KR102446391B1 - device for coating of pipe inner surface for semiconductor and display manufacturing equipment - Google Patents

Abstract

The present invention relates to a device for coating an inner surface of a pipe for a semiconductor and display manufacturing equipment. The device for coating an inner surface of a pipe for a semiconductor and display manufacturing equipment comprises: a blower generating wind through fan rotation by a motor drive; a heater heating the wind generated by the blower within a preset temperature range; a main body accommodating a pipe to be coated, into which a coating raw material is put, having the wind heated by the heater flowing in through an inlet pipe on one side, and having the heated wind flowing out through an outlet pipe on one side; and a support supporting the main body. The main body rotates the pipe to be coated in one direction at a constant speed through a motor so that the heated wind flowing in through the inlet pipe rotates and blows along an outer circumference of the pipe to be coated. Accordingly, an inner surface of the pipe to be coated can be simply coated with a desired thickness.

Description

Pipe inner surface for semiconductor and display manufacturing equipment {device for coating of pipe inner surface for semiconductor and display manufacturing equipment}

The present invention relates to a device for coating the inner surface of a pipe for semiconductor and display manufacturing equipment, and more particularly, the coating raw material melted by melting the coating raw material injected into the coating target pipe through heated wind is uniform over the entire inner surface of the coating target pipe. It relates to an inner surface coating device for a pipe for semiconductor and display manufacturing facilities, which can be applied to a thickness and can be coated, thereby improving the coating quality.

In the semiconductor and display manufacturing process, gas pipes for various gas supply facilities for stably and safely supplying various types of reactive gases in a constant quality state to a process chamber within a clean room section are essential.

In this case, the gas may be divided into a so-called 'bulk gas' and a 'process gas'.

Here, the bulk gas is mainly a general gas consumed in a relatively large amount such as dry air, nitrogen, oxygen, hydrogen, argon, helium, etc., and the process gas is a special material gas such as monosilane, phosphine, nitrogen trifluoride, ammonia, etc. dominates

On the other hand, in the case of process gas, unreacted gas and caustic gas are discharged, and since toxicity, corrosiveness, and flammability are very strong, a detoxification device such as a vacuum pump or an exhaust gas treatment device (scrubber; It is purged to a harmless state through a scrubber and released into the atmosphere.

Accordingly, gas supply facilities for semiconductor and display manufacturing processes require special piping facilities with sufficient cleanliness, corrosion resistance and strength to prevent contamination or leakage while maintaining high purity of gas while reaching the process equipment.

At this time, the piping equipment is selected in consideration of quality, stability, maintainability, and economic feasibility. In general, stainless steel pipe having excellent corrosion resistance is mainly used due to the toxicity and corrosion of exhaust gas.

However, since the process exhaust gas of the semiconductor and display manufacturing process contains a large amount of particulates such as reaction products or dust, the exhaust gas is rapidly powdered due to external temperature changes while the exhaust gas is moved to a vacuum pump or exhaust gas treatment device. There was a problem that the piping equipment was damaged due to its toxicity and corrosiveness because it was deposited or adhered to the surface.

For this reason, the inner surface of the pipe for semiconductor and display manufacturing facilities is coated, for example, a fluororesin layer called Teflon is formed on the inner circumferential surface of the pipe to prevent damage to the pipe due to the toxicity and corrosion of the exhaust gas.

For example, as disclosed in Korean Patent No. 10-0770315, etc., after injecting a coating raw material into the pipe, it is atomized through the formation of an electrostatic field to coat the inner surface of the pipe to prevent damage due to the toxicity and corrosion of the exhaust gas.

However, the coating of the inner surface of the pipe by atomization of the coating material through the formation of an electrostatic field has the advantage of minimizing the amount of coating material used and the coating time, while the degree of adhesion of the coating material depending on the difference in the density of the electric field lines, etc. There was a problem in that the coating quality was deteriorated because the coating thickness was not uniform due to the difference in thickness, and the coating area was concentrated in a part according to the difference in the flow distance of the particles of the coating material in particular.

For the above reasons, in this field, we are trying to develop a coating device for the inner surface of a pipe for semiconductor and display manufacturing facilities that can improve the coating quality by allowing the coating material to be smoothly coated with a uniform thickness over the entire inner surface of the pipe to be coated. However, so far, satisfactory results have not been obtained.

Republic of Korea Patent Publication No. 10-0770315

The present invention has been proposed to solve the problems of the prior art as described above, and a semiconductor and display manufacturing capable of improving coating quality by allowing a coating raw material to be smoothly coated with a uniform thickness over the entire inner surface of a pipe to be coated An object of the present invention is to provide a coating device for the inner surface of a pipe for equipment.

In order to achieve the above object, the present invention

a blower that generates wind through fan rotation by a motor drive; a heater for heating the wind generated by the blower within a preset temperature range; a body accommodating the coating target pipe into which the coating material is put, the wind heated by the heater is introduced through the inlet pipe on one side, and the heated wind inside is discharged through the outlet pipe on the one side; and a support for supporting the main body, wherein the main body rotates the coating target pipe at a constant speed in one direction through a motor so that the heated wind flowing in through the inlet pipe surrounds the outer peripheral surface of the coating target pipe We propose a pipe inner surface coating device for semiconductor and display manufacturing equipment, characterized in that it goes around and runs along the .

The body includes a turning member for turning and flowing the heated wind introduced through the inlet pipe along the inner peripheral surface circumference.

The body includes a honeycomb member for absorbing and discharging the heat of the heated wind discharged through the outlet of the turning member.

The outlet pipe includes a temperature sensor and a pressure sensor for sensing the temperature and pressure of the heated wind flowing along the inside.

The present invention may further include an auxiliary heater for locally inputting the wind heated by the heater to a higher temperature than before to at least one point in the body by heating again.

The present invention may further include a heat exchanger that transfers the heat of the heated wind flowing out through the outlet pipe to the outside air flowing into the blower.

In the pipe inner surface coating apparatus for semiconductor and display manufacturing equipment according to the present invention, wind is generated by a blower including a blower and a heater, and the wind is heated by the heater. Since the coating material injected into the target pipe melts and is applied to the inner surface of the coating target pipe, the inner surface of the coating target pipe can be simply coated to a desired thickness.

In addition, in the inner surface coating apparatus of a pipe for semiconductor and display manufacturing equipment according to the present invention, the body rotates the pipe to be coated at a constant speed in one direction through a motor driving, and the heated wind flowing into the body is the pipe to be coated As it rotates along the circumference of the outer circumferential surface of the coating material, the coating material injected into the pipe to be coated melts smoothly, and the coating quality can be improved because it can be applied in a uniform thickness over the entire inner surface of the pipe to be coated.

In addition, in the pipe inner surface coating apparatus for semiconductor and display manufacturing equipment according to the present invention, the main body includes a turning member and a honeycomb member, so that the turning of the heated wind by the turning member can be made, and the coating target by the honeycomb member Since the heated wind to the pipe can be continuously transmitted smoothly, the coating material injected into the pipe to be coated melts more smoothly, and the coating quality can be further improved because it can be applied in a uniform thickness over the entire inner surface of the pipe to be coated. have.

1 is a perspective view showing an external appearance of a pipe inner surface coating apparatus for a semiconductor and display manufacturing facility according to the present invention.
2 is an exemplary view showing a form in which a pipe to be coated is accommodated in the main body in the pipe inner surface coating apparatus for semiconductor and display manufacturing equipment according to the present invention.
3 is an exemplary view showing the input of heated wind into the body in the inner surface coating apparatus for a pipe for semiconductor and display manufacturing equipment according to the present invention.
Figure 4 is an exemplary view showing the discharge of the heated wind from the inside of the main body in the pipe inner surface coating apparatus for semiconductor and display manufacturing equipment according to the present invention.
5 is an exemplary view showing the rotation of the pipe to be coated in the pipe inner surface coating apparatus for semiconductor and display manufacturing equipment according to the present invention.
6 is an exemplary view for explaining the turning of the heated wind through the turning member of the main body in the inner surface coating device for semiconductor and display manufacturing equipment according to the present invention.
7 is an exemplary view for explaining the emission of heated wind through the honeycomb member of the main body in the inner surface coating apparatus for a pipe for semiconductor and display manufacturing equipment according to the present invention.

Hereinafter, the present invention will be described in detail based on the accompanying drawings.

As shown in FIG. 1, the pipe inner surface coating apparatus (A) for semiconductor and display manufacturing equipment according to the present invention includes a blower 100; heater 200; body 300; And the support 400; includes.

The blower 100 of the present invention generates wind through rotation of a fan (not shown in the drawing) driven by the motor 110 .

Therefore, by connecting the blower 100 to one end of the inlet pipe 310 leading from the main body 300 described below, wind is introduced into the main body 300 .

On the other hand, the blower 100 may have any conventional structure and method as long as it can generate wind through fan rotation by driving the motor 110 , and detailed description of the blower 100 will be omitted.

The heater 200 of the present invention heats the wind generated by the blower 100 within a preset temperature range.

Accordingly, the heating of the coating material 20 injected into the coating target pipe 10 accommodated in the body 300 is made by injecting the wind heated by the heater 200 into the body 300 .

At this time, the heater 200 heats the wind to 250 to 300° C. for 150 to 200 minutes, and the coating raw material 20 injected into the coating target pipe 10 accommodated in the body 300 by the heat of the heated wind. can melt

On the other hand, the heater 200 may be of any conventional structure and method as long as it can heat the wind generated by the blower 100 within a preset temperature range. It may be an electrothermal heater that generates heat.

The main body 300 of the present invention accommodates the coating target pipe 10 into which the coating raw material 20 is put, but the wind heated by the heater 200 is introduced through the inlet pipe 310 on one side, and the The heated wind inside is discharged through the outlet pipe 320 .

Therefore, the heating of the coating material 20 injected into the coating target pipe 10 is made in the process in which the heated wind introduced through the inlet pipe 310 of the body 300 flows out through the outlet pipe 320 .

At this time, the main body 300 rotates the coating target pipe 10 at a constant speed in one direction through the motor 330 so that the heated wind flowing in through the inlet pipe 310 moves around the outer peripheral surface of the coating target pipe 10 . You can turn around and go crazy.

Here, the pipe to be coated 10 is rotatably supported by the support member 340 disposed in the body, so that the rotation of the pipe 10 to be coated is made as the motor 330 rotates the support member 340 . The motor 330 may be connected to the reduction gear so that the pipe 10 to be coated may rotate at a relatively low speed by reduced rotation by the reduction gear (not shown).

On the other hand, the support member 340 blocks the opening of one end and the other end of the coating target pipe 10, so that the coating material 20 previously injected into the coating target pipe 10 can be prevented from flowing out.

And the main body 300 includes a turning member 350 for swirling and flowing the heated wind flowing in through the inlet pipe 310 along the inner circumferential circumference. As the turning of the heated wind by the turning member 350 is made Since the heated wind flow time within the body 300 may be relatively long, the heating of the coating raw material 20 injected into the coating target pipe 10 may be smooth.

At this time, an inlet (not shown) is formed at one end of the turning member 350 and an outlet (not shown) is formed at the other end, so that the wind flowing in through the inlet flows out through the outlet through the turn.

And the main body 300 includes a honeycomb member 360 that absorbs and discharges the heated wind discharged through the outlet of the turning member 350, so that the wind heated through the hexagonal through-holes 361 distributed in the honeycomb member 360. As it is released by trapping it, the time for releasing the heated wind in the body 300 may be relatively long, so that the heating of the coating raw material 20 injected into the coating target pipe 10 may be smooth.

At this time, since the honeycomb member 360 is formed of cordierite, damage due to thermal shock can be minimized due to the characteristics of the material.

And the coating raw material 20 put into the coating target pipe 10 accommodated in the body 300 is melted by the heat of the heated air and applied to the coating target pipe 10, so that the coating target pipe due to the toxicity and corrosiveness of the exhaust gas (10) As long as it is capable of preventing damage, it may be of any general type, and an example thereof may be a fluororesin powder.

And the outlet pipe 320 provided in the body 300 includes a temperature sensor 321 and a pressure sensor 322 of the heated wind flowing along the inside by the temperature sensor 321 and the pressure sensor 322 . As the temperature and pressure are sensed, it is possible to grasp the occurrence of an abnormal situation when the heated wind flows out.

And the main body 300 is composed of an upper body (not shown) and a lower body (not shown) that are hinged to each other, and as the upper body rotates on the lower body, the inner side can be opened, and the inner side of the upper body Since the rotation is intermittent by the locking of the locking member (not shown in the drawing), unintentional rotation of the upper body can be prevented.

And the inlet pipe 310 and the outlet pipe 320 of the body 300 include a plurality of branch pipes (reference numerals not shown) disposed at intervals along the longitudinal direction of the body, so that the wind heated through each branch pipe As the flow is made, the inflow and outflow of the heated wind may be smooth.

And the main body 300 includes a sensor (not shown in the drawing) that detects whether the motor 330 operates normally, that is, whether it rotates, so that when an abnormal condition of the motor 330 is detected by the sensor, driving is stopped and an alarm is generated By setting this to be done, it is possible to immediately respond to an abnormal situation in the motor 330 .

Here, the sensor may have any conventional structure and method as long as it can detect whether the motor 330 operates normally, and as an example, a coil having a ferrite core, an oscillator-detector ) and a solid state switch, the magnitude of the oscillation decreases when approaching a metal object, the receiver detects the change and shorts the switch, and the inductive proximity sensor turns on again when out of the detection range Proximity Sensor).

The support 400 of the present invention supports the body 300 .

Accordingly, the installation state of the main body 300 and the blower 100 and the heater 200 connected thereto is stably maintained by the support of the support 400 .

On the other hand, the inner surface coating apparatus (A) of a pipe for semiconductor and display manufacturing equipment according to the present invention is localized to at least one point in the body 300 by heating the wind heated by the heater 200 again to a higher temperature than before. It may further include an auxiliary heater 500 to be put into.

Therefore, by injecting the wind heated to a higher temperature than before by the auxiliary heater 500 into the flange part of the pipe 10 to be coated, which is formed thicker than other parts, in particular, the time to reach thermal equilibrium between the corresponding part and other parts difference can be reduced.

Here, the auxiliary heater 500 may have any conventional structure and method as long as it can re-heat the wind heated by the heater 200 to a higher temperature than before. Detailed description will be omitted.

In addition, the apparatus (A) for coating the inner surface of a pipe for semiconductor and display manufacturing equipment according to the present invention may further include a heat exchanger 600 connected between the blower 100 and the outlet pipe 320 .

Therefore, the heat of the heated wind flowing out through the outlet pipe 320 by the heat exchanger 600 is transferred to the outside air flowing into the blower 100 , that is, the heated wind flowing out through the outlet pipe 320 has Pre-heating of the outside air can be made by heat, so that the heating of the wind through the heater 200 can be smoother.

Here, the heat exchanger 600 may have any conventional structure and method as long as it can transfer the heat of the heated wind flowing out through the outlet pipe 320 to the outside air flowing into the blower 100 , heat exchange A detailed description of the group 600 will be omitted.

On the other hand, when the heat exchanger 600 is not in operation, outside air can be put into the blower 100 in an unheated state, and at the end of the coating, wind is applied through the blower 100 in a state where the operation of the heater 200 is stopped. The coating surface can be cured by allowing unheated outside air to flow into the inside of the coating target pipe 10 accommodated in the main body 300 .

The coating of the inner surface of the pipe 10 to be coated through the inner pipe coating device (A) for semiconductor and display manufacturing equipment according to the present invention will be described in detail as follows.

First, wind is generated by the blower 100 .

The blower 100 of the present invention includes a motor 110 and a fan connected thereto, and wind may be generated by rotation of the fan by driving the motor 110 .

Next, the wind generated by the blower 100 is heated.

The present invention includes a heater 200, so that the wind generated by the blower 100 passes through the heater 200 by disposing the heater 200 on the outlet side of the blower 100, the heater 200 The wind from the blower 100 can be heated by this.

Next, the coating target pipe 10 accommodated in the body 300 is heated by the heated wind.

At this time, as shown in FIG. 2 , a coating raw material 20 , for example, fluororesin powder, is pre-injected into the coating target pipe 10 accommodated in the body 300 , and as shown in FIG. 3 , the heated wind The coating raw material 20, which melts as it penetrates the pipe 10 to be coated, may be applied to the inner surface of the pipe 10 to be coated, thereby coating the inner surface of the pipe 10 to be coated.

Here, the heated wind may be introduced into the body 300 through the inlet pipe 310 leading from the heater 200 to the body 300 .

However, when the heating of the pipe 10 to be coated by the heated wind is partially made, the coating raw material 20 does not melt sufficiently or melts partially, so that the inner surface of the pipe 10 to be coated is only partially coated. This may be insufficient.

However, the main body 300 of the present invention rotates the coating target pipe 10 at a constant speed in one direction through the motor 330 as shown in FIG. Since the wind can travel around the outer peripheral surface of the pipe to be coated 10, as the entire pipe to be coated 10 is uniformly heated, melting of the coating raw material 20 injected therein can be smooth, so that the pipe to be coated (10) The entire inner surface can be coated with a uniform thickness.

And the body 300 includes a turning member 350 for turning and flowing the heated wind flowing in through the inlet pipe 310 along the inner circumferential circumference, as shown in FIG. 6 by the turning member 350 As the heated wind turns around, the heated wind flow time in the body 300 can be relatively long, so that the heating of the coating raw material 20 injected into the coating target pipe 10 is smoother, so the coating raw material 20 ) can be melted more smoothly, so that the entire inner surface of the pipe 10 to be coated can be coated with a uniform thickness.

And the main body 300 includes a honeycomb member 360 that absorbs and discharges the heated wind discharged through the outlet of the turning member 350, and as shown in FIG. 7, the honeycomb member 360 has a hexagonal through hole ( 361) As the heated wind is absorbed and released through each, the time for releasing the heated wind in the body 300 may be relatively long, so that the heating of the coating material 20 injected into the coating target pipe 10 is more smooth. Melting of the coating raw material 20 can be smoother, so that the entire inner surface of the pipe 10 to be coated can be coated with a uniform thickness.

In addition, the pipe inner surface coating apparatus (A) for semiconductor and display manufacturing equipment according to the present invention may further include an auxiliary heater 500 , the wind heated by the heater 200 is heated by the auxiliary heater 500 . Since it can be heated to a higher temperature than before, the heating of the coating raw material 20 injected into the coating target pipe 10 through the heated wind is smoother, so the melting of the coating raw material 20 can be smoother, so that the coating The entire inner surface of the target pipe 10 may be coated with a uniform thickness.

At this time, the auxiliary heater 500 may be disposed not only on the outside of the main body 300 , but also at least one point or more inside the main body 300 , and the wind heated again by the auxiliary heater 500 is at least one in the main body 300 . It is locally injected at the point and is formed thicker than other parts, for example, as it reaches the flange part of the pipe 10 to be coated, the difference in time to reach thermal equilibrium between the flange part and other parts can be reduced, so compared to the flange part As the center of the pipe to be coated 10, which is formed with a relatively thinner thickness, reaches the set temperature earlier, and the raw material for coating 20 melts first, the raw material is gathered in the center of the pipe to be coated 10 to increase the thickness of the coating. Thickening can be prevented.

On the other hand, in the present invention, the heated wind injected into the body 300 is discharged through the outlet pipe 320 as shown in FIG. 4 after reaching the coating target pipe 10, so the body through the inlet pipe 310 ( 300), the heated wind can be smoothly introduced into the interior.

Since the present invention as described above is not limited to the above-described embodiments, it can be changed within the scope without departing from the gist of the present invention claimed in the claims, and such changes are the present invention defined by the following claims. fall within the protection scope of the invention.

10: coating target pipe 20: coating raw material
100: blower 110: motor
200: heater 300: body
310: inlet pipe 320: outlet pipe
321: temperature sensor 322: pressure sensor
330: motor 340: support member
350: turning member 360: honeycomb member
361: through hole 400: support
500: auxiliary heater 600: heat exchanger
A : Coating device

Claims (7)

a blower that generates wind through fan rotation by a motor drive;
a heater for heating the wind generated by the blower within a preset temperature range;
a body accommodating the coating target pipe into which the coating material is put, the wind heated by the heater is introduced through the inlet pipe on one side, and the heated wind inside is discharged through the outlet pipe on the one side; and
Including; a support for supporting the body;
The body rotates the coating target pipe at a constant speed in one direction through a motor so that the heated wind flowing in through the inlet pipe travels around the outer peripheral surface of the coating target pipe,
The inlet pipe and the outlet pipe of the body include a plurality of branch pipes disposed at intervals along the longitudinal direction of the body, and one end and the body lengthwise direction by each of the branch pipes connected between the inlet pipe and the body The inflow of the simultaneously heated wind is made to a plurality of points between the other ends, and the wind is simultaneously heated from a plurality of points between one end and the other end in the longitudinal direction of the body by each of the branch pipes connected between the main body and the outlet pipe. Pipe inner surface coating device for semiconductor and display manufacturing facilities, characterized in that the outflow is made. According to claim 1,
The main body is a pipe inner surface coating apparatus for semiconductor and display manufacturing equipment, characterized in that it comprises a turning member for turning and flowing along the circumference of the inner peripheral surface of the heated wind flowing in through the inlet pipe. 3. The method of claim 2,
The main body is a pipe inner surface coating apparatus for semiconductor and display manufacturing equipment, characterized in that it comprises a honeycomb member for absorbing and discharging the heat of the heated wind discharged through the outlet of the turning member. According to claim 1,
The main body is a pipe inner surface coating apparatus for semiconductor and display manufacturing equipment, characterized in that it comprises a sensor for detecting whether the motor is rotated. According to claim 1,
The outlet pipe comprises a temperature sensor and a pressure sensor for sensing the temperature and pressure of the heated wind flowing along the inside. According to claim 1,
Pipe inner surface coating apparatus for semiconductor and display manufacturing equipment, characterized in that it further comprises an auxiliary heater that heats the wind heated by the heater again to a higher temperature than before and locally injects it to at least one point in the body. . According to claim 1,
The pipe inner surface coating apparatus for semiconductor and display manufacturing equipment, characterized in that it further comprises a heat exchanger for transferring the heat of the heated wind flowing out through the outlet pipe to the outside air flowing into the blower.

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