KR102438287B1 - Pressure measuring cell and method for applying a measuring structure - Google Patents

Abstract

The invention relates to a pressure measuring cell (50) having a carrier (52) forming a measuring diaphragm (52.1) which deforms under the action of a pressure (P) to be detected, on which a measuring structure (55) ), the measuring structure 55 detects the deformation of the measuring diaphragm 52.1 and generates at least one electrical output signal indicative of the detected pressure P. The invention also relates to a method of providing a measuring structure ( 55 ), a measuring unit and a pressure sensor unit with said pressure measuring cell ( 50 ). In this case, the measuring structure 55 is printed on the carrier 52 .

Description

PRESSURE MEASURING CELL AND METHOD FOR APPLYING A MEASURING STRUCTURE

The invention relates to a method for providing a pressure measuring cell or measuring structure according to the preamble of the independent claims. A subject of the invention is also a measuring unit and a pressure sensor unit with said pressure measuring cell.

The prior art discloses a pressure sensor unit made of a number of components for pressure measurement. The conversion of pressure into an electrical signal is carried out by so-called pressure measuring cells. A measuring bridge, preferably a Wheatstone bridge, is provided on this pressure measuring cell by means of various thin film processes. The thin film process is very complex and costly, and must be carried out in a clean room in order for the thin films to be manufactured without inclusions, contamination or defects. For the thin film process, the surface of the pressure measuring cell must at least be ground.

DE 10 2014 221 365 A1 discloses a sensor unit comprising a measuring element embodied as a pressure measuring cell, a rotationally symmetrical sensor carrier and a circuit carrier and a corresponding pre-mounting assembly for the sensor unit. The measuring element is connected to the sensor carrier, the circuit carrier comprising an inner interface, said inner interface tapping at least one electrical output signal of the measuring element. The base body of the circuit carrier is embodied as a hollow cylinder with an inner junction structure, which matches the outer contour of the measuring element and surrounds the measuring element. Further, the base body of the circuit carrier is mechanically connected to the sensor carrier via a clip connection.

The object of the present invention is to manufacture a simple and economical pressure sensor.

A method of providing a pressure measuring cell comprising the features of the independent claim 1 and a measuring structure comprising the features of the independent claim 6 is a simple and economical method of using a pressure measuring cell that is manufactured simply and economically instead of a complex pressure measuring cell. It has the advantage that a pressure sensor can be manufactured. By replacing the expensive and complex thin film process with a simple printing of a resistance track on almost any surface, it can make a huge difference when the structure of a pressure measuring cell needs to be coated. In addition, the measuring structures can be printed on non-flat surface areas of the carrier in a desirable manner. This allows, for example, hydraulic and/or electrical connection structures to be integrated into the structure of the pressure measuring cell, so that the separation of the pressure measuring cell and the circuit carrier can be omitted. Also, multiple components may be integrated to form one part or pre-mount assembly. In a preferred manner, it is also possible to provide a measuring structure directly on the fluid block in which the pressure is to be measured. Since clean room conditions are not required for the printing process, the manufacturing costs for the pressure measuring cell and the corresponding measuring unit or pressure sensor unit with the pressure measuring cell can be further reduced.

Embodiments of the present invention provide a pressure measuring cell having a carrier forming a measuring diaphragm. The measuring diaphragm is deformed under the action of the pressure to be detected. A measuring structure is also provided on the carrier, said measuring structure detecting deformation of the measuring diaphragm and generating at least one electrical output signal indicative of the detected pressure. In this case, the measuring structure is printed on the carrier.

A method is also proposed for providing a measuring structure on a carrier of a pressure measuring cell. In this case, the surface of the carrier is cleaned and the measurement structure is printed on the surface of the carrier.

Preferably a non-contact printing system or printing process is used, for example an ink jet system or ink jet process which shoots ink droplets onto the surface of the carrier in order to print the measuring structure on the carrier. Instead of the normal printing ink, an ink (acetone/ethanol) containing a conductive material having a predetermined resistivity or conductivity, for example, metal particles and/or carbon particles is used. By the printing process, measurement structures having a corresponding structure can be printed, and the measurement structures have a predetermined surface resistance due to the conductive material contained therein.

For example, a continuous ink jet process using a nozzle plate having a plurality of nozzles and spraying ink droplets continuously at a high frequency in the direction of the surface to be printed may be used. The ink droplets are electrostatically charged upon ejection from the nozzle plate and are deflected by application of different currents. By this deflection, a desired measuring structure is formed on the surface to be printed. Unused or undeflected droplets are collected again and conveyed to the ink circuit. Also, a continuous aerosol jet process is used, in which ink droplets with a conductive material are atomized by ultrasonic waves or air turbulence. As an alternative, a Drop-on-Demand process is used which produces droplets having a predetermined size and sprays them individually in the direction of the surface to be printed. In a drop-on-demand process, ink with a conductive material is in a tank in the print head. Since a low pressure is established in the tank, the ink does not spontaneously discharge from the nozzle at the bottom of the head. The pressure is adjusted so that there is always a drop of ink in the nozzle. The nozzle chamber is reduced by suitable means, and droplets with conductive material are sprayed from the nozzle onto the surface to be printed, so that the desired measurement structure is formed. The advantage of this system is that the droplet size can be controlled. In addition, solvent-based inks with higher viscosities than in continuous ink jet processes can be used.

Also proposed is a measuring unit comprising said pressure measuring cell, a sensor carrier and a circuit carrier, formed as a pre-mounting assembly for a pressure sensor unit. The pressure measuring cell generates at least one electrical output signal indicative of a detected pressure and comprises at least one first contact point through which the at least one electrical output signal can be tapped. The pressure measuring cell is mechanically connected to a sensor carrier forming a fluid connection between the medium to be measured and the pressure measuring cell. The circuit carrier is mechanically connected to the sensor carrier, and at least one first contact point of the pressure measuring cell is electrically connected to at least one second contact point of the circuit carrier, the second contact point being an electronic device disposed on a printed circuit board. It may be connected to a third contact point of the circuit.

Preferably, a pressure measuring cell can be used in a pressure sensor unit with a protective sleeve, in which the pressure measuring cell, the circuit carrier and the connection and circuit device are arranged, said connection and circuit device being on the surface of the circuit carrier a printed circuit board arranged perpendicularly to the printed circuit board for supporting an electronic circuit having at least one electronic and/or electrical component, and a support unit comprising a base body having an outer contour and closing the protective sleeve. The pressure measuring cell is connected to a sensor carrier, said sensor carrier comprising a fixing flange with a connection area for a protective sleeve. The base body of the circuit carrier is mechanically connected to the sensor carrier and includes an internal interface. The internal interface taps at least one electrical output signal of the pressure measuring cell and applies it to the electronic circuit. The base body of the support unit forms an external interface with at least one electrical contact point through which at least one output signal of the electronic circuit can be tapped. At least one contact point is electrically connected to a corresponding contact point of the printed circuit board via an electrical connection.

By means of the measures set out in the dependent claims, the pressure measuring cell as set forth in claim 1 , the method of providing the measuring structure as set forth in claim 6 , the measuring unit as set forth in claim 10 and the pressure sensor unit as set forth in claim 19 . Desirable improvements are possible.

It is particularly advantageous if an insulating layer can be provided between the measuring structure and the surface of the carrier. The insulating layer can advantageously prevent unintentional short circuits between the parts of the measuring structure and facilitate the printing of the measuring structure. In addition, since a protective layer protecting the parts of the measuring structure from contamination and moisture is provided on the measuring structure, short circuits and electrochemical corrosion can be preferably prevented.

In a preferred embodiment of the pressure measuring cell, the measuring structure can comprise a measuring bridge and at least one first contact point through which at least one electrical output signal can be tapped. The measuring bridge may comprise a plurality of resistance tracks and line tracks, which line tracks may connect the resistance tracks and/or the at least one first contact point to each other in a circuit manner. The measuring bridge is preferably embodied as a Wheatstone bridge, the individual resistors of which may be serpentine.

In a preferred embodiment of the method for providing the measurement structure, the insulating layer and/or the protective layer may be provided by an atmospheric plasma process. This plasma process can preferably be integrated into a continuous mounting process, since no special requirements are placed on the environmental conditions.

In a preferred embodiment of the measuring unit, the carrier can be embodied, for example, as a deep drawing sleeve or as a disc or as a section of a fluid block. The sensor carrier can be embodied, for example, as a turning part comprising an axial inner bore, an annular fixing flange and at least one connection region, a first end of the inner bore being formed with a measuring connection and a second end of the inner bore being formed. is sealed by the measuring diaphragm of the pressure measuring cell. Furthermore, the carrier embodied as a deep-drawing sleeve and/or a disc can be connected in a fluid-tight manner to the sensor carrier.

In another preferred embodiment of the measuring unit, the carrier embodied as a disc is molded on the sensor carrier and is produced together with the sensor carrier in one step.

In another preferred embodiment of the measuring unit, the fluid block may form a sensor carrier and may comprise a bore which is sealed in a fluid-tight manner by a measuring diaphragm of the pressure measuring cell. In this embodiment, the measurement structure may be printed directly on the surface of the fluid block for which the pressure is to be measured.

In another preferred embodiment of the measuring unit, on the base body of the circuit carrier as an external bonding structure, two recesses for receiving the corresponding guide legs of the printed circuit board are formed, and at the edges of the recesses are each two conductive Regions may be disposed, the regions extending into the recess and each forming a second contact point. The base body of the circuit carrier can be embodied, for example, as a hollow cylinder with an inner junction structure, which matches the outer contour of the pressure measuring cell and surrounds the pressure measuring cell. In this case, the two conductive regions of each recess can further each form a bottom face, which can each be electrically connected to a corresponding first contact point of the pressure measuring cell via a bonding wire. As an alternative, the carrier of the pressure measuring cell, embodied as a disc or as a section of a fluid block, may form the base body of the circuit carrier. In this case, the first contact point of the pressure measuring cell can simply be connected via a line track to a corresponding second contact point of the circuit carrier. Due to this, the sensor carrier, the pressure measuring cell and the circuit carrier can be implemented as one component.

In another aspect, a pressure sensor unit has a measurement unit comprising a pressure measurement cell, a sensor carrier and a circuit carrier. Due to this, the base body of the printed circuit board can be coupled to the circuit carrier through a mechanical bonding structure, the bonding structure forming a recess on the base body of the printed circuit board, the recess having two opposing sides phase is each defined by guide legs, said guide legs being inserted in contact at least partially into corresponding recesses of the outer bonding structure of the circuit carrier.

Embodiments of the present invention are shown in the drawings and are described in detail below. In the drawings, like reference numbers indicate components or elements that perform the same or similar functions.

1 is a partial perspective view of a first embodiment of a pressure sensor unit according to the invention with a first embodiment of a pressure measuring cell according to the invention;
Fig. 2 is a perspective view of the pressure measuring cell of Fig. 1;
3 is a partial perspective view of a second embodiment of a pressure sensor unit according to the invention with a second embodiment of a pressure measuring cell according to the invention;
Fig. 4 is a perspective view of the measuring unit with the pressure measuring cell of Fig. 3;
5 is a partial perspective view of a third embodiment of a pressure sensor unit according to the invention without a protective sleeve and with a third embodiment of a pressure measuring cell according to the invention;
Fig. 6 is a perspective view of a lower part of the pressure sensor unit of Fig. 5;
7 is a perspective view of the measuring unit with the pressure measuring cell of FIGS. 5 and 6 ;
8 is a cross-sectional view of an embodiment of a pressure measuring cell according to the invention in the area of a measuring diaphragm;

1 to 8 , the illustrated embodiment of pressure measuring cells 50 , 50A, 50B and 50C comprises carriers 52 , 52A, 52B and 52C respectively forming a measuring diaphragm 52.1 . . The measuring diaphragm 52.1 deforms under the action of the pressure P to be detected. A measuring structure 55 is provided on the carrier 52 , which detects the deformation of the measuring diaphragm 52.1 and generates at least one electrical output signal indicative of the detected pressure P. In this case, the measuring structure 55 is printed on the carrier 52 .

1 to 8 , in the illustrated embodiment of the pressure measuring cell 50 , 50A, 50B, 50C an insulating layer 54 is provided between the measuring structure 55 and the surface of the carrier 52 . . In addition, a protective layer 57 is provided on the measuring structure 55 to protect it from contamination and moisture.

As shown in particular in FIGS. 2 , 4 and 7 , the measuring structure 55 in the illustrated embodiment comprises a measuring bridge 56 and four first contact points 56.3 through which at least one An electrical output signal may be tapped. The measuring bridge 56 is embodied as a Wheatstone bridge with four resistance tracks 56.1 meandering. In addition, the measuring structure 55 comprises a plurality of line tracks 56.2, which connect the resistance tracks 56.1 and/or the first contact points 56.3 to each other in a circuit manner, so , the function of the Wheatstone bridge is realized.

In a first step of the method of providing the measuring structure 55 on the carrier 52 of the pressure measuring cell 50 , the surface of the carrier 52 is cleaned. Then, the measurement structure 55 is printed on the surface of the carrier 52 . 8 , in the illustrated embodiment of the pressure measuring cell 50 , 50A, 50B, 50C according to the invention, the insulating layer 54 is applied to the carrier 52 before printing of the measuring structure 55 , as shown in particular in FIG. 8 . provided on a cleaned surface. Also, in the illustrated embodiment, a protective layer 57 is provided on the printed measurement structure 55 . Preferably the insulating layer 54 and/or the protective layer 57 is provided by an atmospheric plasma process.

1 to 8 , the pressure sensor units 1 , 1A, 1B and 1C each include a protective sleeve 20 in the illustrated embodiment, in which the pressure measuring cells 50 , 50A are respectively included. , 50B, 50C), circuit carriers 60 , 60A, 60B, 60C and connection and circuit arrangement 3 are arranged, said connection and circuit arrangement 3 comprising of circuit carriers 60 , 60A, 60B, 60C an electronic circuit comprising a printed circuit board (40) arranged perpendicular to the surface, and a support unit (30), said printed circuit board (40) having at least one electronic and/or electrical component (44.1, 44.2) (44) is supported. The support unit 30 comprises a base body 32 having an outer contour 37 and closes the protective sleeve 20 . The pressure measuring cells 50 , 50A, 50B, 50C are connected to a sensor carrier 10 , 10A, 10B, 10C, said sensor carrier 10 , 10A, 10B, 10C having a connection area for the protective sleeve 20 ( 16) with a fixing flange (12). The base bodies 62, 62A, 62B, 62C of the circuit carriers 60, 60A, 60B, 60C are mechanically connected to the sensor carriers 10, 10A, 10B, 10C, and internal interfaces 24A, 24B, 24C includes The internal interface 24A, 24B, 24C taps at least one electrical output signal of the pressure measuring cell 50 , 50A, 50B, 50C to apply to the electrical circuit 44 . The base body 32 of the support unit 30 forms an external interface 26 having at least one electrical contact point 34 , via which the at least one output signal of the electronic circuit 44 . can be tapped. At least one contact point 34 is connected to a corresponding contact point of the printed circuit board 40 via an electrical connection.

1 to 7 , the measuring units 9 , 9A, 9B, 9C are in the illustrated embodiment one pressure measuring cell 50 , 50A, 50B, 50C, respectively, a sensor carrier 10 , 10A, 10B, 10C) and circuit carriers 60, 60A, 60B, 60C, said circuit carriers 60, 60A, 60B, 60C forming a pre-mounting assembly for the pressure sensor unit 1 . The pressure measuring cell 50 , 50A, 50B, 50C generates at least one electrical output signal indicative of a detected pressure P and comprises at least one first contact point 65.3, through which at least one contact point is at least one electrical output signal. The electrical output signal of the can be tapped. The pressure measuring cells 50 , 50A, 50B, 50C are mechanically connected to a sensor carrier 10 , said sensor carrier 10 being the fluid between the medium to be measured and the pressure measuring cells 50 , 50A, 50B, 50C. form a connection. The circuit carrier 60 , 60A, 60B, 60C is mechanically connected to the sensor carrier 10 , 10A, 10B, 10C and at least one first contact point 56.3 of the pressure measuring cell 50 , 50A, 50B, 50C ) is electrically connected to at least one second contact point 66A, 66B, 66C of the circuit carrier 60, said second contact point 66A, 66B, 66C being in contact on the printed circuit board 40 connected to the third contact point 46 of the arranged electronic circuit 44 .

1 , 3 and 5 , the base body 41 of the printed circuit board 40 is coupled to the circuit carriers 60 , 60A, 60B, 60C via a mechanical bonding structure 42 , the The bonding structure 42 forms a recess 42.1 on the base body 41 of the printed circuit board 40, said recess 42.1 defined by guide legs 42.2 on two opposite sides, respectively. do. The guide legs 42.2 are inserted in contact, at least partially, into corresponding recesses of the outer bonding structures 64A, 64B, 64C of the circuit carriers 60 , 60A, 60B, 60C. 1 , 3 and 5 , the printed circuit board 40 comprises a contact surface in the region of the guide leg 42.2, said contact surface forming a third contact point 46 and a conductor track ( 42.3) to the electronic circuit 44 . The third contact point 46 is a corresponding second contact point 66A, 66B, 66C or an external bonding structure 64A on the base body 62, 62A, 62B, 62C of the circuit carrier 60, 60A, 60B, 60C; Together with the contact surfaces in the region of 64B, 64C form internal electrical interfaces 24A, 24B, 24C. The printed circuit board 40 is inserted into a recess or receiving pocket of the external bonding structure 64A, 64B, 64C on the base body 62, 62A, 62B, 62C of the circuit carrier 60, 60A, 60B, 60C and , by fixing therein optionally with a retaining adhesive and a conductive adhesive 7 , a conductive connection between the circuit carriers 60 , 60A, 60B, 60C and the printed circuit board 40 is ensured, the printed circuit board 40 this is fixed Retaining adhesive is provided, for example, on the base side of the recess or receiving pocket of the circuit carrier 60 , 60A, 60B, 60C, and the conductive adhesive is provided, for example, on the contact surface 46 of the printed circuit board 40 . do. Alternatively, the second contact points 66A, 66B, 66C can be implemented as spring resilient contact elements on the base body 62, 62A, 62B, 62C of the circuit carrier 60, 60A, 60B, 60C, The contact elements apply a force perpendicular to the insertion direction of the printed circuit board 40 to the contact surface 46 of the printed circuit board 40, while simultaneously having recesses or receiving pockets in the external bonding structures 64A, 64B, 64C. Since it holds the printed circuit board 40 inserted into it, the retaining adhesive and the conductive adhesive 7 on this point can be omitted. At the other end the base carrier 42 of the printed circuit board 40 has contact points not shown in detail, which contact points of the corresponding contact points of the base body 32 of the support unit 30 . The base body 32 of the support unit 30 comprises two shell halves 32.1 , 32.2 , the shell halves 32.1 , 32.2 being each embodied in the illustrated embodiment as a plastic injection-molded part, said Into the part, the contact points 34 of the external interface 26 and the lead frame forming the through connections and corresponding contact points are embedded.

1 and 2 , the carrier 52 of the pressure measuring cell 50A is embodied as a deep drawing sleeve 52A in the illustrated embodiment, on which a measuring structure 55 is printed. The sensor carrier 10A is embodied as a turning part with an axial inner bore, an annular fastening flange 12 and at least one connection area 16 . A measuring connection 18 is formed as a self-clinch-connection under the fixing flange 12 on the first end of the inner bore and can be pressed into or connected to a fluid block not shown in detail in FIGS. 1 and 2 . have. The second end of the inner bore is sealed by the measuring diaphragm 52.1 of the pressure measuring cell 50A. The deep drawing sleeve 52A is fluid-tightly connected to the sensor carrier 10A, preferably by a welded joint.

As shown in Fig. 1, the base body 62A of the circuit carrier 60A is embodied as a hollow cylinder having an inner junction structure 65A in the first embodiment shown, said inner junction structure comprising a pressure measuring cell 50A ) and surrounds the pressure measuring cell 50A. The base body 62A of the circuit carrier 60A is mechanically connected to the sensor carrier 10A via a clip connection. To form the clip connection, the sensor carrier 10A comprises a receiving groove 17 as a first clip structure, said receiving groove 17 being inserted into the fixing flange 12 of the sensor carrier 10A. The base body 62A of the circuit carrier 10A comprises a plurality of resilient locking arms 62.1 having a nose as a corresponding second clip structure, said noses being the sensor carrier 10A upon attachment of the circuit carrier 10A. is inserted in a locking manner into the receiving groove 17 of the After formation and alignment of the clip connection, the sensor carrier 10A is not twisted by the retaining adhesive 5 , which is provided on the support point between one of the locking arms 62.1 and the flange surface 14 . Two receiving pockets for receiving the corresponding guide legs 42.2 of the printed circuit board 40 are formed on the base body 62A of the circuit carrier 60A as external bonding structures 64A. Two conductive regions are each disposed on the edge of the receiving pocket, the regions extending into the receiving pocket and each defining a second contact point 66A. Additionally, the two conductive regions of each receiving pocket each form a bonding face 68A, each of which is a corresponding first contact point of the pressure measuring cell 50A via a bonding wire 58 . It is electrically connected to (56.1). As shown in FIG. 1 , the fixing flange 12 comprises a connecting region 16 formed as a step, on which a protective sleeve 20 is fitted. Additionally or alternatively, a protective sleeve 20 may be welded to the connection region 16 .

3 and 4 , the carrier 52 of the pressure measuring cell 50B is embodied as a metal disc 52B in the illustrated embodiment, on which a measuring structure 55 is printed. The sensor carrier 10B, similar to the first embodiment, is embodied as a turning part with an axial inner bore, an annular fastening flange 12 and at least one connection region 16 . On the first end of the inner bore, under the fixing flange 12, a measuring connection 18 is formed as a self-clinch connection and, similarly to the first embodiment, is pressed into a fluid block not shown in detail in FIGS. may be connected to the fluid block. The second end of the inner bore is sealed by the measuring diaphragm of the pressure measuring cell 50B. In the illustrated embodiment, the metal disc 52B is manufactured together with the sensor carrier 10B in one step, so that the metal disc 52 is fluid-tightly connected to the sensor carrier 10b.

3 and 4 , the carrier 52 of the pressure measuring cell 50B, embodied as a metal disc 52B, in the second embodiment shown is additionally the base body 62B of the circuit carrier 60B. ) to form Due to this, mounting steps can be saved. Printed circuit board 40, as external bonding structure 64B, on the base body 62B of the circuit carrier 60B or on the carrier 52 of the pressure measuring cell 50B, embodied as a metal disc 52 ), two recesses are formed for receiving the corresponding guide legs 42.2. At the edge of the recess are each disposed two conductive regions, the regions extending into the recess and each forming a second contact point 66B. Additionally, the second contact points 66B of the circuit carrier 60B are electrically connected via a line track 56.2 to the corresponding first contact points 56.1 of the pressure measuring cell 50B. In the inserted contact state, the guide legs 42.2 of the printed circuit board 40 are supported on the flange surface 14 . As shown in FIG. 3 , the fixing flange 12 comprises a connecting region 16 formed as a step, similar to the first embodiment, onto which a protective sleeve 20 is fitted. Additionally or alternatively, the protective sleeve 20 may be welded to the connection region 16 .

5 to 7 , the carrier 52 of the pressure measuring cell 50C is embodied in the illustrated embodiment as a section 52C of the fluid block 8 , on which the measuring structure is located. (55) is printed. Further, the section 52c of the fluid block 8 forms a sensor carrier 10C and comprises a fluid channel 8.1 which is fluidly sealed by the measuring diaphragm 52.1 of the pressure measuring cell 50C. sealed in a way

5 to 7 , the carrier 52 of the pressure measuring cell 50C embodied as a section 52C of the fluid block 8 is in addition to that of the circuit carrier 60C in the third embodiment shown. A base body 62C is formed. On the carrier 52 of the pressure measuring cell 50C embodied as section 52C of the fluid block 8 or on the base body 62C of the circuit carrier 60C, as an external bonding structure 64C, the fluid Two receiving pockets are formed for receiving the corresponding guide legs 42.2 of the printed circuit board 40 into the block 8 . Two conductive regions are each disposed on the edge of the receiving pocket, the regions extending into the recess and each defining a second contact point 66C. In addition, the two contact points 66C of the circuit carrier 60C are electrically connected via a line track 56.2 to a corresponding first contact point 56.1 of the pressure measuring cell 50C. In the inserted contact state, the guide legs 42.2 of the printed circuit board 40 are supported on the bottom of the receiving pocket. In addition, the carrier 52 of the pressure measuring cell 50C embodied as a section 52C of the fluid block 8 has a connection area not shown in detail over which the protective sleeve 20 is fitted. . Additionally or alternatively, the protective sleeve 20 may be welded to the connecting region.

9 measuring unit
10 sensor carrier
12 fixed flange
16 connection area
18 Measuring connection
24 internal interface
26 External Interface
30 support units
32 base body
40 printed circuit board
44 electronic circuit
46 third contact point
50 pressure measuring cell
52 carrier
52A deep drawing sleeve
52B Disc
52.1 Measuring Diaphragm
54 insulating layer
55 Measuring Structures
56 Measuring Bridge
56.1 Resistance track
56.3 First point of contact
57 protective layer
60 circuit carrier
62 base body
64 External junction structure
65A internal junction structure
66 second contact point

Claims (20)

A pressure measuring cell (50) having a carrier (52) forming a measuring diaphragm (52.1) which is deformed under the action of a pressure (P) to be detected, on which a measuring structure (55) is provided, wherein the measuring structure detects a deformation of the measuring diaphragm (52.1) and generates at least one electrical output signal indicative of the detected pressure (P),
A pressure measuring cell, characterized in that the measuring structure (55) is printed on the carrier (52). The pressure measuring cell according to claim 1, characterized in that an insulating layer (54) is provided between the measuring structure (55) and the surface of the carrier (52). 3. A pressure measuring cell according to claim 1 or 2, characterized in that a protective layer (57) is provided on the measuring structure (55). 3. The measuring structure (55) according to any one of the preceding claims, wherein the measuring structure (55) comprises a measuring bridge (56) and at least one first contact point (56.3), through which the at least one electrical contact point (56.3) is connected. A pressure measuring cell, characterized in that the output signal can be tapped. 5. The measuring bridge (56) according to claim 4, wherein the measuring bridge (56) comprises a plurality of resistance tracks (56.1) and line tracks (56.2), the line tracks (56.2) comprising the resistance tracks (56.1) and/or the A pressure measuring cell, characterized in that at least one first contact point (56.3) is connected to each other in a circuit manner. A method of providing a measuring structure (55) on a carrier (52) of a pressure measuring cell (50), wherein the surface of the carrier (52) is cleaned, the method of providing the measuring structure,
Method of providing a measuring structure, characterized in that the measuring structure (55) is printed on the surface of the carrier (52). Method according to claim 6, characterized in that an insulating layer (54) is applied on the cleaned surface of the carrier (52) before printing of the measuring structure (55). Method according to claim 7, characterized in that a protective layer (57) is provided on the printed measuring structure (55). 9. Method according to claim 8, characterized in that the insulating layer (54) and/or the protective layer (57) is provided by an atmospheric plasma process. A measuring unit (9) comprising a pressure measuring cell (50), a sensor carrier (10) and a circuit carrier (60), said pressure measuring cell (50) having at least one electrical output signal indicative of a detected pressure (P) and comprises at least one first contact point (56.3) through which the at least one electrical output signal can be tapped, the pressure measuring cell (50) being the sensor carrier Mechanically connected to 10 , the sensor carrier 10 forms a fluid connection between the medium to be measured and the pressure measuring cell 50 , and the circuit carrier 60 is mechanically connected to the sensor carrier 10 . wherein said at least one first contact point (56.3) of said pressure measuring cell (50) is electrically connected to said at least one second contact point (66A, 66B, 66C) of said circuit carrier (60), said A second contact point (66A, 66B, 66C) can be connected to a third contact point (46) of an electronic circuit (44) arranged on a printed circuit board (40), wherein:
The measuring unit (9) forms a pre-mounted assembly for the pressure sensor unit (1), wherein the pressure measuring cell (50) is embodied according to claim 1 . 11. Measuring unit according to claim 10, characterized in that the carrier (52) is embodied as a deep drawing sleeve (52A) or as a disc (52B) or as a section (52C) of the fluid block (8). 12. The sensor carrier (10A, 10B) according to claim 11, wherein the sensor carrier (10A, 10B) is embodied as a turning part comprising an axial inner bore, an annular fastening flange (12) and at least one connecting region (16), a first end of the inner bore Measuring unit, characterized in that it is formed with a measuring connection (18), the second end of the inner bore being sealed by the measuring diaphragm (52.1) of the pressure measuring cell (50A, 50B). 13. Measuring unit according to claim 12, characterized in that the deep drawing sleeve (52A) and/or the disc (52B) is connected in a fluid-tight manner to the sensor carrier (10A, 10B). 14. Measuring unit according to claim 13, characterized in that the carrier (52) embodied as a disc (52B) is molded into the sensor carrier (10B). 12. The fluid block (8) according to claim 11, wherein said fluid block (8) forms a sensor carrier (10C) and comprises a fluid channel (8.1), said fluid channel being fluidized by a measuring diaphragm (52.1) of said pressure measuring cell (50). Measuring unit, characterized in that it is sealed in a hermetic manner. 11. The method of claim 10, wherein on the base body (62) of the circuit carrier (60) as an external bonding structure (64) there are two recesses for receiving the corresponding guide legs (42.4) of the printed circuit board (40). formed, and at an edge of said recess, each of said two conductive regions being arranged, said conductive regions extending into said recess and each forming a second contact point (66). 17. The device according to claim 16, wherein the base body (62A) of the circuit carrier (60A) is embodied as a hollow cylinder with an inner junction structure (65A), the inner junction structure matching the outer contour of the pressure measuring cell (50A). and surrounds the pressure measuring cell 50A, the two conductive regions of each recess further each forming a bottom face 68A, each of the bottom faces 68A being connected via a bonding wire 58 to each other. Measuring unit, characterized in that it is electrically connected to the corresponding first contact point (56.1) of the pressure measuring cell (50). 18. A carrier (52) according to claim 17, embodied as a disc (52B) or as a section (52C) of a fluid block (8), wherein the carrier (52) of the pressure measuring cell (50) is a base body ( 62B, 62C, wherein the first contact point 56.1 of the pressure measuring cell 50B, 50C is connected via a line track 56.2 to the corresponding second contact point 66B, 66C of the circuit carrier 60B, 60C ), which is electrically connected to the measuring unit. A pressure sensor unit (1) with a protective sleeve (20), in which a pressure measuring cell (50), a circuit carrier (60) and a connection and circuit arrangement (3) are arranged, said The connection and circuit arrangement 3 is arranged perpendicular to the surface of the circuit carrier 60 and supports an electronic circuit 44 having at least one electronic and/or electrical component 44.1 , 44.2 printed circuit board ( 40 ), and a support unit ( 30 ) comprising a base body ( 32 ) having an outer contour ( 37 ) and closing said protective sleeve ( 20 ), said pressure measuring cell ( 50 ) comprising a sensor carrier ( 10 ) connected to, the sensor carrier (10) comprising a fixing flange (12) having a connection area (16) for the protective sleeve (20), the base body (62) of the circuit carrier (60) being the sensor carrier mechanically connected to (10) and comprising an internal interface (24) for tapping and applying at least one electrical output signal of the pressure measuring cell (50) to an electronic circuit (44); The base body 32 of the support unit 30 forms an external interface 26 having at least one electrical contact point 34 through which at least one output signal of the electronic circuit 44 is transmitted. wherein the at least one contact point (34) is electrically connected to a corresponding contact point of the printed circuit board (40) via an electrical connection, the pressure sensor unit comprising:
The pressure sensor unit, characterized in that the pressure measuring cell (50) is formed according to claim 1 or 2. 20. The pressure measuring cell (50), the sensor carrier (10) and the circuit carrier (60) according to claim 19, wherein the measuring unit (9) according to claim 10 is formed, The base body 41 is coupled to the circuit carrier 60 via a mechanical bonding structure 42 , the bonding structure 42 having a recess on the base body 41 of the printed circuit board 40 ( 42.1), the recess 42.1 being defined by guide legs 42.2 on two opposite sides, respectively, the guide legs 42.2 being in contact with the outer bonding structure of the circuit carrier 60 ( A pressure sensor unit, characterized in that it is inserted at least partially into the corresponding recess of 64).

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