KR102452347B1 - Induction Heater - Google Patents

Abstract

The present invention relates to an induction heater capable of maintaining a gas bottle of a gas cabinet used in a semiconductor process at a constant temperature as an explosion proof type product. The induction heater comprises: a heater housing; a polycarbonate plate; an SUS heat plate; an induction coil; and an aluminum diffusion plate. The polycarbonate plate is bent in an arc shape corresponding to a shape of the gas bottle of the gas cabinet used in the semiconductor process as the explosion proof type product and is installed in a front end of the heater housing. The SUS heat plate is bent in the arc shape corresponding to a shape of the polycarbonate plate, is installed in a front end of the polycarbonate plate, and generates heat by using eddy current through a magnetic field. The induction coil is installed along the polycarbonate plate, and generates the magnetic field for generating the eddy current of the SUS heat plate by receiving electricity. The aluminum diffusion plate is bent in the arc shape corresponding to a shape of the SUS heat plate, is installed in a front end of the SUS heat plate, and emits heat to a direction of the gas bottle separated from a front side by receiving the heat from the heated induction coil.

Description

Induction Heater

The present invention relates to an induction heater, and more particularly, to an induction heater implemented to maintain a gas bottle of a gas cabinet used in a semiconductor process at a constant temperature as an explosion-proof product.

In general, a semiconductor manufacturing process such as etching or deposition (CVD) uses a process gas necessary for the process. For example, NH3 gas is used for the deposition process, and CL2 gas is used for the etching process. gas is used. The process gas is supplied to a semiconductor process chamber in which an etching process or a deposition process is performed through a gas transfer line connected to an outlet of the gas bottle in a state inside a container called a separate gas bottle.

However, the above-described process gas is often leaked to the outside through the connection portion between the outlet of the gas bottle and the gas transfer line. Since the leaked gas contains many components harmful to the human body, the gas is prevented from being diffused into the semiconductor factory. It is common to place the bottles inside separate cabinets.

Since the existing induction vortex does not directly transmit to the gas bottle, it has the advantage of not damaging the gas bottle, but has a disadvantage in that the heat transfer efficiency is lower than that of the existing induction heater concept.

On the other hand, the above-mentioned background art is technical information that the inventor possessed for the derivation of the present invention or acquired in the process of derivation of the present invention, and it cannot be said that it is necessarily a known technique disclosed to the general public before the filing of the present invention. .

Korean Patent Registration No. 10-0664326 (published on Jan. 02, 2007) Korean Patent Registration No. 10-0925354 (published on Nov. 9, 2009)

One aspect of the present invention provides an induction heater implemented to maintain a gas bottle of a gas cabinet used in a semiconductor process at a constant temperature as an explosion-proof product.

The technical problems of the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.

An induction heater according to an embodiment of the present invention includes a heater housing; a polycarbonate plate bent in an arc shape to correspond to the shape of a gas bottle of a gas cabinet used in a semiconductor process as an explosion-proof product and installed at the front end of the heater housing; a suspension hot plate bent in an arcuate shape to correspond to the shape of the polycarbonate plate, installed at the front end of the polycarbonate plate, and generating heat by using an eddy current through a magnetic field; an induction coil installed along the polycarbonate plate and receiving electricity to generate a magnetic field for generating an eddy current of the suspension hot plate; and an aluminum diffusion plate that is bent in an arcuate shape corresponding to the shape of the sustain hot plate, is installed at the front end of the sustain hot plate, receives heat from the heated induction coil, and radiates heat in the direction of the gas bottle spaced apart in front. includes ;

In an embodiment, the suspension hot plate may be made of SUS 304 material.

In an embodiment, the aluminum diffusion plate may be made of AL 3003 material.

In one embodiment, the induction heater according to another embodiment of the present invention, a heater cleaning device for cleaning the exposed surface of the aluminum diffusion plate; may further include.

In one embodiment, the heater cleaning device, a heater holder for forming a mounting groove for placing the heater housing on the upper rear end; a first sliding part installed along one side of the heater holder and slidingly moved in the front-rear direction along one side of the heater holder; a second sliding part facing the first sliding part and installed along the other side of the heater holder and slidingly moved in the front-rear direction along the other side of the heater holder; and one side is installed in the first sliding unit, and the other side is installed in the second sliding unit, and as the first sliding unit and the second sliding unit slide in the front-rear direction, the aluminum diffusion is moved in the front-rear direction together. It may include; a rotating cleaning unit that rotates after being in close contact with the exposed surface of the plate to remove foreign substances adhering to the exposed surface of the aluminum diffusion plate.

In one embodiment, the rotary cleaning unit is formed in a cylindrical shape, one side is installed in the first sliding portion, the other side is installed in the second sliding portion rotary drum; and a plurality of cleaning units spaced apart from each other at regular intervals along the outer surface of the rotating drum, and rotating together as the rotating drum rotates to remove foreign substances attached to the exposed surface of the aluminum diffusion plate. can do.

In one embodiment, the cleaning unit may include a seating groove extending in the left and right longitudinal directions along the outer surface of the rotating drum; a cover installed to cover the seating groove; a weight block seated in the seating groove, the upper portion of which is exposed to the upper side of the cover through an opening extending in the left and right longitudinal directions along the cover; block support springs respectively installed at the front and rear ends of the upper surface of the inner space of the cover so that the weight block can be seated on the bottom surface of the seating groove to closely contact the lower front and rear ends of the weight block in the downward direction; and a cleaning brush installed along the upper side of the weight block to sweep away foreign substances attached to the exposed surface of the aluminum diffusion plate.

In one embodiment, the weight block is seated on the bottom surface of the seating groove, and is raised from the seating groove by centrifugal force as the rotational speed of the rotating drum increases to expand the cleaning range by the cleaning brush. can

In one embodiment, the weight block may include a seating portion formed in a flat plate shape corresponding to the shape of the seating groove to be seated in the seating groove; a pillar portion extending upwardly of the seating portion so as to be exposed to the upper side of the cover through the opening of the cover; and an exposed portion that is installed on the upper side of the pillar, and on which the cleaning brush is installed along the upper side.

In an embodiment, the exposed portion may be formed in a semicircular shape that is rounded upward to avoid friction with the exposed surface of the aluminum diffusion plate as it rotates.

According to the above-described aspect of the present invention, it is possible to provide an effect of improving heat transfer efficiency as well as blocking the vortex and efficiently transferring heat.

The effects of the present invention are not limited to the above-mentioned effects, and various effects may be included within the range apparent to those skilled in the art from the description below.

1 to 3 are diagrams showing a schematic configuration of an induction heater according to an embodiment of the present invention.
4 is a view showing a schematic configuration of an induction heater according to another embodiment of the present invention.
5 is a view showing the rotation cleaning unit of FIG.
6 and 7 are views showing the cleaning unit of FIG. 5 .

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0012] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0014] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0016] Reference is made to the accompanying drawings, which show by way of illustration specific embodiments in which the present invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the present invention. It should be understood that the various embodiments of the present invention are different but need not be mutually exclusive. For example, certain shapes, structures, and characteristics described herein with respect to one embodiment may be implemented in other embodiments without departing from the spirit and scope of the invention. In addition, it should be understood that the location or arrangement of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the present invention. Accordingly, the detailed description set forth below is not intended to be taken in a limiting sense, and the scope of the present invention, if properly described, is limited only by the appended claims, along with all scope equivalents to those claimed. Like reference numerals in the drawings refer to the same or similar functions throughout the various aspects.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the drawings.

1 to 3 are diagrams showing a schematic configuration of an induction heater according to an embodiment of the present invention.

1 to 3 , the induction heater 10 according to an embodiment of the present invention includes a heater housing 100 , a polycarbonate plate 200 , a suspension hot plate 300 , an induction coil 400 and aluminum. and a diffusion plate 500 .

The heater housing 100 forms an outer shape for installing components such as the polycarbonate plate 200 , the sustain hot plate 300 , the induction coil 400 , and the aluminum diffusion plate 500 .

The polycarbonate plate 200 is an explosion-proof product and is bent in an arcuate shape to correspond to the shape of a gas bottle of a gas cabinet used in a semiconductor process, and is installed at the front end of the heater housing 100 .

The suspension hot plate 300 is bent in an arcuate shape to correspond to the shape of the polycarbonate plate 200 and installed at the front end of the polycarbonate plate 200, and uses an eddy current through a magnetic field generated by the induction coil 400. to generate heat.

In an embodiment, the suspension hot plate 300 may be made of SUS 304 material.

The induction coil 400 is installed along the polycarbonate plate 200 and receives electricity to generate a magnetic field for generating an eddy current of the suspension hot plate 300 .

The aluminum diffusion plate 500 is bent in an arcuate shape to correspond to the shape of the suspension heating plate 300 , and installed at the front end of the suspension heating plate 300 , and receives heat from the heated induction coil 400 and is spaced in front of it. It emits heat in the direction of the gas bottle where it is placed.

In one embodiment, the aluminum diffusion plate 500 may be made of AL 3003 material to block eddy currents and efficiently transfer heat.

The specifications of each configuration according to the present invention are shown in Table 1 to be described later.

In the induction heater 10 according to an embodiment of the present invention having the configuration as described above, in order to increase heat transfer efficiency, the size of the sustain hot plate 300 and the aluminum diffusion plate 500 is changed to increase the efficiency area. can be changed.

The induction heater 10 according to an embodiment of the present invention having the above-described configuration may block eddy currents and efficiently transfer heat, as well as improve heat transfer efficiency.

4 is a view showing a schematic configuration of an induction heater according to another embodiment of the present invention.

4 , the induction heater 20 according to another embodiment of the present invention includes a heater housing 100, a polycarbonate plate 200, a suspension hot plate 300, an induction coil 400, and an aluminum diffusion plate ( 500 ) and a heater cleaning device 600 .

Here, the heater housing 100 , the polycarbonate plate 200 , the sustain hot plate 300 , the induction coil 400 , and the aluminum diffusion plate 500 are the same as the components of FIG. 1 , and thus descriptions thereof will be omitted. .

The heater cleaning apparatus 600 cleans the curved exposed surface of the aluminum diffusion plate 500 .

In an embodiment, the heater cleaning apparatus 600 may include a heater holder 610 , a first sliding unit 620 , a second sliding unit 630 , and a rotating cleaning unit 700 .

The heater holder 610 forms a mounting groove 611 for placing the heater housing 100 on the upper rear end thereof.

The first sliding unit 620 is installed along one side of the heater holder 610 to slide forward and backward along one side of the heater holder 610 , and one side of the rotary cleaning unit 700 is installed.

The second sliding unit 630 is installed along the other side of the heater holder 610 while facing the first sliding unit 620 and slides in the front-rear direction along the other side of the heater holder 610, and rotates the cleaning unit 700 ) is installed on the other side.

Rotation cleaning unit 700, one side is installed on the first sliding part 620, the other side is installed on the second sliding part 630, the first sliding part 620 and the second sliding part 630 is front and back As it slides in the direction, it moves in the front-rear direction, closely adheres to the exposed surface of the aluminum diffusion plate 500 and then rotates to remove foreign substances adhering to the exposed surface of the aluminum diffusion plate 500 .

In the induction heater 20 according to another embodiment of the present invention having the configuration as described above, it is necessary for an operator to manually remove various foreign substances that may be accumulated on the exposed surface of the aluminum diffusion plate 500 forming a curved surface. By automatically removing it without, it is possible to ensure that the heat dissipation efficiency by the aluminum diffusion plate 500 is always kept the same, and it is possible to prevent the worker's exposure to contaminants.

5 is a view showing the rotation cleaning unit of FIG.

Referring to FIG. 5 , the rotating cleaning unit 700 includes a rotating drum 710 and a plurality of cleaning units 720 .

The rotating drum 710 is formed in a cylindrical shape having a shape corresponding to the curvature of the aluminum diffusion plate 500 , and one side is installed on the first sliding part 620 , and the other side is installed on the second sliding part 630 . and a plurality of cleaning units 720 are installed.

In one embodiment, the rotary drum 710, the first sliding part 620 or the second sliding part 630 may be provided with a rotation motor (M) for rotation at one side or the other side is installed.

A plurality of cleaning units 720 are installed at regular intervals along the outside of the rotating drum 710, and are attached to the exposed surface of the aluminum diffusion plate 500 while rotating together as the rotating drum 710 rotates. Remove the foreign matter.

The rotary cleaning unit 700 having the configuration as described above is formed in a cylindrical shape corresponding to the shape of the exposed surface of the aluminum diffusion plate 500 to remove foreign substances optimized for the exposed surface of the curved aluminum diffusion plate 500 . performance can be provided.

6 and 7 are views showing the cleaning unit of FIG. 5 .

6 and 7 , the cleaning unit 720 includes a seating groove 721 , a cover 722 , a weight block 723 , a block support spring 724 , and a cleaning brush 725 .

The seating groove 721 is formed to extend in the left and right longitudinal direction along the outer surface of the rotary drum 710 so that the weight block 723 can be seated.

The cover 722 is installed to cover the seating groove 721 .

The weight block 723 is made of a heavy material such as a steel material, and is seated in the seating groove 721 , the upper part of which extends along the cover 722 in the left and right longitudinal directions through an opening formed to the upper side of the cover 722 . are exposed

In one embodiment, the weight block 723 includes a seating portion 7231 , a pillar portion 7232 , and an exposed portion 7233 .

The seating part 7231 is formed in a flat plate shape corresponding to the shape of the seating groove 721 so as to be seated in the seating groove 721 , and a pillar part 7232 is installed on the upper side.

The pillar part 7232 is formed to extend upwardly of the seating part 7231 so as to be exposed to the upper side of the cover 722 through the opening of the cover 722 , and the exposed part 7233 is provided on the upper side.

The exposed part 7233 is provided on the upper side of the pillar part 7232, and the cleaning brush 725 is installed along the upper side.

In an embodiment, the exposed portion 7233 may be formed in a semicircular shape that is rounded upward to avoid friction with the exposed surface of the aluminum diffusion plate 500 as it rotates.

The block support spring 724 is installed at the front and rear ends of the upper side of the inner space of the cover 722 so that the weight block 723 can be seated on the bottom surface of the seating groove 721, respectively. The lower front and rear ends of the , that is, the front and rear ends of the seating portion 7231 are brought into close contact in the lower direction.

The cleaning brush 725 is installed along the upper side of the weight block 723 to sweep away foreign substances attached to the exposed surface of the aluminum diffusion plate 500 .

In one embodiment, the weight block 723 is seated on the bottom surface of the seating groove 721, and is raised from the seating groove 721 by centrifugal force as the rotational speed of the rotary drum 710 increases, as shown in FIG. As shown, the cleaning range by the cleaning brush 725 can be extended by "G".

The cleaning unit 720 having the above-described configuration is installed along the rotating drum 710 and rotates together as the rotating drum 710 rotates to remove foreign substances attached to the exposed surface of the aluminum diffusion plate 500 . Not only can it be removed by sweeping, but the rotary drum 710 expands the scope of cleaning only by controlling the rotational speed of the rotary drum 710 without moving forward or backward, thereby improving the efficiency of removing foreign substances.

The above-described embodiments are for illustration, and those of ordinary skill in the art to which the above-described embodiments belong can easily transform into other specific forms without changing the technical idea or essential features of the above-described embodiments. You will understand. Therefore, it should be understood that the above-described embodiments are illustrative in all respects and not restrictive. For example, each component described as a single type may be implemented in a distributed manner, and likewise components described as distributed may also be implemented in a combined form.

The scope to be protected through this specification is indicated by the claims described below rather than the above detailed description, and should be construed to include all changes or modifications derived from the meaning and scope of the claims and their equivalents. .

10, 20: induction heater
100: heater housing
200: polycarbonate plate
300: Suss soleplate
400: induction coil
500: aluminum diffuser plate
600: heater cleaning device

Claims (3)

heater housing;
a polycarbonate plate bent in an arc shape to correspond to the shape of a gas bottle of a gas cabinet used in a semiconductor process as an explosion-proof product and installed at the front end of the heater housing;
a suspension hot plate bent in an arcuate shape to correspond to the shape of the polycarbonate plate, installed at the front end of the polycarbonate plate, and generating heat by using an eddy current through a magnetic field;
an induction coil installed along the polycarbonate plate and receiving electricity to generate a magnetic field for generating an eddy current of the suspension hot plate; and
an aluminum diffusion plate that is bent in an arcuate shape corresponding to the shape of the sustain hot plate, is installed at the front end of the sustain hot plate, receives heat from the heated induction coil, and radiates heat in the direction of the gas bottle spaced apart in front; includes,
The suspension hot plate,
Made of SUS 304 material,
The aluminum diffusion plate,
Made of AL 3003 material,
Further comprising; a heater cleaning device for cleaning the exposed surface of the aluminum diffusion plate,
The heater cleaning device,
a heater cradle forming a cradle groove for placing the heater housing on an upper rear end thereof;
a first sliding part installed along one side of the heater holder and slidingly moved in the front-rear direction along one side of the heater holder;
a second sliding part facing the first sliding part and installed along the other side of the heater holder and slidingly moved in the front-rear direction along the other side of the heater holder; and
One side is installed on the first sliding part, the other side is installed on the second sliding part, and as the first sliding part and the second sliding part slide in the front-rear direction, the aluminum diffusion plate moves in the front-rear direction together. and a rotating cleaning unit that rotates after being in close contact with the exposed surface of the aluminum diffusion plate to remove foreign substances adhering to the exposed surface of the aluminum diffusion plate.
The rotary cleaning unit,
a rotating drum formed in a cylindrical shape, one side of which is installed on the first sliding unit, and the other side of which is installed on the second sliding unit; and
A plurality of cleaning units are installed at regular intervals along the outer surface of the rotary drum, and rotate together as the rotary drum rotates to remove foreign substances attached to the exposed surface of the aluminum diffusion plate; and ,
The cleaning unit is
a seating groove extending in the left and right longitudinal directions along the outer surface of the rotating drum;
a cover installed to cover the seating groove;
a weight block seated in the seating groove, the upper portion of which is exposed to the upper side of the cover through an opening extending in the left and right longitudinal directions along the cover;
block support springs respectively installed at the front and rear ends of the upper surface of the inner space of the cover so that the weight block can be seated on the bottom surface of the seating groove to closely contact the lower front and rear ends of the weight block in the downward direction; and
a cleaning brush installed along the upper side of the weight block to sweep away foreign substances attached to the exposed surface of the aluminum diffusion plate; and
The weight block is
Doedoe seated on the bottom surface of the seating groove, as the rotational speed of the rotating drum is increased, the induction heater is raised from the seating groove by centrifugal force to expand the cleaning range by the cleaning brush.
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