KR102459876B1 - 적층 렌즈 구조체 및 그 제조 방법, 및 전자기기 - Google Patents
적층 렌즈 구조체 및 그 제조 방법, 및 전자기기 Download PDFInfo
- Publication number
- KR102459876B1 KR102459876B1 KR1020197021360A KR20197021360A KR102459876B1 KR 102459876 B1 KR102459876 B1 KR 102459876B1 KR 1020197021360 A KR1020197021360 A KR 1020197021360A KR 20197021360 A KR20197021360 A KR 20197021360A KR 102459876 B1 KR102459876 B1 KR 102459876B1
- Authority
- KR
- South Korea
- Prior art keywords
- lens
- substrate
- laminated
- hole
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 91
- 239000000758 substrate Substances 0.000 claims abstract description 1188
- 230000000149 penetrating effect Effects 0.000 claims abstract description 16
- 229920005989 resin Polymers 0.000 claims description 336
- 239000011347 resin Substances 0.000 claims description 336
- 238000000034 method Methods 0.000 claims description 128
- 239000000463 material Substances 0.000 claims description 41
- 238000010030 laminating Methods 0.000 claims description 13
- 150000004767 nitrides Chemical class 0.000 claims description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 238000011049 filling Methods 0.000 claims description 5
- 238000005516 engineering process Methods 0.000 abstract description 58
- 239000010410 layer Substances 0.000 description 165
- 238000003384 imaging method Methods 0.000 description 104
- 230000003287 optical effect Effects 0.000 description 83
- 238000005530 etching Methods 0.000 description 73
- 230000000052 comparative effect Effects 0.000 description 71
- 239000002344 surface layer Substances 0.000 description 59
- 230000000694 effects Effects 0.000 description 52
- 230000008569 process Effects 0.000 description 49
- 238000012545 processing Methods 0.000 description 49
- 238000010586 diagram Methods 0.000 description 45
- 230000009471 action Effects 0.000 description 42
- 238000004891 communication Methods 0.000 description 26
- 238000001514 detection method Methods 0.000 description 21
- 238000001312 dry etching Methods 0.000 description 16
- 239000002775 capsule Substances 0.000 description 15
- 230000006870 function Effects 0.000 description 15
- 230000001681 protective effect Effects 0.000 description 12
- 238000012546 transfer Methods 0.000 description 12
- 230000008093 supporting effect Effects 0.000 description 11
- 230000000903 blocking effect Effects 0.000 description 10
- 239000007789 gas Substances 0.000 description 10
- 230000004048 modification Effects 0.000 description 10
- 238000012986 modification Methods 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000003475 lamination Methods 0.000 description 9
- 230000002829 reductive effect Effects 0.000 description 9
- 210000001519 tissue Anatomy 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 8
- 230000008859 change Effects 0.000 description 8
- 239000013078 crystal Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000005452 bending Methods 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 7
- 239000011810 insulating material Substances 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- 238000009833 condensation Methods 0.000 description 6
- 230000005494 condensation Effects 0.000 description 6
- 230000008602 contraction Effects 0.000 description 6
- 230000018044 dehydration Effects 0.000 description 6
- 238000006297 dehydration reaction Methods 0.000 description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 238000002674 endoscopic surgery Methods 0.000 description 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 5
- 230000006872 improvement Effects 0.000 description 5
- 230000001678 irradiating effect Effects 0.000 description 5
- 230000031700 light absorption Effects 0.000 description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 5
- 238000000678 plasma activation Methods 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 230000011218 segmentation Effects 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- OBNDGIHQAIXEAO-UHFFFAOYSA-N [O].[Si] Chemical compound [O].[Si] OBNDGIHQAIXEAO-UHFFFAOYSA-N 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 238000010336 energy treatment Methods 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 230000001976 improved effect Effects 0.000 description 3
- 230000002401 inhibitory effect Effects 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 238000001356 surgical procedure Methods 0.000 description 3
- 239000011800 void material Substances 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 210000004204 blood vessel Anatomy 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- MOFVSTNWEDAEEK-UHFFFAOYSA-M indocyanine green Chemical compound [Na+].[O-]S(=O)(=O)CCCCN1C2=CC=C3C=CC=CC3=C2C(C)(C)C1=CC=CC=CC=CC1=[N+](CCCCS([O-])(=O)=O)C2=CC=C(C=CC=C3)C3=C2C1(C)C MOFVSTNWEDAEEK-UHFFFAOYSA-M 0.000 description 2
- 229960004657 indocyanine green Drugs 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 230000005499 meniscus Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 241000282472 Canis lupus familiaris Species 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 206010037660 Pyrexia Diseases 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910020177 SiOF Inorganic materials 0.000 description 1
- 208000004350 Strabismus Diseases 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 238000001994 activation Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- 125000005037 alkyl phenyl group Chemical group 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 210000000988 bone and bone Anatomy 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 238000002073 fluorescence micrograph Methods 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 230000004313 glare Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 210000000936 intestine Anatomy 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 210000004379 membrane Anatomy 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 239000006082 mold release agent Substances 0.000 description 1
- 210000004400 mucous membrane Anatomy 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000013041 optical simulation Methods 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002572 peristaltic effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- -1 polyoxyethylene Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/0062—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between
- G02B3/0068—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between arranged in a single integral body or plate, e.g. laminates or hybrid structures with other optical elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00365—Production of microlenses
- B29D11/00375—Production of microlenses by moulding lenses in holes through a substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00278—Lenticular sheets
- B29D11/00307—Producing lens wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00403—Producing compound lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2701/00—Use of unspecified macromolecular compounds for preformed parts, e.g. for inserts
- B29K2701/12—Thermoplastic materials
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Ophthalmology & Optometry (AREA)
- Mechanical Engineering (AREA)
- Lens Barrels (AREA)
- Studio Devices (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017011991 | 2017-01-26 | ||
| JPJP-P-2017-011991 | 2017-01-26 | ||
| JP2017069805A JP6987518B2 (ja) | 2017-01-26 | 2017-03-31 | 積層レンズ構造体およびその製造方法、並びに電子機器 |
| JPJP-P-2017-069805 | 2017-03-31 | ||
| PCT/JP2018/000934 WO2018139253A1 (en) | 2017-01-26 | 2018-01-16 | Laminated lens structure and method of manufacturing the same, and electronic apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20190105596A KR20190105596A (ko) | 2019-09-17 |
| KR102459876B1 true KR102459876B1 (ko) | 2022-10-26 |
Family
ID=63044369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020197021360A Active KR102459876B1 (ko) | 2017-01-26 | 2018-01-16 | 적층 렌즈 구조체 및 그 제조 방법, 및 전자기기 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US11454746B2 (enExample) |
| JP (1) | JP6987518B2 (enExample) |
| KR (1) | KR102459876B1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102212229B1 (ko) * | 2018-11-07 | 2021-02-05 | 삼성전자주식회사 | 이동체에 포함된 카메라 시스템 및 그 제어방법. |
| JP2023505183A (ja) * | 2019-12-06 | 2023-02-08 | スリーエム イノベイティブ プロパティズ カンパニー | 光学層及び光学システム |
| WO2023007652A1 (ja) * | 2021-07-29 | 2023-02-02 | オリンパス株式会社 | レンズユニット、撮像装置、内視鏡、および、レンズユニットの製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100718421B1 (ko) * | 2002-06-28 | 2007-05-14 | 교세라 가부시키가이샤 | 소형 모듈 카메라, 카메라 모듈, 카메라 모듈 제조 방법 및 촬상 소자의 패키징 방법 |
| JP2013511155A (ja) * | 2009-11-17 | 2013-03-28 | クリー インコーポレイテッド | クラックストップを備えたデバイス |
| KR101503027B1 (ko) * | 2010-11-19 | 2015-03-18 | 한국전자통신연구원 | 웨이퍼 접합방법 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1096742A (ja) * | 1995-10-09 | 1998-04-14 | Matsushita Electric Ind Co Ltd | 加速度センサ及びその製造方法、並びに加速度センサを利用した衝撃検知機器 |
| US8013289B2 (en) | 2006-11-15 | 2011-09-06 | Ether Precision, Inc. | Lens array block for image capturing unit and methods of fabrication |
| JP2008197282A (ja) | 2007-02-09 | 2008-08-28 | Sharp Corp | プラスチックレンズユニット、カメラモジュール、及びこれらの製造方法 |
| TWI462821B (zh) | 2008-01-08 | 2014-12-01 | Lg伊諾特股份有限公司 | 鏡片單元,鏡片組件,攝像模組,攝像模組和鏡片組件的製造方法,光學元件的製造方法,和製作光學元件的裝置 |
| KR100969987B1 (ko) * | 2008-01-10 | 2010-07-15 | 연세대학교 산학협력단 | 광학패키지 웨이퍼스케일 어레이 및 그 제조방법 |
| JP4471004B2 (ja) | 2008-01-23 | 2010-06-02 | セイコーエプソン株式会社 | 接合体の形成方法 |
| US8384812B2 (en) | 2008-04-03 | 2013-02-26 | Konica Minolta Holdings, Inc. | Imaging device formed by lamination of a plurality of layers |
| JP2009279790A (ja) | 2008-05-20 | 2009-12-03 | Sharp Corp | レンズ及びその製造方法、並びに、レンズアレイ、カメラモジュール及びその製造方法、電子機器 |
| JP5047243B2 (ja) | 2008-09-26 | 2012-10-10 | シャープ株式会社 | 光学素子ウエハモジュール、光学素子モジュール、光学素子モジュールの製造方法、電子素子ウエハモジュール、電子素子モジュールの製造方法、電子素子モジュールおよび電子情報機器 |
| JP2010102046A (ja) | 2008-10-22 | 2010-05-06 | Seiko Epson Corp | 光学素子および光学素子の製造方法 |
| JP2013015545A (ja) * | 2009-10-27 | 2013-01-24 | Sanyo Electric Co Ltd | レンズモジュール、撮影装置、レンズモジュールの製造方法 |
| JP2011138089A (ja) | 2010-01-04 | 2011-07-14 | Fujifilm Corp | ウェハレベルレンズアレイ、レンズモジュール及び撮像ユニット |
| JP2011180292A (ja) | 2010-02-26 | 2011-09-15 | Fujifilm Corp | レンズアレイ |
| EP3460538B1 (de) | 2010-03-31 | 2021-03-03 | EV Group GmbH | Verfahren und vorrichtung zur herstellung einer mikrolinse |
| US8194335B2 (en) | 2010-04-13 | 2012-06-05 | Himax Technologies Limited | Optical lens on wafer level and related method for forming the optical lens one wafer level |
| JP5501918B2 (ja) | 2010-09-30 | 2014-05-28 | 株式会社トプコン | 光学素子の製造方法およびその方法により作製された光学素子 |
| US9029242B2 (en) | 2011-06-15 | 2015-05-12 | Applied Materials, Inc. | Damage isolation by shaped beam delivery in laser scribing process |
| JP2013003542A (ja) | 2011-06-21 | 2013-01-07 | Konica Minolta Advanced Layers Inc | 光学素子集合体、光学素子、光学素子集合体の製造方法、及び、光学素子の製造方法 |
| JP5568599B2 (ja) | 2011-06-30 | 2014-08-06 | エルジー イノテック カンパニー リミテッド | レンズユニット、その製造方法、及びこれを含むカメラモジュール |
| JP6244616B2 (ja) | 2012-08-30 | 2017-12-13 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光学モジュール、電子機器、および波長可変干渉フィルターの製造方法 |
| KR102245808B1 (ko) | 2014-02-12 | 2021-04-30 | 삼성디스플레이 주식회사 | 롤러블 표시 장치 |
| JP6967830B2 (ja) | 2015-07-31 | 2021-11-17 | ソニーセミコンダクタソリューションズ株式会社 | 半導体装置、レンズモジュール及びその製造方法、並びに、電子機器 |
-
2017
- 2017-03-31 JP JP2017069805A patent/JP6987518B2/ja active Active
-
2018
- 2018-01-16 KR KR1020197021360A patent/KR102459876B1/ko active Active
- 2018-01-16 US US16/478,021 patent/US11454746B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100718421B1 (ko) * | 2002-06-28 | 2007-05-14 | 교세라 가부시키가이샤 | 소형 모듈 카메라, 카메라 모듈, 카메라 모듈 제조 방법 및 촬상 소자의 패키징 방법 |
| JP2013511155A (ja) * | 2009-11-17 | 2013-03-28 | クリー インコーポレイテッド | クラックストップを備えたデバイス |
| KR101503027B1 (ko) * | 2010-11-19 | 2015-03-18 | 한국전자통신연구원 | 웨이퍼 접합방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2018120197A (ja) | 2018-08-02 |
| JP6987518B2 (ja) | 2022-01-05 |
| KR20190105596A (ko) | 2019-09-17 |
| US11454746B2 (en) | 2022-09-27 |
| US20190369299A1 (en) | 2019-12-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11134184B2 (en) | Camera module, method of producing the same, and electronic device | |
| KR102511467B1 (ko) | 카메라 모듈 및 그 제조 방법, 및 전자기기 | |
| JP6878018B2 (ja) | Afモジュール、カメラモジュール、および、電子機器 | |
| CN110431460B (zh) | 层叠透镜结构、层叠透镜结构的制造方法和电子设备 | |
| CN110431666A (zh) | 相机模块及其制造方法以及电子装置 | |
| KR102508561B1 (ko) | 적층 렌즈 구조체, 카메라 모듈, 및, 전자 기기 | |
| JP2019045651A (ja) | 積層レンズ構造体、固体撮像素子、および、電子機器 | |
| TWI741108B (zh) | 透鏡模組,生產透鏡模組之方法,成像裝置及電子裝置 | |
| US20200004039A1 (en) | Camera module, method of manufacturing the same, and electronic apparatus | |
| WO2019044538A1 (ja) | 積層レンズ構造体およびその製造方法、並びに、電子機器 | |
| WO2019065294A1 (ja) | 撮像素子、撮像素子の製造方法、および、電子機器 | |
| WO2019065293A1 (ja) | 撮像素子、撮像素子の製造方法、および、電子機器 | |
| KR102459876B1 (ko) | 적층 렌즈 구조체 및 그 제조 방법, 및 전자기기 | |
| WO2019193965A1 (ja) | 積層レンズ構造体およびその製造方法、並びに、電子機器 | |
| CN110087870B (zh) | 层叠透镜结构、其制造方法和电子设备 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20190719 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20201216 Comment text: Request for Examination of Application |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20220216 Patent event code: PE09021S01D |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20220805 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20221024 Patent event code: PR07011E01D |
|
| PR1002 | Payment of registration fee |
Payment date: 20221024 End annual number: 3 Start annual number: 1 |
|
| PG1601 | Publication of registration |