KR102443802B1 - Manufacturing apparatus of semiconductor ring and manufacturing method of semiconductor ring using the same - Google Patents

Abstract

a ring-shaped crucible loaded with a solid semiconductor material; a first heat source located outside the crucible and melting the solid semiconductor material; a shield part positioned between the first heat source part and the crucible; a second heat source that moves up and down in the ring of the crucible; and a heat exchange unit located at the lower portion of the crucible, wherein the shield unit blocks the first heat source after melting the semiconductor material, the heat exchange unit controls the temperature of the crucible, and crystal growth of the molten semiconductor in a horizontal direction It provides a semiconductor ring manufacturing apparatus characterized in that and a semiconductor ring manufacturing method using the same.

Description

A semiconductor ring manufacturing apparatus and a semiconductor ring manufacturing method using the same

The present invention relates to an apparatus for manufacturing a semiconductor ring and a method for manufacturing a semiconductor ring using the same. By using a ring-shaped crucible to crystallize a semiconductor material, the semiconductor product shape processing process is simplified, and the loss of semiconductor material during the manufacturing process of the product can be reduced. It relates to a semiconductor ring manufacturing apparatus and a semiconductor ring manufacturing method using the same.

In general, silicon-based semiconductor materials used in semiconductor processes are formed by charging polycrystalline silicon in a crucible, heating it, and melting it to form a silicon single crystal ingot or polycrystalline ingot in the form of a round bar, and then process it through coring and cutting processes. do. Since the semiconductor material has a large diameter (about 10 to 30 cm) and close to perfect single crystals, since grain boundaries and other crystal defects degrade device performance, it is useful in the manufacture of semiconductor electronic components. A high-level technique is required to obtain a high-quality semiconductor single crystal. For example, single-crystal or polycrystalline silicon can be generally grown by the Czochralski (CZ) technique or the float-zone (FZ) technique. In the conventional CZ method, when a high-temperature charge of molten silicon is heated in the crucible by a heating element disposed around the crucible, the heating element heats through the crucible wall, which may create stress in the crucible, which may create a stress in the crucible. may shorten the useful life of Therefore, after each growth cycle, the molten silicon remaining at the bottom of the crucible is solidified, and there is a problem of causing expansion to the extent that the crucible can be destroyed. In addition, a large radial temperature gradient and a convection velocity gradient exist across the solidification zone between the interface between the molten silicon and the crystal being crystallized, so it may be difficult to provide a uniform temperature distribution for crystallization.

Recently, due to the enlargement of semiconductor wafers, there is a demand for enlargement of silicon materials used in wafer etching or deposition processes during the semiconductor manufacturing process. In addition, in the case of a product produced through a polycrystalline method, it is possible to enlarge the product, but incidental material loss occurs a lot by performing a coring and sawing process and a grinding process to make a necessary product shape.

Korean Patent Registration No. 10-1279709 (Registration Date: 2013. 06. 21.) Korean Patent Registration No. 10-1997608 (Registration Date: 2019. 07. 02.)

The technical problem to be achieved by the present invention is a semiconductor ring capable of reducing the loss of semiconductor material during the processing step and processing time and processing of a single crystal or polycrystalline semiconductor material by melting a solid semiconductor material and crystallizing it to a desired thickness and shape An object of the present invention is to provide a manufacturing apparatus and a method for manufacturing a semiconductor ring using the same.

In addition, another technical problem to be achieved by the present invention is a semiconductor ring manufacturing apparatus capable of manufacturing a semiconductor product that is enlarged by manufacturing the molten semiconductor (silicon?) material with a crystalline semiconductor (silicon?) so that cracks do not occur and using the same An object of the present invention is to provide a method for manufacturing a semiconductor ring.

The object of the present invention is not limited to the object mentioned above, and other objects not mentioned will be clearly understood by those of ordinary skill in the art to which the present invention belongs from the following description.

In order to solve the above problem, the present invention provides a ring-shaped crucible loaded with a solid semiconductor material; a first heat source located outside the crucible and melting the solid semiconductor material; a shield part positioned between the first heat source part and the crucible; a second heat source that moves up and down in the ring of the crucible; and a heat exchange unit located at the lower portion of the crucible, wherein the shield unit blocks the first heat source after melting the semiconductor material, the heat exchange unit controls the temperature of the crucible, and crystal growth of the molten semiconductor in a horizontal direction It is possible to provide a semiconductor ring manufacturing apparatus characterized in that.

The second heat source unit may perform annealing for vertical crystallization of the molten semiconductor.

The crucible may include a forming support member having an open ring-shaped trench, and a forming frame member detachably coupled to the trench of the forming support member and in which the semiconductor material is charged.

The crucible may be provided with quartz.

The second heat source may be provided in a ring shape corresponding to the inner surface of the crucible, or may be provided in a rod shape positioned to have the same spacing as the inner surface of the crucible.

The solid semiconductor material may be a polysilicon chip or a compound semiconductor material.

In addition, in order to solve the above problem, the present invention includes the steps of loading a solid semiconductor material into a ring-shaped crucible; melting the solid semiconductor material by a first heat source located outside the crucible; blocking the first heat source by a shield positioned between the first heat source and the crucible after the semiconductor material is melted; and a second heat source part moving up and down inside the ring of the crucible, adjusting the temperature of the crucible together with a heat exchange part positioned below the crucible, and crystallizing the molten semiconductor in a horizontal direction. A method for manufacturing a semiconductor ring can be provided.

When the second heat source moves up and down in the ring of the crucible, annealing for vertical crystallization of the molten semiconductor may be performed.

The solid semiconductor material may be a polysilicon chip or a compound semiconductor material.

A semiconductor ring manufacturing apparatus and a semiconductor ring manufacturing method using the same according to an embodiment of the present invention is a single crystal or polycrystalline semiconductor material processing process by melting a solid semiconductor material by providing a replaceable ring-type crucible and crystallizing it to a desired thickness and shape There are advantages in that it is possible to shorten the steps and process time, and to reduce the loss of the semiconductor material by minimizing the processing of the semiconductor material.

In addition, the second heat source part and the heat exchange part are provided to control the temperature gradient inside the crucible to control horizontal crystal growth and vertical crystal growth, and to crystallize the molten semiconductor material so that cracks do not occur. It has the advantage of being able to manufacture large-sized semiconductor products.

1 is a perspective view showing a semiconductor ring manufacturing apparatus according to an embodiment of the present invention;
Figure 2 is a cross-sectional view showing a semiconductor ring manufacturing apparatus according to another embodiment of the present invention,
3 is a process flow diagram illustrating a method for manufacturing a semiconductor ring according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The embodiments introduced below are provided as examples so that the spirit of the present invention can be sufficiently conveyed to those skilled in the art. Accordingly, the present invention is not limited to the embodiments described below and may be embodied in other forms. And, in the drawings, the length, thickness, etc. of layers and regions may be exaggerated for convenience. Like reference numerals refer to like elements throughout.

1 is a perspective view showing a semiconductor ring manufacturing apparatus according to an embodiment of the present invention, Figure 2 is a cross-sectional view showing a semiconductor ring manufacturing apparatus according to another embodiment of the present invention, Figure 3 is a semiconductor ring manufacturing according to an embodiment of the present invention It is a process flow diagram showing the method.

1 and 2, the semiconductor ring manufacturing apparatus (10, 10') according to an embodiment of the present invention is a ring-shaped crucible 100 in which a solid semiconductor material is charged; a first heat source 200 located outside the crucible 100 and melting the solid semiconductor material; a shield part 300 positioned between the first heat source part 200 and the crucible 100; a second heat source part 400, 400' moving up and down inside the ring of the crucible 100; and a heat exchange unit 500 positioned under the crucible 100, wherein the shield unit 300 blocks the first heat source unit 200 after melting the semiconductor material, and the heat exchange unit 500 is The temperature of the crucible 100 may be controlled and the molten semiconductor may be crystallized in a horizontal direction.

In detail, the ring-shaped crucible 100 may have an open top so that charging, melting, and crystallization of a solid semiconductor material is performed. In addition, the crucible 100 may be replaced according to the size or thickness of the required semiconductor material, thereby manufacturing semiconductor rings of various sizes. Therefore, it is possible to shorten the processing steps and processing time of a single crystal or polycrystalline semiconductor material by providing a replaceable ring-shaped crucible, melting a solid semiconductor material and crystallizing it to a desired thickness and shape, and minimizes the processing to make the semiconductor material It has the advantage of reducing the loss of

For example, the crucible 100 is a molding support member 110 having a ring-shaped trench with an open upper portion, and a molding die that is detachably coupled to the trench of the molding support member 110 and the semiconductor material is loaded. A member 130 may be included. Therefore, even if the crucible 100 is damaged by the heat generated from the first heat source 200, only the forming support member 110 can be replaced, so that the process material cost can be reduced, and in the trench of the forming support member 110 Since the mold member 130 is coupled to be detachable, there is an advantage in that semiconductor rings of various sizes can be manufactured according to the shape of the accommodation space of the mold member 130 . The crucible 100 may be provided with quartz, and the forming support member and the forming frame member may be of graphite or ceramic. Furthermore, the crucible 100 is supported by the forming support member 110 and the forming frame member 130 and includes a crucible support member 150 for maintaining a predetermined distance with the second heat source parts 400 and 400 ′. can

A region in which the semiconductor material of the mold member 130 is charged, that is, the inner surface of the receiving space of the mold member 130 may be coated with polysilazane.

For example, a crucible made of quartz may induce the generation of a brown mold, which causes a decrease in the yield of silicon single crystals, and thereby may cause a problem of suppressing silicon crystallization.

In the present invention, the inner surface of the receiving space of the forming frame member 130 is coated with polysilazane to form a silica glass film as the innermost layer as a sacrificial layer. Nucleation can be suppressed, and the growth of crystal nuclei of cristobalite can be suppressed to suppress the occurrence of brown mold.

That is, even if crystal nuclei of cristobalite are formed on the surface of the silica glass film, which is the innermost layer, before all the polysilicon is melted, the silica glass film melts faster than the rate at which crystallization proceeds in the vicinity of the silica glass film, so the quartz exposed after the silica glass film is dissolved. Crystal nucleation of cristobalite on the surface of the inner layer of the crucible can be suppressed, and the generation and growth of a brown mold, which causes a decrease in the yield of pulling up a silicon single crystal, can also be suppressed. In other words, before the crystal nuclei of cristobalite are formed on the surface of the inner layer of the quartz crucible, if the innermost layer (silica glass film) of the crucible in which the crystal nuclei of cristobalite are formed is melted away, the origin of the brown mold may be eliminated.

Therefore, the mold member 130 has a polysilazane coating with a thickness of 0.02 to 0.2 mm as the innermost layer from the viewpoint of increasing the dissolution rate of the surface of the mold member 130 that is in contact with the silicon melt before silicon crystallization. It may be provided with a glass film.

Polysilazane is an inorganic high molecular compound soluble in an organic solvent having -(SiH2NH)- as a basic unit, and in general, far hydropolysilazane in which all side chains are hydrogen is used. The polysilazane can react with moisture or oxygen by heating in the air or in an atmosphere containing water vapor to form a dense silica glass film, which is why it is used as a silica coating material. The polysilazane coating may be performed by applying a solution obtained by dissolving polysilazane in an organic solvent, and then performing heat treatment at 200 to 400° C. in an oxidizing atmosphere to form a dense silica glass film. Furthermore, since polysilazane is easily hydrolyzed, hydrophobic solvents, such as xylene, can be used for solution preparation. According to this method, it is easy to dissolve in a silicon melt, and a dense innermost layer can be easily formed in a quartz crucible. In addition, since the silica glass film formed as described above does not contain an impurity element with respect to a silicon single crystal such as an alkali metal, even if it is dissolved in a silicon melt, it does not adversely affect the silicon single crystal, such as a decrease in purity.

The thickness of the innermost layer composed of the silica glass film by the polysilazane coating may be 0.02 to 0.2 mm. When the thickness is less than 0.02 mm, the innermost layer (silica glass film) is dissolved before the polysilicon in the mold member 130 is completely melted because it is too thin, and an inhibitory effect of crystal nucleation of cristobalite by the innermost layer is obtained. can't When the thickness exceeds 0.2 mm, since the innermost layer (silica glass film) remains even after all of the polysilicon is melted, the melting of the innermost layer continues, thereby affecting the oxygen concentration of the silicon single crystal. In addition, since the silica glass film has low viscosity, Ar enters the cavity formed by contacting the inner surface of the mold member 130 with polysilicon, and may remain in the remaining innermost layer without being melted in the initial contact with the silicon melt, the cavity As a starting point, air bubbles may be generated, resulting in the generation of air pockets in the silicon single crystal.

The first heat source 200 located outside the crucible 100 and melting the solid semiconductor material includes a high-frequency induction coil or a graphite heater to melt the solid semiconductor material charged inside the crucible 100. have. In this case, for example, the solid semiconductor material may be a polysilicon chip or a compound semiconductor material, and in the case of a polysilicon chip, a polysilicon chip is formed in the form of a pre-fabricated polysilicon, or a by-product produced during polysilicon manufacturing. may be used, and in the case of a compound semiconductor material, a material such as ceramic may be used, and the solid semiconductor material is not limited thereto.

The second heat source parts 400 and 400 ′ moving up and down in the ring of the crucible 100 may perform annealing for vertical crystallization of the molten semiconductor. For example, the second heat source parts 400 and 400' are provided in a rod shape 400 having the same spacing as the inner surface of the crucible 10 as shown in FIG. 1 which is an embodiment of the present invention, or in another embodiment of the present invention. 2, it may be provided in a ring shape 400' corresponding to the inner surface of the crucible 100. Furthermore, the second heat source parts 400 and 400 ′ may be provided in the form of an auxiliary heater to prevent vibration during vertical movement to minimize the influence on the crystal growth of the semiconductor material.

The shield part 300 positioned between the first heat source part 200 and the crucible 100 blocks the heat provided from the first heat source part 200 to prevent the molten semiconductor material inside the crucible 100 . The temperature may be adjusted together with the heat exchange unit 500 and the second heat source unit 400 . For example, the shield part 300 may be selected from carbon fiber or a heat insulator that can be used at high temperatures, and the shield part 300 may be changed in position or depending on the temperature state of the molten semiconductor material inside the crucible 100 There may be variability in the installation to allow some deviations. The heat exchange medium of the heat exchange unit 500 may be helium gas or cooling water.

The crystal growth rate of the molten semiconductor material 610 may cause a change in temperature, and it is necessary not to have an abrupt time change rate with respect to the temperature for a desirable crystal interface during crystallization 630 into a solid phase. Therefore, since the actual crystallization rate is dependent on the temperature conditions above and below the solidification interface of the growing crystal, it can be said that the molten semiconductor material, that is, the solidification driving force on the top of the molten semiconductor and the temperature distribution of the molten semiconductor are closely related to the control of the crystallization rate. Therefore, vertical crystallization of the molten semiconductor for an appropriate temperature distribution for controlling the crystallization rate of the molten semiconductor material can be achieved by providing the second heat source parts 400 and 400' and the shield part 500, and the horizontal crystallization may be made by the heat exchange unit 500 adjusting the temperature of the lower part of the crucible 100 .

Ks (dT / dx )s - KI (dT / dx ) l = LV / A ---- (Equation 1)

Ks: thermal conductivity of silicon single crystal,

Kl: thermal conductivity of molten silicon (silicon molten metal),

(dT / dx )s : Axial temperature gradient of silicon single crystal

(dT / dx ) l : Axial temperature gradient of molten silicon

L: latent heat of coagulation

V: pulling speed

A: area of solidification interface

As shown in Equation (1), the actual crystallization rate is determined by the axial temperature gradient of the crystallized silicon single crystal and the axial temperature gradient of the molten silicon of the molten silicon.

That is, the semiconductor ring manufacturing apparatus 10, 10 ′ according to an embodiment of the present invention is a first heat source unit 200 after charging a solid silicon material into the forming frame member 130 of the donut-shaped crucible 100 . After melting a silicon material using a polycrystalline ingot growth method, it can be said to be a manufacturing apparatus for producing a crystalline semiconductor material using the heat exchange unit 500, and the shield unit 300 is the temperature state or crystallization of the molten semiconductor material. The installation has variability according to the speed, but the second heat source parts 400 and 400' are raised and lowered inside the ring-shaped crucible 100 to prevent cracking and perform annealing for vertical crystallization, crucible 100 By performing heat exchange with the heat exchange unit 500 provided at the lower portion, crystal growth in the horizontal direction may be performed together with the second heat source units 400 and 400 ′.

Therefore, the shield part 300, the second heat source parts 400, 400', and the heat exchange part 500 are provided to adjust the temperature gradient inside the crucible 100 to control horizontal crystal growth and vertical crystal growth, and melt The semiconductor material can be crystallized, and there is an advantage in that it is possible to manufacture a large-sized semiconductor product of improved quality by manufacturing it with a crystalline semiconductor material so that cracks do not occur.

1 to 3, the semiconductor ring manufacturing method according to an embodiment of the present invention may first charge a solid semiconductor material in the ring-shaped crucible 100 (S110). For example, the solid semiconductor material may be a polysilicon chip or a compound semiconductor material, and in the case of a polysilicon chip, prefabricated polysilicon may be formed in a chip form, or may be charged using a by-product produced during polysilicon manufacturing. In the case of the compound semiconductor material, a material such as ceramic may be charged, and the solid semiconductor material is not limited thereto.

The ring-shaped crucible 100 has an open top so that a solid semiconductor material can be charged from the top. In addition, the crucible 100 may be replaced according to the size or thickness of the required semiconductor material, thereby manufacturing semiconductor rings of various sizes. Therefore, by using the replaceable ring-shaped crucible 100, the solid semiconductor material can be melted and crystallized to a desired thickness and shape, so that the semiconductor processing step and process time of single crystal or polycrystal can be shortened, and the conventional method Compared to that, the processing process is reduced, which has the advantage of reducing the loss of semiconductor material.

For example, the crucible 100 includes a forming support member 110 having a ring-shaped trench with an open top, and a forming mold detachably coupled to the trench of the forming support member 110 and in which the semiconductor chip is loaded. A member 130 may be included. Therefore, even if the crucible 100 is damaged by the heat generated from the first heat source 200 , only the molding support member 110 can be replaced, so the process cost can be reduced, and the molding support member 110 is detachable from the trench. By combining the forming frame member 130 so that it is possible, there is an advantage that semiconductor rings of various sizes can be manufactured according to the shape of the accommodation space of the forming frame member 130 . The crucible 100 may be formed of quartz, and both the forming support member 110 and the forming frame member 130 may be formed of quartz.

Next, the first heat source 200 located outside the crucible 100 may melt the solid semiconductor material (S120). For example, the first heat source 200 may include a high-frequency induction coil or a graphite heater, and the solid semiconductor material charged into the crucible 100 due to the heat generated by the first heat source 200 is melted. can be

In addition, after the semiconductor material is melted, the second heat source units 400 and 400 ′ and the heat exchange unit 500 may operate ( S140 ).

In this case, first, the shield unit 300 positioned between the first heat source unit 200 and the crucible 100 may block the first heat source unit 200 ( S130 ). That is, the shield unit 300 may block the heat provided from the first heat source unit 200 , and control the temperature of the molten semiconductor material 610 inside the crucible 100 to the heat exchange unit 500 and the second heat exchanger unit 500 . 2 It can be adjusted together with the heat source 400 . For example, the shield unit 300 may be selected from carbon fiber, glass fiber, or an insulating material that can be used at high temperatures, and the shield unit ( 300) may have variability in installation so that the location may be changed or some may be deviated. The heat exchange medium of the heat exchange unit 500 may be helium gas or cooling water.

The second heat source parts 400 and 400' are provided in a rod shape 400 having the same spacing as the inner surface of the crucible 100 as shown in FIG. 1 which is an embodiment of the present invention, or as shown in FIG. 2 which is another embodiment of the present invention. Likewise, the crucible 100 may be provided in a ring shape 400 ′ corresponding to the inner surface thereof. Furthermore, the second heat source parts 400 and 400' may be provided in the form of an auxiliary heater so as not to affect the crystallization of the semiconductor material by minimizing vibration during vertical movement.

Next, the molten semiconductor may be crystallized (S150). The crystallization proceeds as the second heat source parts 400 and 400 ′ move up and down in the ring of the crucible 100 , and the heat exchange unit 500 and the second heat source unit positioned below the crucible 100 . (400, 400') may include the step of controlling the temperature of the lower portion of the crucible 100 together, and crystal growth of the molten semiconductor in the horizontal direction. In this case, when the second heat source parts 400 and 400 ′ move up and down in the ring of the crucible 100 , annealing for vertical crystallization of the molten semiconductor may be performed.

The vertical crystallization of the molten semiconductor material 610 for an appropriate temperature distribution for controlling the crystallization 630 rate can be achieved by providing the second heat source parts 400 and 400 ′ and the shield part 300 . In addition, the horizontal crystallization may be performed by the heat exchange unit 500 controlling the temperature of the lower portion of the crucible 100 together with the second heat source units 400 and 400 ′.

That is, the semiconductor ring manufacturing apparatus 10 , 10 ′ according to an embodiment of the present invention is a first heat source unit 200 after charging a solid silicon material into the forming frame member 130 of the donut-shaped crucible 100 . After melting the silicon material using a polycrystalline ingot growth method, it can be said that it is a manufacturing device for producing a crystalline semiconductor material by using the heat exchange unit 500, and the shield unit 300 together with the molten semiconductor material ( 610) has variability in installation according to the temperature state, and the second heat source parts 400 and 400' inside the ring-shaped crucible 100 rise and fall to prevent cracking while performing annealing for vertical crystallization, By performing heat exchange with the heat exchange unit 500 provided at the lower portion of the crucible 100 , crystal growth in the horizontal direction may be performed together with the second heat source units 400 and 400 ′.

The semiconductor ring manufacturing apparatus 10, 10' and the semiconductor ring manufacturing method using the same according to an embodiment of the present invention melt a solid semiconductor material by providing a replaceable ring-shaped crucible 100 and crystallize it to a desired thickness and shape. There is an advantage in that it is possible to shorten the processing steps and processing time of a single crystal or polycrystalline semiconductor material, and to reduce the loss of the semiconductor material by minimizing the processing of the semiconductor material.

In addition, the second heat source unit 400, 400' and the heat exchange unit 500 are provided to control the temperature gradient inside the crucible 100 to control horizontal crystal growth and vertical crystal growth, and crystallize the molten semiconductor material. There is an advantage in that it is possible to manufacture large-sized semiconductor products of improved quality by manufacturing them with crystalline semiconductors so that cracks do not occur by doing so.

Although the above has been described with reference to preferred embodiments of the present invention, those skilled in the art can variously modify and change the present invention within the scope without departing from the spirit and scope of the present invention as set forth in the claims below. You will understand that it can be done.

10, 10'; semiconductor ring manufacturing equipment
100; Crucible
110; molded support member
130; Forming frame member
200; first heat source
300; shield part
400, 400'; second heat source
500; heat exchanger
610; molten semiconductor material
630; crystallized semiconductor material

Claims (9)

a ring-shaped crucible loaded with a solid semiconductor material;
a first heat source located outside the crucible and melting the solid semiconductor material;
a shield part positioned between the first heat source part and the crucible;
a second heat source that moves up and down in the ring of the crucible; and
It includes a heat exchange unit located in the lower portion of the crucible,
After the semiconductor material is melted, the shield part blocks the first heat source part, the heat exchange part controls the temperature of the crucible, and crystallizes the molten semiconductor in a horizontal direction;
The crucible includes a forming support member having a ring-shaped trench with an open top, a forming frame member detachably coupled to the trench of the forming support member and charging the semiconductor material, and the forming support member and the forming frame member. A semiconductor ring manufacturing apparatus, comprising a crucible support member for supporting and maintaining a predetermined distance from the second heat source, wherein the inner surface of the receiving space of the mold member is coated with polysilazane.
The method of claim 1,
The second heat source unit, semiconductor ring manufacturing apparatus, characterized in that performing annealing for the vertical direction crystallization of the molten semiconductor.
delete The method of claim 1,
The crucible is a semiconductor ring manufacturing apparatus, characterized in that provided with quartz (quartz).
The method of claim 1,
The second heat source unit is provided in a ring shape corresponding to the inner surface of the crucible, or a semiconductor ring manufacturing apparatus, characterized in that it is provided in a rod shape positioned to have the same spacing as the inner surface of the crucible.
The method of claim 1,
The solid semiconductor material is a semiconductor ring manufacturing apparatus, characterized in that a polysilicon chip or a compound semiconductor material.
charging a solid semiconductor material into a ring-shaped crucible;
melting the solid semiconductor material by a first heat source located outside the crucible;
blocking the first heat source by a shield positioned between the first heat source and the crucible after the semiconductor material is melted; and
A second heat source part moves up and down inside the ring of the crucible, and controls the temperature of the crucible together with a heat exchange part located at the lower part of the crucible to crystallize the molten semiconductor in a horizontal direction,
The crucible includes a forming support member having a ring-shaped trench with an open top, a forming frame member detachably coupled to the trench of the forming support member and charging the semiconductor material, and the forming support member and the forming frame member. and a crucible support member for supporting and maintaining a predetermined distance from the second heat source,
Before charging the solid semiconductor material into the crucible, the semiconductor ring manufacturing method, characterized in that the polysilazane is coated on the inner surface of the receiving space of the molding member.
8. The method of claim 7,
The second heat source moving up and down inside the ring of the crucible is a semiconductor ring manufacturing method that performs annealing for vertical crystallization of the molten semiconductor.
8. The method of claim 7,
The solid semiconductor material is a semiconductor ring manufacturing method, characterized in that the polysilicon chip or compound semiconductor material.

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