying chemical substances and chemical substance dispensing system using the same {Dispenser device for supplying chemical and chemical dispensing system using the same}

The present invention relates to a device and system for supplying/distributing a predetermined substance, and more particularly, to a dispenser device for supplying a chemical substance and a chemical substance dispensing system to which the same is applied.

Various chemicals are used for various purposes in semiconductor processing. Due to quality and safety issues, these chemicals must be stored in highly stable containers and dispensed using a highly reliable dispensing system. For example, a slurry used for a chemical mechanical polishing (CMP) process in semiconductor manufacturing is a chemical containing various chemical components, and must be handled carefully and mixed uniformly, and process tools/equipment must be transported safely. In addition, the slurry must remain homogeneous after mixing until dispensing to the point of use.

Dispenser equipment for preparing and dispensing (supplying) slurries has been proposed. Existing dispenser equipment typically uses two dispense heads mounted spaced apart on a drum. One of the two dispensing heads is used for dispensing the slurry, and the other is used for collecting the slurry. Accordingly, the dispensing head for discharging the slurry may be referred to as a discharging head, and the head for recovering the slurry may be referred to as a collecting head.

However, since the existing dispenser equipment uses two dispensing heads mounted on one drum, there are problems in that head replacement time and number of processes increase, maintenance and management are not easy, and cost and maintenance costs increase. have. In addition, when using a two-head (head) device such as the existing dispenser equipment, it may be difficult to improve the mixing characteristics of the drug.

In addition, in the case of a conventional dispenser device, since a dispenser device having a suitable size is determined according to drum specifications (depth, etc.), several dispenser devices having sizes suitable for various types of drums are required. Therefore, it is inconvenient to have and manage various types of dispenser devices.

In addition, after the dispensing process is completed, precipitates may remain inside the drum, and these precipitates are difficult to remove from the drum and cause problems of increasing processing costs. The precipitate (residue) may cause environmental problems, and if the drum containing the precipitate is discarded as it is, fines may be imposed. The precipitate remaining in the drum must be diluted with water and disposed of in a prescribed manner. To this end, a separate wastewater treatment device is required, resulting in a significant increase in treatment cost.

The technical problem to be achieved by the present invention is to perform two tasks of suction and circulation (i.e., recovery) in relation to the supply / distribution of chemicals with one head configuration, while simultaneously improving the mixing characteristics of chemicals. It is to provide a dispenser device that can be improved.

In addition, the technical problem to be achieved by the present invention can be used interchangeably for a plurality of containers (ex, drums) having different specifications, and can easily remove the residue (sediment) remaining at the bottom of the container. It is to provide a dispenser device for supplying chemicals having a structure.

The problem to be solved by the present invention is not limited to the problems mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below.

According to embodiments of the present invention for achieving the above object, the main outlet for suctioning and discharging the chemical substances contained in the container and the deposited or remaining substances on the bottom of the container from the chemical substances inside the container a head portion including a residue outlet for suctioning and removing residue; It is coupled to the head and introduced into the container, has a first flow path and a second flow path separated from the first flow path, the first flow path is connected to the main outlet, and the second flow path is a conduit part connected to the residue outlet; a chemical intake unit installed in the first region of the conduit unit, having a chemical intake passage connected to the first passage, and inhaling the chemical from the container through the chemical intake passage; and a residue suction unit installed in a second region located below the first region of the conduit, having a residue suction passage connected to the second flow path, and sucking the residue through the residue suction passage. There is provided a dispenser device for supplying chemicals including;

The conduit may have a multi-tube structure including an inner tube and an exterior surrounding the inner tube, the first flow path may be formed between the inner tube and the exterior, and the second flow path may be formed inside the inner tube. It can be.

A lower end of the first passage may be disposed at a higher position than a lower end of the second passage.

The residue intake unit may be installed at the lower end of the conduit part corresponding to the lower end of the second flow path, and the chemical intake unit may be installed at the lower end of the first flow path disposed at a higher position than the residue intake unit. have.

A height difference between the chemical substance inhalation passage and the residue inhalation passage may be about 50 to 150 mm.

The residue suction unit may be disposed to contact the bottom surface of the container.

The chemical intake unit may include a plurality of chemical intake passages.

The chemical intake passage may have a structure inclined to form an acute angle from a lower side with respect to a central axis of the conduit.

The residue suction unit may include a plurality of residue suction passages.

The residue suction passage may have a structure perpendicular to the central axis of the conduit part.

In the head portion, the residue outlet may be disposed above the main outlet.

The main outlet may be a first main outlet, the head portion may further include a second main outlet spaced apart from the first main outlet, and the first and second main outlets are common to the first flow path. can be connected

The head part may further include a gas inlet for injecting gas for adjusting pressure between the inside and outside of the container into the container.

It may further include an outer tube portion surrounding a portion of the conduit portion, and a portion of the outer tube portion may be drawn into the container together with the conduit portion. A third passage may be provided between the conduit part and the outer pipe part, and the gas for adjusting the pressure may be injected into the container through the third passage.

The conduit part may be inserted into the through hole formed in the container, and the dispenser header may further include a dust seal member for maintaining airtightness between the conduit part and the through hole.

The conduit part inserted into the through hole of the container and contacting the dust seal member moves toward the bottom of the container by gravity, and the residue suction part is arranged to contact the bottom of the container regardless of the container size. The chemical intake unit may be spaced apart from the bottom of the container by a predetermined height.

According to another embodiment of the present invention, a chemical substance dispensing system to which the dispenser device for supplying the above chemical substance is applied is provided.

According to embodiments of the present invention, it is possible to implement a dispenser device capable of performing two tasks of suction and circulation in relation to supply/distribution of chemicals with a single head configuration and improving mixing characteristics of chemicals. .

According to embodiments, both suction and circulation operations may be effectively performed by simultaneously discharging and injecting chemicals using a single integrated dispenser device. Since existing dispenser equipment uses two dispense heads mounted on one drum, there are problems in that head replacement time and number of processes increase, maintenance and management are not easy, and cost and maintenance/management costs increase. However, in the embodiment of the present invention, since the suction and circulation processes are performed using one dispenser device, the replacement time of the dispenser device (head) can be reduced and the number of dispenser device (head) replacement can be reduced. Cost/labor costs and maintenance/management costs can be greatly reduced.

When the dispenser device according to the embodiment is used, mixing characteristics of chemicals (drugs) in a container can be improved through spraying using a plurality of nozzles, compared to the case of using a conventional 2-head device. . In particular, in the embodiment of the present invention, it is possible to obtain an effect of further improving mixing characteristics of chemicals (drugs) in relation to the configuration and design of the conduit part and the nozzle part. In addition, since the dispenser device according to the embodiment has a compact configuration, installation is easy and space utilization can be improved.

In addition, according to an embodiment of the present invention, it can be used interchangeably with a plurality of containers (ex, drums) having different standards, and can easily remove residue (sediment) remaining at the bottom of the container. A dispenser device for supplying chemicals having a structure may be implemented. Accordingly, the burden and cost of maintenance and management in this regard can be lowered, additional costs due to residue (precipitate) in the container can be prevented, and excellent chemical supply characteristics can be secured. The residue (sediment) may cause environmental problems, and if the drum containing the sediment is discarded as it is, a fine may be imposed. In the conventional case, since a separate wastewater treatment device must be used to dilute the residue (precipitate) remaining in the drum with water and dispose of it in a prescribed manner, a problem in that treatment cost greatly increases. However, when the dispenser device according to the embodiment of the present invention is used, since the residue (precipitate) remaining in the drum can be very easily removed and treated, cost reduction and environmental problem improvement effects can be obtained. have.

1A is a cross-sectional view showing a dispenser device for supplying chemicals according to an embodiment of the present invention.
FIG. 1B is a plan view of the dispenser device for supplying chemicals of FIG. 1A viewed from above.
FIG. 2 is a cross-sectional view illustrating a flow (circulation process) of a fluid (chemical substance) in the dispenser device for supplying a chemical substance described with reference to FIGS. 1A and 1B .
3A is a cross-sectional view showing a dispenser device for supplying chemicals according to another embodiment of the present invention.
Figure 3b is a plan view of the dispenser device for supplying chemicals of Figure 3a viewed from above.
Figure 4a is a cross-sectional view showing a dispenser device for supplying chemicals according to another embodiment of the present invention.
Figure 4b is a plan view of the dispenser device for supplying chemicals of Figure 4a viewed from above.
5 is a photographic image showing an example of an adapter that can be applied to a dispenser device for supplying chemicals according to an embodiment of the present invention.
6 is a photographic image exemplarily showing a structure in which an adapter and a head unit are coupled that can be applied to a dispenser device for supplying chemicals according to an embodiment of the present invention.
7 is a photographic image showing a conduit part and a nozzle part installed in the conduit part that can be applied to a dispenser device for supplying chemicals according to an embodiment of the present invention.
8 is a schematic diagram for explaining a case in which a dispenser device for supplying chemicals according to an embodiment of the present invention is applied to a container.
9 is a view for illustratively explaining a chemical substance dispensing system to which a dispenser device for supplying chemicals according to an embodiment of the present invention is applied.
10 is a diagram showing a chemical substance dispensing system according to a comparative example.
11 is a view showing flow analysis results obtained by evaluating how mixing and flow of chemicals are performed in a container when a chemical substance is circulated by applying a dispenser device for supplying chemicals according to an embodiment of the present invention.
12 is a view showing flow analysis results obtained by evaluating how mixing and flow of chemicals are performed in a container when a dispenser device for supplying chemicals according to a comparative example is applied to circulate chemicals.
13 to 15 are views showing cases in which a dispenser device for supplying chemicals according to another embodiment of the present invention is applied to a container.
16 is a cross-sectional view exemplarily showing configurations of a head part and a conduit part of a dispenser device for supplying chemicals according to another embodiment of the present invention.
17 is a cross-sectional view illustratively showing configurations of a conduit, a chemical intake, and a residue intake of a dispenser device for supplying chemicals according to another embodiment of the present invention.
18 is a cross-sectional view showing an enlarged structure of a chemical substance suction unit of a dispenser device for supplying chemicals according to another embodiment of the present invention.
19 is a cross-sectional view showing an enlarged structure of a residue suction unit of a dispenser device for supplying chemicals according to another embodiment of the present invention.
FIG. 20 is an enlarged cross-sectional view of the fastening portion and its surrounding area in FIG. 16 .

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Embodiments of the present invention to be described below are provided to more clearly explain the present invention to those skilled in the art, and the scope of the present invention is not limited by the following examples, Embodiments may be modified in many different forms.

Terms used in this specification are used to describe specific embodiments and are not intended to limit the present invention. Terms in the singular form used herein may include plural forms unless the context clearly indicates otherwise. Also, as used herein, the terms "comprise" and/or "comprising" specify the presence of the stated shape, step, number, operation, member, element, and/or group thereof. and does not exclude the presence or addition of one or more other shapes, steps, numbers, operations, elements, elements and/or groups thereof. In addition, the term “connection” used in this specification means not only direct connection of certain members, but also a concept including indirect connection by intervening other members between the members.

In addition, when a member is said to be located “on” another member in the present specification, this includes not only a case where a member is in contact with another member, but also a case where another member exists between the two members. As used herein, the term “and/or” includes any one and all combinations of one or more of the listed items. In addition, terms of degree such as "about" and "substantially" used in the present specification are used in a range of values or degrees or meanings close thereto, taking into account inherent manufacturing and material tolerances, and are used to help the understanding of the present application. Exact or absolute figures provided for this purpose are used to prevent undue exploitation by infringers of the stated disclosure.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The size or thickness of areas or parts shown in the accompanying drawings may be slightly exaggerated for clarity of the specification and convenience of description. Like reference numbers indicate like elements throughout the detailed description.

1A is a cross-sectional view showing a dispenser device for supplying chemicals according to an embodiment of the present invention. FIG. 1B is a plan view of the dispenser device for supplying chemicals of FIG. 1A viewed from above.

Referring to FIGS. 1A and 1B, the dispenser device for supplying chemicals according to the present embodiment includes an adapter A10 coupled to a container (not shown) in which a chemical substance (fluid) is contained, and an adapter A10. It may include a head part H10 coupled to the upper part, a conduit part P10 coupled to the head part H10 and extending below the adapter A10, and a nozzle part N10 installed at a predetermined position of the conduit part P10. .

A screw thread S10 may be formed on the lower side of the adapter A10, and may be fastened to the container using the screw thread S10. The vessel may be a kind of drum, but in some cases, it may be a unit other than a drum. The adapter A10 may have a hollow hole, and the conduit part P10 may be introduced through the hollow hole and coupled to the head part H10.

The head portion H10 may be coupled to an upper portion of the adapter A10. The head part (H10) is discharged through a discharge port (D10) for suctioning and discharging the chemical substance contained in the container and injecting and circulating the chemical substance that has passed through a given process into the container and is discharged through the discharge port (D10). It may include an inlet (C10) for. The chemical substance discharged through the discharge port D10 and passed through a predetermined process (the given process) basically includes the chemical substance originally contained in the container, and may further include other chemicals in addition to it. The outlet D10 may be referred to as a 'chemical material outlet', and the inlet port C10 may be referred to as a 'chemical material inlet'. The head part H10 may include both the outlet D10 and the inlet C10 in one main body. The outlet D10 may have a kind of connector structure for connecting an external pipe (tube), that is, a fitting structure. Similarly, the inlet C10 may also have a connector structure for connecting other external pipes (tubes), that is, a fitting structure. In this embodiment, both the outlet D10 and the inlet C10 may be provided on the upper surface of the head portion H10. The outlet D10 and the inlet C10 may be spaced apart from each other. When both the discharge port D10 and the inlet port C10 are provided on the upper surface of the head part H10, a process of connecting pipes (tubes) to them may be easier.

The conduit part P10 may be coupled to the head part H10 and extend below it through the hollow hole of the adapter A10. The conduit portion P10 may be referred to as a kind of dip-pipe. The conduit part P10 includes a suction passage F10 for moving the chemical contained in the container to the outlet D10 and a supply passage F20 for supplying the chemical substance supplied to the inlet C10 into the container. It can be configured to include. The suction passage F10 and the supply passage F20 may be separated from each other. For example, the conduit part P10 may have a “double pipe structure” having an inner pipe NP10 and an outer pipe TP10 surrounding the inner pipe NP10. At this time, the suction passage F10 may be formed inside the inner pipe NP10, and the supply passage F20 may be formed between the inner pipe NP10 and the outer pipe TP10.

Also, according to an embodiment of the present invention, the lower end of the supply passage F20 may be disposed at a higher position than the lower end of the suction passage F10. In other words, the suction passage F10 may extend further below the lower end of the supply passage F20 than the supply passage F20. The nozzle unit N10 may be provided to surround the lower end of the supply passage F20.

The nozzle unit (N10) may be provided to surround the lower end of the supply passage (F20), and may include a plurality of spray nozzles (n10) for injecting the chemical substance supplied through the supply passage (F20) into the container. can Here, the plurality of injection nozzles n10 may be connected to the lower end of the supply passage F20 or a portion adjacent thereto.

The plurality of injection nozzles (n10) will be configured to inject the chemical substance in a direction inclined with respect to the central axis of the conduit part (P10), but to inject the chemical substance downward than in a direction perpendicular to the central axis of the conduit part (P10). can For example, the plurality of injection nozzles n10 may be formed to form an inclination angle θ1 of 25 ° to 75 ° or an inclination angle θ1 of 30 ° to 60 ° with respect to the central axis of the conduit part P10.

The nozzle part N10 may have an inclined surface SL10 inclined with respect to the central axis of the conduit part P10 at its lower edge, and the inclined surface SL10 may have a shape surrounding the outer circumference of the conduit part P10. . The plurality of spray nozzles n10 may include a plurality of discharge ends h10 formed on the inclined surface SL10, and the plurality of discharge ends h10 may be spaced apart from each other along the circumferential direction of the inclined surface SL10. have. Accordingly, the plurality of discharge ends h10 may be arranged on the inclined surface SL10 in a form surrounding the conduit part P10. The chemical substance may be injected through the plurality of discharge ends h10. A discharge hole may be formed at the discharge end h10. 1A shows that the discharge end h10 slightly protrudes from the inclined surface SL10, but the discharge end h10 may not protrude from the inclined surface SL10. In this case, discharge holes corresponding to the plurality of discharge ends h10 may be formed on the inclined surface SL10.

According to an embodiment of the present invention, the inclined surface (SL10) has an inclination angle (θ2) of 25 ° to 75 °, preferably, an inclination angle (θ2) of 30 ° to 60 ° with respect to the central axis of the conduit part (P10) in the upward direction. can be formed to achieve When these conditions are satisfied, it may be easy to form the plurality of spray nozzles n10 with an inclination, and it may be easy to spray the chemical at an appropriate inclination angle. Accordingly, the characteristics of the circulation process and the mixing process can be improved.

The number of the plurality of injection nozzles n10 may be, for example, 6 to 12, but this is exemplary and may be variously changed.

Additionally, the head portion H10 may further include a gas inlet G10 for injecting gas for pressure adjustment between the inside and outside of the container into the container. Through the gas inlet G10, for example, nitrogen gas may be injected into the container. During the process, the pressure inside the container may be reduced and the shape of the container may be deformed. By injecting nitrogen gas or the like through the gas inlet G10, the pressure between the inside and outside of the container may be adjusted. Since the nitrogen gas is a kind of inert gas, it may not cause a problem of deteriorating or denaturing the chemical substances contained in the container. In addition to nitrogen gas, other inert gases may also be used.

In addition, connection passages CP10, CP20, and CP30 may be provided inside the head part H10. The first connection passage CP10 may serve to connect the outlet D10 and the suction flow path F10. The second connection passage CP20 may serve to connect the inlet C10 and the supply passage F20. The third connection passage CP30 may serve to connect the gas inlet G10 and the inside of the container. In some cases, the first to third connection passages CP10, CP20, and CP30 may have a type of connector pipe.

The adapter A10 and the head part H10 may be formed of, for example, polypropylene (PP) material. The conduit part P10 may be formed of, for example, a perfluoroalkoxy alkane (PFA) material. The nozzle unit N10 may be formed of, for example, a PP material or a PFA material. However, the above materials are exemplary and may be variously changed depending on the case.

A dispenser device for supplying chemicals according to an embodiment of the present invention may be a device for dispensing slurry in a circulation manner in a semiconductor process. Here, the slurry may correspond to the chemical substance. As a specific example, the slurry may include a ceria slurry, a tungsten slurry, and the like. However, the type of slurry presented here is only exemplary, and the present embodiment is not limited thereto. In addition, in some cases, it may be possible to apply other types of chemicals or fluids other than slurry as the chemical.

FIG. 2 is a cross-sectional view illustrating a flow (circulation process) of a fluid (chemical substance) in the dispenser device for supplying a chemical substance described with reference to FIGS. 1A and 1B .

Referring to FIG. 2, the chemicals (fluid) contained in the container may be suctioned through the suction passage F10 of the conduit part P10 and discharged to the outside of the dispenser device through the discharge port D10, and the discharged chemicals may be discharged to the outside of the dispenser device. After passing through the process of, it is injected into the dispenser device again through the injection port C10, passes through the supply passage F20 of the conduit part P10, and then sprayed into the container through a plurality of spray nozzles n10. Through this process, the circulation of chemicals (fluids) can be achieved.

In an embodiment of the present invention, discharge and injection of chemicals may be performed together using a single dispenser device. Accordingly, it is possible to effectively perform both suction and circulation operations with one integrated dispenser device. Since existing dispenser equipment uses two dispense heads mounted on one drum, there are problems in that head replacement time and number of processes increase, maintenance and management are not easy, and cost and maintenance/management costs increase. However, in the embodiment of the present invention, since the suction and circulation processes are performed using one dispenser device, the replacement time of the dispenser device (head) can be reduced and the number of dispenser device (head) replacement can be reduced. Cost/labor costs and maintenance/management costs can be greatly reduced. In addition, since the dispenser device according to the embodiment has a compact configuration, installation is easy and space utilization can be improved. In addition, when the dispenser device according to the embodiment is used, mixing characteristics of chemicals (drugs) in a container can be improved through spraying using a plurality of nozzles compared to the case of using a conventional 2-head device can In particular, in the embodiment of the present invention, in relation to the configuration and design of the conduit part P10 and the nozzle part N10, an effect of further improving the mixing characteristics of chemicals (drugs) can be obtained. Mixing characteristics of chemicals (drugs) can be further improved by the inclined surface SL10 of the nozzle unit N10, its design, and the inclined jet characteristics of the plurality of spray nozzles n10.

3A is a cross-sectional view showing a dispenser device for supplying chemicals according to another embodiment of the present invention. Figure 3b is a plan view of the dispenser device for supplying chemicals of Figure 3a viewed from above.

Referring to Figures 3a and 3b, the dispenser device for supplying chemicals according to this embodiment is an adapter (A11) coupled to a container (not shown) in which a chemical (fluid) is contained, coupled to the upper portion of the adapter (A11) It may include a head part H11, a conduit part P11 coupled with the head part H11 and extending under the adapter A11, and a nozzle part N11 installed at a predetermined position of the conduit part P11.

In this embodiment, the head part H11 may have a modified configuration from the head part H10 described with reference to FIGS. 1A and 1B. The head portion H11 may include an outlet D11, an inlet C11, and a gas inlet G11, and the outlet D11 may be disposed between the inlet C11 and the gas inlet G11. The outlet D11, the inlet C11, and the gas inlet G11 may all be disposed toward the upper surface of the head portion H11. The head part H11 has a first connection passage CP11 connected to the outlet D11, a second connection passage CP21 connected to the inlet C11, and a third connection passage CP31 connected to the gas inlet G11. ) may be included. Here, the second connection passage CP21 may have a structure bent at a right angle. In FIG. 1A, the second connection passage CP20 has a straight structure inclined with respect to a vertical line, whereas in FIG. 3A, the second connection passage CP21 may have a bent structure in which a vertical portion and a horizontal portion are connected.

In addition, in this embodiment, as shown in FIG. 3B, when viewed from above, the head portion H11 has a substantially hexagonal body portion H11a and an extension portion H11b extending from the body portion H11a to one side. , the discharge port D11 may be disposed at the center of the body portion H11a, and the inlet port C11 may be disposed at the expansion portion H11b. Therefore, in this case, the horizontal distance between the outlet D11 and the inlet C11 may be greater than the horizontal distance between the outlet D10 and the inlet C10 in the embodiment of FIG. 1B.

Meanwhile, configurations and features other than the head portion H11 in FIGS. 3A and 3B may be the same as or similar to those described with reference to FIGS. 1A and 1B. 3a and 3b, reference numeral S11 denotes a screw thread, F11 denotes a suction passage, F21 denotes a supply passage, NP11 denotes an inner tube of a double tube structure, TP11 denotes an exterior of a double tube structure, n11 denotes a plurality of injection nozzles, h11 denotes a discharge end, and SL11 denotes an inclined surface. Structures and features thereof may be the same as or similar to those described with reference to FIGS. 1A and 1B , and thus repeated descriptions are omitted.

Figure 4a is a cross-sectional view showing a dispenser device for supplying chemicals according to another embodiment of the present invention. Figure 4b is a plan view of the dispenser device for supplying chemicals of Figure 4a viewed from above.

Referring to FIGS. 4A and 4B, the dispenser device for supplying chemicals according to the present embodiment includes an adapter A12 coupled to a container (not shown) in which chemicals (fluids) are contained, and coupled to an upper portion of the adapter A12. It may include a head part H12, a conduit part P12 coupled with the head part H12 and extending below the adapter A12, and a nozzle part N12 installed at a predetermined position in the conduit part P12.

In this embodiment, the head part H12 may have a modified configuration from the head part H10 described with reference to FIGS. 1A and 1B. The head part H12 may include an outlet D12, an inlet C12, and a gas inlet G12, and the outlet D12 may be disposed between the inlet C12 and the gas inlet G12. The outlet (D12) and the gas inlet (G12) may be disposed on the upper surface (ie, toward the upper surface) of the head portion (H12), and the inlet (C12) is disposed on the side surface (ie, toward the side surface) of the head portion (H12). It can be. The head part H12 has a first connection passage CP12 connected to the outlet D12, a second connection passage CP22 connected to the inlet C12, and a third connection passage CP32 connected to the gas inlet G12. ) may be included. Here, the second connection passage CP22 may have a structure linearly extending in a horizontal direction (ie, a horizontal structure). In FIG. 1A, the second connection passage CP20 has a straight structure inclined with respect to a vertical line, whereas in FIG. 4A, the second connection passage CP22 may have a horizontal structure.

In addition, in this embodiment, as shown in FIG. 4B, when viewed from above, the head portion H12 may have a substantially hexagonal shape (a hexagonal shape with rounded corners), and the outlet D12 may have a head portion H12. ), and the injection port C12 may be disposed on one side of the head part H12. Accordingly, in this case, the head portion H12 may not include the extension portion (ie, H11b) as shown in FIG. 3B, and the head portion H12 may have a more compact structure. For convenience, fitting structures (ie, connector structures) of the outlet D12 and the inlet C12 are not shown in FIG. 4B.

Meanwhile, configurations and features other than the head portion H12 in FIGS. 4A and 4B may be the same as or similar to those described with reference to FIGS. 1A and 1B. 4a and 4b, reference numeral S12 denotes a screw thread, F12 denotes a suction passage, F22 denotes a supply passage, NP12 denotes an inner tube of a double tube structure, TP12 denotes an exterior of a double tube structure, n12 denotes a plurality of injection nozzles, h12 denotes a discharge end, and SL12 denotes an inclined surface. Structures and features thereof may be the same as or similar to those described with reference to FIGS. 1A and 1B , and thus repeated descriptions are omitted.

5 is a photographic image showing an adapter A1 that can be applied to a dispenser device for supplying chemicals according to an embodiment of the present invention. The adapter A1 may be referred to as a drum cap adapter. The adapter A1 may be manufactured to suit the type of container (drum), and may be manufactured to be easily identified according to the type of chemical substance (drug) used.

6 is a photographic image exemplarily showing a structure in which an adapter A1 and a head part H1 may be applied to a dispenser device for supplying chemicals according to an embodiment of the present invention. In FIG. 6 , reference numeral D1 denotes an outlet through which chemicals are discharged by suction, and reference numeral C1 denotes an inlet through which chemicals are recovered and injected.

7 is a photographic image showing a conduit part P1 that can be applied to a dispenser device for supplying chemicals according to an embodiment of the present invention and a nozzle part N1 installed in the conduit part P1. As described in FIGS. 1A and 1B , the conduit part P1 may have a double pipe structure, and the nozzle part N1 may include a plurality of spray nozzles.

8 is a schematic diagram for explaining a case in which the dispenser device 100 for supplying chemicals according to an embodiment of the present invention is applied to a container 200.

Referring to FIG. 8 , the dispenser device 100 for supplying chemicals according to the present embodiment may be used by being mounted on a container 200 . Here, the container 200 may be a kind of drum (drum), but in some cases, it may be a unit other than a drum. An adapter of the dispenser device 100 for chemical supply may be coupled to a fastening part provided on the upper surface of the container 200, and a portion below the adapter may be inserted into the container 200.

The dispenser device 100 for supplying chemicals may have the configuration and characteristics as described with reference to FIGS. 1A to 7 . Here, reference number D1 denotes an outlet through which chemicals are discharged by suction, C1 denotes an inlet through which chemicals are recovered and injected, P1 denotes a conduit, and N1 denotes a nozzle. Chemicals can be sucked up by suction from the lower end of the conduit part (P1) and discharged through the discharge port (D1), and after going through a predetermined process, the chemicals are injected again through the inlet (C1) and the nozzle part (N1) It can be injected (ejected) through a plurality of injection nozzles.

9 is a diagram for exemplarily explaining a chemical substance dispensing system to which the dispenser device 100 for chemical substance supply according to an embodiment of the present invention is applied.

Referring to FIG. 9 , a chemical dispensing system according to an embodiment of the present invention may include a dispenser device 100 for supplying chemicals, a container 200 containing chemicals, and process equipment 300. The dispenser device 100 may be used by being mounted on the container 200 . The chemical substance discharged through the outlet (D1 in FIG. 8) of the dispenser device 100 by suction passes through the piping/process section of the process equipment 300, and then enters the inlet (C1 in FIG. 8) of the dispenser device 100. It can be circulated to the container 200 through. As such, in the embodiment of the present invention, both discharge by suction and circulation by recovery can be performed using one dispenser device 100 .

10 is a diagram showing a chemical substance dispensing system according to a comparative example.

Referring to FIG. 10 , the chemical dispensing system according to the comparative example includes a first dispensing head 10 and a second dispensing head 20 mounted in different areas of a container 200, and It includes process equipment 300 connected to two dispensing heads 10 and 20. The first dispensing head 10 is a head for discharging chemicals, and the second dispensing head 20 is a head for recovering chemicals. After the chemicals are discharged through the first dispensing head 10 and pass through the piping/process part of the process equipment 300, they can be returned to the container 200 through the second dispensing head 20 and circulated.

Since the dispenser equipment according to the comparative example uses two dispensing heads 10 and 20 mounted on one container 200, the head replacement time and number of processes increase, maintenance and management are not easy, and cost And there is a problem that maintenance and management costs increase. In addition, when using a two-head (head) device such as the dispenser equipment according to the comparative example, it may be difficult to improve the mixing characteristics of the drug.

However, according to an embodiment of the present invention, discharge and injection of chemicals can be performed together using one dispenser device 100, and both suction and circulation operations can be effectively performed with one integrated dispenser device 100. can be done Therefore, the replacement time of the dispenser device (head) can be reduced, the number of replacement dispenser devices (head) can be reduced, and the cost/labor cost and maintenance/management cost can be greatly reduced. In addition, since the dispenser device according to the embodiment has a compact configuration, installation is easy and space utilization can be improved. In addition, when the dispenser device according to the embodiment is used, the mixing characteristics of chemicals (drugs) in the container can be improved through spraying using a plurality of nozzles compared to the case of using a 2-head device. . In particular, in the embodiment of the present invention, in relation to the configuration and design of the conduit part (ex, P10 in FIG. 1A) and the nozzle part (ex, N10 in FIG. 1A), the effect of further improving the mixing characteristics of chemicals (drugs) You can get it. The inclined surface (ex, SL10 in FIG. 1A) of the nozzle unit (ex, N10 in FIG. 1A) and its design and the inclined jet characteristics of the plurality of injection nozzles (ex, n10 in FIG. 1A), chemicals (drugs) The mixing characteristics of can be further improved.

11 illustrates how mixing and flow of chemicals in a container is performed when a dispenser device for supplying chemicals according to an embodiment of the present invention (ie, an integrated device according to an embodiment) is applied to circulate chemicals. This is a drawing showing the evaluated flow analysis results. At this time, as evaluation conditions (boundary conditions), the inlet (inlet) mass flow rate was 1 kg/s, and the outlet (outlet) environmental pressure was 405300 Pa.

12 is a flow analysis result evaluating how the mixing and flow of chemicals in a container is performed when a dispenser device for supplying chemicals (ie, a 2-head device) according to a comparative example is applied to circulate chemicals. It is a drawing showing At this time, as evaluation conditions (boundary conditions), the inlet (inlet) mass flow rate was 1 kg/s, and the outlet (outlet) environmental pressure was 405300 Pa.

Referring to FIGS. 11 and 12 , in the cross-sectional view of these drawings, a red portion represents a portion where the velocity of the fluid is high. That is, it means that the speed of the fluid increases as the color of the cross section becomes red. In the case of FIG. 11 to which the dispenser device for supplying chemicals according to the embodiment is applied, the red area is much wider than that of FIG. 12 to which the dispenser device for supplying chemicals according to the comparative example is applied. It can be seen that the yellow area is also widely distributed. have. That is, in the case of FIG. 11 to which the dispenser device for supplying chemicals according to the embodiment is applied, it can be seen that the flow of the fluid is more effectively (actively) generated by the spray nozzle and the overall mixing and stirring characteristics are greatly improved.

13 to 15 are views showing cases in which a dispenser device 150 for supplying chemicals according to another embodiment of the present invention is applied to a container 250. 13 is a complete perspective view, FIG. 14 is a perspective view showing the inside of the container 250 by cutting a part of the container 250 in FIG. 13, and FIG. 15 is a dispenser device 150 for supplying chemicals and the container 250 A cross-sectional view showing the cut-off surface of

13 to 15, the dispenser device 150 for supplying chemicals according to the present embodiment has a head part H20 and a conduit part P20 coupled to the head part H20 and led into the container 250 ), a chemical substance intake unit (CS20) installed in the first area of the conduit unit (P20) and a residue intake unit (PS20) installed in the second area located below the first area of the conduit unit (P20). .

The chemical intake unit CS20 may be a member for inhaling chemicals from the container 250 through a chemical intake passage. The residue suction unit PS20 may be a member for sucking in residue (precipitate) deposited or remaining on the bottom of the container 250 through the residue suction passage. The residue intake unit PS20 may be disposed below the chemical intake unit CS20. The residue suction unit PS20 may be installed at the lower end of the conduit unit P20 and may be disposed to contact the bottom surface (inner bottom surface) of the container 250. The chemical substance intake unit CS20 may be spaced apart from the residue intake unit PS20 at a predetermined interval and disposed at a higher position than the residue intake unit PS20. Accordingly, the distance between the chemical substance intake unit CS20 and the residue intake unit PS20 may be maintained constant.

An inlet portion 252 having a predetermined opening may be provided on the upper surface of the container 250, and a fastening portion 255 fastened to the inlet portion 252 may be provided. The inlet portion 252 may have a structure protruding upward of the container 250, and a screw thread may be formed on its outer circumferential surface. The fastening part 255 may have a structure similar to a kind of lid part or stopper part, and may have a through hole formed in the center thereof. Corresponding threads corresponding to the threads may be formed on the inner circumferential surface of the fastening portion 255 . The fastening part 255 may be fastened to the inlet part 252 by fastening the corresponding screw thread to the screw thread. In this state, the conduit part P20 of the dispenser device 150 may be inserted into the through hole of the fastening part 255 and introduced into the container 250 . The conduit part P20 may be lowered until the residue suction part PS20 contacts the bottom surface (inner bottom surface) of the container 250. The conduit portion P20 may have a sufficiently long length. The installation of the dispenser device 150 may be completed by bringing the residue suction unit PS20 into contact with the bottom surface of the container 250 .

Therefore, the dispenser device 150 according to the present embodiment can be compatible with various containers regardless of the standard (eg, depth) of the container 250 . Regardless of the size (eg, depth) of the vessel 250, the residue intake unit PS20 may contact the bottom surface of the vessel 250, and the chemical intake unit CS20 may contact the residue intake unit PS20. ) and may be disposed at a higher position than the residue suction unit (PS20) at a predetermined interval. A gap between the chemical substance intake unit CS20 and the residue intake unit PS20 may always be maintained constant.

According to this embodiment of the present invention, it can be used interchangeably for a plurality of containers (ex, drums) having different specifications, and at the same time, residue (sediment) remaining at the bottom of the container can be easily removed. A dispenser device 150 for supplying chemicals having a structure may be implemented. Therefore, when such a dispenser device 150 is used, maintenance and management burden and cost can be lowered, and additional costs due to residue (sediment) in the container can be prevented.

The specific configuration of the inlet part 252 and the fastening part 255 of the container 250 shown in FIG. 15 may be variously changed. In addition, although not shown, a sealing member for maintaining airtightness with the dispenser device 150 may be further provided on an inner surface of the through hole of the fastening part 255 .

16 is a cross-sectional view illustratively showing configurations of a head part H20 and a conduit part P20 of a dispenser device for supplying chemicals according to another embodiment of the present invention. FIG. 16 may be an enlarged cross-sectional view of the configuration of the head portion H20 and a portion adjacent thereto in FIG. 15 .

Referring to FIG. 16, the head part H20 has a main discharge port D21 for suctioning and discharging the chemicals contained in the container 250 and the bottom of the container 250 from the chemicals inside the container 250. A residue outlet (PD20) may be included to suction and remove residue (precipitate) left in the unit. Here, the main outlet D21 may be a first main outlet D21, and the head part H20 may further include a second main outlet D22 spaced apart from the first main outlet D21. The second main outlet D22 may also be an outlet for suctioning and discharging the chemicals contained in the container 250 . When both the first and second main outlets D21 and D22 are provided, the D21 and D22 may be connected to different process equipment. Either one of the first and second main outlets D21 and D22 may not be provided.

A conduit part P20 coupled to the head part H20 and introduced into the container 250 may be provided. The conduit part P20 may be configured to provide a first flow path FP1 and a second flow path FP2 separated from the first flow path FP1. Here, the first flow path FP1 may be connected to the first main outlet D21 and the second flow path FP2 may be connected to the residue outlet PD20. When both the first and second main outlets D21 and D22 are provided, the first and second main outlets D21 and D22 may be connected to the first flow path FP1 in common.

As a more specific example, the conduit part P20 may have a multi-pipe structure including an inner pipe NP20 and an outer pipe TP20 surrounding at least a portion of the inner pipe NP20. In this case, the first flow path FP1 may be formed between the inner tube NP20 and the outer tube TP20, and the second flow path FP2 may be formed inside the inner tube NP20. In other words, the space between the inner tube NP20 and the outer tube TP20 may be the first flow path FP1, and the hollow portion of the inner tube NP20 may be the second flow path FP2.

In the head part H20, the residue outlet PD20 may be disposed above the first and second main outlets D21 and D22. In this case, connection (communication) between the residue outlet PD20 and the second flow path FP2 may be advantageous. The residue outlet PD20 and the first and second main outlets D21 and D22 may be formed on the side of the head portion H20. However, the formation positions of the residue outlet PD20 and the first and second main outlets D21 and D22 are not limited to those shown and may be variously changed. For example, the residue outlet PD20 may be disposed on the top surface of the head part H20 instead of the side surface.

In addition, according to one embodiment, the head portion H20 may further include a gas inlet G20 for injecting gas for adjusting pressure between the inside and outside of the container 250 into the container 250. . The gas injected through the gas inlet G20 may be, for example, air. Accordingly, the gas inlet G20 may be an air inlet. An outer tube portion AP20 surrounding (surrounding) a portion of the conduit portion P20 may be further provided, and a portion of the outer tube portion AP20 may be introduced into the container 250 together with the conduit portion P20. A third flow path FP3 may be provided between the conduit part P20 and the outer tube part AP20, and the gas for adjusting the pressure may be injected into the vessel 250 through the third flow path FP3. Therefore, the gas inlet G20 may be connected (communicated) with the third flow path FP3. The outer tube portion AP20 may be regarded as a component included in the conduit portion P20. In other words, the conduit portion P20 may be considered to include an inner tube portion NP20, an outer tube portion TP20, and an outer tube portion AP20. The head part H20 may be coupled while maintaining proper airtightness with the conduit part P20 and the outer pipe part AP20.

17 is a cross-sectional view exemplarily showing configurations of a conduit part P20, a chemical material intake part CS20, and a residue intake part PS20 of a dispenser device for supplying chemicals according to another embodiment of the present invention. FIG. 17 may be an enlarged cross-sectional view of the chemical substance intake unit CS20 and the residue intake unit PS20 and their surrounding components in FIG. 15 .

Referring to FIG. 17 , the conduit part P20 may have a multi-pipe structure including an inner pipe NP20 and an outer pipe TP20 surrounding at least a portion of the inner pipe NP20. The first flow path FP1 may be formed between the inner tube NP20 and the outer tube TP20, and the second flow path FP2 may be formed inside the inner tube NP20.

The chemical intake unit CS20 may be installed in the first area of the conduit unit P20. The chemical intake unit CS20 may include a chemical intake passage CH20 connected to the first flow path FP1. The chemical intake unit CS20 may be a member for inhaling chemicals from the inside of the container 250 through the chemical intake passage CH20. Chemicals sucked in by the chemical intake unit CS20 may be discharged through the first flow path FP1 to the main outlets (D21 and D22 in FIG. 15 ) of the head unit (H20 in FIG. 15 ). The chemicals discharged through the main outlets (D21 and D22 in FIG. 15) may be, for example, a slurry, and may be usefully used in a semiconductor process.

The residue suction unit PS20 may be installed in a second area located below the first area of the conduit part P20. The residue suction unit PS20 may include a residue suction passage PH20 connected to the second flow path FP2. The residue suction unit PS20 may be a member for sucking in residue (sediment) deposited or remaining on the bottom of the container 250 through the residue suction passage PH20. The residue (precipitate) sucked in from the residue suction unit PS20 may be discharged to the residue outlet (PD20 in FIG. 15) of the head unit (H20 in FIG. 15) through the second flow path FP2. The residue (sediment) discharged to the residue outlet (PD20 in Fig. 15) may be waste and may be disposed of in an appropriate manner. In the conventional case, since a separate wastewater treatment device must be used to dilute the residue (precipitate) remaining in the drum with water and dispose of it in a prescribed manner, a problem of greatly increasing treatment cost has occurred. However, when the dispenser device according to the embodiment of the present invention is used, since the residue (precipitate) remaining in the drum can be very easily removed and treated, cost reduction and environmental problem improvement effects can be obtained. have.

A lower end of the first flow path FP1 may be disposed at a higher position than a lower end of the second flow path FP2 . The residue suction unit PS20 may be installed at the lower end of the conduit part P20 corresponding to the lower end of the second flow path FP2. The residue inlet (PS20) may be installed to surround the lower end of the inner tube (NP20) from the side and bottom. The chemical intake unit CS20 may be installed at the lower end of the first flow path FP1 disposed at a higher position than the residue intake unit PS20. The chemical intake unit CS20 may be installed to surround the lower end of the exterior tube TP20 and a portion of the inner tube NP20 adjacent thereto.

According to one embodiment, the height difference (HT1) between the chemical intake passage (CH20) formed in the chemical intake unit (CS20) and the residue intake passage (PH20) formed on the residue intake unit (PS20) is, for example, , it may be desirable to be on the order of about 50 to 150 mm. The height difference HT1 may be a height difference between the center of the end (end portion) of the chemical substance intake passage (CH20) and the center of the end (end portion) of the residue intake passage (PH20). When the height difference HT1 is about 50 to 150 mm, discharge of chemicals and discharge of residues (precipitates) can be performed more easily and appropriately. However, the range of the above height difference HT1 may vary depending on disposal regulations and use environments.

According to one embodiment, the chemical intake unit CS20 may include a plurality of chemical intake passages CH20. A plurality of chemical intake passages CH20 may be arranged around the conduit part P20. In addition, the chemical intake passage CH20 may have a structure inclined to form an acute angle from the bottom with respect to the central axis of the conduit part P20. For example, an angle θ3 formed by the central axis of the chemical intake passage CH20 in a downward direction with respect to the central axis of the conduit part P20 may be about 0 to 90°. When these conditions are satisfied, the chemical substance can be more smoothly absorbed through the chemical substance suction passage CH20. However, the specific structure of the chemical intake unit CS20 is not limited to the above and may be changed according to circumstances.

According to one embodiment, the residue suction unit PS20 may include a plurality of residue suction passages PH20. A plurality of residue intake passages PH20 may be arranged to communicate with each other below the lower end of the inner tube NP20. The plurality of residue suction passages PH20 may be arranged in a circular shape to form a radial shape from the center of the residue suction part PS20 to the outside. The residue suction passage PH20 may have a structure perpendicular to the central axis of the conduit part P20, for example. In other words, the residue suction passage PH20 may have a horizontal shape with respect to the bottom surface of the container 250. In addition, the residue suction part (PS20) may be disposed to contact the bottom surface of the container 250, and the height difference between the lower surface of the residue suction part (PS20) and the residue suction passage (PH20) may be several mm. have. In this case, the residue can be easily sucked through the residue suction passage PH20. However, the specific structure of the residue suction unit PS20 is not limited to the above and may be changed depending on the case.

After inhaling and recovering the effective chemical substances in the container 250 through the chemical substance suction part CS20, the residue (precipitate) present at the bottom of the container 250 is sucked through the residue suction part PS20. can be removed by

18 is a cross-sectional view showing an enlarged structure of a chemical substance suction unit CS20 of a dispenser device for supplying chemical substances according to another embodiment of the present invention.

Referring to FIG. 18 , the chemical intake unit CS20 may be installed in the first area of the conduit unit P20. The chemical intake unit CS20 may be installed at the lower end of the first flow path FP1. The chemical intake unit CS20 may be installed to surround the lower end of the exterior tube TP20 and a portion of the inner tube NP20 adjacent thereto. The chemical intake unit CS20 may include a chemical intake passage CH20 connected to the first flow path FP1. The chemical intake unit CS20 may include a plurality of chemical intake passages CH20. The chemical intake passage CH20 may have a structure inclined to form an acute angle from the bottom with respect to the central axis of the conduit part P20. For example, an angle θ3 formed by the central axis of the chemical intake passage CH20 in a downward direction with respect to the central axis of the conduit part P20 may be about 0 to 90°.

19 is a cross-sectional view showing an enlarged structure of a residue suction unit PS20 of a dispenser device for supplying chemicals according to another embodiment of the present invention.

Referring to FIG. 19 , the residue intake unit PS20 may be installed in the second region of the conduit unit P20. The residue suction unit PS20 may be installed at the lower end of the conduit part P20 corresponding to the lower end of the second flow path FP2. The residue inlet (PS20) may be installed to surround the lower end of the inner tube (NP20) from the side and bottom. The residue suction unit PS20 may include a residue suction passage PH20 connected to the second flow path FP2. The residue suction unit PS20 may include a plurality of residue suction passages PH20. A plurality of residue intake passages PH20 may be arranged to communicate with each other below the lower end of the inner tube NP20. The residue suction passage PH20 may have a structure perpendicular to the central axis of the conduit part P20, for example. In other words, the residue suction passage PH20 may have a horizontal shape with respect to the bottom surface of the container 250. In addition, the residue suction part (PS20) may be disposed to contact the bottom surface of the container 250, and the height difference between the lower surface of the residue suction part (PS20) and the residue suction passage (PH20) may be several mm. have.

However, specific structures of the chemical substance intake unit CS20 and the residue intake unit PS20 described with reference to FIGS. 18 and 19 may vary depending on circumstances.

In addition, according to an embodiment of the present invention, a chemical substance dispensing system to which the dispenser device for supplying chemicals described with reference to FIGS. 13 to 19 may be applied. Since the basic configuration of the chemical dispensing system may be the same as or similar to that described with reference to FIG. 9 , a repeated description thereof will be omitted.

Additionally, the dispenser device for supplying chemicals according to the embodiment of the present invention described with reference to FIG. 16 is sealed to maintain confidentiality between the dispenser device 150 on the inner surface of the through hole of the fastening part 255 (Sealing) may further include a member.

FIG. 20 is an enlarged cross-sectional view of the fastening portion 255 and its surrounding area in FIG. 16 .

Referring to FIG. 20 , a dust seal member 257 for maintaining airtightness with the dispenser device 150 may be further provided on an inner surface of the through hole of the fastening part 255 . The dust seal member 257 may be a type of rubber packing and may have a ring shape. The dust seal member 257 seals the connection between the fastening part 255 and the dispenser device 150 so that foreign substances cannot enter the container 250 and prevent the solution from evaporating from the container 250 It can be. In addition, despite the presence of a dust seal member 257, due to the weight of the head portion (H20 in FIG. 16), even if the size of the container 250 is changed, the residue intake portion (PS20 in FIG. 15) can surely reach the bottom of the container 250. Since the residue suction unit (PS20 in FIG. 15) is disposed to contact the bottom of the vessel 250, the chemical intake unit (CS20 in FIG. 15) is always placed on the bottom of the vessel 250 regardless of the size of the vessel 250. It may be arranged spaced apart by a certain height from. In other words, since the residue intake (PS20 in FIG. 15) is disposed to contact the bottom of the container 250, the chemical intake passage (CH20 in FIG. 17) is always connected to the container 250 regardless of the size of the container 250. ) It may be arranged spaced upward by a certain height from the bottom of the.

As described above with reference to FIGS. 13 to 20, according to the embodiments of the present invention, it can be used interchangeably with a plurality of containers (ex, drums) having different specifications, and in addition, the bottom of the container A dispenser device for supplying chemicals having a structure capable of easily removing residual residue (precipitate) can be implemented. When the dispenser device according to these embodiments is used, maintenance and management burden and cost can be lowered, additional costs due to residue (sediment) in the container can be prevented, and excellent drug supply characteristics can be secured. have. The residue (sediment) may cause environmental problems, and if the drum containing the sediment is discarded as it is, a fine may be imposed. In the conventional case, since a separate wastewater treatment device must be used to dilute the residue (precipitate) remaining in the drum with water and dispose of it in a prescribed manner, a problem in that treatment cost greatly increases. However, when the dispenser device according to the embodiment of the present invention is used, since the residue (precipitate) remaining in the drum can be very easily removed and treated, cost reduction and environmental problem improvement effects can be obtained. have.

In this specification, preferred embodiments of the present invention have been disclosed, and although specific terms have been used, they are only used in a general sense to easily explain the technical details of the present invention and help understanding of the present invention, and do not limit the scope of the present invention. It is not meant to be limiting. It is obvious to those skilled in the art that other modifications based on the technical idea of the present invention can be implemented in addition to the embodiments disclosed herein. For example, for those skilled in the art, the dispenser device for supplying chemicals according to the embodiments described with reference to FIGS. 1 to 20 and the chemical dispensing system using the same can be modified in various ways. will be able to know As a specific example, in the embodiments described in FIGS. 13 to 19, the lower end of the inner tube NP20 itself may be used as a 'residue suction unit', and in this case, the lower end of the inner tube NP20 is suitable for suctioning residues. can be designed as Even in this case, it can be said that the residue suction unit is installed at the lower end of the conduit part P20 or the lower end of the inner tube NP20. In addition, the dispenser device for supplying chemicals according to embodiments may be modified in various ways. Therefore, the scope of the invention should not be determined by the described embodiments, but by the technical idea described in the claims.

Claims (15)

A head portion including a main discharge port for suctioning and discharging the chemical substances contained in the container and a residue outlet for suctioning and removing residues precipitated or remaining on the bottom of the container from the chemical substances inside the container. ;
It is coupled to the head and introduced into the container, has a first flow path and a second flow path separated from the first flow path, the first flow path is connected to the main outlet, and the second flow path is a conduit part connected to the residue outlet;
a chemical intake unit installed in the first region of the conduit unit, having a chemical intake passage connected to the first passage, and inhaling the chemical from the container through the chemical intake passage; and
a residue suction unit installed in a second region lower than the first region of the conduit, having a residue suction passage connected to the second flow path, and sucking the residue through the residue suction passage; including,
Dispenser device for supplying chemicals. According to claim 1,
The conduit unit has a multi-tube structure including an inner tube and an exterior surrounding the inner tube,
The first flow path is formed between the inner tube and the exterior, and the second flow path is formed inside the inner tube. According to claim 1,
The lower end of the first flow path is a dispenser device for supplying chemicals disposed at a higher position than the lower end of the second flow path. According to claim 1,
The residue suction unit is installed at the lower end of the conduit part corresponding to the lower end of the second flow path,
The dispenser device for supplying chemicals, wherein the chemical intake unit is installed at a lower end of the first flow path disposed at a higher position than the residue intake unit. According to claim 1,
A dispenser device for supplying chemicals wherein the height difference between the chemical inhalation passage and the residue inhalation passage is 50 to 150 mm. According to claim 1,
The dispenser device for supplying chemicals, wherein the residue suction unit is disposed to contact the bottom surface of the container. According to claim 1,
The chemical intake unit includes a plurality of chemical intake passages,
The chemical substance intake passage has a dispenser device for supplying chemicals having an inclined structure so as to form an acute angle from the bottom with respect to the central axis of the conduit. According to claim 1,
The residue suction unit includes a plurality of residue suction passages,
The residue suction passage has a dispenser device for supplying chemicals having a structure perpendicular to the central axis of the conduit. According to claim 1,
In the head portion, the residue outlet is a dispenser device for supplying chemicals disposed above the main outlet. According to claim 1,
The main outlet is a first main outlet, and the head further includes a second main outlet spaced apart from the first main outlet, wherein the first and second main outlets are connected to the first flow path in common to supply chemicals. for the dispenser device. According to claim 1,
The head unit further comprises a gas inlet for injecting gas for adjusting pressure between the inside and outside of the container into the container. According to claim 11,
Further comprising an outer tube portion surrounding a portion of the conduit portion, and a portion of the outer tube portion is drawn into the container together with the conduit portion,
A dispenser device for supplying chemicals wherein a third flow path is provided between the conduit part and the outer tube part, and the gas for adjusting the pressure is injected into the container through the third flow path. According to claim 1,
The conduit part is inserted into the through hole formed in the container,
The dispenser device for supplying the chemical substance further comprises a dust seal member for maintaining airtightness between the conduit part and the through hole. According to claim 13,
The conduit portion inserted into the through hole of the container and contacting the dust seal member moves toward the bottom of the container by gravity,
Regardless of the size of the container, the residue suction part is disposed to contact the bottom of the container, and the chemical substance suction part is disposed apart from the bottom of the container by a predetermined height. A chemical substance dispensing system to which the dispenser device for supplying a chemical substance according to any one of claims 1 to 14 is applied.

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