KR102409976B1 - Apparatus for cleaning chamber in roll-to-roll processing - Google Patents

Abstract

The present invention relates to a roll-to-roll process chamber purifying apparatus, a chamber 200 in which a deposition process is performed, a gas injection unit 210 for injecting gas into the chamber 200, and is disposed inside the chamber 200, , an injection head 220 for injecting gas from the gas injection unit 210, a water tank 230 for collecting particles from the chamber 200, and a water tank 230 connected to the chamber 200 It is connected to the upper layer and includes a first filter 240 for filtering the gas located in the upper layer, and a first blower 250 for introducing the filtered gas into the chamber 200, and also A second filter 410 is included to remove the particles collected in the lower layer, and a circulation structure is formed so that the liquid that has passed through the second filter 410 flows back into the water tank 230 . It is possible to remove suspended matter by inducing a descending flow of suspended particles existing inside the chamber with the airflow flow according to the deviation.

Description

ROLL-TO-ROLL PROCESSING {APPARATUS FOR CLEANING CHAMBER IN ROLL-TO-ROLL PROCESSING}

The present invention relates to a roll-to-roll process chamber purification apparatus, and more particularly, to a roll-to-roll process chamber purification apparatus for removing particles floating inside the chamber during a roll-to-roll process.

The roll-to-roll method is applied to the production line of major parts including printed circuit boards (PCBs). It is a method that is wound on a rotating roll as it is without cutting. It can be applied to various materials as well as increased production. is becoming

The roll-to-roll process by such a roll-to-roll method is a process of moving a film wound in a roll shape in a chamber and depositing a desired organic or inorganic material thereon. is being used

Recently, attempts have been made to fabricate a flexible display using such a roll-to-roll process.

However, during the film deposition process through the roll-to-rule process chamber, due to the particles generated inside the chamber, there is a problem in the reliability of the product, such as not being uniformly deposited, so the chamber structure in which such particle control is not performed Limitations are pointed out in obtaining a high-quality roll-to-roll deposition film.

In addition, even when trying to control the particles generated inside the chamber, there were problems in that the process had to be performed only in a specific clean room, which caused difficulties in the roll-to-rule process equipment and increased manufacturing cost.

The present invention is to solve the above-mentioned problems, and to control the particles generated in the roll-to-roll process chamber without equipment such as a specific clean room in the roll-to-roll process.

Another aspect of the present invention is to provide a process chamber for efficiently removing particles floating in the chamber by providing an apparatus for removing particles in the roll-to-roll process chamber.

The object of the present invention is not limited to the above description, and other objects may be included from the description below.

In order to achieve the above object, a roll-to-roll process chamber purifying apparatus according to an embodiment of the present invention includes a chamber in which a deposition process is performed, a gas injection unit for injecting gas into the chamber, and is disposed inside the chamber, A jet head for spraying gas from the gas injection unit, a water tank connected to the chamber and collecting particles from the chamber, a first filter connected to the upper layer of the water tank, and filtering the gas located in the upper layer, and a first blower for introducing the filtered gas into the chamber.

Another embodiment of the present invention for achieving the above object includes a second filter for filtering the particles collected inside the water tank and a second blower for allowing the particles to flow into the second filter from the water tank.

In another embodiment of the present invention for achieving the above object, an electrostatic precipitator for generating static electricity is disposed on the side of the chamber, and the injection head includes a structure for spraying more gas from an upper portion of the electrostatic precipitator. .

In addition, the roll-to-roll process chamber purifying apparatus according to another embodiment of the present invention for achieving the above object includes a control unit for controlling gas injection, wherein the control unit performs the deposition process inside the chamber before the process proceeds. Purification of the roll-to-roll process chamber that automatically controls the gas injection without a special operation of the gas injection for the removal of particles by the operator by automatically injecting gas into the chamber at at least one time point during and after the process making it happen

By the roll-to-roll process chamber purification apparatus according to the present invention, it is possible to induce a downflow of suspended particles existing inside the chamber with an airflow according to a temperature deviation inside the chamber, and the particles are located in the lower part of the chamber by using the airflow. It can be guided to a water tank, and the particles inside the tank can be collected in contact with water at a high speed, thereby preventing the particles from affecting the deposition process.

In addition, the clean air collected in the upper part of the water tank is discharged to the upper part and recirculated back into the chamber, thereby reducing chamber control management and gas consumption.

In the roll-to-roll process chamber purification apparatus according to the present invention, the particles collected inside the water tank are filtered through a membrane filter, and the water tank is filled with clean water again, thereby improving the efficiency of particle removal.

The roll-to-roll process chamber purifying apparatus according to the present invention has an advantage in that the efficiency of particle removal can be always increased by additionally disposing an electric dust collector inside the chamber and differentiating the injection of gas from the upper portion of the electric dust collector.

The roll-to-roll process chamber purifying apparatus according to the present invention enables automatic particle control before, after, or during the deposition process without the operator special manipulation of gas injection to remove particles, thereby efficiently removing particles There are advantages to getting the job done.

On the other hand, various other effects will be disclosed directly or implicitly in the detailed description according to the embodiment of the present invention to be described later.

1 is a schematic cross-sectional view showing a deposition process.
2 is a cross-sectional view illustrating a purification apparatus for a roll-to-roll process chamber according to the present invention.
3 is a view referenced to explain the operation of the roll-to-roll process chamber purification apparatus according to the present invention.
Figure 4 is a view showing the configuration of the particle removal inside the water tank according to an embodiment of the present invention.
5 is a view showing a configuration in which an electric dust collector is installed in a water tank according to an embodiment of the present invention.
6 is a block diagram illustrating a configuration for driving a chamber according to an embodiment of the present invention.

The suffix "part" for the components used in the following description is given simply in consideration of the ease of writing the present specification, and does not impart a particularly important meaning or role by itself.

Hereinafter, the embodiments disclosed in the present specification will be described in detail with reference to the accompanying drawings, but the same or similar components are assigned the same reference numbers regardless of reference numerals, and redundant description thereof will be omitted. In addition, in describing the embodiments disclosed in the present specification, if it is determined that detailed descriptions of related known technologies may obscure the gist of the embodiments disclosed in the present specification, the detailed description thereof will be omitted. In addition, the accompanying drawings are only for easy understanding of the embodiments disclosed in the present specification, and the technical spirit disclosed herein is not limited by the accompanying drawings, and all changes included in the spirit and scope of the present invention , should be understood to include equivalents or substitutes.

1 is a schematic cross-sectional view showing a deposition process.

Referring to the drawings, the roll-to-roll chamber sprays a chamber 100 in which a deposition process is performed, a wheel 110 supporting a deposition target material such as a substrate, and an organic or inorganic material to be deposited on the deposition target material. and a deposition head 120 .

When the deposition process is performed through the roll-to-roll chamber, the deposition target material wound on the wheel 110 is transferred into the chamber 100 by driving the wheel 110, and the transferred deposition target material The deposition is carried out by spraying an organic or inorganic material to be deposited through the deposition head 120 .

2 is a cross-sectional view illustrating a purification apparatus for a roll-to-roll process chamber according to the present invention.

Referring to FIG. 2 , an apparatus for purifying a roll-to-roll process chamber according to the present invention includes a chamber 200 in which a deposition process is performed, a gas injection unit 210 for injecting gas into the chamber 200 , and the chamber 200 . ) disposed inside, the injection head 220 for injecting gas from the gas injection unit 210, is connected to the chamber 200, and a water tank 230 for collecting particles from the chamber 200 , a first filter 240 that is connected to the upper part of the water tank 230 and filters the gas located in the upper part, and a first blower 250 that introduces the filtered gas into the chamber 200. may include

In the present specification, the term chamber 200 may not mean only the chamber 100 in which the deposition process is generally performed, and the configuration including the purifier as in the entire drawing including FIG. 2 is used as the chamber 200 . Let's make it clear that we can call it. That is, in FIG. 2 , the chamber 200 indicates the chamber 100 in which the deposition process is performed for convenience of understanding, but at least some components or all of the purification apparatus of the roll-to-roll process chamber of the present invention including FIG. 2 . It should be noted that the configuration may be combined with the chamber 100 to constitute the chamber 100 .

An example of the gas injected into the chamber 200 from the gas injection unit 210 may be air, oxygen, or nitrogen, but is not limited thereto.

As an embodiment of the installation of the gas injection unit 210 , it may be arranged to be spaced apart from the chamber 200 , and the gas from the gas injection unit 210 may be transmitted into the chamber 200 through a pipe.

As another embodiment of the installation of the gas injection unit 210 , it may be mounted on one side of the chamber 200 , and in this case, it may be installed on the upper portion of the chamber 200 .

In a specific embodiment to be installed, a groove is formed inside the chamber 200 so that the gas injection unit 210 is entirely or partially embedded in the groove, and the gas injection unit For the fixing of the 210, it can be fixed using a fixing unit such as a screw, or it can be mounted without a fixing unit, and the sphere installation type is not limited thereto.

The gas injected from the gas injection unit 210 is injected into the chamber 200 through the injection head 220 .

The temperature of the gas injected into the chamber 200 may be lower than the temperature inside the chamber 200 .

The injection head 220 may be disposed on the inner upper side of the chamber 200 .

Because a gas lower than the temperature inside the chamber 200 is injected through the upper side of the chamber 200, the temperature of the upper part of the chamber 200 is controlled, and the airflow flow according to the temperature deviation inside the chamber 200 It is possible to induce a descending flow of suspended particles present in the chamber 2000 without a separate device.

That is, it is possible to guide the particles to the water tank 23 connected to the lower part of the chamber by using the airflow flow according to the temperature deviation inside the chamber 200 .

The injection head 220 may be formed in a hole type structure so that the injected gas is evenly injected, but is not limited thereto.

As an example of the hole type structure, a single hole may be formed, or a plurality of holes may be formed in a predetermined cross-section to have the same size, and the gas may be uniformly sprayed throughout the cross-section, and the cross-sectional shape and the hole shape are circular , may include a rectangle, but is not limited thereto.

In addition, the injection head 220 may be formed so that more gas is injected into the central portion or both ends of the cross-section. In this case, when the gas is injected through a plurality of holes, the size of the hole may not be constant.

In order to efficiently guide the particles inside the chamber 200 to the water tank 230 , the lower side of the inside of the chamber 200 may be formed to have a narrower width in the lower direction to induce gas or particles.

In this case, the chamber 200 may have a shape that is gradually narrowed from the upper side to the lower side, and a certain length is vertical from the upper side in the vertical direction, and the width becomes narrower toward the lower side only in the remaining length. may have, but is not limited thereto.

The chamber 200 may be connected to the water tank 230 through a through hole 260 formed in the bottom, and a gas containing particles induced to the lower side of the chamber 200 through the through hole 260 is stored in the water tank ( 230) to lead.

The water tank 230 may be disposed in contact with the through hole 260 and may be connected through a pipe, and the sphere installation form is not limited thereto.

The water tank 230 may include a liquid for particle adsorption in order to collect and remove particles derived from the chamber 200 , and the liquid includes water, and a specific embodiment is not limited thereto.

The water tank 230 contains gas and particles derived from the chamber 200, and the gas is located in the upper layer of the water tank 230, and the particles are collected in the liquid in the lower layer, thereby collecting and separating particles. becomes possible

The gas located in the water tank 230 may be delivered to the first filter, and as a specific embodiment, the first filter is disposed on the upper part of the water tank 230 or the upper part of the water tank 23) and the second filter One filter is connected to the pipe, and the clean gas located in the upper part of the water tank 230 is filtered by the first filter 240 .

The first filter includes, but is not limited to, a H2O filter.

The clean gas filtered by the first filter 240 can be introduced back into the chamber 200 by the first blower 250 .

The first blower 250 may be configured to be coupled to the second filter or configured to be spaced apart, and the specific configuration is not limited thereto.

3 is a view showing the operation of the roll-to-roll process chamber purification apparatus according to the present invention.

Referring to FIG. 3 , FIG. 3A shows that the gas injected from the gas injection unit 210 is injected into the chamber 200 through the injection head 220 .

Although FIG. 3A shows that the injected gas is uniformly injected from the upper portion of the chamber 200, the injection type is not limited thereto.

In FIG. 3B , because a gas lower than the temperature inside the chamber 200 is injected through the upper side of the chamber 200, an airflow according to the temperature deviation inside the chamber 200 occurs, It shows a process in which the particles 340 are guided to the water tank 230 connected to the lower part of the chamber.

3C shows that the gas and particles 340 directed to the water tank 230 are located within the water tank 230 .

Among the gas and particles induced to the water tank 230, the gas is located in the upper layer 310 of the water tank 230, and the gas located in the upper layer 310 is a clean gas state that does not contain particles, After being filtered by the first filter 240, the filtered clean gas is introduced into the chamber 200 again by the first blower 250,

Particles are collected in the liquid 330 of the lower layer 320 , so that the collected particles are easily removed.

4 is a view showing a configuration of removing particles inside the water tank according to an embodiment of the present invention.

Referring to FIG. 4 , it shows a configuration including a second filter 410 to remove particles collected in the lower layer 320 of the water tank 230 , and an example of the second filter 410 is Membrane filters include, but are not limited to.

The second filter 410 may be disposed to be spaced apart from the lower part 320 of the water tank 230 by a pipe.

In the case of being connected by a pipe, it is preferable to form a circulation structure so that the liquid that has passed through the second filter 410 flows back into the water tank 230 , but the present invention is not limited thereto.

As another embodiment, the second filter 410 may be mounted to be located in the lower layer 320 of the water tank 230,

In this case, it is preferable that the second filter 410 is detachably installed in the water tank 230 .

A second blower 420 may be disposed before or after the second filter 410, and the second blower 420 may be configured to be coupled to the second filter or configured to be spaced apart. It is not limited to this.

As described above, the particles collected inside the water tank 230 are filtered through the second filter 410, and the water tank 230 can be circulated again with clean water.

5 is a view showing a configuration in which the electric dust collecting unit 510 is installed in the water tank according to an embodiment of the present invention.

At least one electrostatic precipitator 510 may be disposed inside the chamber 200 , and may be disposed on one side of the inside of the chamber 200 .

Referring to FIG. 5 , the battery dust collecting unit 510 according to the embodiment is shown to be disposed on both sides of the inside of the chamber 200 .

The electrostatic precipitator 510 is disposed on the side surface of the chamber 200 to generate static electricity, and the generated static electricity causes the particles to attach to the electrostatic precipitator, thereby removing the particles.

When the electrostatic precipitator 510 is mounted inside the chamber 200 , the injection head 220 disposed in the chamber 200 may be formed to inject more gas from the upper portion of the electrostatic precipitator 410 . .

The shape of the cross-section of the injection head 220 to which the gas is injected may include, but is not limited to, a circle or a rectangle, and the shape of the outlet through which the gas is injected may have a hole-type structure, but is not limited thereto, and the hole is not limited thereto. Formed in plurality, more holes or larger holes may be disposed on the upper portion of the electric dust collecting unit 410, and in the case of one hole, the outlet at the upper portion of the electric dust collecting unit 410 is larger. may be formed, but is not limited thereto.

6 is a block diagram showing a configuration for driving a chamber according to an embodiment of the present invention.

Referring to FIG. 6 , an input unit 610 for receiving a command to proceed and terminate a roll-to-roll process, and according to an input from the input unit, control the operation of the chamber 200 and, according to an embodiment of the present invention It may include a control unit 620 for controlling the driving of the chamber purification apparatus, and an output unit 630 for notifying whether the purification apparatus is driven or not according to the control of the control unit.

The input unit 610 is a component for receiving commands required to drive the chamber purification apparatus according to an embodiment of the present invention as well as the progress and end commands of the roll-to-roll process from the operator, and a button-type key structure, touch screen, voice Recognition, remote control, and the like include embodiments, and are not limited to a specific configuration and method as long as it is a configuration for receiving an operator's command.

The control unit 620 controls the operation of the chamber 200 according to the input from the input unit 610 and also controls the operation of the chamber purification apparatus according to the embodiment of the present invention.

An embodiment of driving the chamber purification apparatus according to the present invention may include controlling the driving of the gas injection unit 210 to inject gas into the chamber 200 , and as another embodiment, the first blower ( 250) or the second blower 420 may be controlled.

According to an embodiment of the present invention, when there is a command to start the roll-to-roll process from the input unit 610 , the control unit 620 may control the gas injection unit to be driven together with the start of the deposition process of the chamber.

According to another embodiment of the present invention, the control unit 620 detects whether the start and end commands of the roll-to-roll process are input from the input unit 610, and when there is the start or end command, the chamber purification apparatus according to the present invention Even when a command for driving is not input, it is possible to control to automatically drive the chamber purification apparatus according to the embodiment of the present invention before or after the deposition process inside the chamber 200 starts or ends.

In the case of automatically controlling the operation as described above, it can be controlled to drive only a predetermined time before or after the deposition process is started, and when the chamber purifying device is driven before the deposition process starts, even during the deposition process You can control it to run continuously.

When the chamber purifying apparatus according to an embodiment of the present invention is driven, the controller 620 may transmit a signal for informing whether to drive it to the output unit 620 .

According to the above embodiment, only when controlling to automatically drive the chamber purification apparatus according to the embodiment of the present invention, a signal indicating whether to drive can be transmitted to the output unit 620, and as another embodiment, the operator's command By this, a signal different from the case of driving the chamber purification apparatus according to the embodiment of the present invention may be transmitted to the output unit 620 .

When there is a signal for driving the chamber purification apparatus according to an embodiment of the present invention from the control unit, the output unit 630 may output it through an audio or visual display unit, and the output method and the output unit are not limited thereto.

As described above, the roll-to-roll process chamber purification apparatus according to the present invention induces a descending flow of suspended particles in the air according to the temperature deviation inside the chamber, effectively removing suspended matter, and circulating after filtering. By configuring the system, it is possible to perform the deposition process of films, substrates, etc. inside the chamber in which cleanliness is maintained.

In addition, the above detailed description should not be construed as restrictive in all respects but as exemplary. The scope of the present invention should be determined by a reasonable interpretation of the appended claims, and all modifications within the equivalent scope of the present invention are included in the scope of the present invention.

200: chamber 210: gas injection part
220: jet head 230: water tank
240: first filter 250: first blower
260: through hole 310: upper part
320: lower layer 330: liquid
340: particle 410: second filter
420: second blower 510: electric dust collector
610: input unit 620: control unit
630: output unit

Claims (14)

chamber;
a gas injection unit for injecting gas into the chamber;
an injection head for injecting gas from the gas injection unit;
a water tank connected to the chamber and collecting particles from the chamber;
a first filter connected to the upper part of the water tank and filtering the gas located in the upper part; and
a first blower for introducing the filtered gas into the chamber;
A roll-to-roll process chamber purification apparatus including a; a second filter connected to the lower layer of the water tank and filtering particles located in the lower layer. delete According to claim 1,
The roll-to-roll process chamber purification apparatus further comprising a second blower for allowing particles located in the lower layer to flow into the second filter. According to claim 1,
The gas injected into the chamber is a roll-to-roll process chamber purification apparatus, characterized in that air or nitrogen. 5. The method of claim 4,
The gas is a roll-to-roll process chamber purification apparatus, characterized in that the temperature is lower than the temperature in the chamber. According to claim 1,
The injection head is a roll-to-roll process chamber purification apparatus including at least one hole through which the gas is injected. The method of claim 1,
A roll-to-roll process chamber purifying apparatus disposed inside the chamber and further comprising a third filter configured to filter particles in the chamber. According to claim 1,
A roll-to-roll process chamber purification apparatus disposed on a side surface of the chamber and further comprising an electric dust collector for generating static electricity. 9. The method of claim 8,
The injection head includes a plurality of holes through which gas is injected, and more holes are disposed on an upper portion of the electrostatic precipitator or the hole is larger in size. According to claim 1,
The chamber is a roll-to-roll process chamber purification apparatus, characterized in that it has a shape that becomes narrower from the top to the bottom. According to claim 1,
an input unit for receiving a process operation start or end operation command;
and a control unit configured to control the driving of the gas injection unit by detecting whether a start or end command of the roll-to-roll process is input from the input unit. 12. The method of claim 11,
The control unit is
When there is a command to start or end the roll-to-roll process from the input unit, the roll-to-roll process chamber purifying apparatus, characterized in that the gas injection unit is controlled to be driven for a predetermined time before or after the deposition process of the chamber is started or ended. 12. The method of claim 11,
The control unit is
When there is a command to start the roll-to-roll process from the input unit, the apparatus for purifying a roll-to-roll process chamber, characterized in that it controls the gas injection unit to be driven together with the start of the deposition process of the chamber. 12. The method of claim 11,
and an output unit notifying whether or not gas is injected into the chamber according to a signal from the control unit as to whether the gas injection unit is driven.

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